EP2846044B1 - Vacuum pump and assembly with a vacuum pump - Google Patents

Vacuum pump and assembly with a vacuum pump Download PDF

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Publication number
EP2846044B1
EP2846044B1 EP14181981.3A EP14181981A EP2846044B1 EP 2846044 B1 EP2846044 B1 EP 2846044B1 EP 14181981 A EP14181981 A EP 14181981A EP 2846044 B1 EP2846044 B1 EP 2846044B1
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EP
European Patent Office
Prior art keywords
housing
vacuum pump
housing part
pump
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14181981.3A
Other languages
German (de)
French (fr)
Other versions
EP2846044A1 (en
Inventor
Tobias Stoll
Michael Schweighöfer
Robert Watz
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2846044A1 publication Critical patent/EP2846044A1/en
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a vacuum pump and an arrangement with a vacuum pump.
  • Vacuum pumps in particular turbo-molecular pumps, have at least one rotor arranged in a pump housing.
  • the rotor is surrounded by one or more stators that are carried by the pump housing.
  • a drive device for example an electric motor, which drives the at least one rotor, is arranged within the pump housing.
  • the drive shaft is usually arranged axially to the rotor axis.
  • Turbomolecular pumps have opposite the inlet opening or the inlet nozzle has a very small outlet opening or a small outlet nozzle.
  • a backing pump is usually connected to the outlet connection via a line.
  • Arrangements with a vacuum pump and recipient hereinafter referred to as a chamber, are subject to a large number of requirements with regard to their geometric design.
  • a vacuum pump and recipient hereinafter referred to as a chamber
  • Arrangements with a vacuum pump and recipient are subject to a large number of requirements with regard to their geometric design.
  • mass spectrometers for example, there is a desire for compact dimensions of the overall system. This often leads to a positioning of the vacuum pump in the end device in which its accessibility is considerably restricted. Nevertheless, servicing these vacuum pumps, for example preventive replacement of rolling bearings, should be easy.
  • an arrangement with a vacuum pump which has a pump flange.
  • the arrangement has a chamber flange and a flange connection comprising the pump flange and the chamber flange for the vacuum-tight connection of the chamber and vacuum.
  • a force transmission structure is provided which transmits a force from an introduction point to at least one active point located in the flange connection.
  • the vacuum pump is usually arranged in a receptacle in the arrangement provided for this purpose.
  • the receptacle can be designed in the manner of a rail system.
  • the pump flange and chamber flange are connected to one another in a vacuum-tight manner.
  • the inlet openings of the pump are arranged in such a way that they are in alignment and overlapping with the outlet openings of the chamber are arranged.
  • This prior art pump can easily be pulled out of the arrangement after releasing the corresponding connecting and fastening means, for example in order to carry out a preventive exchange of rolling bearings.
  • Time-of-flight mass spectrometers are a subclass of mass spectrometers. It is a time-of-flight mass spectrometer.
  • split-flow pumps are vacuum pump systems for multi-stage gas inlet systems, such as those from the DE 43 31 589 A1 are known.
  • split-flow pumps which belong to the state of the art, usually have overall lengths of up to 500 millimeters.
  • housings can only be manufactured with very large and very expensive processing machines that are long enough to bridge the large distances between the suction openings.
  • EP 0 731 278 A1 belongs to a molecular vacuum pump, the housing of which is divided into several housing components.
  • This vacuum pump which belongs to the state of the art, can still be improved with regard to its operation in terms of vibration decoupling or thermal decoupling.
  • the technical problem on which the invention is based is to improve the vacuum pump belonging to the prior art and the arrangement with a vacuum pump in such a way that customer-specific requirements can be implemented more easily and inexpensively and that vacuum pumps with large overall lengths can be manufactured inexpensively.
  • the vacuum pump according to the invention with a housing and a pump unit which only has a drive unit for a rotor which is rotatably mounted in a stator, in which at least one additional housing part attached to the housing, which can be connected to the housing, is arranged in the axial direction, and in which an inlet opening is provided in the axial direction in the housing and an outlet opening is provided in the at least one additional housing part, is characterized in that the housing and the at least one attached housing part have a total length of at least 550 millimeters, preferably of at least 700 millimeters that the at least one attached housing part has no axial inlet and at least one radial inlet and that the at least one radial inlet of the attached housing part is preferably arranged at an end of the attached housing part remote from the drive, that in the housing and in the attached G epurteil at least partially pump-active structures of the vacuum pump are arranged, and that the inlet opening of the housing and the outlet opening of the attached housing part are designed to overlap.
  • the vacuum pump according to the invention has the advantage that the additional housing part attached in the axial direction enables the vacuum pump to have a large overall length, as is often required by customers.
  • a standard vacuum pump can be used, and the attached housing part then has the dimensions required for the customer-specific requirements.
  • vacuum pumps can be manufactured with a continuous housing with greater overall lengths, than is possible with the previously known tools.
  • the overall length of the housing is limited in length by the machine tools belonging to the prior art.
  • any length can in principle be created.
  • the attached housing part has the advantage over an attached pipe, for example, that the diameter and the outer contour of the housing are continuous and constant for the entire vacuum pump, so that flanges, openings, rail systems and the like in arrangements, for example with a mass spectrometer from the Pump according to the invention can be used.
  • attached pipes often have an angle in order to be able to be connected to an outlet of a pump chamber arranged in the radial direction to the longitudinal axis of the pump.
  • a vacuum pump belonging to the prior art with an attached pipe cannot be used in existing receptacles in an arrangement.
  • the at least one attached housing part has at least one radial inlet.
  • This radial inlet serves to connect to an outlet of a pump chamber of the arrangement in which the vacuum pump is arranged.
  • At least one thermally insulating and / or vibration decoupling and / or electrically insulating element is provided between the housing of the vacuum pump and the attached housing part.
  • This function can, for example, be integrated in a specially designed sealing element.
  • the attached housing part has a corresponding number of inlets, each of which is congruent with the outlet of the chambers.
  • a further advantageous embodiment of the invention provides that the at least one radial inlet of the attached housing part is arranged at an end of the attached housing part remote from the drive.
  • Arrangements for example with mass spectrometers with time-of-flight systems, often have considerable distances between the various suction openings.
  • the radial inlets in the attached housing part can be designed in a customer-specific manner, it is advantageous to have the at least one inlet or the last radial inlet at the end remote from the drive, i.e. at the end of the housing part which is arranged away from the active pumping structures. to be provided.
  • the housing of the vacuum pump has at least one radial inlet. This means that the vacuum pump itself already has at least one radial inlet in the housing to which the additional housing is attached.
  • the at least one attached housing part has at least partially an outer contour that is the same as that of the housing. This ensures that the housing of the vacuum pump and the attached housing part have the outer contour and shape of a single housing. This makes it possible to use the vacuum pump particularly advantageously in one Recording an arrangement, for example with a mass spectrometer, to be arranged.
  • the identical outer contours of the housing and the attached housing part can be interrupted, for example, by constrictions.
  • At least partially active pumping structures of the vacuum pump are arranged in the attached housing part.
  • An example not claimed provides that no pump-active structures of the vacuum pump are arranged in the attached housing part.
  • the at least one attached housing part forms a pure extension of the housing of the vacuum pump.
  • the housing and the at least one attached housing part have a total length of at least 550 millimeters.
  • Vacuum pump housings with lengths of less than 500 millimeters can be manufactured on conventional machines at the usual expense.
  • the housing and the at least one attached housing part advantageously have a total length of at least 700 millimeters.
  • the invention is particularly advantageous for lengths greater than 550 millimeters, for example Lengths of more than 700 millimeters can be used sensibly.
  • the inlet openings of the housing and the outlet opening of the attached housing part are designed to overlap. This ensures that the attached housing part acts like an extension of the housing of the vacuum pump.
  • the inlet opening of a first attached housing part and the outlet opening of a second attached housing part are also designed to overlap in order to enable a further extension of the housing.
  • the vacuum pump is designed as a turbo molecular pump.
  • the vacuum pump can be designed as a pump with at least two gas inlets.
  • This type of pump is also called a split flow pump.
  • This type of pump with a multi-stage gas inlet system is often used in arrangements with, for example, mass spectrometers. With these arrangements in particular, a design of the housing that is adapted to customer-specific requirements is also often desired.
  • the vacuum pump can, for example, have at least one turbo-molecular pump stage and / or at least one Holweck pump stage.
  • the at least one Holweck pump stage is usually arranged downstream of the at least one turbo-molecular pump stage in the direction of gas delivery.
  • the gas inlets are preferably arranged in front of, between or behind the turbo molecular pump stages and / or Holweck pump stages.
  • the inventive arrangement according to claim 5 with a vacuum pump with the features according to claim 1 is characterized in that the arrangement has a mass spectrometer, that the arrangement has at least one pump flange and a chamber with a chamber flange, the arrangement having a pump flange and a chamber flange has comprehensive flange connection for the vacuum-tight connection of the chamber and vacuum pump, and that the at least one attached housing part has at least one radial inlet which is designed to be connectable to at least one chamber of the arrangement.
  • the vacuum pump can be used in an arrangement with several suction openings, in which the suction openings are far apart, without particularly high processing and manufacturing costs in the manufacture of the housing.
  • the arrangement has a force transmission structure which is designed as a force transmission structure which transmits a force from an introduction point to at least one active point located in the flange connection.
  • This power transmission structure is in the EP 2 228 540 A2 described.
  • the arrangement according to the invention is used in arrangements with mass spectrometers, since in these arrangements there are several gas inlets which, under certain circumstances, have suction openings that are far apart.
  • the housing of the vacuum pump and the at least one attached housing part have an outer contour that is adapted to a receptacle arranged in the arrangement. This makes it possible to insert the vacuum pump with the at least one attached housing part into a predetermined structure of an arrangement.
  • the recordings in the arrangements for housings of vacuum pumps are the outer contour of the housing of the vacuum pump adapted.
  • the attached housing part has the same outer contour so that the housing can also be accommodated with the attached housing part without any problems.
  • the at least one attached housing part is offset from the housing of the vacuum pump. This configuration is implemented with corresponding customer-specific requirements.
  • the pump according to the invention is advantageously fastened in an arrangement with a rail system.
  • the rail system allows the vacuum pump to be assembled and disassembled from one side by axially pushing it in or pulling it out, as in the EP 2 228 540 A2 described.
  • the pump must then only be accessible from one side for assembly and disassembly, which means that the systems can be built more compactly and the pump can be serviced or replaced with less effort.
  • the areas between the sealing levels on the attached housing parts are set back, so that due to crowning and other shapes and bearing errors, the housing is not put under tension and is thus impermissibly deformed.
  • a modular construction of a housing of a vacuum pump as a basic pump with different housing extensions, that is to say housing parts of different lengths, is possible with the invention.
  • Fig. 1 shows a not claimed vacuum pump 1 with a housing 2.
  • the vacuum pump 1 has a rotor 3 which carries rotor blades 4.
  • the rotor blades 4 alternate with stator blades 5 and form different vacuum pump stages of pump 1.
  • the rotor 3 is mounted on the high vacuum side by means of a bearing star 6. For the sake of clarity, the bearings are not shown. On the fore-vacuum side, the rotor 3 is also supported by means of bearings, for example ball bearings.
  • the housing 2 of the vacuum pump 1 has an axial inlet 7.
  • two radial inlets 8 and 9 are provided.
  • the housing part 10 has the same cross section and the same outer contour as the housing 2.
  • An outlet 12 of the housing part 10 is designed so that it completely overlaps the inlet 7 of the housing 2.
  • the housing 2 also has a radial outlet 13 which can be connected, for example, to a backing pump (not shown).
  • the pump-active structures such as rotor 3, rotor blades 4, stator blades 5, bearing star 6 are shown in FIG Fig. 1 arranged completely in the housing 2.
  • the attached housing part 10 merely forms an extension of the housing part 2. This example makes it possible for the housing 2 and the attached housing part 10 to have a total length L of at least 550 millimeters, preferably of at least 700 millimeters. This makes it possible to arrange the suction opening 11 relatively far away from the suction openings 8, 9 without the housing 2, if it were made in one piece, it would have to be manufactured with complex manufacturing machines.
  • an interface 19 is provided, which is in the Figures 5 to 8 is described.
  • Fig. 2 Z shows the vacuum pump 1 with the housing 2 and the attached housing part 10.
  • the housing 2 has only one radial inlet 9.
  • the attached housing part 10 extends the overall length of the housing part 2, so that the overall length of the housing 2 and the attached housing part 10 are almost twice as long as the overall length of the housing part 2.
  • the active pumping structures are arranged in the attached housing part 10.
  • the bearing star 6 and the pump stage arranged on the high vacuum side are located in the attached housing part 10.
  • Fig. 3 shows a further vacuum pump 1, in which no active pumping structures are shown within the housing 2.
  • the inlets 8, 9 and the radial outlet 13 are arranged.
  • the housing part 10 has a radial inlet 11.
  • the housing 2 also has a constriction 14 in order to reduce a reduction in the heat flow from the high vacuum to the rotor or to the housing part 2.
  • Fig. 4 shows the vacuum pump 1 with the housing 2 and the attached housing part 10 as well as the inlets 8, 9 and 11.
  • the housing and the housing part 10 have the same outer contour.
  • cooling fins 15 of housing 2 continue with identical shape as cooling fins 16 on housing part 10.
  • the constriction 14 can also be clearly seen.
  • strips 17, 18 are arranged on the housing 2 and on the housing part 10, which ensure additional stabilization of the housing parts 2, 10 with respect to one another and over the entire length of the vacuum pump 1.
  • FIG. Fig. 5 which represents an exemplary embodiment not belonging to the invention, an O-ring seal 20 is provided in the interface 19 in order to achieve a vacuum-tight connection between the housing 2 and the housing part 10.
  • the interface 19 has a sealing element 21 in addition to the O-ring 20.
  • the sealing element can be designed as a thermal and / or vibration-decoupling and / or electrical sealing element.
  • Fig. 7 shows the interface 19 with the O-ring 20 and a sealing element 22, which can also be designed as a thermal and / or vibration-decoupling and / or electrical sealing element 22.
  • a screw connection for connecting the housing 2 and the housing part 10 is shown. These The screw connection is used for the vacuum-tight and mechanical connection of the housing 2 and the housing part 10.
  • the screw connection consists of a screw 25 and a washer 26, which is mounted on an elastomer 24 for vibration decoupling.
  • a sleeve 23 is provided as a force transmission element.
  • Fig. 9 shows the arrangement of a not claimed vacuum pump 1, which is shown in an overall system with an arrangement of the vacuum pump 1 and a chamber 102.
  • the chamber 102 is designed as a multi-chamber system for differential pumping and therefore has a fore-vacuum chamber 121, a middle chamber 122, a further middle chamber 123 and a high-vacuum chamber 166. These chambers are connected to one another via openings 125, 126, 167, through which, for example, a gas particle beam passes.
  • a detector for example a mass spectrometer 124, is provided in the high vacuum chamber 166 and is controlled by a control assembly 136.
  • the chamber 102 has a chamber flange 120 to which a pump flange 110 is connected.
  • the pump flange 110 is part of the vacuum pump 1, which comprises a shaft 111 which is rotatably supported by a bearing 113 on the high vacuum side, for example a permanent magnet bearing.
  • the shaft 111 is set in rotation by a drive 114, so that compression and pumping speed are built up in the pump stages 115, 116.
  • the inlet of the pump stage 115 is connected to the central chamber 122 via a suction opening 127.
  • the pumping stage 116 is connected to the central chamber 123 via the suction opening 128.
  • the pumping stage 168 protrudes the suction port 169 with the high vacuum pumping chamber 166 in communication.
  • the outlets of the vacuum pump 1 and the fore-vacuum chamber 121 are connected via a fore-vacuum feed line 141 to a fore-pump 140, which further the gas condenses and expels against the atmosphere.
  • the pump stages 115, 116 and 168 are preferably designed as turbo-molecular pump stages.
  • the vacuum pump 1 and chamber 102 are supported by a frame 130.
  • the vacuum pump 1 is connected to the vacuum-tight chamber via a flange connection, that is to say via its flange and a pump flange.
  • This frame 130 also carries the control assembly 136 of the mass spectrometer as well as further components 133, 134, 135, for example power supply units, processing units and the like.
  • the frame 130 is covered with a cladding 131.
  • the vacuum pump 1 and the chamber 102 are accessible through a flap 132, but are surrounded by the other assemblies and components carried by the frame 130.
  • the flange connection is therefore difficult and essentially only accessible from the side facing the flap 132.
  • the assembly and disassembly of the vacuum pump can therefore only be carried out from this side.
  • the vacuum pump 1 has the housing 2 and the attached housing part 10.
  • the attached housing part 10 has the inlet 11, which is in communication with the suction opening 169. Due to the attached housing part 10, the vacuum pump has an overall length which, due to the in Fig. 9 arrangement shown is required.
  • the assembly is easy by the power transmission structure according to the Fig. 10 and 11 enables.
  • Fig. 10 shows a power transmission structure 165 in cross section to the shaft 111 through the vacuum pump and flange connection along the line II 'of FIG Fig. 9 .
  • Chamber flange 120 and pump flange 110 touch one another.
  • a seal 119 is provided which surrounds the suction opening 127 on the flange.
  • the spacer sleeve 118 provided between the pump stages and their components spaced apart and the last stator disk 117 of the high vacuum-side pump stage 168 can be seen in this section.
  • a fastening screw 151 fastens a bracket 150 to the chamber flange.
  • a first expansion element 152 and a second expansion element 153 are arranged between the bracket and the pump flange.
  • Fig. 11 is the corresponding section along the line II-II 'of Fig. 10 and shown parallel to shaft 111. It can be seen that part of the bracket 150, first expansion element 152, second expansion element 153 and part of pump flange 110 lie in a common plane.
  • the first expansion element 152 has a wedge surface 158 ′ and the second expansion element 153 has a wedge surface 158.
  • These wedge surfaces 158, 158 ′ touch one another in such a way that they can be displaced with respect to one another.
  • the displacement is brought about by a force introduction screw 155, which protrudes through a through hole in an arm 154 of the first expansion element and whose threaded part engages in a thread of the second expansion element 153.
  • the spreading elements 152, 153 have the effect that a force is transmitted from the introduction point 156 to an effective point 159 in the force transmission structure 165.
  • This power transmission makes it possible to generate a pressing force 160 even at the points that are associated with Fig. 9 and components surrounding the vacuum pump 1 are not accessible.
  • Another advantage of this example is that, in addition to the transmission of force, there is also force distribution via the pump flange and thus uniform contact pressure is achieved.
  • the force distribution of the force introduced on the flange 10 can be adjusted with the number of wedge surfaces and their angles.
  • the vacuum pump 1 can easily be in an arrangement as in Fig. 9 shown, assemble.
  • the vacuum pump is, as according to the Fig. 10 and 11 described, firmly fixed in the arrangement.

Description

Die Erfindung betrifft eine Vakuumpumpe sowie eine Anordnung mit einer Vakuumpumpe.The invention relates to a vacuum pump and an arrangement with a vacuum pump.

Vakuumpumpen, insbesondere Turbomolekularpumpen weisen mindestens einen in einem Pumpengehäuse angeordneten Rotor auf. Der Rotor ist von einem Statorpaket oder mehreren Statoren umgeben, das oder die von dem Pumpengehäuse getragen ist/werden. Ferner ist innerhalb des Pumpengehäuses eine Antriebseinrichtung, beispielsweise ein Elektromotor angeordnet, der den mindestens einen Rotor antreibt. Üblicherweise ist die Antriebswelle zur Rotorachse axial angeordnet.Vacuum pumps, in particular turbo-molecular pumps, have at least one rotor arranged in a pump housing. The rotor is surrounded by one or more stators that are carried by the pump housing. Furthermore, a drive device, for example an electric motor, which drives the at least one rotor, is arranged within the pump housing. The drive shaft is usually arranged axially to the rotor axis.

Mit Turbomolekularpumpen können hohe Kompressionsverhältnisse erzielt werden. Turbomolekularpumpen weisen gegenüber der Einlassöffnung, beziehungsweise dem Einlassstutzen eine sehr kleine Auslassöffnung, beziehungsweise einen kleinen Auslassstutzen auf. Mit dem Auslassstutzen ist üblicherweise über eine Leitung eine Vorvakuumpumpe verbunden.High compression ratios can be achieved with turbo molecular pumps. Turbomolecular pumps have opposite the inlet opening or the inlet nozzle has a very small outlet opening or a small outlet nozzle. A backing pump is usually connected to the outlet connection via a line.

Anordnungen mit Vakuumpumpe und Rezipienten, im Folgenden Kammer genannt, unterliegen einer Vielzahl von Anforderungen hinsichtlich ihrer geometrischen Gestaltung. So besteht beispielsweise beim Bau von Massenspektrometern der Wunsch nach kompakten Abmessungen des Gesamtsystems. Dies führt oftmals zu einer Positionierung der Vakuumpumpe im Endgerät, bei der ihre Zugänglichkeit erheblich eingeschränkt ist. Trotzdem soll der Service an diesen Vakuumpumpen, beispielsweise der präventive Austausch von Wälzlagern leicht möglich sein.Arrangements with a vacuum pump and recipient, hereinafter referred to as a chamber, are subject to a large number of requirements with regard to their geometric design. When building mass spectrometers, for example, there is a desire for compact dimensions of the overall system. This often leads to a positioning of the vacuum pump in the end device in which its accessibility is considerably restricted. Nevertheless, servicing these vacuum pumps, for example preventive replacement of rolling bearings, should be easy.

Gemäß dem Stand der Technik ( EP 2 228 540 A2 ) wird hierzu eine Anordnung mit einer Vakuumpumpe vorgeschlagen, welche einen Pumpenflansch aufweist. Die Anordnung weist einen Kammerflansch auf und eine den Pumpenflansch und den Kammerflansch umfassende Flanschverbindung zur vakuumdichten Verbindung von Kammer und Vakuum. Bei der Anordnung ist eine Kraftübertragungsstruktur vorgesehen, welche eine Kraft von einer Einleitungsstelle an wenigstens eine in der Flanschverbindung liegende Wirkstelle überträgt.According to the state of the art ( EP 2 228 540 A2 ) For this purpose, an arrangement with a vacuum pump is proposed, which has a pump flange. The arrangement has a chamber flange and a flange connection comprising the pump flange and the chamber flange for the vacuum-tight connection of the chamber and vacuum. In the arrangement, a force transmission structure is provided which transmits a force from an introduction point to at least one active point located in the flange connection.

Das bedeutet, dass die Vakuumpumpe üblicherweise in einer hierfür vorgesehenen Aufnahme der Anordnung angeordnet wird. Die Aufnahme kann in der Art eines Schienensystems ausgebildet sein. Pumpenflansch und Kammerflansch werden vakuumdicht miteinander verbunden. Hierbei werden Einlassöffnungen der Pumpe derart angeordnet, dass sie mit Auslassöffnungen der Kammer fluchtend und sich überdeckend angeordnet sind. Diese zum Stand der Technik gehörende Pumpe kann leicht aus der Anordnung nach Lösen der entsprechenden Verbindungs- und Befestigungsmittel herausgezogen werden, beispielsweise um einen präventiven Austausch von Wälzlagern vorzunehmen.This means that the vacuum pump is usually arranged in a receptacle in the arrangement provided for this purpose. The receptacle can be designed in the manner of a rail system. The pump flange and chamber flange are connected to one another in a vacuum-tight manner. Here, the inlet openings of the pump are arranged in such a way that they are in alignment and overlapping with the outlet openings of the chamber are arranged. This prior art pump can easily be pulled out of the arrangement after releasing the corresponding connecting and fastening means, for example in order to carry out a preventive exchange of rolling bearings.

Diese aus dem Stand der Technik bekannten Anordnungen müssen kundenspezifische Anforderungen hinsichtlich der Lage der Auslässe der Kammern und der Geometrie zur Aufnahme der Vakuumpumpen erfüllen.These arrangements known from the prior art must meet customer-specific requirements with regard to the position of the outlets of the chambers and the geometry for accommodating the vacuum pumps.

In einem System mit mehreren Ansaugöffnungen für verschiedene Druckniveaus werden, wie aus der Praxis bekannt, mehrere diskrete Pumpen eingesetzt. Besonders bei Massenspektrometern mit Time-Of-Flight-Systemen können zwischen den verschiedenen Ansaugöffnungen erhebliche Abstände entstehen. Time-Of-Flight-Massenspektrometer sind eine Unterklasse der Massenspektrometer. Es handelt sich hierbei um Flugzeitmassenspektrometer.As is known from practice, several discrete pumps are used in a system with several suction openings for different pressure levels. Particularly in the case of mass spectrometers with time-of-flight systems, there can be considerable gaps between the various suction openings. Time-of-flight mass spectrometers are a subclass of mass spectrometers. It is a time-of-flight mass spectrometer.

Aus der Praxis ist bekannt, bei diesen Anwendungen so genannte Splitflowpumpen einzusetzen. Bei den Splitflowpumpen handelt es sich um Vakuumpumpsysteme für mehrstufige Gaseinlasssysteme, wie sie beispielsweise aus der DE 43 31 589 A1 bekannt sind.It is known from practice to use so-called split-flow pumps in these applications. The split-flow pumps are vacuum pump systems for multi-stage gas inlet systems, such as those from the DE 43 31 589 A1 are known.

Diese zum Stand der Technik gehörenden Splitflowpumpen weisen üblicherweise Baulängen bis zu 500 Millimetern auf. Sind die Ansaugöffnungen jedoch weit voneinander entfernt, können, wie aus der Praxis bekannt, nur mit sehr großen und sehr teueren Bearbeitungsmaschinen Gehäuse gefertigt werden, die lang genug sind, um die großen Abstände der Ansaugöffnungen zu überbrücken.These split-flow pumps, which belong to the state of the art, usually have overall lengths of up to 500 millimeters. However, if the suction openings are far apart, as is known from practice, housings can only be manufactured with very large and very expensive processing machines that are long enough to bridge the large distances between the suction openings.

Zum Stand der Technik ( EP 0 731 278 A1 ) gehört eine Molekularvakuumpumpe, deren Gehäuse in mehrere Gehäusebauteile unterteilt ist. Diese zum Stand der Technik gehörende Vakuumpumpe kann hinsichtlich ihres Betriebes in Bezug auf eine Schwingungsentkopplung oder thermische Entkopplung noch verbessert werden.To the state of the art ( EP 0 731 278 A1 ) belongs to a molecular vacuum pump, the housing of which is divided into several housing components. This vacuum pump, which belongs to the state of the art, can still be improved with regard to its operation in terms of vibration decoupling or thermal decoupling.

Weiterhin gehört zum Stand der Technik ( DE 10 2008 061 805 A1 ) eine Vakuumpumpe mit mehreren Pumpeinrichtungen, die ebenfalls hinsichtlich einer Schwingungsentkopplung oder einer thermischen Kopplung noch verbessert werden kann.Furthermore, the state of the art ( DE 10 2008 061 805 A1 ) a vacuum pump with several pumping devices, which can also be improved with regard to vibration decoupling or thermal coupling.

Darüber hinaus gehört zum Stand der Technik ( EP 1 715 190 A1 ) ein schwingungsreduzierendes Bauteil und ein damit ausgerüstetes Vakuumpumpsystem. Um die Reduktion von übertragenen Schwingungen zu verbessern, wird gemäß diesem Stand der Technik vorgeschlagen, mindestens eines der schwingungsreduzierenden Bauteile als ein aktives Bauelement auszubilden, welches zu Schwingungen angeregt werden kann. Diese Ausführungsform ist relativ aufwendig und kostenintensiv.In addition, the state of the art ( EP 1 715 190 A1 ) a vibration-reducing component and a vacuum pump system equipped with it. In order to improve the reduction of transmitted vibrations, it is proposed according to this prior art to design at least one of the vibration-reducing components as an active component which can be excited to vibrate. This embodiment is relatively complex and expensive.

DE 10 2010 032 346 A1 und US 6435811 B1 offenbaren weitere Vakuumpumpen des Standes der Technik. DE 10 2010 032 346 A1 and US 6435811 B1 disclose further prior art vacuum pumps.

Das der Erfindung zugrunde liegende technische Problem besteht darin, die zum Stand der Technik gehörende Vakuumpumpe sowie die Anordnung mit einer Vakuumpumpe derart zu verbessern, dass kundenspezifische Anforderungen einfacher und kostengünstiger realisiert werden können und dass kostengünstig Vakuumpumpen mit großen Baulängen herstellbar sind.The technical problem on which the invention is based is to improve the vacuum pump belonging to the prior art and the arrangement with a vacuum pump in such a way that customer-specific requirements can be implemented more easily and inexpensively and that vacuum pumps with large overall lengths can be manufactured inexpensively.

Dieses technische Problem wird durch eine Vakuumpumpe mit den Merkmalen gemäß Anspruch 1 sowie eine Anordnung mit einer Vakuumpumpe mit den Merkmalen gemäß Anspruch 5 gelöst.This technical problem is solved by a vacuum pump having the features according to claim 1 and an arrangement with a vacuum pump having the features according to claim 5.

Die erfindungsgemäße Vakuumpumpe mit einem Gehäuse und einer Pumpeinheit, welche lediglich eine Antriebseinheit für einen Rotor, der in einem Stator drehbar gelagert ist, aufweist, bei dem an dem Gehäuse in axialer Richtung wenigstens ein angesetztes, mit dem Gehäuse verbindbares, zusätzliches Gehäuseteil angeordnet ist, und bei dem in axialer Richtung in dem Gehäuse eine Einlassöffnung und in dem wenigstens einen zusätzlichen Gehäuseteil eine Auslassöffnung vorgesehen sind, zeichnet sich dadurch aus, dass das Gehäuse und das wenigstens eine angesetzte Gehäuseteil eine Gesamtlänge von wenigstens 550 Millimetern, vorzugsweise von wenigstens 700 Millimetern aufweisen, dass das wenigstens eine angesetzte Gehäuseteil keinen axialen Einlass und wenigstens einen radialen Einlass aufweist und dass der wenigstens eine radiale Einlass des angesetzten Gehäuseteiles vorzugsweise an einem antriebsfernen Ende des angesetzten Gehäuseteiles angeordnet ist, dass in dem Gehäuse und in dem angesetzten Gehäuseteil wenigstens teilweise pumpaktive Strukturen der Vakuumpumpe angeordnet sind, und dass die Einlassöffnung des Gehäuses und die Auslassöffnung des angesetzten Gehäuseteiles sich überdeckend ausgebildet sind.The vacuum pump according to the invention with a housing and a pump unit, which only has a drive unit for a rotor which is rotatably mounted in a stator, in which at least one additional housing part attached to the housing, which can be connected to the housing, is arranged in the axial direction, and in which an inlet opening is provided in the axial direction in the housing and an outlet opening is provided in the at least one additional housing part, is characterized in that the housing and the at least one attached housing part have a total length of at least 550 millimeters, preferably of at least 700 millimeters that the at least one attached housing part has no axial inlet and at least one radial inlet and that the at least one radial inlet of the attached housing part is preferably arranged at an end of the attached housing part remote from the drive, that in the housing and in the attached G ehäuseteil at least partially pump-active structures of the vacuum pump are arranged, and that the inlet opening of the housing and the outlet opening of the attached housing part are designed to overlap.

Die erfindungsgemäße Vakuumpumpe weist den Vorteil auf, dass durch das zusätzliche, in axialer Richtung angesetzte Gehäuseteil eine große Baulänge der Vakuumpumpe, wie sie häufig von Kundenseite gefordert wird, realisierbar ist. Darüber hinaus kann eine Standard-Vakuumpumpe verwendet werden, und das angesetzte Gehäuseteil weist dann die für die kundenspezifischen Anforderungen geforderten Abmessungen auf.The vacuum pump according to the invention has the advantage that the additional housing part attached in the axial direction enables the vacuum pump to have a large overall length, as is often required by customers. In addition, a standard vacuum pump can be used, and the attached housing part then has the dimensions required for the customer-specific requirements.

Darüber hinaus können Vakuumpumpen mit einem durchgehenden Gehäuse mit größeren Baulängen hergestellt werden, als es mit den bisher bekannten Werkzeugen möglich ist. Die Baulänge des Gehäuses ist nämlich durch die zum Stand der Technik gehörenden Werkzeugmaschinen in der Länge begrenzt.In addition, vacuum pumps can be manufactured with a continuous housing with greater overall lengths, than is possible with the previously known tools. The overall length of the housing is limited in length by the machine tools belonging to the prior art.

Durch das Vorsehen wenigstens eines zusätzlichen Gehäuseteiles können im Prinzip beliebige Längen geschaffen werden.By providing at least one additional housing part, any length can in principle be created.

Dabei weist das angesetzte Gehäuseteil gegenüber einem beispielsweise angesetzten Rohr den Vorteil auf, dass der Durchmesser und die Außenkontur des Gehäuses durchgehend und gleichbleibend für die gesamte Vakuumpumpe ausgebildet sind, so dass Flansche, Öffnungen, Schienensysteme und dergleichen in Anordnungen, beispielsweise mit einem Massenspektrometer von der erfindungsgemäßen Pumpe genutzt werden können.The attached housing part has the advantage over an attached pipe, for example, that the diameter and the outer contour of the housing are continuous and constant for the entire vacuum pump, so that flanges, openings, rail systems and the like in arrangements, for example with a mass spectrometer from the Pump according to the invention can be used.

Darüber hinaus weisen angesetzte Rohre häufig eine Abwinklung auf, um mit einem in radialer Richtung zur Längsachse der Pumpe angeordneten Auslass einer Pumpenkammer verbunden werden zu können. Durch diese Abwinklung ist eine zum Stand der Technik gehörende Vakuumpumpe mit einem angesetzten Rohr in bestehenden Aufnahmen einer Anordnung nicht einsetzbar.In addition, attached pipes often have an angle in order to be able to be connected to an outlet of a pump chamber arranged in the radial direction to the longitudinal axis of the pump. As a result of this angling, a vacuum pump belonging to the prior art with an attached pipe cannot be used in existing receptacles in an arrangement.

Erfindungsgemäß weist das wenigstens eine angesetzte Gehäuseteil wenigstens einen radialen Einlass auf.According to the invention, the at least one attached housing part has at least one radial inlet.

Dieser radiale Einlass dient zur Verbindung mit einem Auslass einer Pumpenkammer der Anordnung, in der die Vakuumpumpe angeordnet wird.This radial inlet serves to connect to an outlet of a pump chamber of the arrangement in which the vacuum pump is arranged.

Gemäß der Erfindung ist vorgesehen, dass zwischen dem Gehäuse der Vakuumpumpe und dem angesetzten Gehäuseteil wenigstens ein thermisch isolierendes und/oder schwingungsentkoppelndes und/oder elektrisch isolierendes Element vorgesehen ist. Diese Funktion kann zum Beispiel in einem besonders gestalteten Dichtungselement integriert sein.According to the invention it is provided that at least one thermally insulating and / or vibration decoupling and / or electrically insulating element is provided between the housing of the vacuum pump and the attached housing part. This function can, for example, be integrated in a specially designed sealing element.

Hierdurch ist es möglich, beispielsweise eine thermische Entkopplung zwischen den Gehäuseteilen zu verwirklichen. Auch eine elektrische Isolierung und/oder eine Schwingungsentkopplung ist hierdurch möglich.This makes it possible, for example, to achieve thermal decoupling between the housing parts. Electrical insulation and / or vibration decoupling is also possible as a result.

Weist die Anordnung mehrere Kammern auf, ist es vorteilhaft, wenn das angesetzte Gehäuseteil eine entsprechende Anzahl von Einlässen aufweist, die jeweils mit dem Auslass der Kammern zur Deckung kommen.If the arrangement has several chambers, it is advantageous if the attached housing part has a corresponding number of inlets, each of which is congruent with the outlet of the chambers.

Eine weitere vorteilhafte Ausführungsform der Erfindung sieht vor, dass der wenigstens eine radiale Einlass des angesetzten Gehäuseteiles an einem antriebsfernen Ende des angesetzten Gehäuseteiles angeordnet ist.A further advantageous embodiment of the invention provides that the at least one radial inlet of the attached housing part is arranged at an end of the attached housing part remote from the drive.

Anordnungen, beispielsweise mit Massenspektrometern mit Time-Of-Flight-Systemen, weisen häufig erhebliche Abstände zwischen den verschiedenen Ansaugöffnungen auf. Dadurch, dass in dem angesetzten Gehäuseteil die radialen Einlässe kundenspezifisch ausgebildet sein können, ist es von Vorteil, den wenigstens einen Einlass oder den letzten radialen Einlass am antriebsfernen Ende, das heißt an dem Ende des Gehäuseteiles, der von den pumpaktiven Strukturen entfernt angeordnet ist, vorzusehen.Arrangements, for example with mass spectrometers with time-of-flight systems, often have considerable distances between the various suction openings. Because the radial inlets in the attached housing part can be designed in a customer-specific manner, it is advantageous to have the at least one inlet or the last radial inlet at the end remote from the drive, i.e. at the end of the housing part which is arranged away from the active pumping structures. to be provided.

Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung weist das Gehäuse der Vakuumpumpe wenigstens einen radialen Einlass auf. Das bedeutet, dass die Vakuumpumpe in dem Gehäuse, an dem das zusätzliche Gehäuse angesetzt wird, selbst schon wenigstens einen radialen Einlass aufweist.According to a further advantageous embodiment of the invention, the housing of the vacuum pump has at least one radial inlet. This means that the vacuum pump itself already has at least one radial inlet in the housing to which the additional housing is attached.

Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung weist das wenigstens eine angesetzte Gehäuseteil wenigstens teilweise eine zu dem Gehäuse gleiche Außenkontur auf. Hierdurch ist gewährleistet, dass das Gehäuse der Vakuumpumpe und das angesetzte Gehäuseteil die Außenkontur und Form eines einzigen Gehäuses aufweist. Hierdurch ist es möglich, die Vakuumpumpe besonders vorteilhaft in einer Aufnahme einer Anordnung, beispielsweise mit einem Massenspektrometer, anzuordnen.According to a further advantageous embodiment of the invention, the at least one attached housing part has at least partially an outer contour that is the same as that of the housing. This ensures that the housing of the vacuum pump and the attached housing part have the outer contour and shape of a single housing. This makes it possible to use the vacuum pump particularly advantageously in one Recording an arrangement, for example with a mass spectrometer, to be arranged.

Die identischen Außenkonturen von Gehäuse und angesetztem Gehäuseteil können beispielsweise durch Einschnürungen unterbrochen werden.The identical outer contours of the housing and the attached housing part can be interrupted, for example, by constrictions.

Erfindungsgemäß sind in dem angesetzten Gehäuseteil wenigstens teilweise pumpaktive Strukturen der Vakuumpumpe angeordnet.According to the invention, at least partially active pumping structures of the vacuum pump are arranged in the attached housing part.

Es besteht zum Beispiel die Möglichkeit, dass ein Lagerstern für ein Lager des Rotors der Vakuumpumpe in dem angesetzten Gehäuseteil angeordnet ist.There is, for example, the possibility that a bearing star for a bearing of the rotor of the vacuum pump is arranged in the attached housing part.

Andere Bauteile können ebenfalls in dem Gehäuseteil vorgesehen werden.Other components can also be provided in the housing part.

Ein nicht beanspruchtes Beispiel sieht vor, dass in dem angesetzten Gehäuseteil keine pumpaktiven Strukturen der Vakuumpumpe angeordnet sind. In diesem Fall bildet das wenigstens eine angesetzte Gehäuseteil eine reine Verlängerung des Gehäuses der Vakuumpumpe.An example not claimed provides that no pump-active structures of the vacuum pump are arranged in the attached housing part. In this case, the at least one attached housing part forms a pure extension of the housing of the vacuum pump.

Das Gehäuse und das wenigstens eine angesetzte Gehäuseteil weisen erfindungsgemäß eine Gesamtlänge von wenigstens 550 Millimetern auf. Längen von Gehäusen von Vakuumpumpen mit weniger als 500 Millimetern lassen sich mit dem üblichen Kostenaufwand auf herkömmlichen Maschinen fertigen.According to the invention, the housing and the at least one attached housing part have a total length of at least 550 millimeters. Vacuum pump housings with lengths of less than 500 millimeters can be manufactured on conventional machines at the usual expense.

Das Gehäuse und das wenigstens eine angesetzte Gehäuseteil weisen vorteilhaft eine Gesamtlänge von wenigstens 700 Millimetern auf. Die Erfindung ist besonders vorteilhaft bei Längen von mehr als 550 Millimetern, beispielsweise Längen von mehr als 700 Millimetern sinnvoll einsetzbar.The housing and the at least one attached housing part advantageously have a total length of at least 700 millimeters. The invention is particularly advantageous for lengths greater than 550 millimeters, for example Lengths of more than 700 millimeters can be used sensibly.

Erfindungsgemäß sind die Einlassöffnungen des Gehäuses und die Auslassöffnung des angesetzten Gehäuseteiles sich überdeckend ausgebildet. Hierdurch wird gewährleistet, dass das angesetzte Gehäuseteil wie eine Verlängerung des Gehäuses der Vakuumpumpe wirkt.According to the invention, the inlet openings of the housing and the outlet opening of the attached housing part are designed to overlap. This ensures that the attached housing part acts like an extension of the housing of the vacuum pump.

Gemäß einem nicht beanspruchten Beispiel sind die Einlassöffnung eines ersten angesetzten Gehäuseteiles und die Auslassöffnung eines zweiten angesetzten Gehäuseteiles sich ebenfalls überdeckend ausgebildet, um eine weitere Verlängerung des Gehäuses zu ermöglichen.According to an example not claimed, the inlet opening of a first attached housing part and the outlet opening of a second attached housing part are also designed to overlap in order to enable a further extension of the housing.

Gemäß einer vorteilhaften Ausführungsform der Erfindung ist die Vakuumpumpe als Turbomolekularpumpe ausgebildet.According to an advantageous embodiment of the invention, the vacuum pump is designed as a turbo molecular pump.

Es ist jedoch auch möglich, andere Pumpentypen mit der erfindungsgemäßen Gehäuseverlängerung vorzusehen.However, it is also possible to provide other types of pumps with the housing extension according to the invention.

Die Vakuumpumpe kann gemäß einer weiteren Ausführungsform als Pumpe mit wenigstens zwei Gaseinlässen ausgebildet sein. Dieser Pumpentyp wird auch Splitflowpumpe genannt. Dieser Pumpentyp mit einem mehrstufigen Gaseinlasssystem wird häufig in Anordnungen beispielsweise mit Massenspektrometern verwendet. Gerade bei diesen Anordnungen ist eine an kundenspezifische Anforderungen angepasste Ausführung des Gehäuses auch häufig gewünscht.According to a further embodiment, the vacuum pump can be designed as a pump with at least two gas inlets. This type of pump is also called a split flow pump. This type of pump with a multi-stage gas inlet system is often used in arrangements with, for example, mass spectrometers. With these arrangements in particular, a design of the housing that is adapted to customer-specific requirements is also often desired.

Die Vakuumpumpe kann beispielsweise wenigstens eine Turbomolekularpumpstufe und/oder wenigstens eine Holweckpumpstufe aufweisen. Die wenigstens eine Holweckpumpstufe ist üblicherweise der wenigstens einen Turbomolekularpumpstufe in Gasförderrichtung nachgeordnet. Die Gaseinlässe sind vorzugsweise vor, zwischen oder hinter den Turbomolekularpumpstufen und/oder Holweckpumpstufen angeordnet.The vacuum pump can, for example, have at least one turbo-molecular pump stage and / or at least one Holweck pump stage. The at least one Holweck pump stage is usually arranged downstream of the at least one turbo-molecular pump stage in the direction of gas delivery. The gas inlets are preferably arranged in front of, between or behind the turbo molecular pump stages and / or Holweck pump stages.

Die erfindungsgemäße Anordnung gemäß Anspruch 5 mit einer Vakuumpumpe mit den Merkmalen gemäß Anspruch 1 zeichnet sich dadurch aus, dass die Anordnung ein Massenspektrometer aufweist, dass die Anordnung wenigstens einen Pumpenflansch und eine Kammer mit einem Kammerflansch aufweist, wobei die Anordnung eine einen Pumpenflansch und einen Kammerflansch umfassende Flanschverbindung zur vakuumdichten Verbindung von Kammer und Vakuumpumpe aufweist, und dass das wenigstens eine angesetzte Gehäuseteil wenigstens einen radialen Einlass aufweist, der mit wenigstens einer Kammer der Anordnung verbindbar ausgebildet ist.The inventive arrangement according to claim 5 with a vacuum pump with the features according to claim 1 is characterized in that the arrangement has a mass spectrometer, that the arrangement has at least one pump flange and a chamber with a chamber flange, the arrangement having a pump flange and a chamber flange has comprehensive flange connection for the vacuum-tight connection of the chamber and vacuum pump, and that the at least one attached housing part has at least one radial inlet which is designed to be connectable to at least one chamber of the arrangement.

Durch diese erfindungsgemäße Ausführung einer Anordnung mit einer Vakuumpumpe kann die Vakuumpumpe in einer Anordnung mit mehreren Ansaugöffnungen verwendet werden, bei denen die Ansaugöffnungen weit voneinander entfernt sind, ohne dass besonders hohe Bearbeitungs- und Fertigungskosten bei der Herstellung des Gehäuses auftreten.This inventive embodiment of an arrangement with a vacuum pump, the vacuum pump can be used in an arrangement with several suction openings, in which the suction openings are far apart, without particularly high processing and manufacturing costs in the manufacture of the housing.

Gemäß einer besonders bevorzugten Ausführungsform der Erfindung weist die Anordnung eine Kraftübertragungsstruktur auf, welche als eine eine Kraft von einer Einleitungsstelle an wenigstens eine in der Flanschverbindung liegende Wirkstelle übertragende Kraftübertragungsstruktur ausgebildet ist. Diese Kraftübertragungsstruktur ist in der EP 2 228 540 A2 beschrieben.According to a particularly preferred embodiment of the invention, the arrangement has a force transmission structure which is designed as a force transmission structure which transmits a force from an introduction point to at least one active point located in the flange connection. This power transmission structure is in the EP 2 228 540 A2 described.

Die erfindungsgemäße Anordnung wird bei Anordnungen mit Massenspektrometern eingesetzt, da in diesen Anordnungen mehrere Gaseinlässe vorliegen, die unter Umständen Ansaugöffnungen aufweisen, die weit auseinander liegen.The arrangement according to the invention is used in arrangements with mass spectrometers, since in these arrangements there are several gas inlets which, under certain circumstances, have suction openings that are far apart.

Gemäß einer weiteren besonders bevorzugten Ausführungsform der Erfindung weist das Gehäuse der Vakuumpumpe und das wenigstens eine angesetzte Gehäuseteil eine an eine in der Anordnung angeordnete Aufnahme angepasste Außenkontur auf. Hierdurch ist es möglich, die Vakuumpumpe mit dem wenigstens einen angesetzten Gehäuseteil in eine vorgegebene Struktur einer Anordnung einzufügen. Die Aufnahmen in den Anordnungen für Gehäuse von Vakuumpumpen sind der Außenkontur des Gehäuses der Vakuumpumpe angepasst ausgebildet. In diesem Fall ist es vorteilhaft, wenn das angesetzte Gehäuseteil die gleiche Außenkontur aufweist, damit auch die Aufnahme des Gehäuses mit dem angesetzten Gehäuseteil problemlos möglich ist.According to a further particularly preferred embodiment of the invention, the housing of the vacuum pump and the at least one attached housing part have an outer contour that is adapted to a receptacle arranged in the arrangement. This makes it possible to insert the vacuum pump with the at least one attached housing part into a predetermined structure of an arrangement. The recordings in the arrangements for housings of vacuum pumps are the outer contour of the housing of the vacuum pump adapted. In this case, it is advantageous if the attached housing part has the same outer contour so that the housing can also be accommodated with the attached housing part without any problems.

Grundsätzlich besteht auch die Möglichkeit, dass das wenigstens eine angesetzte Gehäuseteil einen Versatz zu dem Gehäuse der Vakuumpumpe aufweist. Diese Ausgestaltung wird bei entsprechenden kundenspezifischen Anforderungen realisiert.In principle, there is also the possibility that the at least one attached housing part is offset from the housing of the vacuum pump. This configuration is implemented with corresponding customer-specific requirements.

Da durch Toleranzen von einzelnen Gehäuseteilen und beim Fügeprozess Form- und Lageabweichungen des Gehäuses und des wenigstens einen angesetzten Gehäuseteiles zueinander entstehen, ist es vorteilhaft, das Lager der Hochvakuumseite in dem Gehäuse der Vakuumpumpe vorzusehen. Die Toleranzen für die angesetzten Gehäuseteile können dann größer gewählt werden.Since tolerances of individual housing parts and the joining process result in deviations in shape and position of the housing and the at least one attached housing part, it is advantageous to provide the bearing on the high vacuum side in the housing of the vacuum pump. The tolerances for the attached housing parts can then be selected larger.

Vorteilhaft wird die erfindungsgemäße Pumpe mit einem Schienensystem in einer Anordnung befestigt. Das Schienensystem erlaubt die Montage und Demontage der Vakuumpumpe von einer Seite durch axiales Einschieben beziehungsweise Herausziehen, wie in der EP 2 228 540 A2 beschrieben. Die Zugänglichkeit der Pumpe muss dann für die Montage und Demontage nur noch von einer Seite gegeben sein, wodurch die Systeme kompakter gebaut werden können, beziehungsweise die Pumpe mit geringerem Aufwand gewartet oder getauscht werden kann.The pump according to the invention is advantageously fastened in an arrangement with a rail system. The rail system allows the vacuum pump to be assembled and disassembled from one side by axially pushing it in or pulling it out, as in the EP 2 228 540 A2 described. The pump must then only be accessible from one side for assembly and disassembly, which means that the systems can be built more compactly and the pump can be serviced or replaced with less effort.

Vorteilhaft werden die Bereiche zwischen den Dichtebenen auf den angesetzten Gehäuseteilen zurückgesetzt ausgeführt, damit aufgrund von Balligkeiten und sonstigen Form- und Lagerfehlern das Gehäuse nicht unter Spannung gesetzt und so unzulässig verformt wird.Advantageously, the areas between the sealing levels on the attached housing parts are set back, so that due to crowning and other shapes and bearing errors, the housing is not put under tension and is thus impermissibly deformed.

Durch den großen Abstand der radialen Ansaugöffnung in dem angesetzten Gehäuseteil zu dem Gehäuse wird es möglich, besonders den Hochvakuumbereich der Pumpe mit höheren Temperaturen auszuheizen. Die große Oberfläche und die Baulänge des wenigstens einen angesetzten Gehäuseteiles wirken sich positiv auf das Temperaturverhalten der Pumpe aus.Due to the large distance between the radial suction opening in the attached housing part and the housing, it is possible, in particular, to heat up the high vacuum area of the pump at higher temperatures. The large surface and the overall length of the at least one attached housing part have a positive effect on the temperature behavior of the pump.

Durch die Mehrstückigkeit ist es möglich, zusätzlich eine thermische Entkopplung zwischen den Gehäuseteilen und dem Gehäuse der Vakuumpumpe zu verwirklichen.As a result of the multiple pieces, it is possible to additionally implement a thermal decoupling between the housing parts and the housing of the vacuum pump.

Ein modularer Aufbau eines Gehäuses einer Vakuumpumpe als Basispumpe mit verschiedenen Gehäuseverlängerungen, das heißt verschieden langen angesetzten Gehäuseteilen, ist durch die Erfindung möglich. Es ist jedoch auch möglich, die Basispumpe mit einem Deckel anstelle einer Verlängerung zu betreiben.A modular construction of a housing of a vacuum pump as a basic pump with different housing extensions, that is to say housing parts of different lengths, is possible with the invention. However, it is also possible to operate the basic pump with a cover instead of an extension.

Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der mehrere Ausführungsbeispiele einer erfindungsgemäßen Vakuumpumpe nur beispielhaft dargestellt sind. In der Zeichnung zeigen:

Fig. 1
einen Längsschnitt durch eine nicht beanspruchte Vakuumpumpe mit insgesamt drei Einlässen;
Fig. 2
einen Längsschnitt durch eine erfindungsgemäße Vakuumpumpe mit insgesamt zwei Einlässen;
Fig. 3
eine Vakuumpumpe im Längsschnitt ohne pumpaktive Strukturen;
Fig. 4
eine perspektivische Ansicht einer Vakuumpumpe;
Fig. 5
einen Längsschnitt der Verbindung zwischen Gehäuse und Gehäuseteil (nicht zur Erfindung gehörend);
Fig. 6
einen Längsschnitt der Verbindung zwischen Gehäuse und Gehäuseteil;
Fig. 7
einen Längsschnitt der Verbindung zwischen Gehäuse und Gehäuseteil;
Fig. 8
eine Schraubenverbindung zwischen Gehäuse und Gehäuseteil;
Fig. 9
eine Darstellung einer Anordnung mit Kammer und nicht beanspruchter Vakuumpumpe in einem Gesamtsystem;
Fig. 10
einen Schnitt durch die Flanschverbindung entlang der Linie I-I' der Fig. 9;
Fig. 11
einen Schnitt durch die Flanschverbindung entlang der Linie II-II' der Fig. 10.
Further features and advantages of the invention emerge from the associated drawing, in which several exemplary embodiments of a vacuum pump according to the invention are shown only by way of example. In the drawing show:
Fig. 1
a longitudinal section through a vacuum pump not claimed with a total of three inlets;
Fig. 2
a longitudinal section through a vacuum pump according to the invention with a total of two inlets;
Fig. 3
a vacuum pump in longitudinal section without active pumping structures;
Fig. 4
a perspective view of a vacuum pump;
Fig. 5
a longitudinal section of the connection between the housing and housing part (not belonging to the invention);
Fig. 6
a longitudinal section of the connection between the housing and housing part;
Fig. 7
a longitudinal section of the connection between the housing and housing part;
Fig. 8
a screw connection between the housing and the housing part;
Fig. 9
a representation of an arrangement with chamber and vacuum pump not claimed in an overall system;
Fig. 10
a section through the flange connection along the line II 'of Fig. 9 ;
Fig. 11
a section through the flange connection along the line II-II 'of Fig. 10 .

Fig. 1 zeigt eine nicht beanspruchte Vakuumpumpe 1 mit einem Gehäuse 2. Die Vakuumpumpe 1 weist einen Rotor 3 auf, der Rotorschaufeln 4 trägt. Die Rotorschaufeln 4 wechseln sich mit Statorschaufeln 5 ab und bilden verschiedene Vakuumpumpstufen der Pumpe 1. Fig. 1 shows a not claimed vacuum pump 1 with a housing 2. The vacuum pump 1 has a rotor 3 which carries rotor blades 4. The rotor blades 4 alternate with stator blades 5 and form different vacuum pump stages of pump 1.

Der Rotor 3 ist mittels eines Lagersternes 6 hochvakuumseitig gelagert. Wegen der besseren Übersicht sind die Lager nicht dargestellt. Vorvakuumseitig ist der Rotor 3 ebenfalls mittels Lagern, beispielsweise Kugellagern, gelagert.The rotor 3 is mounted on the high vacuum side by means of a bearing star 6. For the sake of clarity, the bearings are not shown. On the fore-vacuum side, the rotor 3 is also supported by means of bearings, for example ball bearings.

Das Gehäuse 2 der Vakuumpumpe 1 weist einen axialen Einlass 7 auf. Darüber hinaus sind zwei radiale Einlässe 8 und 9 vorgesehen.The housing 2 of the vacuum pump 1 has an axial inlet 7. In addition, two radial inlets 8 and 9 are provided.

An dem Gehäuse 2 ist ein zusätzliches Gehäuseteil 10 angeordnet, welches einen weiteren radialen Einlass 11 aufweist. Das Gehäuseteil 10 weist den gleichen Querschnitt und die gleiche Außenkontur wie das Gehäuse 2 auf. Ein Auslass 12 des Gehäuseteiles 10 ist vollständig überdeckend mit dem Einlass 7 des Gehäuses 2 ausgebildet.An additional housing part 10, which has a further radial inlet 11, is arranged on the housing 2. The housing part 10 has the same cross section and the same outer contour as the housing 2. An outlet 12 of the housing part 10 is designed so that it completely overlaps the inlet 7 of the housing 2.

Das Gehäuse 2 weist darüber hinaus einen radialen Auslass 13 auf, der beispielsweise mit einer Vorvakuumpumpe (nicht dargestellt) verbunden werden kann.The housing 2 also has a radial outlet 13 which can be connected, for example, to a backing pump (not shown).

Die pumpaktiven Strukturen wie Rotor 3, Rotorschaufeln 4, Statorschaufeln 5, Lagerstern 6 sind gemäß Fig. 1 vollständig in dem Gehäuse 2 angeordnet. Das angesetzte Gehäuseteil 10 bildet lediglich eine Verlängerung des Gehäuseteiles 2. Durch dieses Beispiel ist es möglich, dass das Gehäuse 2 und das angesetzte Gehäuseteil 10 eine Gesamtlänge L von mindestens 550 Millimetern, vorzugsweise von mindestens 700 Millimetern aufweist. Hierdurch ist es möglich, die Ansaugöffnung 11 relativ weit entfernt von den Ansaugöffnungen 8, 9 anzuordnen, ohne dass das Gehäuse 2, wenn es einstückig ausgebildet wäre, mit aufwändigen Fertigungsmaschinen gefertigt werden muss.The pump-active structures such as rotor 3, rotor blades 4, stator blades 5, bearing star 6 are shown in FIG Fig. 1 arranged completely in the housing 2. The attached housing part 10 merely forms an extension of the housing part 2. This example makes it possible for the housing 2 and the attached housing part 10 to have a total length L of at least 550 millimeters, preferably of at least 700 millimeters. This makes it possible to arrange the suction opening 11 relatively far away from the suction openings 8, 9 without the housing 2, if it were made in one piece, it would have to be manufactured with complex manufacturing machines.

Zwischen dem Gehäuse 2 und dem Gehäuseteil 10 ist eine Schnittstelle 19 vorgesehen, die in den Fig. 5 bis 8 beschrieben wird.Between the housing 2 and the housing part 10, an interface 19 is provided, which is in the Figures 5 to 8 is described.

Gemäß Fig. 2 ist Z erfindungsgemäß die Vakuumpumpe 1 dargestellt mit dem Gehäuse 2 und dem angesetzten Gehäuseteil 10.According to Fig. 2 Z, according to the invention, shows the vacuum pump 1 with the housing 2 and the attached housing part 10.

Gleiche Bauteile weisen gleiche Bezugszahlen auf und werden im Einzelnen nicht noch einmal genauer beschrieben. Gemäß diesem Ausführungsbeispiel weist das Gehäuse 2 lediglich einen radialen Einlass 9 auf.The same components have the same reference numbers and are not described again in more detail. According to this exemplary embodiment, the housing 2 has only one radial inlet 9.

Das angesetzte Gehäuseteil 10 verlängert die Baulänge des Gehäuseteiles 2, so dass die Baulänge des Gehäuses 2 und des angesetzten Gehäuseteiles 10 fast doppelt so lang sind wie die Baulänge des Gehäuseteiles 2.The attached housing part 10 extends the overall length of the housing part 2, so that the overall length of the housing 2 and the attached housing part 10 are almost twice as long as the overall length of the housing part 2.

Wie in Fig. 2 zu erkennen ist, ist ein Teil der pumpaktiven Strukturen in dem angesetzten Gehäuseteil 10 angeordnet. So befindet sich zum Beispiel der Lagerstern 6 und die hochvakuumseitig angeordnete Pumpstufe in dem angesetzten Gehäuseteil 10.As in Fig. 2 As can be seen, some of the active pumping structures are arranged in the attached housing part 10. For example, the bearing star 6 and the pump stage arranged on the high vacuum side are located in the attached housing part 10.

Fig. 3 zeigt eine weitere Vakuumpumpe 1, bei der keine pumpaktiven Strukturen innerhalb des Gehäuses 2 dargestellt sind. In dem Gehäuse 2 sind die Einlässe 8, 9 und der radiale Auslass 13 angeordnet. Das Gehäuseteil 10 weist einen radialen Einlass 11 auf. Das Gehäuse 2 weist darüber hinaus eine Einschnürung 14 auf, um eine Reduzierung des Wärmestromes vom Hochvakuum zum Rotor, beziehungsweise zum Gehäuseteil 2 zu reduzieren. Fig. 3 shows a further vacuum pump 1, in which no active pumping structures are shown within the housing 2. In the housing 2, the inlets 8, 9 and the radial outlet 13 are arranged. The housing part 10 has a radial inlet 11. The housing 2 also has a constriction 14 in order to reduce a reduction in the heat flow from the high vacuum to the rotor or to the housing part 2.

Fig. 4 zeigt die Vakuumpumpe 1 mit dem Gehäuse 2 und dem angesetzten Gehäuseteil 10 sowie den Einlässen 8, 9 und 11. Wie in Fig. 4 zu erkennen ist, weisen das Gehäuse und das Gehäuseteil 10 die gleiche Aussenkontur auf. Beispielsweise setzen sich Kühlrippen 15 des Gehäuses 2 formidentisch als Kühlrippen 16 an dem Gehäuseteil 10 fort. In Fig. 4 ist darüber hinaus die Einschnürung 14 deutlich zu erkennen. Darüber hinaus sind an dem Gehäuse 2 und an dem Gehäuseteil 10 Leisten 17, 18 angeordnet, die eine zusätzliche Stabilisierung der Gehäuseteile 2, 10 zueinander und über die gesamte Länge der Vakuumpumpe 1 gewährleisten. Fig. 4 shows the vacuum pump 1 with the housing 2 and the attached housing part 10 as well as the inlets 8, 9 and 11. As in FIG Fig. 4 can be seen, the housing and the housing part 10 have the same outer contour. For example, cooling fins 15 of housing 2 continue with identical shape as cooling fins 16 on housing part 10. In Fig. 4 the constriction 14 can also be clearly seen. In addition, strips 17, 18 are arranged on the housing 2 and on the housing part 10, which ensure additional stabilization of the housing parts 2, 10 with respect to one another and over the entire length of the vacuum pump 1.

Die Verbindung zwischen dem Gehäuse 2 und dem Gehäuseteil 10 erfolgt über eine Schnittstelle 19. Gemäß Fig. 5, die ein nicht zur Erfindung gehörendes Ausführungsbeispiel darstellt, ist in der Schnittstelle 19 eine O-Ringdichtung 20 vorgesehen, um eine vakuumdichte Verbindung zwischen dem Gehäuse 2 und dem Gehäuseteil 10 zu erzielen.The connection between the housing 2 and the housing part 10 takes place via an interface 19. According to FIG Fig. 5 , which represents an exemplary embodiment not belonging to the invention, an O-ring seal 20 is provided in the interface 19 in order to achieve a vacuum-tight connection between the housing 2 and the housing part 10.

Gemäß Fig. 6 weist die Schnittstelle 19 zusätzlich zu dem O-Ring 20 ein Dichtungselement 21 auf. Das Dichtungselement kann als thermisches und/oder schwingungsentkoppelndes und/oder elektrisches Dichtungselement ausgebildet sein.According to Fig. 6 the interface 19 has a sealing element 21 in addition to the O-ring 20. The sealing element can be designed as a thermal and / or vibration-decoupling and / or electrical sealing element.

Fig. 7 zeigt die Schnittstelle 19 mit dem O-Ring 20 und einem Dichtungselement 22, welches ebenfalls als thermisches und/oder schwingungsentkoppelndes und/oder elektrisches Dichtungselement 22 ausgebildet sein kann. Fig. 7 shows the interface 19 with the O-ring 20 and a sealing element 22, which can also be designed as a thermal and / or vibration-decoupling and / or electrical sealing element 22.

Gemäß Fig. 8 ist eine Schraubverbindung zur Verbindung des Gehäuses 2 und des Gehäuseteiles 10 dargestellt. Diese Schraubverbindung dient zur vakuumdichten und mechanischen Verbindung des Gehäuses 2 und des Gehäuseteiles 10.According to Fig. 8 a screw connection for connecting the housing 2 and the housing part 10 is shown. These The screw connection is used for the vacuum-tight and mechanical connection of the housing 2 and the housing part 10.

Die Schraubverbindung besteht aus einer Schraube 25 sowie einer Scheibe 26, die auf einem Elastomer 24 zur Schwingungsentkopplung gelagert ist. Als Kraftübertragungselement ist eine Hülse 23 vorgesehen.The screw connection consists of a screw 25 and a washer 26, which is mounted on an elastomer 24 for vibration decoupling. A sleeve 23 is provided as a force transmission element.

Fig. 9 zeigt die Anordnung einer nicht beanspruchten Vakuumpumpe 1, die in einem Gesamtsystem mit einer Anordnung aus der Vakuumpumpe 1 und einer Kammer 102 dargestellt ist. Fig. 9 shows the arrangement of a not claimed vacuum pump 1, which is shown in an overall system with an arrangement of the vacuum pump 1 and a chamber 102.

Die Kammer 102 ist als Mehrkammersystem zum differenziellen Pumpen gestaltet und weist daher eine Vorvakuumkammer 121, eine Mittelkammer 122, eine weitere Mittelkammer 123 und eine Hochvakuumkammer 166 auf. Diese Kammern sind über Öffnungen 125, 126, 167 miteinander verbunden, durch welche beispielsweise ein Gasteilchenstrahl hindurchtritt. In der Hochvakuumkammer 166 ist ein Detektor, beispielsweise ein Massenspektrometer 124 vorgesehen, welcher von einer Ansteuerungsbaugruppe 136 angesteuert wird. Die Kammer 102 weist einen Kammerflansch 120 auf, mit welchem ein Pumpenflansch 110 verbunden ist.The chamber 102 is designed as a multi-chamber system for differential pumping and therefore has a fore-vacuum chamber 121, a middle chamber 122, a further middle chamber 123 and a high-vacuum chamber 166. These chambers are connected to one another via openings 125, 126, 167, through which, for example, a gas particle beam passes. A detector, for example a mass spectrometer 124, is provided in the high vacuum chamber 166 and is controlled by a control assembly 136. The chamber 102 has a chamber flange 120 to which a pump flange 110 is connected.

Der Pumpenflansch 110 ist Teil der Vakuumpumpe 1, welche eine Welle 111 umfasst, die mit einem hochvakuumseitigen Lager 113, beispielsweise einem Permanentmagnetlager, drehbar unterstützt ist. Die Welle 111 wird von einem Antrieb 114 in Drehung versetzt, so dass in den Pumpstufen 115, 116 Kompression und Saugvermögen aufgebaut werden.The pump flange 110 is part of the vacuum pump 1, which comprises a shaft 111 which is rotatably supported by a bearing 113 on the high vacuum side, for example a permanent magnet bearing. The shaft 111 is set in rotation by a drive 114, so that compression and pumping speed are built up in the pump stages 115, 116.

Der Einlass der Pumpstufe 115 steht über eine Ansaugöffnung 127 mit der Mittelkammer 122 in Verbindung. Die Pumpstufe 116 steht mit der Mittelkammer 123 über die Ansaugöffnung 128 in Verbindung. Die Pumpstufe 168 steht über die Ansaugöffnung 169 mit der Hochvakuumpumpkammer 166 in Verbindung.The inlet of the pump stage 115 is connected to the central chamber 122 via a suction opening 127. The pumping stage 116 is connected to the central chamber 123 via the suction opening 128. The pumping stage 168 protrudes the suction port 169 with the high vacuum pumping chamber 166 in communication.

Gas tritt durch die Ansaugöffnung 169 in die Vakuumpumpe 1 ein, wird durch die Pumpstufe 168 verdichtet, danach mit dem durch die Ansaugöffnung 128 in die Vakuumpumpe 1 eintretenden Gas zusammengeführt und gemeinsam mit diesem von der Pumpstufe 116 weiter verdichtet. Es erfolgt eine weitere Zusammenführung mit dem aus der Mittelkammer 122 durch die Ansaugöffnung 127 eintretenden Gas und eine weitere Verdichtung durch die Pumpstufe 115. Die Auslässe der Vakuumpumpe 1 und der Vorvakuumkammer 121 sind über eine Vorvakuumzuleitung 141 mit einer Vorpumpe 140 verbunden, welche das Gas weiter verdichtet und gegen Atmosphäre ausstößt. Die Pumpstufen 115, 116 und 168 sind vorzugsweise als Turbomolekularpumpstufen ausgebildet.Gas enters the vacuum pump 1 through the suction opening 169, is compressed by the pump stage 168, then merged with the gas entering the vacuum pump 1 through the suction opening 128 and further compressed together with this by the pump stage 116. There is a further merging with the gas entering from the middle chamber 122 through the suction opening 127 and a further compression by the pump stage 115. The outlets of the vacuum pump 1 and the fore-vacuum chamber 121 are connected via a fore-vacuum feed line 141 to a fore-pump 140, which further the gas condenses and expels against the atmosphere. The pump stages 115, 116 and 168 are preferably designed as turbo-molecular pump stages.

Die Vakuumpumpe 1 und Kammer 102 werden von einem Gestell 130 getragen. Die Vakuumpumpe 1 ist über eine Flanschverbindung mit der vakuumdichten Kammer, das heißt über deren Flansch und einem Pumpenflansch, verbunden. Dieses Gestell 130 trägt zudem die Ansteuerungsbaugruppe 136 des Massenspektrometers sowie weitere Komponenten 133, 134, 135, beispielsweise Netzteile, Recheneinheiten und dergleichen mehr. Das Gestell 130 ist mit einer Verkleidung 131 abgedeckt. Die Vakuumpumpe 1 und die Kammer 102 sind durch eine Klappe 132 zugänglich, jedoch von den anderen vom Gestell 130 getragenen Baugruppen und Komponenten umgeben. Die Flanschverbindung ist daher schwer und im Wesentlichen nur von der Seite zugänglich, die der Klappe 132 zugewandt ist. Die Montage und Demontage der Vakuumpumpe können daher nur von dieser Seite erfolgen.The vacuum pump 1 and chamber 102 are supported by a frame 130. The vacuum pump 1 is connected to the vacuum-tight chamber via a flange connection, that is to say via its flange and a pump flange. This frame 130 also carries the control assembly 136 of the mass spectrometer as well as further components 133, 134, 135, for example power supply units, processing units and the like. The frame 130 is covered with a cladding 131. The vacuum pump 1 and the chamber 102 are accessible through a flap 132, but are surrounded by the other assemblies and components carried by the frame 130. The flange connection is therefore difficult and essentially only accessible from the side facing the flap 132. The assembly and disassembly of the vacuum pump can therefore only be carried out from this side.

Die Vakuumpumpe 1 weist das Gehäuse 2 und das angesetzte Gehäuseteil 10 auf. Das angesetzte Gehäuseteil 10 weist den Einlass 11 auf, der mit der Ansaugöffnung 169 in Verbindung steht. Durch das angesetzte Gehäuseteil 10 weist die Vakuumpumpe eine Gesamtlänge auf, die aufgrund der in Fig. 9 dargestellten Anordnung erforderlich ist.The vacuum pump 1 has the housing 2 and the attached housing part 10. The attached housing part 10 has the inlet 11, which is in communication with the suction opening 169. Due to the attached housing part 10, the vacuum pump has an overall length which, due to the in Fig. 9 arrangement shown is required.

Die Montage wird problemlos durch die Kraftübertragungsstruktur gemäß den Fig. 10 und 11 ermöglicht.The assembly is easy by the power transmission structure according to the Fig. 10 and 11 enables.

Fig. 10 zeigt eine Kraftübertragungsstruktur 165 im Querschnitt zur Welle 111 durch die Vakuumpumpe und Flanschverbindung entlang der Linie I-I' der Fig. 9. Kammerflansch 120 und Pumpenflansch 110 berühren einander. Zur vorvakuumdichten Verbindung ist eine Dichtung 119 vorgesehen, die die Ansaugöffnung 127 am Flansch umgibt. In der Vakuumpumpe 1 sind in diesem Schnitt die zwischen den Pumpstufen vorgesehene und deren Komponente beabstandete Distanzhülse 118 und die letzte Statorscheibe 117 der hochvakuumseitigen Pumpstufe 168 zu sehen. Eine Befestigungsschraube 151 befestigt einen Haltewinkel 150 am Kammerflansch. Zwischen dem Haltewinkel und dem Pumpenflansch sind ein erstes Spreizelement 152 und ein zweites Spreizelement 153 angeordnet. Fig. 10 shows a power transmission structure 165 in cross section to the shaft 111 through the vacuum pump and flange connection along the line II 'of FIG Fig. 9 . Chamber flange 120 and pump flange 110 touch one another. For the pre-vacuum-tight connection, a seal 119 is provided which surrounds the suction opening 127 on the flange. In the vacuum pump 1, the spacer sleeve 118 provided between the pump stages and their components spaced apart and the last stator disk 117 of the high vacuum-side pump stage 168 can be seen in this section. A fastening screw 151 fastens a bracket 150 to the chamber flange. A first expansion element 152 and a second expansion element 153 are arranged between the bracket and the pump flange.

In Fig. 11 ist der dazugehörige Schnitt entlang der Linie II-II' der Fig. 10 und parallel zur Welle 111 gezeigt. Es wird ersichtlich, dass ein Teil des Haltewinkels 150, erstes Spreizelement 152, zweites Spreizelement 153 und ein Teil des Pumpenflansches 110 in einer gemeinsamen Ebene liegen. Das erste Spreizelement 152 weist eine Keilfläche 158' und das zweite Spreizelement 153 eine Keilfläche 158 auf. Diese Keilflächen 158, 158' berühren einander derart, dass eine Verschiebung gegeneinander möglich ist. Bewirkt wird die Verschiebung durch eine Krafteinleitungsschraube 155, die durch eine Durchgangsbohrung in einem Arm 154 des ersten Spreizelementes hindurchragt und deren Gewindeteil in ein Gewinde des zweiten Spreizelementes 153 eingreift. Durch Anziehen der Schraube wird ein planare Kraft ausgeübt, die die Spreizelemente 152, 153 gegeneinander verschiebt. Durch Wirkung der Keilflächen wird die Kraftrichtung in eine axiale Richtung umgewandelt. Es wird anschließend eine axiale Anpresskraft 160 an der Wirkstelle 159 erzeugt, die Pumpenflansch 110 und Kammerflansch 120 gegeneinander drückt und so für die vakuumdichte Verbindung sorgt. Durch die Spreizelemente 152, 153 findet eine Kraftrichtungsumsetzung statt. Montage beziehungsweise Demontage der Vakuumpumpe 1 werden über Anziehen beziehungsweise Lösen der Schraube 155 erreicht.In Fig. 11 is the corresponding section along the line II-II 'of Fig. 10 and shown parallel to shaft 111. It can be seen that part of the bracket 150, first expansion element 152, second expansion element 153 and part of pump flange 110 lie in a common plane. The first expansion element 152 has a wedge surface 158 ′ and the second expansion element 153 has a wedge surface 158. These wedge surfaces 158, 158 ′ touch one another in such a way that they can be displaced with respect to one another. The displacement is brought about by a force introduction screw 155, which protrudes through a through hole in an arm 154 of the first expansion element and whose threaded part engages in a thread of the second expansion element 153. By tightening the screw, a planar force is exerted, which moves the expansion elements 152, 153 relative to one another. The force direction is converted into an axial direction by the action of the wedge surfaces. An axial pressing force 160 is then generated at the point of action 159, which presses the pump flange 110 and chamber flange 120 against one another and thus ensures the vacuum-tight connection. The direction of force is converted by the spreading elements 152, 153. Assembly and disassembly of the vacuum pump 1 are achieved by tightening or loosening the screw 155.

Die Spreizelemente 152, 153 bewirken, dass in der Kraftübertragungsstruktur 165 eine Kraft von der Einleitungsstelle 156 an eine Wirkstelle 159 übertragen wird. Diese Kraftübertragung erlaubt es, eine Anpresskraft 160 auch an den Stellen zu erzeugen, die durch die im Zusammenhang mit Fig. 9 beschriebenen und die Vakuumpumpe 1 umgebenden Komponenten nicht zugänglich sind. Vorteilhaft an diesem Beispiel ist zudem, dass neben der Kraftübertragung auch eine Kraftverteilung über den Pumpenflansch stattfindet und so eine gleichmäßige Anpressung erzielt wird. Mit der Anzahl der Keilflächen und deren Winkel kann die Kraftverteilung der eingeleiteten Kraft auf den Flansch 10 eingestellt werden.The spreading elements 152, 153 have the effect that a force is transmitted from the introduction point 156 to an effective point 159 in the force transmission structure 165. This power transmission makes it possible to generate a pressing force 160 even at the points that are associated with Fig. 9 and components surrounding the vacuum pump 1 are not accessible. Another advantage of this example is that, in addition to the transmission of force, there is also force distribution via the pump flange and thus uniform contact pressure is achieved. The force distribution of the force introduced on the flange 10 can be adjusted with the number of wedge surfaces and their angles.

Dadurch, dass das Gehäuse 2 und das angesetzte Gehäuseteil 10 die gleiche Außenkontur aufweisen, wie in Fig. 4 dargestellt, lässt sich die Vakuumpumpe 1 problemlos in eine Anordnung, wie in Fig. 9 dargestellt, montieren. Die Vakuumpumpe ist, wie gemäß den Fig. 10 und 11 beschrieben, fest in der Anordnung fixiert. Mit dem angesetzten Gehäuseteil 10 ist es möglich, die kundenspezifischen Anforderungen, wie in einer Anordnung gemäß Fig. 9 dargestellt, preiswert und problemlos zu erfüllen.Because the housing 2 and the attached housing part 10 have the same outer contour as in FIG Fig. 4 shown, the vacuum pump 1 can easily be in an arrangement as in Fig. 9 shown, assemble. The vacuum pump is, as according to the Fig. 10 and 11 described, firmly fixed in the arrangement. With the attached housing part 10, it is possible to meet the customer-specific requirements, as in an arrangement according to FIG Fig. 9 shown, inexpensive and easy to meet.

BezugszahlenReference numbers

11
Pumpepump
22
Gehäusecasing
33
Rotorrotor
44th
RotorschaufelnRotor blades
55
StatorschaufelnStator blades
66th
LagersternBearing star
77th
axialer Einlassaxial inlet
88th
radialer Einlassradial inlet
99
radialer Einlassradial inlet
1010
GehäuseteilHousing part
1111
Einlassinlet
1212th
AuslassOutlet
1313th
AuslassOutlet
1414th
EinschnürungConstriction
1515th
KühlrippenCooling fins
1616
KühlrippenCooling fins
1717th
Leistestrip
1818th
Leistestrip
1919th
Schnittstelleinterface
2020th
O-RingO-ring
2121
DichtungselementSealing element
2222nd
DichtungselementSealing element
2323
HülseSleeve
2424
ElastomerElastomer
2525th
Schraubescrew
2626th
Scheibedisc
102102
Kammerchamber
110110
PumpenflanschPump flange
111111
Wellewave
112112
Lagercamp
113113
Lagercamp
114114
Antriebdrive
115115
PumpstufePumping stage
116116
PumpstufePumping stage
117117
StatorscheibeStator disc
118118
DistanzhülseSpacer sleeve
119119
Dichtungpoetry
120120
KammerflanschChamber flange
121121
Kammerchamber
122122
Kammerchamber
123123
Kammerchamber
124124
Massenspektrometermass spectrometry
125125
Öffnungopening
126126
Öffnungopening
127127
AnsaugöffnungSuction opening
128128
AnsaugöffnungSuction opening
130130
Gestellframe
131131
VerkleidungDisguise
132132
Klappeflap
133133
elektronische Komponenteelectronic component
134134
elektronische Komponenteelectronic component
135135
elektronische Komponenteelectronic component
136136
AnsteuerbaugruppeControl module
140140
VorpumpeBacking pump
141141
VakuumzuleitungVacuum supply line
150150
HaltewinkelBracket
151151
BefestigungsschraubeFastening screw
152152
erstes Spreizelementfirst expansion element
153153
zweites Spreizelementsecond expansion element
154154
Armpoor
155155
KrafteinleitungsschraubeForce introduction screw
156156
EinleitungsstelleInitiation point
158158
KeilflächeWedge surface
158'158 '
KeilflächeWedge surface
159159
WirkstellePoint of action
160160
AnpresskraftContact pressure
165165
KraftübertragungsstrukturPower transmission structure
166166
HochvakuumkammerHigh vacuum chamber
167167
Öffnungopening
168168
PumpstufePumping stage
169169
AnsaugöffnungSuction opening

Claims (7)

  1. A vacuum pump with a housing and a pump unit, which comprises only one drive unit for a rotor, which is mounted rotatably in a stator, in which there is attached to the housing (2) in axial direction at least one additional housing part (10), which is connectable to the housing (2), and in which there are provided in axial direction in the housing (2) an inlet opening (7) and, in the at least one additional housing part (10), an outlet opening (12),
    wherein the housing (2) and the at least one attached housing part (10) have a total length (L) of at least 550 mm, preferably of at least 700 mm,
    wherein the at least one attached housing part (10) has no axial inlet and at least one radial inlet (11) and
    wherein the at least one radial inlet (11) of the attached housing part (10) is preferably arranged at an end of the attached housing part (10) remote from the drive,
    wherein there are arranged in the housing (2) and in the attached housing part (10) structures (4, 5, 6) of the vacuum pump (1) which at least partly have a pumping function, and
    wherein the inlet opening (7) of the housing and the outlet opening (12) of the attached housing part (10) overlap one another.
  2. A vacuum pump according to claim 1, characterised in that the housing (2) of the vacuum pump (1) comprises at least one radial inlet (8, 9).
  3. A vacuum pump according to one of the preceding claims, characterised in that the at least one attached housing part (10) has an outer contour similar to the housing (2).
  4. A vacuum pump according to one of the preceding claims, characterised in that the vacuum pump (1) comprises at least one turbomolecular pump stage and/or at least one Holweck pump stage and at least two gas inlets (8, 9, 11).
  5. An arrangement with a vacuum pump with the features according to claim 1, characterised in that the arrangement comprises a mass spectrometer, in that the arrangement comprises at least one pump flange and a chamber with a chamber flange, wherein for the vacuumtight connection of chamber and vacuum pump the arrangement comprises a flange connection comprising a pump flange and a chamber flange, and in that the at least one radial inlet (11) is configured to be connectable to at least one chamber (166) of the arrangement.
  6. An arrangement according to claim 5, characterised in that the arrangement comprises a force transmitting structure (165), which is configured as a force transmission structure (165) transmitting a force from an introduction point (156) to at least one point of action (159) located in the flange connection (110, 120).
  7. An arrangement according to claim 5 or 6, characterised in that the housing (2) of the vacuum pump (1) and the at least one attached housing part (10) have an outer contour matched to a receptacle arranged in the arrangement.
EP14181981.3A 2013-09-04 2014-08-22 Vacuum pump and assembly with a vacuum pump Active EP2846044B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013109637.9A DE102013109637A1 (en) 2013-09-04 2013-09-04 Vacuum pump and arrangement with a vacuum pump

Publications (2)

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EP2846044A1 EP2846044A1 (en) 2015-03-11
EP2846044B1 true EP2846044B1 (en) 2021-10-13

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US (1) US20150064033A1 (en)
EP (1) EP2846044B1 (en)
JP (1) JP5902777B2 (en)
DE (1) DE102013109637A1 (en)

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DE102015111049B4 (en) 2015-07-08 2022-10-13 Pfeiffer Vacuum Gmbh vacuum pump
EP3135917B1 (en) * 2015-08-24 2020-10-07 Pfeiffer Vacuum Gmbh Vacuum pump
JP6578838B2 (en) * 2015-09-15 2019-09-25 株式会社島津製作所 Vacuum pump and mass spectrometer
WO2020071872A1 (en) * 2018-10-05 2020-04-09 (주)오메가오토메이션 Liquid ring vacuum pump accommodation assembly

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Also Published As

Publication number Publication date
EP2846044A1 (en) 2015-03-11
JP2015048849A (en) 2015-03-16
US20150064033A1 (en) 2015-03-05
DE102013109637A1 (en) 2015-03-05
JP5902777B2 (en) 2016-04-13

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