EP2767804A1 - Circuit et système de mesure - Google Patents

Circuit et système de mesure Download PDF

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Publication number
EP2767804A1
EP2767804A1 EP20130005477 EP13005477A EP2767804A1 EP 2767804 A1 EP2767804 A1 EP 2767804A1 EP 20130005477 EP20130005477 EP 20130005477 EP 13005477 A EP13005477 A EP 13005477A EP 2767804 A1 EP2767804 A1 EP 2767804A1
Authority
EP
European Patent Office
Prior art keywords
magnetic field
field sensor
periodicity
signal
encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20130005477
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German (de)
English (en)
Other versions
EP2767804B1 (fr
Inventor
Joachim Ritter
Jörg Franke
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TDK Micronas GmbH
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TDK Micronas GmbH
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Filing date
Publication date
Application filed by TDK Micronas GmbH filed Critical TDK Micronas GmbH
Priority to EP15000557.7A priority Critical patent/EP2899510A1/fr
Publication of EP2767804A1 publication Critical patent/EP2767804A1/fr
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Publication of EP2767804B1 publication Critical patent/EP2767804B1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G01R33/072—Constructional adaptation of the sensor to specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/091—Constructional adaptation of the sensor to specific applications

Definitions

  • the present invention relates to a circuit and a measuring system.
  • an angle sensor and a method for determining an angle between a sensor arrangement and a magnetic field are known.
  • the angle transmitter has a magnetic field generating, with respect to a rotational axis in different rotational positions relative to the sensor arrangement adjustable magnet.
  • the sensor arrangement has a first magnetic field sensor for detecting a first magnetic field component oriented transverse to the rotational axis and a second magnetic field sensor for detecting a second magnetic field component, which is arranged transversely to a plane spanned by the rotational axis and the first magnetic field component.
  • the sensor arrangement has a third magnetic field sensor for detecting a third magnetic field component oriented in the direction of the axis of rotation.
  • a semiconductor chip and a method for generating pulse edges which are associated synchronously with the movement of a mechanical part, are known.
  • a magnetic field is generated and at least two measurement signals are detected for the magnetic field.
  • the magnetic field is varied in dependence on the movement of the mechanical part such that the measurement signals are modulated out of phase with each other.
  • a first measurement signal is compared with a first reference value.
  • a second measurement signal is compared with a second reference value.
  • the magnitude of the first measurement signal is compared with the magnitude of the second measurement signal.
  • a pulse edge is generated if at least one of these comparisons results in a match or the result of the comparison in question changes its sign.
  • From the EP 1 111 392 A1 is a detection of the rotational speed and angular position of a rotating wheel with adjustable threshold for drift compensation known.
  • the detection of the speed and the Angular position of a wheel by means of a non-contact wheel scanning sensor, which generates a pulse train.
  • the amplitude of the pulses is compared in a comparator with a variable switching threshold.
  • the switching threshold is adjusted so that the amount of the difference between the amplitudes of the pulses and the switching threshold does not exceed a predefinable maximum value.
  • the rotation angle sensor has a rotatable shaft, a magnet coupled to the rotatable shaft, and a magnetosensitive sensor element.
  • the sensor element generates a sinusoidal and a cosinusoidal output signal as a function of the relative angle of rotation between the magnet and the sensor.
  • the rotation angle sensor has an evaluation unit which generates a signal corresponding to the rotation angle from the output signals.
  • the shaft is additionally slidably guided linearly parallel to its axis along a guide track during its rotation about its axis, so that the distance between magnet and sensor changes in accordance with a gradient of the guide track.
  • the evaluation unit determines from output signals of the sensor element a signal from which the distance between the sensor element and the magnet and thus the number of full revolutions of the shaft can be determined. From the sinusoidal and cosinusoidal output signals, a fine signal is detected within one full revolution and this fine signal is added to the value of the full revolution multiplied by 360 °.
  • a measuring system with a magnetic field sensor arrangement and with a rotationally movable encoder and with an evaluation circuit is provided.
  • the magnetic field sensor arrangement has a first magnetic field sensor integrated in a semiconductor chip for measuring a first component of a magnetic field in a first spatial direction and a second magnetic field sensor integrated in the semiconductor chip for measuring a second component of the magnetic field in a second spatial direction.
  • the rotatably movable encoder has a plurality of magnets which generate with each revolution of the transmitter by means of a plurality of pole pairs a rotation angle-dependent first magnetic field change with a first periodicity in the magnetic field sensor arrangement.
  • the evaluation circuit is set up to generate a first signal having the first periodicity from a first measurement signal of the first magnetic field sensor and a second measurement signal from the second magnetic field sensor in accordance with an arctangent function.
  • the rotary encoder is designed to generate a rotation angle-dependent second magnetic field change with a second periodicity in the magnetic field sensor arrangement.
  • a period of the second periodicity corresponds to one revolution of the encoder.
  • the evaluation circuit is set up to generate a second signal having the second periodicity from the first measurement signal of the first magnetic field sensor and the second measurement signal of the second magnetic field sensor according to an absolute value function.
  • the evaluation circuit has a logic configured to determine a rotation angle of the encoder based on the first signal and the second signal.
  • a measuring system with a magnetic field sensor arrangement and with a sensor movable along a path and with an evaluation circuit is provided.
  • the magnetic field sensor arrangement has a first magnetic field sensor integrated in a semiconductor chip for measuring a first component of a magnetic field in a first spatial direction and a second magnetic field sensor integrated in the semiconductor chip for measuring a second component of the magnetic field in a second spatial direction.
  • the encoder movable along the track has a plurality of magnets which generate a path-dependent first magnetic field change with a first periodicity in the magnetic field sensor arrangement with a movement of the encoder along the track by means of a plurality of pole pairs.
  • the evaluation circuit is set up to generate a first signal having the first periodicity from a first measurement signal of the first magnetic field sensor and a second measurement signal from the second magnetic field sensor in accordance with an arctangent function.
  • the encoder is configured to generate a path-dependent second magnetic field change with a second periodicity in the magnetic field sensor arrangement.
  • the second periodicity is greater than the first periodicity.
  • the evaluation circuit is set up to generate a second signal having the second periodicity from the first measurement signal of the first magnetic field sensor and the second measurement signal of the second magnetic field sensor according to an absolute value function.
  • the evaluation circuit has logic configured to determine a position of the encoder based on the first signal and the second signal.
  • a measuring system with a magnetic field sensor arrangement and with a rotationally movable encoder and with an evaluation circuit is provided.
  • the magnetic field sensor arrangement has a first magnetic field sensor integrated in a semiconductor chip for measuring a first component of a magnetic field in a first spatial direction and a second magnetic field sensor integrated in the semiconductor chip for measuring a second component of the magnetic field in a second spatial direction and a magnet.
  • the rotationally movable encoder has a plurality of teeth.
  • a material of the teeth affects the magnetic field of the magnet.
  • the teeth of the transmitter are designed to generate a rotation angle-dependent first magnetic field change with a first periodicity in the magnetic field sensor arrangement with each rotation of the transmitter.
  • the evaluation circuit is set up to generate a first signal having the first periodicity from a first measurement signal of the first magnetic field sensor and a second measurement signal from the second magnetic field sensor in accordance with an arctangent function.
  • the transmitter is designed to generate a rotation angle-dependent second magnetic field change with a second periodicity in the magnetic field sensor arrangement.
  • a period of the second periodicity corresponds to one revolution of the encoder.
  • the evaluation circuit is set up to generate a second signal having the second periodicity from the first measurement signal of the first magnetic field sensor and the second measurement signal of the second magnetic field sensor according to an absolute value function.
  • the evaluation circuit has a logic configured to determine a rotation angle of the encoder based on the first signal and the second signal.
  • a measuring system with a magnetic field sensor arrangement and with a sensor movable along a path and with an evaluation circuit is provided.
  • the magnetic field sensor arrangement has a first magnetic field sensor integrated in a semiconductor chip for measuring a first component of a magnetic field in a first spatial direction and a second magnetic field sensor integrated in the semiconductor chip for measuring a second component of the magnetic field in a second spatial direction and a magnet.
  • the encoder movable along the track has a plurality of teeth.
  • a material of the teeth affects the magnetic field of the magnet.
  • the teeth of the transmitter are designed to generate a path-dependent first change of the magnetic field with a first periodicity in the magnetic field sensor arrangement when the sensor moves along the path.
  • the evaluation circuit is set up to generate a first signal having the first periodicity from a first measurement signal of the first magnetic field sensor and a second measurement signal from the second magnetic field sensor in accordance with an arctangent function.
  • the encoder is configured to generate a path-dependent second change of the magnetic field with a second periodicity in the magnetic field sensor arrangement.
  • the second periodicity is greater than the first periodicity.
  • the evaluation circuit is set up to generate a second signal having the second periodicity from the first measurement signal of the first magnetic field sensor and the second measurement signal of the second magnetic field sensor according to an absolute value function.
  • the evaluation circuit has logic configured to determine a position of the encoder based on the first signal and the second signal.
  • D is the first signal
  • A is the first measurement signal
  • B is the second measurement signal
  • C is the second signal
  • A is the first measurement signal
  • B is the second measurement signal.
  • another arctangent function or another magnitude function may be provided.
  • a period of the second periodicity corresponds to a distance between end points of the path.
  • the second signal changes proportionally to the distance traveled between the two endpoints.
  • the transmitter is designed to generate the second magnetic field change by means of a change in an air gap width between the transmitter and the magnetic field sensor arrangement.
  • at least one magnet of the transmitter has a different magnetization from the magnet.
  • the logic is set up to compare a result of the magnitude function with a number of threshold values. If the result of the magnitude function is compared, for example, with a single threshold value, a zero position of the encoder can be determined.
  • a larger number of thresholds as used for example in a multi-bit analog-to-digital converter, allows a position range determination of the encoder.
  • the position range determination preferably has a coarser resolution than the first signal.
  • a measuring system is shown schematically.
  • the measuring system has a magnetic field sensor arrangement 10.
  • a magnetic field vector B is determined.
  • the magnetic field vector B is in Fig. 2 in a coordinate system with the spatial directions x, y and z shown schematically.
  • the origin of the coordinate system is offset from the center of the magnetic field sensor arrangement 10.
  • the magnetic field sensor arrangement 10 has a first magnetic field sensor 11 integrated in a semiconductor chip for measuring a first component B x of the magnetic field vector B of the magnetic field in a first magnetic field sensor Spatial direction x.
  • the magnetic field sensor arrangement 10 has a second magnetic field sensor 12 integrated in the semiconductor chip for measuring a second component B z of the magnetic field vector B of the magnetic field in a second spatial direction z.
  • the magnetic field sensor arrangement 10 has a third magnetic field sensor 13 integrated in the semiconductor chip for measuring a third component B y of the magnetic field vector B of the magnetic field in a third spatial direction y.
  • the measuring system of Fig. 2 has a rotatably movable encoder 31 in the form of a Poirades.
  • the pole wheel 31 has a number of magnets, which with each revolution of the pole wheel 31 by means of a plurality of pole pairs 31-1, 31-2, 31-3, 31-4, 31-5, 31-6, 31-7, 31-8 generate a rotation angle-dependent first magnetic field change with a first periodicity T1 in the magnetic field sensor arrangement 10.
  • the pole wheel 31 as a rotary encoder 31 is formed with eight pole pairs 31-1, 31-2, 31-3, 31-4, 31-5, 31-6, 31-7, 31-8, a rotation angle-dependent second magnetic field change with a second periodicity T2 in the magnetic field sensor arrangement 10 to produce.
  • a period of the second periodicity T2 corresponds to one revolution of the pole wheel 31.
  • the second magnetic field change repeats with each revolution of the pole wheel 31.
  • the second magnetic field change is thus in the embodiment of Fig. 2 a magnetic field amplitude modulation superimposed on the first magnetic field change.
  • the second magnetic field change for example, the length of the magnetic field vector B increases continuously from the first pole pair 31-1 to the last pole pair 31-8 in one direction of rotation.
  • the amplitude modulation for the second magnetic field change has a sawtooth shape.
  • FIG. 10 an evaluation circuit 20 of the measuring system is shown.
  • the evaluation circuit 20 has a first analog-to-digital converter 21 and a second analog-to-digital converter 22.
  • the analog output signals of the magnetic field sensors 11, 12, 13 are switched to the inputs of the analog-to-digital converters 21, 22.
  • magnetic field sensors 11, 12, 13 can be selected.
  • Alternative to the embodiment of Fig. 10 can be provided for each magnetic field sensor 11, 12, 13, an analog-to-digital converter. In this case, the signals would be selected on the digital side and the multiplexers 23 could be omitted.
  • a single, fast analog-to-digital converter could be used, and the analog signals of the magnetic field sensors 11, 12, 13 are cyclically switched in rapid succession to the input of the single analog-to-digital converter by means of a multiplexer.
  • first magnetic field sensor 11 is connected to the first analog-to-digital converter 21 and the second magnetic field sensor 12 to the second analog-to-digital converter 22.
  • the evaluation circuit 20 has a logic 25, wherein in Fig. 10 a plurality of functional blocks 26, 27, 28 of the logic 25 are shown schematically.
  • the functional blocks 26, 27, 28 are realized for example by software or special hardware.
  • the logic 25 is configured by means of the function block 28 to determine a rotation angle ⁇ of the pole wheel 31 based on the first signal D and the second signal C.
  • a course of the signals A, B and C is in Fig. 7 schematically illustrated for another embodiment with three pole pairs.
  • the first measurement signal A is phase-shifted by 90 ° with respect to the second measurement signal B (sine and cosine).
  • the second signal C obtained by the magnitude function has a sawtooth shape.
  • the period of the second periodicity T2 is three times as large as the period of the first periodicity T1.
  • the arctangent function represents the fundamental frequency (pole pair).
  • the magnitude function allows distinguishing between several pole pairs.
  • Fig. 7 is a further embodiment shown schematically by no sawtooth waveform, but an amplitude increase for exactly one pole pair in the manner of a rectangular function according to the signal C 'is generated.
  • the pole pair with the amplitude increase can be evaluated as a zero point, wherein the other rotation angles are determined by counting the pole pairs after the zero point.
  • This embodiment is due to the digital character of the rectangular shape particularly robust against interference, allows a precise rotation angle determination only after passing the zero point.
  • FIGS. 3, 4, 5 and 6 show different measuring systems, which also cause a change in the length of the magnetic field vector B.
  • the magnetic field sensor arrangement 10 performs a relative movement to the encoder 32 along the dashed line out.
  • the encoder 32 in turn has a plurality of pole pairs.
  • the encoder 32 is movable in a straight path.
  • the magnets of the encoder 32 generate with a movement of the encoder 32 along the path by means of the pole pairs a path-dependent first magnetic field change with a first periodicity in the magnetic field sensor assembly 10.
  • the magnets of the encoder 32 are arranged such that, depending on the position of the encoder 32nd a distance between the magnets of the transmitter 32 and the magnetic field sensor assembly 10 is changed to produce the second periodicity. As the distance decreases, the length of the magnetic field vector increases.
  • the transmitter 33 has a plurality of teeth.
  • the teeth influence a magnetic field in a magnetic field sensor arrangement 10.
  • the magnetic field sensor arrangement 10 has a magnet 19 for this purpose.
  • the encoder 33 is movable along a path relative to the magnetic field sensor assembly 10 so that the magnetic field sensor assembly 10 makes a relative movement along the dashed line.
  • the teeth of the transmitter 33 are designed to generate a path-dependent first change of the magnetic field with a first periodicity in the magnetic field sensor arrangement 10 when the transmitter 33 moves along the path.
  • the teeth of the encoder 35 are arranged such that in dependence on the movement of the encoder 33, a distance between the tips of the teeth of the encoder 33 and the magnetic field sensor arrangement 10 is changed to produce a second periodicity. As the distance decreases, the length of the magnetic field vector increases.
  • the encoder 34 is a pole wheel 34.
  • the pole wheel 34 has a plurality of magnets for forming pole pairs.
  • the magnets of the transmitter 34 generate with a rotation of the encoder 34 by means of the pole pairs a path-dependent first magnetic field change with a first periodicity in the magnetic field sensor assembly 10.
  • the magnets of the encoder 34 are arranged such that in dependence on the rotation angle ⁇ of the encoder 34, a distance between the magnet of the transmitter 34 and the magnetic field sensor assembly 10 is changed. there As the distance decreases, the length of the magnetic field vector increases.
  • the encoder 35 is a gear 35 with a plurality of teeth.
  • the teeth influence a magnetic field in a magnetic field sensor arrangement 10.
  • the magnetic field sensor arrangement 10 has a magnet 19 for this purpose.
  • the encoder 35 is rotatory movable.
  • the teeth of the encoder 35 are formed such that in dependence on the rotational angle ⁇ of the encoder 35, a distance between the tips of the teeth of the encoder 35 and the magnetic field sensor assembly 10 is changed to produce the second periodicity. As the distance decreases, the length of the magnetic field vector increases.
  • the magnetic field sensor arrangement 10 can be fixed in place and the transmitter 35 can be moved. It is also possible to arrange the transmitter 35 in a fixed position and to move the magnetic field sensor arrangement 10. It is also possible to move both encoder 35 and the magnetic field sensor arrangement 10.
  • FIG. 8 shows a magnetic field vector B , and its course as a function of a movement of a transmitter of a measuring system.
  • Each mechanical rotation produces a clockwise increasing amount of magnetic field strength which is detected and calculated from a sinusoidal magnetic field by two 90 ° offset magnetic field sensors for a sine measurement signal and a cosine measurement signal.
  • the magnetic amplitude increases in the clockwise direction, so that several pairs of magnetic poles can be distinguished from one another within one revolution and pole pairs over both revolutions.
  • the length of the arrow B corresponds to the magnitude and the direction corresponds to the angle of the magnetic field.
  • Fig. 11 shows an embodiment with three pairs of poles in the form of a diagram.
  • the signals refer to the Fig. 10 , At the top, a sinusoidal signal A generated by the pole pairs is shown. Below the signal D of the output value of the arc tangent function is shown. The magnitude signal C is formed as a falling saw tooth signal. Additionally shows Fig. 11 a signal C "of an absolute value function, wherein the amount changes stepwise in four stages In addition, by means of a comparator, a zero position based on the signal C 'can take place.
  • the invention is not limited to the illustrated embodiments of the FIGS. 2 to 11 limited.
  • the functionality of the measuring system according to Figures 2 and 10 can be used particularly advantageously for an adjustment system or drive system.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
EP13005477.8A 2013-01-14 2013-11-22 Circuit et système de mesure Active EP2767804B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP15000557.7A EP2899510A1 (fr) 2013-01-14 2013-11-22 Circuit et système de mesure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013000431.4A DE102013000431A1 (de) 2013-01-14 2013-01-14 Schaltung und Messsystem

Related Child Applications (2)

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EP15000557.7A Division-Into EP2899510A1 (fr) 2013-01-14 2013-11-22 Circuit et système de mesure
EP15000557.7A Division EP2899510A1 (fr) 2013-01-14 2013-11-22 Circuit et système de mesure

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EP2767804A1 true EP2767804A1 (fr) 2014-08-20
EP2767804B1 EP2767804B1 (fr) 2016-05-11

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DE102013000431A1 (de) 2014-07-17
EP2767804B1 (fr) 2016-05-11
US20140197822A1 (en) 2014-07-17
EP2899510A1 (fr) 2015-07-29
US9279702B2 (en) 2016-03-08

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