EP2821525A1 - Revêtements multicouches avec du carbone de type diamant - Google Patents

Revêtements multicouches avec du carbone de type diamant Download PDF

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Publication number
EP2821525A1
EP2821525A1 EP14173879.9A EP14173879A EP2821525A1 EP 2821525 A1 EP2821525 A1 EP 2821525A1 EP 14173879 A EP14173879 A EP 14173879A EP 2821525 A1 EP2821525 A1 EP 2821525A1
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EP
European Patent Office
Prior art keywords
multilayered coating
layers
silicon
diamond
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14173879.9A
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German (de)
English (en)
Inventor
Kalaga Murali Krishna
Padmaja Parakala
Surinder Singh Pabla
Krishnamurthy Anand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of EP2821525A1 publication Critical patent/EP2821525A1/fr
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288—Protective coatings for blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/60—Structure; Surface texture
    • F05D2250/62—Structure; Surface texture smooth or fine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/22—Non-oxide ceramics
    • F05D2300/224—Carbon, e.g. graphite
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/506—Hardness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Definitions

  • the subject matter disclosed herein relates generally to multilayered coatings and, more specifically, to multilayered coatings with diamond-like carbon that can be applied to compressor blades of turbines.
  • the compressor section In a gas turbine engine, the compressor section generally includes multiple stages that have a row of compressor blades (also referred to as “rotor blades” or “rotor airfoils”) and stator blades (also referred to as “stator airfoils”).
  • the compressor blades rotate about a rotor and, thusly, impart kinetic energy to the airflow through the compressor.
  • a row of stator blades Directly following the row of compressor blades is a row of stator blades, which remain stationary. Acting in concert, the compressor blades and stator blades turn the airflow and slow the air velocity, respectively, which can increase the static pressure of the airflow through the compressor section.
  • Multiple stages of compressors blades and stator blades can be stacked in an axial flow compressor to achieve the required discharge to inlet air pressure ratio. Compressor and stator blades can thus be secured to rotor wheels and the stator case, respectively, by means of a dovetail or root or base attachment.
  • compressor blades may be subject to mechanical stresses and harsh operating conditions because of the rotational velocity of the compressor. These levels of stress combined with other operating conditions may affect the experienced levels of erosion or corrosion.
  • the ambient air pulled in through the compressor section can include constituents that may be corrosive and abrasive to the compressor blades and other such parts. Some components may further be subject to mixtures of hydrocarbon-based lubricating oils, carbonaceous soot, dirt, rust and the like.
  • Coatings may be applied to articles such as compressor blades to provide additional protection against these elements.
  • some tough but smooth coatings such as diamond like carbons can experience high levels of internal compressive stresses as thickness increases.
  • a multilayered coating in one embodiment, includes an adhesion base layer that can adhere to a metal substrate, and a top surface layer that has a surface roughness of less than or equal to about Ra 1 ⁇ in., wherein at least one of the layers comprises a diamond-like carbon.
  • a coated article in another embodiment, includes a metal substrate comprising an outer surface and a multilayered coating covering at least a portion of the outer surface of the metal substrate.
  • the coating includes an adhesion base layer that can adhere to a metal substrate, and a top surface layer that has a surface roughness of less than or equal to about Ra 0.0254 ⁇ m, wherein at least one of the layers comprises a diamond-like carbon.
  • FIG. 1 a schematic representation of a cross section of a coated article 5 is illustrated comprising at least a metal substrate 20 and a multilayered coating 10.
  • the multilayered coating 10 is formulated with diamond-like carbon (also commonly referred to as "DLC") and additional elements such that it has sufficient adhesion to remain on the metal substrate 20, hydrophobicity and oleophobicity to help prevent corrosion, hardness to help protect against erosion and surface smoothness to not inhibit aerodynamic performance during operation.
  • the multilayered coating 10 can generally comprise an adhesion base layer 12 that can adhere to a metal substrate 20 and a top surface layer 16 that has a surface roughness of less than or equal to about Ra 0.0254 ⁇ m, wherein at least one of the layers comprises a diamond-like carbon.
  • the multilayered coating 10 can further comprise one or more intermediate layers 14 between the adhesion base layer 12 and the top surface layer 16.
  • the adhesion base layer 12 of the multilayered coating 10 comprises a first layer of the multilayered coating 10 that adheres to the underlying metal substrate 20 once applied.
  • the metal substrate 20 can comprise any type of metal and/or alloys such as, for example, iron based alloys (e.g., stainless steels), nickel based alloys, cobalt based alloys and the like.
  • the adhesion base layer 12 may comprise DLC.
  • DLC refers to the commercially available films of amorphous hydrocarbons that can be formed, for example, through vapor phase deposition and can provide high hardness and wear resistance with a smooth surface.
  • the DLC may be, for example, less than or equal to about 10 ⁇ m thick, or from about 2 ⁇ m to about 10 ⁇ m thick, or even from about 5 ⁇ m to about 10 ⁇ m thick.
  • the adhesion base layer 12 may comprise silicon.
  • the silicon may be, for example, less than about 0.5 ⁇ m thick, or from about 0.3 ⁇ m to about 0.4 ⁇ m thick, or about 0.4 ⁇ m thick.
  • the top surface layer 16 of the multilayered coating 10 comprises the outermost layer of the multilayered coating 10 and has a relatively smooth surface roughness.
  • the top surface layer 16 can have a surface roughness of less than or equal to about Ra 0.0254 ⁇ m (Ra 1 ⁇ in), or from about Ra 0.00254 ⁇ m (Ra 0.1 ⁇ in) to about Ra 0.0254 ⁇ m (Ra 1 ⁇ in), or from about Ra 0.00508 ⁇ m (Ra 0.2 ⁇ in) to about Ra 0.01016 ⁇ m (Ra 0.4 ⁇ in), or generally less than or equal to about Ra 0.0127 ⁇ m (Ra 0.5 ⁇ in).
  • Ra refers to the surface roughness parameter determined through the arithmetic average of absolute values as should be appreciated by those skilled in the art.
  • the top surface layer 16 may comprise DLC.
  • DLC when the adhesion base layer 12 comprises silicon as discussed above, and/or when the multilayered coating 10 comprises one or more intermediate layers as will become appreciated herein.
  • the DLC may be, for example, from about 10 ⁇ m to about 15 ⁇ m thick, or be from about 11 ⁇ m to about 13 ⁇ m thick, or be about 10.5 ⁇ m thick.
  • the top surface layer 16 may comprise silicon carbide. Such embodiments can increase the erosion resistance of the overall multilayered coating 10.
  • the top surface layer 16 may comprise silicon carbide when the adhesion base layer 12 comprises DLC as discussed above.
  • the silicon carbide may be, for example, less than or equal to about 10 ⁇ m thick, from about 2 ⁇ m to about 10 ⁇ m thick, or even from about 5 ⁇ m to about 10 ⁇ m thick.
  • the multilayered coating 10 can comprise one or more intermediate layers 14 between the adhesion base layer 12 and the top surface layer 16.
  • the one or more intermediate layers 14 can comprise one or more layers of the same type of material, or a plurality of layers of multiple types of material.
  • At least one of the one or more intermediate layers 14 may comprise silicon, germanium, titanium, chromium, nitrogen, fluorine, sulfur or combinations thereof.
  • the use of silicon as an intermediate layer 14 can increase the adhesion between the overall multilayered coating 10.
  • the one or more intermediate layers 14 comprising silicon can be less than about 0.5 ⁇ m thick, or from about 0.3 ⁇ m thick to about 0.4 ⁇ m thick, or be about 0.4 ⁇ m thick.
  • Intermediate layers 14 can be surrounded by layers of different compositions, the same composition or combinations thereof.
  • the one or more intermediate layers 14 can comprise from 1 layer to about 5 layers of silicon, and may be disposed on top of the base adhesion layer 12, which itself can also comprise silicon.
  • the use of silicon and germanium can reduce internal stresses within the overall multilayered coating 10.
  • the one or more intermediate layers 14 comprising silicon and germanium can be less than about 0.5 ⁇ m thick or be from about 0.2 ⁇ m to about 0.3 ⁇ m thick.
  • the multilayered coating 10 may comprise from 1 to about 3 intermediated layers 14 of silicon and germanium.
  • the one or more intermediate layers 14 comprising silicon and germanium can be from about 8 ⁇ m to about 10 ⁇ m thick.
  • the multilayered coating 10 may comprise from 1 to about 5 intermediate layers 14 of silicon and germanium.
  • At least one of the one or more intermediate layers 14 may comprise DLC or doped DLC or other suitable variations of DLC.
  • Doped DLC can comprise DLC doped with one or more additional elements such as, for example, silicon and/or germanium.
  • the DLC can be doped with fluorine to increase hydrophobicity.
  • the DLC can be doped with polydimethylsiloxane (PDMS) to increase oleophobicity.
  • PDMS polydimethylsiloxane
  • At least one of the one or more intermediate layers 14 may comprise DLC doped with silicon and germanium.
  • the one or more intermediate layers 14 comprising DLC doped with silicon and germanium can be from about 8 ⁇ m to about 10 ⁇ m thick.
  • the one or more intermediate layers 14 can comprise a single layer of DLC doped with silicon and germanium or a plurality of layers of DLC doped with silicon and germanium being disposed adjacent to one another, disposed with different intermediate layers 14 there between, or combinations thereof.
  • At least one of the one or more intermediate layers 14 may comprise DLC doped with just silicon.
  • the one or more intermediate layers 14 comprising DLC doped with silicon can be from about 1 ⁇ m to about 10 ⁇ m thick, or be from about 5 ⁇ m to about 7 ⁇ m thick.
  • the one or more intermediate layers 14 can comprise a single layer of DLC doped with silicon and germanium or a plurality of layers of DLC doped with silicon and germanium being disposed adjacent to one another, disposed with different intermediate layers 14 there between, or combinations thereof.
  • the adhesion base layer 12, the top surface layer 16 and the optional one or more intermediate layers 14 of the multilayered coating 10 can thereby be utilized in a variety of different combinations incorporating different elements and materials to tailor its properties (e.g., hardness, surface roughness, erosion/corrosion resistance, hydrophobicity, oleophobicity, etc.) for a specific application.
  • the multilayered coating 10 can comprise an adhesion base layer 12 of DLC and a top surface layer 16 of silicon carbide.
  • each layer can be from about 5 ⁇ m to about 10 ⁇ m thick.
  • the multilayered coating 10 can comprise a plurality of alternating layers of DLC and silicon carbide such that the adhesion base layer 12 is DLC, the intermediate layers 14 comprise both layers of silicon carbide and layers of DLC, and the top surface layer 16 comprises silicon carbide.
  • the multilayered coating 10 can comprise an adhesion base layer 12 of silicon with a thickness of about 0.3 ⁇ m to about 0.4 ⁇ m.
  • a first intermediate layer 14 can comprise silicon and germanium for a thickness of from about 0.2 ⁇ m to about 0.3 ⁇ m.
  • a second intermediate layer 14 can comprise DLC doped with silicon and germanium for a thickness of from about 8 ⁇ m to about 10 ⁇ m.
  • a third intermediate layer 14 can comprise the same or similar DLC doped with silicon and germanium for a thickness of from about 8 ⁇ m to about 10 ⁇ m, or have a thickness of from about 8 ⁇ m to about 9 ⁇ m.
  • a fourth intermediate layer 14 can comprise DLC doped with silicon for a thickness of from about 5 ⁇ m to about 7 ⁇ m, or have a thickness of from about 5 ⁇ m to about 7 ⁇ m.
  • the multilayered coating 10 can comprise top surface layer of DLC with a thickness of from about 10 ⁇ m to about 12 ⁇ m.
  • multilayered coatings 10 While specific embodiments of multilayered coatings 10 have been presented herein, it should be appreciated that these are non-limiting examples and other multilayered coatings 10 incorporating additional and/or alternative materials or have additional and/or alternative layering configurations may also be realized.
  • the overall multilayered coating 10 can thereby comprise a range of total thicknesses and a variety of total layers.
  • the overall multilayered coating 10 can have a total thickness up to about 40 ⁇ m, up to about 30 ⁇ m, or from about 20 ⁇ m to about 30 ⁇ m as a result of relatively low internal stresses compared to a coating comprising a single DLC layer.
  • the multilayered coating 10 can have up to or over at least about 20 individual layers counting the adhesion base layer 12, the top surface layer 16, and a plurality of intermediate layers 14 there between.
  • the multilayered coating 10 can comprise any other number of plurality of layers.
  • the multilayered coating 10 can comprise at least 10 layers, or at least 15 layers, or at least 20 layers, or even at least 25 layers.
  • the number of layers in the multilayered coating may be selected based at least in part on the level of corrosion and erosion protection required.
  • Each of the layers may be disposed in any suitable manner as should be appreciated to those skilled in the art.
  • the layers of the multilayered coating 10 can be deposited using various commercially available deposition techniques and within a temperature range of from about 120 °C to about 200 °C.
  • the multilayered coating 10 can be tailored to possess a variety of properties for protecting the underlying metal substrate 20 and providing a relatively smooth surface.
  • the multilayered coating 10 can have a hardness of from about 10 GPa to about 30 GPa to resist erosion from foreign objects.
  • the multilayered coating 10 can also be hydrophobic and oleophobic to help prevent the resident buildup of fluids such as water and oil.
  • Hydrophobic refers to the physical property of a material that is water repellent.
  • Oleophobic refers to the physical property of a material that is oil repellent.
  • surfaces with low surface energy for a foulant e.g. water and/or oil
  • the term "contact angle” is the angle formed by a static liquid droplet on the surface of a solid material.
  • the multilayered coating 10 can have a contact angle of at least about 80°, at least about 92°, or at least about 100°. This can provide increased corrosion resistance to external foulants such as hydrogen sulfide, hydrofluoric acid and hydrochloric acid.
  • the metal substrate 20 of the coated article 5 can comprise any metal substrate 20 such as one utilized in a gas turbine.
  • Metal substrates 20 can include, but not be limited to, iron based alloys (e.g., stainless steels), nickel based alloys, cobalt based alloys and the like.
  • the metal substrate can comprise a compressor blade 50.
  • the compressor blade 50 can include an airfoil 52, which, when spun about the rotor, imparts kinetic energy to air flowing through the compressor, and a base or root 53.
  • the airfoil 52 generally includes a suction-side 56 (i.e., convex-side) and a pressure-side 57 (i.e., concave-side).
  • the root 53 can include a platform 54, which is the outward radial face of the root 53 from which the airfoil 52 extends.
  • the platform 54 may be integrally joined to the root 53 of the compressor blade 50.
  • the platform 54 defines the radial inner boundary of the airflow across the airfoil 52.
  • the root 53 further generally includes a dovetail 55 that connects via a complimentary groove in the rotor wheel (not illustrated) to secure the compressor blade 50 in the appropriate position within the compressor.
  • the substrate 10 (e.g., the compressor blade 50) can comprise the multilayered coating 10 covering at least a portion of the outer surface 25 (e.g., the suction-side 56 and/or the pressure-side 57) to form the coated article 5.
  • the multilayered coating 10 of the coated article 5 can thus comprise an adhesion base layer that can adhere to a metal substrate, a top surface layer that has a surface roughness of less than or equal to about Ra 0.0254 ⁇ m, wherein at least one of the layers comprises a diamond-like carbon as discussed above.
  • the compressor blade 50 may comprise a late stage compressor blade 50.
  • late stage refers to the last or one of the last few stages of the compressor section for the turbine.
  • the coating described herein can thereby provide a relatively thick coating for strong erosion and corrosion protection for the compressor blade 50 while still providing a smooth surface without significantly impacting its aerodynamics in operation.
  • multilayered coatings may be provided to protect underlying substrates from a variety of external forces and environmental conditions.
  • the multilayered coatings embodying the compositions presented herein can protect against corrosion and erosion from external objects while still providing a smooth surface.
  • the multilayered coatings can be provided in a relatively thick amount while still including one or more layers of DLC.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
EP14173879.9A 2013-07-01 2014-06-25 Revêtements multicouches avec du carbone de type diamant Withdrawn EP2821525A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/932,239 US20150004362A1 (en) 2013-07-01 2013-07-01 Multilayered coatings with diamond-like carbon

Publications (1)

Publication Number Publication Date
EP2821525A1 true EP2821525A1 (fr) 2015-01-07

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Family Applications (1)

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EP14173879.9A Withdrawn EP2821525A1 (fr) 2013-07-01 2014-06-25 Revêtements multicouches avec du carbone de type diamant

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US (1) US20150004362A1 (fr)
EP (1) EP2821525A1 (fr)
JP (1) JP2015010278A (fr)
CN (1) CN104275864A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3176286A4 (fr) * 2014-07-31 2018-01-17 Ibiden Co., Ltd. Élément de revêtement multicouche et procédé de fabrication d'un élément de revêtement multicouche

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3287544B1 (fr) * 2015-04-23 2021-06-16 Hitachi Metals, Ltd. Moule métallique revêtu et son procédé de fabrication
JP2018031334A (ja) 2016-08-26 2018-03-01 三菱重工コンプレッサ株式会社 積層構造、及び、積層構造を有する機械部品
JP6746458B2 (ja) * 2016-10-07 2020-08-26 三菱日立パワーシステムズ株式会社 タービン翼の製造方法
CN111765033B (zh) * 2019-04-02 2021-12-17 南京华电节能环保设备有限公司 一种高温熔渣回收发电用叶轮
WO2021112064A1 (fr) * 2019-12-06 2021-06-10 富士電機株式会社 Élément de turbine à vapeur
FR3124805B1 (fr) * 2021-06-30 2024-03-22 Saint Gobain Substrat revêtu d’au moins une couche de carbone de type diamant protégée par une couche temporaire à base de germanium ou à base d’oxyde de germanium

Citations (2)

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Publication number Priority date Publication date Assignee Title
EP1067211A1 (fr) * 1999-07-08 2001-01-10 Sumitomo Electric Industries, Ltd. Revêtement dur et élément revêtu
WO2001079585A1 (fr) * 2000-04-12 2001-10-25 Unaxis Balzers Aktiengesellschaft Systeme de couches dlc et procede pour produire un tel systeme

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Publication number Priority date Publication date Assignee Title
US5725573A (en) * 1994-03-29 1998-03-10 Southwest Research Institute Medical implants made of metal alloys bearing cohesive diamond like carbon coatings
FR2856078B1 (fr) * 2003-06-16 2006-11-17 Commissariat Energie Atomique Revetement pour une piece mecanique comprenant au moins du carbone amorphe hydrogene et procede de depot d'un tel revetement.
TWI363742B (en) * 2005-10-28 2012-05-11 Hon Hai Prec Ind Co Ltd Diamond-like carbon film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1067211A1 (fr) * 1999-07-08 2001-01-10 Sumitomo Electric Industries, Ltd. Revêtement dur et élément revêtu
WO2001079585A1 (fr) * 2000-04-12 2001-10-25 Unaxis Balzers Aktiengesellschaft Systeme de couches dlc et procede pour produire un tel systeme

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3176286A4 (fr) * 2014-07-31 2018-01-17 Ibiden Co., Ltd. Élément de revêtement multicouche et procédé de fabrication d'un élément de revêtement multicouche

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CN104275864A (zh) 2015-01-14
JP2015010278A (ja) 2015-01-19
US20150004362A1 (en) 2015-01-01

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