EP2772651B1 - Pompe - Google Patents

Pompe Download PDF

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Publication number
EP2772651B1
EP2772651B1 EP14154409.8A EP14154409A EP2772651B1 EP 2772651 B1 EP2772651 B1 EP 2772651B1 EP 14154409 A EP14154409 A EP 14154409A EP 2772651 B1 EP2772651 B1 EP 2772651B1
Authority
EP
European Patent Office
Prior art keywords
coolant
pump
side channel
channel
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14154409.8A
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German (de)
English (en)
Other versions
EP2772651A2 (fr
EP2772651A3 (fr
Inventor
Dr. Aleksandr Shirinov
Wolfgang Söhngen
Torsten Gogol
Sebastian Oberbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2772651A2 publication Critical patent/EP2772651A2/fr
Publication of EP2772651A3 publication Critical patent/EP2772651A3/fr
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Publication of EP2772651B1 publication Critical patent/EP2772651B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5813—Cooling the control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine

Definitions

  • the invention relates to a pump having at least one side channel pumping stage, which comprises a side channel delimited by at least one stator element.
  • the invention relates generally to the field of pumps, and more particularly to the field of vacuum pumps.
  • the invention is not limited to vacuum pumps. All designs generally referring to pumps also apply to vacuum pumps.
  • a vacuum pump with a side channel pumping stage typically additionally includes a motor for rotationally driving a rotor element of the side channel pumping stage, and drive electronics for driving the motor.
  • a disadvantage of known vacuum pumps of the aforementioned type is that their actual performance data generally remain well behind the theoretically expected performance data and the performance of the vacuum pumps deteriorates over time.
  • the vacuum pumps require relatively frequent maintenance and, overall, have a limited service life, which reduces the economics of known vacuum pumps.
  • the maintenance and failure susceptibility of the vacuum pumps can be attributed to the high temperatures occurring during the operation of the vacuum pumps, which due to the associated thermal load in the medium and long term lead to an impairment of the functioning of the temperature-sensitive pump components.
  • the object of the invention is therefore to provide a pump, in particular a vacuum pump, which has a high performance and at the same time a reduced maintenance and failure susceptibility, which can be operated permanently and reliably without restriction of their functionality and which has a long service life.
  • the pump includes at least one side channel pumping stage having a side channel defined by at least one stator element.
  • the pump further comprises a coolant circuit for cooling the pump with a coolant, wherein the coolant circuit has at least one coolant channel for the side channel pumping stage which is delimited at least in regions by the stator element.
  • the thermal energy caused by the pumping mechanism of the side channel pumping stage is effectively dissipated, so that excessive heating and thermal stress of the pump caused thereby and deteriorating the performance expected life of the pump is avoided.
  • a pump is provided whose performance at least approximately corresponds to the theoretically expected performance and which achieves high reliability in operation and a long service life.
  • the pump comprises a plurality of side channel pumping stages, each of which comprises a side channel defined by at least one stator element.
  • the side channel pumping stages can be connected to one another in series and / or in parallel with gas.
  • a Powerful pump may in principle comprise one or two or more than two interconnected side channel pumping stages.
  • the coolant circuit comprises in each case at least one coolant channel for each side channel pumping stage, the coolant channels each being delimited by the stator element which delimits the side channel of the respective side channel pumping stage. This ensures effective cooling of the stator elements of all side channel pump stages.
  • the coolant circuit is designed for cooling at least one further component of the pump.
  • the further component may be a motor, which is used in particular for the rotational driving of a rotor element of the side channel pumping stage, or to a drive electronics, which is designed in particular for driving the preferably designed as an electric motor motor.
  • the drive electronics can also be used to evaluate signals that are supplied by sensors of the pump, for example, from a temperature sensor explained below.
  • the further component may be a high vacuum pumping stage such as a Holweck pumping stage, a turbomolecular pumping stage, a Gaedepumphand, a Siegbahnpumpprocess or Wiengewindepumpesti, which may be provided in addition to the side channel pumping stage and their performance can be improved by the cooling also.
  • a high vacuum pumping stage such as a Holweck pumping stage, a turbomolecular pumping stage, a Gaedepumpcut, a Siegbahnpumpprocess or Heilgewindepumpesti, which may be provided in addition to the side channel pumping stage and their performance can be improved by the cooling also.
  • the further component may also be a housing of the pump.
  • the further component may also include a bearing plate of the pump.
  • a bearing plate of the pump can be arranged for example in the region of a rolling bearing of the pump, with which a rotor shaft of the pump, on which the rotor element of the side channel pumping stage is arranged, is rotatably mounted on the pump housing.
  • the bearing plate can be designed to fix an outer ring of the rolling bearing in the direction of the axis of rotation so as to be displaceable on the housing of the vacuum pump.
  • the bearing plate can be screwed in particular firmly with the stator of the sokanalpumplay. In this embodiment results a strong thermal coupling of the bearing plate with the stator, so that by cooling the bearing plate, the cooling of the Accordingkanalpumptreatment supported and thus the cooling can be improved overall. It can also be cooled by the coolant circuit two bearing plates of the pump, for example, the different rolling bearings of the pump are assigned.
  • the coolant circuit comprises a further coolant channel for the further component.
  • a further coolant channel direct cooling of the other component can be effected.
  • the respective coolant channel can be limited to at least partially by the respective component.
  • at least partially limited is understood in the present disclosure in principle that the coolant channel is limited over at least part of its preferably closed flow cross-section through the respective component.
  • the respective coolant channel can also be delimited over its entire flow cross-section by the respective component.
  • the coolant channel for the drive electronics is delimited at least in regions by a particularly heat-conducting and / or metallic plate or cooling plate on which the drive electronics are fastened by a preferably thermally conductive connection.
  • the further coolant channel may be connected to the coolant channel for the side channel pumping stage in series or in parallel with coolant.
  • the coolant flow and the cooling effect caused thereby can be specifically adapted to the requirements of the side channel pumping stage and the respective further component or components.
  • the pump components to be cooled can be arranged along the various coolant channels in such a way that overall a cooling effect corresponding to the respective requirements is achieved.
  • a coolant channel may be provided which is at least partially bounded by the bearing plate and which is preferably connected coolant-conducting with a coolant channel for the side channel pumping stage.
  • a coolant channel for the side channel pumping stage which extends over substantially the entire length of Side channels of the pumping stage extends and is located in close proximity to the side channel and at the same time accessible via the bearing plate from the outside and thus can be integrated in a structurally simple manner in the coolant circuit.
  • both the motor and the drive electronics are each cooled by a coolant channel which is limited at least partially by the motor or a cooling plate for the drive electronics, wherein the channel for the motor and the channel for the drive electronics are preferably connected in series with each other coolant ,
  • a coolant-conducting series connection is provided between a first coolant channel for the side channel pumping stage and for the high-vacuum pumping stage and a second coolant channel for the drive electronics and for the motor.
  • the second coolant channel preferably comprises a coolant channel, which is delimited at least in regions by a cooling plate for the drive electronics, and a coolant channel following it in the coolant flow direction, which is delimited at least partially by the engine.
  • the first coolant channel preferably follows in the coolant flow direction to the second channel and is at least partially limited by the side channel pumping stage.
  • the high vacuum pumping stage can either have its own coolant channel and delimit it at least in regions, or it can be cooled indirectly via the coolant channel for the side channel pumping stage in the manner described below.
  • a modification of the above embodiment provides that the coolant channel for the engine is arranged in the flow direction of the coolant in front of the coolant channel for the drive electronics.
  • a further embodiment provides that a coolant channel for the motor and for the drive electronics on the one hand and a coolant channel for the side channel pumping stage and for the high vacuum pumping stage on the other hand are connected in parallel with each other.
  • the further component in particular the high vacuum pumping stage, can also be cooled indirectly by being thermally conductively connected to the at least one stator element of the side channel pumping stage or another, third pump component, which in turn is directly cooled by the coolant circuit, ie which at least partially surrounds a coolant channel of the coolant circuit limited, or which is also cooled indirectly by the refrigerant circuit.
  • the flow cross sections of the two channels and thus their hydraulic conductance are preferably adapted so that there is a desired distribution of the coolant to the two channels.
  • At least one, in particular adjustable, orifice is provided in the coolant circuit, which limits a flow cross section for the coolant.
  • the aperture can be arranged in particular in one of at least two parallel-connected coolant channels. The hydraulic conductivity of the respective channel can then be flexibly adapted to the respective conditions.
  • a further embodiment provides that at least one temperature sensor is provided for measuring the temperature of the side channel pumping stage.
  • This makes it possible to monitor the temperature of the sokanalpumpprocess during operation and, for example, the operation of the sokanalpumpprocess and / or the coolant circuit depending on the measured temperature of the vacuum pump to control so that the side channel pump is always operated in a favorable temperature range.
  • the at least one temperature sensor is preferably arranged between the coolant channel and the side channel of the side channel pumping stage and / or in the vicinity of a gas outlet of the side channel pumping stage.
  • the temperature sensor can also be arranged on a bearing holder or on a bearing plate of a rotary bearing of the pump and can measure the temperature of the bearing holder or the bearing plate, wherein the bearing holder and / or the bearing plate can be cooled by the coolant circuit.
  • the coolant channel extends over at least approximately the entire length of the side channel. This ensures a particularly effective removal of the heat generated in the side channel, since the heat is dissipated directly everywhere.
  • the coolant channel may be delimited at least approximately along its entire length by the at least one stator element at least in regions.
  • the coolant channel may extend over at least 60%, preferably at least 75% and most preferably at least 90% of the angular range defined with respect to a rotational axis of the side channel pumping stage which is covered by the side channel and which may include a full 360 ° turn.
  • the side channel and / or the coolant channel in this case preferably extend at least in regions in a circle around the axis of rotation.
  • a particularly effective cooling of the side channel pumping stage is achieved if the coolant channel, relative to the axis of rotation of the side channel pumping stage, is spaced from the side channel in the radial direction at least over part of its length.
  • the coolant channel is arranged over at least approximately its entire length in the immediate vicinity of the side channel.
  • the effectiveness of the cooling of the side channel pumping stage is further increased.
  • the coolant channel has a shortest distance from the side channel over its length, which is at most 50%, preferably at most 25% and particularly preferably at most 15% of the maximum distance of the side channel from the axis of rotation.
  • a particularly simple construction of the pump results when the side channel and / or the coolant channel is delimited by at least two stator elements over at least part of its length, which preferably abut one another and are connected to one another, in particular by screwing.
  • the stator can then be provided a groove which corresponds to the side channel, and / or a groove which corresponds to the coolant channel, and which together with another groove or a flat surface of the other stator the boundary for the side channel and for the Coolant channel forms.
  • the two stator elements can lie substantially flat against each other, whereby a connection sealing the coolant channel between the two stator elements can be created.
  • a stator element may in each case be configured substantially disk-shaped, wherein the disk plane is preferably oriented substantially perpendicular to the rotational axis of the side channel pumping stage and wherein the surface of the disk bordering the respective side or coolant channel is preferably formed by a flat side of the disk and the two disks especially abut each other on their flat sides and are connected to each other.
  • a particularly elastic sealing element between the at least two stator elements may be provided, on which the two stator elements can bear sealingly.
  • the sealing element may, for example, be formed as an O-ring, which preferably sealingly connects a closed annular surface of one stator element with a closed annular surface of the other stator element, around the coolant channel and the side channel located on different sides of the annular surfaces may be arranged to seal against each other.
  • the O-ring may be disposed between the coolant passage and the side passage in the radial direction related to the rotational axis. There may also be at least one further O-ring which seals the coolant channel and / or the side channel with respect to the region outside the stator elements delimiting the two channels.
  • the coolant inlet of the coolant channel is arranged in the vicinity of a gas outlet of the side channel pumping stage and / or the coolant outlet of the coolant channel is arranged in the vicinity of a gas inlet of the side channel pumping stage.
  • the coolant inlet and / or the coolant outlet can also be arranged at a location other than that specified above.
  • the direction in which the coolant in the coolant channel in the operation of the pump around the axis of rotation of the side channel pumping stage around can flow opposite to the direction in which the gas flows through the side channel of the associated side channel pumping stage. This achieves a cooling effect which effectively compensates for the gradient of heat generation along the side channel caused by the increased heat generation in the region of the gas outlet and the lower heat generation in the region of the gas inlet. In principle, however, the coolant and the gas can also flow in the same direction around the axis of rotation of the side channel pumping stage.
  • the side channels of different side channel pumping stages can be arranged consecutively in the radial direction and / or in the axial direction relative to the axis of rotation of the at least one side channel pumping stage.
  • a side channel may be delimited by at least two, in particular disc-shaped, stator elements.
  • a stator element may also define a plurality of different side channels and thus constitute a common stator element for more than one side channel pumping stage.
  • a stator element may also define a plurality of different coolant channels each associated with one of a plurality of side channels defined by the respective stator element.
  • At least one disk-shaped stator element on its two opposite flat sides each have a groove bounding a side channel and / or the stator element may each have on both sides a groove delimiting a coolant channel for a side channel pumping stage.
  • the two side channels and / or coolant channels bounded by the stator element can be connected to one another in a gas-conducting or coolant-conducting manner by a corresponding connecting channel formed in the stator element.
  • At least two coolant channels of different side channel pumping stages are connected to each other with coolant.
  • the Coolant channels can in this case be connected in series so that they are flowed through in series by the coolant.
  • the coolant channels can also be connected to one another in parallel and through which the coolant flows in parallel.
  • the flow in the two coolant channels can be independently regulated, for example by appropriate adjustment of the flow cross-section and / or the arrangement of a diaphragm in a respective coolant channel, so that the cooling of the individual side channel pumping stages can be flexibly adapted to the thermal load For example, to adapt the cooling to different load cases, in particular to the final pressure to be generated or the resulting gas load.
  • At least two coolant channels of different, in particular in the axial or radial direction immediately consecutive, sokanalpumpmeasuren extend from their respective coolant inlet in opposite directions about an axis of rotation of the sokanalpump processn around to their respective coolant outlet.
  • a structurally particularly simple arrangement is achieved, since the different coolant channels or the stator elements bounding them can be constructed substantially identically and arranged congruently to each other.
  • the coolant channels may each have a profile oriented around the rotational axis of the side channel pumping stage and cover each approximately the entire angular range related to the rotational axis of the side channel pumping stage, wherein a relatively small angular range between the coolant inlet and the coolant outlet can not be covered by the channel and thus remain free.
  • a relatively small angular range between the coolant inlet and the coolant outlet can not be covered by the channel and thus remain free.
  • the coolant channels may overlap at least partially. The overlapping angle ranges can then be used for other components of the pump or the coolant circuit.
  • a return passage of the coolant circuit may be provided, which passes through a plurality of stator elements which define the side channels of the side channel pumping stages.
  • the return passage for the coolant may be disposed in the above-described overlapping angle range remaining free between the inlets and the outlets of the various side channel pumping stages.
  • a coolant circuit is understood to mean both a closed circuit for the coolant and a section for the coolant between a coolant inlet and a coolant outlet, which can be completed by connecting the inlet and the outlet to one another in a closed circuit.
  • the coolant circuit may comprise, especially in the case of a closed coolant circuit, a coolant pump with which the coolant can be driven in the circuit, and / or a cooling unit or a heat exchanger with which the coolant can be cooled.
  • the coolant pump and / or the heat exchanger may be formed as part of the pump or externally connectable to a corresponding coolant inlet and coolant outlet of the pump.
  • the coolant circuit is coupled heat-exchanging via at least one heat-conducting element with a further coolant circuit.
  • the cooling of the coolant circuit which comprises the limited by the stator of the Sokanalpumpprocess coolant channel and which is also referred to as a primary circuit, takes place through the further coolant circuit, which is also referred to as a secondary circuit, via the heat-conducting element.
  • the further coolant circuit may be connected, for example, via a coolant inlet and a coolant outlet of the pump to an external coolant pump and / or an external coolant aggregate or heat exchanger.
  • the heat exchanging element may in particular be formed by a plate on which the drive electronics are arranged and which exchanges the heat between the two coolant circuits and for this purpose preferably at least partially delimits a coolant channel of both circuits.
  • This cooling plate can have a relatively large surface and thus ensure effective heat exchange.
  • a liquid-gas heat exchanger for example a water-air heat exchanger, be provided, which for cooling a liquid coolant in the primary circuit or a liquid coolant in an existing secondary circuit heat exchange between the liquid coolant and a outside of the primary circuit or Secondary circulation and in particular outside of the pump existing gas, eg the ambient air causes.
  • the above embodiment has the advantage that the primary circuit as a closed, formed as part of the pump circuit, for example, with a corresponding coolant pump, can be configured without the same time a coolant unit or an excessively large heat exchanger must be integrated into the pump.
  • a corrosion-resistant coolant can be used, which is particularly well suited for the direct cooling of the affected components, without e.g. due to an external connection of the coolant circuit there is the risk of leakage losses or the accidental use of an unsuitable coolant.
  • the secondary circuit can be operated with water as the coolant, which can be supplied from outside the pump, so that coolant losses in the connection area of this circuit are unproblematic.
  • the at least one stator element is made of a material which is a metal material which can be produced by casting or cast and / or an aluminum or an aluminum alloy, at least regionally and in particular in the region of a surface defining the coolant channel.
  • a bearing plate or a coolant channel of the coolant circuit defining surface of the bearing plate may be formed of such a material.
  • the coolant of the coolant circuit for the side channel pumping stage which may be formed by a primary circuit as described above, is preferably liquid.
  • the coolant is preferably a corrosion-resistant coolant over the material of the stator element, which may be one of the aforementioned materials.
  • the coolant may contain or consist of glycol or a glycol mixture, an oil, in particular a polychlorinated biphenyl (PCB), a liquid sodium such as NaK-78 or an ethanol.
  • the coolant may also contain or consist of water.
  • a secondary circuit as described above it preferably also contains a liquid coolant which in particular contains or consists of water.
  • the secondary circuit may in principle also be a gaseous coolant, such as e.g. Contain air.
  • the pump may include one or more high vacuum pump stages, with a high vacuum pump stage e.g. may be formed by a Holweckpumpcut, a turbomolecular pumping stage, a Gaedepumpprocess, a Siegbahnpumpprocess or a Wiengewindepumpprocess.
  • the one or more high-vacuum pumping stages are preferably arranged upstream of the side-channel pumping stage and upstream of the latter.
  • Another object of the invention is a pump with at least one side channel pumping stage, which comprises a limited by at least one stator side channel, with a motor, with a drive electronics for the engine and with a coolant circuit for cooling the vacuum pump with a coolant, wherein the coolant circuit at least a first Coolant channel for the side channel pumping stage and at least a second coolant channel for the engine and / or for the drive electronics comprises.
  • the drive electronics can be arranged in addition to the control of the motor for the evaluation of signals from sensors of the vacuum pump such. a temperature sensor as described above.
  • the first coolant channel and the second coolant channel may be connected in a coolant-conducting manner in series or in parallel with one another.
  • a coherent coolant circuit for the mentioned components can be achieved, which can be realized with little effort, wherein the cooling effect exerted on the respective components can be specifically adapted to the respective requirements by the corresponding serial or parallel coolant-conducting connection.
  • Fig. 1 shows a vacuum pump 10 according to an embodiment of the invention in a schematic representation.
  • the vacuum pump 10 includes a side channel pumping stage 12 having at least one stator element 14, an electric motor 22 for rotatably driving a rotor element of the side channel pumping stage 12, a cooling plate having drive electronics 20 for the motor 22 and a high vacuum pumping stage 24 thereon.
  • the pump 10 further includes a coolant circuit 25 which includes a coolant inlet 44 accessible from outside the pump 10 and a coolant outlet 46 of the vacuum pump 10 accessible from outside the pump 10, wherein inlet 44 and outlet 46 communicate with each other via coolant channels 18, 26 of the coolant circuit 25 are connected.
  • the arrowheads in Fig. 1 indicate the direction of coolant flow from the inlet 44 to the outlet 46.
  • the coolant channel 18 serves for cooling the side channel pumping stage 12 and is delimited at least in regions by the stator element 14 of the side channel pumping stage 12.
  • the high vacuum pumping stage 24 can be cooled indirectly via the side channel pumping stage 12, to which it is connected in a heat-conducting manner.
  • the cooling of the high-vacuum pumping stage 24 can in principle also take place via a bearing plate of the vacuum pump and / or via the housing the vacuum pump.
  • the coolant channel 26 serves to cool the motor 22 and the cooling plate with the drive electronics 20 and has two longitudinally connected coolant sections connected in series, of which at least partially by the electric motor 22 and the other at least partially limited by the cooling plate 20.
  • the coolant channel 18 and the coolant channel 26 are in each case brought together in the region of the inlet 44 and the outlet 46 and are thus connected to one another in parallel coolant-conducting manner.
  • Fig. 2 shows a vacuum pump 10 according to another embodiment of the invention in a schematic representation.
  • vacuum pump 10 corresponds to the in Fig. 1 shown vacuum pump 10, wherein in the in Fig. 2
  • the outlet of the coolant channel 26 for the motor 22 and the cooling plate with the drive electronics 20 is connected in a coolant-carrying manner to the inlet of the coolant channel 18 for the side channel pumping stage 12, so that the channels 26, 18 are connected in series.
  • Fig. 3 shows a vacuum pump 10 according to another embodiment of the invention in a schematic representation.
  • vacuum pump 10 substantially corresponds to the in Fig. 2 shown vacuum pump 10, wherein in the in Fig. 3 shown embodiment of the coolant circuit 25 is not disposed between a coolant inlet and a coolant outlet of the pump 10. Instead, the coolant circuit 25 is formed as a closed circuit and includes a coolant pump 54, with which the coolant in the in Fig. 3 characterized by the arrowheads sense of rotation can be driven.
  • the pump 10 also includes a secondary coolant circuit 42 that communicates from outside the vacuum pump 10 via a corresponding one Coolant inlet 44 and coolant outlet 46 is accessible.
  • the secondary coolant circuit 42 comprises a coolant channel 58 at least partially delimited by the cooling plate 20 for the drive electronics.
  • the coolant circuits 25 and 42 are thus connected to one another via the cooling plate 20 so that the cooling plate 20 serves as a heat exchanger between the two coolant circuits 25, 42 ,
  • a coolant source is connected to the inlet 44 and the outlet 46
  • the coolant in the coolant circuit 25 is cooled by the cooling plate 20 cooled by the coolant circuit 42, so that the coolant circuit 25 can perform its cooling function.
  • a liquid-gas heat exchanger for example a water-air heat exchanger, for exchanging heat between the liquid coolant and one outside the circuits 25 for cooling a liquid coolant present in one of the coolant circuits 25, 42.
  • 42 existing gas causes or the cooling plate 20 may be formed as such a heat exchanger.
  • Fig. 4 shows a stator 14 of a side channel pumping stage of a vacuum pump according to an embodiment of the invention in plan view.
  • the stator element 14 is designed disk-shaped, wherein in Fig. 4 the view is shown on a flat side of the disk-shaped stator element 14.
  • the stator element 14 comprises a groove extending in a circle around an axis of rotation 38 of the side channel pumping stage oriented perpendicular to the disk plane, formed in the flat side and projecting in the axial direction into the flat side, the walling of which bounds a side channel 16.
  • the one longitudinal end of the groove delimits a gas inlet 34 of the side channel 16 and the other longitudinal end defines a gas outlet 36 of the side channel 16.
  • the stator element 14 further comprises a likewise formed in the flat side and in the axial direction in the flat side re-engaging groove, the conversion of which delimits a coolant channel 18 for cooling the stator element 14.
  • the coolant channel 18 runs parallel to the side channel 16 and, accordingly, also runs essentially in a circle around the rotation axis 38.
  • the groove and thus the coolant channel 18 are at a small distance radially outwardly from the side channel 16 spaced.
  • the groove and the coolant passage 18 delimited by its transformation extend over approximately the entire angular range of 360 °, which relates to the axis of rotation 38.
  • the one end of the groove defines an inlet 30 of the coolant channel 16 for the coolant and the other end of the groove defines an outlet 32 of the coolant channel 16 for the coolant.
  • the coolant inlet 30 is located near the gas outlet 36 and the coolant outlet 32 is located near the gas inlet 34.
  • the coolant in the coolant channel 18 on the one hand and the gas in the side channel 16 on the other hand thus flow in different directions or in a different direction of rotation about the axis of rotation 38 from their respective inlet to their respective outlet.
  • the coolant in the coolant channel 18 could also flow in the same direction, ie in the same direction of rotation as the gas flow in the side channel 16, about the axis of rotation 38, ie the coolant can generally flow against the gas flow or with the gas flow.
  • the direction of rotation of the coolant flow in the coolant channels can alternate from the coolant channel to the coolant channel or from the side channel pumping stage to the side channel pumping stage.
  • a return channel 40 is provided which extends in the axial direction through the stator element 14 and serves to return the coolant.
  • stator 14 with another, in Fig. 4 Stator disc not shown connected in such a way that the stator discs abut each other with their flat sides.
  • the other stator is so complementary to the in Fig. 4 formed stator, that the two stator discs together form a coolant channel 18 with a closed cross-section and a side channel 16, which apart from a circumferential opening, via which the rotor element of the side channel pumping stage engages in the side channel 16, has a closed cross-section.
  • the two stator elements 14 are connected to each other via screw holes 52.
  • a temperature sensor 28 is disposed between the side channel 16 and the coolant channel 18 and serves to measure the temperature of the side channel pumping stage.
  • the temperature sensor 28 may in principle be arranged at any point between the side channel 16 and the coolant channel 18 and in particular in the vicinity of the gas outlet 36, since there due to the high gas pressure, the highest temperatures present and can be measured directly.
  • the rotor element may be arranged on a rotor shaft, which is provided by the in the region of the axis of rotation 38 Opening 60 of the stator 14 may extend therethrough.
  • the rotor element preferably has a ring of blades which extend into the side channel 16.
  • the side channel 16 has in this case in the region between the gas inlet 34 and the gas outlet 36 preferably a relation to the rotor blades enlarged cross-section and the gas is in the side channel 16 preferably around the circular main orientation of the side channel 16 spirally driven in the direction of arrow 48 and thereby compacted.
  • the side channel 16 preferably has a cross-section which is not or at most slightly enlarged in relation to the rotor blades, which is shown in FIG Fig. 4 is apparent from the non-recessed portion 50 of the stator 14, so that the conveyed gas stripped in the region of the outlet 36 and is conveyed through the outlet 36 from the side channel 16.
  • the pump with the in Fig. 4 shown stator element 14 includes a plurality of in the direction of the rotation axis 38 successively arranged side channel pumping stages which are formed as described above.
  • the coolant channel 18 may be connected in series with the coolant channels of the further side channel pumping stages, ie, the coolant inlet 30 is coolant-conducting with the coolant outlet of a preceding one, eg in the axial direction in front of the plane of FIG Fig. 4 arranged, pumping stage is connected and the coolant outlet 32deffenausend 32 with the coolant inlet a subsequent, for example, in the axial direction behind the plane of Fig. 4 arranged, pumping stage is connected.
  • the connections can be formed by coolant-conducting connection channels extending in the axial direction through the respective stator disk 14.
  • the side channel 16 may be connected in series with the side channels of the further side channel pumping stages by gas inleting the inlet 34 to the outlet of the previous pumping stage and the outlet 36 being gas-conductively connected to the inlet of the subsequent pumping stage.
  • a gas-conducting connecting channel extending in the axial direction through a respective stator disk 14 may be provided.
  • all in the axial direction one behind the other arranged stator discs 14 of the vacuum pump each have a as in Fig. 4 shown coolant return passage 40, wherein the coolant return passages 40 are arranged in the axial direction substantially congruent one above the other and together form an axially oriented through all side channel pumping stages extending therethrough coolant return passage.
  • Fig. 5 shows a schematic representation of the coolant flow direction through a plurality of side channel pumping stages in a vacuum pump according to an embodiment of the invention in the direction of the axis of rotation 38 seen.
  • the vacuum pump may be as described above with respect to Fig. 4 be described described.
  • Fig. 5 shows a plurality of interconnected coolant channels 18, each associated with a side channel pumping stage and as described above Fig. 4 are formed.
  • the coolant channels 18 are in Fig. 5 shown spaced apart in the radial direction and can be assigned accordingly in the radial direction successive tokanalpump noten.
  • the coolant channels 18 can also according to the above description to Fig. 4 in axial direction follow one another and be assigned in the axial direction of successive side channel pumping stages.
  • the coolant passes through a supply channel 56, which may for example lead through a bearing plate or limited by this, in the first coolant channel 18.
  • This coolant channel 18 flows through the coolant in a first on the axis of rotation 38 related rotational direction and then passes through a connecting channel 62nd in the next coolant channel 18, which flows through the coolant in the opposite direction of rotation.
  • the coolant flows through all of the coolant channels 18, wherein the flow direction of the coolant from channel 18 to channel 18 alternates until the coolant finally flows from the last coolant channel 18 into the coolant return channel 40.
  • the coolant return passage 40 extends in the angle range ⁇ not covered by the coolant passages 18 through all the stator disks back to a coolant outlet of the vacuum pump.
  • the coolant channel 40 can also pass through a bearing plate of the vacuum pump or be limited by the end plate.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (11)

  1. Pompe, en particulier pompe à vide (10), comportant au moins un étage de pompe à canal latéral (12) qui comprend un canal latéral (16) délimité par au moins un élément stator (14), et comportant un circuit de fluide réfrigérant (25) pour refroidir la pompe (10) par un fluide réfrigérant, dans laquelle
    le circuit de fluide réfrigérant (25) présente au moins un canal à fluide réfrigérant (18) pour l'étage de pompe à canal latéral (12), qui est délimité au moins localement par l'élément stator (14),
    la pompe (10) comprend plusieurs étages de pompe à canal latéral (12) qui comprennent chacun un canal latéral (16) délimité par au moins un élément stator (14),
    caractérisée en ce que
    le circuit de fluide réfrigérant (25) comprend au moins un canal à fluide réfrigérant respectif (18) pour chacun des étapes de pompe à canal latéral (12), et les canaux à fluide réfrigérant (18) sont délimités chacun par l'élément stator (14) qui délimite le canal latéral (16) de l'étage de pompe à canal latéral respectif (12).
  2. Pompe selon la revendication 1,
    caractérisée en ce que
    le circuit de fluide réfrigérant (25) est réalisé pour refroidir au moins un autre composant (20, 22, 24) de la pompe (10), qui est choisi en particulier parmi le groupe comprenant une électronique d'entraînement (20), un moteur (22), un étage de pompe, un étage de pompe à vide poussé (24), un carter et un flasque de la pompe (10).
  3. Pompe selon la revendication 1 ou 2,
    caractérisée en ce que
    le circuit de fluide réfrigérant (25) comprend un autre canal à fluide réfrigérant (26) pour l'autre composant (20, 22, 24), qui est relié au canal à fluide réfrigérant (18) pour l'étage de pompe à canal latéral (12), et préférence de manière à conduire le fluide réfrigérant en série ou parallèlement.
  4. Pompe selon l'une des revendications précédentes,
    caractérisée en ce que
    dans le circuit de fluide réfrigérant (25) est prévu au moins un diaphragme en particulier variable qui délimite une section transversale d'écoulement pour le fluide réfrigérant.
  5. Pompe selon l'une des revendications précédentes,
    caractérisée en ce que
    il est prévu un capteur de température (28) pour mesurer la température de l'étage de pompe à canal latéral (12) qui est agencé de préférence entre le canal à fluide réfrigérant (18) et le canal latéral (16) et/ou à proximité d'une sortie de gaz (36) de l'étage de pompe à canal latéral (12).
  6. Pompe selon l'une des revendications précédentes,
    caractérisée en ce que
    le canal à fluide réfrigérant (18) s'étend au moins approximativement sur toute la longueur du canal latéral (12).
  7. Pompe selon l'une des revendications précédentes,
    caractérisée en ce que
    l'entrée de fluide réfrigérant (30) du canal à fluide réfrigérant est agencée à proximité d'une sortie de gaz (36) de l'étage de pompe à canal latéral (12) et/ou la sortie de fluide réfrigérant (32) du canal à fluide réfrigérant est agencée à proximité d'une entrée de gaz (34) de l'étage de pompe à canal latéral (12).
  8. Pompe selon l'une des revendications précédentes,
    caractérisée en ce que
    au moins deux canaux à fluide réfrigérant (18) de différents étages de pompe à canal latéral (12) sont reliés l'un à l'autre de manière à conduire le fluide réfrigérant en série ou parallèlement.
  9. Pompe selon l'une des revendications précédentes,
    caractérisée en ce que
    au moins deux canaux à fluide réfrigérant (18) de différents étages de pompe à canal latéral (12) qui se suivent directement en particulier en direction axiale ou radiale s'étendent depuis leur entrée de fluide réfrigérant respective (30) dans des directions opposées autour d'un axe de rotation (38) des étapes de pompe à canal latéral (12) jusqu'à leur sortie de fluide réfrigérant respective (32).
  10. Pompe selon l'une des revendications précédentes,
    caractérisée en ce que
    un canal de retour (40) du circuit de fluide réfrigérant (25) s'étend à travers plusieurs éléments stators (14) qui délimitent les canaux latéraux (16) des étages de pompe à canal latéral (12).
  11. Pompe selon l'une des revendications précédentes,
    caractérisée en ce que
    le circuit de fluide réfrigérant (25) est couplé avec échange thermique à un autre circuit de fluide réfrigérant (42) par au moins un élément conducteur de chaleur.
EP14154409.8A 2013-03-01 2014-02-10 Pompe Active EP2772651B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013203577.2A DE102013203577A1 (de) 2013-03-01 2013-03-01 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2772651A2 EP2772651A2 (fr) 2014-09-03
EP2772651A3 EP2772651A3 (fr) 2014-12-24
EP2772651B1 true EP2772651B1 (fr) 2018-04-11

Family

ID=50070411

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14154409.8A Active EP2772651B1 (fr) 2013-03-01 2014-02-10 Pompe

Country Status (3)

Country Link
US (1) US20140248166A1 (fr)
EP (1) EP2772651B1 (fr)
DE (1) DE102013203577A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015213527A1 (de) * 2015-07-17 2017-01-19 Leybold Gmbh Pumpensystem
DE102015015863A1 (de) * 2015-12-09 2017-06-14 Fte Automotive Gmbh Elektromotorisch angetriebene Flüssigkeitspumpe
GB2569648A (en) * 2017-12-22 2019-06-26 Edwards Ltd Magnetic shield for a vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0689756B2 (ja) * 1986-05-02 1994-11-14 株式会社日立製作所 ドライ真空ポンプ
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
US5983777A (en) * 1997-12-18 1999-11-16 Cassaday; Michael M. Method and apparatus for diaphragm pumping with adjustable flow
DE19819267B4 (de) * 1998-04-30 2006-11-30 Gebr. Becker Gmbh & Co Seitenkanalverdichter
DE10048695A1 (de) * 2000-09-30 2002-04-11 Leybold Vakuum Gmbh Pumpe als Seitenkanalpumpe
US20080066859A1 (en) * 2006-08-30 2008-03-20 Michiaki Kobayashi Plasma processing apparatus capable of adjusting pressure within processing chamber
JP5782378B2 (ja) * 2009-08-21 2015-09-24 エドワーズ株式会社 真空ポンプ
US8840380B2 (en) * 2011-01-21 2014-09-23 Toyota Motor Engineering & Manufacturing North America, Inc. Temperature control ring for vehicle air pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
US20140248166A1 (en) 2014-09-04
EP2772651A2 (fr) 2014-09-03
DE102013203577A1 (de) 2014-09-04
EP2772651A3 (fr) 2014-12-24

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