EP2678120B1 - Vorrichtung und verfahren zur abscheidung eines films aus geordnete teilchen auf einem beweglichen substrat - Google Patents

Vorrichtung und verfahren zur abscheidung eines films aus geordnete teilchen auf einem beweglichen substrat Download PDF

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Publication number
EP2678120B1
EP2678120B1 EP20120704426 EP12704426A EP2678120B1 EP 2678120 B1 EP2678120 B1 EP 2678120B1 EP 20120704426 EP20120704426 EP 20120704426 EP 12704426 A EP12704426 A EP 12704426A EP 2678120 B1 EP2678120 B1 EP 2678120B1
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EP
European Patent Office
Prior art keywords
particles
substrate
transfer area
layer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP20120704426
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English (en)
French (fr)
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EP2678120A1 (de
Inventor
Olivier Dellea
Pascal Fugier
Philippe Coronel
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Publication of EP2678120A1 publication Critical patent/EP2678120A1/de
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C19/00—Apparatus specially adapted for applying particulate materials to surfaces
    • B05C19/02—Apparatus specially adapted for applying particulate materials to surfaces using fluidised-bed techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C19/00—Apparatus specially adapted for applying particulate materials to surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
    • B05D1/20—Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
    • B05D1/20—Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
    • B05D1/202—Langmuir Blodgett films (LB films)
    • B05D1/204—LB techniques
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length

Definitions

  • the invention relates to the field of installations and methods for the deposition of a film of ordered particles on a moving substrate.
  • the particle size may be between a few nanometers and several hundred micrometers.
  • the particles, preferably of spherical shape, may for example be silica particles.
  • the invention has many applications, in particular in the field of fuel cells, optics, photonics, polymer coating, chips, MEMs, surface structuring for organic electronics and photovoltaic, etc.
  • a transfer zone fed with particles, which float in a carrier liquid contained in the same transfer zone.
  • the ordered particles in the transfer zone forming a monolayer of particles called thin film, are pushed by the arrival of other particles to an output of this zone, by which they reach the moving substrate on which they are deposited.
  • a capillary bridge usually ensures the connection between the substrate and the carrier liquid contained in the transfer zone.
  • the particles are maintained ordered by the pressure exerted upstream by the moving particles intended to later reach this transfer zone.
  • the particle transfer zone is connected upstream to an inclined ramp on which the particles coming from a dispensing device run past, it is these same particles present on the inclined ramp which exert an pressure on the particles contained in the transfer zone, and which therefore make it possible to maintain the order of the particles in this zone, until the deposition on the substrate, by capillarity.
  • the kinetic energy required for the ordering of the particles is here brought by the inclined ramp carrying the carrier liquid and the particles.
  • Other solutions are nevertheless possible, such as the setting in motion, with the aid of a pump, of the carrier liquid on a horizontal plane, the downstream part of which constitutes the zone of transfer of the particles.
  • Another solution is to replace said pump by a blower for applying a flow of air to the surface of the carrier liquid, on which the particles float.
  • these clusters of particles eventually meet each other during the initial filling of the transfer zone, when the filling rate thereof becomes high, gaps are formed between these clusters, which makes the film non homogeneous, and therefore unsatisfactory.
  • the ordering of the particles within each cluster may be suitable, the clusters together form a set of particles in which there are voids, which does not make it possible to obtain a film having, in every point, a structure called "compact hexagonal" in which each particle is surrounded and contacted by six other particles in contact with each other.
  • the particle film located in the transfer zone before the plant is put into operation has quality defects that require it to be removed by deposition on a dedicated substrate. This first results in unnecessary consumption of particles and substrates, impacting production costs. These same costs are also increased because of the complexity of the process, which therefore requires a purge phase to deposit the part of the non-conforming film, then to evacuate. In addition, the risks of dissemination of the particles are amplified, especially when they are small, for example less than 400 nm.
  • the document EP 1 647 334 describes an installation for the deposition of a film of ordered particles on a moving substrate.
  • the invention therefore aims to at least partially overcome the disadvantages mentioned above, relating to the achievements of the prior art.
  • the installation further comprises a plurality of suction nozzles capable of attracting the particles present in the transfer zone towards its two lateral flanges.
  • the invention therefore provides suction nozzles for stretching the film of particles over the entire width of the transfer zone, in order to avoid the formation of a set of particles in which there are voids, like this. was the case in the prior art.
  • these nozzles allow a satisfactory ordering of the particles in the transfer zone, during the priming phase consisting of its initial filling. Then, in normal mode, these nozzles can be inactivated, the ordering of the particles then taking place automatically.
  • the invention is remarkable in that it makes it possible, in a simple and effective manner, to avoid the formation of clusters first isolated and then grouped together in an unsatisfactory way, as was the case in the prior art.
  • the suction nozzles are indeed a simple way to stretch the film laterally, towards each of the two flanges, and ensure that the film produced has, in every point, a so-called "compact hexagonal" structure, in which each particle is surrounded and contacted by six other particles in contact with each other.
  • the installation comprises only two suction nozzles, respectively capable of attracting the particles present in the transfer zone towards one and the other of the two lateral flanges.
  • each flange could be associated with several nozzles, without departing from the scope of the invention.
  • the installation comprises an inclined ramp of particle circulation, attached to said inlet of the transfer zone, and on which said carrier liquid is also intended to circulate.
  • the kinetic energy necessary for the ordering of the particles in the normal regime is here brought by the inclined ramp carrying the carrier liquid and particles.
  • Other solutions are nevertheless possible, such as the setting in motion, with the aid of a pump, of the carrier liquid on a horizontal plane, the downstream part of which constitutes the zone of transfer of the particles.
  • Another solution is to replace the pump by a blower for applying a flow of air to the surface of the carrier liquid, on which the particles float.
  • the installation comprises means for temporarily holding the particles in the transfer zone at a distance from said substrate, these retention means being able to be displaced towards this substrate while retaining said particles.
  • This displacement can be envisaged manually or automatically.
  • these temporary retention means are provided to be moved towards the exit of the transfer zone and the substrate, to allow the deposition of the particle film on the latter.
  • the retention means are also provided for depositing on the substrate upstream of the particle film.
  • said means for temporary retention of the particles takes the form of a layer of hydrophobic material, floating on the surface of the carrier liquid.
  • This solution proves to be simple and effective for blocking particles that can not pass over the layer because of the hydrophobic nature which prevents wetting of the upper surface of the layer, or to pass between the layer and the carrier liquid. Thanks to the small thickness of the dam which allows to deform easily to adapt to variations in shape of the surface of the carrier liquid.
  • this layer has a thickness preferably between a few microns and several tens of microns, for example between 50 and 100 microns.
  • PTFE polytetrafluoroethylene
  • said temporary retention means take the form of a layer of which one downstream end is also remote from the substrate.
  • said temporary retention means take the form of a layer of which a downstream end is located on said substrate.
  • the layer can then have, on the carrier liquid, a behavior substantially identical to that of the ordered particle film formed in the transfer zone. This makes it possible to deposit this layer of particle retention on the substrate, also preferably via the capillary bridge, as was mentioned above.
  • the invention also relates to a method for depositing a film of ordered particles on a moving substrate, using an installation as described above, according to which during at least part of the step initial filling of the particle transfer zone, said suction nozzles are actuated to attract the particles present in the transfer zone to its two lateral flanges.
  • said nozzles are actuated alternately so as to attract the particles present in the transfer zone towards one and the other of the two lateral flanges, alternately. Simultaneous operation is nevertheless possible without departing from the invention.
  • the alternating actuation which can incorporate pause periods between nozzle changes, is preferred for its greater simplicity of focus.
  • the pause periods allow the particles to continue to accumulate, thus allowing the particles already present to be pressurized.
  • the transfer zone which extends progressively continues to be fed continuously by other particles, so that the downstream front is maintained. preferentially at the same location on the installation.
  • said temporary retention means take the form of a layer which is progressively deposited on the moving substrate, while the downstream face of the film of ordered particles which it holds moves to the output of said transfer area.
  • the retention layer is deposited on the substrate in the continuity of the deposition of the film of particles, in the same way as this layer of retention was in the continuity of the particle film in the transfer zone, before their deposition.
  • the installation comprises a device 2 for dispensing particles 4, whose size may be between a few nanometers and several hundreds of micrometers.
  • the particles preferably of spherical shape, may for example be silica particles.
  • the particles are silica spheres of about 1 ⁇ m in diameter, stored in solution in the dispensing device 2.
  • the proportion of the medium is about 7 g of particles per 200 ml of solution, here butanol.
  • the particles shown in the figures adopt a diameter greater than their actual diameter.
  • the dispensing device 2 has a controllable injection nozzle 6, about 500 microns in diameter.
  • the installation also comprises a liquid conveyor 10, incorporating an inclined ramp 12 for circulating the particles, and a substantially horizontal transfer zone 14.
  • the upper end of the inclined ramp is designed to receive the particles injected from the dispensing device 2.
  • This ramp is straight, inclined at an angle of between 5 and 60 °, preferably between 20 and 60 °, allowing the particles to be conveyed to the transfer zone 14.
  • a carrier liquid 16 flows on this ramp 12, into the transfer zone.
  • This liquid 16 can also be re-circulated using one or two pumps 18, between the transfer zone 14 and the upper end of the ramp. This is preferably a deionized water, on which the particles 4 can float.
  • the lower end of this same ramp is connected to an inlet of the particle transfer zone 14.
  • This inlet 22 is located at an inflection line 24 showing the junction between the surface of the carrier liquid present on the plane inclined of the ramp 12, and the surface of the carrier liquid present on the horizontal part of the transfer zone 14.
  • the particle inlet 22 is spaced apart from a particle outlet 26 by means of two lateral flanges 28 holding the carrier liquid 16 in the zone 14. These flanges 28, opposite and at a distance from one another , extend parallel to a main direction of flow of the carrier liquid and particles in the installation, this direction being shown schematically by the arrow 30 on the Figures 1 and 2 .
  • Area 14 therefore takes the form of a corridor or an open path at its entrance and exit.
  • the transfer zone 14 is equipped with two suction nozzles 32a, 32b, capable of sucking the particles towards the two flanges 28, as will be described hereinafter. More precisely, at each rim 28 is associated a suction nozzle whose axes 34a, 34b are oriented orthogonally to the direction 30.
  • the nozzles 32a, 32b can be fixed directly on the flanges 28, or on another part of the installation 1.
  • the suction axes 34a, 34b are parallel to the inflection line 24, and at a short distance from that in a top view such as the one shown on the figure 2 , this distance being for example between 0 mm (on the inflection line 24) and 10 mm.
  • the suction axes are preferably positioned at the air / liquid carrier interface.
  • Each nozzle has an inner diameter of the order of 3 to 5 mm.
  • the installation 1 is also provided with a substrate conveyor 36, for putting the substrate 38 in motion.
  • This substrate can be rigid or flexible. In the latter case, it can be set in motion on a roll 40 whose axis is parallel to the outlet 26 of the zone 14, near which it is located. Indeed, the substrate 38 is intended to scroll very closely to the outlet 26, so that the particles escaping from this outlet can be easily deposited on this substrate, via a capillary bridge 42 connecting it to the carrier liquid 16. Alternatively the substrate may be in direct contact with the transfer zone without departing from the scope of the invention. The capillary bridge mentioned above is then no longer required.
  • the width of the substrate corresponds to the width of the zone 14 and its outlet 26.
  • the capillary bridge 42 is provided between the carrier liquid 16 which is located at the outlet 26, and a part of the substrate 38 conforming to the guide / driving roller 40.
  • the axis of rotation of the latter roller may lie in the plane of the upper surface of the carrier liquid retained in the zone 14.
  • the substrate 38 may be in scrolling in the vertical direction, orthogonal to direction 30.
  • These means preferably take the form of a layer 50 of polytetrafluoroethylene (PTFE), with a thickness of between 50 and 100 ⁇ m, floating on the surface of the carrier liquid 16.
  • PTFE polytetrafluoroethylene
  • the layer 50 extends between the two flanges 28, so that no particle can pass to the interfaces. Its downstream end is located at a distance from the substrate 38 and the outlet 26, upstream. Likewise, as mentioned above, its upstream end is at a distance "1" from the inlet 22 and the inflection line 24.
  • the injection nozzle 6 is activated to begin the dispensing of the particles 4 on the ramp 12. This involves implementing an initial step of filling the transfer zone 14, by the particles 4, upstream of the layer 50.
  • the particles dispensed by the device 5 circulate on the ramp 12, then enter the zone 14 in which they disperse, until being retained by the layer 50, as has been schematized on the Figures 5 and 5a .
  • the nozzles 32a and 32b are activated so as to stretch the particle film orthogonally to the direction in which they flow.
  • the nozzle 32b which is activated, the other remaining inactive.
  • the figure 6a shows that at the beginning of suction, convection currents are established towards the associated rim 28. Then, the figure 6a shows that the film is pulled towards the suction nozzle 32b, and stretches laterally, with the particles moving along the layer 50. Therefore, they are organized by causing the decrease of the gaps, and causing the beginning of the ordering in the vicinity of the layer 50, as shown on the figure 6a A flow rate of about 65 ml / min can be applied.
  • the nozzle 32b is then deactivated during a dwell time during which the particles 4 can reorder, as shown in FIG. figure 6b , thanks in particular to the pressure exerted by the particles arriving in the transfer zone.
  • the Figure 6c shows that at the beginning of the suction, convection currents are established in the direction of the other edge 28. Then, the Figure 6c shows that the film is pulled towards the suction nozzle 32a, and stretches laterally, with the particles moving along the layer 50. As a result, the particles continue to organize themselves, leading even further to the decrease of the particles. gaps, and causing further sequencing of the film. A flow rate of the order of 65 ml / min can also be applied.
  • the nozzle 32a is then deactivated during a pause during which the particles 4 can reorder again, as shown in FIG. figure 6d , thanks in particular to the pressure exerted by the particles arriving in the transfer zone.
  • the suction alternation described above can be repeated as many times as necessary, each suction time and each stopping time for example about 15 to 30 s.
  • the activation of the nozzles is normally stopped after the complete filling of the part of the transfer zone 14 situated upstream of the layer 50.
  • the upstream front of particles 54 rises on the ramp 12 so that it is situated at a given horizontal distance "d" from the inflection line 24, as shown on FIG. figure 7 .
  • the distance "d" can be of the order of 30 mm.
  • the particles 4 are perfectly ordered in the transfer zone and on the ramp 12, on which they are automatically ordered, without assistance, thanks to their kinetic energy put to use at the moment of the impact on the front 54.
  • the scheduling is of the type shown on the figure 6d near the layer 50a, namely that the film obtained has, in every point, a so-called "compact hexagonal" structure, in which each particle 4 is surrounded and contacted by six other particles 4 in contact with each other.
  • the speed of displacement of the layer 50 on the surface of the carrier liquid 16 is adapted so that the position of the upstream front 54 of particles remains substantially unchanged.
  • the means for ensuring this displacement are conventional, even if a manual movement could be envisaged, without departing from the scope of the invention.
  • the displacement speed of the layer 50 may be of the order of 1.3 mm / s.
  • the substrate 38 When the downstream end of the layer 50 arrives at the outlet 26, the substrate 38 is set in motion, then the layer 50 is deposited on the same substrate 38 in the manner of the particle film that follows it, by borrowing the capillary bridge 42. This stage of the process has been schematized on the figure 8 .
  • the layer 50 initially extends to the substrate 38, so as to overcome the presence of additional means for its movement to the substrate.
  • the layer 50 can be driven directly by the substrate in scroll, on which it is initially deposited, preferably manually.

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  • Application Of Or Painting With Fluid Materials (AREA)
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Claims (15)

  1. Anlage (1) zur Aufbringung eines Films von geordneten Partikeln (4) auf einem vorbeilaufenden Substrat (38), wobei die Anlage umfaßt:
    eine Transferzone (14), umfassend einen Partikeleingang (22) und einen Partikelausgang (26), die voneinander durch zwei gegenüberliegende laterale Kanten (28) getrennt sind, die eine Trägerflüssigkeit (16) halten, auf der die Partikel treiben,
    wobei die Anlage dazu ausgelegt ist, die Aufbringung, auf dem Substrat (38), des Films von geordneten Partikeln zu ermöglichen, die durch den Partikelausgang (26) entweichen,
    dadurch gekennzeichnet, dass sie ferner eine Mehrzahl von Saugdüsen (32a, 32b) umfaßt, die dazu ausgelegt sind, die in der Transferzone (14) vorhandenen Partikel (4) zu ihren beiden lateralen Kanten (28) hin anzuziehen.
  2. Anlage nach Anspruch 1, dadurch gekennzeichnet, dass sie nur zwei Saugdüsen (32a, 32b) umfaßt, die dazu ausgelegt sind, die in der Transferzone vorhandenen Partikel (4) zu der einen bzw. zu der anderen der beiden lateralen Kanten (28) anzuziehen.
  3. Anlage nach Anspruch 1 oder Anspruch 2, dadurch gekennzeichnet, dass sie eine geneigte Partikelzirkulationsrampe (12) umfaßt, die an dem Eingang der Transferzone angebracht ist und auf der auch die Trägerflüssigkeit (16) zirkulieren kann.
  4. Anlage nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie Mittel (50) zum provisorischen Halten der Partikel (4) in der Transferzone (14) in einem Abstand von dem Substrat (38) umfaßt, wobei diese Haltemittel dazu ausgelegt sind, zu dem Substrat hin verlagert zu werden und hierbei die Partikel festzuhalten.
  5. Anlage nach Anspruch 4, dadurch gekennzeichnet, dass die Mittel (50) zum provisorischen Halten der Partikel die Form einer Schicht aus hydrophobem Material aufweisen, die auf der Oberfläche der Trägerflüssigkeit (16) treibt.
  6. Anlage nach Anspruch 5, dadurch gekennzeichnet, dass die Mittel (50) zum provisorischen Halten der Partikel die Form einer Schicht mit einer Dicke aufweisen, die zwischen einigen Mikrometern und mehreren zehn Mikrometern enthalten ist.
  7. Anlage nach einem der Ansprüche 5 und 6, dadurch gekennzeichnet, dass die Mittel (50) zum provisorischen Halten der Partikel die Form einer Schicht aus Polytetrafluorethylen (PTFE) aufweisen.
  8. Anlage nach einem der Ansprüche 5 bis 7, dadurch gekennzeichnet, dass die Mittel (50) zum provisorischen Halten die Form einer Schicht aufweisen, bei der ein stromabwärtiges Ende ebenfalls in einem Abstand von dem Substrat gelegen ist.
  9. Anlage nach einem der Ansprüche 5 bis 7, dadurch gekennzeichnet, dass die Mittel (50) zum provisorischen Halten die Form einer Schicht aufweisen, bei der ein stromabwärtiges Ende auf dem Substrat gelegen ist.
  10. Anlage nach einem der Ansprüche 5 bis 9, dadurch gekennzeichnet, dass die Mittel (50) zum provisorischen Halten die Form einer Schicht aufweisen, die in der Lage ist, auf das Substrat (38) aufgebracht zu werden.
  11. Anlage nach einem der Ansprüche 4 bis 10, dadurch gekennzeichnet, dass die Mittel (50) zum provisorischen Halten ein stromaufwärtiges Ende umfassen, das in einem Abstand "I" kleiner als 20mm von dem Eingang der Transferzone entfernt gelegen ist.
  12. Verfahren zum Aufbringen eines Films von geordneten Partikeln (4) auf einem vorbeilaufenden Substrat (38) mit Hilfe einer Anlage (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass während wenigstens eines Teils des anfänglichen Schritts des Füllens der Transferzone mit den Partikeln die Saugdüsen (32a, 32b) betätigt werden, um die in der Transferzone vorhandenen Partikel zu ihren beiden lateralen Kanten (28) hin anzuziehen.
  13. Verfahren nach Anspruch 12, dadurch gekennzeichnet, dass die Düsen (32a, 32b) alternierend betätigt werden, derart, dass die in der Transferzone vorhandenen Partikel alternativ zu der einen und der anderen der beiden lateralen Kanten (28) angezogen werden.
  14. Verfahren nach Anspruch 12 oder Anspruch 13, dadurch gekennzeichnet, dass nach der Anbringung der Mittel (50) zum provisorischen Halten der Partikel in der Transferzone in einem Abstand von dem Substrat (38) und nach dem anfänglichen Füllen desjenigen Teils der Transferzone (14) mit Partikeln, der stromaufwärts von den Mitteln (50) zum provisorischen Halten gelegen ist, diese in der Transferzone zu dem Substrat hin verlagert werden und hierbei die Partikel (4) halten.
  15. Verfahren nach Anspruch 14, dadurch gekennzeichnet, dass die Mittel (50) zum provisorischen Halten die Form einer Schicht aufweisen, die progressiv auf dem vorbeilaufenden Substrat aufgebracht wird, während die stromabwärtige Front des Films von geordneten Partikeln (4), die es hält, sich zum Ausgang (26) der Transferzone (14) hin verlagert.
EP20120704426 2011-02-24 2012-02-20 Vorrichtung und verfahren zur abscheidung eines films aus geordnete teilchen auf einem beweglichen substrat Not-in-force EP2678120B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1151516A FR2971956B1 (fr) 2011-02-24 2011-02-24 Installation et procede pour le depot d'un film de particules ordonnees sur un substrat en defilement
PCT/EP2012/052842 WO2012113745A1 (fr) 2011-02-24 2012-02-20 Installation et procede pour le depot d'un film de particules ordonnees sur un substrat en defilement

Publications (2)

Publication Number Publication Date
EP2678120A1 EP2678120A1 (de) 2014-01-01
EP2678120B1 true EP2678120B1 (de) 2015-05-13

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US (1) US9505021B2 (de)
EP (1) EP2678120B1 (de)
ES (1) ES2545224T3 (de)
FR (1) FR2971956B1 (de)
WO (1) WO2012113745A1 (de)

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FR2977810A1 (fr) 2011-07-13 2013-01-18 Commissariat Energie Atomique Installation et procede pour le depot d'un film de particules ordonnees, de largeur reglable, sur un substrat en defilement
FR2985249B1 (fr) 2012-01-02 2014-03-07 Commissariat Energie Atomique Procede de transfert d'objets sur un substrat a l'aide d'un film compact de particules
FR2986722B1 (fr) 2012-02-10 2014-03-28 Commissariat Energie Atomique Procede de transfert d'objets sur un substrat a l'aide d'un film compact de particules, avec une etape de realisation de connecteurs sur les objets
FR2986720B1 (fr) * 2012-02-10 2014-03-28 Commissariat Energie Atomique Procede de depot de particules sur un substrat, comprenant une etape de structuration d'un film de particules sur un convoyeur liquide
FR2986721B1 (fr) 2012-02-10 2014-06-27 Commissariat Energie Atomique Procede de depot d'un film de particules sur un substrat via un convoyeur liquide, comprenant une etape de structuration du film sur le substrat
FR2995228B1 (fr) 2012-09-10 2014-09-05 Commissariat Energie Atomique Procede de formation d'un film de particules sur liquide porteur, avec deplacement d'une rampe inclinee de compression des particules
FR3002800A1 (fr) 2013-03-01 2014-09-05 Commissariat Energie Atomique Procede et appareil de caracterisation d'une surface diffractante.
FR3004259B1 (fr) 2013-04-05 2015-05-15 Commissariat Energie Atomique Procede optique de caracterisation d'une surface diffractante et appareil pour la mise en œuvre d'un tel procede.
FR3005432B1 (fr) 2013-05-13 2015-06-05 Commissariat Energie Atomique Procede de depot d'un film compact de particules sur la surface interieure d'une piece presentant un creux delimite par cette surface interieure
FR3006111B1 (fr) 2013-05-24 2016-11-25 Commissariat Energie Atomique Dispositif de conversion d'energie thermique en energie electrique a molecules thermo-sensibles
FR3011752B1 (fr) * 2013-10-11 2015-12-25 Commissariat Energie Atomique Installation et procede a rendement ameliore de formation d'un film compact de particules a la surface d'un liquide porteur
FR3011751B1 (fr) * 2013-10-11 2015-12-25 Commissariat Energie Atomique Installation et procede a rendement ameliore de formation d'un film compact de particules a la surface d'un liquide porteur
FR3027449B1 (fr) 2014-10-21 2017-10-20 Commissariat Energie Atomique Procede ameliore de realisation d'interconnexions pour circuit integre 3d
FR3044825B1 (fr) 2015-12-02 2018-04-20 Commissariat Energie Atomique Substrat pour agencement pour empilement de cellule photovoltaique en couches minces, agencement associe, et procede de fabrication associe

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AU2001282515A1 (en) * 2000-08-17 2002-02-25 Nano World Projects Corporation Device for performing workings on monolayers of particles or molecules
CA2385911A1 (en) * 2002-05-10 2003-11-10 Nanometrix Inc. Method and apparatus for two dimensional assembly of particles
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FR2959564B1 (fr) 2010-04-28 2012-06-08 Commissariat Energie Atomique Dispositif formant manometre destine a la mesure de pression de fluide diphasique, procede de realisation et reseau fluidique associes

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US9505021B2 (en) 2016-11-29
FR2971956A1 (fr) 2012-08-31
FR2971956B1 (fr) 2013-03-29
US20130330471A1 (en) 2013-12-12
EP2678120A1 (de) 2014-01-01
WO2012113745A1 (fr) 2012-08-30
ES2545224T3 (es) 2015-09-09

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