EP2553269A2

EP2553269A2 - Double diaphragm pump

Info

Publication number: EP2553269A2
Application number: EP11713179A
Authority: EP
Inventors: Thomas SCHÜTZE
Original assignee: Promera GmbH and Co KG
Current assignee: Promera GmbH and Co KG
Priority date: 2010-03-26
Filing date: 2011-03-18
Publication date: 2013-02-06
Anticipated expiration: 2031-03-18
Also published as: US20130101445A1; EP2553269B1; CN102947593B; CN102947593A; WO2011116911A3; WO2011116911A2; DE102010013108A1

Abstract

The invention relates to a diaphragm pump, in which a fluid moves at least one first piston (1) of a first piston/cylinder system (1, 2, 3) to and fro, wherein the first piston (1) is mechanically connected to at least one further hydraulic piston (9), and the hydraulic piston (9) drives at least one diaphragm (M1, M2) by means of a hydraulic medium.

Description

Double diaphragm pump

The present invention relates to a diaphragm pump having at least one membrane.

In membrane pumps, the membrane limits a delivery chamber into which a supply line and an outlet line open. As a rule, check valves in the supply and discharge lines become such

arranged that by moving the membrane back and forth

Initially, the conveying medium can be sucked into the conveying space via the feed line and then be forced out of the conveying space via the outlet line.

So that a continuous pumping is possible, usually two diaphragm pumps are connected in parallel, wherein one sucks the fluid and the other presses out the pumped fluid from its pumping chamber in the same time.

There are also known double diaphragm pumps, in which the

Membranes, which are usually formed as a plate membranes, by means of a common piston-cylinder system or by means of a

CONFIRMATION COPY Electric drive can be adjusted. In rooms in which explosive gases may occur, no electric pumps may be operated or the strict requirements of explosion protection must be taken into account. Here usually pneumatic pumps are used, in which a piston, which with the membranes

is mechanically connected, by means of compressed air in a cylinder is moved back and forth. The compressed air is switched by means of a main valve such that the two working spaces alternately with

Compressed air to be filled. Such a pump is known from US 4,818,191. The separate from the pump room from the membranes chambers are connected by channels with the environment, so that in case of leakage, the fluid can escape from the pump and does not hinder the movement of the membranes. The disadvantage of this pump is that the membranes due to the high pressure in the

Delivery chamber and the pressure prevailing behind the membrane ambient pressure of a high differential pressure load, resulting in rapid wear of the membranes.

A further developed pneumatically driven

Double membrane pump is known from WO2009 / 024619. In this pump, the piston driving the compressed air is simultaneously in the

Room passed behind the membrane. At the same time, the membrane is supported by a plate, which, however, only fully supports the membrane in one dead center. The disadvantage of this pump is that in case of a defect of the membrane, the fluid enters the pneumatic and the valves and thus the entire pump is out of action. The pump can then be repaired, if at all, only with great effort.

A double-chamber diaphragm pump without driven piston is known from DE 32 06 242. A disadvantage of this pump are the large spaces that must be filled after reaching dead center with compressed air, so that the membrane can be moved in the other direction. This requires a lot of compressed air, which increases the maintenance costs of the pump. A similarly constructed pump with The same disadvantages are known from CA 1172904, WO97 / 10902 and US 5,368,452. Even with the pump known from WO2009 / 024619, a disproportionate amount of compressed air is required for the operation of the pump. Also, these pumps are not pressure-translated, so that the delivery pressure is always below the feed pressure.

Object of the present invention is to provide a diaphragm pump, in which the membranes have a long service life and are subjected to low differential pressures and has a good efficiency. This object is achieved with a diaphragm pump having the features of claim 1. Advantageous embodiments of the diaphragm pump according to claim 1 result from the features of the subclaims.

The invention is based on the idea that the diaphragm pump has a first piston-cylinder system whose piston drives at least one hydraulic cylinder. The piston can thereby by means of a fluid, e.g. Compressed air or a liquid medium driven, i. be moved back and forth. As a result, the at least one

Hydraulic piston moves back and forth. The hydraulic piston is in turn arranged in a cylinder and divides this into two working spaces, a first and a second working space. At least one first working space is filled with a hydraulic medium which acts on the membrane of the diaphragm pump. Advantageously, the diaphragm pump is designed as a double diaphragm pump, so that in each case the two

Promote membranes alternately. Advantageously, the first working space is limited in each case by the hydraulic piston and the membrane. However, it is also possible that the work space has a

Connecting pipe with that of the membrane from the pumping room

separated space is connected and so the hydraulic piston moved by the hydraulic fluid acts on the membrane and adjusts it.

The first piston of the first piston-cylinder system is thereby Advantageously driven by compressed air, so that the diaphragm pump can also be used in explosion-proof rooms.

Due to the freely selectable surfaces of the first piston and hydraulic piston, any desired pressure ratio between the driving pneumatic pressure and the delivery pressure of the pump can be adjusted.

Regardless of the delivery pressure of the diaphragm pump, the diaphragms are exposed to a maximum of one differential pressure load (maximum suction power) of one bar, which advantageously results in a long service life of the diaphragms. Advantageously, as the hydraulic medium, an inert liquid is selected for the conveyed medium, so that in the event of a defect in the membrane, the fluid being conveyed is not contaminated. Penetrate in case of failure

Pumped fluid into the first working space, so this does not affect the pump. Advantageously, the second working spaces of the hydraulically acting piston-cylinder systems are connected to each other, so that they act as attenuators by the medium located in these work spaces, which advantageously inert the same

Hydraulic medium as in the first work rooms, is pumped back and forth.

If the pump is designed as a double diaphragm pump, the membranes are advantageously connected to each other by means of a connecting element, which synchronizes the movement of the membranes. This connecting element is not used to drive the membranes. Advantageously, the connecting element at its ends in each case a thread with which it is screwed into the membranes. The screwing can be done directly in the material, in particular rubber, or in an inset in the membrane threaded bushing. Since that

Connecting element transfers no large forces, can usually be dispensed with a threaded bush. A small construction is advantageously achieved when the

driving first piston-cylinder system is arranged between the hydraulically acting piston-cylinder systems. The first piston is rigidly connected by means of piston rods with the two hydraulic pistons, whereby they are adjusted synchronously with him. The

Connecting element of the membranes can advantageously the

pass through tubular piston rods and is mounted in these displaceable. Similarly, the connecting element passes through the hydraulic piston, with correspondingly arranged seals

prevent hydraulic fluid from passing from one working space to another through the piston rods.

Advantageously, the diaphragm pump has at least one device for monitoring the quantity of hydraulic medium present in one and / or several working chambers of the hydraulically acting piston-cylinder systems and / or in their connecting line. Provided

Hydraulic medium escapes and is sucked from a storage container, this is detected by the device and shut down the pump and / or sent an error signal to a higher-level control system. The first piston of the first piston-cylinder system reciprocating fluid, in particular compressed air, is guided by a main valve, which is controlled in particular by the movement of the first piston, alternately into the first and second working space of the first piston-cylinder system. In the working spaces axially or frontally bounding walls of the first piston-cylinder system are each of the first piston before or upon reaching the respective dead center or switching point mechanically operated changeover valves, in particular 3/2-way valves arranged. The switching valves control the main valve switching compressed air. Advantageously unregulated compressed air is used, ie compressed air, which is provided by an external compressed air source available. This pressure is usually higher than that Pressure with which the diaphragm pumps are operated according to the prior art. This will ensure that the

Safe switching of the diaphragm pump according to the invention. This is included

Membrane pumps according to the prior art, in which the

Main valve has only one input for regulated air, often not given, because the regulated pressure to the first piston-cylinder system is often very low.

The first piston mechanically actuates the valve actuators of the change-over valves, the change-over valves being designed in particular as a cartridge valve, i. from the outside in the respective frontally limiting wall of the first piston-cylinder system can be used, in particular screwed, are. This results in a particularly favorable

Construction, as the valves can be replaced without opening the pumping rooms. Also, the main valve is advantageous outside of the housing

Diaphragm pump arranged so that even the main valve can be easily cleaned, repaired or replaced.

Advantageously, the main valve is designed as a 4/2-way valve or as a 5/2-way valve. That the valve control element of the main valve moves alternately back and forth between two end positions. It thus has only two defined positions in the form of end positions. On the way from one end position to the other end position, that is, during the movement, are in a middle area between the

End positions the two working spaces of the first piston-cylinder system connected to each other via the valve control element of the main valve and thus the acquiring working space with the

compressed compressed air prefilled from the transferring working space. Thereafter, the working space, which was pre-filled, filled with regulated air on. The other working space is connected to the valve outlet, so that the remaining working air from the working space can relax via muffler. This results in a better efficiency of the diaphragm pump according to the invention, since less Compressed air is required for the operation of the pump.

Advantageously, the main valve has an input for unregulated compressed air of an external compressed air source, wherein the main valve itself may have a pressure control device for generating regulated compressed air of a certain pressure. About a displaceably arranged in the housing of the main valve valve control element, which is controlled by the switching valves controlled by the compressed air, in particular the

Uncontrolled compressed air, is adjusted, the regulated compressed air is passed alternately into the working chambers of the first piston-cylinder system.

So that the remaining working space in the dead centers of the first

Piston is as small as possible, the axial cylinder walls of the cylinder of the first piston-cylinder system can be advantageously adapted to the shape of the axial walls of the first piston. A planar design of the walls is to be preferred here.

The switching valves may advantageously have throttles, so that the forced out of the respective working space air is braked by the throttle and this advantageously leads to a slowed movement of the valve control element of the main valve from the central region, whereby the phase of pressure equalization between the prestressed and soon To be emptied work space and the next to be filled work space is as long as possible. The throttle is not so strong at the beginning of the movement of the pneumatic piston, so that the valve control element of the main valve at high speed from its end position in the direction of the middle

Area in which the working spaces of the pneumatic cylinder

are shorted, is adjusted.

Each delivery chamber can advantageously via a respective supply channel with a common supply line and / or via one each

Outlet channel with a common pressure line in connection, wherein the supply and / or the pressure line floating is mounted at least one connection region of the pump housing. This advantageously ensures that no mutually occurring stresses at the joints mechanical

Fatigue phenomena occur. Valves, in particular non-return valves, are respectively arranged in the feed channels and in the outlet channels.

It is of course possible that by means of the first piston-cylinder system, which is in particular pneumatically driven by compressed air, a plurality of mutually parallel

Hydraulic piston can be driven. This can be done by means of a

Pneumatic drive more than two membranes, in particular one

Many of two are driven or adjusted for sucking and pressing.

Hereinafter, a possible embodiment of the diaphragm pump, which is designed as a double diaphragm pump, based on

Drawings explained in more detail.

Show it :

Fig. 1: Perspective view of the invention

Diaphragm pump in the form of a double diaphragm pump; FIG. 2 is a sectional view of the diaphragm pump according to FIG. 1; FIG.

Fig. 3: cross-sectional view through the double diaphragm pump

according to Figures 1 and 2;

Fig. 4: partial detail of Figure 3;

Fig. 5: Pneumatic plan for a diaphragm pump according to the invention with a 5/2-way valve as the main valve;

Fig. 6: Pneumatic plan for a diaphragm pump according to the invention with

4/2-way valve as main valve. Figures 1 and 2 show a perspective view of

inventive membrane pump in the form of a

Double diaphragm pump. The double diaphragm pump has a

Housing cover 19 and a cylinder 10 of the hydraulically acting piston-cylinder system 9, 10 receiving housing part 11. The housing part 11 is, as shown in Figure 2, fixed by means of coaxial screws IIa to the axial cylinder wall 3 of the first piston-cylinder system. From the housing cover 19 and the housing part 11, the membrane M is clamped at 22 (see Figures 3 and 4). Housing cover 19 and housing part 11 are connected to each other by means of screws 19a and hold the membrane M in position. The housing cover 19 forms below and above each a receptacle for a check valve 24. The check valves 23, 24 are before screwing the

Housing flanges 25, 27 used on the housing cover 19 in the corresponding recesses of the housing cover 19. additional

Seals prevent the pumped fluid from surrounding the housing

Check valves 23, 24 can penetrate around. The axial walls 3 of the first piston-cylinder system are held by spacers 7 at a distance and connected to each other by means of screws 6. Between the walls 3 is also pressure-tight, the cylindrical

Wall sleeve 2, which forms the cylinder, arranged, with additional seals to ensure the tightness. The screws 6 have a screw head 6a and at its end a thread 6b, with which they are screwed to the one axial wall 3. In the cylinder 2, 3 of the first piston-cylinder system, the first piston 1 is arranged, which is formed by two discs la, lb and the working spaces A and B separated from each other. The discs la, lb are screwed together by means of screws 4. The cylindrical

Wall 2 has on its outer side ribs for absorbing heat from the ambient air to prevent icing of the diaphragm pump. The axial walls 3 also have recesses 3b, which also serve better heat conduction and for stiffening and material savings. The piston 1 has a circumferential Seal lc, which bears sealingly against the inner wall of the cylinder 2.

When assembling the piston 1, the piston stands 8a, 8b are previously pushed through the bores 1d until the collars 8c engage in the corresponding recesses le of the piston discs 1a, 1b. By assembling the piston discs la, lb are the

Piston rods 8a, 8b positively secured to the piston 1.

The piston rods 8a, 8b pass through the bores 3a of the axial walls 3, wherein seals 56 ensure that no compressed air from the working chambers A, B enters the hydraulic chambers H ₂ . With their ends 8 d, the piston rods 8 a, 8 b are sealingly connected to the hydraulic piston by means of screws 60. The piston rods 8a, 8b are formed as tubes in which the connecting element 5 rests displaceably in the form of a rod. The connecting element 5 is screwed with its outer thread having ends 5a in the diaphragm plate 20. The diaphragm plate 20 is formed in the membrane M, in the center 21 thereof.

The hydraulic pistons 9 each have a circumferential seal 12, which abut sealingly on the inner wall of the cylinder wall 10 and the two working spaces Hi, H ₂ separate from each other. The two hydraulic chambers H _{2 of} the two hydraulic piston-cylinder systems are connected to each other via the connecting channels 16, 17 and 18. In the hydraulic piston 9 are each differential pressure valves 13th

arranged. If, when working the pump, the differential pressure between the working spaces Hi and H ₂ exceeds a certain value, opens the differential pressure valve 13 and the differential pressure can be lowered to a predetermined value. The connecting channel 16, 17, 18 can be connected by means of a further connection line, not shown, with a storage container and / or a sensor. If there is now an inflow or outflow of hydraulic medium on the reservoir or the connecting line, this may mean a breakage of the membrane, whereupon a higher-level control system generates an error signal can be sent and / or the diaphragm pump is automatically stopped. This can eg by the force-controlled

Close the supply line supplying the pump with compressed air. The feed channels 28 are connected to one another by means of the feed line 36, wherein the feed line 36 forms with its one end 41 the delivery medium inlet of the pump. The other end of the feed line 36 designed as a tube is screwed in by means of a screw

Plug 34 closed. The supply line 36 is located with its areas 36a floating in the housing flanges 27, wherein seals 39 provide the necessary tightness. The housing flanges 27 have an annular space 40 which encompasses the regions 36a and which extends through an annular space 40

circumferential groove is formed. In the region 36a, the supply line 36 has window-like openings 38, through which the pumped medium passes from the interior 37 of the supply line 36 into the annular space 40 and from there into the feed channel 28.

The outlet channels 26 are connected to each other by means of the pressure line 29, wherein the pressure line 29 forms with its one end 33 the delivery medium outlet of the pump. The other end of the pipe formed as a pressure line 29 is closed by means of a screwed plug 34. The pressure line 29 is located with its areas 29a floating in the housing flanges 25, wherein seals 39 provide the necessary tightness. The housing flanges 25 have an area surrounding the regions 29 a annular space 32, which by a

circumferential groove is formed. In the regions 29 a, the pressure line 29 has window-like openings 31, through which the conveying medium can pass from the annular space 32 into the interior space 30 of the pressure line 29.

In the axial walls 3 switching valves 14 are arranged, which extend with an extension 15 of its valve control members in the working spaces A, B. If the piston 1 reaches its dead center, the respective changeover valve is actuated, whereby compressed air, not shown, to the main valve 50 is passed, and the main valve in turn switches.

The main valve 50 is disposed on the outside of the pump housing, so that a good heat exchange with the ambient air can take place, whereby the risk of icing is reduced. If the diaphragm plate 20 is adjusted by means of the hydraulic piston 9 so that the delivery chamber Fi decreases, the delivery medium located in the delivery chamber F, through the check valve 24 in the

Outlet channel 26 promoted. The check valve 23 is closed during this. Is subsequently in the delivery chamber F, by retraction of the membrane M, increased, so is the now open

Check valve 23 from the supply line 36 fluid into the pumping chamber F, sucked. This is during the intake phase

Check valve 24 closed.

FIG. 5 shows a pneumatic diagram of the diaphragm pump according to FIGS. 1 to 4. The diaphragm pump operated with compressed air has a compressed air inlet 43, which is advantageously arranged on the main valve 50. In or on the main valve 50, the pressure regulating device 45

be arranged, which is connected by means of the connecting line 44 to the input 43. The pressure regulator 45 may be

Proportional valve, which has an adjustment mechanism, e.g. in the form of an adjusting screw, with which a spring for

Pressure setting can be biased. If an unregulated pressure of 7 bar is provided by the external compressed air source (not shown), the regulated pressure of the main valve 50 can be regulated by the pressure regulating device 45 via the connecting line. 5.5 bar are supplied.

The input 43 is connected via connecting lines 48, 49 with the

Changeover valves 14 in conjunction. The switching valves are designed as 3/2-way valves and are connected by means of extending into the working spaces A, B extensions 15 of their valve control members. A spring presses the valve control members in the shown position in which the control lines 52, 53 are not connected to the valve inlet or the connecting line 48, 49.

Once the piston 1, the respective valve control member 15 is adjusted, the switching valve 14 is switched and the unregulated compressed air of the external pressure source switches the main valve 50 to.

The main valve 50 is designed as a 5/2-way valve. In the

shown position, the regulated compressed air passes over the

Connecting line 57 in the working space A. The piston 1 is thus adjusted together with the hydraulic piston 9 to the right. By means of the hydraulic medium located in the hydraulic medium Hi, the right diaphragm, not shown, is now adjusted to the right, whereby its associated pumping space is reduced. The right membrane thus promotes. At the same time, the left diaphragm, also not shown in FIG. 5, draws conveying medium out of the supply line into its delivery chamber. When reaching the right dead center, the right switching valve 14 is connected via the extension 15, so that the main valve 50 is also switched. On the way to the left, the connection of the working space A with the connecting line 47 is first interrupted.

After that, the two workrooms are interconnected

short-circuited, so that the biased compressed air located in the working space B can relax into the working space A. For this purpose, a certain amount of time is available until finally the main valve 50 has completely switched through and regulated compressed air is conducted into the working space B via the connecting line 47, as a result of which the piston 1 is now moved to the left. The remaining not yet relaxed compressed air in the pressure chamber B then relaxes via the valve outputs 51 via the muffler 35 into the environment.

FIG. 6 shows an alternative embodiment in which the

Main valve 50 is designed as a 4/2-way valve. The main valve 50 differs from the main valve shown in Figure 5 only in that only one output 51 is provided. LIST OF REFERENCES:

A, B Working space of the first piston-cylinder system

Mi, M ₂ membrane

1 First piston of the first piston-cylinder system

la, lb piston discs

lc seal

ld bore

le recess for collar 8c

2 cylinders of the first piston-cylinder system

2a Outer cooling fins of the cylinder 2

3 axial cylinder wall of the first piston-cylinder system

4 screws

5 connecting element

5a thread of the connecting element. 5

6 connecting screw

7 spacer sleeve

8a, 8b piston rod

8c collar

9 hydraulic pistons

10 cylinders of the hydraulically acting piston-cylinder system

11 housing part

12 seal

13 differential pressure valve (PHI> PH ₂ )

14 changeover valve

15 valve control member

16, 17, 18 channel / connection line

19 housing cover

20 membrane plates

21 membrane region, in which the diaphragm plate 20 is arranged, 22 clamping region of the membrane M,

23 Check valve in the feed channel (only shown in left chamber)

24 check valve in the outlet channel (only shown in left chamber)

25 Housing flange with outlet channel 26 (outlet housing)

26 exhaust duct

27 Housing flange with feed channel 28 (inlet housing)

28 feed channel

29 pressure line

30 Interior of the pressure line 29

31 Passage opening in the wall of the pressure line 29

32 annulus, which includes the pressure line 29

33 Pump outlet for pumped fluid

34 plugs with screw thread Continuation of the reference list

35 Silencer for emanating the relaxing compressed air

36 supply line

37 Interior of the supply line 36

38 passage opening in the wall of the supply line 36

39 sealing rings

40 annulus, which includes the supply line 36

41 pump inlet for pumped fluid

42 feet

43 Input for uncontrolled compressed air from an external compressed air source

44 connection line

45 Pressure control device in the form of a proportional valve

46 Adjustment mechanism for regulated outlet pressure of

Pressure control device 46

47 connecting line, supplies regulated compressed air to the main valve 50

48, 49 Connecting line for uncontrolled compressed air

50 main valve

51 main valve outlets, which are equipped with silencers 35 in

Connection are

52, 53 control line from the switching valve 14 to the main valve 50th

54, 55 Exit to the outside

56 seal

57 Connecting line to working space A

58 Connecting line to working space B

66 throttle in the switching valve 14th

Claims

P a n t a n s p r e c h e

Diaphragm pump, in which a fluid at least a first piston (1) of a first piston-cylinder system (1, 2, 3) reciprocates, wherein the first piston (1) mechanically connected to at least one further hydraulic piston (9) is, and the

Hydraulic piston (9) by means of a hydraulic medium at least one diaphragm (Mi, M ₂ ) drives, characterized

characterized in that the diaphragm pump is a double diaphragm pump with at least two diaphragms (Mi, M ₂ ), wherein a hydraulic medium moves or drives the diaphragms (Mi, M ₂ ), wherein at least one hydraulic piston (9) moves the hydraulic medium, and that two in each case Membranes (Mi, M ₂ ) by means of a connecting element (5), in particular a rod or a tube, are mechanically connected to each other

Hydraulic piston (9) by means of a hydraulic medium at least one membrane (Mi, M ₂ ) drives.

Diaphragm pump according to claim 1, d a d u r c h

in that the diaphragm pump is a double diaphragm pump with at least two diaphragms (Mi, M ₂ ), wherein a hydraulic medium moves or drives the diaphragms (Mi, M ₂ ), wherein at least one hydraulic piston (9) moves the hydraulic medium. Diaphragm pump according to claim 3, characterized

in that in each case two membranes (Mi, M ₂ ) are mechanically connected to one another by means of a connecting element (5), in particular a rod or a tube.

Diaphragm pump according to claim 1 or 4, d a d u r c h

characterized in that the connecting element (5) with each of its ends (5a) in each case connected to a membrane (Mi, M ₂ ), in particular screwed or pressed into this, is.

Diaphragm pump according to one of the preceding claims, characterized in that a membrane (Mi, M ₂ ) in a membrane space of a housing (11, 19) is arranged, and this in a delivery space (Fi, F ₂ ) and a hydraulic space (Hi) divided.

Diaphragm pump according to claim 6, d a d u r c h

e, that the hydraulic space (Hi) with the first working space of the piston-cylinder system of a hydraulic piston (9), in particular by means of a channel or a pipe, in conjunction, forms a part of the working space or is the working space itself.

Diaphragm pump according to one of the preceding claims, characterized in that compressed air reciprocates the first piston (1) of the first piston-cylinder system (1, 2, 3), wherein a main valve (50), which

is controlled in particular by the movement of the first piston (1), the compressed air alternately in the first and second

Working space (A, B) of the first piston-cylinder system (1, 2, 3) passes.

Diaphragm pump according to one of the preceding claims, characterized in that the first piston-cylinder system (1, 2, 3) between two hydraulically acting piston-cylinder systems (9, 10) is arranged, wherein the first piston (1) with the hydraulic piston (9) via at least one piston rod (8a, 8b), which in particular passes through the first piston (1) and / or is attached to this / are in communication.

10. Diaphragm pump according to claim 9, d a d u r c h

e, that the connecting element (5) is mounted freely displaceable to the first piston (1) and to the hydraulic piston (9), in particular in the piston rod (8a, 8b) is slidably mounted and the two hydraulic piston (9) passes through.

11. Diaphragm pump according to claim 10, d a d u r c h

e, that sealing elements between the connecting element (5) and the hydraulic piston (9) and / or the piston rod (8a, 8b) are arranged such that no

Hydraulic medium along the connecting element (5) from a hydraulic chamber (Hi, H ₂ ) can get into the other hydraulic space.

12. Diaphragm pump according to one of the preceding claims,

characterized in that the hydraulically acting piston-cylinder systems (9, 10) each have a first and a second working space (Hi, H ₂ ), and in each case the first working space (Hi) is part of the hydraulic space, forms this or with this over a channel is in communication, and the second working spaces (H ₂ ) via a connecting line

(16, 17, 18) are in communication with each other.

13. Diaphragm pump according to claim 12, d a d u r c h

characterized in that the second working spaces (H ₂ ) and the connecting line (16, 17, 18) with a

Hydraulic medium are filled.

14. Diaphragm pump according to claim 12 or 13, characterized characterized in that the diaphragm pump

at least one device for monitoring the amount of in one and / or more work spaces (Hi, H ₂ ) of the hydraulically acting piston-cylinder systems (9, 10) and / or in the

Connecting line (16, 17, 18) located hydraulic medium.

15. Diaphragm pump according to claim 14, d a d u r c h

in that the second working spaces (H ₂ ) and connecting lines (16, 17, 18) connecting them to one another via a further connecting line

Hydraulic medium containing storage container are connected, wherein the device is a discharge and / or inflow of

Hydraulic fluid determined by the further connecting connecting line. 16. Diaphragm pump according to one of the preceding claims,

characterized in that at least in the hydraulic spaces (Hi, H ₂ ) located hydraulic medium is inert to the pumped medium.

17. Diaphragm pump according to one of the preceding claims,

d a d u r c h e n c i n e, that everyone

Delivery chamber (Fi, F ₂ ) via a respective feed channel (28) with a common supply line (36) and / or via an outlet channel (26) with a common pressure line (29) is in communication, wherein the feed line (36) and / or the

Pressure line (29) floating on at least one

Connecting region (25) of the pump housing is mounted.

18. Diaphragm pump according to claim 17, d a d u r c h

In each case, a valve (23, 24), in particular in the feed channel (28) and in the outlet channel (25), is provided

Check valve, is arranged.

19. Diaphragm pump according to one of the preceding claims, characterized in that the

Piston surface of the first piston (1), in particular the

Pneumatic piston, greater than or equal to, in particular in a certain ratio, in particular in the ratio 1: 1 to 1:40 to the piston surface of the hydraulic piston (s) (9).

Diaphragm pump according to one of the preceding claims, characterized in that a

Exchange of hydraulic medium from one to the other

Working space (Hi, H ₂ ) of a hydraulically acting piston-cylinder system (9, 10) via a valve (13), in particular overpressure or vacuum valve, when exceeding or falling below a certain pressure difference between the working spaces (Mi, M ₂ ) ,

Diaphragm pump according to one of the preceding claims, characterized in that in the hydraulic piston (9) an overpressure or vacuum valve (13) is arranged which normally shuts off a connection channel extending axially through the hydraulic piston (9).

Diaphragm pump according to one of the preceding claims, characterized in that the axial cylinder walls (3a) of the working spaces (A, B) of the first piston-cylinder system (1, 2, 3) conform to the shape of the axial walls (lc) of the first piston (1c). 1) are adjusted, in particular plan

are formed, such that the remaining working space in the dead centers of the piston (1) is minimal.

Diaphragm pump according to one of the preceding claims, characterized in that in the working spaces (A, B) axially or frontally bounding walls (3) of the first piston-cylinder system (1, 2, 3) each one of the first piston (1) before or upon reaching the respective dead center or switching point mechanically actuated changeover valve (14), In particular, a 3/2-way valve is arranged, wherein the

Change-over valves (14) control the main valve (50) switching compressed air, in particular uncontrolled compressed air.

Diaphragm pump according to claim 23, d a d u r c h

The piston (1) can not be replaced by the piston (1)

Valve actuators of the switching valves (14) mechanically actuated, wherein the switching valves (14) are in particular designed as a cartridge valve, i. from the outside into the frontal side

limiting wall (3) of the first piston-cylinder system (1, 2, 3) used, in particular screwed, are.

Diaphragm pump according to one of the preceding claims, characterized in that the main valve (50) is a 5/2-way valve or 4/2-way valve, in particular in the switching phase, the two working spaces (A, B) of the first piston-cylinder system ( 1, 2, 3) with each other and thus the acquiring working space (A, B) with the

compressed compressed air from the transferring working space (B, A) prefilled.

Diaphragm pump according to one of the preceding claims, characterized in that the main valve (50) has an input (43) for uncontrolled compressed air from an external compressed air source, wherein the main valve (50) itself has a pressure control device (45) for generating regulated compressed air of a certain pressure.

Diaphragm pump according to one of the preceding claims, characterized in that the

Main valve (50) has a valve control member, which is controlled by the switching valves (14) controlled compressed air, in particular uncontrolled compressed air.

Diaphragm pump according to claim 27, characterized in that the valve control member controls the compressed air controlled by the pressure control device (45) and directs it to adjust the first piston (1) into the working chambers (A, B) of the first piston-cylinder system (1, 2, 3). 29. Diaphragm pump according to one of the preceding claims,

That is, the changeover valves (14) have throttles (66).