JP6550791B2 - PNbZT膜形成用組成物の製造方法及びPNbZT圧電体膜の形成方法 - Google Patents
PNbZT膜形成用組成物の製造方法及びPNbZT圧電体膜の形成方法 Download PDFInfo
- Publication number
- JP6550791B2 JP6550791B2 JP2015036414A JP2015036414A JP6550791B2 JP 6550791 B2 JP6550791 B2 JP 6550791B2 JP 2015036414 A JP2015036414 A JP 2015036414A JP 2015036414 A JP2015036414 A JP 2015036414A JP 6550791 B2 JP6550791 B2 JP 6550791B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- compound
- pnbzt
- piezoelectric
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000203 mixture Substances 0.000 title claims description 61
- 238000000034 method Methods 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 64
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 claims description 40
- 239000000243 solution Substances 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 32
- 230000015572 biosynthetic process Effects 0.000 claims description 31
- 238000003786 synthesis reaction Methods 0.000 claims description 19
- 238000000576 coating method Methods 0.000 claims description 18
- 150000002009 diols Chemical class 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 16
- 238000010992 reflux Methods 0.000 claims description 14
- 239000011259 mixed solution Substances 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 6
- 238000007865 diluting Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 152
- 239000010936 titanium Substances 0.000 description 39
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 38
- 239000010955 niobium Substances 0.000 description 37
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 33
- 229910052751 metal Inorganic materials 0.000 description 24
- 239000002184 metal Substances 0.000 description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 23
- 229910052799 carbon Inorganic materials 0.000 description 23
- 239000002904 solvent Substances 0.000 description 18
- 239000002243 precursor Substances 0.000 description 16
- 238000010304 firing Methods 0.000 description 15
- 125000004429 atom Chemical group 0.000 description 13
- 239000007788 liquid Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 9
- 239000013078 crystal Substances 0.000 description 9
- 229910052719 titanium Inorganic materials 0.000 description 9
- 239000012298 atmosphere Substances 0.000 description 8
- 229910052726 zirconium Inorganic materials 0.000 description 8
- 239000002131 composite material Substances 0.000 description 7
- 239000012299 nitrogen atmosphere Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 238000004528 spin coating Methods 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000001354 calcination Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000010287 polarization Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 150000004703 alkoxides Chemical class 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000000224 chemical solution deposition Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- KQNKJJBFUFKYFX-UHFFFAOYSA-N acetic acid;trihydrate Chemical compound O.O.O.CC(O)=O KQNKJJBFUFKYFX-UHFFFAOYSA-N 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 229940046892 lead acetate Drugs 0.000 description 4
- ZTILUDNICMILKJ-UHFFFAOYSA-N niobium(v) ethoxide Chemical compound CCO[Nb](OCC)(OCC)(OCC)OCC ZTILUDNICMILKJ-UHFFFAOYSA-N 0.000 description 4
- -1 organic acid salts Chemical class 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- FIPWRIJSWJWJAI-UHFFFAOYSA-N Butyl carbitol 6-propylpiperonyl ether Chemical compound C1=C(CCC)C(COCCOCCOCCCC)=CC2=C1OCO2 FIPWRIJSWJWJAI-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 3
- 229910052745 lead Inorganic materials 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 229960005235 piperonyl butoxide Drugs 0.000 description 3
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 3
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 3
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 3
- OGHBATFHNDZKSO-UHFFFAOYSA-N propan-2-olate Chemical compound CC(C)[O-] OGHBATFHNDZKSO-UHFFFAOYSA-N 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- CYWDDBNPXTUVNN-UHFFFAOYSA-I 2-ethylhexanoate;niobium(5+) Chemical compound [Nb+5].CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O CYWDDBNPXTUVNN-UHFFFAOYSA-I 0.000 description 1
- SNOJPWLNAMAYSX-UHFFFAOYSA-N 2-methylpropan-1-ol;titanium Chemical compound [Ti].CC(C)CO.CC(C)CO.CC(C)CO.CC(C)CO SNOJPWLNAMAYSX-UHFFFAOYSA-N 0.000 description 1
- GRWPYGBKJYICOO-UHFFFAOYSA-N 2-methylpropan-2-olate;titanium(4+) Chemical compound [Ti+4].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-] GRWPYGBKJYICOO-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 241000877463 Lanio Species 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical class C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- YHWCPXVTRSHPNY-UHFFFAOYSA-N butan-1-olate;titanium(4+) Chemical compound [Ti+4].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-] YHWCPXVTRSHPNY-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000007942 carboxylates Chemical class 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 150000001924 cycloalkanes Chemical class 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 108010025899 gelatin film Proteins 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 125000004213 tert-butoxy group Chemical group [H]C([H])([H])C(O*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000005292 vacuum distillation Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
先ず、Pb化合物として酢酸鉛三水和物(Pb源)、Nb化合物としてニオブペンタエトキシド(Nb源)、Zr化合物としてテトラジルコニウムブトキシド(Zr源)、Ti化合物としてテトラチタニウムイソプロポキシド(Ti源)をそれぞれ用意し、これらを所望の金属原子比を与える割合になるように秤量した。
表1に示すように、各PZT系前駆体の割合を調整することにより、組成物中の金属原子比を調整したこと、組成物を調製する際のプロピレングリコール(PG)の量又はアセチルアセトン(Ac)の量を調整したこと以外は、実施例1と同様にして、PNbZT膜を形成した。なお、最終的な膜厚についても、実施例1と同様、全て1800nmとした。
以下の手順により(100)面に優先配向するPZT膜を具備した基板を作製し、この基板の最上層であるPZT膜上に、PNbZT圧電体膜を形成したこと以外は、実施例2と同様にして、PNbZT膜を形成した。なお、最終的な膜厚についても、実施例2と同様、1800nmとした。
表1に示すように、各PZT系前駆体の割合を調整することにより、組成物中の金属原子比を調整したこと、組成物を調製する際のプロピレングリコール(PG)の量又はアセチルアセトン(Ac)の量を調整したこと以外は、実施例1と同様にして、PNbZT膜を形成した。なお、最終的な膜厚についても、実施例1と同様、全て1800nmとした。
酢酸鉛三水和物(Pb源)とメタノールを反応容器内に投入して混合し、窒素雰囲気中、100℃の温度で1時間還流した。得られた組成物にZr化合物としてテトラジルコニウムブトキシド(Zr源)、Ti化合物としてテトラチタニウムイソプロポキシド(Ti源)、Nb化合物としてニオブペンタエトキシド(Nb源)、安定化剤として酢酸を添加し、窒素雰囲気中120℃で1時間還流した。なお、得られた液をメタノールで希釈し、酸化物濃度で15質量%のPNbZT膜形成用組成物を得た。
表1に示すように、各PZT系前駆体の割合を調整することにより、組成物中の金属原子比を調整したこと、組成物を調製する際のプロピレングリコール(PG)の量を調整したこと以外は、実施例1と同様にして、PNbZT膜を形成した。なお、最終的な膜厚についても、実施例1と同様、1800nmとした。
実施例1〜12及び比較例1〜4で形成したPNbZT圧電体膜又はそれらの形成に用いた組成物について、以下の(i)〜(vi)の評価を行った。これらの結果を、以下の表2に示す。
Claims (3)
- ジオールとNb化合物を還流して第1合成液を調製する工程と、
アセチルアセトンとTi化合物とZr化合物を還流して第2合成液を調製する工程と、
前記第1合成液と前記第2合成液を混合して混合液を調製する工程と、
前記混合液にPb化合物を混合して還流して第3合成液を調製する工程と、
前記第3合成液を得た後、脱溶媒、希釈する工程とを含み、
前記ジオールの割合を、前記Nb化合物、Ti化合物及びZr化合物の合計モル量1に対して7〜11となる割合とするPNbZT膜形成用組成物の製造方法。 - 前記アセチルアセトンの割合を、前記Nb化合物、Ti化合物及びZr化合物の合計モル量1に対して1.5〜3.0となる割合とする請求項1記載のPNbZT膜形成用組成物の製造方法。
- 請求項1記載の方法により製造されたPNbZT膜形成用組成物を基板に塗布して塗膜を形成する工程と、
前記塗膜を仮焼成した後、前記仮焼成時の温度よりも高い温度で焼成する工程とを含むPNbZT圧電体膜の形成方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015036414A JP6550791B2 (ja) | 2015-02-26 | 2015-02-26 | PNbZT膜形成用組成物の製造方法及びPNbZT圧電体膜の形成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015036414A JP6550791B2 (ja) | 2015-02-26 | 2015-02-26 | PNbZT膜形成用組成物の製造方法及びPNbZT圧電体膜の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016157894A JP2016157894A (ja) | 2016-09-01 |
JP6550791B2 true JP6550791B2 (ja) | 2019-07-31 |
Family
ID=56826432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015036414A Active JP6550791B2 (ja) | 2015-02-26 | 2015-02-26 | PNbZT膜形成用組成物の製造方法及びPNbZT圧電体膜の形成方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6550791B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102137238B1 (ko) * | 2018-08-31 | 2020-07-23 | 울산대학교 산학협력단 | 화학적 용해법에 기반한 황이온 치환 기술 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10249900A1 (de) * | 2002-10-25 | 2004-05-06 | Epcos Ag | Piezoelektrisches Bauelement |
JP4217906B2 (ja) * | 2004-09-17 | 2009-02-04 | セイコーエプソン株式会社 | 前駆体溶液の製造方法 |
JP5399166B2 (ja) * | 2009-08-14 | 2014-01-29 | 富士フイルム株式会社 | 柱状構造膜とその成膜方法、圧電素子、液体吐出装置、及び圧電型超音波振動子 |
JP6075145B2 (ja) * | 2013-03-25 | 2017-02-08 | 三菱マテリアル株式会社 | Pzt系強誘電体薄膜形成用組成物の製造方法並びに該組成物を用いたpzt系強誘電体薄膜の形成方法 |
JP5943870B2 (ja) * | 2013-04-01 | 2016-07-05 | 富士フイルム株式会社 | 圧電体膜 |
-
2015
- 2015-02-26 JP JP2015036414A patent/JP6550791B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2016157894A (ja) | 2016-09-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10112872B2 (en) | Composition for forming Mn and Nb co-doped PZT-based piezoelectric film | |
US10411183B2 (en) | Composition for forming Mn-doped PZT-based piezoelectric film and Mn-doped PZT-based piezoelectric film | |
KR102007543B1 (ko) | PNbZT 강유전체 박막의 제조 방법 | |
EP3125316B1 (en) | Mn AND Nb CO-DOPED PZT-BASED PIEZOELECTRIC FILM | |
EP3261138B1 (en) | Piezoelectric ptzt film | |
JP6550791B2 (ja) | PNbZT膜形成用組成物の製造方法及びPNbZT圧電体膜の形成方法 | |
JP7155730B2 (ja) | 圧電体膜形成用液組成物及びこの液組成物を用いて圧電体膜を形成する方法 | |
JP6579012B2 (ja) | Pzt圧電体膜及びその形成方法並びにpzt圧電体膜形成用組成物 | |
WO2019181656A1 (ja) | 圧電体膜形成用液組成物及びこの液組成物を用いて圧電体膜を形成する方法 | |
KR102385773B1 (ko) | Ce 도프의 PZT 계 압전체막 | |
US10672973B2 (en) | Composition for forming Ce-doped PZT-based piezoelectric film |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170929 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20180720 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180724 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180809 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190129 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190219 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190604 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190617 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6550791 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |