DK2930363T3 - Piezoelektrisk pumpeindretning og dermed forsynet trykkredsløb - Google Patents

Piezoelektrisk pumpeindretning og dermed forsynet trykkredsløb Download PDF

Info

Publication number
DK2930363T3
DK2930363T3 DK14164209.0T DK14164209T DK2930363T3 DK 2930363 T3 DK2930363 T3 DK 2930363T3 DK 14164209 T DK14164209 T DK 14164209T DK 2930363 T3 DK2930363 T3 DK 2930363T3
Authority
DK
Denmark
Prior art keywords
pumping device
pressure circuit
supplied pressure
piezoelectric pumping
piezoelectric
Prior art date
Application number
DK14164209.0T
Other languages
Danish (da)
English (en)
Inventor
Es Johannes Van
Wessel Willems Wits
Original Assignee
Stichting Nationaal Lucht En Ruimtevaart Laboratorium
Univ Twente
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stichting Nationaal Lucht En Ruimtevaart Laboratorium, Univ Twente filed Critical Stichting Nationaal Lucht En Ruimtevaart Laboratorium
Application granted granted Critical
Publication of DK2930363T3 publication Critical patent/DK2930363T3/da

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00Pumping installations or systems
    • F04B23/04Combinations of two or more pumps
    • F04B23/06Combinations of two or more pumps the pumps being all of reciprocating positive-displacement type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DK14164209.0T 2014-04-10 2014-04-10 Piezoelektrisk pumpeindretning og dermed forsynet trykkredsløb DK2930363T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP14164209.0A EP2930363B1 (de) 2014-04-10 2014-04-10 Piezoelektrische Pumpenanordnung und damit versehener Druckkreislauf

Publications (1)

Publication Number Publication Date
DK2930363T3 true DK2930363T3 (da) 2020-09-07

Family

ID=50542817

Family Applications (1)

Application Number Title Priority Date Filing Date
DK14164209.0T DK2930363T3 (da) 2014-04-10 2014-04-10 Piezoelektrisk pumpeindretning og dermed forsynet trykkredsløb

Country Status (4)

Country Link
US (1) US20150292497A1 (de)
EP (1) EP2930363B1 (de)
DK (1) DK2930363T3 (de)
LT (1) LT2930363T (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634264B (zh) * 2017-01-13 2018-09-01 研能科技股份有限公司 空氣馬達
EP3480460B1 (de) * 2017-11-02 2021-06-23 AVS Added Value Industrial Engineering Solutions, S.L. Volumetrische pumpe
JPWO2022209704A1 (de) * 2021-04-02 2022-10-06
TWI817615B (zh) * 2022-07-18 2023-10-01 研能科技股份有限公司 流體泵浦模組

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3077162A (en) * 1956-05-24 1963-02-12 Aerojet General Co Vibratory pump
US4390322A (en) * 1981-02-10 1983-06-28 Tadeusz Budzich Lubrication and sealing of a free floating piston of hydraulically driven gas compressor
IT1187318B (it) * 1985-02-22 1987-12-23 Franco Zanarini Compressore volumetrico alternato ad azionamento idraulico
US4822250A (en) * 1986-03-24 1989-04-18 Hitachi, Ltd. Apparatus for transferring small amount of fluid
JP2644730B2 (ja) * 1986-03-24 1997-08-25 株式会社日立製作所 微量流体移送装置
JP2002021715A (ja) * 2000-07-10 2002-01-23 Matsushita Electric Ind Co Ltd 流体供給装置及び流体供給方法
US6811385B2 (en) * 2002-10-31 2004-11-02 Hewlett-Packard Development Company, L.P. Acoustic micro-pump
JP2005016367A (ja) * 2003-06-25 2005-01-20 Sharp Corp 圧電ポンプおよびスターリング冷却庫
JP3949135B2 (ja) * 2004-11-17 2007-07-25 シャープ株式会社 圧電ポンプおよびスターリング冷却庫
JP2006242007A (ja) * 2005-03-01 2006-09-14 Toyota Industries Corp ダイアフラムポンプ
WO2007111049A1 (ja) * 2006-03-29 2007-10-04 Murata Manufacturing Co., Ltd. マイクロポンプ
JP2008038829A (ja) * 2006-08-09 2008-02-21 Alps Electric Co Ltd 圧電ポンプ及び圧電振動子
JP4511630B2 (ja) * 2008-08-26 2010-07-28 パナソニック株式会社 導電性高分子を用いた流体搬送装置
JP4934750B1 (ja) * 2011-05-31 2012-05-16 株式会社メトラン ポンプユニット、呼吸補助装置
JP5776793B2 (ja) * 2011-12-09 2015-09-09 株式会社村田製作所 気体制御装置
US9266053B2 (en) * 2012-06-18 2016-02-23 Invacare Corporation System and method for concentrating gas
GB2504668C (en) * 2012-07-26 2020-03-04 Atomjet Ltd Micro pumps
WO2015045727A1 (ja) * 2013-09-24 2015-04-02 株式会社村田製作所 気体制御装置
JP2015117647A (ja) * 2013-12-19 2015-06-25 東芝テック株式会社 圧電ポンプおよび圧電ポンプを備えるインクジェット記録装置

Also Published As

Publication number Publication date
EP2930363B1 (de) 2020-06-10
US20150292497A1 (en) 2015-10-15
LT2930363T (lt) 2021-01-11
EP2930363A1 (de) 2015-10-14

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