EP2846044A1 - Vacuum pump and assembly with a vacuum pump - Google Patents

Abstract

The invention relates to a vacuum pump with a housing and a pump unit, which only a drive unit for a rotor which is rotatably mounted in a stator, in which arranged on the housing in the axial direction at least one attached, connectable to the housing, additional housing part is, and in the axial direction in the housing an inlet opening and in the at least one additional housing part an outlet opening are provided. The invention further relates to an arrangement with a corresponding vacuum pump.

Description

The invention relates to a vacuum pump and an arrangement with a vacuum pump.

Vacuum pumps, in particular turbomolecular pumps, have at least one rotor arranged in a pump housing. The rotor is surrounded by a stator pack or multiple stators carried by the pump housing. Furthermore, a drive device, for example an electric motor, which drives the at least one rotor is arranged within the pump housing. Usually, the drive shaft is arranged axially relative to the rotor axis.

With turbomolecular pumps high compression ratios can be achieved. Turbomolecular pumps face the inlet opening, or the inlet nozzle on a very small outlet opening, or a small outlet on. With the outlet nozzle is usually connected via a line a backing pump.

Vacuum pump and recipient assemblies, hereafter referred to as chambers, are subject to a variety of geometrical design requirements. For example, in the construction of mass spectrometers, there is a desire for compact dimensions of the overall system. This often leads to a positioning of the vacuum pump in the terminal, in which their accessibility is considerably limited. Nevertheless, the service to these vacuum pumps, for example, the preventive replacement of rolling bearings should be easily possible.

According to the prior art ( EP 2 228 540 A2 ) For this purpose, an arrangement with a vacuum pump is proposed, which has a pump flange. The assembly has a chamber flange and a flange connection comprising the pump flange and the chamber flange for the vacuum-tight connection of the chamber and the vacuum. In the arrangement, a force transmission structure is provided, which transmits a force from an introduction point to at least one point of action lying in the flange connection.

This means that the vacuum pump is usually arranged in a receptacle of the arrangement provided for this purpose. The receptacle can be designed in the manner of a rail system. Pump flange and chamber flange are connected to each other in a vacuum-tight manner. In this case, inlet openings of the pump are arranged such that they are flush with the outlet openings of the chamber and overlapping are arranged. This belonging to the prior art pump can be easily pulled out of the assembly after loosening the corresponding connection and fastening means, for example, to make a preventive replacement of rolling bearings.

These arrangements known from the prior art must meet customer-specific requirements with regard to the position of the outlets of the chambers and the geometry for accommodating the vacuum pumps.

In a system with multiple suction ports for different pressure levels, as is known in the art, multiple discrete pumps are used. Particularly with mass spectrometers with time-of-flight systems, considerable distances can arise between the various intake openings. Time-of-flight mass spectrometers are a subclass of mass spectrometers. These are time-of-flight mass spectrometers.

From practice it is known to use so-called split flow pumps in these applications. The split flow pumps are vacuum pump systems for multi-stage gas inlet systems, such as those from the DE 43 31 589 A1 are known.

These prior art split flow pumps usually have lengths of up to 500 millimeters. However, if the intake ports are far from each other, as is known in practice, only very large and very expensive processing machines can be used to make housings which are long enough to bridge the large distances between the intake ports.

The technical problem underlying the invention is to improve the vacuum pump associated with the prior art and the arrangement with a vacuum pump in such a way that customer-specific requirements can be realized more simply and more cost-effectively and that vacuum pumps with long overall lengths can be produced cost-effectively.

This technical problem is solved by a vacuum pump with the features according to claim 1 and an arrangement with a vacuum pump with the features according to claim 15.

The vacuum pump according to the invention with a housing and a pump unit, which has only one drive unit for a rotor which is rotatably mounted in a stator, characterized in that arranged on the housing in the axial direction at least one attached to the housing connectable additional housing part and that in the axial direction in the housing an inlet opening and in the at least one additional housing part an outlet opening are provided.

The vacuum pump according to the invention has the advantage that a large overall length of the vacuum pump, as is often required by the customer side, can be realized by the additional, in the axial direction attached housing part. In addition, a standard vacuum pump can be used, and the attached housing part then has the dimensions required for the customer-specific requirements.

In addition, vacuum pumps can be manufactured with a continuous housing with larger overall lengths, as it is possible with the previously known tools. The length of the housing is in fact limited by the state of the art machine tools in length.

By providing at least one additional housing part in principle arbitrary lengths can be created.

In this case, the attached housing part over an example scheduled pipe has the advantage that the diameter and the outer contour of the housing are formed continuously and consistently for the entire vacuum pump, so that flanges, openings, rail systems and the like in arrangements, for example with a mass spectrometer of the inventive pump can be used.

In addition, attached tubes often have an angled section in order to be able to be connected to an outlet of a pump chamber arranged in the radial direction to the longitudinal axis of the pump. As a result of this angling, a vacuum pump belonging to the prior art with an attached tube can not be used in existing receptacles of an arrangement.

According to a preferred embodiment of the invention, the at least one attached housing part has at least one radial inlet.

This radial inlet is for connection to an outlet of a pump chamber of the assembly in which the vacuum pump is placed.

If the arrangement has a plurality of chambers, it is advantageous for the attached housing part to have a corresponding number of inlets which respectively coincide with the outlet of the chambers.

A further advantageous embodiment of the invention provides that the at least one radial inlet of the attached housing part is arranged at a drive remote end of the attached housing part.

Arrangements, for example, with mass spectrometers with time-of-flight systems, often have considerable distances between the various intake ports. By virtue of the fact that the radial inlets can be custom-designed in the attached housing part, it is advantageous to arrange the at least one inlet or the last radial inlet at the end remote from the drive, that is to say at the end of the housing part which is remote from the pump-active structures, provided.

According to a further advantageous embodiment of the invention, the housing of the vacuum pump has at least one radial inlet. This means that the vacuum pump already has at least one radial inlet in the housing to which the additional housing is attached.

According to a further advantageous embodiment of the invention, the at least one attached housing part at least partially on a same outer contour to the housing. This ensures that the housing of the vacuum pump and the attached housing part has the outer contour and shape of a single housing. This makes it possible, the vacuum pump particularly advantageous in one Recording an arrangement, for example, with a mass spectrometer to arrange.

The identical outer contours of the housing and the attached housing part can be interrupted for example by constrictions.

A further advantageous embodiment of the invention provides that in the attached housing part at least partially pump-active structures of the vacuum pump are arranged. For example, there is the possibility that a bearing star for a bearing of the rotor of the vacuum pump is arranged in the attached housing part.

Other components may also be provided in the housing part.

Another embodiment of the invention provides that no pump-active structures of the vacuum pump are arranged in the attached housing part. In this case, the at least one attached housing part forms a pure extension of the housing of the vacuum pump.

The housing and the at least one attached housing part advantageously have a total length of at least 550 millimeters. Lengths of housings of vacuum pumps less than 500 millimeters can be manufactured on conventional machines at the usual cost.

The housing and the at least one attached housing part advantageously have a total length of at least 700 millimeters. The invention is particularly advantageous for lengths of more than 550 millimeters, for example Lengths of more than 700 millimeters useful.

According to a further advantageous embodiment of the invention, the inlet openings of the housing and the outlet opening of the attached housing part are formed overlapping. This ensures that the attached housing part acts like an extension of the housing of the vacuum pump.

According to a further advantageous embodiment of the invention, the inlet opening of a first attached housing part and the outlet opening of a second attached housing part are also formed overlapping, to allow a further extension of the housing.

A further particularly advantageous embodiment of the invention provides that at least one thermally insulating and / or vibration-decoupling and / or electrically insulating element is provided between the housing of the vacuum pump and the attached housing part or between two attached housing parts. This function can be integrated, for example, in a specially designed sealing element.

By this embodiment, it is possible to realize, for example, a thermal decoupling between the housing parts. An electrical insulation and / or a vibration decoupling is thereby possible.

According to an advantageous embodiment of the invention, the vacuum pump is designed as a turbomolecular pump.

However, it is also possible to provide other pump types with the housing extension according to the invention.

The vacuum pump may be formed according to a further embodiment as a pump with at least two gas inlets. This type of pump is also called a split-flow pump. This type of pump with a multi-stage gas inlet system is often used in arrangements such as mass spectrometers. Especially with these arrangements, adapted to customer-specific requirements execution of the housing is also often desired.

By way of example, the vacuum pump may have at least one turbomolecular pumping stage and / or at least one Holweck pumping stage. The at least one Holweckpumpstufe is usually arranged downstream of the at least one turbomolecular pumping stage in the gas conveying direction. The gas inlets are preferably arranged before, between or behind the turbomolecular pumping stages and / or Holweckpumpstufen.

The arrangement according to the invention with a vacuum pump having a housing and a pump unit, which has only one drive unit for a rotor which is rotatably mounted in a stator, the arrangement having at least one pump flange and a chamber with a chamber flange, the arrangement having a Has pump flange and a chamber flange comprehensive flange connection for vacuum-tight connection of the chamber and vacuum pump, characterized in that on the housing of the vacuum pump in the axial direction at least one attached to the housing connectable, additional housing part is arranged, and that in the axial direction in the housing Inlet opening and in the at least one additional housing part is provided an outlet opening, and that the at least one attached housing part has at least one radial inlet which is formed connectable with at least one chamber of the arrangement.

By this embodiment of the invention with an arrangement with a vacuum pump, the vacuum pump can be used in an arrangement with a plurality of suction openings, in which the suction openings are far apart, without particularly high processing and manufacturing costs occur in the manufacture of the housing.

According to a particularly preferred embodiment of the invention, the arrangement has a force transmission structure which is designed as a force transmission structure transmitting a force from an introduction point to at least one point of action lying in the flange connection. This power transmission structure is in the EP 2 228 540 A2 described.

As already stated, the arrangement according to the invention is used particularly advantageously in arrangements with mass spectrometers, since there are a plurality of gas inlets in these arrangements, which possibly have suction openings which are far apart.

According to a further particularly preferred embodiment of the invention, the housing of the vacuum pump and the at least one attached housing part on an adapted to a receptacle arranged in the receptacle outer contour. This makes it possible to insert the vacuum pump with the at least one attached housing part in a predetermined structure of an arrangement. The receptacles in the arrangements for housing of vacuum pumps are the outer contour adapted adapted to the housing of the vacuum pump. In this case, it is advantageous if the attached housing part has the same outer contour, so that the recording of the housing with the attached housing part is easily possible.

In principle, there is also the possibility that the at least one attached housing part has an offset to the housing of the vacuum pump. This embodiment is realized with corresponding customer-specific requirements.

Since due to tolerances of individual housing parts and the joining process shape and position deviations of the housing and the at least one attached housing part to each other, it is advantageous to provide the bearing of the high vacuum side in the housing of the vacuum pump. The tolerances for the attached housing parts can then be chosen larger.

Advantageously, the pump according to the invention is fastened with a rail system in an arrangement. The rail system allows the assembly and disassembly of the vacuum pump from one side by axial insertion or withdrawal, as in the EP 2 228 540 A2 described. The accessibility of the pump must then be given for the assembly and disassembly only from one side, so that the systems can be made more compact, or the pump can be maintained or exchanged with less effort.

Advantageously, the areas between the sealing levels on the attached housing parts are reset, so due to crowns and other Formund Bearing errors, the housing is not put under tension and deformed inadmissible.

Due to the large distance between the radial intake opening in the attached housing part to the housing, it is possible to heat especially the high vacuum region of the pump with higher temperatures. The large surface and the length of at least one attached housing part have a positive effect on the temperature behavior of the pump.

Due to the multi-piece, it is possible to additionally realize a thermal decoupling between the housing parts and the housing of the vacuum pump. This can be done by reducing the contact surfaces or the use of insulating intermediate elements or sealing elements. An electrical insulation or a vibration isolation is so feasible.

A modular construction of a housing of a vacuum pump as a base pump with different housing extensions, that is differently sized attached housing parts, is possible by the invention. However, it is also possible to operate the base pump with a lid instead of an extension.

Fig. 1

einen Längsschnitt durch eine Vakuumpumpe mit insgesamt drei Einlässen;

Fig. 2

einen Längsschnitt durch eine Vakuumpumpe mit insgesamt zwei Einlässen;

Fig. 3

eine Vakuumpumpe im Längsschnitt ohne pumpaktive Strukturen;

Fig. 4

eine perspektivische Ansicht einer Vakuumpumpe;

Fig. 5

einen Längsschnitt der Verbindung zwischen Gehäuse und Gehäuseteil;

Fig. 6

einen Längsschnitt der Verbindung zwischen Gehäuse und Gehäuseteil;

Fig. 7

einen Längsschnitt der Verbindung zwischen Gehäuse und Gehäuseteil;

Fig. 8

eine Schraubenverbindung zwischen Gehäuse und Gehäuseteil;

Fig. 9

eine Darstellung einer Anordnung mit Kammer und Vakuumpumpe in einem Gesamtsystem;

Fig. 10

einen Schnitt durch die Flanschverbindung entlang der Linie I-I' der Fig. 9;

Fig. 11

einen Schnitt durch die Flanschverbindung entlang der Linie II-II' der Fig. 10.

Further features and advantages of the invention will become apparent from the accompanying drawings, in which several embodiments of a vacuum pump according to the invention are shown by way of example only. In the drawing show:

Fig. 1

a longitudinal section through a vacuum pump with a total of three inlets;

Fig. 2

a longitudinal section through a vacuum pump with a total of two inlets;

Fig. 3

a vacuum pump in longitudinal section without pump-active structures;

Fig. 4

a perspective view of a vacuum pump;

Fig. 5

a longitudinal section of the connection between the housing and the housing part;

Fig. 6

a longitudinal section of the connection between the housing and the housing part;

Fig. 7

a longitudinal section of the connection between the housing and the housing part;

Fig. 8

a screw connection between the housing and the housing part;

Fig. 9

a representation of an arrangement with chamber and vacuum pump in an overall system;

Fig. 10

a section through the flange along the line II 'of Fig. 9 ;

Fig. 11

a section through the flange along the line II-II 'of Fig. 10 ,

Fig. 1 shows a vacuum pump 1 with a housing 2. The vacuum pump 1 has a rotor 3, the rotor blades 4 carries. The rotor blades 4 alternate with stator blades 5 and form different vacuum pump stages of the pump 1.

The rotor 3 is mounted by means of a bearing star 6 high vacuum side. Because of the better overview, the bearings are not shown. Fore-vacuum side, the rotor 3 is also supported by bearings, such as ball bearings.

The housing 2 of the vacuum pump 1 has an axial inlet 7. In addition, two radial inlets 8 and 9 are provided.

On the housing 2, an additional housing part 10 is arranged, which has a further radial inlet 11. The housing part 10 has the same cross-section and the same outer contour as the housing 2. An outlet 12 of the housing part 10 is formed completely overlapping with the inlet 7 of the housing 2.

The housing 2 also has a radial outlet 13, which can be connected, for example, to a backing pump (not shown).

The pump-active structures such as rotor 3, rotor blades 4, stator blades 5, bearing star 6 are according to Fig. 1 completely arranged in the housing 2. The attached housing part 10 forms only an extension of the housing part 2. By this embodiment, it is possible that the housing 2 and the attached housing part 10 has an overall length L of at least 550 millimeters, preferably of at least 700 millimeters. This makes it possible to arrange the suction opening 11 relatively far away from the suction openings 8, 9, without the housing 2, if it were integrally formed, must be made with complex manufacturing machines.

Between the housing 2 and the housing part 10, an interface 19 is provided which in the Fig. 5 to 8 is described.

According to Fig. 2 is the vacuum pump 1 shown with the housing 2 and the attached housing part 10th

Identical components have the same reference numbers and will not be described in detail again. According to this embodiment, the housing 2 has only one radial inlet 9.

The attached housing part 10 extends the overall length of the housing part 2, so that the overall length of the housing 2 and the attached housing part 10 are almost twice as long as the overall length of the housing part. 2

As in Fig. 2 can be seen, a part of the pump-active structures in the attached housing part 10 is arranged. Thus, for example, the bearing star 6 and the high-vacuum side arranged pumping stage located in the attached housing part 10th

Fig. 3 shows a further vacuum pump 1, in which no pump-active structures are shown within the housing 2. In the housing 2, the inlets 8, 9 and the radial outlet 13 are arranged. The housing part 10 has a radial inlet 11. The housing 2 also has a constriction 14 in order to reduce a reduction of the heat flow from the high vacuum to the rotor, or to the housing part 2.

Fig. 4 shows the vacuum pump 1 with the housing 2 and the attached housing part 10 and the inlets 8, 9 and 11. As in Fig. 4 can be seen, the housing and the housing part 10 on the same outer contour. For example, cooling fins 15 of the housing 2 continue in a form identical manner as cooling fins 16 on the housing part 10. In Fig. 4 In addition, the constriction 14 is clearly visible. In addition, strips 17, 18 are arranged on the housing 2 and on the housing part 10, which ensure additional stabilization of the housing parts 2, 10 relative to one another and over the entire length of the vacuum pump 1.

The connection between the housing 2 and the housing part 10 takes place via an interface 19 Fig. 5 In the interface 19, an O-ring seal 20 is provided in order to achieve a vacuum-tight connection between the housing 2 and the housing part 10.

According to Fig. 6 For example, in addition to the O-ring 20, the interface 19 has a seal member 21. The sealing element can be designed as a thermal and / or vibration-decoupling and / or electrical sealing element.

Fig. 7 shows the interface 19 with the O-ring 20 and a sealing element 22, which may also be formed as a thermal and / or vibration-decoupling and / or electrical sealing element 22.

According to Fig. 8 is a screw connection for connecting the housing 2 and the housing part 10 is shown. This screw is used for vacuum-tight and mechanical connection of the housing 2 and the housing part 10th

The screw connection consists of a screw 25 and a disc 26 which is mounted on an elastomer 24 for vibration decoupling. As a force transmission element, a sleeve 23 is provided.

Fig. 9 shows the arrangement of a vacuum pump 1, which is shown in an overall system with an arrangement of the vacuum pump 1 and a chamber 102.

The chamber 102 is designed as a multi-chamber system for differential pumping and therefore has a Vorvakuumkammer 121, a middle chamber 122, another middle chamber 123 and a high vacuum chamber 166 on. These chambers are connected to each other via openings 125, 126, 167 through which, for example, a gas particle jet passes. In the high vacuum chamber 166, a detector, for example a mass spectrometer 124 is provided, which is controlled by a drive assembly 136. The chamber 102 has a chamber flange 120 to which a pump flange 110 is connected.

The pump flange 110 is part of the vacuum pump 1, which comprises a shaft 111 which is rotatably supported by a high-vacuum-side bearing 113, for example a permanent magnet bearing. The shaft 111 is rotated by a drive 114 in rotation, so that in the pumping stages 115, 116 compression and suction capacity are built up.

The inlet of the pumping stage 115 communicates via an intake opening 127 with the central chamber 122 in connection. The pumping stage 116 communicates with the central chamber 123 via the suction port 128 in connection. The pumping stage 168 is over the suction port 169 communicates with the high vacuum pumping chamber 166.

Gas enters through the suction port 169 in the vacuum pump 1, is compressed by the pumping stage 168, then merged with the gas entering through the suction port 128 in the vacuum pump 1 and further compressed together with this of the pumping stage 116. There is a further merging with the gas entering from the middle chamber 122 through the suction opening 127 and a further compression by the pumping stage 115. The outlets of the vacuum pump 1 and the fore-vacuum chamber 121 are connected via a forevacuum feed line 141 to a backing pump 140, which continues to supply the gas compressed and expelled against the atmosphere. The pumping stages 115, 116 and 168 are preferably designed as turbomolecular pumping stages.

The vacuum pump 1 and chamber 102 are supported by a frame 130. The vacuum pump 1 is connected via a flange connection with the vacuum-tight chamber, that is, via its flange and a pump flange. This frame 130 also carries the drive assembly 136 of the mass spectrometer and other components 133, 134, 135, such as power supplies, computing units and the like. The frame 130 is covered with a panel 131. The vacuum pump 1 and the chamber 102 are accessible through a flap 132, but surrounded by the other of the frame 130 supported assemblies and components. The flange connection is therefore heavy and substantially accessible only from the side facing the flap 132. The assembly and disassembly of the vacuum pump can therefore only be done from this side.

The vacuum pump 1 has the housing 2 and the attached housing part 10. The attached housing part 10 has the inlet 11, which communicates with the suction port 169. Due to the attached housing part 10, the vacuum pump has an overall length, due to the in Fig. 9 shown arrangement is required.

The assembly is easily by the power transmission structure according to the Fig. 10 and 11 allows.

Fig. 10 shows a power transmission structure 165 in cross section to the shaft 111 through the vacuum pump and flange connection along the line II 'of Fig. 9 , Chamber flange 120 and pump flange 110 touch each other. For vorvakuumdichten connection a seal 119 is provided which surrounds the suction port 127 on the flange. In the vacuum pump 1, the spacer sleeve 118, which is provided between the pump stages and its component, and the last stator disk 117 of the high-vacuum-side pumping stage 168 can be seen in this section. A fixing screw 151 attaches a bracket 150 to the chamber flange. Between the bracket and the pump flange, a first expansion element 152 and a second expansion element 153 are arranged.

In Fig. 11 is the corresponding section along the line II-II 'of Fig. 10 and parallel to the shaft 111. It will be appreciated that a portion of the bracket 150, first expansion member 152, second expansion member 153, and a portion of the pump flange 110 lie in a common plane. The first expansion element 152 has a wedge surface 158 'and the second expansion element 153 has a wedge surface 158. These wedge surfaces 158, 158 'touch each other such that a shift against each other is possible. The displacement is effected by a force introduction screw 155, which protrudes through a through hole in an arm 154 of the first expansion element and engages the threaded part in a thread of the second expansion element 153. By tightening the screw, a planar force is exerted, which shifts the spreading elements 152, 153 against each other. By action of the wedge surfaces, the direction of force is converted into an axial direction. An axial contact force 160 is then generated at the point of action 159, the pump flange 110 and the chamber flange 120 pressed against each other and thus ensures the vacuum-tight connection. By the spreading elements 152, 153 takes place a force direction conversion. Assembly or disassembly of the vacuum pump 1 are achieved by tightening or loosening the screw 155.

The spreading elements 152, 153 cause a force in the force transmission structure 165 to be transmitted from the point of introduction 156 to an active site 159. This power transmission makes it possible to generate a contact pressure 160 also in the places associated with Fig. 9 described and surrounding the vacuum pump 1 components are not accessible. Another advantage of this example is that in addition to the power transmission and a force distribution over the pump flange takes place and so a uniform contact pressure is achieved. With the number of wedge surfaces and their angle, the force distribution of the force introduced on the flange 10 can be adjusted.

Characterized in that the housing 2 and the attached housing part 10 have the same outer contour, as in Fig. 4 illustrated, the vacuum pump 1 can be easily in an arrangement as in Fig. 9 shown, assemble. The vacuum pump is as per the Fig. 10 and 11 described, firmly fixed in the arrangement. With the attached housing part 10, it is possible to meet the customer-specific requirements, as in an arrangement according to Fig. 9 shown, inexpensive and easy to meet.

reference numerals

1

pump

2

casing

3

rotor

4

rotor blades

5

stator

6

bearing star

7

axial inlet

8th

radial inlet

9

radial inlet

10

housing part

11

inlet

12

outlet

13

outlet

14

constriction

15

cooling fins

16

cooling fins

17

strip

18

strip

19

interface

20

O-ring

21

sealing element

22

sealing element

23

shell

24

elastomer

25

screw

26

disc

102

chamber

110

pump flange

111

wave

112

camp

113

camp

114

drive

115

pump stage

116

pump stage

117

stator

118

Stand Off

119

poetry

120

chamber flange

121

chamber

122

chamber

123

chamber

124

mass spectrometry

125

opening

126

opening

127

suction

128

suction

130

frame

131

paneling

132

flap

133

electronic component

134

electronic component

135

electronic component

136

control assembly

140

backing pump

141

vacuum supply

150

bracket

151

fixing screw

152

first expansion element

153

second expansion element

154

poor

155

Force transmission screw

156

introduction location

158

wedge surface

158 '

wedge surface

159

active site

160

contact force

165

Power transmission structure

166

High vacuum chamber

167

opening

168

pump stage

169

suction

Claims (15)

Vacuum pump with a housing and a pump unit, which has only one drive unit for a rotor which is rotatably mounted in a stator, characterized in that on the housing (2) in the axial direction at least one attached, with the housing (2) connectable , Additional housing part (10) is arranged, and that in the axial direction in the housing (2) an inlet opening (7) and in the at least one additional housing part (10) an outlet opening (12) are provided. Vacuum pump according to claim 1, characterized in that the at least one attached housing part (10) has at least one radial inlet (11) and that the at least one radial inlet (11) of the attached housing part (10) preferably at a drive remote end of the attached housing part (10). 10) is arranged. Vacuum pump according to one of the preceding claims, characterized in that the housing (2) of the vacuum pump (1) has at least one radial inlet (8, 9). Vacuum pump according to one of the preceding claims, characterized in that the at least one attached housing part (10) has a to the housing (2) has the same outer contour. Vacuum pump according to one of the preceding claims, characterized in that in the attached housing part (10) at least partially pump-active structures (4, 5, 6) of the vacuum pump (1) are arranged. Vacuum pump according to one of claims 1 to 4, characterized in that the attached housing part (10) is formed free of pump-active structures (4, 5, 6) of the vacuum pump (1). Vacuum pump according to one of the preceding claims, characterized in that the housing (2) and the at least one attached housing part (10) have an overall length (L) of at least 550 millimeters, preferably of at least 700 millimeters. Vacuum pump according to one of the preceding claims, characterized in that the inlet opening (7) of the housing and the outlet opening (12) of the attached housing part (10) are formed overlapping. Vacuum pump according to one of the preceding claims, characterized in that the inlet opening of an attached housing part and an outlet opening of an adjacent housing part are formed overlapping. Vacuum pump according to one of the preceding claims, characterized in that between the housing (2) of the vacuum pump (1) and the attached housing part (10) or between two attached housing parts at least one thermal and / or vibration-decoupling and / or electrical sealing element (21, 22 ) is provided. Vacuum pump according to one of the preceding claims, characterized in that the vacuum pump (1) has at least one turbomolecular pumping stage and / or at least one Holweckpumpstufe and at least two gas inlets (8, 9, 11). Arrangement with a vacuum pump with a housing and a pump unit, which has only one drive unit for a rotor which is rotatably mounted in a stator, the arrangement having at least one pump flange and a chamber with a chamber flange, the arrangement having a pump flange and Flange connection comprising a chamber flange for vacuum-tight connection of chamber and vacuum pump, characterized in that on the housing (2) of the vacuum pump (1) in the axial direction at least one attached, with the housing (2) connectable, additional housing part (10) is arranged in that in the axial direction in the housing (2) an inlet opening (7) and in the at least one additional housing part (10) an outlet opening (12) are provided, and that the at least one attached housing part (10) at least one radial inlet ( 11) which is connectable to at least one chamber (166) of the assembly is formed. Arrangement according to claim 12, characterized in that the arrangement comprises a power transmission structure (165) which, as a power transmission structure (165) transmitting a force from an introduction point (156) to at least one point of action (159) located in the flange connection (110, 120). is trained. Arrangement according to one of claims 12 or 13, characterized in that the arrangement comprises a mass spectrometer (124). Arrangement according to one of claims 12 to 14, characterized in that the housing (2) of the vacuum pump (1) and the at least one mounted housing part (10) have an outer contour adapted to a receptacle arranged in the arrangement.

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