EP2726854A1 - Élément micro-optique, réseau micro-optique et système à capteur optique - Google Patents

Élément micro-optique, réseau micro-optique et système à capteur optique

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Publication number
EP2726854A1
EP2726854A1 EP12731304.7A EP12731304A EP2726854A1 EP 2726854 A1 EP2726854 A1 EP 2726854A1 EP 12731304 A EP12731304 A EP 12731304A EP 2726854 A1 EP2726854 A1 EP 2726854A1
Authority
EP
European Patent Office
Prior art keywords
microresonator
micro
optical
light
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12731304.7A
Other languages
German (de)
English (en)
Inventor
Timo Mappes
Heinz Kalt
Tobias Grossmann
Thorsten Beck
Tobias WIENHOLD
Marko Brammer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Karlsruher Institut fuer Technologie KIT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Karlsruher Institut fuer Technologie KIT filed Critical Karlsruher Institut fuer Technologie KIT
Publication of EP2726854A1 publication Critical patent/EP2726854A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7769—Measurement method of reaction-produced change in sensor
    • G01N2021/7789—Cavity or resonator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides
    • G01N2201/0873—Using optically integrated constructions

Definitions

  • Micro-optical element Micro-optical array and optical
  • the invention relates to a micro-optical element with a
  • Resonator substrate on which at least one ikroresonator is applied which is designed in the form of a rotationally symmetrical body, a micro-optical array and an optical sensor system comprising at least one micro-optical element or at least one micro-optical array.
  • Microresonators in particular in the form of toroids, goblets,
  • Silica exists and on a foot of silicon, which is located on a silicon substrate, is applied.
  • microcavities Appl. Phys. Lett. 96 (2010) 013303, is a process for the preparation of microchalk resonators made of polymethyl methacrylate (PMMA), which is characterized by a high transparency in the visible
  • PMMA polymethyl methacrylate
  • Spectral range is known, with a quality of over 10 6 known.
  • EP 2287592 A1 discloses a micro-optical component for
  • the at least one Waveguide for laser light and at least two microresonators are configured, wherein the at least two microresonators on a first substrate, which is provided with first side walls, and the at least one waveguide on a second substrate, which is provided with second side walls, are applied such that the first side walls and the second side walls are fixedly connected to each other.
  • Resonant frequencies of the cavity produce in the transmitted spectrum in the waveguide characteristic burglaries, which are referred to as Lorentz curves.
  • the excitation In order to resolve fine shifts of these resonances in the attachment of molecules to the structure of the resonator, the excitation must be done with a continuously tunable laser. The excitation frequency must be tracked to the shift of the resonant frequency. Frequently, the entire spectral range examined is continuously scanned with the excitation laser. The spectral analysis of the transmitted light must be done to detect the finest shifts with high resolution, including a spectrometer or synchronous to the excitation laser
  • microresonators with an optical waveguide In order to avoid a complicated adjustment of the glass fiber or the waveguide, microresonators with an optical waveguide, microresonators with an optical waveguide, microresonators with an optical waveguide, microresonators with an optical waveguide, microresonators with an optical waveguide, microresonators with an optical waveguide, microresonators with an optical waveguide, microresonators with an optical waveguide, microresonators with an optical waveguide.
  • Amplifier material in particular with a dye, coated or doped.
  • a doped cavity is pumped with an external laser having a dye-specific wavelength, coherent emission can be excited.
  • the spectrum emitted by the microresonator is characteristic of the geometry of the cavity and the active material used.
  • An addition of molecules from the analyte to the resonator surface shifts not only the resonance frequency but also the emitted spectrum of the active microresonator. This shift serves as a sensor signal.
  • Micro-resonators doped with an active material emit light in the so-called resonator plane isotropically along the whole
  • Fiberglass end or caught with a lens Due to the small aperture of the glass fiber, however, only a small part of the emitted light can thus be collected and detected. Since only a small part of the emitted light is scattered out of the plane due to surface defects of the microresonator, only a small intensity can be absorbed with an objective positioned above the substrate. With the above types of detection, only a low signal-to-noise ratio can be achieved in each case.
  • US 7,387,892 B2 discloses a biosensor based on active rotationally symmetric microresonators made of GaN / AlGaN. The emitted light is read out for this purpose with integrated photodiode rows.
  • a wedge-shaped thin-film filter is applied to the photodiode array, which ensures that only certain wavelengths strike individual diode arrays. Due to a resonance shift upon attachment from the analyte, the intensity distribution on the photodiodes changes. However, light emitted by the microresonator only hits the detector from a small angle segment, so that only a low signal-to-noise ratio is obtained.
  • the microresonator and the detector Due to the large distance between the microresonator and the detector of up to 1 cm can be placed on a substrate only a few ikroresonatoren. Furthermore, a separate detector is provided for each microresonator, which increases the cost of construction and connection technology, since the detectors are manufactured on a separate substrate and only later mounted on the resonator substrate. Since the accuracy of the detection depends on the number of photodiodes of a line, the number of connections for reading the photodiode line increases with accuracy.
  • a microoptical element according to the invention has a resonator substrate, to which at least one, preferably one or two microresonators are applied, each in the form of a
  • Microresonators so they have the advantage that they emit only a single wavelength of coherent radiation with a suitable design.
  • active rotationally symmetric microresonators For molecule detection, it is preferred to use active rotationally symmetric microresonators.
  • Metrics are used in particular rings, discs, toroids, spheres or goblets.
  • Microresonator itself preferably a semiconductor
  • the active material is introduced into the non-active material of the at least one microresonator as a doping, preferably dye molecules, in a
  • photoimageable material preferably a polymer
  • a third embodiment applied as a layer to the at least one microresonator produced from non-active material, preferably Alq3: DCM or dyes applied by means of auxiliary layers.
  • Suitable active materials for doping are rare earths, preferably erbium or ytterbium, nanocrystalline quantum dots, preferably of CdSe / ZnS, or dye molecules, in particular
  • Functionalization provided that allows only the sought molecules to attach to the microresonator. A shift of the resonance frequency by attachment to the microresonator can therefore be triggered only by the sought molecules in the presence of a functionalized surface.
  • the functionalization elements are introduced directly into the polymer matrix, so that subsequent biological functionalization is preferably made possible by click chemistry.
  • the at least one microresonator is therefore surrounded by a light-reflecting mirror, preferably a ring mirror, which surrounds the rotationally symmetrical body of the microresonator.
  • the respective shape of the light-reflecting mirror is preferably designed such that the light emitted by the at least one microresonator can be led away as effectively as possible.
  • the angle profile of the mirror is so on the radiation profile (emission profile) of the
  • Tuned rotationally symmetrical body of the at least one microresonator that the light emitted from the at least one microresonator light is reflected through the mirror perpendicular or nearly perpendicular to the substrate.
  • the inner surface of the mirror is therefore preferably bevelled so that horizontally emitted light is reflected as vertically as possible.
  • the surface preferably has an angle of 30 ° to 70 °, preferably 40 ° to 50 °, in particular 45 ° ⁇ 1 °, to the vertical.
  • the mirror surface has a curvature of a paraboloid or a free-form, so that in addition to deflecting the emission light, focusing also takes place.
  • the shape of the ring is designed so that the emitted light is focused directly on the detector, whereby further focusing optics, for.
  • the shape of the ring is designed so that the emitted light is focused directly on the detector, whereby further focusing optics, for.
  • the inner diameter of the ring is chosen so that it with
  • Radial game are pushed over the at least one microresonator can.
  • the diameter of the ring is 10 ⁇ to 5000 ⁇ ,
  • the height of the ring must be higher than the
  • Resonator structure are selected, preferably heights of 1 ⁇ to 500 ⁇ , in particular 50 ⁇ to 500 ⁇ .
  • the mirror is preferably manufactured by replication techniques or etching methods of silicon, polymers or metallic ones
  • the inner surface of the ring is preferably mirrored for high reflectivity.
  • a thin layer of metal preferably silver or aluminum, which by thermal
  • Vaporizing or sputtering is applied.
  • other highly reflective coatings in particular dielectric
  • this layer is applied only on the tapered surface of the ring structure.
  • the mirror coating is preferably provided with a protective layer, in particular for protection against natural oxidation, which reduces the reflectivity. This is particularly suitable
  • PTFE Polytetrafluoroethylene
  • the ring mirror is upwards preferably with a lid
  • optical elements preferably lenses, in particular fresnel lenses, diffractive elements, in particular lattice structures, as well as fluidic elements, are in the structure of the lid Components, in particular ikrofluidikkanäle and Fluidikeinlässe, integrated or applied.
  • a lens structure is introduced into the cover, which projects the pumping beam onto the at least one
  • Emissions light collects.
  • the lid is used as a waveguide.
  • the emission light reflected by the mirror is coupled into the waveguide via a structure embossed in the cover or applied to the cover, preferably a lattice structure or a prism.
  • the detector is at the edge of the lid
  • filtering of the emission of the active at least one resonator from the pump light is already achieved by the design of the grating structure.
  • the resonator substrate, the ring structure and the cover preferably form a closed volume around the at least one microresonator, which in a particularly preferred embodiment is used as a fluid chamber.
  • the liquid or gaseous analyte can be fed into the fluid chamber and pumped out.
  • the filling channels are preferably constructed so that the
  • Analyte is guided into the channels solely by capillary forces.
  • the fluid is introduced into the fluid chamber through a metering unit or from a pump in the periphery
  • the materials used for the lid and lens should be transparent to the pump and emission light and should have low absorption. Preferred materials are biocompatible
  • Materials such as glass or polymers. Particularly preferred are materials such as glass or polymers. Particularly preferred are materials such as glass or polymers. Particularly preferred are materials such as glass or polymers. Particularly preferred are materials such as glass or polymers. Particularly preferred
  • the ring structure becomes the at least one microresonator
  • the joining is preferably carried out by bonding, in particular by thermal or anodic bonding.
  • an adhesive or an additionally applied adhesion-promoting layer is used.
  • laser beam welding for connecting the parts is possible.
  • lid and the optical and fluidic structures integrated in the lid are adjusted to form the ring structure and connected by the described methods.
  • ring structure and lid are first adjusted to each other and then connected in a common joining step.
  • Microresonators are structured as an array of at least one microresonator per array element and surrounded by a light-reflecting mirror per array element.
  • Each of the array elements of at least one microresonator is in each case surrounded by a light-reflecting mirror.
  • the mirrors are also preferably made as an array with the same number of elements as the microresonator array. Particular preference is given to the simultaneous production of the mirror of
  • the array of ring structures is completed by a common lid. Every area of the
  • Lids that terminate a single ring structure of the array preferably contain one or more of the individual ones
  • optical sensor system comprising at least the following components:
  • a device for the efficient excitation of laser emission from active microresonators preferably a laser diode or a compact solid-state laser, alternatively means for exciting electrically pumpable microresonators; a preferably replaceable micro-optical element or micro-optical array;
  • a detector circuit for detecting a frequency shift of the light emitted by the at least one icroresonator
  • a device for spectral analysis preferably based on an optical filter system, which in a particularly preferred embodiment on a steep-edge, tunable optical filter for converting the frequency shift of
  • the optical sensor system additionally has one or more of the following components:
  • a long-pass filter for separating pump light and emission of the at least one active microresonator
  • a device for temperature stabilization of the at least one microresonator preferably a Peltier element with control, in particular with a temperature controller and a Tempraturmesser;
  • Fluidic elements in particular pumps, valves for supplying and pumping out the analyte and a reference or rinsing solution
  • Micro-resonators preferably pumped with a laser diode, which is significantly smaller and less expensive than commonly used in the laboratory solid-state laser, but otherwise suitable for this purpose as well.
  • means are provided which are suitable for the excitation of electrically pumpable
  • Insert microresonators Is used in the optical sensor system, a micro-optical element or a micro-optical array whose lid no lens for
  • Focusing the pumping light on the active microresonator is preferably an additional one for increasing the pumping efficiency
  • the micro-optic element or array is shifted relative to the detector, filter and pump source.
  • a one- or two-dimensional actuator system is provided in an advantageous embodiment.
  • Temperature and thermally induced expansion therefore produces a temperature-dependent drift of the at least one
  • Microresonator emitted spectrum This shift is superimposed on the frequency shift that results from the attachment of molecules to the resonator surface.
  • a temperature stabilization of the at least one microresonator is advantageous.
  • the micro-optical element or array is temperature-stabilized during the measurement of the back with a Peltier element.
  • the present invention has the following advantages.
  • microresonators used are doped with an active material. They therefore act as a light source, whereby no complex coupling of externally generated laser light in the
  • Microresonator is necessary; an adjustment of a thinned glass fiber or a waveguide with nanometer accuracy for
  • Microresonator is eliminated.
  • the pumping of the microresonator active material by an external laser does not require highly accurate positioning. If the diameter of the pumping beam is chosen so that it is larger than the diameter of the at least one microresonator, a coarse positioning is already sufficient.
  • a fluidic structure is predetermined by the mirror and the cover, which directs the analyte specifically to the at least one microresonator.
  • An additional limitation of the fluidic channel is not required.
  • optical sensor system With the optical sensor system becomes an integrated, portable
  • the present micro-optical element or array can also be used for efficient light collection for applications on the
  • a preferred example is the preparation of single photon sources.
  • the emission behavior of the emitters under optical excitation is modified by the presence of a surrounding microresonator so that the emitters do not emit the photons isotropically, but in the direction of the optical modes.
  • the radiated light is collected very efficiently by the mirror of the micro-optical element or array, so that the photons for further quantum optical
  • Fig. 1 section through a micro-optical element
  • FIG. 3 cross-section through a micro-optical element with two
  • Fig. 4 cross-section through a micro-optical element with lid, which is provided with a lens for point-focusing a
  • Figure 5 shows a cross-section through a micro-optical element with lid, which is provided with a lens for annular focusing of the not shown pumping beam.
  • Fig. 6 shows a cross section through a micro-optical element with a lid, which with a grating coupler for coupling the emission light of the microresonator in the structure of the lid and with a lens for point-focusing of not
  • Fig. 7 cross section through a micro-optical array with two
  • FIG. 8 shows a plan view of a microoptical array with four microresonators and fluidic structure introduced into the cover
  • Fig. 9 functional diagram of an optical sensor system.
  • FIG. 1 shows a three-dimensional section through a microoptical element (10) according to the invention.
  • an active microresonator (12) is applied, which consists of a microcup located on a foot (13)
  • a mirror (20) Disposed about the microresonator (12) is a mirror (20) having an annular mirror structure with a conical profile, the microresonator (12) being located in the center of the conical ring structure.
  • a reflective coating (21) On the conical surface of the ring structure (20) is a reflective coating (21) up which consists of silver and is encapsulated with a protective layer of magnesium fluoride (MgF 2 ) for protection against oxidation.
  • MgF 2 magnesium fluoride
  • microresonators (12) To produce the microresonators (12), an approximately 1 ⁇ m thick layer of PMMA was applied by spin coating to a silicon wafer. The structuring of the microresonators was carried out by electron beam or DUV lithography (Deep Ultra Violet
  • the dye pyrromethene was dissolved directly in the polymer matrix of the rotationally symmetric body (14).
  • organic semiconductors can be applied to the
  • rotationally symmetric body (14) vapor-deposited or dyes with dip-pen nanolithography or via Click
  • Pig. 2 shows the cross section through a microoptical element (10) according to the invention.
  • a microoptical element 10 according to the invention.
  • an optical element 20
  • an optical element 20
  • the resonator substrate (11), the annular mirror (20) and the cover (30) together form one
  • PMMA polymethyl methacrylate
  • COC Cycloolefin copolymer
  • Fluidic inlets (35, 35 ⁇ ) and the fluidic channels (36, 36) were introduced into the lid (30) by hot stamping, injection molding or injection compression molding.
  • Fig. 3 shows a cross section through a further embodiment of the micro-optical element (10). Unlike in Fig. 2 are in the middle of the annular mirror (20) here two micro-resonators (12, 12 N ), the horizontally emitted light from the light-reflecting
  • Resonatorubstrat (11) is reflected.
  • Excitation without lens achieves a more efficient excitation of the emission of the rotationally symmetric body (14) of the microresonator (12), whereby the threshold for the emission of coherent radiation decreases.
  • the structure of the Fresnel lens (31) for spot-focusing the pumping beam (61) was introduced into the lid (30) by hot stamping, injection molding or injection compression molding. Alternatively, it may be applied to the structure of the lid (30) by thermal bonding or gluing.
  • an annular lens (32) preferably an annular Fresnel lens for annularly focusing the pump beam on the rotationally symmetrical body (14) of FIG
  • the not shown in Fig. 5 not shown Pump beam is focused by the annular lens (32) exclusively on a narrow ring along the circumference of the rotationally symmetrical body (14).
  • the optical pumping of the rotationally symmetrical body (14) becomes more efficient and the threshold for the emission of coherent radiation can be further reduced as a result.
  • FIG. 6 shows a further embodiment of the micro-optical element (10) in which, in addition to a Fresnel lens (31) for point-focusing the pump beam onto the structure of the rotationally symmetrical body (14) of the microresonator (12), a grating coupler (34) diffractive structure for coupling the reflected from the annular mirror (20) emission light is introduced into the lid (30).
  • the cover (30) acts as a waveguide and guides the coupled emission light to a laterally mounted
  • Detector By suitable design of the grating period, a selective filtering of the pump light can already be achieved by the structure of the grating coupler (34).
  • the pump light is scattered by the grating coupler and not fully coupled into the structure of the lid.
  • the structure of the grating coupler (34) was also introduced by hot stamping, injection molding or injection compression on the lid (30). Alternatively, it may be applied to the structure of the lid (30) by thermal bonding or gluing.
  • Microresonator (12) designed.
  • the grating coupler is in this variant above the structure of the microresonator (12) in the middle of the annular mirror (20).
  • the cover (30) also acts here as an optical waveguide and guides the pump light (61) coupled laterally into the cover (30) to the grating coupler.
  • Microresonator read (12) and to direct an analyte selectively via the Fluidikeinlass (35) and the fluidic channel (36) in the fluid chamber (37).
  • FIG. 7 shows a cross section through a microoptical array (40) according to the invention.
  • a microoptical array 40
  • two micro-resonators (12.12 ⁇ ) are applied on a resonator substrate (11) .
  • the functionalization of the two microresonators (12, 12 ⁇ ) was performed by dip-pen nanolithography.
  • the same array (40) here were the two microresonators (12, 12 ⁇ )
  • Microresonators (12, 12 ⁇ ) functionalized in different ways, so that it could detect different substances from the analyte.
  • the two micro-resonators (12, 12 ") are each surrounded by a light-reflecting ring mirror (20, 20 ⁇ ), wherein the respective shape of the two light-reflecting annular mirror (20, 20) are designed so that of each of the two
  • a thin reflective layer (21, 21 ") of silver was vapor-deposited on the conical surface of the ring mirrors (20, 20 " ). To protect against oxidation was the
  • Fig. 8 shows the top view of a further embodiment of
  • micro-optical arrays (40).
  • a resonator substrate (11) On a resonator substrate (11) four micro-resonators (12, 12 ', 12'', 12 '' ') are applied, each in the middle of the annular mirror (20, 20 ' , 20 '' , 20''') are located , The analyte was introduced into the fluid chambers (37, 37 ",%) Via fluidic inlets (35, 35 ', ...) integrated in the lid (30) of the array (40) and fluidic channels (36, 36 " ,. .) to the microresonators (12, 12 ⁇ ..).
  • the fluidic structures were made by hot stamping.
  • the four different microresonators (12, 12 12 , ⁇ , 12,, ⁇ ) of the array (40) can be separated address fluidically.
  • the different functionalization of the four micro-resonators (12, 12 *, 12 ⁇ , 12,,,) allowed the selective detection of four different ingredients in the analyte.
  • FIG. 9 shows a preferred optical sensor system (80) which contains at least one microoptical element (10) according to the invention or at least one microoptical array (40) according to the invention.
  • Nd YLF solid-state laser (60) of wavelength 523 nm pumped.
  • a lens structure has been integrated in the cover (30) over each microresonator (12, 12 ⁇ ...), which projects the pump beam (61) onto the rotationally symmetrical body of the microresonators (12, 12 ⁇ ..). .) focused.
  • the structuring of the lenses was carried out by hot embossing in a cycloolefin copolymer (COC).
  • Resonatorsubstrat (11) a temperature-controlled Peltier element as Device for temperature stabilization (50) attached.
  • the emission spectrum (62) of the microresonator (12) was separated from the pumping light (61).
  • the filtered light was split into a reference beam (63) and a sensor beam (64).
  • the intensity of the reference beam (63) was measured with a first photodiode as the reference diode (73) in order to control fluctuations or a drift in the intensity (62) emitted by the microresonator (12, 12 " ).
  • the sensor beam (64) was characterized by a steep edge and
  • tunable filter (74) out.
  • a tunable filter (74) a rotatably mounted, tunable thin film filter was used. By changing the angle of incidence of the sensor beam (64) on the tunable filter (74), the filter characteristic could be varied.
  • the signal of a downstream second photodiode as a measuring diode (75) was compared with that of the reference diode (74). The evaluation of the measuring signals takes place via a

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Abstract

L'invention concerne un élément micro-optique (10) présentant un substrat de résonateur (11), sur lequel est appliqué au moins un microrésonateur (12) conçu sous forme d'un corps (14) à symétrie de rotation, ledit au moins un microrésonateur (12) étant entouré par un miroir réfléchissant la lumière (20). L'invention concerne en outre un réseau micro-optique (40) présentant au moins un substrat de résonateur (11), sur lequel sont disposés au moins deux éléments de réseau, chaque élément de réseau présentant respectivement au moins un microrésonateur (12, 12...') qui est entouré par un miroir réfléchissant la lumière (20, 20'..). L'invention concerne enfin un système à capteur optique (80), qui présente au moins un élément micro-optique (10) ou au moins un réseau micro-optique (40). Le système à capteur optique (80) permet de réaliser un dispositif intégré et portable pour une détection solide et hautement sensible de toutes petites quantités de molécules.
EP12731304.7A 2011-06-29 2012-06-23 Élément micro-optique, réseau micro-optique et système à capteur optique Withdrawn EP2726854A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011107360A DE102011107360A1 (de) 2011-06-29 2011-06-29 Mikrooptisches Element, mikrooptisches Array und optisches Sensorensystem
PCT/EP2012/002657 WO2013000553A1 (fr) 2011-06-29 2012-06-23 Élément micro-optique, réseau micro-optique et système à capteur optique

Publications (1)

Publication Number Publication Date
EP2726854A1 true EP2726854A1 (fr) 2014-05-07

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EP12731304.7A Withdrawn EP2726854A1 (fr) 2011-06-29 2012-06-23 Élément micro-optique, réseau micro-optique et système à capteur optique

Country Status (4)

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US (1) US9176051B2 (fr)
EP (1) EP2726854A1 (fr)
DE (1) DE102011107360A1 (fr)
WO (1) WO2013000553A1 (fr)

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DE102012110126B3 (de) * 2012-10-24 2013-11-28 Karlsruher Institut für Technologie Optisches Element und optisches Sensorsystem
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