EP2702415A2 - Methode de detection et capteur - Google Patents

Methode de detection et capteur

Info

Publication number
EP2702415A2
EP2702415A2 EP12722686.8A EP12722686A EP2702415A2 EP 2702415 A2 EP2702415 A2 EP 2702415A2 EP 12722686 A EP12722686 A EP 12722686A EP 2702415 A2 EP2702415 A2 EP 2702415A2
Authority
EP
European Patent Office
Prior art keywords
radiation
diaphragm element
light
force
projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP12722686.8A
Other languages
German (de)
English (en)
Inventor
Wilfried Hortschitz
Franz Kohl
Harald Steiner
Matthias Sachse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Donau-Universitat Krems
Tecnet Equity NO Technologiebeteiligungs Invest GmbH
Original Assignee
Donau-Universitat Krems
Tecnet Equity NO Technologiebeteiligungs Invest GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Donau-Universitat Krems, Tecnet Equity NO Technologiebeteiligungs Invest GmbH filed Critical Donau-Universitat Krems
Priority to EP15175929.7A priority Critical patent/EP2966451A3/fr
Publication of EP2702415A2 publication Critical patent/EP2702415A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0283—Electrodynamic magnetometers in which a current or voltage is generated due to relative movement of conductor and magnetic field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/48—Measuring temperature based on the expansion or contraction of a material the material being a solid
    • G01K5/56—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid
    • G01K5/62—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid the solid body being formed of compounded strips or plates, e.g. bimetallic strip
    • G01K5/70—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid the solid body being formed of compounded strips or plates, e.g. bimetallic strip specially adapted for indicating or recording
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/25—Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/24—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
    • G01R33/0385—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices in relation with magnetic force measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/22—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-emitting devices, e.g. LED, optocouplers

Definitions

  • the present invention relates to a metrological method for detecting, converting and manipulating motion-causing, force or torque-based and optical input signals in either amplitude-modulated light signals or comparable amplitude-modulated electromagnetic radiation signals and for further conversion thereof into electrical signals.
  • the present invention relates to transducers for carrying out the method.
  • the transducer is a micromechanical assembly, i. the movements are limited to very small distances, preferably less than 1 mm, for example ⁇ , or very small angle changes, preferably by an angular range of less than 30 °.
  • the transducer modifies optical signals by optomechanically modulating electromagnetic radiation paths.
  • such a transducer can also be referred to as a micro-optomechanical sensor.
  • Electrically controlled light sources in particular light-emitting diodes: these can convert electrical input variables into light of a specific spectral range, as a result of which electrical signals can also be transmitted via light waves to other locations (via free space, waveguides or via light guides, such as glass fibers). Infrared diodes are also mentioned here. Photodiodes, phototransistors, photovoltaic elements, radiation detectors and the like: these allow the conversion of light or certain electromagnetic waves into electrical signals (current / voltage).
  • Light modulators these modulate polarized light using optically active substances (liquid crystals). This can be amplified or even phase-modulated by an electrical signal, depending on the design of a light beam. Here is the orientation of the optically active substances (liquid crystals).
  • Liquid crystals by an electrical voltage for the modulation effect.
  • Optocouplers these devices convert electrical input quantities into light intensities by driving an electrically operated light source and the light signal by means of photodiodes or phototransistors back into electrical output variables. Optocouplers serve the electrical isolation of electrical signals.
  • Photoelectric sensors also in the infrared spectrum: these allow the detection of passing objects across a light path by the direct optical path between a
  • Radiation source and a radiation sensor is interrupted.
  • Incremental optical encoders correspond to small light barriers for detecting the number of lines on an otherwise transparent code strip or a coding disk.
  • For the direction detection usually two mutually offset line grids are provided. These form signals labeled A and B on photosensors. This results in sine and cosine signals in a light-dark-bright or dark-light-dark transition due to the shadow cast of the bar screen.
  • Such encoders are used to detect travel ranges, angles of rotation or speeds.
  • Optical absolute value encoders these output a unique digital code for each positioning position or each angular position to be detected, which is represented by a binary line pattern through several miniaturized light barriers.
  • a coding disc with a drive axis is rotatably mounted in a housing relative to an optic with a light source and a sensor matrix.
  • Device allows the mechanical change of the opening of a light passage in lenses of photographic equipment or film cameras.
  • variable optical attenuator Use as a variable optical attenuator is shown in US Pat. No. 6,404,970, wherein a plurality of openings in a device are regularly arranged. In this case, the opening diameter of the openings in an expansion direction of the component increases steadily, whereby the component has a position-dependent light transmission.
  • Passage of light is deflected from the light channel.
  • Aperture element This is made of a silicon structure from an SOI (silicon-on-insulator) wafer and has square etched openings.
  • SOI silicon-on-insulator
  • comb structures are attached to the longitudinal sides, the function of which is not explained in detail in this publication.
  • Aperture element drops.
  • Photo transistor is not linear and therefore has to be electronically corrected if a linear relationship between input and output is desired.
  • Input variables are limited here only to mechanical vibration excitation by excitation of vibrations over the housing and inclinations, or acceleration or deceleration in the direction of the mobility of the diaphragm element.
  • the mobility of the diaphragm element is limited to only one direction.
  • the dimensions of the chrome diaphragms are just as large as the dimensions of the apertures in the silicon diaphragm element. As a result, the positioning must be accurate.
  • the light intensity over the surface is inhomogeneous. Also, the sensor is very large and averages the passing through the openings light fluxes. Separate detection of individual partial light flows is not possible here.
  • Possible transfer functions should be selected by a precalculation of the effect of the shape of the position or angular position-dependent cut surface of a suitable
  • Light projection with the location-dependent suitably selected translucency be determined.
  • the device for carrying out the method should have very specially selected cross-sectional shape designs of the light apertures in the movably mounted aperture element, as well as paired, specially selected shapes or patterns for the light projection.
  • the position or rotational position of the measuring mass should be optically detectable by the measuring mass is also effective as part of a mechanical light modulation system, which transmits more or less light depending on the relative position of its components.
  • Modulation system is formed for the electromagnetic waves, in such a way that on the way or angular position of the measuring mass detection additionally at least one useful signal manipulation useful.
  • the signal manipulation can, for example, have the task of compensating the non-linearities of input variables and of distance- or angle-dependent counterforces, or deliberately consciously incorporating particular nonlinearities piecewise, for example different slopes depending on the distance or angle section of the movement space (eg for different intensity measurement ranges).
  • the function of the electrical voltage with respect to the travel of two comb electrodes used for this purpose is already non-linear as a comb drive; at short intervals, higher electronic voltage changes per path section result than at long distances.
  • the light source often has an inhomogeneous distribution, it would have diffusers to distribute the light more evenly to get proportionate shading and the same amount of light on the light sensor.
  • the light sensor itself also usually has no linear behavior.
  • Measuring instruments require a robust, reliable and as accurate as possible implementation of a
  • Adaptation devices needed. If the signals are too small, they must be amplified, but noise (noise) should be suppressed. If the signals are too large they must first be attenuated. Certain signals behave exponentially, others are e.g. logarithmically perceived (e.g., volume, brightness), which is why the logarithm of the measurand should be appropriately measured and controlled. Some signals are filtered, some are linearized, some are digitized for further processing. So far, for all of these necessary adjustments, electronic circuits with amplifiers, attenuators, integrators, logarithmers, sampling and digitizing devices, curve analyzers, frequency analyzers, and much more are being used. This is done to get the desired output for a given input. In a simple case, the sensor can only detect a limit violation
  • specially designed converters are also intended to enable a plurality of input signal manipulations, such as different amplification or different phase shift, in parallel at a plurality of optical and / or electrical outputs.
  • modulation a particular input signal multiplication, e.g., doubling, tripling
  • signal full wave or half wave rectification e.g., doubling, tripling
  • dynamic effects known from acoustic manipulation individually, in parallel or in combination, such as one
  • Compressor a limiter, or an enhancer, an expander, or a noise gate.
  • Digital signal transformations should be able to be output in parallel.
  • Possible measurement variables are: Travel paths, rotation angles, forces on a small measuring mass, such as gravitational forces, acceleration forces and consequently also linear accelerations (eg gravitational acceleration), centrifugal forces and thus angular velocities (rotation rates), but also Inclinations to gravitational forces;
  • electrostatic forces between a reference electrode and a movably mounted electrode can be measured or forces that have magnetic origin (eg
  • the device can be used to compare two measured variables (for example mechanical force as a function of acceleration and spring force as a function of
  • the method allows short development times or adaptations of signal transducers with special transmission characteristics.
  • Signal manipulation can be done on optical aperture path. If required, several transmission functions can be formed in parallel in one component and output through several outputs. Various transmission characteristics can be summed up by parallel arrangement. Due to the mobility of the mechanical component in more than one (rotational) direction, independent or combined can be used for each direction
  • Switch box assembled, which are supplied by different supply voltages. There are modules that work with 5V (volts), others with +/- 12V, others with 3.3V supply voltage. If these have to exchange data with each other one
  • the output signal of the converter can be fed via optical fibers or waveguides of an evaluation.
  • the measured input variables are used directly for the modulation of a light path or the modulation of the transmission path of the electromagnetic wave.
  • the light or electromagnetic wave source may or may not be attached to the transducer. It can also light guides or special guides for the supply
  • electromagnetic waves serve to guide these waves to the converter.
  • natural lighting (daylight) or artificial room lighting of the environment can also serve as the light source.
  • the light source can be modulated. Thereby can
  • the object is achieved by a novel method for optomechanical
  • This input signal can be a mechanical, an electrostatic, a magnetic or an electrodynamic variable, which then influences an electromagnetic radiation channel via the intermediate step by conversion into a path signal.
  • an input signal dependent electromagnetic output signal e.g. generates a specific luminous flux.
  • This can be converted as a result of again via a radiation-sensitive sensor, for example, a photosensor in an electrical signal.
  • a radiation-sensitive sensor for example, a photosensor in an electrical signal.
  • This is, for example, a signal dependent on the input electrical DC or AC voltage or a DC or AC.
  • the output signal can also be represented as a frequency in an electrical alternating signal, for example by an electrical oscillator (astable multivibrator) having a luminous flux dependent frequency-determining component (for example photoresistor of an RC resistance-capacitance time constant).
  • an electrical oscillator astable multivibrator
  • a luminous flux dependent frequency-determining component for example photoresistor of an RC resistance-capacitance time constant
  • Radiation components of an electromagnetic radiation projection for example, from a light projection, by a special component depending on its position or its angular position to be transmitted or shadowed.
  • the electromagnetic signals that are used for it preferably have
  • Visible rays of this electromagnetic Radiation projection would show on a plane projection surface a previously defined pattern with at least one outer contour and possibly also unirradiated or shaded areas within the contour. But also for non-visible electromagnetic radiation there are defined impact zones and zones where no radiation is supplied.
  • the beam transmission on the diaphragm element has a geometrically predetermined and preferably etched cross-sectional surface shape.
  • the diaphragm element expediently has to be movably mounted in a plane parallel to the surface extension or be rotatably mounted about an axis for a relative angular change, relative to the considered radiation front.
  • the possible input signals cause forces on the diaphragm element, which is thereby accelerated and moves as a result of the storage.
  • counter forces from reset elements are provided according to the invention, which counterbalance the force-based input signals with increasing path, whereby a constant input variable causes a constant travel or adjustment angle. As a result, a force-displacement or a force-angle conversion takes place.
  • Invention s according to the optical or photo or radiation sensor detectable output signal for the given relative spatial position (x, y) or relative orientation position (a) is converted into a path or angle a dependent transmission flow now. How much light or radiation in the frequency spectrum considered by the specially shaped
  • Apertures / radiating passages penetrate is given by the intersection (or mathematical convolution) of the projected geometric shapes and patterns and the radiating passage cross-sectional areas, depending on position or angle. Since more than one sensor can be arranged opposite the light or radiation exit sides of a plurality of radiation passages, a plurality of signals can also be formed from the respective intersections.
  • Each radiation sensor can at most be completely covered by radiation from a radiation source or, at a minimum, it is not directly affected by any radiation.
  • the sensor therefore forms an electrical signal which normally lies between the extreme values (no radiation, complete irradiation) if partial shading of the radiation takes place through the diaphragm element.
  • the change of the light radiation current can be sudden, if a short way, or a small
  • Angle change of the diaphragm element causes a strong increase of the radiation or alternatively a strong shading of the radiation on the sensor surface. This is at large widths of a radiation passage section at a step along the path or very wide aperture portions of those that max. should be the width of the sensor element. (For angle-based changes, it is analogous that a large radiation passage radius length or a large iris radius length results in the angular step.) A small increase, a small decrease of the radiation current, however, is due to very thin radiation passages, or thin diaphragms along the path change and analog through short radial passages or diaphragms can be reached along the angle change.
  • this inventive method is suitable for input signals on
  • Gravity force, inertial force, moment of inertia or centrifugal force are based, these forces and accelerating acting on the mass of the diaphragm element.
  • the input signal may also be advantageously formed by an external electrical (DC or AC) field when the shutter element can be statically charged thereto. Due to the charge separation, a force is caused by the resulting electric field.
  • Electrical (direct or alternating) voltages at corresponding electrodes can be advantageously used to form an electromotive drive for the diaphragm element.
  • a capacitive comb drive can be used.
  • An external magnetic (DC or alternating) field can advantageously serve as an input signal to a magnetic diaphragm element, if this causes a force on the
  • Aperture element is caused.
  • the radiation flow emerging from the diaphragm element is a measure of the (also changed) input signal. It can be detected by visible radiation with the eye. If the transmission is not evaluated directly, it is advantageous according to the invention to detect it via a radiation-sensitive sensor and to convert it into an electrical signal. This can be done directly at the diaphragm element or in a bridged over optical fiber distance.
  • the non-linear transmission characteristic caused by the use of capacitive comb drives can be optically compensated;
  • the change in the diaphragm geometries in a second development step makes the transfer function linear.
  • the subject method allows the transfer function in a radiation signal or by means of a radiation sensor in an electrical signal piece by piece for certain way, or angle sections to describe by the power and / or root sum ⁇ Aj u ⁇ .
  • i is the set of integers and aj and.
  • B_i are freely definable constants from the set of rational numbers and u is the variable of the path in the x, y plane or for the
  • Rotation angle ⁇ Such transfer functions described can also be used in parallel, physically separated or combined.
  • Transfer function in the path or angle section a linear function with the slope Aj.
  • the device for carrying out the method is the subject of the invention.
  • the device according to the invention advantageously has a planar, preferably opaque diaphragm element movably mounted in a holder.
  • This is preferably formed of silicon.
  • the diaphragm element has a small thickness at least one radiation passage in relation to its surface area.
  • the passage should advantageously be a recess formed preferably by etch-through and has a geometric predetermined cross-sectional area shape.
  • the device is provided with either an optical element for forming a geometrically shaped radiation projection, wherein the light or the radiation of at least one suitable
  • Radiation source comes.
  • a radiation source is preferably a light-emitting diode (also organic) or a light-emitting diode matrix, preferably as an OLED display, or a quantum dot arrangement.
  • the projection can also be made directly by the radiation source on the
  • a second shading diaphragm element preferably formed from geometrically arranged opaque coatings on a transparent thin planar element, preferably of glass or plastic.
  • bundles of optical fibers preferably glass fibers, can be used whose light exit surfaces terminate just above the diaphragm element and are positioned either in a geometrically predetermined arrangement. Or they are isolated for the light line disabled or mixed with non-photoconductive fibers so that they give a geometrically predetermined arrangement.
  • Shutter element can also support a non-reflective pattern layer order the aperture optics.
  • At least one radiation-sensitive component can advantageously be arranged either directly in front of the radiation-remote side of the movably mounted diaphragm element, or be in contact therewith via an optical device such as mirror, light guide, prism.
  • Suitable radiation sensors are radiation-dependent resistors, photodiodes, phototransistors, CCD camera sensors or CMOS sensors or even photovoltaic elements.
  • a storage of the panel element by spring suspensions can be made of the same material, preferably silicon by the same as the
  • Recesses formed for the radiation passage for example, is etched.
  • Other storage alternatives are ball bearings, rolling bearings, hydraulic bearing preferably on a hydraulic oil film, pneumatic bearing or magnetic bearing. Thus, damping is possible.
  • the diaphragm element is produced in one piece together with spring elements and the holder (frame) made of silicon, for example by structurally etching, then it is advantageous if the diaphragm element has a comb structure in at least one main expansion direction, which together with a counter-comb structure arranged on the side of the diaphragm element Frame forms a capacitive sensor or capacitive drive device (Combdrive).
  • a capacitive sensor or capacitive drive device Combdrive
  • measurement signals on the combdrive can be formed in addition to the optically generated signal due to mechanically forced drives (eg due to vibrations).
  • Alternative drive devices for the diaphragm element are preferably mechanical levers (also piezo elements, thermal length changes, bimetallic strip), gear rack pairing, magnets, magnetic materials, coils, electric motor drives.
  • FIG. 1 shows a block diagram of the signal conversion method with input and output variables and their physical relationships, preferably with a straightforward force
  • FIG. 2 shows a block diagram of the signal conversion method with input and output variables and their physical relationships, preferably in the case of a circular path
  • FIG. 3 shows a block diagram of the converter according to the invention.
  • Fig. 4 shows an exemplary embodiment of a converter according to the invention in one
  • Fig. 5 is a variation of the embodiment in Figure 4, wherein the connection of the light source 5 and the light sensor 200 via light lines 7 takes place.
  • FIG. 6 shows four different transfer functions for a path normalized to the maximum distance s max and with an output signal normalized to the maximum output radiation flux corresponding to the pairing of the geometries 104.
  • Fig. 7 Shown in Fig. 7 is the typical structural structure with quiescent optical aperture element 6, movable aperture element 300 and quiescent luminous flux (radiation flux) detector surface.
  • FIG. 1 shows the three input signals: the radiation input flux ⁇ ⁇ ( ⁇ ) as a radiation projection , an input force F paired with an opposing force F Co mp compensating the input force for a specific deflection, and the geometry function G (s).
  • S reflects the relative position of the radiation projection in relation to the position of the beam movable diaphragm element and defines itself in a Cartesian
  • the radiation output signal E> 0ut is a function of the temporal change of the radiation input signal as well as of the temporal force-dependent path change and of the shape geometry of the diaphragm light projection pairing.
  • the primary output E> 0U t may be a modulated luminous flux or even an invisible radiation flux or a combination of both. This signal contains the path-determining force component.
  • Radiation / current transformer or radiation / voltage converter creates a secondary electrical output signal U ou t or I ou t. But it can also be dependent on the radiation flux electrical time signal. For example, a period as a function of the luminous flux, or a frequency modulation, with a dependent of the radiant flux electrical signal frequency.
  • Aperture-light projection pairing in dependence on the relative rotation angle ⁇ . a reflects the variable relative position of the radiation projection with respect to the position of the movable diaphragm element and defines itself in a polar one
  • Radiation flux is to be regarded here as a geometrically shaped radiation projection 102.
  • This usually has one or more specific contours and causes irradiated and shaded zones on the movably mounted aperture element 300.
  • This is deflected by means of the mechanical input signal 101, for example, a gravitational force (Erdanziehungskraft) in a corresponding position relative to the projection 102.
  • a counterforce 103 increasing with the deflection acts, for example, via a spring suspension on a rigid frame, then, as with a spring balance, the deflection is proportional to the acceleration on the deflected mass in the direction of gravity. This could, for example, a
  • the spring balance element then represents the block of
  • Torque-angle conversion is rigidly connected or even the same element will now according to the invention as a path-radiation-conversion device 302. G is in the
  • Force or torque compensation signal 103 or any downstream electric radiant flux detection device 200 are compensated. According to the invention, however, it is also possible for a signal or a plurality of signals to be generated via the iris-optical system
  • Transfer function (s) 100 are manipulated according to predetermined criteria.
  • An example would be an exponential light filter.
  • Sensor 200 vibrations or motion or torsion signals can be manipulated specifically and form a variety of electrical output signals. Becomes an electrostatic
  • Luminous flux or the radiation flux can be implemented and over the radiation-sensitive
  • Vibration excitation also gives a frequency-dependent behavior.
  • the resonance frequency depends on the overall mechanical system (mass, spring stiffness, damping,
  • FIG. 4 shows a lateral section parallel to the x-axis transverse to the y-axis of a constructive element with layer structure in the z-direction that is extended in the x-y plane, as a simple one
  • Embodiment of a partially symbolically sketched device according to the invention with only one light source As the radiation source 5, a light-emitting diode is used here
  • Fluorescent field over a large area a transparent layer of the optically active element 4 (made of Pyrex glass) with applied opaque zones 4a illuminated.
  • the opaque zones 4a represent an aperture element 6 which is stationary with respect to the radiation source. Part of the total radiation is thereby either absorbed or reflected, thereby shadowing the underlying area and receiving no radiation, except for possible low scattered radiation.
  • Under the dormant diaphragm element 6 is here a movable
  • Shutter element 300 which is e.g. is formed from a flat silicon chip by the specially shaped recesses were produced by etching to form radiation passages in the y direction, the opening width is formed and in the x-direction, the opening length, so that according to the invention for different x-positions of the lateral Section different differential opening lengths show.
  • Distanziervoriquesen 12 and a bearing 9 are provided. The storage takes place here over bending springs.
  • Biefederern made movable shutter element 300 made.
  • the radiation here the light of the light-emitting diode 5, arrives in a radiation projection due to the rigid
  • Aperture element 6, on the movable aperture element 300 Through this passes depending on the deflection more or less light through the radiation passages.
  • the deflection depends on the force on the mass of the movable diaphragm element against the spring force, or on the caused by the electrical voltage on the Combdrive force against the spring force of the torsion springs.
  • An acceleration to the right would cause the movable diaphragm element 300 to press relatively against the left bending spring due to the mass inertia, and the right-hand bending spring to expand accordingly. In the illustrated section, only a small amount of light passes through the movable diaphragm element.
  • the openings come out of the area of the overlying shading panels and it can be more light through the openings.
  • the radiation finally reaches a radiation-sensitive sensor 200 (here a photo transistor).
  • a radiation-sensitive sensor 200 here a photo transistor.
  • LEDs on the market especially infrared LEDs that are tuned with transistors and one each Have parabolic mirror and were practically usable in the prototype.
  • the entire assembly can be made extremely small and can be poured, for example, in housings, as they are common in electronics.
  • Radiation source 5 and the radiation receiver 200 is here a longer distance, which is bridged with the light guide.
  • the formation of the radiation signal and the processing of the radiation output signal takes place locally away from the signal manipulation.
  • optical fibers offer the
  • FIGS. 6 and 7 are intended to illustrate the basic mode of operation and exemplary options based on different geometrical form pairings.
  • FIG. 6 shows the output signal (standardized representation) for four different stops (stationary) and openings (moved thereto).
  • the dashed graph in FIG. 6 shows a linear progression corresponding to a pairing of square apertures with square apertures corresponding to the rearmost section from FIG. If the aperture is cross-shaped as in the subsequent section in FIG. 7, then the linear course (see thin line in FIG. 6) acquires two different steepnesses corresponding to the opening width in the direction of movement; the steepness in the longitudinal beam section of the cross is flatter than in the transverse bar section.
  • an LED or LCD display as known from electronic viewfinders, are arranged above the movably mounted aperture element and below that is a CCD or CMOS camera element of similar dimensions.
  • the radiation projection can also be changed after production.
  • the diaphragm element can have a multiplicity of different basic shapes, which can then be added together as desired in the camera element or used separately for signal generation / evaluation.
  • a component 3 working according to the invention to operate according to the method to use differently colored light-emitting diodes which, depending on the deflection of the diaphragm element, generate a specific mixed color for the eye on the basis of a detected input signal.
  • a temperature sensor e.g. called for service water with bimetallic spring.
  • the deformation of the bimetallic spring rotates or displaces the shutter element, thereby changing the light composition of e.g. blue for cold on red for hot. in the
  • Transition temperature range there are different mixed colors, e.g. green for hand warm 38 °.
  • F force input value for the transducer (for example: gravity, inertial force, centrifugal force, also caused by pressure)
  • M torque input to the converter (e.g., angular acceleration to a
  • I 0Ut (F, t, G), I 0Ut (M, t, G) Output current as a function of the input (force or torque) -
  • a converter device for converting force into luminous flux or radiation flux strengths or for conversion into electrical signals
  • optically active device such as mirror, lens, aperture, grating, prism, or optical fibers 4a opaque zone on transparent support (e.g., chromium layer of particular surface form)
  • optical fiber optical fiber (s), guide for electromagnetic radiation
  • optical device at the output such as mirror, light guide, prism, lens

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

La présente invention concerne un procédé de détection de trajet optomicromécanique, de transformation de signal et de modification, ainsi que des convertisseurs fonctionnant selon ce procédé. On utilise à cet effet un élément de diaphragme mince, plan et mobile, par rapport à l'environnement et par rapport à des zones de lumière ou de rayonnement définies. Cet élément présente des passages de forme particulière qui, en fonction de la position, laissent passer plus ou moins de lumière ou de rayonnement électromagnétique correspondant. La part de rayonnement (le flux lumineux) passant par les passages forme une fonction qui dépend de la position relative ou de la position angulaire relative de l'élément de diaphragme par rapport aux zones de rayonnement. Un photodétecteur ou détecteur de rayonnement peut convertir le flux de rayonnement incident en signaux électriques. Les grandeurs mesurées peuvent être des trajets ou des angles, des accélérations, des forces, des mouvements d'origine électrique ou magnétique ou une pression. Des intensités de champs électriques ou magnétiques, des courants ou des tensions électriques qui sont transformés en mouvements par des composants inductifs ou capacitifs actifs peuvent être mesurés.
EP12722686.8A 2011-04-18 2012-04-18 Methode de detection et capteur Withdrawn EP2702415A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP15175929.7A EP2966451A3 (fr) 2011-04-18 2012-04-18 Methode de detection et capteur

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT2252011 2011-04-18
PCT/EP2012/057098 WO2012143408A2 (fr) 2011-04-18 2012-04-18 Procédé de détection optomécanique d'un signal d'entrée mécanique, électrostatique, magnétostatique ou électrodynamique et de conversion de ce signal en signaux de sortie de rayonnement électromagnétique modulés en amplitude et en signaux de sortie électriques formés à partir de ceux-ci par l'intermédiaire d'un capteur de rayonnement, au moyen d'une fonction de transfert formée de manière optomécanique, et dispositif permettant de mettre en oeuvre ce procédé

Related Child Applications (1)

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EP15175929.7A Division EP2966451A3 (fr) 2011-04-18 2012-04-18 Methode de detection et capteur

Publications (1)

Publication Number Publication Date
EP2702415A2 true EP2702415A2 (fr) 2014-03-05

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EP12722686.8A Withdrawn EP2702415A2 (fr) 2011-04-18 2012-04-18 Methode de detection et capteur
EP15175929.7A Withdrawn EP2966451A3 (fr) 2011-04-18 2012-04-18 Methode de detection et capteur

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WO (1) WO2012143408A2 (fr)

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Publication number Priority date Publication date Assignee Title
DE102022103577A1 (de) * 2022-02-16 2023-08-17 Ic-Haus Gmbh Positionssensorvorrichtung für einen optischen Positionsencoder

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE971878C (de) * 1954-02-27 1959-04-09 Licentia Gmbh Verfahren zur Messung von Strom, Spannung, Leistung oder anderen elektrischen Groessen in Hochspannungsnetzen
DE1092813B (de) * 1958-10-31 1960-11-10 Siemens & Halke Ag Anordnung zur Messgroessenuebertragung von der Hochspannungsseite auf die Niederspannungsseite
US3412324A (en) * 1966-08-24 1968-11-19 Gen Electric Optical magnetometer based on the principle of frustrated total internal reflection of light
US3731542A (en) * 1971-03-26 1973-05-08 Honeywell Inc Optical accelerometer
US4385234A (en) 1980-11-25 1983-05-24 Bei Electronics, Inc. Optical systems for optical encoders
US4720631A (en) * 1985-12-12 1988-01-19 The Laitram Corporation Electro-optical compass card wherein transmissive member has random patterns that repeat for particular rotational positions
US5936294A (en) * 1996-05-28 1999-08-10 Motorola, Inc. Optical semiconductor component and method of fabrication
US6404970B1 (en) 2000-05-22 2002-06-11 Jds Uniphase Inc. Variable optical attenuator
US6568268B1 (en) * 2001-10-31 2003-05-27 Western Digital Technologies, Inc. Multi-axis accelerometer comprising a mass suspended by springs above an optical sensor
FR2839060A3 (fr) 2002-04-30 2003-10-31 Memscap Attenuateur optique variable
JP2006105764A (ja) * 2004-10-05 2006-04-20 Matsushita Electric Works Ltd 加速度センサ
US7253616B2 (en) * 2005-10-13 2007-08-07 Lucent Technologies Inc. Microelectromechanical magnetometer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
None *
See also references of WO2012143408A2 *

Also Published As

Publication number Publication date
WO2012143408A3 (fr) 2012-12-27
EP2966451A3 (fr) 2016-06-22
EP2966451A2 (fr) 2016-01-13
WO2012143408A2 (fr) 2012-10-26

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