EP2862630A1 - Unité anti-débordement pour un dispositif microfluidique, dispositif microfluidique, procédé de fonctionnement d'une telle unité anti-débordement et procédé de fabrication d'une telle unité anti-débordement - Google Patents

Unité anti-débordement pour un dispositif microfluidique, dispositif microfluidique, procédé de fonctionnement d'une telle unité anti-débordement et procédé de fabrication d'une telle unité anti-débordement Download PDF

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Publication number
EP2862630A1
EP2862630A1 EP20140186087 EP14186087A EP2862630A1 EP 2862630 A1 EP2862630 A1 EP 2862630A1 EP 20140186087 EP20140186087 EP 20140186087 EP 14186087 A EP14186087 A EP 14186087A EP 2862630 A1 EP2862630 A1 EP 2862630A1
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EP
European Patent Office
Prior art keywords
channel
protection unit
resistance
pressure
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20140186087
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German (de)
English (en)
Other versions
EP2862630B1 (fr
Inventor
Thomas BRETTSCHNEIDER
Franz Laermer
Jochen Rupp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
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Robert Bosch GmbH
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Filing date
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Publication of EP2862630A1 publication Critical patent/EP2862630A1/fr
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure

Definitions

  • the present invention relates to a leakage protection unit for a microfluidic device, a microfluidic device, a method for operating such a leakage protection unit and a method for producing such a leakage protection unit.
  • Microfluidic lab-on-a-chip (LOC) systems are commonly designed as disposable components and often consist of polymeric layer systems that incorporate microfluidic unit functions such as valves or pumps. For example, such functions can be mapped using two polymer substrates separated by a flexible polymer membrane. In this case, the polymer membrane can be deflected by pneumatic pressures to displace liquid within the lab-on-a-chip system or close a channel. For this purpose, both positive and negative relative pressures are generated in an external drive unit and passed on to the microfluidic system.
  • the present invention provides an outlet protection unit for a microfluidic device, a microfluidic device, a method for operating such an outlet protection unit, and a method for producing such an outlet protection unit presented the main claims.
  • Advantageous embodiments emerge from the respective subclaims and the following description.
  • a microfluidic device may be understood to mean an apparatus for processing, duplicating, and / or analyzing a biochemical material, such as nucleic acids, proteins, and cells.
  • a cover element and a bottom element can each be understood a layer which is made for example of a plastic, in particular of a polymer.
  • Under a bottom recess for example, a depression in the bottom element can be understood.
  • the bottom recess may be formed as a fluid container and filled with a fluid.
  • a fluid can be understood as meaning a fluid containing the biochemical material.
  • a fluidic resistance also called flow resistance, can be understood as an attenuation characteristic of the resistance channel, by means of which a flow rate of a fluid located in the resistance channel is reduced.
  • the resistance channel a represent fluidic resistance by which the flow rate of the fluid is reduced by a factor of 50 to 150 or 75 to 125, compared to an embodiment without a resistance channel.
  • the resistance channel may represent a fluidic resistance such that a flow rate of a fluid in the resistance channel is reduced by a predetermined factor.
  • the described approach may be based on using a flow resistance to retain liquids in the device, for example in the form of a chip.
  • the present approach is based on the recognition that a lab-on-a-chip system may be connected to a pressure generating drive unit. Especially in conjunction with negative relative pressures, there may be the risk that liquid from the lab-on-a-chip system will be drawn into the actuation unit and contaminated by it.
  • a channel between a liquid container of the lab-on-a-chip system and a pressure port of the lab-on-a-chip system be designed with such a high fluid resistance that a return of the liquid is prevented in the direction of the pressure port ,
  • the present approach By means of the present approach, high costs, which may arise due to a possible decontamination of the drive unit by exchanging components and failure times, can be avoided. Furthermore, the present approach offers the advantage of high reliability, since in case of failure, no analyte can be distributed in the drive unit and thus a risk of erroneous results, in particular false positive results, can be reduced on a subsequent lab-on-a-chip system. Finally, the present approach can reduce the risk of health hazards due to leaking fluids.
  • the pressure channel can be formed as a passage opening in the bottom element and / or the cover element.
  • the bottom recess may also be arranged laterally offset from the passage opening. This can provide a cost effective and efficient interface to initiate printing.
  • the fluidic resistance can be predetermined by a cross-sectional shape and / or a diameter and / or a length of the resistance channel.
  • the fluidic resistance can be adapted very precisely to different conditions, such as the type of fluid or the level of the applied pressure.
  • a film may be arranged between the cover element and the bottom element.
  • the film may have the resistance channel.
  • a film can be understood as meaning a flat, flexible element, such as a plastic layer.
  • the film may be, for example, fluid-impermeable.
  • the resistance channel can be realized particularly inexpensive. Furthermore, a wide variety of geometries of the resistance channel can be realized with little manufacturing and cost.
  • the film can also be arranged in the region of the fluid container.
  • the film can close the fluid container fluid-tight. Thereby, leakage of a fluid in the fluid container can be prevented.
  • the film may be deflected, for example, by the pressure applied to the passage opening to control a fluid flow.
  • At least one lid recess may be formed as a component of the resistance channel in the lid member to increase a volume of the resistance channel.
  • a lid recess can be understood as a recess in the lid element.
  • the cover recess can serve as a fluid buffer, in particular when a negative pressure is applied to the pressure channel, in order to absorb a fluid drawn in through the resistance channel and thus prevent leakage of the fluid through the pressure channel.
  • the film in the region of the cover recess and / or the cover recess may have at least one resistance element and / or a hydrophobic layer in order to increase the fluidic resistance.
  • a resistance element may, for example, be understood to mean a groove or edge arranged transversely to the resistance channel.
  • Under one hydrophobic layer can be understood, for example, a wax or paraffin layer.
  • the lid recess may include an indicator material for identifying a liquid.
  • An indicator material may be understood to mean a material that undergoes a change of state upon contact with a liquid. For example, the indicator material may become discolored. This allows early and reliable detection of leaks in a microfluidic system.
  • the cover element may be formed with a first channel opening and a second channel opening at least one Druckumleitkanal.
  • the first channel opening can be arranged opposite the fluid container and the second channel opening can be fluidically coupled to the resistance channel and / or coupled. This allows controlled pressure to be exerted on the film to deflect the film.
  • a valve and / or pumping mechanism can be realized.
  • the resistance channel may comprise a liquid-absorbing material, which is designed to liquid-tightly close the resistance channel upon absorption of a liquid.
  • the liquid-absorbing material may be, for example, a fibrous material which, upon absorption of the liquid, increases in such a way that the resistance channel is closed in a liquid-tight manner. Thereby, the reliability of the leakage protection unit can be further increased.
  • the liquid-absorbing material may be disposed between the lid recess and the pressure channel. As a result, leakage of the fluid through the pressure channel can be prevented if the lid recess overflows.
  • a sealing membrane between the resistance channel and the pressure channel may be formed to close the pressure channel liquid-tight.
  • a sealing membrane can be a flat flexible element such as For example, be understood a plastic layer.
  • the sealing membrane may be gas permeable but liquid impermeable.
  • a pump By a means for applying the pressure, for example, a pump can be understood, which is designed to generate an overpressure and / or negative pressure in the pressure channel.
  • the fluid flow can be controlled very efficiently if, in the step of the application, an alternating pressure at specific time intervals is applied to the pressure channel.
  • the present approach provides a method of manufacturing a leak protection unit according to any of the above-described embodiments, the method comprising the steps of:
  • the resistance channel Forming at least one resistance channel between the lid member and the bottom member to fluidly couple the pressure channel and the fluid container, the resistance channel representing a fluidic resistance for a fluid in the resistance channel.
  • Fig. 1 shows a schematic representation of a leakage protection unit 100 according to an embodiment of the present invention.
  • the leakage protection unit 100 has a cover element 105 and a bottom element 110.
  • a pressure passage 115 for applying a pressure is formed in the lid member 105.
  • a bottom recess 120 is formed as a fluid container 125.
  • the bottom recess 120 is arranged opposite the cover element 105.
  • a resistance channel 130 is formed to fluidly couple the pressure passage 115 and the fluid container 125.
  • the resistance channel 130 represents a fluidic resistance such that a flow rate of a fluid in the resistance channel 130 is reduced by a predetermined factor and leakage of the fluid through the pressure channel 115 is prevented.
  • the channel 130 may be excluded in either the layer 105 or the layer 110.
  • the pressure passage 115 is formed as a through hole in the lid member 105.
  • the bottom recess 120 is further arranged laterally offset from the passage opening.
  • the fluid container 125 is connected to the plane of the drawing, that is to say, for example, transversely to a longitudinal extension direction of the channel 130, to a fluidic network. Through the fluidic network, the container 125 can be filled and emptied in the regular operation of the device according to the invention.
  • Fig. 2 shows a schematic representation of a leakage protection unit 100 according to an embodiment of the present invention.
  • Fig. 1 has the in Fig. 2 shown leakage protection unit 100 in addition to a film 200 which is disposed between the lid member 105 and the bottom member 110.
  • the resistance channel 130 is formed in the film 200.
  • the fluid container 125 is closed fluid-tight by the film 200.
  • the cover element 105 has a cover recess 205 as a component of the resistance channel 130.
  • the cover recess 205 is fluidically coupled to the pressure channel 115 via a cover recess channel 210 formed in the cover element 105 as a further component of the resistance channel 130.
  • the cover recess 205 is designed to absorb, in particular when a negative pressure is applied to the pressure channel 115, a fluid drawn in via the resistance channel 130 and thus to prevent the fluid from escaping through the pressure channel 115.
  • the cover element 105 comprises a Druckumleitkanal 215 with a first channel opening 220 and a second channel opening 225.
  • the first channel opening 220 is disposed opposite the fluid container 125 and the second channel opening 225 fluidly coupled to the resistance channel 130.
  • the Druckumleitkanal 215 includes two perpendicular to the bottom member 110 disposed portions and a longitudinally arranged to the bottom member 110 connecting portion for connecting the vertical sections.
  • a first vertical section has the first channel opening 220 and a second vertical section has the second channel opening 225.
  • the connecting section is formed, for example, in the area of a surface of the cover element 105 facing away from the floor element 110 and is closed in a fluid-tight manner by a membrane applied to the cover element 105.
  • the Druckumleitkanal 215 is designed to direct the voltage applied to the pressure channel 115 pressure on the film 200 in the region of the fluid container 125, so that the film 200 is deflected. Is it like in Fig. 2 by an overpressure, the film 200 is bulged in the direction of the fluid container 125.
  • the leakage protection unit 100 comprises a first polymer substrate as cover element 105, a second polymer substrate as bottom element 110 and an interposed flexible polymer membrane as film 200.
  • a fluidic access 115 also called pressure channel 115
  • a cavity 205 also called Deckelaus Principleung 205.
  • This is connected to a microfluidic channel 130, which is designed as a resistance channel within the polymer membrane 200 and ends above a channel path 215, also called Druckumleitkanal 215, above the polymer membrane 200.
  • a further cavity as a fluid container 125.
  • the fluid container 125 is part of a diaphragm pump, for example. However, a diaphragm valve or another microfluidic function, which utilizes a deflection of the polymer membrane 200, may also be located at this point.
  • the channel path 215 is capped, for example, by a further polymer layer 220, for example an adhesive film.
  • the resistance channel 130 is designed, for example, in the form of a rectangular channel with dimensions of 50 ⁇ m by 18 ⁇ m by 26 mm. For example, this results in a flow rate of approximately 2.1 ⁇ l per second for air at a differential pressure of 20 kPa. Under the same environmental conditions, the flow rate for water is approximately 0.028 ⁇ l per second. For a switching period of, for example, 100 seconds between the overpressure and the vacuum phase, therefore, a volume of the cavity 205 of 2.8 ⁇ l is sufficient to prevent the liquid from leaving the system.
  • the volume of the cavity 205 can also be formed only through the channel to the pneumatic interface 115.
  • the pneumatic interface 115 may also be referred to as a pressure channel 115.
  • Fig. 3 shows a schematic representation of a leakage protection unit 100 according to an embodiment of the present invention.
  • Outlet protection unit 100 shown on another bottom recess 300.
  • the further floor recess 300 is arranged opposite the cover recess channel 210, so that the further floor recess 300 forms an extension of the cover recess channel 210.
  • a liquid-absorbing material 305 is introduced, which is formed in order to close the lid recess channel 210 in a liquid-tight manner upon absorption of a liquid emerging from the lid recess 205.
  • Another embodiment of the present invention provides that in front of the pneumatic interface 115, a material 305 is incorporated, which does not hinder a flow of gases. When the material 305 comes in contact with liquids, strong swelling causes the lid recessed channel 210 to close.
  • This embodiment has the particular advantage that an additional safety mechanism prevents leakage of liquids. This increases the reliability of the leakage protection.
  • Fig. 4 shows a schematic representation of a leakage protection unit 100 according to an embodiment of the present invention.
  • the pressure channel 115 at the in Fig. 4 Outlet protection unit 100 shown not formed in the lid member 105, but in the bottom member 110.
  • the leakage protection unit 100 in this case comprises a closure membrane 400, which is arranged in a region of the bottom element 110 between the pressure channel 115 and the lid recess channel 210.
  • the closure membrane 400 is configured to fluidly separate the pressure passage 115 and the lid recess passage 210.
  • the leak protection unit 100 in front of the pneumatic interface 115 as a sealing membrane 400 contains a membrane which is permeable to gases but blocks for liquids. As a result, the reliability of the leakage protection is increased.
  • Fig. 5 shows a schematic representation of a leakage protection unit 100 according to an embodiment of the present invention.
  • leakage protection unit 100 is the lid recess 205 in Fig. 5 equipped with resistance elements 500 in order to increase the fluidic resistance of the resistance channel 130 in the region of the cover recess 205.
  • the resistive elements 500 are in Fig. 5 on the one hand as elevations on a wall portion of the lid recess 205 opposite the bottom element 110, and on the other hand as recesses in a portion of the film 200 opposite the lid recess 205.
  • the recesses are each arranged laterally offset from the surveys.
  • structures within the polymer membrane 200 and / or structures on the top side of the cavity 205 are formed within the cavity 205.
  • the structures are characterized by edges on which a progressive fluid meniscus experiences resistance due to capillary forces. This is also called capillary stop.
  • a hydrophobic surface coating is also incorporated, such as plasma treated surfaces, fluorinated surfaces, polytetrafluoroethylene (PTFE), wax or paraffin coatings. Both approaches lead to a filling of the cavity 205 is difficult. As a result, the leakage protection is additionally increased.
  • combinations of swelling material 305, liquid-impermeable membrane 400 or capillary stop are also possible.
  • a moisture indicator is deposited within the cavity 205, for example indicator powder which changes color upon contact with liquid.
  • an error case for example by a user or by an optical evaluation, detected within an external control unit and the Result of last test marked as invalid.
  • individual or all polymer layers 105, 110 are made transparent.
  • Fig. 6 shows a schematic representation of a microfluidic device 600 according to an embodiment of the present invention.
  • the microfluidic device 600 has an outlet protection unit 100 and a means 605 for applying the pressure to the pressure channel of the leakage protection unit 100.
  • the means 605 is fluidly connected to the pressure channel for this purpose.
  • the microfluidic device 600 is realized for example as a pressure-driven microfluidic polymer layer system, to which an external control unit is connected as means 605.
  • An embodiment of the present invention includes a high fluidic resistance channel-shaped structure realized on a lab-on-a-chip system as a microfluidic device 600 and extending between pneumatic interfaces to an external control unit, also referred to as means 605, and one controlling microfluidic function is located.
  • a geometry of the channel-shaped structure can be used to set a pressure rise edge, thereby providing a functional extension of the lab-on-a-chip system. This exploits the fact that the fluidic resistance of the same structure is orders of magnitude higher for a liquid due to viscosity In the event of a fault, this leads to the fact that at typical differential pressures of a few 100 mbar to several bar only a very small amount of liquid can escape through the channel-shaped structure in the direction of the pneumatic interface.
  • a volume of the cavity together with the fluidic resistance of the channel-shaped structure can be designed such that it can be used for a process time of from minutes to hours Lab-on-a-chip system is impossible even in the worst case, that the liquid reaches the pneumatic interface and contaminates the external control unit.
  • an error case for example by observing the cavity, by reading electrical signals such as an electrical resistance change or an electrical capacitance change and by depositing a dry indicator powder in the intermediate cavity, which discolors on contact with liquid.
  • the structures necessary for the present invention can be produced using the same manufacturing techniques as the remaining components of the Lab-on-a-Chip system.
  • the costs of a lab-on-a-chip system with corresponding structures are therefore only slightly increased.
  • FIG. 12 shows a flowchart of a method 700 for operating a leakage protection unit 100 according to an embodiment of the present invention.
  • a pressure is applied to the pressure channel to control a fluid flow of a fluid in the fluid container.
  • the pneumatic pressure at the inlet 115 is typically periodically switched between positive and negative pressure to deflect the polymer membrane 200 above the cavity 120. It is often desirable to have this process not abruptly, but delayed.
  • the fluidic resistance of the channel 130 can be designed such that it acts as a throttle for gases. In the case of rupture of the polymer membrane 200 within the cavity 120, also called bottom recess 120, liquid can be sucked out of the cavity 120 into the channel path 215 and the channel 130 during the suction phase.
  • the fluid resistance increases by a factor of about 100 in the case of water, for example, whereupon the flow rate in the direction of the pneumatic interface 115 by about the same factor is reduced.
  • the volume of the cavity 205 can now be designed so that the liquid front does not penetrate as far as the pneumatic interface 115 within the intake phase and thus can not enter the external control unit.
  • FIG. 12 shows a flow chart of a method 800 for manufacturing a leak guard unit 100 according to an embodiment of the present invention.
  • a step 805 of providing a lid member and a bottom member, in which at least one bottom recess is formed as a fluid container.
  • at least one pressure channel for applying a pressure is formed in the bottom element and / or the cover element.
  • the cover element and the bottom element are joined together. The joining takes place here in such a way that the bottom recess lies opposite the cover element.
  • at least one resistance channel is formed between the lid member and the bottom member to fluidly couple the pressure channel and the fluid container.
  • the resistance channel represents a fluidic resistance that is such that a flow rate of a fluid in the resistance channel is reduced by a predetermined factor.
  • thermoplastics such as polycarbonate (PC), polypropylene (PP), polyethylene (PE), polymethyl methacrylate (PMMA), cyclo-polefin polymer (COP) or cyclo-polefin copolymer (COC) can be used for the polymer substrate.
  • PC polycarbonate
  • PP polypropylene
  • PE polyethylene
  • PMMA polymethyl methacrylate
  • COP cyclo-polefin polymer
  • COC cyclo-polefin copolymer
  • thermoplastic elastomer thermoplastics or hot-melt adhesive films can be used as material examples for the polymer membrane.
  • material 305 for example, materials can be used which increase their volume upon contact with liquids, such as superabsorbers.
  • Membranes 400 which are permeable to gases but impervious to liquids, such as PTFE membranes, also known under the name Gore-Tex, can be used as sealing membrane 400.
  • the thickness of the polymer substrates can be 0.1 to 10 mm, the channel diameter in the polymer substrates 200 ⁇ m to 3 mm, the thickness of the polymer membrane 5 to 500 ⁇ m, the volume of the cavities 125, 205 1 ⁇ l to 10 ml and the lateral dimensions of the entire embodiment are 10 times 10 mm 2 to 200 times 200 mm 2 .
  • an exemplary embodiment comprises a "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment, both the first feature and the second feature and according to another embodiment either only first feature or only the second feature.

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
EP14186087.4A 2013-10-10 2014-09-24 Unité anti-débordement pour un dispositif microfluidique et dispositif microfluidique correspondant Active EP2862630B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013220445.0A DE102013220445B4 (de) 2013-10-10 2013-10-10 Auslaufschutzeinheit für eine mikrofluidische Vorrichtung, mikrofluidische Vorrichtung, Verfahren zum Betreiben einer solchen Auslaufschutzeinheit und Verfahren zum Herstellen einer solchen Auslaufschutzeinheit

Publications (2)

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EP2862630A1 true EP2862630A1 (fr) 2015-04-22
EP2862630B1 EP2862630B1 (fr) 2021-02-17

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999003584A1 (fr) * 1997-07-21 1999-01-28 Ysi Incorporated Module d'analyse microfluidique
US20070000613A1 (en) * 2005-06-09 2007-01-04 Stanley Pau Electric field mediated chemical reactors
US20080008628A1 (en) * 2006-07-06 2008-01-10 Samsung Electronics Co., Ltd Microfluidic reaction chip and method of manufacturing the same
DE102010028524A1 (de) * 2010-05-04 2011-11-10 Robert Bosch Gmbh Mikrofluidisches Bauteil, insbesondere peristaltische Mikropumpe, und Verfahren zu dessen Herstellung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0028647D0 (en) * 2000-11-24 2001-01-10 Nextgen Sciences Ltd Apparatus for chemical assays
US20070014695A1 (en) * 2005-04-26 2007-01-18 Applera Corporation Systems and Methods for Multiple Analyte Detection
US20070095407A1 (en) * 2005-10-28 2007-05-03 Academia Sinica Electrically controlled addressable multi-dimensional microfluidic device and method
DE102009048378B3 (de) * 2009-10-06 2011-02-17 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikrofluidische Struktur
JP6190822B2 (ja) * 2012-01-09 2017-08-30 マイクロニクス， インコーポレイテッド マイクロ流体リアクタシステム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999003584A1 (fr) * 1997-07-21 1999-01-28 Ysi Incorporated Module d'analyse microfluidique
US20070000613A1 (en) * 2005-06-09 2007-01-04 Stanley Pau Electric field mediated chemical reactors
US20080008628A1 (en) * 2006-07-06 2008-01-10 Samsung Electronics Co., Ltd Microfluidic reaction chip and method of manufacturing the same
DE102010028524A1 (de) * 2010-05-04 2011-11-10 Robert Bosch Gmbh Mikrofluidisches Bauteil, insbesondere peristaltische Mikropumpe, und Verfahren zu dessen Herstellung

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EP2862630B1 (fr) 2021-02-17
DE102013220445A1 (de) 2015-04-16
DE102013220445B4 (de) 2016-04-07

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