EP2930363A1 - Piezoelektrische Pumpe und unter Druck gesetzte Schaltung damit - Google Patents

Piezoelektrische Pumpe und unter Druck gesetzte Schaltung damit Download PDF

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Publication number
EP2930363A1
EP2930363A1 EP14164209.0A EP14164209A EP2930363A1 EP 2930363 A1 EP2930363 A1 EP 2930363A1 EP 14164209 A EP14164209 A EP 14164209A EP 2930363 A1 EP2930363 A1 EP 2930363A1
Authority
EP
European Patent Office
Prior art keywords
pump
piezo
piezo pump
chamber
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14164209.0A
Other languages
English (en)
French (fr)
Other versions
EP2930363B1 (de
Inventor
Johannes Van Es
Wessel Willems Wits
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Twente Universiteit
Stichting Nationaal Lucht en Ruimtevaart Laboratorium
Original Assignee
Twente Universiteit
Stichting Nationaal Lucht en Ruimtevaart Laboratorium
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Twente Universiteit, Stichting Nationaal Lucht en Ruimtevaart Laboratorium filed Critical Twente Universiteit
Priority to DK14164209.0T priority Critical patent/DK2930363T3/da
Priority to EP14164209.0A priority patent/EP2930363B1/de
Priority to LTEP14164209.0T priority patent/LT2930363T/lt
Priority to US14/682,777 priority patent/US20150292497A1/en
Publication of EP2930363A1 publication Critical patent/EP2930363A1/de
Application granted granted Critical
Publication of EP2930363B1 publication Critical patent/EP2930363B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/04—Combinations of two or more pumps
    • F04B23/06—Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Definitions

  • the invention relates to the field of piezo pumps for use in a pressurised circuit, comprising a pump chamber with an inlet provided with a one way inlet valve, for connection to a feeding line of the pressurised circuit and an outlet provided with a one way outlet valve, for connection to a discharge line of the pressurised circuit and a piezo pump diaphragm closing one end of the pump chamber.
  • the piezo pump diaphragm is the driving element which, when connected to an alternate current, vibrates for alternatingly sucking fluid through the one way inlet valve into the pump chamber and forcing the fluid through the one way outlet valve out of the pump chamber.
  • the piezo pump in accordance with the present invention is characterized in that a pressure chamber is defined at the side of the piezo pump diaphragm facing away from the pump chamber, wherein said pressure chamber is connected to a pressure source.
  • the pressure in the pressure chamber at least partially compensates the pressure in the pump chamber, as a result of which the pressure difference over the piezo pump diaphragm is reduced and, consequently, the forces acting on the piezo pump diaphragm are reduced. This will substantially reduce the risk of leakages.
  • the pressure source is defined by the feeding line which is connected to the pressure chamber via a pressure line.
  • the pressure source may be defined by a pressurised vessel (or an equivalent pressure source).
  • the invention also relates to a piezo pump assembly comprising at least two piezo pumps connected to each other in series, wherein the outlet of a previous piezo pump is connected to the inlet of a following piezo pump. This allows to achieve an increased pressure difference.
  • the pressure source of at least the first piezo pump is defined by the feeding line and wherein the pressure source of at least the last piezo pump is defined by the discharge line which is connected to the pressure chamber of said last piezo pump via an additional pressure line.
  • the feeding line acts as a pressure source for the pressure chamber to which it is connected.
  • the discharge line acts as a pressure source for the pressure chamber to which it is connected.
  • the pressure chamber of the first piezo pump will be connected to the feeding line and the pressure chamber of the second piezo pump will be connected to the discharge line.
  • the piezo pump in a special embodiment of the piezo pump according to the present invention it comprises an additional pump chamber at the side of the piezo pump diaphragm opposite the pump chamber, which additional pump chamber likewise is provided with an inlet provided with a one way inlet valve, for connection to the feeding line of the pressurised circuit and an outlet provided with a one way outlet valve, for connection to the discharge line of the pressurised circuit, wherein the piezo pump diaphragm is common for both the pump chamber and the additional pump chamber and wherein the additional pump chamber acts as the pressure chamber.
  • the additional pump chamber not only acts as the pressure chamber, but also helps in pumping the fluid, thus increasing the delivery of the piezo pump.
  • a separate pressure source is not required in such an embodiment, because the feeding line of the additional pump chamber acts as such. It is noted that in such an embodiment the indications pump chamber and additional pump chamber are just a matter of definition and could be switched.
  • a piezo pump assembly which comprises at least two of such piezo pumps connected to each other in series, wherein the outlets of a previous piezo pump are connected to the inlets of a following piezo pump.
  • the number of piezo pumps connected in series may vary as desired.
  • the invention also relates to a piezo pump device comprising a number of piezo pumps or piezo pump assemblies according to the present invention connected to each other in parallel. Thus the total delivery may be increased.
  • each piezo pump or piezo pump assembly has a planar configuration and wherein these piezo pumps or piezo pump assemblies are stacked in a planar fashion to define a pillar like structure.
  • the invention also relates to a pressurised circuit comprising a piezo pump, piezo pump assembly or piezo pump device according to the invention.
  • a pressurised circuit for a fluid is illustrated schematically.
  • Such a circuit may, for example, be used as a cooling circuit for electronics 1 in a satellite.
  • the circuit as illustrated further comprises a heat exchanger 2 and possibly an accumulator vessel 3.
  • a piezo pump 4 which comprises a pump chamber 5 with an inlet 6 provided with a one way inlet valve 7, for connection to a feeding line 8 of the pressurised circuit and an outlet 9 provided with a one way outlet valve 10, for connection to a discharge line 11 of the pressurised circuit.
  • the piezo pump 4 further is provided with a piezo pump diaphragm 12 that closes one end of the pump chamber 5 and that by control lines 13 is connected to a control unit 14.
  • a piezo pump diaphragm 12 that closes one end of the pump chamber 5 and that by control lines 13 is connected to a control unit 14.
  • electric control signals for example an alternate current
  • the piezo pump diaphragm 12 will vibrate between two positions (for example 12 and 12') for alternatingly sucking fluid into the pump chamber 5 through the inlet 6 and forcing fluid out of the pump chamber 5 through the outlet 9.
  • a pressure chamber 15 is defined at the side of the piezo pump diaphragm 12 facing away from the pump chamber 5 and this pressure chamber 15 is connected to the feeding line 8 via a pressure line 16.
  • the pressure chamber 15 may be connected directly to a pressurised vessel 17 or another pressure source.
  • the pressure in the pressure chamber 15 at least partially compensates the pressure in the pump chamber 5, as a result of which the pressure difference over the piezo pump diaphragm 12 is reduced and, consequently, the forces acting on the piezo pump diaphragm 12 are reduced. This will substantially reduce the risk of leakages past said diaphragm.
  • Figure 2 illustrates a piezo pump assembly comprising two piezo pumps 4' and 4" connected to each other in series, wherein the outlet 9' of the first piezo pump 4' is connected to the inlet 6" of the second piezo pump 4".
  • the pressure chamber 15' of the first piezo pump 4' is connected to the feeding line 8 by a pressure line 16', but the pressure chamber 15" of the second piezo pump 4" is connected to the discharge line 11 via an additional pressure line 18.
  • FIG 3 shows an embodiment of a piezo pump assembly with three piezo pumps 4', 4" and 4"', wherein only the pressure chamber 15"' of the last piezo pump 4"' is connected to the discharge line 11. The pressure chambers of the remaining piezo pumps all are connected to the feeding line 8.
  • FIG. 3 in dotted lines illustrates an alternative possibility according to which the pressure chamber 15" of the second piezo pump 4" is connected to the outlet 9' of the first piezo pump 4' by a connecting line 19 (and is not connected to the feeding line 8). A similar situation may occur for the pressure chamber 15"'.
  • a special embodiment of the piezo pump which comprises an additional pump chamber 20 (taking the place of the pressure chamber) at the side of the piezo pump diaphragm 12 opposite the pump chamber 5.
  • Said additional pump chamber 20 likewise is provided with an inlet 21 provided with a one way inlet valve 22, for connection to the feeding line 8 of the pressurised circuit and an outlet 23 provided with a one way outlet valve 24, for connection to the discharge line 11 of the pressurised circuit.
  • the piezo pump diaphragm 12 is common for both the pump chamber 5 and the additional pump chamber 20.
  • the additional pump chamber 20 acts as the pressure chamber for the pump chamber 5, and the pump chamber 5 acts as a pressure chamber for the additional pump chamber 20.
  • two piezo pumps according to figure 4 are connected to each other in series (wherein the outlets of a first piezo pump are connected to the inlets of a second piezo pump).
  • the outlets of a first piezo pump are connected to the inlets of a second piezo pump.
  • a schematic representation is illustrated of a piezo pump device comprising two piezo pump assemblies (one comprising two piezo pumps 25 and 26 connected in series and the other comprising two piezo pumps 27 and 28 connected in series) connected to each other in parallel.
  • two piezo pump assemblies may be connected in parallel and each such piezo pump assembly may comprise any number of piezo pumps (also only one), wherein those numbers do not have to be the same for all piezo pump assemblies.
  • each piezo pump or piezo pump assembly as described above has a planar configuration and wherein a number of such piezo pumps or piezo pump assemblies 29 are stacked in a planar fashion to define a pillar like structure 30 as shown in figure 7 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP14164209.0A 2014-04-10 2014-04-10 Piezoelektrische Pumpenanordnung und damit versehener Druckkreislauf Active EP2930363B1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DK14164209.0T DK2930363T3 (da) 2014-04-10 2014-04-10 Piezoelektrisk pumpeindretning og dermed forsynet trykkredsløb
EP14164209.0A EP2930363B1 (de) 2014-04-10 2014-04-10 Piezoelektrische Pumpenanordnung und damit versehener Druckkreislauf
LTEP14164209.0T LT2930363T (lt) 2014-04-10 2014-04-10 Pjezoelektrinio siurblio konstrukcija ir joje esanti slėginė grandinė
US14/682,777 US20150292497A1 (en) 2014-04-10 2015-04-09 Piezo pump and pressurized circuit provided therewith

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP14164209.0A EP2930363B1 (de) 2014-04-10 2014-04-10 Piezoelektrische Pumpenanordnung und damit versehener Druckkreislauf

Publications (2)

Publication Number Publication Date
EP2930363A1 true EP2930363A1 (de) 2015-10-14
EP2930363B1 EP2930363B1 (de) 2020-06-10

Family

ID=50542817

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14164209.0A Active EP2930363B1 (de) 2014-04-10 2014-04-10 Piezoelektrische Pumpenanordnung und damit versehener Druckkreislauf

Country Status (4)

Country Link
US (1) US20150292497A1 (de)
EP (1) EP2930363B1 (de)
DK (1) DK2930363T3 (de)
LT (1) LT2930363T (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3348834A1 (de) * 2017-01-13 2018-07-18 Microjet Technology Co., Ltd Luftmotor
EP3480460A1 (de) * 2017-11-02 2019-05-08 AVS Added Value Industrial Engineering Solutions, S.L. Volumetrische pumpe
EP4310331A1 (de) * 2022-07-18 2024-01-24 Microjet Technology Co., Ltd. Fluidpumpenmodul

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2022209704A1 (de) * 2021-04-02 2022-10-06

Citations (4)

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JP2005016367A (ja) * 2003-06-25 2005-01-20 Sharp Corp 圧電ポンプおよびスターリング冷却庫
US20080101965A1 (en) * 2004-11-17 2008-05-01 Sharp Kabushiki Kaisha Piezoelectric Pump and Stirling Refrigerator/Freezer
US20090010780A1 (en) * 2006-03-29 2009-01-08 Murata Manufacturing Co., Ltd. Micropump
GB2504668A (en) * 2012-07-26 2014-02-12 Atomjet Ltd Micro Pump with valvular conduits

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US4390322A (en) * 1981-02-10 1983-06-28 Tadeusz Budzich Lubrication and sealing of a free floating piston of hydraulically driven gas compressor
IT1187318B (it) * 1985-02-22 1987-12-23 Franco Zanarini Compressore volumetrico alternato ad azionamento idraulico
JP2644730B2 (ja) * 1986-03-24 1997-08-25 株式会社日立製作所 微量流体移送装置
US4822250A (en) * 1986-03-24 1989-04-18 Hitachi, Ltd. Apparatus for transferring small amount of fluid
JP2002021715A (ja) * 2000-07-10 2002-01-23 Matsushita Electric Ind Co Ltd 流体供給装置及び流体供給方法
US6811385B2 (en) * 2002-10-31 2004-11-02 Hewlett-Packard Development Company, L.P. Acoustic micro-pump
JP2006242007A (ja) * 2005-03-01 2006-09-14 Toyota Industries Corp ダイアフラムポンプ
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WO2010023876A1 (ja) * 2008-08-26 2010-03-04 パナソニック株式会社 導電性高分子を用いた流体搬送装置
JP4934750B1 (ja) * 2011-05-31 2012-05-16 株式会社メトラン ポンプユニット、呼吸補助装置
WO2013084909A1 (ja) * 2011-12-09 2013-06-13 株式会社村田製作所 気体制御装置
US9266053B2 (en) * 2012-06-18 2016-02-23 Invacare Corporation System and method for concentrating gas
WO2015045727A1 (ja) * 2013-09-24 2015-04-02 株式会社村田製作所 気体制御装置
JP2015117647A (ja) * 2013-12-19 2015-06-25 東芝テック株式会社 圧電ポンプおよび圧電ポンプを備えるインクジェット記録装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005016367A (ja) * 2003-06-25 2005-01-20 Sharp Corp 圧電ポンプおよびスターリング冷却庫
US20080101965A1 (en) * 2004-11-17 2008-05-01 Sharp Kabushiki Kaisha Piezoelectric Pump and Stirling Refrigerator/Freezer
US20090010780A1 (en) * 2006-03-29 2009-01-08 Murata Manufacturing Co., Ltd. Micropump
GB2504668A (en) * 2012-07-26 2014-02-12 Atomjet Ltd Micro Pump with valvular conduits

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3348834A1 (de) * 2017-01-13 2018-07-18 Microjet Technology Co., Ltd Luftmotor
US11530696B2 (en) 2017-01-13 2022-12-20 Microjet Technology Co., Ltd. Piezoelectric motor having a main body structured as a polygonal prism
EP3480460A1 (de) * 2017-11-02 2019-05-08 AVS Added Value Industrial Engineering Solutions, S.L. Volumetrische pumpe
EP4310331A1 (de) * 2022-07-18 2024-01-24 Microjet Technology Co., Ltd. Fluidpumpenmodul
US12116993B2 (en) 2022-07-18 2024-10-15 Microjet Technology Co., Ltd. Fluid pump module

Also Published As

Publication number Publication date
EP2930363B1 (de) 2020-06-10
US20150292497A1 (en) 2015-10-15
DK2930363T3 (da) 2020-09-07
LT2930363T (lt) 2021-01-11

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