EP2784137A1 - Composition de formation de film mince ferroélectrique à base de PTZ, son procédé de préparation, et procédé de formation dudit film mince l'utilisant - Google Patents

Composition de formation de film mince ferroélectrique à base de PTZ, son procédé de préparation, et procédé de formation dudit film mince l'utilisant Download PDF

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EP2784137A1
EP2784137A1 EP20140155517 EP14155517A EP2784137A1 EP 2784137 A1 EP2784137 A1 EP 2784137A1 EP 20140155517 EP20140155517 EP 20140155517 EP 14155517 A EP14155517 A EP 14155517A EP 2784137 A1 EP2784137 A1 EP 2784137A1
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pzt
thin film
composition
mol
ferroelectric thin
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EP2784137B1 (fr
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Toshihiro Doi
Hideaki Sakurai
Nobuyuki Soyama
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1254—Sol or sol-gel processing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1229—Composition of the substrate
    • C23C18/1245—Inorganic substrates other than metallic
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1283—Control of temperature, e.g. gradual temperature increase, modulation of temperature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Definitions

  • the present invention relates to a PZT-based ferroelectric thin film-forming composition, a method of preparing the composition, and a method of forming a PZT-based ferroelectric thin film using the composition.
  • the invention relates to a composition used to form a PZT-based ferroelectric thin film, which is used for a dielectric layer or the like of a thin film capacitor, using a sol-gel method; a method of preparing the composition; and a method of forming a PZT-based ferroelectric thin film using the composition.
  • the invention relates to a PZT-based ferroelectric thin film-forming composition capable of obtaining, even when the thickness of a coating film formed for each coating process is relatively thick, a dense and high-performance thin film without voids and cracks and capable of being crystallized by performing a baking process once.
  • a ferroelectric thin film used for a dielectric layer of a thin film capacitor or the like is a type of thin film, but it is necessary that this ferroelectric thin film have a certain level of thickness to obtain enough reliability to endure use.
  • a relatively thick film can be formed without sacrificing the thickness of a dielectric layer.
  • a sol-gel method typically, a high-temperature process such as pre-baking or baking is performed. Therefore, when an attempt to obtain a thicker film is made by increasing the coating amount for each coating process, tensile stress generated in the film during baking or the like is increased, which may cause a problem of cracking in the formed film.
  • the thickness of a film which can be formed for each coating process using a sol-gel method is limited to about 100 nm.
  • a method used to perform coating and baking processes of a composition multiple times is adopted.
  • production efficiency decreases, which leads to an increase in film forming cost. Therefore, studies and developments have been actively made regarding improvement of a material, that is, regarding a raw material solution capable of increasing the thickness of a film formed in each coating process without cracking.
  • Japanese Unexamined Patent Application, First Publication No. 2001-261338 discloses a metal oxide thin film-forming raw material solution used to form a Ti-containing metal oxide thin film, in which propylene glycol is added to the raw material solution. Using this raw material solution, a film having a thickness of 0.2 ⁇ m or greater can be formed for each coating process without cracking.
  • a method capable of increasing the thickness of a film formed for each coating process without cracking in which a high-molecular compound is added to a high-concentration sol-gel solution to release tensile stress generated during film formation (for example, refer to J Sol-Gel Sci Technol (2008) 47:316 to 325 ).
  • An object of the invention is to provide a PZT-based ferroelectric thin film-forming composition capable of obtaining, even when the thickness of a coating film formed for each coating process is relatively thick, a dense and high-performance thin film without voids and cracks and capable of being crystallized by performing a baking process once; a method of preparing the composition; and a method of forming a PZT-based ferroelectric thin film using the composition.
  • a PZT-based ferroelectric thin film-forming composition used to form a PZT-based ferroelectric thin film, the composition including: a PZT precursor; a diol; one of polyvinyl pyrrolidones and a polyethylene glycol; water; and a linear monoalcohol having 6 to 12 carbon chains, in which a concentration of the PZT precursor in 100 wt% of the composition is 17 wt% to 35 wt% in terms of oxides, the ratio of the diol to 100 wt% of the composition is 16 wt% to 56 wt%, the ratio of the one of the polyvinyl pyrrolidones and the polyethylene glycol to 1 mol of the PZT precursor is 0.01 mol to 0.25 mol in terms of monomers, the ratio of the water to 1 mol of the PZT precursor is 0.5 mol to 3 mol, and the ratio of the linear monoalcohol having 6 to 12
  • a method of preparing a PZT-based ferroelectric thin film-forming composition including: a step of mixing a PZT precursor which has a concentration of 17 wt% to 35 wt% in terms of oxides in 100 wt% of the composition, a diol which has a ratio of 16 wt% to 56 wt% with respect to 100 wt% of the composition, and water which has a ratio of 0.5 mol to 3 mol with respect to 1 mol of the PZT precursor to react with each other to prepare a synthetic solution; a step of refluxing the synthetic solution at a temperature of 130°C to 175°C for 0.5 hours to 3 hours; a step of adding a linear monoalcohol having 6 to 12 carbon chains, which has a ratio of 0.6 wt% to 10 wt% with respect to 100 wt% of the composition, to the refluxed synthetic solution to prepare a sol-gel solution; a step of
  • the diol be one of a propylene glycol and an ethylene glycol.
  • the diol be one of a propylene glycol and an ethylene glycol.
  • a method of forming a PZT-based ferroelectric thin film including: coating the PZT-based ferroelectric thin film-forming composition according to the first aspect or a PZT-based ferroelectric thin film-forming composition prepared using the method according to the second aspect on a lower electrode of a substrate; pre-baking the composition; and baking the composition to be crystallized and to form a thin film on the lower electrode.
  • a complex electronic component including: a PZT-based ferroelectric thin film which is formed using the method according to the fifth aspect, in which the complex electronic component is one of a thin film capacitor, a capacitor, an IPD, a DRAM memory capacitor, a laminated capacitor, a gate insulator of a transistor, a non-volatile memory, a pyroelectric infrared detecting element, a piezoelectric element, an electro-optic element, an actuator, a resonator, an ultrasonic motor, and an LC noise filter element.
  • the PZT-based ferroelectric thin film-forming composition according to the first aspect of the invention includes: a PZT precursor; a diol; one of polyvinyl pyrrolidones and a polyethylene glycol; water; and a linear monoalcohol having 6 to 12 carbon chains, in which the concentration of the PZT precursor in 100 wt% of the composition is 17 wt% to 35 wt% in terms of oxides, and the ratio of the diol to 100 wt% of the composition is 16 wt% to 56 wt%.
  • the ratio of the one of the polyvinyl pyrrolidones and the polyethylene glycol to 1 mol of the PZT precursor is 0.01 mol to 0.25 mol in terms of monomers
  • the ratio of the water to 1 mol of the PZT precursor is 0.5 mol to 3 mol
  • the ratio of the linear monoalcohol having 6 to 12 carbon atoms to 100 wt% of the composition is 0.6 wt% to 10 wt%.
  • this composition is used used to form a ferroelectric thin film with a sol-gel method, a dense and high-performance thin film can be formed without voids and cracking even when the thickness of a coating film formed for each coating process is relatively large at 100 nm to 250 nm.
  • the coating film can be crystallized by baking the coating film once.
  • the amount of polyvinyl pyrrolidone or polyethylene glycol is relatively small, a high-temperature process during film formation can be simplified, and production efficiency can be improved.
  • an effect of decreasing the residual stress of a film can be obtained.
  • the method of preparing a PZT-based ferroelectric thin film-forming composition according to the second aspect of the invention includes: a step of mixing a PZT precursor which has a concentration of 17 wt% to 35 wt% in terms of oxides in 100 wt% of the composition, a diol which has a ratio of 16 wt% to 56 wt% with respect to 100 wt% of the composition, and water which has a ratio of 0.5 mol to 3 mol with respect to 1 mol of the PZT precursor to react with each other to prepare a synthetic solution; a step of refluxing the synthetic solution at a temperature of 130°C to 175°C for 0.5 hours to 3 hours; a step of adding a linear monoalcohol having 6 to 12 carbon chains, which has a ratio of 0.6 wt% to 10 wt% with respect to 100 wt% of the composition, to the refluxed synthetic solution to prepare a sol-gel solution; a step of re-refluxing the
  • the PZT-based ferroelectric thin film-forming composition according to the third aspect of the invention contains one of a propylene glycol and an ethylene glycol as the diol and thus is superior in storage stability.
  • the method of forming a PZT-based ferroelectric thin film according to the fifth aspect of the invention includes: coating the above-described PZT-based ferroelectric thin film-forming composition according to the invention or a PZT-based ferroelectric thin film-forming composition prepared using the above-described method according to the invention on a lower electrode of a substrate; pre-baking the composition; and baking the composition to be crystallized and to form a thin film on the lower electrode.
  • the above-described PZT-based ferroelectric thin film-forming composition according to the invention or a PZT-based ferroelectric thin film-forming composition prepared using the above-described method according to the invention is used.
  • the thickness of a coating film formed for each coating process is relatively large at 100 nm to 250 nm, a dense and high-performance thin film can be obtained without voids and cracks.
  • the coating film can be crystallized by baking the coating film once.
  • the amount of polyvinyl pyrrolidone or polyethylene glycol in the composition used in the method is relatively small, a high-temperature process during film formation can be simplified, and production efficiency can be improved.
  • this method easily promotes the densification of a film structure, production efficiency can be increased.
  • the thin film capacitor or the like according to the sixth aspect includes a PZT-based ferroelectric thin film which is formed using the above-described method according to the invention and which has a dense structure in which an extremely small amount of voids and cracks are formed, whereby the electrical properties and the service life reliability thereof are superior.
  • a composition according to an embodiment of the invention is an improvement of a composition used to form a PZT-based ferroelectric thin film.
  • the composition includes: a PZT precursor; a diol; one of polyvinyl pyrrolidones and a polyethylene glycol; water; and a linear monoalcohol having 6 to 12 carbon chains, in which a concentration of the PZT precursor in 100 wt% of the composition is 17 wt% to 35 wt% in terms of oxides, the ratio of the diol to 100 wt% of the composition is 16 wt% to 56 wt%, the ratio of the one of polyvinyl pyrrolidones and the polyethylene glycol to 1 mol of the PZT precursor is 0.01 mol to 0.25 mol in terms of monomers, the ratio of the water to 1 mol of the PZT precursor is 0.5 mol to 3 mol, and the ratio of the linear monoalcohol having 6 to 12 carbon atoms to 100
  • a PZT-based ferroelectric thin film formed of the composition according to the embodiment is configured by a Pb-containing composite metal oxide having a perovskite structure such as lead zirconate titanate (PZT) or PLZT obtained by adding La to PZT.
  • the PZT precursor contained in the composition is a raw material used to form the above-described composite metal oxide or the like in the formed ferroelectric thin film, and this PZT precursor is contained in the composition such that a desired metal atomic ratio is obtained in PZT or PLZT.
  • the PZT precursor is represented by the formula "(Pb x La y )(Zr z Ti 1-z )O 3 "
  • the metal atomic ratio be adjusted such that x, y, and z satisfy 1.00 ⁇ x ⁇ 1.25, 0 ⁇ y ⁇ 0.05, and 0.4 ⁇ z ⁇ 0.6, respectively.
  • the PZT-based ferroelectric thin film may also contain, for example, PMnZt to which Mn is added or PNbZT to which Nb is added.
  • a compound in which an organic group binds to a metal element such as Pb, La, Zr, and Ti through an oxygen or nitrogen atom of the organic group is preferable.
  • a compound in which an organic group binds to a metal element such as Pb, La, Zr, and Ti through an oxygen or nitrogen atom of the organic group is preferable.
  • examples of such a compound include one or two or more elements selected from the group consisting of metal alkoxides, metal diol complexes, metal triol complexes, metal carboxylates, metal ⁇ -diketonate complexes, metal ⁇ -diketoester complexes, metal ⁇ -iminoketo complexes, and metal amino complexes.
  • Particularly preferable compounds are metal alkoxides, and partial hydrolysates and organic acid salts thereof.
  • examples of a Pb compound and a La compound include acetates such as lead acetate: Pb(OAc) 2 or lanthanum acetate: La(OAc) 3 ; and alkoxides such as lead diisopropoxide: Pb(OiPr) 2 or lanthanum triisopropoxide: La(OiPr) 3 .
  • Ti compound examples include alkoxides such as titanium tetraethoxide: Ti(OEt) 4 , titanium tetraisopropoxide: Ti(OiPr) 4 , titanium tetra n-butoxide: Ti(OnBu) 4 , titanium tetraisobutoxide: Ti(OiBu) 4 , titanium tetra t-butoxide: Ti(OtBu) 4 , or titanium dimethoxy diisopropoxide: Ti(OMe) 2 (OiPr) 2 .
  • a Zr compound the same alkoxides as those of the Ti compound are preferable.
  • Metal alkoxides may be used without any change, but partial hydrolysates thereof may be used in order to promote decomposition.
  • examples of a Mn compound include manganese acetate, manganese 2-ethylhexanoate, and manganese naphthenate.
  • examples of an Nb compound include niobium pentaethoxide and niobium 2-ethylhexanoate.
  • the reason for limiting the concentration of the PZT precursor in 100 wt% of the composition to be 17 wt% to 35 wt% in terms of oxides is as follows. When the concentration is lower than the lower limit, a sufficient film thickness cannot be obtained. On the other hand, when the concentration is higher than the upper limit, cracking is likely to occur.
  • the concentration of the PZT precursor in 100 wt% of the composition is more preferably 20 wt% to 25 wt% in terms of oxides.
  • the concentration of the PZT precursor in the composition in terms of oxides refers to the concentration of metal oxides in 100 wt% of the composition which is calculated under the assumption that all the metal elements contained in the composition are converted into desired oxides.
  • the diol contained in the composition is a component constituting a solvent of the composition.
  • Specific examples of the diol include propylene glycol, ethylene glycol, and 1,3-propanediol. Among these, propylene glycol or ethylene glycol is preferable.
  • the diol as an essential solvent component, the storage stability of the composition can be increased.
  • the reason for limiting the ratio of the diol to 100 wt% of the composition to be 16 wt% to 56 wt% is as follows. When the ratio is lower than the lower limit, precipitates may be formed. On the other hand, when the ratio is higher than the upper limit, voids (micropores) are likely to be formed during the formation of a thick film.
  • the ratio of the diol is more preferably 28 wt% to 42 wt%.
  • carboxylic acids for example, ethanol, 1-butanol, or polyols other than diol
  • esters such as acetone or methyl ethyl ketone
  • ethers such as dimethylether or diethylether
  • cycloalkanes such as cyclohexane or cyclohexanol
  • aromatic compounds such as benzene, toluene, or xylene
  • mixed solvents obtained by adding one or two or more of the above-described solvents to diol can be used.
  • carboxylic acids include n-butyric acid, ⁇ -methylbutyric acid, i-valeric acid, 2-ethylbutyric acid, 2,2-dimethylbutyric acid, 3,3-dimethylbutyric acid, 2,3-dimethylbutyric acid, 3-methylpentanoic acid, 4-methylpentanoic acid, 2-ethylpentanoic acid, 3-ethylpentanoic acid, 2,2-dimethylpentanoic acid, 3,3-dimethylpentanoic acid, 2,3-dimethylpentanoic acid, 2-ethylhexanoic acid, and 3-ethylhexanoic acid.
  • esters include ethyl acetate, propyl acetate, n-butyl acetate, sec-butyl acetate, tert-butyl acetate, isobutyl acetate, n-amyl acetate, sec-amyl acetate, tert-amyl acetate and isoamyl acetate.
  • alcohols include 1-propanol, 2-propanol, 1-butanol, 2-butanol, isobutyl alcohol, 1-pentanol, 2-pentanol, 2-methyl-2-pentanol, and 2-methoxyethanol.
  • the composition according to the embodiment contains, as a high-molecular compound, one of polyvinyl pyrrolidones (PVP) and a polyethylene glycol.
  • PVP polyvinyl pyrrolidones
  • Polyvinyl pyrrolidone and polyethylene glycol are used for adjusting the viscosity of the solution in the composition.
  • polyvinyl pyrrolidone is used to adjust a relative viscosity determined based on a k value.
  • "k value” described herein refers to a value representing a viscosity property, which correlates to a molecular weight, and is calculated according to the following Fikentscher's formula using a relative viscosity (25°C) which is measured with a capillary viscometer.
  • ⁇ rel represents a relative viscosity of an aqueous polyvinyl pyrrolidone solution to water
  • c represents a concentration (wt%) of polyvinyl pyrrolidone in an aqueous polyvinyl pyrrolidone solution.
  • the k value of polyvinyl pyrrolidone contained in the composition according to the embodiment is preferably 30 to 90.
  • a sufficient viscosity is necessary for maintaining the thickness of the coated coating film (gel film).
  • the k value is lower than the lower limit, it is difficult to obtain the sufficient viscosity.
  • the k value is higher than the upper limit, the viscosity is excessively high, and it is difficult to uniformly coat the composition.
  • the polyethylene glycol is used, the polymerization degree thereof is preferably 200 to 400. When the polymerization degree is lower than the lower limit, it is difficult to obtain the sufficient viscosity.
  • polyvinyl pyrrolidone is particularly preferable due to an effect of suppressing cracking.
  • the reason for limiting the ratio of the one of the polyvinyl pyrrolidones (PVP) and the polyethylene glycol to 1 mol of the PZT precursor to be 0.01 mol to 0.25 mol in terms of monomers is as follows. When the ratio is lower than the lower limit, cracking is likely to occur. On the other hand, when the ratio is higher than the upper limit, voids are likely to be formed.
  • the ratio of the one of the polyvinyl pyrrolidones and the polyethylene glycol to 1 mol of the PZT precursor is more preferably 0.025 mol to 0.075 mol.
  • the one of the polyvinyl pyrrolidones and the polyethylene glycol has a high decomposition temperature and high affinity to the PZT precursor and thus is difficult to remove from a film, which is likely to cause voids. Therefore, the smaller the addition amount, the better.
  • the addition amount of one of the polyvinyl pyrrolidones (PVP) and the polyethylene glycol can be suppressed to be relatively low.
  • mol in terms of monomers refers to the value of molecular weight using a monomer included in a high-molecular compound as a reference.
  • the “mol in terms of monomers” to 1 mol of the PZT precursor refers to the ratio of molecular weight to 1 mol of the PZT precursor using a monomer included in a high-molecular compound as a reference.
  • the composition according to the embodiment contains water such as ion exchange water or ultrapure water.
  • water such as ion exchange water or ultrapure water.
  • the precursor is appropriately hydrolyzed, and thus an effect of improving the densification of a film structure can be obtained.
  • the reason for limiting the ratio of water to 1 mol of the PZT precursor to be 0.5 mol to 3 mol is as follows. When the ratio is lower than the lower limit, hydrolysis is not sufficient, which may cause a problem of insufficient densification of a film structure or the like. On the other hand, when the ratio is higher than the upper limit, hydrolysis is excessively progressed, which may cause a problem of precipitates, cracking in a film, or the like.
  • the ratio of water to 1 mol of the PZT precursor is more preferably 0.8 mol to 2 mol.
  • the composition according to the embodiment contains the linear monoalcohol having 6 to 12 carbon chains.
  • a gel film capable of efficiently discharging organic materials outside of the film during pre-baking can be formed.
  • a dense and high-performance PZT film can be obtained.
  • the reason for limiting the number of carbon chains in the linear monoalcohol to be 6 to 12 is as follows. When the number of carbon chains is less than the lower limit, the boiling point is not sufficiently high, and a film cannot be sufficiently densified.
  • the number of carbon chains in the linear monoalcohol is more preferably 7 to 9.
  • the reason for limiting the ratio of the linear monoalcohol to 100 wt% of the composition to be 0.6 wt% to 10 wt% is as follows.
  • the ratio of the linear monoalcohol to 100 wt% of the composition is more preferably 1 wt% to 3 wt%.
  • the linear monoalcohol having 6 carbon chains is 1-hexanol
  • the linear monoalcohol having 7 carbon chains is 1-heptanol
  • the linear monoalcohol having 8 carbon chains is 1-octanol
  • the linear monoalcohol having 9 carbon chains is 1-nonanol
  • the linear monoalcohol having 10 carbon chains is 1-decanol
  • the linear monoalcohol having 11 carbon chains is 1-undecanol
  • the linear monoalcohol having 12 carbon chains is 1-dodecanol.
  • a stabilizer may be optionally added to the composition at a ratio (number of molecules of stabilizer)/(number of metal atoms) of about 0.2 to 3.
  • the stabilizer include ⁇ -diketones (such as acetyl acetone, heptafluorobutanoyl pivaloyl methane, dipivaloyl methane, trifluoroacetyl acetone, or benzoyl acetone), ⁇ -ketonic acids (such as acetoacetic acid, propionyl acetic acid, or benzoyl acetic acid), ⁇ -keto esters (such as methyl, propyl, butyl, and other lower alkyl esters of the above-described ketonic acids), oxy acids (such as lactic acid, glycolic acid, ⁇ -oxybutyric acid, or salicylic acid), lower alkyl esters of the above-described oxy acids, oxyketones (such as
  • the composition according to the embodiment can contain a polar solvent such as a formamide-based solvent as an organic dopant.
  • a polar solvent such as a formamide-based solvent as an organic dopant.
  • a formamide-based solvent any of formamide, N-methyl formamide, or N-N-dimethyl formamide is preferably used.
  • the formamide-based solvent since the PZT precursor is hydrolyzed, a thick film having a small amount of cracks can be formed without the addition of the formamide-based solvent or the like.
  • the formamide-based solvent or the like in combination with the polyvinyl pyrrolidone and the like, a film having a smaller amount of cracks and a dense structure can be formed.
  • an organic dopant other than the formamide-based solvent examples include an ethanolamines such as monoethanolamine or diethanolamine, and the ethanolamines can be used in combination with the formamide-based solvent.
  • the ethanolamines has an effect of increasing the storage stability of the solution by being coordinated to a metal alkoxide.
  • the ratio of the organic dopant containing the formamide-based solvent to 100 wt% of the composition is preferably 3 wt% to 13 wt%.
  • the composition according to the embodiment can further contain a metal dopant such as lanthanum (La), manganese (Mn), or niobium (Nb). It is preferable that the metal dopant having a low concentration of 0.002 mol to 0.03 mol with respect to 1 mol of Pb in a Pb source of the PZT precursor be added to the composition according to the embodiment.
  • a metal dopant such as lanthanum (La), manganese (Mn), or niobium (Nb).
  • the metal dopant having a low concentration of 0.002 mol to 0.03 mol with respect to 1 mol of Pb in a Pb source of the PZT precursor be added to the composition according to the embodiment.
  • the composition containing the metal dopant at the predetermined ratio for example, the effects of reducing a leakage current, improving a dielectric constant, improving electrical properties, and improving a mechanical quality factor (constant indicating the sharpness of mechanical vibration near a resonance frequency when a pie
  • the reason for limiting the ratio of the metal dopant added to be 0.002 mol to 0.03 mol is as follows. When the ratio is lower than the lower limit, a doping effect is not sufficiently obtained. When the ratio is higher than the upper limit, a heterogeneous phase is likely to be precipitated, and piezoelectric properties and the like deteriorate.
  • the ratio of the metal dopant to 1 mol of Pb in the Pb source of the PZT precursor is more preferably 0.005 mol to 0.01 mol.
  • the above-described Pb compound and the like of the PZT precursor are prepared and weighed at ratios for obtaining the desired metal atomic ratio, respectively.
  • the weighed PZT precursor, a diol, and water are poured into a reaction vessel and mixed with each other, followed by reflux and reaction, preferably, in a nitrogen atmosphere at a temperature of 130°C to 175°C for 0.5 hours to 3 hours.
  • a synthetic solution is prepared.
  • a solvent be removed using a method such as atmospheric distillation or distillation under reduced pressure.
  • the stabilizer when a stabilizer such as acetyl acetone is added, it is preferable that the stabilizer be added to the synthetic solution after the solvent removal, followed by reflux in a nitrogen atmosphere at a temperature of 130°C to 175°C for 0.5 hours to 5 hours. Next, by being left to stand at room temperature, the synthetic solution is cooled to room temperature (25°C).
  • a stabilizer such as acetyl acetone
  • a linear monoalcohol is added to the cooled synthetic solution to prepare a sol-gel solution.
  • the concentration of the PZT precursor in 100 wt% of the composition is adjusted to be 17 wt% to 35 wt% in terms oxides, and the ratio of the diol to 100 wt% of the composition is adjusted to be 16 wt% to 56 wt%.
  • a solvent other than diol be added to the sol-gel solution.
  • the sol-gel solution is re-refluxed in a predetermined atmosphere such as a nitrogen atmosphere at a temperature of 100°C to 175°C for 0.5 hours to 10 hours.
  • a solvent for example, alcohol
  • the PZT-based ferroelectric thin film-forming composition according to the embodiment is obtained.
  • the number of particles having a particle size of 0.5 ⁇ m or greater (preferably 0.3 ⁇ m or greater and more preferably 0.2 ⁇ m or greater) be less than or equal to 50 particles per 1 mL of the composition.
  • the number of particles having a particle size of 0.5 ⁇ m or greater in the composition is more than 50 particles per 1 mL of the composition, long-term storage stability deteriorates.
  • the lower the number of particles having a particle size of 0.5 ⁇ m or greater in the composition the better.
  • the number of particles is preferably less than or equal to 30 particles per 1 mL of the composition.
  • a method of treating the composition after adjusting the number of particles to be in the above-described range is not particularly limited.
  • the following method may be used.
  • a first method is a filtration method of supplying pressure with a syringe using a commercially available membrane filter having a pore size of 0.2 ⁇ m.
  • a second method is a pressure filtration method in which a commercially available membrane filter having a pore size of 0.05 ⁇ m is combined with a pressure tank.
  • a third method is a circulation filtration method in which the filter used in the second method is combined with a solution circulating tank.
  • a particle capture rate by the filter varies depending on a supply pressure of the composition. It is generally known that, the lower the pressure, the higher the capture rate. Particularly in the first method or the second method, in order to realize the condition that the number of particles having a particle size of 0.5 ⁇ m or greater is less than or equal to 50 particles per 1 mL of the composition, it is preferable that the composition be made to pass extremely slowly through the filter at a low pressure.
  • This forming method is a method of forming a ferroelectric thin film using a sol-gel method.
  • a raw material solution As a raw material solution, the above-described PZT-based ferroelectric thin film-forming composition according to the embodiment or a PZT-based ferroelectric thin film-forming composition prepared using the above-described method according to the embodiment is used.
  • the PZT-based ferroelectric thin film-forming composition is coated on a substrate to form a coating film (gel film) having a desired thickness.
  • the coating method is not particularly limited, and examples thereof include spin coating, dip coating, liquid source misted chemical deposition (LSMCD), and electrostatic spray coating.
  • a substrate used to form a ferroelectric thin film a heat-resistant substrate, such as a silicon substrate or a sapphire substrate, on which a lower electrode is formed is used.
  • the lower electrode which is formed on the substrate is formed of a material, such as Pt, TiO X , Ir, or Ru, which has conductivity and is not reactive with the ferroelectric thin film.
  • the lower electrode can have a two-layer structure in which a TiO X film and a Pt film are formed in this order from the substrate side.
  • a TiO X film include a TiO 2 film.
  • a SiO 2 film can be formed on the substrate surface.
  • this coating film is pre-baked and then baked to be crystallized.
  • Pre-baking is performed using a hot plate or rapid thermal annealing (RTA) under a predetermined condition. It is preferable that pre-baking be performed in the air, in an oxygen atmosphere or in a water vapor-containing atmosphere in order to remove a solvent and to thermally decompose or hydrolyze a metal compound to be transformed into a complex oxide. Even during heating in the air, moisture required for hydrolysis is sufficiently secured with moisture in the air.
  • a low-temperature heat treatment may be performed using a hot plate at a temperature of 70°C to 90°C for 0.5 minutes to 5 minutes.
  • two-stage pre-baking be performed while changing a temperature increase rate and a heating holding temperature.
  • the substrate is held at 250°C to 300°C for 3 minutes to 10 minutes in the first stage and is held at 400°C to 500°C for 3 minutes to 10 minutes in the second stage.
  • a temperature increase rate from room temperature to the pre-baking temperature of the first stage be relatively low at 2.5°C/sec to 5°C/sec; and that a temperature increase rate from the pre-baking temperature of the first stage to the pre-baking temperature of the second stage be relatively high at 30°C/sec to 100°C/sec.
  • a model is proposed in which liquid inside a gel film is raised to the vicinity of the surface by a capillary force, and the gel is dried.
  • the linear monoalcohol having 6 to 12 carbon chains (for example, 1-octanol having 8 carbon chains), which has high surface tension, low affinity to the PZT precursor materials, and low steam pressure, is added to the sol-gel solution which is the composition according to the embodiment ( FIG 1A ). Therefore, by slowly heating the substrate from room temperature to the pre-baking temperature of the first stage, 1-octanol in the gel film is raised to the gel film surface by a capillary force to be evaporated ( FIG. 1B ), and thus appropriate gaps are formed ( FIG 1 C) .
  • 1-octanol having 8 carbon chains which has high surface tension, low affinity to the PZT precursor materials, and low steam pressure
  • FIGS. 2A to 2D even when a substrate is slowly heated from room temperature to the pre-baking temperature of the first stage, there is no solvent, such as 1-octanol, which is raised to the gel film surface by a capillary force to be evaporated ( FIG 2A ). Therefore, gaps are not formed inside the pre-baked film. In addition, even when propylene glycol is evaporated in the vicinity of the surface of the gel film or the pre-baked film, an exit of gas is removed by the rearrangement of particles ( FIGS. 2B and 2C ).
  • solvent such as 1-octanol
  • the reason for limiting the pre-baking temperature of the first stage to be 250°C to 300°C is as follows.
  • the pre-baking temperature is lower than the lower limit, the heat decomposition of the precursor materials is insufficient, and thus cracking is likely to occur.
  • the pre-baking temperature is higher than the upper limit, the precursor materials of an upper portion of the substrate are decomposed before the precursor materials in the vicinity of the substrate are completely decomposed. As a result, since organic materials remain in the vicinity of the substrate, voids are likely to be formed.
  • the reason for limiting the pre-baking time of the first stage to be 3 minutes to 10 minutes is as follows. When the pre-baking time is shorter than the lower limit, the decomposition of the precursor materials is not sufficiently progressed.
  • the reason for limiting the pre-baking temperature of the second stage to be 400°C to 450°C is as follows.
  • the pre-baking temperature is lower than the lower limit, residual organic materials remaining in the precursor materials are not completely removed, and thus the film is not sufficiently densified.
  • the pre-baking temperature is higher than the upper limit, crystallization is progressed, and it is difficult to control the orientation.
  • the reason for limiting the pre-baking time of the second stage to be 3 minutes to 10 minutes is as follows.
  • the pre-baking time is shorter than the lower limit, residual organic materials are not sufficiently removed, strong stress is generated during crystallization, and thus the peeling or cracking of the film is likely to occur.
  • the pre-baking time is longer than the upper limit, the process time is increased, and productivity deteriorates.
  • the amount of polyvinyl pyrrolidone and the like added is small, and a gel from which organic materials can be easily removed is formed. Therefore, even when a relatively thick coating film is pre-baked, one-stage pre-baking can be performed, and thus production efficiency can be improved.
  • the temperature be 400°C to 500°C; and that the holding time at the temperature be 1 minute to 5 minutes.
  • the composition to be used has a high effect of suppressing cracking in spite that the amount of polyvinyl pyrrolidone and the like added is small.
  • the temperature increase rate from a temperature in a range from room temperature to 200°C, to the pre-baking temperature is preferably 10°C/sec to 100°C/sec.
  • the coating process of the composition to the pre-baking process can be repeated multiple times until a film having a predetermined thickness is obtained, and, finally, baking can be performed in a batch process.
  • the above-described composition according to the embodiment and the like are used as the raw material solution. Therefore, since a thick film having several hundreds of nanometers can be formed for each coating process, the number of the repeated processes can be reduced.
  • Baking is the process for baking the pre-baked coating film at a crystallization temperature or higher to be crystallized. As a result, a ferroelectric thin film is obtained.
  • a baking atmosphere in this crystallization process O 2 , N 2 , Ar, N 2 O, H 2 , or a mixed gas thereof is preferable.
  • Baking is performed by holding the pre-baked coating film preferably at 600°C to 700°C for 1 minute to 5 minutes. Baking may be performed by rapid thermal annealing (RTA). When baking is performed by RTA, a temperature increase rate thereof is preferably 2.5°C/sec to 100°C/sec.
  • the PZT-based ferroelectric thin film is obtained.
  • the number of processes during film formation is small.
  • the amount of cracks is extremely small, and a dense film structure is obtained. Therefore, electrical properties are extremely superior.
  • the PZT-based ferroelectric thin film obtained using the above-described method according to the embodiment can be desirably used as a constituent material (electrode) of a composite electronic component such as a thin film capacitor, a capacitor, an IPD, a DRAM memory capacitor, a laminated capacitor, a gate insulator of a transistor, a non-volatile memory, a pyroelectric infrared detecting element, a piezoelectric element, an electro-optic element, an actuator, a resonator, an ultrasonic motor, or an LC noise filter element.
  • a composite electronic component such as a thin film capacitor, a capacitor, an IPD, a DRAM memory capacitor, a laminated capacitor, a gate insulator of a transistor, a non-volatile memory, a pyroelectric infrared detecting element, a piezoelectric element, an electro-optic element, an actuator, a resonator, an ultrasonic motor, or an LC
  • PZT precursor lead acetate trihydrate (Pb source), titanium tetraisopropoxide (Ti source), and zirconium tetrabutoxide (Zr source) were weighed such that a metal atomic ratio (Pb/Zr/Ti) was 115/52/48. These materials were added to a mixed solution of propylene glycol (diol), acetyl acetone, and ultrapure water (water) in a reaction vessel to react with each other. As a result, a synthetic solution was prepared. In this case, 2 mol of ultrapure water (water) was added with respect to 1 mol of the PZT precursor.
  • Pb source lead acetate trihydrate
  • Ti source titanium tetraisopropoxide
  • Zr source zirconium tetrabutoxide
  • the concentration of the PZT precursor in the synthetic solution in terms of oxides refers to the concentration of metal oxides in 100 wt% of the synthetic solution which was calculated under the assumption that all the metal elements contained in the synthetic solution were converted into desired oxides.
  • the concentration of the PZT precursor in 100 wt% of the sol-gel solution was 25 wt% in terms of oxides.
  • the concentration of the PZT precursor in the sol-gel solution in terms of oxides refers to the concentration of metal oxides in 100 wt% of the synthetic solution which was calculated under the assumption that all the metal elements contained in the sol-gel solution were converted into desired oxides.
  • a composition used to form a PZT-based ferroelectric thin film was obtained.
  • This composition was filtered through a commercially available membrane filter having a pore size of 0.05 ⁇ m by supplying a pressure thereto with a syringe.
  • the number of particles having a particle size of 0.5 ⁇ m or greater was 3 per 1 mL of the solution.
  • the concentration of the PZT precursor in 100 wt% of the composition was 25 wt% in terms of oxides.
  • the obtained composition was dripped on a Pt film (lower electrode) of a Si/SiO 2 /TiO 2 /Pt substrate set which was on a spin coater, followed by spin-coating at a rotating speed of 1800 rpm for 1 minute. As a result, a coating film (gel film) was formed on the substrate.
  • the coating film which was formed on the substrate was two-stage pre-baking and baking according to a temperature profile illustrated in FIG. 3 .
  • a PZT-based ferroelectric thin film was formed. Specifically, first, before two-stage pre-baking and baking, the substrate on which the coating film was formed was held in the air at a temperature of 75°C for 1 minute using a hot plate. As a result, low-boiling-point components and adsorbed water molecules were removed.
  • the substrate was held on a hot plate at 300°C for 5 minutes in the first-stage of pre-baking to hydrolyze the gel film.
  • the substrate was held on a hot plate at 450°C for 5 minutes to completely remove residual fine organic materials remaining in the film.
  • a pre-baked film (PZT amorphous film) having a thickness of 400 nm was obtained.
  • the pre-baked film was heated in an oxygen atmosphere from room temperature to 700°C at a temperature increase rate of 10°C/sec and was held at 700°C for 1 minute. As a result, a PZT-based ferroelectric thin film was formed on the lower electrode of the substrate.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 1, except that 6.3 wt% of 1-octanol (linear monoalcohol having 8 carton chains) of Example 1 was contained with respect to 100 wt% of the composition.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 1, except that 10 wt% of 1-octanol (linear monoalcohol having 8 carton chains) of Example 1 was contained with respect to 100 wt% of the composition.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 16 wt% of propylene glycol (diol) of Example 2 was contained with respect to100 wt% of the composition.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 56 wt% of propylene glycol (diol) of Example 2 was contained with respect to 100 wt% of the composition.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 0.5 mol of ultrapure water (water) of Example 2 was added with respect to 1 mol of the PZT precursor.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 3 mol of ultrapure water (water) of Example 2 was added with respect to 1 mol of the PZT precursor.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that, as the PZT precursor, lead acetate trihydrate (Pb source), lanthanum acetate 1.5 hydrate (La source), titanium tetraisopropoxide (Ti source), and zirconium tetrabutoxide (Zr source) were weighed, respectively, such that a metal atomic ratio (Pb/La/Zr/Ti) was 115/3/52/48.
  • This PZT-based ferroelectric thin film was doped with La as a metal dopant.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that, as the PZT precursor, lead acetate trihydrate (Pb source), manganese 2-ethylhexanoate (Mn source), titanium tetraisopropoxide (Ti source), and zirconium tetrabutoxide (Zr source) were weighed, respectively, such that a metal atomic ratio (Pb/Mn/Zr/Ti) was 115/1/52/48.
  • This PZT-based ferroelectric thin film was doped with Mn as a metal dopant.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that, as the PZT precursor, lead acetate trihydrate (Pb source), niobium pentaethoxide (Nb source), titanium tetraisopropoxide (Ti source), and zirconium tetrabutoxide (Zr source) were weighed, respectively, such that a metal atomic ratio (Pb/Nb/Zr/Ti) was 115/0.2/52/48.
  • This PZT-based ferroelectric thin film was doped with Nb as a metal dopant.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 1-heptanol (linear monoalcohol having 7 carbon chains) was used instead of 1-octanol (linear monoalcohol having 8 carbon chains) of Example 2.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 1-dodecanol (linear monoalcohol having 12 carbon chains) was used instead of 1-octanol (linear monoalcohol having 8 carbon chains) of Example 2.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 1-decanol (linear monoalcohol having 10 carbon chains) was used instead of 1-octanol (linear monoalcohol having 8 carbon chains) of Example 2.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 10, except that the thickness of the ferroelectric thin film of Example 10 was changed from 460 nm to 380 nm.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 10, except that the thickness of the ferroelectric thin film of Example 10 was changed from 460 nm to 400 nm.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 10, except that the thickness of the ferroelectric thin film of Example 10 was changed from 460 nm to 420 nm.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 1-hexanol (linear monoalcohol having 6 carbon chains) was used instead of 1-octanol (linear monoalcohol having 8 carbon chains) of Example 2.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that the concentration of the PZT precursor in 100 wt% of the composition of Example 2 was changed to 17 wt% in terms of oxides.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that the concentration of the PZT precursor in 100 wt% of the composition of Example 2 was changed to 35 wt% in terms of oxides.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 1, except that 1-octanol (linear monoalcohol having 8 carton chains) of Example 1 was not added.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 1, except that 0.3 wt% of 1-octanol (linear monoalcohol having 8 carton chains) of Example 1 was contained with respect to 100 wt% of the composition.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 1, except that 12 wt% of 1-octanol (linear monoalcohol having 8 carton chains) of Example 1 was contained with respect to 100 wt% of the composition.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 1-pentanol (linear monoalcohol having 5 carbon chains) was used instead of 1-octanol (linear monoalcohol having 8 carbon chains) of Example 2.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 1-tridecanol (linear monoalcohol having 13 carbon chains) was used instead of 1-octanol (linear monoalcohol having 8 carbon chains) of Example 2.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that the concentration of the PZT precursor in 100 mass of the composition of Example 2 was changed to 16 wt% in terms of oxides.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that the concentration of the PZT precursor in 100 mass of the composition of Example 2 was changed to 36 wt% in terms of oxides.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 15 wt% of propylene glycol (diol) of Example 2 was contained with respect to 100 wt% of the composition.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 57 wt% of propylene glycol (diol) of Example 2 was contained with respect to 100 wt% of the composition.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 0.4 mol of ultrapure water (water) of Example 2 was added with respect to 1 mol of the PZT precursor.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 2, except that 3.1 mol of ultrapure water (water) of Example 2 was added with respect to 1 mol of the PZT precursor.
  • the film thickness, whether or not cracking occurred, the leakage current density, and the refractive index were investigated. Specifically, the film thickness was measured by measuring the thickness (total thickness) of a cross-section of the ferroelectric thin film using a spectroscopic ellipsometer (M-2000D1, manufactured by J.A. Woollam Co. Inc.). In addition, regarding whether or not cracking occurred, an SEM image of a film surface and a film cross-section was obtained with the scanning electron microscope used in the film thickness measurement, and whether or not cracking occurred was determined by observing this SEM image.
  • M-2000D1 spectroscopic ellipsometer
  • Tables 1 and 2 clearly show the following results. In Comparative Examples 1, 4, 7, 8, 11, and 12, cracking occurred in the films; whereas in Comparative Examples 2, 3, 5, 6, 9, 10, and 13 and Examples 1 to 21, cracking did not occur. In addition, in Comparative Examples 1 and 2, the refractive indices of the films were low at 2.35 to 2.41; whereas, in Examples 1 to 21, the refractive indices of the films were high at 2.45 to 2.52. The reason is presumed to be as follows. In Examples 1 to 21 in which 0.6 wt% to 10 wt% of the linear monoalcohol was added with respect to 100 wt% of the composition, organic materials were effectively removed from the inside of the film.
  • a PZT-based ferroelectric thin film was formed with the same method as that of Example 1, except that the amount of 1-octanol (linear monoalcohol having 8 carton chains) of Example 1 added with respect to 100 wt% of the composition was changed to 6.3 wt%.
  • the present invention can be used for manufacturing a constituent material (electrode) of a composite electronic component such as a thin film capacitor, a capacitor, an IPD, a DRAM memory capacitor, a laminated capacitor, a gate insulator of a transistor, a non-volatile memory, a pyroelectric infrared detecting element, a piezoelectric element, an electro-optic element, an actuator, a resonator, an ultrasonic motor, or an LC noise filter element.
  • a constituent material (electrode) of a composite electronic component such as a thin film capacitor, a capacitor, an IPD, a DRAM memory capacitor, a laminated capacitor, a gate insulator of a transistor, a non-volatile memory, a pyroelectric infrared detecting element, a piezoelectric element, an electro-optic element, an actuator, a resonator, an ultrasonic motor, or an LC noise filter element.

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EP14155517.7A 2013-03-25 2014-02-18 Composition de formation de film mince ferroélectrique à base de PTZ, son procédé de préparation, et procédé de formation dudit film mince l'utilisant Active EP2784137B1 (fr)

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JP6550791B2 (ja) * 2015-02-26 2019-07-31 三菱マテリアル株式会社 ＰＮｂＺＴ膜形成用組成物の製造方法及びＰＮｂＺＴ圧電体膜の形成方法
WO2017038676A1 (fr) * 2015-08-28 2017-03-09 国立大学法人北陸先端科学技術大学院大学 Procédé de formation d'un film ferroélectrique de pzt
JP6950404B2 (ja) * 2017-03-15 2021-10-13 三菱マテリアル株式会社 圧電体膜形成用液組成物の製造方法及びこの液組成物を用いて圧電体膜を形成する方法

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EP2784137B1 (fr) 2016-09-21
JP2014187266A (ja) 2014-10-02
JP6075145B2 (ja) 2017-02-08
KR20140116794A (ko) 2014-10-06
US20140287251A1 (en) 2014-09-25
CN104072132A (zh) 2014-10-01
IN2014DE00469A (fr) 2015-06-19
CN104072132B (zh) 2017-06-23
TW201500580A (zh) 2015-01-01
KR102019522B1 (ko) 2019-09-06

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