EP2486173A4 - Creuset en quartz et son procédé de fabrication - Google Patents

Creuset en quartz et son procédé de fabrication Download PDF

Info

Publication number
EP2486173A4
EP2486173A4 EP10822197.9A EP10822197A EP2486173A4 EP 2486173 A4 EP2486173 A4 EP 2486173A4 EP 10822197 A EP10822197 A EP 10822197A EP 2486173 A4 EP2486173 A4 EP 2486173A4
Authority
EP
European Patent Office
Prior art keywords
manufacturing
same
quartz crucible
crucible
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP10822197.9A
Other languages
German (de)
English (en)
Other versions
EP2486173A2 (fr
Inventor
Il-Soo Choi
Ji-Hun Moon
Bong-Woo Kim
Do-Yeon Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SK Siltron Co Ltd
Original Assignee
LG Siltron Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Siltron Inc filed Critical LG Siltron Inc
Publication of EP2486173A2 publication Critical patent/EP2486173A2/fr
Publication of EP2486173A4 publication Critical patent/EP2486173A4/fr
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/24—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with nitrogen, e.g. silicon oxy-nitride glasses
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
EP10822197.9A 2009-10-06 2010-09-28 Creuset en quartz et son procédé de fabrication Ceased EP2486173A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020090094507A KR101048586B1 (ko) 2009-10-06 2009-10-06 고강도 석영 도가니 및 그 제조방법
PCT/KR2010/006563 WO2011043552A2 (fr) 2009-10-06 2010-09-28 Creuset en quartz et son procédé de fabrication

Publications (2)

Publication Number Publication Date
EP2486173A2 EP2486173A2 (fr) 2012-08-15
EP2486173A4 true EP2486173A4 (fr) 2017-05-31

Family

ID=43822188

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10822197.9A Ceased EP2486173A4 (fr) 2009-10-06 2010-09-28 Creuset en quartz et son procédé de fabrication

Country Status (6)

Country Link
US (1) US20110079175A1 (fr)
EP (1) EP2486173A4 (fr)
JP (1) JP5588012B2 (fr)
KR (1) KR101048586B1 (fr)
CN (1) CN102575377B (fr)
WO (1) WO2011043552A2 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120267280A1 (en) * 2011-04-25 2012-10-25 Glen Bennett Cook Vessel for molten semiconducting materials and methods of making the same
CN103387329B (zh) * 2013-07-30 2016-03-23 湖北菲利华石英玻璃股份有限公司 一种掺氮石英纤维的制备方法
WO2015099001A1 (fr) * 2013-12-28 2015-07-02 株式会社Sumco Creuset en verre de quartz et dispositif de mesure des tensions associé
CN104128988B (zh) * 2014-07-29 2016-09-28 徐州协鑫太阳能材料有限公司 制备石英坩埚的模具及工艺
CN104389014B (zh) * 2014-12-02 2017-04-05 江苏科技大学 一种用于单晶生长的石英坩埚及其制备方法
CN105239159A (zh) * 2015-09-10 2016-01-13 上海超硅半导体有限公司 直拉法生长单晶硅用石英坩埚的设计及制备方法
US10822716B2 (en) * 2016-09-13 2020-11-03 Sumco Corporation Quartz glass crucible and manufacturing method thereof
CN108660506A (zh) * 2017-03-31 2018-10-16 上海新昇半导体科技有限公司 一种坩埚及制造方法
SG11201910063VA (en) * 2017-05-02 2019-11-28 Sumco Corp Quartz glass crucible and manufacturing method thereof
CN109811401A (zh) * 2017-11-20 2019-05-28 上海新昇半导体科技有限公司 一种用于长晶的坩埚装置
CN115231909A (zh) * 2021-04-22 2022-10-25 新沂市中鑫光电科技有限公司 一种石英坩埚气泡层制备方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11209133A (ja) * 1998-01-23 1999-08-03 Mitsubishi Materials Corp 透明シリカガラス体とその製造方法
US20030041623A1 (en) * 1999-12-22 2003-03-06 Waltraud Werdecker Quartz glass crucible and process for the production thereof
US20070240635A1 (en) * 2004-04-29 2007-10-18 Vesuvius Crucible Company Crucible for The Crystallization of Silicon
WO2010010036A2 (fr) * 2008-07-19 2010-01-28 Heraeus Quarzglas Gmbh & Co. Kg Procédé de production de verre de quartz dopé à l'azote et grains de verre de quartz convenant à l'exécution de ce procédé
EP2436658A1 (fr) * 2009-05-26 2012-04-04 Shin-Etsu Quartz Products Co.,Ltd. Récipient en silice et son procédé de production
EP2484813A1 (fr) * 2009-09-09 2012-08-08 Japan Super Quartz Corporation Creuset composite, son procédé de production et procédé de production de cristal de silicium

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08217592A (ja) * 1995-02-17 1996-08-27 Toshiba Ceramics Co Ltd シリコン単結晶製造用石英ルツボ
JPH11130583A (ja) * 1997-10-29 1999-05-18 Nippon Steel Corp シリコン単結晶引き上げ用石英ルツボ及びその製造方法
JP3667515B2 (ja) * 1997-12-05 2005-07-06 東芝セラミックス株式会社 石英ガラスルツボの製造方法
JPH11292685A (ja) 1998-04-03 1999-10-26 Seh America Inc シリコンナイトライド被覆により単結晶シリコン成長用のグラファイトサセプタの寿命を延長するための装置および方法
JP4217844B2 (ja) * 1998-06-18 2009-02-04 ジャパンスーパークォーツ株式会社 複合ルツボとその製造方法および再生方法
TWI221486B (en) * 1998-07-31 2004-10-01 Shinetsu Handotai Kk Quartz glass crucible for pulling silicon single crystal and production process for such
JP4453954B2 (ja) * 2003-02-28 2010-04-21 信越石英株式会社 シリコン単結晶引上げ用石英ガラスルツボの製造方法および該製造方法で製造された石英ガラスルツボ
JP2005255488A (ja) * 2004-03-12 2005-09-22 Komatsu Electronic Metals Co Ltd 石英るつぼおよび石英るつぼを用いた半導体単結晶製造方法
US20070084400A1 (en) * 2005-10-19 2007-04-19 General Electric Company Quartz glass crucible and method for treating surface of quartz glass crucible
JP4716374B2 (ja) * 2006-09-28 2011-07-06 コバレントマテリアル株式会社 シリカガラスルツボ及びシリカガラスルツボの製造方法
CN100540496C (zh) * 2007-12-17 2009-09-16 段其九 一种石英坩埚用石英砂的制备方法
DE102008033946B3 (de) * 2008-07-19 2009-09-10 Heraeus Quarzglas Gmbh & Co. Kg Quarzglastiegel mit einer Stickstoffdotierung und Verfahren zur Herstellung eines derartigen Tiegels
CN101348324A (zh) * 2008-08-27 2009-01-21 常熟华融太阳能新型材料有限公司 用于多晶硅结晶的不透明石英坩埚及其制造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11209133A (ja) * 1998-01-23 1999-08-03 Mitsubishi Materials Corp 透明シリカガラス体とその製造方法
US20030041623A1 (en) * 1999-12-22 2003-03-06 Waltraud Werdecker Quartz glass crucible and process for the production thereof
US20070240635A1 (en) * 2004-04-29 2007-10-18 Vesuvius Crucible Company Crucible for The Crystallization of Silicon
WO2010010036A2 (fr) * 2008-07-19 2010-01-28 Heraeus Quarzglas Gmbh & Co. Kg Procédé de production de verre de quartz dopé à l'azote et grains de verre de quartz convenant à l'exécution de ce procédé
EP2436658A1 (fr) * 2009-05-26 2012-04-04 Shin-Etsu Quartz Products Co.,Ltd. Récipient en silice et son procédé de production
EP2484813A1 (fr) * 2009-09-09 2012-08-08 Japan Super Quartz Corporation Creuset composite, son procédé de production et procédé de production de cristal de silicium

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Week 199941, Derwent World Patents Index; AN 1999-488674, XP002769395 *

Also Published As

Publication number Publication date
JP2013506619A (ja) 2013-02-28
US20110079175A1 (en) 2011-04-07
CN102575377B (zh) 2014-10-29
KR20110037191A (ko) 2011-04-13
WO2011043552A3 (fr) 2011-10-13
JP5588012B2 (ja) 2014-09-10
WO2011043552A2 (fr) 2011-04-14
CN102575377A (zh) 2012-07-11
EP2486173A2 (fr) 2012-08-15
KR101048586B1 (ko) 2011-07-12

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