EP2838126A4 - Semiconductor device, die attach material, and method for manufacturing semiconductor device - Google Patents

Semiconductor device, die attach material, and method for manufacturing semiconductor device

Info

Publication number
EP2838126A4
EP2838126A4 EP13775725.8A EP13775725A EP2838126A4 EP 2838126 A4 EP2838126 A4 EP 2838126A4 EP 13775725 A EP13775725 A EP 13775725A EP 2838126 A4 EP2838126 A4 EP 2838126A4
Authority
EP
European Patent Office
Prior art keywords
semiconductor device
die attach
attach material
manufacturing semiconductor
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13775725.8A
Other languages
German (de)
French (fr)
Other versions
EP2838126A1 (en
Inventor
Koji Makihara
Shuey Seng Low
Lynn Sum Man
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Sumitomo Bakelite Singapore Pte Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Sumitomo Bakelite Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd, Sumitomo Bakelite Singapore Pte Ltd filed Critical Sumitomo Bakelite Co Ltd
Publication of EP2838126A1 publication Critical patent/EP2838126A1/en
Publication of EP2838126A4 publication Critical patent/EP2838126A4/en
Withdrawn legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04Homopolymers or copolymers of esters
    • C09J133/14Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/44Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/18Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/20Oxides; Hydroxides
    • C08K3/22Oxides; Hydroxides of metals
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/34Silicon-containing compounds
    • C08K3/36Silica
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/54Silicon-containing compounds
    • C08K5/541Silicon-containing compounds containing oxygen
    • C08K5/5415Silicon-containing compounds containing oxygen containing at least one Si—O bond
    • C08K5/5419Silicon-containing compounds containing oxygen containing at least one Si—O bond containing at least one Si—C bond
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    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/04Non-macromolecular additives inorganic
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    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02Non-macromolecular additives
    • C09J11/06Non-macromolecular additives organic
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    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J4/00Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
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    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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    • H01L33/52Encapsulations
    • H01L33/56Materials, e.g. epoxy or silicone resin
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    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • C08K3/18Oxygen-containing compounds, e.g. metal carbonyls
    • C08K3/20Oxides; Hydroxides
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    • C08K2003/2227Oxides; Hydroxides of metals of aluminium
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    • H01L2224/29001Core members of the layer connector
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    • H01L2224/29198Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/29199Material of the matrix
    • H01L2224/2929Material of the matrix with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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    • H01L2224/8338Bonding interfaces outside the semiconductor or solid-state body
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    • H01L2224/834Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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    • H01L2224/83439Silver [Ag] as principal constituent
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    • H01L2224/838Bonding techniques
    • H01L2224/8385Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H01L2224/83855Hardening the adhesive by curing, i.e. thermosetting
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    • H01L2224/92Specific sequence of method steps
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    • H01L2224/9222Sequential connecting processes
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EP13775725.8A 2012-04-10 2013-04-10 Semiconductor device, die attach material, and method for manufacturing semiconductor device Withdrawn EP2838126A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012089337 2012-04-10
PCT/JP2013/002430 WO2013153803A1 (en) 2012-04-10 2013-04-10 Semiconductor device, die attaching material, and method for manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
EP2838126A1 EP2838126A1 (en) 2015-02-18
EP2838126A4 true EP2838126A4 (en) 2015-10-28

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EP13775725.8A Withdrawn EP2838126A4 (en) 2012-04-10 2013-04-10 Semiconductor device, die attach material, and method for manufacturing semiconductor device

Country Status (9)

Country Link
US (1) US20150060889A1 (en)
EP (1) EP2838126A4 (en)
JP (1) JP6247204B2 (en)
KR (1) KR20150003287A (en)
CN (1) CN104221171B (en)
MY (1) MY170959A (en)
SG (1) SG11201405729QA (en)
TW (1) TWI577767B (en)
WO (1) WO2013153803A1 (en)

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JP6356582B2 (en) * 2014-11-25 2018-07-11 日東電工株式会社 Adhesive sheet, adhesive sheet with dicing sheet, and method for manufacturing semiconductor device
JP6675155B2 (en) * 2015-05-20 2020-04-01 京セラ株式会社 Die attach paste for semiconductor and semiconductor device
JP6791626B2 (en) * 2015-12-14 2020-11-25 デクセリアルズ株式会社 Manufacturing method of thermosetting adhesive sheet and semiconductor device
JP2018141106A (en) * 2017-02-28 2018-09-13 住友ベークライト株式会社 Thermosetting resin composition, resin sheet with carrier base material and semiconductor device
KR102376144B1 (en) 2018-11-14 2022-03-18 주식회사 엘지화학 Resin composition for bonding semiconductor, adhesive film for semiconductor, dicing diebonding film, and method for dicing of semiconductor wafer using the same
WO2020101236A1 (en) * 2018-11-14 2020-05-22 주식회사 엘지화학 Resin composition for semiconductor adhesion, semiconductor adhesive film using same, dicing die bonding film and semiconductor wafer dicing method

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JP2002363218A (en) * 2001-06-07 2002-12-18 Hitachi Chem Co Ltd Resin paste composition and semiconductor device using the same
JP2011063664A (en) * 2009-09-15 2011-03-31 Shin-Etsu Chemical Co Ltd Underfill material composition and optical semiconductor device
JP2011079893A (en) * 2009-10-05 2011-04-21 Hitachi Chem Co Ltd Urethane resin composition, cured product and optical semiconductor device using the cured product
US20110159713A1 (en) * 2008-09-30 2011-06-30 Sony Chemical & Information Device Corporation Acrylic insulating adhesive
WO2011145524A1 (en) * 2010-05-21 2011-11-24 電気化学工業株式会社 Composition and adhesive

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CN104221171B (en) 2017-11-24
MY170959A (en) 2019-09-20
TW201345994A (en) 2013-11-16
JPWO2013153803A1 (en) 2015-12-17
KR20150003287A (en) 2015-01-08
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JP6247204B2 (en) 2017-12-13
US20150060889A1 (en) 2015-03-05

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