EP2733354B1 - Régulation de force de pompe progressive - Google Patents

Régulation de force de pompe progressive Download PDF

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Publication number
EP2733354B1
EP2733354B1 EP13193067.9A EP13193067A EP2733354B1 EP 2733354 B1 EP2733354 B1 EP 2733354B1 EP 13193067 A EP13193067 A EP 13193067A EP 2733354 B1 EP2733354 B1 EP 2733354B1
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EP
European Patent Office
Prior art keywords
pump
central section
membrane element
chamber
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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EP13193067.9A
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German (de)
English (en)
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EP2733354A1 (fr
Inventor
Johan Werner
Joakim Gabrielsson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Mindray Bio Medical Electronics Co Ltd
Original Assignee
Shenzhen Mindray Bio Medical Electronics Co Ltd
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Priority to EP13193067.9A priority Critical patent/EP2733354B1/fr
Publication of EP2733354A1 publication Critical patent/EP2733354A1/fr
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F04B43/0063—Special features particularities of the flexible members bell-shaped flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive

Definitions

  • This invention pertains in general to the field of membrane pumps or diaphragm pumps. More particularly the invention relates to membrane pumps used as sampling pumps in devices for patient monitoring, breath monitoring, anaesthesia monitoring, especially for medical ventilation monitoring and gas analyzers for monitoring gas composition in patient's breathing.
  • the membrane pumps have the advantages of simple, compact and good sealing. Membrane pumps have therefore been widely used in medical instrumentations and biochemical analysis as sampling pumps for fluid analysis.
  • the gas measurement module analyses gases extracted from patient breathing circuits by a membrane pump. This may be done for real time monitoring of gas composition in patient's breathing circuits and to get patient's status.
  • the gas analysis module tends to be smaller with increased reliability and low power exhaust. Hence there are higher requirements for the design of membrane pumps concerning size, life and energy loss.
  • Gas monitoring instruments such as sensors, used to detect gases are precision components sensitive to vibration interference which reduces the measurement accuracy.
  • the sampling pump is a main vibration source in a monitoring module. Thus may introduce noise which could affect the measurement accuracy.
  • the sampling pump is therefore required to provide a more stable sample flow.
  • the normal design of a membrane pump has a flat membrane and a pump chamber which is either spherically concave or cylindrical with a flat bottom.
  • Two examples of there types of pumps are Thomas membrane pump or Xavitech membrane pump.
  • membrane pumps have normally membranes that are fixed to outer edges of the membrane, thus defining a pump area. This design is limiting the elastic behaviours of the membrane, is limiting the stroke length and the pump area is limiting the maximum pump pressure (since the area together with the pump force is defining the maximum pump pressure) and the fatigue life.
  • Other problems are when a flat membrane meets a concave or a flat surface of the pump chamber. This will generate noise and the pump stroke will stop instantly causing mechanical vibrations.
  • US2004/0076526 describes a constant rate discharge pump which comprises a rotary shaft which is rotatable together with a rotary driving source, a piston which is displaceable in an axial direction in a pump chamber of a body by the rotation of the rotary shaft and which has a tapered surface having diameters reduced downwardly on an outer circumference thereof.
  • US2007/0240564 describes a piston which is to be movably supported in a cylinder of a pump to be reciprocally driven is formed by a fluororesin so that it is not impaired by a corrosive liquid.
  • a cylindrical outer peripheral portion of the piston has a thickness of 1 mm or less, and is flexible. When the pump is driven, the cylindrical outer peripheral portion of the piston smoothly rolls without producing deflections or bends in a gap between the outer peripheral face of a piston support member and the inner peripheral face of the cylinder.
  • a new improved design of a membrane pump would be advantageous. Especially a smaller pump with a higher pressure having low vibrations and that runs quieter than known membrane pumps.
  • embodiments of the present disclosure preferably seek to mitigate, alleviate or eliminate one or more deficiencies, disadvantages or issues in the art, such as the above-identified, singly or in any combination by providing a device or method according to the appended patent claims for providing progressive pump force regulation, such as in devices for patient monitoring, breath monitoring, anaesthesia monitoring, especially for medical ventilation monitoring and gas analyzers for monitoring gas composition in patient's breathing.
  • Disclosed herein are device, system and methods for providing the progressive pump force regulation.
  • a membrane element for a pump having a chamber has a first area and comprises a central section with a second area surrounded by a periphery section.
  • the central section is thicker than the periphery section, and the second area of the central section is smaller than an area of an open end of said chamber of which said central section is arranged over.
  • a pump comprising a membrane element and a pump housing having a chamber with bevelled inner walls.
  • the chamber comprises an open end having a third area.
  • the membrane element has a first area, and comprises a central section with a second area which is surrounded by a periphery section, wherein the central section is thicker than the periphery section; further, the second area of the central section is smaller than the third area of the open end of the chamber and the membrane element is arrangable over the pump housing forming a sealed chamber, whereby the central section of the membrane element is arranged over the open end, and the central section is protruding away from the chamber.
  • the central section has a circular shape.
  • the membrane is made of an elastic material, such as rubber and/or is selected from a list including: Chloroprene, EPDM, FKM/FPM, Silicon, TPE or nitrile.
  • the thickness ratio between the central section to the periphery section is between 2 to 15.
  • This protruding brim works as an O-ring to increase the sealing effect.
  • the thicker central section bevelled outer walls with a base larger than a top section, such as a truncated cone.
  • the central section and the chamber both have circular shapes.
  • the bevelled inner walls be straight, or concave, or convex, or have two or more radii, or have a sinoidal shape, or be of shaped as a polynomial of higher order.
  • the membrane element an effective pump area with an area substantially the same as the third area of the open end of the chamber.
  • the pump housing have an enlarged surface surrounding the open end of the chamber with an area with at least the same size as the membrane element.
  • the membrane element clamped between the enlarged surface of the pump housing and a second member of the pump housing.
  • the enlarged surface may comprises a groove to fit said protruding brim of the membrane member.
  • a method for progressive pump force regulation comprising providing a pump according to the discloser herein, and applying a reciprocating stroke motion on the central section of the membrane element.
  • the motion may be restricted by the bevelled inner walls of the chamber at a position where the central section of the membrane element becomes thicker.
  • the membrane pump is to be used as a sampling pump in devices for patient monitoring, breath monitoring, anaesthesia monitoring, especially medical ventilation monitoring and gas analyzers for monitoring gas composition in patient's breathing.
  • the membrane pump is not limited to this application but may be applied to many other systems where a fluid pump is required.
  • Fig. 1 illustrates a membrane pump 100, with an example of a pump housing element 1 and a membrane element 6.
  • the pump housing element has a chamber 21 with an open end having a first area.
  • the membrane element 6 is arrangeable over the open end of the chamber 21 to seal the chamber 21.
  • the chamber 21 has bevelled or chamfered walls 20.
  • the bevelled or chamfered walls 20 may be straight, such as in the shape of a truncated cone, illustrated in Fig 1 .
  • the bevelled or chamfered walls 20 may be convex or concave.
  • the walls 20 have more than one radii.
  • the walls 20 may have a sinoidal shape, a wave shape, a polynomial shape or spline shaped.
  • the chamber 21 is preferably circular but may have any shape such as, a square, rectangular, a polygon or an ellipsoid.
  • the bottom area of the chamber 21 has an area 26 which is smaller than the area 25 of the open end.
  • the membrane element 6 has a second area 27 and a first central section having a third area 28 (see Fig 2 ).
  • the first central section is a central portion of the membrane element.
  • the third area is smaller than the second area 27.
  • the membrane element has preferably a circular shape but may have any shape, such as a square, rectangular, a polygon or an ellipsoid. Additionally, the first central section has preferably a circular shape but may have any shape, such as a square, rectangular, a polygon or an ellipsoid.
  • the shape of the membrane element and first central section does not need to be the same, for example, the membrane element may be a square while the first central section has is circularly shaped.
  • the first central section has the same shape as the open end of the chamber.
  • the membrane element is preferably made of a flexible or elastic material, such as rubber.
  • a flexible or elastic material such as rubber.
  • materials that may be used are Chloroprene, EPDM, FKM/FPM, Silicon, TPE or nitrile. But other materials with similar properties known by the skilled person may be used.
  • the membrane element may include a second central section having a fourth area 24.
  • the second central section has a thickness 23 which is larger than the thickness 22 of the rest of the membrane element.
  • the rest of the membrane may be defined as a periphery section surrounding the second central section.
  • the ratio between the thicknesses 23 of the second central section to the thickness 22 of the rest of the membrane element may be between 2 to 15.
  • the thicker second central section may preferably be shaped to protruding in an opposite direction from the open end of the chamber.
  • the walls of the protruding part are bevelled or chamfered, such as a truncated cone or convex or concave.
  • the protruding part may be shaped as a segment of a circle or a half circle.
  • the thicker second central section of the membrane element may preferably have a smaller area than the opening. Also the thicker second central section of the membrane element may be centrally positioned over the open end of the chamber 21.
  • the thickness of the second central section provides for a stiffer central part of the membrane element 6 at a location where a reciprocating pump stroke motion from an actuator, such as a voice coil, a minimotor, a piston, a cam or any other mechanical device that could be used to expose the membrane element 6 to a force, is applied.
  • an actuator such as a voice coil, a minimotor, a piston, a cam or any other mechanical device that could be used to expose the membrane element 6 to a force.
  • P is the pump pressure
  • F is the force of the stroke
  • A is the effective pump area
  • the shape and the thickness 23 of the thicker section can be varied. The same applies to the design of the inner walls 20 of chamber.
  • the membrane element 6 may have a protruding brim 30.
  • This brim 30 may be positioned at the periphery edge of the membrane element 6.
  • the pump housing 1 may have an enlarged surface surrounding the open end of the chamber 21. This enlarged surface may comprise a groove 31 to fit the protruding brim 30 of the membrane member 6. This may increase the sealing effect in the same fashion as an O-ring.
  • the enlarged surface may have an area at least the same as the area of the membrane element 6.
  • Fig. 2 illustrates further example of a membrane pump 200.
  • the membrane pump 200 has a pump housing member 1 and a membrane element 32.
  • the pump housing member 1 and membrane element 32 may be configured in accordance with the description to Fig. 1 .
  • the pump housing 1 and could have a chamber 21 which either has a spherical or a flat bottom surface.
  • the total area 27 of the membrane element 32 is an elastic membrane area 27 and the part of the membrane element 32 covering the open end of the chamber 21 is the effective pump area 28 (i.e. same as the area 25 of the open end). Additionally, in some examples, when the membrane element 32 has a centrally positioned second central section having a thickness 23 larger than a thickness 22 rest of the membrane element (see Fig 1 ), the effective pump area (i.e. the first central section) 28 is larger than the area 24 of the second central section.
  • a major difference between the design illustrated in Fig. 2 and prior art is that the membrane element 32 is not fixed at the edge of the chamber 21. Instead a portion of the membrane element 32 is slidably clamped between an enlarged surface of the pump housing 1 and a second member 5 of the pump housing 1.
  • the second member 5 of the pump housing 1 may be a membrane fixing plate. In the area between the second member 5 of the pump housing 1 and the enlarged surface of the pump housing 1, the membrane element 32 is free to move radial and to stretch when a force is applied.
  • the membrane element 32 may be fixed at an outer diameter, for example, by a protruding brim 30 fitted into a groove 31 at the enlarged surface of the pump housing 1. In the area between the fixing point and the pump chamber 21 the membrane element 32 is in this configuration still able to freely move radially and stretch.
  • the slidebly clamped portion of the membrane element 32 is located between the membrane fixing point (i.e. an outer edge) and the chamber 21.
  • the same pump volume can be maintained with less stretching which may increase the membrane fatigue life due to less fatigue stress levels.
  • the elastic resistance of the membrane element 32 may consume less of the available pumping force when comparing a pump of a design illustrated in Fig 2 with a prior art pump, both having same pump chamber size. The same effect would also be achieved if a flat membrane element would have been used instead of a membrane element with a thicker mid section as illustrated in the figures.
  • the material of the pump housing 1 and the second pump housing member 5 should have low friction and be stiff. Some examples of materials are polymer, metal or composite materials.
  • a problem with having a flat membrane surface meeting a concave spherical surface or a flat surface is that the meeting between these two will generate noise and the pump stroke movement will stop instantly causing mechanical vibrations.
  • the shape of the pump chamber 21 to have wall being conical or with one or more radii positioned in the area where the membrane element 32 becomes stiffer (thicker) it is possible to decelerate the pump stroke in a progressive way. This will make the stops, when the membrane element is in its end positions silent and also reduces the mechanical vibrations due to the progressive motion deceleration.
  • the edge of the second pump housing member 5 i.e. membrane fixing plate
  • the edge of the second pump housing member 5 i.e. membrane fixing plate
  • the shape of the cavity and membrane fixing plate wall may be designed in many different ways, a straight chamfer, a convex or concave radii etc.
  • a preferred ratio between the area 27 of the elastic membrane element to the effective pump area 28, defined by the previous equation 1, is between 1.5 to 10. The longer a stroke is the larger the difference between the two areas has to be.
  • Fig. 3 illustrates a cross-sectional view of an example of a membrane pump 300.
  • the membrane pump 300 comprises a membrane element 33 (according to any of the herein disclosed configurations) and a pump housing 1, and optional second housing member 5 (e.g. membrane fixing plate) and a pump chamber 21.
  • the pump chamber 21 has bevelled walls to abutting the area where the membrane element 33 becomes thicker. Hence decelerate the pump stroke in a progressive way.
  • the pump further comprises a pump head 12.
  • the pump head 12 is abutting the second central section of the membrane element 33.
  • the pump head may be mechanically attached to the top of second central section, such as inserted into the second central section or a screw could be used to screw secure them together.
  • an adhesive may be used between the top of the second central section and the abutting area of the pump head 12 to affix the two members.
  • Examples of adhesives may be, glue, sticky tape, etc.
  • the actuator exerting a force on the membrane element 33 is a voice coil.
  • the voice coil is used to transmit a reciprocating stroke motions by the pump head 12 to the membrane element 33.
  • the voice coil may be a cylindrical voice coil.
  • the coil 13 is a circular cylinder structure, which is fixed on the pump head 12 and placed in an air gap.
  • the air gap is enclosed by a magnetic cup with conical bottom 7, a conical magnet 8, such as a permanent magnet, and a one side conical pole shoe 9.
  • the coil 13 may be a skeletonless coil, entwined by self-adhesive lining. This design may take advantage of the limit space of the air gap, hence it's possible to design smaller membrane pumps 300.
  • the magnet cup with a conical bottom 7 is positioned as an inverted M-shape.
  • the contact surface between the conical pole shoe 9, the conical magnet 8 and the contact surface between the conical magnet and conical bottom of the magnet cup 7 are all tapered.
  • the tapered surfaces are tapered in the same direction. Such structure increases the side area of the conical pole shoe 9, making the magnetic field in the air gap distribute evenly radially.
  • the conical shape provides better support for the free shaft of the pump head 12 without adding any volume outside of the cylinder volume.
  • the magnetic field is as large as possible when the coil 13 works in the air gap.
  • the working principle of the membrane pump 300 is: the coil 13 positioned in the magnetic field formed by the one side conical pole shoe 9, the conical magnet 8 and the magnet cup with conical bottom 7.
  • the coil 13 will produce an alternating ampere force to drive the pump head 12 in reciprocating linear motion.
  • the pump cycle will produce a cycle of positive and negative pressure in the pump chamber 21.
  • pressure in the sealed room is negative, fluid will move through a pump inlet into the chamber 21.
  • pressure in the sealed room is positive, the pump 300 will move fluid out through an outlet.
  • a small voice coil is adopted to drive membrane to do linear motion so that large transmission mechanisms are eliminated.
  • the voice coil does not affect the working life of the pump 300, because the voice coil does not comprise structures that are easily worn out.
  • the voice coil drives the membrane element 33 directly without the process of transforming motion to another; hence no intermediate energy is consumed. Further, there is no starting torque problem; hence the pump 300 may start almost instantly by applying a small voltage.
  • the voice coil therefore also output a force or a displacement of the pump head 12 to collect a small volume of fluid even at small driving voltage or current.
  • the reciprocating motion of the pump head 12 is controlled by controlling the frequency of the voltage. Because the magnitude of reciprocating motion is dependent to the amplitude of the current, the collected flow size may be easily controlled by adjusting the amplitude of the voltage to the voice coil.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Claims (15)

  1. Pompe comprenant un élément de membrane (6, 32, 33) et un logement de pompe (1) présentant une enceinte (21) avec des parois intérieures obliques (20), ladite enceinte (21) comprend une extrémité ouverte présentant une troisième aire (25) ; ledit élément de membrane (6, 32, 33) présente une première aire (27), et comprend une section centrale avec une deuxième aire (24) laquelle est entourée par une section de périphérie, où ladite section centrale est plus épaisse que ladite section de périphérie ; en outre, ladite deuxième aire (24) de ladite section centrale est plus petite que ladite troisième aire (25) de ladite extrémité ouverte de ladite enceinte (21) et ledit élément de membrane (6, 32, 33) peut être agencé sur ledit logement de pompe (1) en formant une enceinte étanche, grâce à quoi ladite section centrale dudit élément de membrane (6, 32, 33) est agencée sur ladite extrémité ouverte, et où ladite section centrale est façonnée de sorte à faire saillie vers l'opposé de ladite enceinte (21) ; et, en utilisation, un mouvement de course est appliqué sur ladite section centrale dudit élément de membrane (6, 32, 33), où un mouvement dudit mouvement de course se fait dans ladite enceinte, grâce à quoi lesdites parois intérieures oblique (20) de ladite enceinte (21) sont en butée contre ladite section centrale dudit élément de membrane à une position où ladite section centrale devient plus épaisse afin de décélérer la course de pompe d'une manière progressive.
  2. Pompe selon la revendication 1, dans laquelle ladite section centrale présente une forme circulaire.
  3. Pompe selon l'une quelconque des revendications 1 et 2, dans laquelle ladite membrane (6, 32, 33) est constituée d'un matériau élastique.
  4. Pompe selon la revendication 3, dans laquelle ledit matériau est du caoutchouc et/ou est sélectionné parmi une liste incluant : le chloroprène, l'EPDM, le FKM/FPM, le silicium, le TPE ou le nitrile.
  5. Pompe selon l'une quelconque des revendications 1 à 4, dans laquelle le rapport d'épaisseur entre la section centrale et ladite section de périphérie est compris entre 2 et 15.
  6. Pompe selon l'une quelconque des revendications 1 à 5, dans laquelle ledit élément de membrane (6, 32, 33) présente un bord en saillie (30).
  7. Pompe selon l'une quelconque des revendications 1 à 6, dans laquelle ladite section centrale présente des parois extérieures obliques avec une base plus large qu'une section supérieure, comme par exemple un cône tronqué.
  8. Pompe selon l'une quelconque des revendications 1 à 7, dans laquelle ladite section centrale et ladite enceinte (21) présentent toutes deux une forme circulaire.
  9. Pompe selon l'une quelconque des revendications 1 à 8, dans laquelle lesdites parois intérieures obliques (20) sont droites, ou concaves, ou convexes, ou présentent deux rayons ou plus, ou présentent une forme sinusoïdale, ou sont de forme définie par un polynôme d'ordre plus élevé.
  10. Pompe selon l'une quelconque des revendications 1 à 9, dans laquelle ledit élément de membrane (6, 32, 33) présente une aire efficace de pompage avec une aire identique à ladite troisième aire (25) de ladite extrémité ouverte de ladite enceinte (21).
  11. Pompe selon l'une quelconque des revendications 1 à 10, dans laquelle ledit logement de pompe (1) présente une surface élargie entourant ladite extrémité ouverte de ladite enceinte avec une aire ayant au moins la même taille que ledit élément de membrane (6, 32, 33).
  12. Pompe selon la revendication 11, dans laquelle ledit élément de membrane (6, 32, 33) est emboîté avec possibilité de coulissement entre ladite surface élargie dudit logement de pompe (1) et un deuxième élément (5) dudit logement de pompe (1).
  13. Pompe selon l'une quelconque des revendications 11 et 12, dans laquelle ladite surface élargie comprend une rainure (31) destinée à recevoir ledit bord en saillie (30) dudit élément de membrane (6, 32, 33).
  14. Procédé de régulation de force de pompe progressive d'une pompe selon la revendication 1, comprenant :
    le fait d'appliquer un mouvement de course en va-et-vient sur ladite section centrale dudit élément de membrane (6, 32, 33) ; et
    où ledit mouvement de course est limité par lesdites parois intérieures obliques (20) de ladite enceinte (21) à une position où ladite section centrale dudit élément de membrane devient plus épaisse pour décélérer la course de pompe d'une manière progressive fournissant une régulation de force de pompe.
  15. Utilisation d'une pompe selon l'une quelconque des revendications 1 à 13, ou utilisation du procédé selon la revendication 14, aux fins d'une surveillance de patient, d'une surveillance respiratoire, d'une surveillance d'anesthésie.
EP13193067.9A 2012-11-15 2013-11-15 Régulation de force de pompe progressive Active EP2733354B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP13193067.9A EP2733354B1 (fr) 2012-11-15 2013-11-15 Régulation de force de pompe progressive

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261726962P 2012-11-15 2012-11-15
EP12192847 2012-11-15
EP13193067.9A EP2733354B1 (fr) 2012-11-15 2013-11-15 Régulation de force de pompe progressive

Publications (2)

Publication Number Publication Date
EP2733354A1 EP2733354A1 (fr) 2014-05-21
EP2733354B1 true EP2733354B1 (fr) 2020-06-17

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EP (1) EP2733354B1 (fr)
CN (1) CN104813027B (fr)
WO (1) WO2014076234A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108980016B (zh) * 2018-09-11 2024-09-20 厦门金升泵电子科技有限公司 一种气液真空一体式微型隔膜泵

Family Cites Families (7)

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Publication number Priority date Publication date Assignee Title
DE3018687C2 (de) * 1980-05-16 1986-10-30 J. Wagner Gmbh, 7990 Friedrichshafen Membran für Hochdruckförderpumpen, Kompressoren oder dgl.
GB9614866D0 (en) * 1996-07-15 1996-09-04 Charles Austen Pumps Ltd Rotary pump
JP2000190071A (ja) * 1998-12-21 2000-07-11 Taiyo Denki Sangyo Kk ハンダ吸取機
JP3462448B2 (ja) * 2000-05-25 2003-11-05 株式会社タクミナ ダイヤフラムおよび往復動ポンプ
JP2004143960A (ja) * 2002-10-22 2004-05-20 Smc Corp ポンプ装置
DE102004047720A1 (de) * 2003-11-03 2005-04-21 Trelleborg Sealing Solutions U Vorrichtung mit einer Membran sowie ein Verfahren zum Herstellen
JP4547350B2 (ja) * 2006-04-13 2010-09-22 東レエンジニアリング株式会社 ピストンとそのピストンの製造方法及びそのピストンを備えたポンプ

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Title
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WO2014076234A1 (fr) 2014-05-22
CN104813027A (zh) 2015-07-29
CN104813027B (zh) 2017-05-24
EP2733354A1 (fr) 2014-05-21

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