EP2524195A2 - Matériau de support avec une propriété de filtrage mécanique et procédé pour la fabrication d'un matériau de support - Google Patents

Matériau de support avec une propriété de filtrage mécanique et procédé pour la fabrication d'un matériau de support

Info

Publication number
EP2524195A2
EP2524195A2 EP10790391A EP10790391A EP2524195A2 EP 2524195 A2 EP2524195 A2 EP 2524195A2 EP 10790391 A EP10790391 A EP 10790391A EP 10790391 A EP10790391 A EP 10790391A EP 2524195 A2 EP2524195 A2 EP 2524195A2
Authority
EP
European Patent Office
Prior art keywords
region
sensor
carrier material
holding
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10790391A
Other languages
German (de)
English (en)
Inventor
Ralf Schober
Mariusz Koc
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP2524195A2 publication Critical patent/EP2524195A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

Definitions

  • the present invention relates to a carrier material according to claim 1, a sensor unit according to claim 9, and a method for producing a carrier material according to claim 10.
  • ⁇ sensors are used to detect vehicle movements, such as acceleration or yaw rate.
  • the sensors are placed on a support, for example a circuit board, and connected to the vehicle by a mechanical, usually rigid, coupling, for example a screw connection from the circuit board to a housing of the control unit.
  • Analog measured variables in the sensor are digitally converted and made available to an evaluation unit of the control unit.
  • the evaluation unit of the control unit can logically link a plurality of sensor measured variables for executing system functions.
  • the interference signal can be transmitted by a mechanical coupling between the vehicle and the sensor element via a sensor carrier.
  • Current solutions for reducing interference signals make use of mechanically damping materials. Often serves a damping mat, for example of foam, between the vehicle and sensor carrier to reduce an influence of the interference signal to the useful signal by the mechanical coupling. Also, by applying a damping mass between the sensor and the carrier, the mechanical coupling can be changed.
  • the present invention provides a carrier material with a mechanical filter property, wherein the carrier material has the following ranges:
  • a separating region coupled to the at least one holding region and the sensor region, which is arranged between the at least one holding region and the sensor region, the carrier material being arranged in the
  • Separation region for forming a mechanical filter property has a different structure than the carrier material in the holding region and / or in the sensor region.
  • the present invention further provides a sensor unit which has the following features:
  • a sensor element which is arranged in the sensor region on the carrier material and which is designed to detect mechanical movements or vibrations and a mechanical movement or movement
  • the present invention further provides a process for producing a carrier material having a mechanical filter property, the process comprising the following steps:
  • the support plate comprises a holding portion for holding the support plate
  • the invention serves the purpose of reducing (dampening) or avoiding an interference signal arriving at a sensor element. This is achieved by passing the interference signal before it can reach the sensor element, a mechanical filter.
  • the mechanical filter has the task to attenuate an interference signal in a certain frequency range, which is critical for the correct operation of the sensor element, while a useful signal should reach the sensor element as unhindered as possible.
  • a direct advantageous effect of the invention is that an improved ratio of useful signal power to noise power can be achieved by the mechanical filter.
  • the evaluation of the controller can thus be provided a measurement signal with higher accuracy available.
  • smaller demands can be made on the sensor element at the desired constant measurement accuracy, which can lead to the use of a less expensive sensor element.
  • Another important advantage is that interfering signals with frequencies, in which a sensor is particularly sensitive, are avoided during the measured value recording.
  • Sensitivity of the sensor means that the sensor only has to be excited with a small mechanical signal power and frequency to generate spurious signals in a useful band.
  • the interfering signals with new frequencies are generated by nonlinear effects in the sensor element when excited with externally applied vibrations. This can be increase overall disturbance and reduce the ratio of useful signal power to noise power.
  • the output from the sensor to the evaluation and superimposed by an interfering signal useful signal can then be corrupted or even unusable.
  • the invention offers the advantage that an influence on a mechanical transfer function can be achieved even without the aid of additional components, such as foam or damping masses.
  • a mechanical filter effect can be achieved by a suitable choice of recesses in a separating region around the sensor or the sensor region in the carrier material.
  • This solution offers a cost-optimized approach especially for applications in which high demands are placed on a defined mechanical transfer function at low cost.
  • problems with the use of additional materials, such as foam or damping compounds are avoided by aging. Since these materials often change their mechanical properties during a sensor's lifetime, the use of such materials poses a risk of unpredictable system interference. Thanks to a realization of the integrated in a carrier material, such as a printed circuit board, mechanical filter in the form of the separation area can be dispensed with additional materials with aging properties.
  • the invention is based on the recognition that, taking into account the shape, material type and structure of a region of a carrier material, a mechanical filter can be realized.
  • This region of the carrier material which may be referred to as a separating region, is distinguished by a change in the carrier material, for example with respect to the shape, the type of material and / or the structure.
  • the shape may have a rectangular shape, circular shape or a mixed shape of rectangular and circular shape.
  • Material type of separation area made of an identical material as the carrier material in the holding area and / or in the sensor area itself to introduce a structure of the separation area in a simple manufacturing step.
  • the structure may be formed by a recess or one or more openings in the separation area.
  • the separation area is between one
  • One measure of mechanical coupling is a transfer function that is a response to excitation of a mechanical system in a predetermined frequency range.
  • the transfer function (seen from the sensor area) can be dependent on mechanical properties, such as, for example, the shape, the material and / or the structure of the separation area.
  • these mechanical properties can be used to adapt a transfer function to a sensitivity characteristic of a sensor to be mounted in the sensor region.
  • a protective function is necessary if mechanical vibrations could damage the sensor or lead to faulty sensor signals.
  • the mechanical filter helps to filter out sensor-damaging or signal-distorting frequencies.
  • the carrier material in the separation region may have a smaller or a greater thickness than the carrier material in the holding region and / or in the sensor region. Different material thicknesses can lead to different resonance behavior of the whole
  • Carry support material Depending on the design of the different material thicknesses, a transfer function may result.
  • the transfer function can be adapted, for example, to a mechanical environment or to a sensitivity characteristic of a sensor to be arranged in the sensor region of the carrier material, so that such a sensor can supply sensor signals which are hardly or not at all degraded by interference signals.
  • the carrier material may have at least one opening in the separation area.
  • the at least one opening alters the structure of the material in the separation area and can be easily manufactured, for example by a corresponding manufacturing method.
  • a transfer function can be adapted to a sensitivity characteristic of a sensor used in the sensor region.
  • the separating region may comprise partial regions which have different thicknesses of the carrier material. A structuring of the separation region with different thicknesses of the carrier material of a subregion allows a frequency-selective attenuation of an interfering signal or a frequency-selective passing of a useful signal within a subrange.
  • the separation region may surround the sensor region up to at least one transition region, wherein the separation region may be separated by the transition region.
  • the transition region can be made of the same material as the material of the separation region only with a correspondingly changed structure, in order to exert no influence on the transfer function. It can the
  • the transfer function for the sensor region can be adapted flexibly. At the same time, however, a certain stability of the sensor area can be ensured, since in this area the sensor on the
  • Carrier material may be attached and electrically contacted.
  • the separation region may have a rectangular shape and / or completely surround the sensor region.
  • a mechanical coupling of the sensor region to the carrier material can be optimized in such a way that vibrations always have to pass through the separation region in order to reach the sensor region.
  • Such a structured separation region can furthermore be produced very simply and therefore reduces the costs for a corresponding carrier material.
  • the separation region may have a circular shape and completely enclose the sensor region.
  • the circular shape may be advantageous because in such a shape no corners and / or edges occur at which mechanical vibrations can be reflected.
  • the use of a circular shape can make it easier to calculate.
  • the transfer function can be optimized in the circular sensor area, which will achieve maximum attenuation of an interference signal.
  • the separation region may have at least one notch as a structure and / or the separation region may completely surround the sensor region.
  • the notch introduced into the separation region may constitute a region to shield an interference signal originally originating from the carrier material in the holding region from the sensor region. In this case, by means of a position of the notch, a location-selective attenuation of the interference signal can take place.
  • the separation region may be configured to produce a mechanical spring action between the holding region and the sensor region.
  • the transfer function can be defined for the sensor area.
  • the mechanical spring action can be realized, for example, by a mechanical spring made of a different material from the carrier material or, for example, by a meandering structure introduced into the carrier material.
  • the carrier material can be a printed circuit board and have electrical conductor tracks.
  • the formation of the carrier material, the separation region and the sensor region from an identical printed circuit board material can be advantageous in that electrical components are applied to the printed circuit board material and / or a circuit and / or integrated circuits can be arranged on the printed circuit board material.
  • a structural design of the separation area can be performed in a single operation, if the
  • Material of the separation area should be identical to the material of the carrier material. Also, possibly the separation area may be formed by an advantageous conductor track guide on the circuit board.
  • FIG. 1 is a plan view of a section of a carrier material with a mechanical filter property, according to an embodiment of the present invention
  • FIG. 2 is a plan view of a section of a carrier material with a different mechanical filter property, according to an embodiment
  • FIG. 3 shows a signal transmission chain according to an embodiment of the present invention
  • FIG. 5 shows a flow chart of a method for producing a carrier material with a mechanical filter characteristic, according to an exemplary embodiment of the present invention.
  • an exemplary embodiment comprises a "and / or" link between a first feature / step and a second feature / step
  • this can be read such that the embodiment according to one embodiment includes both the first feature / the first feature and the second feature / the second step and according to another embodiment has neither only the first feature / step or only the second feature / step.
  • the carrier material 102 is subdivided into a holding region 104 which corresponds to the cutout, a separating region 106 and a rectangular sensor region 110.
  • a sensor 1 10 including connection contacts is arranged on the sensor area.
  • the separating region 106 completely encloses the rectangular sensor region 110, wherein the separating region 106 effects a mechanical coupling between the holding region 104 and the sensor region 110.
  • the sensor 1 10 can be contacted via electrical lines, not shown, which are guided by the holding area 104 via the separation area 106 to the sensor area 1 10.
  • the carrier material 100 shown in FIG. 1 with a mechanical filter characteristic can be understood as a mechanical filter 106 which is integrated in a printed circuit board 102 used as carrier material 102.
  • the mechanical filter 106 can be realized, for example, by recesses in the separation region 106 on the printed circuit board 102.
  • a filtering effect can be achieved, which can have a direct influence on a noise signal.
  • Fig. 2 shows a plan view of a section of a carrier material 200 without mechanical filter property.
  • a material of the sensor region 110 is identical to a material of the carrier material 1021 10, wherein structuring in the separation region 106 was dispensed with.
  • a arranged on the sensor portion 1 10 sensor 1 10 is here coupled directly to the circuit board 102 and the holding area without mechanical filter. As a result, no interference signals can be advantageously kept away from the sensor.
  • 3 shows a signal transmission chain 300 according to an embodiment of the present invention.
  • Useful signal 304 is supplied via a transmission channel 306 to a sensor 308, which passes on a corresponding electrical output signal to a data processing device, such as a microcontroller of an electrical control unit, 310.
  • the useful signal 304 is superimposed with interference signals 302, for example due to vibrations, which disturb the useful signal 304.
  • the transmission channel is described here on the basis of different transmission functions, which map the transmission behavior of this transmission channel 306. If a mechanical filter is integrated in the transmission channel 306, which represents the mechanical coupling between vehicle and sensor 308, through the separation region described above, the interference signal 302 can be filtered out of the useful signal 304 by means of a transmission function modified by the mechanical filter.
  • FIG. 3 shows by way of example the comparison between a mechanical filter transfer function 312 and a transfer function without a mechanical filter 314. A deviation between the two transfer functions 312, 314 is caused by the mechanical filter of the
  • a useful signal processed by the mechanical filter is supplied to the sensor 308.
  • the sensor 308 detects an incoming signal, such as a mechanical signal, and transforms the incoming signal by means of a response function specific to the sensor 308
  • the output signal of the sensor 308 serves as an input signal for the microcontroller of the electrical control unit 310, which is further processed in the control unit 310.
  • a signal transmission from a vehicle to a sensor 308 is illustrated.
  • the useful and interference signal 304, 302 are superimposed in the vehicle and are passed as an overall signal through a mechanical transfer function 312, 314 to the sensor 308.
  • Non-linearities present in the sensor 308 act on an output signal of the
  • the transfer functions include a transfer function 406 of the sensor, a mechanical filter transfer function 408, and a transfer function 410 without a mechanical filter.
  • the transmission function 406 of the sensor shows two pronounced maxima, wherein a first maximum occurs in a lower frequency range and a second maximum in an upper frequency range.
  • the transfer function 408 of the carrier material with a mechanical filter and the transfer function 410 of the carrier material without a mechanical filter each show a maximum in the amplitude curve, with the maximum of the transfer function 410 of the carrier material without mechanical filter occurring in the upper frequency range superimposing the second maximum.
  • the maximum of the mechanical filter transfer function 408 is shown shifted in a middle, between the upper and lower, frequency range. From the graphical representation 400, a particular situation can be read in particular in the upper frequency range. In this case, an interference signal in the upper frequency range, which is referred to as the sensitive frequency range 412 of the sensor, leads to an excitation of the sensor.
  • the excitation of the sensor may result in a resonance frequency range 412, which corresponds to the upper frequency range, to a deterioration up to unusability of the useful signal. In extreme cases, it could be to
  • Carrier material remain applied to facilitate assembly, for example, in an automatic assembly.
  • the sensor may be connected to the vehicle by other materials.
  • a mechanical coupling is produced in a defined manner.
  • the new coupling structure between carrier and sensor realizes a defined mechanical transfer function 408 with filtering effect.
  • an effect of the mechanical filter can be clarified.
  • the effect of the mechanical filter or its filter effect can be detected by recording the mechanical transfer function 408, 410.
  • a first control device without a mechanical filter is excited on a vibration table.
  • a stimulating vibration is measured with a reference sensor.
  • An additionally mounted reference sensor on the sensor element measures the vibrations occurring at the sensor.
  • an attenuation or a gain can be determined starting from a control unit housing via the carrier material up to the sensor and can be represented as a mechanical transfer function 408, 410. Thereafter, the same control unit is changed with the measures described above.
  • a second controller provided with a mechanical filter is placed thereon
  • a filter function can be calculated from the two present mechanical transfer functions 408, 410.
  • FIG. 5 shows a flow chart of a method 500 for producing a carrier material with a mechanical filter characteristic, according to an exemplary embodiment of the present invention.
  • the method 500 can be used for producing an embodiment shown in FIG. 1.
  • a carrier plate is provided, wherein the carrier plate comprises a holding region for holding the carrier plate.
  • the carrier plate may represent a printed circuit board in one embodiment.
  • a structure of a separation area between the holding area and a sensor area of the carrier plate is introduced, wherein the separation area has a structure other than the holding area and the sensor area to obtain a mechanical filter property.
  • the introduction of a structure on the separation area can be a partially local
  • Removing the carrier material for example in the form of a notch, or a completely local removal of the carrier material, for example in the form of an opening or a meander-shaped structure as a spring element represent.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Filtering Materials (AREA)
  • Catalysts (AREA)

Abstract

L'invention concerne un matériau de support (100, 200) avec une propriété de filtrage mécanique, qui présente au moins une zone de retenue (104) pour retenir le matériau de support (102). En outre, le matériau de support (100, 200) présente une zone de capteur (110) avec des contacts de raccordement de capteur. En outre, le matériau de support (100, 200) présente une zone de séparation (106) accouplée à l'au moins une zone de retenue (104) et à la zone de capteur (110), qui est disposée entre l'au moins une zone de retenue (104) et la zone de capteur (110). En l'occurrence, pour réaliser une propriété de filtrage mécanique, le matériau de support (102) présente dans la zone de séparation (106) une structure autre que le matériau de support (102) dans la zone de retenue (104) et/ou dans la zone de capteur (110).
EP10790391A 2010-01-13 2010-12-06 Matériau de support avec une propriété de filtrage mécanique et procédé pour la fabrication d'un matériau de support Withdrawn EP2524195A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010000848A DE102010000848A1 (de) 2010-01-13 2010-01-13 Trägermaterial mit einer mechanischen Filtereigenschaft und Verfahren zur Herstellung eines Trägermaterials
PCT/EP2010/068943 WO2011085869A2 (fr) 2010-01-13 2010-12-06 Matériau de support avec une propriété de filtrage mécanique et procédé pour la fabrication d'un matériau de support

Publications (1)

Publication Number Publication Date
EP2524195A2 true EP2524195A2 (fr) 2012-11-21

Family

ID=44304714

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10790391A Withdrawn EP2524195A2 (fr) 2010-01-13 2010-12-06 Matériau de support avec une propriété de filtrage mécanique et procédé pour la fabrication d'un matériau de support

Country Status (6)

Country Link
US (1) US20130008250A1 (fr)
EP (1) EP2524195A2 (fr)
JP (1) JP2013517463A (fr)
CN (1) CN102741663A (fr)
DE (1) DE102010000848A1 (fr)
WO (1) WO2011085869A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9250262B1 (en) * 2013-02-01 2016-02-02 Maxim Integrated Products, Inc. Method and apparatus for an integrated isolation mechanical filter with substrate based package
DE102014213217A1 (de) 2014-07-08 2016-01-14 Continental Teves Ag & Co. Ohg Körperschallentkopplung an mit Geberfeldern arbeitenden Sensoren

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3962499B2 (ja) * 1999-01-27 2007-08-22 三菱電機株式会社 半導体加速度センサ及びその製造方法
US20030132726A1 (en) 2001-10-16 2003-07-17 Dohring Mark E. Admittance enhancement in force feedback of dynamic systems
US6918297B2 (en) * 2003-02-28 2005-07-19 Honeywell International, Inc. Miniature 3-dimensional package for MEMS sensors
EP1896802A1 (fr) * 2005-06-15 2008-03-12 Mecel Engine Systems Aktiebolag Dispositif amortissant les vibrations
US20090293618A1 (en) * 2005-08-18 2009-12-03 C & N Inc. Acceleration Sensor Device
DE102006011753B4 (de) * 2006-03-13 2021-01-28 Infineon Technologies Ag Halbleitersensorbauteil, Verfahren zur Herstellung eines Nutzens und Verfahren zur Herstellung von Halbleitersensorbauteilen
DE102006022807A1 (de) * 2006-05-16 2007-11-22 Robert Bosch Gmbh Chipgehäuse mit reduzierter Schwingungseinkopplung
US7706213B2 (en) * 2006-10-23 2010-04-27 Nancy Ann Winfree Mechanical filter for sensors
JP2008224428A (ja) * 2007-03-13 2008-09-25 Denso Corp センサ装置
EP3370069B1 (fr) * 2007-04-02 2020-01-01 Jtekt Corporation Construction de montage de capteur de détection de rotation et unité de moyeu
CN101679019A (zh) * 2007-06-15 2010-03-24 罗伯特·博世有限公司 集成有振动隔离装置的预成型壳体
DE102009001930B4 (de) * 2009-03-27 2018-01-04 Robert Bosch Gmbh Sensorbaustein

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2011085869A2 *

Also Published As

Publication number Publication date
CN102741663A (zh) 2012-10-17
WO2011085869A2 (fr) 2011-07-21
JP2013517463A (ja) 2013-05-16
US20130008250A1 (en) 2013-01-10
WO2011085869A3 (fr) 2011-12-01
DE102010000848A1 (de) 2011-07-14

Similar Documents

Publication Publication Date Title
DE60116725T2 (de) Redundanter inertialer Drehratensensor und -verfahren
DE19910415A1 (de) Verfahren und Vorrichtung zum Abstimmen eines ersten Oszillators mit einem zweiten Oszillator
DE102016117587B3 (de) Schaltungsanordnung mit optimiertem frequenzgang und verfahren zur kalibrierung einer schaltungsanordnung
DE19739903A1 (de) Sensorvorrichtung
DE102008040682A1 (de) Sensoranordnung und Verfahren zum Betrieb einer Sensoranordnung
WO1998027403A1 (fr) Dispositif pour determiner la vitesse de rotation
DE3200529A1 (de) Antiblockiersystem
DE102013216223A1 (de) Universell einsetzbare Steuer- und Auswerteeinheit insbesondere zum Betrieb einer Lambdasonde
WO2003010497A1 (fr) Procede et dispositif de correction de l'erreur dynamique d'un detecteur
WO2014056683A1 (fr) Lecture parallèle d'un capteur analogique par deux unités de commande
EP1050202B1 (fr) Systeme pour proteger des unites fonctionnelles et/ou des groupes fonctionnels electroniques
EP3167253B1 (fr) Découplage de vibration de capteurs
EP2524195A2 (fr) Matériau de support avec une propriété de filtrage mécanique et procédé pour la fabrication d'un matériau de support
DE19921692A1 (de) Anordnung zum Schutz von elektronischen Funktionseinheiten und/oder Funktionsgruppen
DE102011081026A1 (de) Verfahren zur Funktionsüberprüfung eines Inertialsensors und Inertialsensor
DE102012105199A1 (de) Sensoranordnungen zur Detektion der Nähe eines Materials zu einem Mikrowellenelement
EP2745080B1 (fr) Capteur, unité de détection et procédé de fabrication d'une unité de détection
DE202021101831U1 (de) Elektrische Pumpe
DE102004060299A1 (de) Verfahren und Anordnung zur Erfassung von Kenngrößen bei Weg- oder Winkelsensoren
DE102008043203A1 (de) Vorrichtung zum Erfassen einer Frequenz eines Generatorausgangssignals
DE102005034589A1 (de) Anordnung und Verfahren zur richtungssensitiven Erfassung mechanischer Schwingungen
WO2003034081A1 (fr) Procede et dispositif pour deceler un court-circuit sur des lignes d'acheminement de signaux d'un capteur, notamment d'un capteur de cliquetis sur un moteur a combustion interne
DE102016115350A1 (de) Verfahren zum Betreiben einer Messvorrichtung
EP0334988A2 (fr) Détecteur de vibrations
WO2022037993A1 (fr) Procédé de correction d'un décalage et/ou d'une sensibilité d'un second capteur à l'aide d'un premier capteur, et système de capteurs

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20120813

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20151009