EP2721384A1 - Procédé et système destinés à déterminer l'émissivité - Google Patents

Procédé et système destinés à déterminer l'émissivité

Info

Publication number
EP2721384A1
EP2721384A1 EP12735853.9A EP12735853A EP2721384A1 EP 2721384 A1 EP2721384 A1 EP 2721384A1 EP 12735853 A EP12735853 A EP 12735853A EP 2721384 A1 EP2721384 A1 EP 2721384A1
Authority
EP
European Patent Office
Prior art keywords
infrared
reflected
intensity
detector
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12735853.9A
Other languages
German (de)
English (en)
Inventor
Max Rothenfusser
Michael Stockmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP2721384A1 publication Critical patent/EP2721384A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/33—Transforming infrared radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0831—Masks; Aperture plates; Spatial light modulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/084—Adjustable or slidable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/20—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only

Definitions

  • the emissivity E is defined as the ratio of the radiation power of the object to that of an ideal blackbody.
  • the value of the emissivity E for real objects lies between the extreme values 0 for perfectly specular objects and 1 for an ideal black body.
  • the emissivity E can be a characteristic variable for the aging of materials. Therefore, knowing the emissivity E or its changes with the time or service life of a material on the aging ⁇ behavior of the material can be deduced.
  • the apparatus comprises a Ausnceein- direction to a control device, which is coupled to the emitter device and can be coupled with an infrared camera, which is adapted to the infrared camera in such a way to counteract ⁇ that the infrared camera, an intensity of the detects the surface of the object reflected infrared light beam, and which is adapted to synchronize the dispensing of Inf ⁇ Rarotstrahlen by the infrared emitter with the detection of the intensity by the infrared camera.
  • a lens device may be provided in an advantageous embodiment, in the infrared camera, which images the reflected infrared light rays and / or the reflected radiation oriented environment respectively to infinity on the De ⁇ Tektor. This can be achieved that the focal point of the lens apparatus is placed on the surface of the Whether ⁇ jekts.
  • the infrared camera can be operated in such a legally advantageous ⁇ that made for each individual beam associated with a picture angle to a single point of the detector surface.
  • a lock-in amplifier may be provided in the evaluation device, wherein the output of the infrared rays by the infrared emitter is in time with a reference frequency.
  • FIG. 1 Various embodiments and embodiments of the present invention will now be described in more detail with reference to the accompanying drawings, in which:
  • the irradiation of the object 21 can be effected by an emitter device 1a which has an infrared emitter 3, for example a semiconductor diode emitting light in the infrared range.
  • Infrared emitter in the sense of constricting vorlie ⁇ invention may thereby have emitter, which can deliver in a broadband spectral range infrared light.
  • a laser can be used, for example ⁇ al ternatively, which operates in the infrared red range.
  • this may be an infrared laser which is tunable over a predetermined wavelength range in the infrared.
  • the emitter device 1a can have an aperture device 4 with a multiplicity of diaphragms 4a, 4b.
  • the diaphragm device 4 can be designed to direct infrared light emitted by the infrared emitter 3 in a nearly parallel or quasi-parallel beam as a light beam 20a onto the surface 21a of the object 21.
  • the number of diaphragms is not limited to two diaphragms 4a, 4b, but can in principle have any number and arrangement of diaphragms.
  • the infrared light beams 20b reflected by the object 21 are received by means of an infrared camera.
  • the incident light beam or incident light beams 20a to the object 21 is a sufficiently parallel beam depicting ⁇ len, the divergence is small 20b against the dispersion of the re- inflected light beam.
  • a lens device For receiving the scattering lobe, particularly the diffusely scattered ge ⁇ portion of the reflected light beam 20b in the infrared camera a lens device can be provided. 6 Instead of a lens device 6, for example, a single lens can be provided with a suitable focal length.
  • the objective device 6 can be focused on the surface 21a of the object 21, that is to say the focal point F of the objective device 6, in particular the front focal point, can be placed on the point in which the light beam 20a is scattered by the object 21 is reflected. In this case, the image on the surface 21a of the object 21 can be imaged to infinity. As a result, it is possible for each detected angle to be imaged onto a single point on a detection surface of the detector 2a.
  • control device 9 can be designed to synchronize the activation of the infrared camera 2 and the emitter device 1 a, so that the reflected ambient radiation and own radiation as well as the reflected infrared radiation can be correspondingly detected.
  • control device 9 can control the infrared camera 2 and the emitter device 1a in accordance with a lock-in method.
  • the calculation device 8 can have a lock-in amplifier, which receives a time-dependent intensity signal of the detector 2a.
  • the invention relates to a method for determining the emis- sdale of an object, comprising the steps of irradiating ei ⁇ ner surface of an object with an infrared light beam, receiving the reflected on the object infrared light radiation with an infrared camera, detecting a first intensity of the reflected Infrared light rays on a detector of the infrared camera, receiving the environmental radiation reflected at the object and the object's own radiation with the infrared camera, detecting a second intensity of the reflected ambient radiation and the object's own radiation on the detector of the infrared camera, and calculating the emissivity of the object based on the first intensity and the second intensity.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Radiation Pyrometers (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

L'invention concerne un procédé destiné à déterminer l'émissivité d'un objet (21), comportant les étapes consistant à irradier une surface (21a) d'un objet (21) au moyen d'un faisceau de lumière infrarouge (20a), capter les rayons de lumière infrarouge (20b) réfléchis par ledit objet au moyen d'une caméra infrarouge (2), détecter une première intensité des rayons de lumière infrarouge (20b) réfléchis atteignant un détecteur (2a) de la caméra infrarouge (2), capter le rayonnement environnant réfléchi par l'objet ainsi que le rayonnement propre à l'objet au moyen de la caméra infrarouge (2), détecter une deuxième intensité du rayonnement environnant réfléchi ainsi que du rayonnement propre à l'objet atteignant le détecteur (2a) de la caméra infrarouge (2), et calculer l'émissivité de l'objet (21) sur la base de la première intensité et de la deuxième intensité.
EP12735853.9A 2011-07-20 2012-07-11 Procédé et système destinés à déterminer l'émissivité Withdrawn EP2721384A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011079484A DE102011079484A1 (de) 2011-07-20 2011-07-20 Verfahren und System zur Emissivitätsbestimmung
PCT/EP2012/063562 WO2013010871A1 (fr) 2011-07-20 2012-07-11 Procédé et système destinés à déterminer l'émissivité

Publications (1)

Publication Number Publication Date
EP2721384A1 true EP2721384A1 (fr) 2014-04-23

Family

ID=46516730

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12735853.9A Withdrawn EP2721384A1 (fr) 2011-07-20 2012-07-11 Procédé et système destinés à déterminer l'émissivité

Country Status (4)

Country Link
US (1) US9516243B2 (fr)
EP (1) EP2721384A1 (fr)
DE (1) DE102011079484A1 (fr)
WO (1) WO2013010871A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011079484A1 (de) 2011-07-20 2013-01-24 Siemens Aktiengesellschaft Verfahren und System zur Emissivitätsbestimmung
DE102012003255B8 (de) * 2012-02-21 2014-01-16 Testo Ag Vorrichtung zur berührungslosen Temperaturmessung und Temperaturmessverfahren
FR3007831B1 (fr) * 2013-07-01 2015-06-19 Enovasense Procede de mesure de l'epaisseur d'une couche d'un materiau, procede de galvanisation et dispositif de mesure associes
US10616463B2 (en) * 2017-12-06 2020-04-07 Rockwell Collins, Inc. Synchronized camera and lighting system
DE102020203753A1 (de) 2020-03-24 2021-09-30 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Halbleiterlithographie

Citations (2)

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Publication number Priority date Publication date Assignee Title
DE19832833C2 (de) * 1998-07-21 2002-01-31 Fraunhofer Ges Forschung Verfahren zur thermographischen Untersuchung eines Werkstückes und Vorrichtung hierfür
DE102008061458A1 (de) * 2008-12-10 2010-06-17 Benteler Automobiltechnik Gmbh Verfahren zum Ermitteln eines Emissionsgrades für eine Emissionsgradkorrektur zum Erhöhen einer Messgenauigkeit einer Messvorrichtung für Thermografie und Pyrometrie und eine entsprechende Messvorrichtung

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JPS6049246B2 (ja) * 1980-03-04 1985-10-31 秀夫 高田 赤外線による温度測定方法における測定値補償方法
JPH03175326A (ja) * 1989-12-04 1991-07-30 Sumitomo Metal Ind Ltd 放射率と表面温度の測定方法並びにその装置
US5326173A (en) * 1993-01-11 1994-07-05 Alcan International Limited Apparatus and method for remote temperature measurement
US5823681A (en) 1994-08-02 1998-10-20 C.I. Systems (Israel) Ltd. Multipoint temperature monitoring apparatus for semiconductor wafers during processing
US6654061B2 (en) * 1995-06-14 2003-11-25 Canon Kabushiki Kaisha Automatic focus adjusting apparatus and method utilized by an image sensing apparatus
US6682216B1 (en) * 1999-12-16 2004-01-27 The Regents Of The University Of California Single-fiber multi-color pyrometry
US6980748B2 (en) * 2001-08-30 2005-12-27 International Business Machines Corporation SiGe or germanium flip chip optical receiver
JP2004301604A (ja) * 2003-03-31 2004-10-28 Chino Corp 放射温度測定装置及び光学的測定装置
US7133126B2 (en) 2003-06-27 2006-11-07 Delphi Technologies, Inc. Method for the detection of coatings using emissivity and reflectivity
US7409313B2 (en) 2005-12-16 2008-08-05 General Electric Company Method and apparatus for nondestructive evaluation of insulative coating
US7751530B2 (en) * 2007-09-17 2010-07-06 General Electric Company High flux X-ray target and assembly
DE102011079484A1 (de) 2011-07-20 2013-01-24 Siemens Aktiengesellschaft Verfahren und System zur Emissivitätsbestimmung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19832833C2 (de) * 1998-07-21 2002-01-31 Fraunhofer Ges Forschung Verfahren zur thermographischen Untersuchung eines Werkstückes und Vorrichtung hierfür
DE102008061458A1 (de) * 2008-12-10 2010-06-17 Benteler Automobiltechnik Gmbh Verfahren zum Ermitteln eines Emissionsgrades für eine Emissionsgradkorrektur zum Erhöhen einer Messgenauigkeit einer Messvorrichtung für Thermografie und Pyrometrie und eine entsprechende Messvorrichtung

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Entfernungseinstellung", WIKIPEDIA, 14 February 2016 (2016-02-14), XP055256465, Retrieved from the Internet <URL:https://de.wikipedia.org/w/index.php?title=Spezial:Buch&bookcmd=download&collection_id=534d028c29fe3b311eccb92f7193ba9eb52ebdb6&writer=rdf2latex&return_to=Entfernungseinstellung> [retrieved on 20160308] *
See also references of WO2013010871A1 *

Also Published As

Publication number Publication date
US9516243B2 (en) 2016-12-06
US20140152841A1 (en) 2014-06-05
WO2013010871A1 (fr) 2013-01-24
DE102011079484A1 (de) 2013-01-24

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