EP2529601A1 - Miniaturizable plasma source - Google Patents
Miniaturizable plasma sourceInfo
- Publication number
- EP2529601A1 EP2529601A1 EP11704740A EP11704740A EP2529601A1 EP 2529601 A1 EP2529601 A1 EP 2529601A1 EP 11704740 A EP11704740 A EP 11704740A EP 11704740 A EP11704740 A EP 11704740A EP 2529601 A1 EP2529601 A1 EP 2529601A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- coil
- hollow body
- active element
- plasma source
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2240/00—Testing
- H05H2240/10—Testing at atmospheric pressure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/60—Portable devices
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL11704740T PL2529601T3 (en) | 2010-01-29 | 2011-01-28 | Miniaturizable plasma source |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010001395A DE102010001395B4 (en) | 2010-01-29 | 2010-01-29 | Miniaturizable plasma source |
PCT/EP2011/051234 WO2011092298A1 (en) | 2010-01-29 | 2011-01-28 | Miniaturizable plasma source |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2529601A1 true EP2529601A1 (en) | 2012-12-05 |
EP2529601B1 EP2529601B1 (en) | 2015-03-11 |
Family
ID=44148923
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11704740.7A Not-in-force EP2529601B1 (en) | 2010-01-29 | 2011-01-28 | Miniaturizable plasma source |
Country Status (5)
Country | Link |
---|---|
US (1) | US8796934B2 (en) |
EP (1) | EP2529601B1 (en) |
DE (1) | DE102010001395B4 (en) |
PL (1) | PL2529601T3 (en) |
WO (1) | WO2011092298A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010001395B4 (en) | 2010-01-29 | 2013-11-14 | Forschungsverbund Berlin E.V. | Miniaturizable plasma source |
DE102020100872B4 (en) | 2020-01-15 | 2021-08-05 | Ferdinand-Braun-Institut gGmbH, Leibniz- Institut für Höchstfrequenztechnik | Resonator and power oscillator for the construction of an integrated plasma source and their use |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3495125A (en) * | 1968-03-05 | 1970-02-10 | Atomic Energy Commission | Quarter-wave transmission line radio frequency voltage step-up transformer |
BE758571A (en) * | 1969-11-06 | 1971-04-16 | Euratom | HIGH FREQUENCY PLASMA GENERATOR |
US4797597A (en) * | 1986-12-22 | 1989-01-10 | Bostrom Norman A | Microwave ion source |
US4918031A (en) * | 1988-12-28 | 1990-04-17 | American Telephone And Telegraph Company,At&T Bell Laboratories | Processes depending on plasma generation using a helical resonator |
DE4337119C2 (en) * | 1993-10-29 | 1996-10-24 | Forsch Applikationslabor Plasm | VHF plasma source |
US6329757B1 (en) * | 1996-12-31 | 2001-12-11 | The Perkin-Elmer Corporation | High frequency transistor oscillator system |
US6262638B1 (en) * | 1998-09-28 | 2001-07-17 | Axcelis Technologies, Inc. | Tunable and matchable resonator coil assembly for ion implanter linear accelerator |
JP4144095B2 (en) * | 1999-02-04 | 2008-09-03 | ソニー株式会社 | Plasma processing method and plasma processing apparatus for granular material |
WO2001005020A1 (en) * | 1999-07-13 | 2001-01-18 | Tokyo Electron Limited | Radio frequency power source for generating an inductively coupled plasma |
US6304036B1 (en) * | 2000-08-08 | 2001-10-16 | Archimedes Technology Group, Inc. | System and method for initiating plasma production |
US7867457B2 (en) | 2003-06-20 | 2011-01-11 | Drexel University | Plasma reactor for the production of hydrogen-rich gas |
WO2006022453A1 (en) * | 2004-08-27 | 2006-03-02 | National Institute Of Information And Communications Technology, Incorporated Administrative Agency | GaN-BASED FIELD EFFECT TRANSISTOR AND PRODUCTION METHOD THEREFOR |
US7742167B2 (en) * | 2005-06-17 | 2010-06-22 | Perkinelmer Health Sciences, Inc. | Optical emission device with boost device |
US7459899B2 (en) * | 2005-11-21 | 2008-12-02 | Thermo Fisher Scientific Inc. | Inductively-coupled RF power source |
US20080078745A1 (en) * | 2006-09-29 | 2008-04-03 | Zyvex Corporation | RF Coil Plasma Generation |
US8128788B2 (en) * | 2008-09-19 | 2012-03-06 | Rf Thummim Technologies, Inc. | Method and apparatus for treating a process volume with multiple electromagnetic generators |
DE102010001395B4 (en) | 2010-01-29 | 2013-11-14 | Forschungsverbund Berlin E.V. | Miniaturizable plasma source |
-
2010
- 2010-01-29 DE DE102010001395A patent/DE102010001395B4/en not_active Expired - Fee Related
-
2011
- 2011-01-28 WO PCT/EP2011/051234 patent/WO2011092298A1/en active Application Filing
- 2011-01-28 PL PL11704740T patent/PL2529601T3/en unknown
- 2011-01-28 US US13/575,981 patent/US8796934B2/en not_active Expired - Fee Related
- 2011-01-28 EP EP11704740.7A patent/EP2529601B1/en not_active Not-in-force
Non-Patent Citations (1)
Title |
---|
See references of WO2011092298A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE102010001395A1 (en) | 2011-08-04 |
WO2011092298A1 (en) | 2011-08-04 |
US8796934B2 (en) | 2014-08-05 |
US20120313524A1 (en) | 2012-12-13 |
PL2529601T3 (en) | 2015-08-31 |
EP2529601B1 (en) | 2015-03-11 |
DE102010001395B4 (en) | 2013-11-14 |
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