EP2539491A1 - Verfahren zur herstellung eines verbundkörpers mit einer freitragenden fläche - Google Patents
Verfahren zur herstellung eines verbundkörpers mit einer freitragenden flächeInfo
- Publication number
- EP2539491A1 EP2539491A1 EP09802115A EP09802115A EP2539491A1 EP 2539491 A1 EP2539491 A1 EP 2539491A1 EP 09802115 A EP09802115 A EP 09802115A EP 09802115 A EP09802115 A EP 09802115A EP 2539491 A1 EP2539491 A1 EP 2539491A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- negative mold
- layer
- thickness
- coated
- mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 17
- 238000000151 deposition Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 47
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 18
- 229910052802 copper Inorganic materials 0.000 claims description 18
- 239000010949 copper Substances 0.000 claims description 18
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 239000006228 supernatant Substances 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 10
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000004381 surface treatment Methods 0.000 claims description 5
- 238000005323 electroforming Methods 0.000 claims description 3
- 238000003486 chemical etching Methods 0.000 claims description 2
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 238000002679 ablation Methods 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 59
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 9
- 239000003792 electrolyte Substances 0.000 description 6
- 230000002349 favourable effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000005554 pickling Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000010407 anodic oxide Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/02—Tubes; Rings; Hollow bodies
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/10—Moulds; Masks; Masterforms
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/48—After-treatment of electroplated surfaces
Definitions
- the invention relates to a method for producing a composite body with a cantilevered surface according to the preamble of claim 1.
- Heat exchanger cavities or closed channels with electroformed cover layers are sealed to the outside. In the too
- the object of the invention is to provide a method for producing a composite of at least one cantilevered surface and at least one connected to the surface in a coating process element, wherein a stable connection between the cantilevered surface and the element can be created.
- CONFIRMATION COPY (b) selectively removing a surface of the negative mold to be coated with the at least one cantilevered surface by a defined first thickness so that the at least one element at least partially with a
- Protrusion protrudes from the surface
- a fixed connection of the at least one element to the surface can be produced.
- the surface may have a thickness of only a few tens of microns.
- a high dimensional accuracy of the negative mold and the surface can be achieved.
- the surface of the surface can be processed without affecting the adhesion between the at least one element and the surface.
- the method according to the invention is particularly suitable for connecting one or more thin-walled elements to a film having a comparable wall thickness, for example for joining one or more elements each having a thickness of a few 10 m to a film of comparable thickness.
- a selective removal before the coating can be carried out advantageously by wet chemical means, such as chemical pickling, by electrolytic pickling, by an electrolytic luster and the like, but other methods are conceivable, such as with vacuum methods, especially if only small thicknesses are to be removed, such as such as by sputtering or plasma-assisted etching, or at larger thickness such as sandblasting, glass jets and the like.
- the deposition of the at least one layer can be done by different methods.
- the coating with PVD methods such as
- One or more layers embed the at least one element at its protruding end into the deposited layers.
- a stable connection is made between the at least one element and the surface.
- the one or more layers may be insulating, semiconducting and / or metallic. The person skilled in the art will select a suitable method or a suitable combination of different methods for the particular desired configuration of the composite with regard to layer thickness and material.
- the deposition of the one or more layers on the negative mold can take place by means of electroforming.
- Electroforming enables the well controllable and reproducible deposition of layers with thicknesses in the range of tens of microns.
- the negative mold may be smoothed as a whole prior to selective removal on the surface to be coated, e.g. be over-turned and / or sanded.
- Easy handling of the assembled from several parts negative mold is made possible.
- the elements may have a larger diameter when assembled with the parts of the negative mold and need not be adapted from the outset to the extent of the negative mold.
- the parts can be considerably thicker than the one or more elements and thus ensure a stability of the negative mold, which can therefore be easily machined well.
- the adaptation to a common measure of element (s) and parts occurs when smoothing the
- the selective removal of the negative mold can be carried out by a wet-chemical treatment, such as with an alkaline stain.
- a defined chemical removal of the ablatable regions of the negative mold can take place, wherein the at least one element remains unaffected or at least has only a considerably lower etching rate than the ablatable regions of the negative mold.
- the negative mold can be produced with an oversize relative to a final dimension of the negative mold.
- the surface can be removed by selective removal to the desired final size of the negative mold. The excess can be due to one
- Abtragsrate be set for selective removal, so that the process for different materials and pickling can be easily adapted.
- the surface may have a greater thickness than the projection of the at least one element.
- the supernatant of the at least one element can be eliminated.
- the thickness of the surface may be at least five times greater than the projection of the at least one
- the surface can be formed from a first and a second layer, wherein the first layer has a smaller thickness than the second layer.
- the first layer may be at most half as thick as the second layer.
- the first layer can produce advantageous adhesion with the at least one element.
- the first layer may be formed of the same material as the at least one element.
- the second layer may then be selected, particularly favorable
- the elevation can be removed by over-turning and / or grinding the coated negative mold as a whole. Because of that deposited on the negative mold
- Layer sequence is thicker than the supernatant, the elevation can be removed without the embedding of the at least one element suffers in the coating. It can even be achieved a reflective surface.
- Processing of the surface is advantageously facilitated because the coating is firmly connected to the partially embedded element with the negative mold. According to an advantageous method step, before the galvanic
- a surface treatment to increase the adhesion between the at least one element and the surface done.
- a roughening done or a primer layer can be applied.
- the surface can be polished before removing the negative mold.
- the surface is stabilized by the negative mold because it is firmly connected to the negative mold.
- the removal of the negative mold can take place by selective chemical etching.
- the negative mold can thus also be removed through complex structures of the at least one element, which are not accessible to mechanical processing.
- Negative mold can be removed without removing the at least one element.
- a dyeing step may be followed in which the at least one element is colored, e.g. to have an increased absorption or to achieve a desired color impression.
- the at least one element may be made of copper or a copper-containing component. Copper, for example, is relatively inexpensive, has a high thermal conductivity and can be easily processed, eg
- the negative mold can at least partially made of aluminum. So the negative mold can be made by
- the invention for producing a composite body of at least one cantilevered surface and at least one associated with the surface in a coating process element proposed by the following steps:
- Protrusion protrudes from the surface
- Elevation forms in the region of the supernatant of at least one element
- composite bodies can be provided for a wide variety of purposes, for example for optical components, for decorative applications and the like.
- Reference to an embodiment shown in the drawing, the invention will be described in more detail below. It shows in a schematic representation: an exemplary embodiment of a raw form of a negative mold with protruding elements to be connected to a cantilevered surface;
- the negative mold of Figure 3 coated with a first layer; the negative mold of Figure 4 coated with a second layer; the negative mold of Fig. 5 with a leveled surface of the
- the invention relates to a method for producing a composite body from at least one self-supporting surface and at least one element connected to the surface in a coating process, whereby different method steps are carried out successively.
- Composite has. There is a selective removal of a to be coated with the at least one cantilevered surface of the
- Negative form by a defined first thickness so that the at least one element protrudes at least partially with a supernatant from the surface. Subsequently, a deposition of one or more metallic occurs
- Layers for forming the at least one cantilevered surface with a defined second thickness wherein an elevation in the region of the supernatant of the at least one element is formed. Then there is a leveling of coated surface, wherein the elevation is removed. Finally, there is a selective removal of the negative mold.
- FIG. 1 shows an exemplary refinement of a blank mold of a negative mold 10 with a plurality of elements 20a, 20b, 20c arranged in the negative mold 10, which are denoted overall by 20.
- the negative mold 10 is shown below as a cylinder.
- the negative mold 10 may be e.g. also be designed as a cone with or as a hemisphere or ball.
- the elements 20 are designed as rings that are arranged between parts 10 a, 10 b, 10 c, 10 d of the exemplary cylindrical negative mold 10
- the elements 20 may, of course, be designed differently depending on the purpose, e.g. as a net or only as individual sections instead of as closed rings.
- the rings have e.g. a thickness between 20 and 90 pm, in particular between about 40 to 80 m, e.g. by about 50 ⁇ .
- the parts 10a, 10b, 10c, 10d of the female mold 10 may be made as rings or slices of aluminum, between which the elements 20a, 20b, 20c are alternately inserted to form a stack S in a stacking direction L.
- the parts 10a, 10b, 10c, 10d can be significantly thicker than the elements 20a, 20b, 20c, 20d, about ten times thicker, e.g. be a few millimeters thick.
- the parts 10a, 10b, 10c, 10d have e.g. a diameter d12.
- the elements 20a, 20b, 20c may be made of a different material as the parts 10a, 10b, 10c, 10d e.g. consist of copper.
- Stacking direction L is placed under compressive stress, e.g. is screwed, you get a compact negative mold 10, which can be easily edited.
- Elements 20a, 20b, 20c, in the installed state can project beyond the parts 10a, 10b, 10c, 10d in diameter and are not over-twisted together to a common desired diameter d10 in the next step, as can be seen in FIG.
- a surface 30 Fig. 4 - Fig. 7
- self-supporting surface 30 e.g. a closed sleeve.
- the individual parts (parts 10a, 10b, 10c, 10d and elements 20a, 20b, 20c) can thereby all be brought to the same extent at the same time.
- the elements 20a, 20b, 20c are much thinner than the parts 10a, 10b, 10c, 0d, they can be easily machined.
- the diameter d16 has an excess of the diameter d10 in the next
- FIG. 3 shows the result of the further method step, in which a selective removal takes place by a thickness d14 of a surface 18 to be coated.
- the negative mold 10 of FIG. 2 is shown with abraded surface 18 before
- the diameter d10 of the female mold 10 corresponds to the inner diameter of the cantilevered surface 30 (FIGS. 4-7).
- the surface layer of the thickness d14 of the surface 18 of the female mold 10 to be coated with the later cantilevered surface 30 can be selectively removed, for example by a stain.
- the individual parts 10a, 10b, 10c, 10d of the negative mold are selectively removed on their outer circumference, while the elements 20a, 20b, 20c formed as rings, for example, are not removed and protrude out of the surface 18 with a projection 22.
- the selective removal can be carried out with sodium hydroxide solution.
- the thickness d14 of the removal of the surface 18 may, for example, in the range of 10-20 ⁇ lie.
- the thickness d14 may be e.g. be adapted to a diameter of the individual elements 20a, 20b, 20c.
- the negative mold 10 After removing the thickness d14, the negative mold 10 has the desired outer diameter d10 in the region of the parts 10a, 10b, 10c, and 10d, which finally determines the inner diameter of the surface 30 (FIGS. 4-7), while the elements 20a, 20b, 20c with a defined supernatant 22 survive.
- the diameter of the elements 20a, 20b, 20c was determined by the
- the supernatant 22 is intended to be embedded in the still-to-be-formed surface 30 ( Figures 4-7) and to stably anchor the elements 20a, 20b, 20c therein.
- FIG. 4 shows a first coating step on a detail of the negative mold 10, the negative mold 10 of FIG. 1 being coated with a first layer 32 of thickness d32.
- the first layer 32 may be e.g. consist of copper, which connects particularly well with elements 20 (shown in the section shown by element 20a) made of copper.
- the layer 32 When deposited on the surface 18 to be coated, the layer 32 also overlies the supernatant 22 and forms an elevation 34.
- a thin, e.g. 2-3 ⁇ m thick primer layer e.g. Zinc from a zincate stain, be applied prior to the layer 32.
- the deposition of the layer 32 on the surface 18 to be coated can advantageously be effected by means of electrodeposition.
- Negative mold 10 is immersed in an electrolyte and connected as a cathode. Between the cathode and an anode, such as copper, an electrical potential is applied. After the optional application of a primer, for example, a portion of the layer 32 is deposited at a high current density and the rest of the layer with a lower current density.
- the electrolyte can change. In the case of copper as layer 32 has proved to be advantageous proven to deposit 1/3 of the copper layer of a cyanide electrolyte at about 1 A / dm 2 and 1 -3 V, for example. The further 2/3 of the copper layer can be deposited at 0.5 / dm 2 at about 1 V because of the better scattering from an acidic electrolyte.
- the counterelectrode used is electrolytic copper.
- the negative mold 10 can advantageously be contacted via a thread.
- a second layer 36 having the thickness d36 is deposited on the first layer 32.
- the coated with the first layer 32 negative mold 10 is in a
- Dipped electrolyte and switched as a cathode Between the cathode and an anode, such as nickel, an electrical potential is applied.
- an electrolyte for example, a sulfamate-nickel bath can be used with, for example, 0.5 A / dm 2 at about 1 V voltage at a slightly elevated temperature, for example by 50 ° C.
- sulfur-depolarized nickel has proved favorable.
- the negative mold 10 can advantageously be contacted via a thread.
- the second layer 36 may advantageously be e.g. Made of nickel.
- the projection 22 of the elements 20 (represented by 20a in the section shown) is now deeply embedded in the two layers 32, 36.
- the two layers 32, 36 give a total layer thickness d30v.
- a favorable layer thickness d32 of the first layer 32 is approximately between 5 and 15 ⁇ , preferably between 8 and 12 ⁇ .
- a favorable thickness d36 of the second layer 36 is approximately between 30 and 50 ⁇ m, preferably between 35 and 45 ⁇ m, with an axial thickness of the elements 20 (represented by 20a in the section shown) between e.g. 40 and 80 ⁇ , preferably between 50 and 70 ⁇ .
- Process step a surface treatment in which the elevation 38 is removed, and the negative mold 10, for example, over-turned and / or polished, whereupon the thickness d30 is reached.
- the elevation 38 can be removed virtually completely, so that, for example, a surface 40 which appears to be reflective at least to the naked eye can also be achieved, also in the region of the elements 20 (represented by 20a in the section shown).
- one or more further layers may also be applied in order to achieve a functional layer having a desired layer thickness d30.
- a layer as a protective layer or decorative layer with a small thickness of e.g. 1 -10 pm, e.g. a gold layer, a chromium layer, a silver layer, a decorative colored layer of metal such as titanium nitride or an anodic oxide, or the like.
- FIG. 7 shows a section of a composite body 100 with a cantilevered surface 30 in the form of a sleeve with the thickness d30, in which elements 20 (illustrated in the section shown by 20a) are embedded, as the end product of the method steps described above, in which the negative mold 10 was selectively removed.
- the elements 20 can still in one
- the composite body 100 has an outer surface 40 and an inner surface 42.
- the negative mold 10 can be selectively chemically dissolved. If the items 10a, 10b, 10c, 10d of the negative mold 10 are e.g. Made of aluminum, these can be easily dissolved with sodium hydroxide solution.
- Elements 20 (represented by 20a in the detail shown) of copper remain behind, since they are not attacked by the sodium hydroxide solution.
- a cantilevered sleeve having a wall thickness d30 of, for example, about 50 ⁇ can be produced, which has a smooth surface 40 and inside a complex structure, for example, from elements 20 (shown in the section shown by 20a), which is fixed to the cantilevered surface 30 is connected, and has a comparable thickness.
- d30 of, for example, about 50 ⁇
- Surface finish of the surface 40 can be achieved, which looks at least to the naked eye homogeneous and e.g. when polished surface 40 is mirrored or looks homogeneously dull with a specifically roughened surface 40.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
Description
Claims
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2009/009301 WO2011079850A1 (de) | 2009-12-29 | 2009-12-29 | Verfahren zur herstellung eines verbundkörpers mit einer freitragenden fläche |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2539491A1 true EP2539491A1 (de) | 2013-01-02 |
EP2539491B1 EP2539491B1 (de) | 2014-03-05 |
Family
ID=44246909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09802115.7A Active EP2539491B1 (de) | 2009-12-29 | 2009-12-29 | Verfahren zur herstellung eines verbundkörpers mit einer freitragenden fläche |
Country Status (4)
Country | Link |
---|---|
US (1) | US8741163B2 (de) |
EP (1) | EP2539491B1 (de) |
DE (1) | DE112009005487A5 (de) |
WO (1) | WO2011079850A1 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5854875B2 (ja) * | 2012-02-21 | 2016-02-09 | セイコーインスツル株式会社 | 電鋳部品 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2001998A (en) | 1931-02-02 | 1935-05-21 | Bart Blasius | Method of forming high pressure tanks |
US2761828A (en) * | 1954-08-16 | 1956-09-04 | Univ Leland Stanford Junior | Method of forming internally flanged structures |
US3364548A (en) | 1964-12-08 | 1968-01-23 | Alex A. Marco | Method for producing an electroformed heat exchanger |
US4492020A (en) | 1982-09-02 | 1985-01-08 | Hughes Aircraft Company | Method for fabricating corrugated microwave components |
DE3315407A1 (de) | 1983-04-28 | 1984-10-31 | Messerschmitt-Bölkow-Blohm GmbH, 8000 München | Verfahren zur herstellung von in bauteilen, wie in waermeaustauschern oder raketenbrennkammern, vorgesehenen geschlossenen kanaelen oder sonstigen hohlraeumen |
US6309975B1 (en) * | 1997-03-14 | 2001-10-30 | Micron Technology, Inc. | Methods of making implanted structures |
JP3269827B2 (ja) * | 1997-04-04 | 2002-04-02 | ユニバーシティ・オブ・サザン・カリフォルニア | 電気化学製造のための物品、方法、および装置 |
US6663820B2 (en) * | 2001-03-14 | 2003-12-16 | The Procter & Gamble Company | Method of manufacturing microneedle structures using soft lithography and photolithography |
US9156004B2 (en) * | 2005-10-17 | 2015-10-13 | Stc.Unm | Fabrication of enclosed nanochannels using silica nanoparticles |
US20130019918A1 (en) * | 2011-07-18 | 2013-01-24 | The Regents Of The University Of Michigan | Thermoelectric devices, systems and methods |
-
2009
- 2009-12-29 US US13/517,930 patent/US8741163B2/en active Active
- 2009-12-29 DE DE112009005487T patent/DE112009005487A5/de not_active Withdrawn
- 2009-12-29 EP EP09802115.7A patent/EP2539491B1/de active Active
- 2009-12-29 WO PCT/EP2009/009301 patent/WO2011079850A1/de active Application Filing
Non-Patent Citations (1)
Title |
---|
See references of WO2011079850A1 * |
Also Published As
Publication number | Publication date |
---|---|
US8741163B2 (en) | 2014-06-03 |
DE112009005487A5 (de) | 2012-10-04 |
WO2011079850A1 (de) | 2011-07-07 |
US20120255931A1 (en) | 2012-10-11 |
EP2539491B1 (de) | 2014-03-05 |
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