EP2483559A2 - Multi-stage diaphragm suction pump - Google Patents

Multi-stage diaphragm suction pump

Info

Publication number
EP2483559A2
EP2483559A2 EP10745570A EP10745570A EP2483559A2 EP 2483559 A2 EP2483559 A2 EP 2483559A2 EP 10745570 A EP10745570 A EP 10745570A EP 10745570 A EP10745570 A EP 10745570A EP 2483559 A2 EP2483559 A2 EP 2483559A2
Authority
EP
European Patent Office
Prior art keywords
pump
suction
pumping
pressure
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10745570A
Other languages
German (de)
French (fr)
Other versions
EP2483559B1 (en
Inventor
Erich Becker
Erwin Hauser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KNF Neuberger GmbH
Original Assignee
KNF Neuberger GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KNF Neuberger GmbH filed Critical KNF Neuberger GmbH
Publication of EP2483559A2 publication Critical patent/EP2483559A2/en
Application granted granted Critical
Publication of EP2483559B1 publication Critical patent/EP2483559B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006Micropumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10Adaptations or arrangements of distribution members
    • F04B39/1073Adaptations or arrangements of distribution members the members being reed valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10Valves; Arrangement of valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00Working fluid
    • F05B2210/10Kind or type

Definitions

  • the invention relates to a multi-stage diaphragm suction pump having at least two pump chambers, each having a fluid inlet having at least one inlet valve and a fluid outlet having at least one outlet valve and a suction line connecting the fluid inlets of the pumping chambers, wherein each subsequent pumping space is in each case via at least one Connecting line are connected to each other such that the diaphragm pump on reaching / exceeding a differential pressure in the suction line from a parallel operation of their pumping chambers in an at least also serially operating operation of these pumping rooms passes, and wherein in the inflow and outflow of the at least one connecting line in each case at least a, the subsequent pumping stage opening check valve is interposed.
  • a large flow rate is desired, on the other hand, a good final vacuum.
  • the large flow rate is achieved by parallel connection of the heads, the good final vacuum through multi-stage operation, ie by series connection.
  • a low final pressure is required, which can only be achieved with a multi-stage arrangement.
  • WO 2004/088138 already known a micro-vacuum pump, which has two, each limited by an oscillating pumping diaphragm pump chambers.
  • Each of these pump chambers has a fluid inlet having an inlet valve and a fluid outlet having an outlet valve, one of the fluid inlets the suction chambers connecting the pumping chambers and one, the fluid outlets connecting pressure line is provided.
  • the pump chambers are connected to one another via a connecting line in such a way that the previously known micro-vacuum pump, upon reaching and exceeding a defined differential pressure in the suction line, transitions from a parallel operation of its pump chambers into a series-operating operation of these pump chambers.
  • a check valve which opens for the subsequent pumping stage is interposed in each case.
  • the non-return valves interposed in the connecting line have a size comparable to the inlet and outlet valves of the two pumping chambers. Accordingly, the line section of the connecting line provided between one of the check valves, on the one hand, and the adjacent pump chamber, on the other hand, is dimensioned comparably large. Nevertheless, in order to be able to initially guide the fluid flow in the start phase of a pumping operation via the inlet and outlet valves connected in parallel, a throttle is interposed in the connecting line, which loses its throttling effect only when a corresponding pressure difference and a reduced pumping capacity are reached.
  • the previously known micro-vacuum pump adopts a parallel configuration of its pumping chambers, because the throttle provided in the connecting line causes the system initially to be able to work more easily in parallel because of the still missing obstructions in the air circulation.
  • this parallel operating configuration comes within the range of the final vacuum and the pressure difference in the suction line reaches a maximum, For example, the fluid can flow much more easily through the restrictor located in the connection line, so that it is also configured in a serial operation of their pumping chambers in order to achieve the highest possible ultimate vacuum.
  • the check valves of the previously known membrane pump have a size comparable to the inlet and outlet valves, and that the line sections of the connecting line provided between the check valves have a correspondingly large clear line cross section, so that a correspondingly large line cross section occurs in these line sections large harmful space results, which affects the achievable final vacuum of the prior art membrane suction pump and the switching point between parallel and serial operation negatively affected.
  • a multi-stage diaphragm pump In order to achieve as high a final vacuum as possible in the shortest possible time and in order to approach the optimum switching point between parallel and serial operation, a multi-stage diaphragm pump has also been created, in which the inlet and outlet areas of the connecting line (FIG. en) provided check valves are smaller compared to the inlet and outlet valves of the pump chambers and that these check valves each one adjacent to the adjacent pumping space open line section of the connecting line with a smaller compared to the inlet and outlet valves clear line cross-section is assigned (see 10 2007 057 945 A1). It is clear from a comparison of FIGS. 1 and 2 and the 90 ° sectional illustration in FIG.
  • the connecting line becomes effective only in the region of the optimal switching point, and since the connecting lines only have to handle comparatively low flow rates in this pumping phase, the clear cross section of the connecting lines can be made comparatively small in comparison with the suction line and the pressure line. This also makes it possible to carry out the check valves provided in the at least one connecting line with a very small flow cross section and correspondingly small diameter compared to the suction and pressure valves.
  • the check valves due to the low mass of their movable valve or locking body when closing the suction and pressure valves react quickly and thereby prevent the previously known from DE 10 2007 057 945 A1 diaphragm pump in a transition region of the pressure differences does not or only insufficiently . Since the check valves in each case a leading to the adjacent pumping space line section is assigned, which has a substantially smaller clear line cross-section compared to the inlet and outlet valves, the remaining between a check valve on the one hand and the adjacent pump chamber on the other hand harmful space can be kept so low that the generation of a very low final vacuum is possible. The previously known from DE 10 2007 057 945 A1 diaphragm pump therefore allows the production of a possible with relatively simple technical means low final vacuum in the shortest possible time.
  • the pressure and suction-side openings of the connection lines are provided approximately centrally between the pressure and suction valves of the pump chambers in a line arranged axially parallel to the pivot axis , Since in each pump chamber the working diaphragm which rolls off at the pump chamber wall only reaches the openings of the connecting lines approximately at its dead center, leakage currents can escape via these openings of the connecting lines which adversely affect the performance of these diaphragm pumps.
  • An inventive solution to this problem is in the multi-stage diaphragm pump of the type mentioned in particular that at least in a pump chamber either to improve the suction pressure, the suction-side opening of the at least one connecting line or to improve the pumping speed, the pressure-side opening of the at least one connecting line in the Area of the pump chamber is arranged or approximated to this area, to which the pump chamber associated with this first during a pumping cycle rolls.
  • the pump chambers of the membrane pump according to the invention are connected to one another via connecting lines.
  • the subsequent pumping in the conveying direction pumping chambers also have a suction-side opening, which is associated with a connecting line.
  • suction-side opening of at least one connecting line provided suction-side opening of at least one connecting line in the region of the pump chamber arranged or approximated to this area, in which the pump chamber associated with this first drum during a pumping cycle.
  • the switching from parallel to serial pump operation of the multi-stage diaphragm pump comes about when the suction pressure in the following stage is lower than the discharge pressure in the previous stage.
  • the crank angle of the crank mechanism assigned to the connecting rod must preferably be arranged offset from head to head by 180 °.
  • the lowest intake pressure in the next stage results when the small intake-side opening of at least one connecting line lies exactly in the connecting-rod swing plane.
  • Each position between the zero point and the connecting rod plane results in its own intake pressure. In this way, one can influence the transition of the suction curve of the pump connected in parallel to the suction curve of the pump connected in series.
  • the pumping speed is to be improved, it is also possible, at least in one pumping stage, to arrange the pressure-side opening of the at least one connecting line in the area of the pumping space or to approach that area at which the diaphragm assigned to this pumping space first rolls during a pumping cycle.
  • the pressure-side opening of the connecting line provided in this pump chamber is closed at an early stage by the working diaphragm which rolls on the pump chamber wall, any leakage currents which otherwise lead via the connecting lines can be significantly reduced and the pumping speed can be improved.
  • a preferred embodiment according to the invention provides that each pump chamber of the diaphragm pump is associated with a pivotable in a connecting rod connecting rod and that at least in a pump chamber, the suction side or the pressure side opening of at least one connecting line is provided in the Pleuelschwingebene.
  • An optimization of the pump characteristics is further promoted if the suction-side or the pressure-side opening of the at least one connecting line is arranged in the edge region of the pumping space adjacent to the clamping zone of the membrane.
  • a preferred embodiment according to the invention provides that at least in a pump chamber, the suction-side or the pressure-side opening of the at least one connecting line and the suction valve are arranged approximately on a line extending transversely to Pleuelschwingebene line.
  • Such multi-stage diaphragm suction pumps are often used as vacuum pumps for pumping off moist vapors. Under unfavorable pressure and temperature conditions, condensation may occur in the last and previous stages. This is usually prevented by using a gas ballast valve. Depending on the evaporation properties of the condensate, however, such a gas ballast valve leads to a significant deterioration of the final vacuum.
  • At least one connecting line has a falling line course, in particular between subsequent pumping chambers, and if, for this purpose, the inflow-side line section is arranged higher in comparison with the downstream line section of this at least one connecting line.
  • a designed according to this proposal invention membrane pump is characterized by a continuous evacuation process, although any condensate is constantly blown out by the working gas itself.
  • the Boxer form offers a space-saving design.
  • a preferred embodiment according to the invention therefore provides that the pump stages of the multi-stage diaphragm pump are arranged in pairs in a boxer form.
  • Characterized comes in the second pumping stage, the suction-side opening to lie over the axis, while the pressure-side opening in the third pumping stage can be placed under the axis, so that when lying position of such a boxer pump, a falling connection line is created.
  • a preferred embodiment according to the invention therefore provides that the suction-side opening of the connecting line provided in the second pumping stage is arranged above the crank axle and / or the pressure-side opening of the connecting line provided in the third pumping stage is below the crank axle.
  • the cross-section of the connecting lines between the comparatively small-dimensioned check valves should be designed so that the gas velocity occurring therein is limited to Blow out the condensate is sufficient. In case of falling or horizontal arrangement of the connecting lines, this may lead to the lowest effective gas velocity.
  • the connecting lines have a line diameter which is equal to or less than half the clear line cross section of the pressure or suction lines leading to the pressure or suction valves.
  • the membrane suction pump has four pumping chambers and / or is designed in four stages.
  • FIG. 1a shows a multi-stage diaphragm suction pump in a schematic plan view, wherein the pump stages of this suction pump are connected to one another via connecting lines which have suction and pressure-side openings leading to the pump chambers,
  • Fig.1b membrane suction pump from Fig.1a in a schematic tables representation of their pumping rooms, wherein in the pump chambers, the arrangement of the pressure and suction valves and the pressure and suction ports of the
  • FIGS. 1 a and 1 b shows the membrane suction pump of FIGS. 1 a and 1 b in a schematic side view with a view of the drive motor
  • FIG. 2a shows the multi-stage diaphragm suction pump from FIG. 2a in a schematic representation of their pumping chambers, wherein the pressure-side openings of the connecting lines in the pump chambers are staggered compared to the arrangement shown in FIG. 1b in such a way that promotes high pumping speed becomes,
  • FIGS. 2 a and 2 b shows the diaphragm suction pump from FIGS. 2 a and 2 b in a schematic side view with a view of the drive motor
  • FIG. 3a shows a configured according to the prior art multi-stage diaphragm suction pump in a schematic plan view
  • FIG. 3a shows the diaphragm suction pump of Figure 3a in a schematic representation of their pumping rooms, wherein in the pump chambers, the arrangement of the pressure and suction valves and the pressure and suction side openings of the connecting lines are shown and wherein the suction and pressure side openings of between the connecting stages provided on the pump stages are arranged practically on a line lying between the suction and the pressure valve,
  • 3 c shows a schematic side view of the drive motor, the curve of suction pressure and pumping speed in the diaphragm pumps shown in Fig.1a to 1c, 2a to 2c and 3a to 3c, a multi-stage diaphragm suction pump in a schematic plan view, a diaphragm suction pump in a schematic representation of their pumping chambers with a with FIG.
  • FIG. 3b comparable arrangement of the suction and pressure valves and the suction and pressure side openings of the connecting lines, a diaphragm suction pump in a schematic representation of their pumping chambers, the arrangement of the suction and the pressure valves and the suction and pressure side openings of the connecting lines of FIG 1b corresponds to a membrane suction pump in a schematic representation of their pump chambers, the arrangement of the suction and pressure valves and the suction and pressure side openings of the connecting lines of the arrangement shown in Fig.2b corresponds, a multi-stage diaphragm suction pump in one Side view overlooking the drive motor, a e for blowing out the condensate possibly occurring in the subsequent pumping rooms particularly advantageous arrangement of provided between the pumping stages connecting lines in a standing Boxerform trained Membra suction pump in a schematic plan view ( Figure 6a) and in a schematic representation of their pumping chambers ( Figure 6b), the arrangement of the pressure and suction valves and the suction and pressure side openings of the connecting lines
  • Fig.9 a for blowing out in the following Pump chambers possibly occurring condensate particularly advantageous arrangement of provided between the pumping stages connecting lines of a lying in a lying Boxer form diaphragm suction pump in a schematic side view ( Figure 9a) and in a rotated by 90 ° schematic side view ( Figure 9b),
  • FIG. 10 shows a diaphragm suction pump comparable to FIGS. 9a and 9b in a schematic side view (FIG. 10a) and in a side view rotated by 90 ° (FIG. 10b), wherein the pump stages of this diaphragm suction pump have differently arranged connections - lines are connected to each other, and
  • FIG. 11 shows a schematic comparison of the clear cross section of the connection lines provided between the pumping stages, on the one hand, and the inlet or outlet ducts leading to the suction valve or to the pressure valve, on the other hand.
  • FIGS. 1 to 3 and 5 to 10 show various embodiments of a multi-stage membrane suction pump 10, 100.
  • the pump embodiments 10, 100 shown here each have four pump chambers 1, 2, 3 and 4, which are arranged in pairs in a boxer form.
  • Each pump chamber 1, 2, 3, 4, 4 of these pump designs has a respective fluid inlet 6, which has an inlet valve, and a fluid outlet 7, which has an outlet valve.
  • the fluid inlets 6 of the pump chambers 1, 2, 3, 4 are connected via a common suction line.
  • stepwise successive pumping chambers 2, 3, 4 are each via a connecting line 8, 9, 11 connected to one another in such a way that the pump designs 10, 100 shown here, upon reaching or exceeding a differential pressure in the suction line, pass from a parallel operation of their pumping chambers 1, 2, 3, 4 into at least serial operation of these pumping chambers 1, 2, 3, 4 ,
  • at least one check valve opening to the subsequent pump stage is interposed in the inflow and outflow regions of the connecting lines 8, 9, 11, respectively.
  • the check valves and provided in each pump chamber pressure and suction valves are controlled by the pressure differences of the medium to be delivered.
  • the check valves provided in the inflow and outflow regions of the connecting lines 8, 9, 11 are smaller in comparison with the inlet and outlet valves of the pump chambers 1, 2, 3, 4, wherein these check valves are each one assigned to the adjacent pumping space open line section of the connecting line with a smaller compared to the inlet and outlet valves clear line cross-section.
  • the diaphragm pumps shown here have in their, the pump chambers 1,2,3,4 interconnecting connecting lines 8,9,11 both inflow and outflow check valves on, compared to the inlet and outlet valves of these pump chambers 1,2,3 , 4 are much smaller dimensions.
  • the check valves due to the low mass of their movable valve or locking body when closing the suction and pressure valves react quickly and thereby prevent the pumps shown here in a transition region of the pressure differences do not or only insufficiently. Since the check valves each associated with the adjacent pumping space line section is assigned, which has a much smaller clear line cross-section compared to the inlet and outlet valves, the remaining between a check valve on the one hand and the adjacent pump room remaining harmful space can be kept so low that the generation of a very low final vacuum is possible.
  • the pump designs shown here therefore allow with comparatively simple technical means to generate the lowest possible final vacuum in the shortest possible time.
  • FIGS. 3a to 3c and in FIG. 5b pump embodiments are shown, which essentially correspond to the hitherto known state of the art with regard to the arrangement of the openings in the pump space leading to the connecting lines.
  • the pressure and the suction side openings of the connecting lines are provided approximately centrally between the pressure and the suction valves of the pump chambers in an axially parallel to Pleuelwindachse arranged line in the prior art.
  • the pump designs shown in FIGS. 3 a to 3 c and 5 b have a comparatively low suction pressure and at the same time a comparatively low suction capacity.
  • FIG. 3c is indicated that the pressure and suction side openings of the at least one connecting line are arranged on a transverse to the connecting rod pivot plane center line L. Comparing FIG. 1 c with FIG. 3 c, it becomes clear that the arrangement of the suction-side opening of the at least one connecting line to improve the suction pressure out of the center line L oriented at top dead center transversely to the connecting rod pivot plane, for example, by about -45 ° in the direction can be rotated to the region of the pumping space in which the membrane associated with this pumping space first rolls during a pumping cycle. This area is marked in Figure 3c with "B" and "C". By contrast, it is clear from a comparison of FIGS.
  • the arrangement of the pressure-side opening of the at least one connecting line out of the center line L oriented at top dead center transversely to the connecting rod pivot plane preferably out by approximately + 45 ° in the direction of the region of Pumping space can be rotated, in which the associated pump chamber first rolls during a pumping cycle.
  • the desired benefits can already be achieved if at least in the pump room the second in the conveying direction Pumping step to improve the suction pressure, the suction-side opening of the at least one connecting line is rotated or if the pressure-side opening is rotated at least in the pump chamber of the first pumping stage in the conveying direction to improve the pumping speed.
  • the pump embodiments 10 illustrated in FIGS. 1, 2, 5c, 5d, 7, 8, 9 and 10 are characterized by pump characteristics optimized with regard to their suction pressure or their pumping speed.
  • the suction-side opening 12 of the at least one connecting line 8, 9, 11 is arranged in the region of the pump chamber or approximates this region at which the latter Pumping assigned diaphragm pumping during a pumping cycle first.
  • the suction-side opening 12 is thus offset from the pump longitudinal center plane, preferably by approximately 45 ° in the direction of the region of the pump chamber 2, 3, 4, and thus arranged in the hemisphere of the pumping space 2, 3, 4 into which the pump chamber faces The diaphragm is rolled over first during a pumping cycle.
  • the crank angle of the crank mechanism assigned to the connecting rod must preferably be arranged offset from head to head by 180 °. The closer the small suction-side opening 12 of a connecting line 8, 9 or 11 now lies in the connecting-rod swing plane, specifically on the side of the sealing space on which the connecting rod moves upwards through the Tilting movement of the connecting rod is deflected in the direction of rotation and by the proximity to the Pleuelschwingebene, the lower the suction pressure results.
  • the lowest suction pressure in the next stage results when the small suction-side opening 12 of at least one connecting line 8, 9, 11 lies exactly in the connecting-rod swing plane.
  • Each position between the zero point and the connecting rod plane results in its own intake pressure.
  • an influence is already possible if only in one of the pump stages 2, 3, 4 the arrangement of the suction-side opening 12 in the mentioned direction is changed.
  • the process begins at the first pumping stage 1 and continues, gradually over the other heads and pumping stages 2,3,4.
  • the transitional region in the course of the curve can be influenced by suction pressure and pumping speed.
  • the pumping speed should instead be improved.
  • the pressure-side opening 10 of the at least one connecting line 8, 9, 11 is arranged in the area of the pump space 1, 2, 3, 4 or approximates this area, at which the pump space 1 thereof , 2,3,4 associated membrane during a pumping cycle first rolls.
  • the pressure-side opening 13 is therefore offset from the pump longitudinal center plane preferably approximately at 45 ° in the direction of the region of the pumping space and thus arranged in the hemisphere of the pumping space, in which the diaphragm associated with this pumping space first rolls during a pumping cycle.
  • FIGS. 4, 5d and 8 also shows the curve profile of suction pressure and pumping speed in the case of the pump designs shown in FIGS. 1,5c, 7, 9 and 10 on the one hand and in the pump designs illustrated in FIGS. 2, 5d and 8 on the other hand. While the curve progression indicated by "-45 ° / + 45 °" of the pump designs shown in FIGS. 1, 5, 7, 9 and 10 is characterized by an improved, namely additionally reduced, suction pressure, the curve "+ 45 ° / -. 45 ° "marked curve of the pump designs shown in Figures 2, 5d and 8 on an improved pumping speed.
  • the pressure and the suction-side openings 12,13 of the at least one connecting line 8, 9,11 and in the Fluid inlet 6 provided suction valve arranged approximately on a line extending transversely to Pleuelschwingebene line.
  • the diaphragm suction pumps 10, 100 shown here can often also be used as vacuum pumps for pumping off moist vapors. However, under unfavorable pressure and temperature conditions, condensation may occur in the last and preceding stages 2, 3, 4. In parallel operation of the membrane suction pumps 10, 100, the maximum discharge pressure is regularly higher than the evaporation pressure of the condensate. The condensate therefore has no influence on the evacuation process. In series operation of such membrane suction pumps, however, the final pressure of the pump often falls below the evaporation point of the condensate, so that the final pressure can not be achieved due to the back expansion of the condensate.
  • At least one connecting line 8, 9, 10 is in particular configured between subsequent pump chambers 2,3,4 with a falling line, for which the inflow-side line section 8,9,11 is higher compared to the downstream line section of the connecting lines.
  • this falling arrangement of the at least one, in particular between subsequent pump chambers 2,3,4 provided connecting line 8,9,11 blowing out the condensate possibly occurring in the subsequent pump chambers is facilitated and the pump characteristics of the diaphragm suction pumps shown here in terms of their pumping speed additionally favored.
  • the condensate occurs regularly in the vicinity of the atmospheric pressure and thus usually in the last three stages of the series-connected pump chambers of the multi-stage diaphragm suction pumps.
  • the membrane suction pumps shown here are characterized by a continuous evacuation process, although any condensate is constantly blown out by the working gas itself.
  • suction openings 12 of the connecting lines 8, 9, 11 in the direction of Pleuelschwingebene and on the side of the head, in which the connecting rod at Upward stroke is deflected by the tilting movement in the direction of rotation, be arranged if one seeks to optimize the suction curve in terms of suction pressure by changing the switching pressures by means of a staggered arrangement of provided in the pump chamber 1,2,3,4 openings of the connecting lines 8, 9, 11 , Characterized comes in the second pumping stage 2, the suction-side opening 12 to lie over the axis, while the pressure-side opening in the third pumping stage 3 can be placed under the axis, so that when lying position of such a boxer pump, a falling connection line is created.
  • the connecting line 8 is arranged horizontally between the second and third pumping stages 2, 3, while the connecting line 9 is arranged between the third and the fourth Pumping stage 3, 4 is arranged falling.
  • An embodiment is preferred in which the suction-side opening 1 2 of the connecting line provided in the second pumping stage 2 is arranged above the crank axle and / or the pressure-side opening of the connecting line provided in the third pumping stage 3 below the crank axle (FIGS. 7b, 8b) ,
  • FIG. 11 schematically illustrates that the cross section d of the connecting lines 8, 9, 11 between the relatively small non-return valves should be designed so that the gas velocity occurring therein is sufficient to blow out the condensate.
  • the connecting lines of the pump embodiments shown here therefore have a line diameter d, which is equal to or less than half of the clear line cross-section D of the leading to the pressure or suction valves pressure or suction lines.
  • the lowest effective gas velocity is achieved with falling or horizontal arrangement of the connecting lines 8, 9, 1 1.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention relates to a multi-stage diaphragm suction pump, comprising at least two pump chambers, each having a fluid inlet having at least one inlet valve, and a fluid outlet having at least one outlet valve, and a suction line, which connects the fluid inlets of the pump chambers. Consecutive pump chambers are connected to each other by means of at least one connection line such that, when a differential pressure in the suction line is reached/exceeded, the diaphragm pump changes from parallel operation of the pump chambers thereof to an operating mode of said pump chambers that is at least also serial. At least one check valve, which opens to the downstream pump stage, is interposed in each of the inflow and outflow regions of the at least one connection line. In order to optimize the pump characteristic of such a diaphragm suction pump, according to the invention at least in one pump chamber, either in order to improve the intake pressure the suction-side opening of the at least one connection line, or in order to improve the suction capacity the pressure-side opening of the at least one connection line, is disposed in the region of the pump chamber, or in the vicinity of the region of the pump chamber, on which the diaphragm associated with said pump chamber rolls off first during a pump cycle. In addition, or instead, according to a further embodiment at least one connection line, in particular between successive pump chambers, has a descending line progression and, for this purpose, compared to the outflow-side line segment, the inflow-side line segment of said at least one connection line is arranged at a higher level.

Description

Mehrstufige Membran-Saugpumpe  Multi-stage membrane suction pump
Die Erfindung betrifft eine mehrstufige Membran-Saugpumpe mit mindestens zwei Pumpräumen, die jeweils einen, wenigstens ein Einlassventil aufweisenden Fluideinlass und einen, zumindest ein Auslassventil aufweisenden Fluidauslass haben, sowie mit einer die Fluideinlässe der Pumpräume verbindenden Saugleitung, wobei einander nachfolgende Pumpräume jeweils über mindestens eine Verbindungsleitung derart miteinander verbunden sind, dass die Membranpumpe bei Erreichen / Überschreiten eines Differenzdruckes in der Saugleitung von einem parallel arbeitenden Betrieb ihrer Pumpräume in einen zumindest auch seriell arbeitenden Betrieb dieser Pumpräume übergeht, und wobei im Einström- und im Ausströmbereich der mindestens einen Verbindungsleitung jeweils wenigstens ein, zur nachfolgenden Pumpstufe öffnendes Rückschlagventil zwischengeschaltet ist. The invention relates to a multi-stage diaphragm suction pump having at least two pump chambers, each having a fluid inlet having at least one inlet valve and a fluid outlet having at least one outlet valve and a suction line connecting the fluid inlets of the pumping chambers, wherein each subsequent pumping space is in each case via at least one Connecting line are connected to each other such that the diaphragm pump on reaching / exceeding a differential pressure in the suction line from a parallel operation of their pumping chambers in an at least also serially operating operation of these pumping rooms passes, and wherein in the inflow and outflow of the at least one connecting line in each case at least a, the subsequent pumping stage opening check valve is interposed.
Beim Evakuieren zum Beispiel eines Autoklaven, ist einerseits eine große Förderleistung erwünscht, andererseits ein gutes Endvakuum. Die große Förderleistung wird durch Parallelschaltung der Köpfe erreicht, das gute Endvakuum durch mehrstufigen Betrieb, also durch Serienschaltung. Bei vielen Anwendungen, vor allem im Laborbereich wird ein niedriger Enddruck erforderlich, der nur mit einer mehrstufigen Anordnung erzielt werden kann. Aus der WO 2004/088138 kennt man bereits eine Mikro-Vakuum- pumpe, die zwei, durch jeweils eine oszillierende Pumpmembran begrenzte Pumpräume hat. Jeder dieser Pumpräume hat einen, ein Einlassventil aufweisenden Fluideinlass und einen, ein Auslassventil aufweisenden Fluidauslass, wobei eine die Fluideinlässe der Pumpräume verbindende Saugleitung und eine, die Fluid- auslässe verbindende Druckleitung vorgesehen ist. Die Pumpräume sind über eine Verbindungsleitung derart miteinander verbunden, dass die vorbekannte Mikro-Vakuumpumpe bei Erreichen und Über- schreiten eines festgelegten Differenzdruckes in der Saugleitung von einem parallel arbeitenden Betrieb ihrer Pumpräume in einen seriell arbeitenden Betrieb dieser Pumpräume übergeht. Sowohl im Einströmbereich als auch im Ausströmbereich der Verbindungsleitung ist jeweils ein, zur nachfolgenden Pumpstufe öffnendes Rückschlagventil zwischengeschaltet. Um den mit der Herstellung der vorbekannten Membran-Saugpumpe verbundenen Aufwand zu reduzieren, weisen die in die Verbindungsleitung zwischengeschalteten Rückschlagventile eine mit den Einlassund Auslassventilen der beiden Pumpräume vergleichbare Größe auf. Dementsprechend ist auch der zwischen einem der Rückschlagventile einerseits und dem benachbarten Pumpraum andererseits vorgesehene Leitungsabschnitt der Verbindungsleitung vergleichbar groß dimensioniert. Um dennoch in der Startphase eines Pumpvorganges den Fluidstrom zunächst über die parallel geschalteten Einlass- und Auslassventile führen zu können, ist in die Verbindungsleitung eine Drossel zwischengeschaltet, die erst bei Erreichen einer entsprechenden Druckdifferenz und einer verminderten Pumpleistung ihre drosselnde Wirkung verliert. When evacuating, for example, an autoclave, on the one hand a large flow rate is desired, on the other hand, a good final vacuum. The large flow rate is achieved by parallel connection of the heads, the good final vacuum through multi-stage operation, ie by series connection. In many applications, especially in the laboratory, a low final pressure is required, which can only be achieved with a multi-stage arrangement. From WO 2004/088138 already known a micro-vacuum pump, which has two, each limited by an oscillating pumping diaphragm pump chambers. Each of these pump chambers has a fluid inlet having an inlet valve and a fluid outlet having an outlet valve, one of the fluid inlets the suction chambers connecting the pumping chambers and one, the fluid outlets connecting pressure line is provided. The pump chambers are connected to one another via a connecting line in such a way that the previously known micro-vacuum pump, upon reaching and exceeding a defined differential pressure in the suction line, transitions from a parallel operation of its pump chambers into a series-operating operation of these pump chambers. Both in the inflow region and in the outflow region of the connecting line, a check valve which opens for the subsequent pumping stage is interposed in each case. In order to reduce the effort associated with the production of the previously known membrane suction pump, the non-return valves interposed in the connecting line have a size comparable to the inlet and outlet valves of the two pumping chambers. Accordingly, the line section of the connecting line provided between one of the check valves, on the one hand, and the adjacent pump chamber, on the other hand, is dimensioned comparably large. Nevertheless, in order to be able to initially guide the fluid flow in the start phase of a pumping operation via the inlet and outlet valves connected in parallel, a throttle is interposed in the connecting line, which loses its throttling effect only when a corresponding pressure difference and a reduced pumping capacity are reached.
Zu Beginn des Saugvorganges nimmt die vorbekannte Mikro-Vakuumpumpe eine parallel arbeitende Konfiguration ihrer Pumpräume an, weil die in der Verbindungsleitung vorgesehene Drossel bewirkt, dass sich das System aufgrund der noch fehlenden Behin- derungen in der Luftzirkulation anfänglich leichter parallel arbeitend ausbilden kann. Sobald diese parallel arbeitende Konfiguration in den Bereich des Endvakuums kommt und die Druckdifferenz in der Saugleitung damit ein Maximum erreicht, kann das Fluid viel einfacher durch die in der Verbindungsleitung befindliche Drossel strömen, so dass es gleichzeitig auch in einen seriellen Betrieb ihrer Pumpräume konfiguriert wird, um nun ein höchstmögliches Endvakuum zu erzielen. At the beginning of the suction process, the previously known micro-vacuum pump adopts a parallel configuration of its pumping chambers, because the throttle provided in the connecting line causes the system initially to be able to work more easily in parallel because of the still missing obstructions in the air circulation. As soon as this parallel operating configuration comes within the range of the final vacuum and the pressure difference in the suction line reaches a maximum, For example, the fluid can flow much more easily through the restrictor located in the connection line, so that it is also configured in a serial operation of their pumping chambers in order to achieve the highest possible ultimate vacuum.
Nachteilig ist jedoch, dass die Rückschlagventile der vorbekannten Membran-Pumpe eine mit den Einlass- und Auslassventilen vergleichbare Größe aufweisen, und dass die zwischen den Rückschlagventilen vorgesehenen Leitungsabschnitte der Verbindungs- leitung einen entsprechend großen lichten Leitungsquerschnitt haben, so dass sich in diesen Leitungsabschnitten ein dementsprechend großer schädlicher Raum ergibt, der sich auf das erreichbare Endvakuum der vorbekannten Membran-Saugpumpe auswirkt und den Umschaltpunkt zwischen paralleler und serieller Betriebsweise negativ beeinflusst. However, it is disadvantageous that the check valves of the previously known membrane pump have a size comparable to the inlet and outlet valves, and that the line sections of the connecting line provided between the check valves have a correspondingly large clear line cross section, so that a correspondingly large line cross section occurs in these line sections large harmful space results, which affects the achievable final vacuum of the prior art membrane suction pump and the switching point between parallel and serial operation negatively affected.
Um in möglichst kurzer Zeit ein möglichst hohes Endvakuum zu erreichen und um sich an den optimalen Umschaltpunkt zwischen parallelem und seriellem Betrieb anzunähern, hat man auch be- reits eine mehrstufige Membran-Pumpe geschaffen, bei der die im Einström- und im Ausströmbereich der Verbindungsleitung (en) vorgesehenen Rückschlagventile im Vergleich zu den Einlass- und Auslassventilen der Pumpräume kleiner ausgebildet sind und dass diesen Rückschlagventilen jeweils ein zum benachbarten Pumpraum hin offener Leitungsabschnitt der Verbindungsleitung mit einem im Vergleich zu den Einlass- und Auslassventilen kleineren lichten Leitungsquerschnitt zugeordnet ist (vgl. DE 10 2007 057 945 A1 ) . Aus einem Vergleich der Fig. 1 und 2 und der 90°- Schnittdarstellung in Fig. 4 der DE 10 2007 057 945 A1 wird deutlich, dass auch bei dieser vorbekannten Membran-Pumpe die Ein- und Auslassöffnungen der Verbindungsleitungen in der Kurbelachsebene angeordnet sind. Diese vorbekannte Membran- Pumpe weist in der zumindest einen, ihre Pumpräume miteinander verbindenden Verbindungsleitung sowohl einström- als auch ausströmseitig Rückschlagventile auf, die im Vergleich zu den Einlass- und Auslassventilen dieser Pumpräume wesentlich kleiner dimensioniert sind. Da der bewegliche Ventilkörper dieser Rückschlagventile somit auch geringere bewegliche Massen aufweisen und dementsprechend schneller reagieren kann, wird eine Annäherung an den optimalen Umschaltpunkt zwischen paralleler und serieller Betriebsweise wesentlich begünstigt. Da die Verbindungsleitung erst im Bereich des optimalen Umschalt- punktes wirksam wird, und da die Verbindungsleitungen in dieser Pumpphase nur vergleichsweise geringe Fördermengen zu bewältigen haben, kann der lichte Querschnitt der Verbindungsleitungen im Vergleich zur Saug- und zur Druckleitung vergleichsweise klein ausgeführt werden. Das gestattet auch, die in der zumindest einen Verbindungsleitung vorgesehenen Rückschlagventile mit einem im Vergleich zu den Saug- und Druckventilen sehr geringen Durchflussquerschnitt und entsprechend geringem Durchmesser auszuführen. Somit können die Rückschlagventile aufgrund der geringen Masse ihres beweglichen Ventil- oder Sperrkörpers beim Schließen der Saug- und Druckventile schnell reagieren und verhindern dadurch, dass die aus DE 10 2007 057 945 A1 vorbekannte Membran-Pumpe in einem Übergangsbereich der Druckdifferenzen nicht oder nur ungenügend fördert. Da den Rückschlagventilen jeweils ein zum benachbarten Pumpraum führender Leitungsabschnitt zugeordnet ist, der im Vergleich zu den Einlass- und Auslassventilen einen wesentlichen kleineren lichten Leitungsquerschnitt hat, kann der zwischen einem Rückschlagventil einerseits und dem benachbarten Pumpraum andererseits verbleibende schädliche Raum derart gering gehalten werden, dass auch die Erzeugung eines sehr niedrigen Endvakuums möglich ist. Die aus DE 10 2007 057 945 A1 vorbekannte Membran-Pumpe erlaubt daher mit vergleichsweise einfachen technischen Mitteln die Erzeugung eines möglichst geringen Endvakuums in möglichst kurzer Zeit. In order to achieve as high a final vacuum as possible in the shortest possible time and in order to approach the optimum switching point between parallel and serial operation, a multi-stage diaphragm pump has also been created, in which the inlet and outlet areas of the connecting line (FIG. en) provided check valves are smaller compared to the inlet and outlet valves of the pump chambers and that these check valves each one adjacent to the adjacent pumping space open line section of the connecting line with a smaller compared to the inlet and outlet valves clear line cross-section is assigned (see 10 2007 057 945 A1). It is clear from a comparison of FIGS. 1 and 2 and the 90 ° sectional illustration in FIG. 4 of DE 10 2007 057 945 A1 that the inlet and outlet openings of the connecting lines in the crankshaft plane are also arranged in this previously known diaphragm pump. This known diaphragm pump has in the at least one, their pumping rooms with each other connecting connecting line on both inflow and outflow check valves, which are dimensioned much smaller compared to the inlet and outlet valves of these pump chambers. Since the movable valve body of these check valves thus also have lower masses and can react faster, an approximation to the optimal switching point between parallel and serial operation is substantially favored. Since the connecting line becomes effective only in the region of the optimal switching point, and since the connecting lines only have to handle comparatively low flow rates in this pumping phase, the clear cross section of the connecting lines can be made comparatively small in comparison with the suction line and the pressure line. This also makes it possible to carry out the check valves provided in the at least one connecting line with a very small flow cross section and correspondingly small diameter compared to the suction and pressure valves. Thus, the check valves due to the low mass of their movable valve or locking body when closing the suction and pressure valves react quickly and thereby prevent the previously known from DE 10 2007 057 945 A1 diaphragm pump in a transition region of the pressure differences does not or only insufficiently , Since the check valves in each case a leading to the adjacent pumping space line section is assigned, which has a substantially smaller clear line cross-section compared to the inlet and outlet valves, the remaining between a check valve on the one hand and the adjacent pump chamber on the other hand harmful space can be kept so low that the generation of a very low final vacuum is possible. The previously known from DE 10 2007 057 945 A1 diaphragm pump therefore allows the production of a possible with relatively simple technical means low final vacuum in the shortest possible time.
Bei den aus WO 2004 / 0881 38 und aus DE 1 0 2007 057 945 A1 vorbekannten Membran-Pumpen sind die druck- und die saugseitigen Öffnungen der Verbindungsleitungen etwa mittig zwischen den Druck- und den Saugventilen der Pumpräume in einer achsparallel zur Pleueldrehachse angeordneten Linie vorgesehen. Da in jedem Pumpraum die an der Pumpraumwand abwälzende Arbeitsmembrane die Öffnungen der Verbindungsleitungen erst etwa in deren Totpunkt erreicht, können über diese Öffnungen der Verbindungsleitungen Verlustströme entweichen, welche die Leistungsfähigkeit dieser Membran-Pumpen ungünstig beeinflussen. In the prior art membrane pumps known from WO 2004/0881 38 and DE 1 0 2007 057 945 A1, the pressure and suction-side openings of the connection lines are provided approximately centrally between the pressure and suction valves of the pump chambers in a line arranged axially parallel to the pivot axis , Since in each pump chamber the working diaphragm which rolls off at the pump chamber wall only reaches the openings of the connecting lines approximately at its dead center, leakage currents can escape via these openings of the connecting lines which adversely affect the performance of these diaphragm pumps.
Es besteht daher die Aufgabe, eine mehrstufige Membran-Pumpe der eingangs erwähnten Art zu schaffen, die sich hinsichtlich ihres Ansaugdruckes oder 'ihres Saugvermögens durch optimierte Pumpencharakteristika auszeichnet . It is therefore an object to provide a multi-stage diaphragm pump of the type mentioned above, which is characterized by its pumping characteristics optimized in terms of their suction or ' their pumping speed.
Eine erfindungsgemäße Lösung dieser Aufgabe besteht bei der mehrstufigen Membran-Pumpe der eingangs erwähnten Art insbesondere darin, dass wenigstens in einem Pumpraum entweder zur Verbesserung des Ansaugdruckes die saugseitige Öffnung der zumindest einen Verbindungsleitung oder zur Verbesserung des Saugvermögens die druckseitige Öffnung der zumindest einen Verbindungsleitung in dem Bereich des Pumpraumes angeordnet oder diesem Bereich angenähert ist, an den die diesem Pumpraum zugeordnete Membrane während eines Pumpzyklus zuerst abwälzt. An inventive solution to this problem is in the multi-stage diaphragm pump of the type mentioned in particular that at least in a pump chamber either to improve the suction pressure, the suction-side opening of the at least one connecting line or to improve the pumping speed, the pressure-side opening of the at least one connecting line in the Area of the pump chamber is arranged or approximated to this area, to which the pump chamber associated with this first during a pumping cycle rolls.
Die Pumpräume der erfindungsgemäßen Membran-Pumpe sind über Verbindungsleitungen miteinander verbunden. Dabei weisen die in Förderrichtung nachfolgenden Pumpräume auch eine saugseitige Öffnung auf, die einer Verbindungsleitung zugeordnet ist. Zur Verbesserung des Ansaugdruckes kann die in zumindest einem der nachfolgenden Pumpräume vorgesehene saugseitige Öffnung wenigstens einer Verbindungsleitung in dem Bereich des Pumpenraumes angeordnet oder diesem Bereich angenähert sein, in den die diesem Pumpraum zugeordnete Membrane während eines Pumpzyklus zuerst abwälzt. Bei dieser Ausführungsform wird also zur Verbesserung des Ansaugdruckes die Anordnung der saugseitigen Öffnung der zumindest einen Verbindungsleitung aus der im oberen Totpunkt quer zur Pleuelschwenkebene orientierten Mittellinie heraus vorzugsweise um etwa -45° in Richtung zu dem Bereich des Pumpraumes gedreht, in dem die diesem Pumpraum zugeordnete Membrane während eines Pumpzyklus zuerst abwälzt. Die Umschaltung vom parallelen zum seriellen Pumpbetrieb der mehrstufigen Membran-Pumpe kommt nämlich zustande, wenn der Ansaugdruck in der folgenden Stufe niedriger ist als der Ausschiebedruck in der vorherigen Stufe. Damit dieser Effekt auftreten kann, müssen die Kurbelwinkel des dem Pleuel zugeordneten Kurbeltriebes von Kopf zu Kopf vorzugsweise um 180° versetzt angeordnet sein. Je näher nun die kleine saugseitige Öffnung einer Verbindungsleitung in der Pleuel- schwingebene liegt, und zwar auf der Seite des Dichtungsraumes, auf der das Pleuel beim Aufwärtshub durch die Kippbewegung des Pleuels in Drehrichtung ausgelenkt wird und durch die Nähe zur Pleuelschwingebene, um so niedriger ergibt sich der Ansaugdruck. Der niedrigste Ansaugdruck in der nächsten Stufe ergibt sich, wenn die kleine saugseitige Öffnung zumindest einer Verbindungsleitung genau in der Pleuelschwingebene liegt. Jede Lage zwischen dem Nullpunkt und der Pleuelschwingebene ergibt ihren eigenen Ansaugdruck. Auf diese Weise kann man den Übergang der Saugkurve der parallel geschalteten Pumpe zur Saugkurve der in Serie geschalteten Pumpe beeinflussen. Dabei ist eine Beeinflussung schon möglich, wenn auch nur in einer der Pumpstufen die Anordnung der saugseitigen Öffnung in die erwähnte Richtung verändert wird. Der Prozess beginnt bei der ersten Pumpstufe und setzt sich nach und nach über die weiteren Köpfe und Pumpstufen fort. Durch gegebenenfalls auch unterschiedliche Schwenkwinkel in der Anordnung der saugseitigen Öffnung der die Pumpstufen miteinander verbindenden Verbin- dungsleitungen in Richtung der Pleuelschwingebene kann der Übergangsbereich im Kurvenverlauf von Ansaugdruck und Saugvermögen beeinflusst werden. The pump chambers of the membrane pump according to the invention are connected to one another via connecting lines. In this case, the subsequent pumping in the conveying direction pumping chambers also have a suction-side opening, which is associated with a connecting line. To improve the suction pressure in at least one of subsequent suction chambers provided suction-side opening of at least one connecting line in the region of the pump chamber arranged or approximated to this area, in which the pump chamber associated with this first drum during a pumping cycle. In this embodiment, therefore, to improve the suction pressure, the arrangement of the suction-side opening of the at least one connecting line out of the center line oriented at the top dead center to Pleuelschwenkebene centered out preferably about -45 ° in the direction of the area of the pump chamber, in which this pump space associated The diaphragm rolls off during a pumping cycle first. Namely, the switching from parallel to serial pump operation of the multi-stage diaphragm pump comes about when the suction pressure in the following stage is lower than the discharge pressure in the previous stage. In order for this effect to occur, the crank angle of the crank mechanism assigned to the connecting rod must preferably be arranged offset from head to head by 180 °. The closer the small suction-side opening of a connection line is in the connecting-rod plane, on the side of the sealing space on which the connecting rod is deflected in the upward direction by the tilting movement of the connecting rod in the direction of rotation and results in the lower by the proximity to the connecting rod swing plane the suction pressure. The lowest intake pressure in the next stage results when the small intake-side opening of at least one connecting line lies exactly in the connecting-rod swing plane. Each position between the zero point and the connecting rod plane results in its own intake pressure. In this way, one can influence the transition of the suction curve of the pump connected in parallel to the suction curve of the pump connected in series. In this case, influencing is already possible if the arrangement of the suction-side opening in the mentioned direction is changed only in one of the pumping stages. The process starts at the first pumping stage and continues gradually on the other heads and pumping stages. By possibly also different pivoting angles in the arrangement of the suction-side opening of the connecting lines connecting the pumping stages to one another in the direction of the connecting rod swinging plane, the transitional region in the course of the curve can be influenced by suction pressure and pumping speed.
Soll stattdessen das Saugvermögen verbessert werden, ist es auch möglich, wenigstens in einer Pumpstufe die druckseitige Öffnung der zumindest einen Verbindungsleitung in dem Bereich des Pumpraumes anzuordnen oder diesem Bereich anzunähern, an dem die diesem Pumpraum zugeordnete Membrane während eines Pumpzyklus zuerst abwälzt. Zur Verbesserung des Saugvermögens ist es also möglich, die Anordnung der druckseitigen Öffnung der zumindest einen Verbindungsleitung aus der im oberen Totpunkt quer zur Pleuelschwenkebene orientierten Mittellinie heraus vorzugsweise um etwa +45° in Richtung zu dem Bereich des Pumpraumes zu verdrehen, in dem die diesem Pumpraum zugeordnete Membrane während eines Pumpzyklus zuerst abwälzt. Da bei dieser Ausführung die in diesem Pumpraum vorgesehene druckseitige Öffnung der Verbindungsleitung frühzeitig durch die an der Pumpraumwand abwälzende Arbeitsmembrane verschlossen wird, können etwaige Verlustströme, die ansonsten über die Verbin- dungsleitungen führen, deutlich reduziert und das Saugvermögen verbessert werden. If, instead, the pumping speed is to be improved, it is also possible, at least in one pumping stage, to arrange the pressure-side opening of the at least one connecting line in the area of the pumping space or to approach that area at which the diaphragm assigned to this pumping space first rolls during a pumping cycle. To improve the pumping speed, it is thus possible to preferably rotate the arrangement of the pressure-side opening of the at least one connecting line out of the center line oriented at top dead center to the connecting rod pivot plane by approximately + 45 ° in the direction of the region of the pump chamber in which the pump chamber assigned membrane during a pumping cycle first rolls. Since, in this embodiment, the pressure-side opening of the connecting line provided in this pump chamber is closed at an early stage by the working diaphragm which rolls on the pump chamber wall, any leakage currents which otherwise lead via the connecting lines can be significantly reduced and the pumping speed can be improved.
Dabei sieht eine bevorzugte Ausführungsform gemäß der Erfindung vor, dass jedem Pumpraum der Membran-Pumpe ein in einer Pleuelschwingebene verschwenkbarer Pleuel zugeordnet ist und dass zumindest in einem Pumpraum die saugseitige oder die druckseitige Öffnung zumindest einer Verbindungsleitung in der Pleuelschwingebene vorgesehen ist. Eine Optimierung der Pumpencharakteristika wird noch zusätzlich begünstigt, wenn die saugseitige oder die druckseitige Öffnung der zumindest einen Verbindungsleitung in dem an die Einspann- zone der Membrane angrenzenden Randbereich des Pumpraumes angeordnet ist. In this case, a preferred embodiment according to the invention provides that each pump chamber of the diaphragm pump is associated with a pivotable in a connecting rod connecting rod and that at least in a pump chamber, the suction side or the pressure side opening of at least one connecting line is provided in the Pleuelschwingebene. An optimization of the pump characteristics is further promoted if the suction-side or the pressure-side opening of the at least one connecting line is arranged in the edge region of the pumping space adjacent to the clamping zone of the membrane.
Eine bevorzugte Ausführungsform gemäß der Erfindung sieht vor, dass zumindest in einem Pumpraum die saugseitige oder die druckseitige Öffnung der zumindest einen Verbindungsleitung und das Saugventil etwa auf einer quer zur Pleuelschwingebene verlaufenden Linie angeordnet sind. A preferred embodiment according to the invention provides that at least in a pump chamber, the suction-side or the pressure-side opening of the at least one connecting line and the suction valve are arranged approximately on a line extending transversely to Pleuelschwingebene line.
Solche mehrstufigen Membran- Saugpumpen werden als Vakuum-Pumpen häufig zum Abpumpen feuchter Dämpfe eingesetzt. Bei ungünstigen Druck- und Temperaturverhältnissen kann es dabei zu einer Kondensatbildung in der letzten und den vorangegangenen Stufen kommen. Das wird üblicherweise durch Einsatz eines Gasballastventils verhindert. Je nach den Verdampfungseigenschaften des Kondensats führt ein solches Gasballastventil aber zu einer erheblichen Verschlechterung des Endvakuums . Such multi-stage diaphragm suction pumps are often used as vacuum pumps for pumping off moist vapors. Under unfavorable pressure and temperature conditions, condensation may occur in the last and previous stages. This is usually prevented by using a gas ballast valve. Depending on the evaporation properties of the condensate, however, such a gas ballast valve leads to a significant deterioration of the final vacuum.
Eine Methode, trotz Kondensatbildung das maximale Endvakuum zu erreichen, stellt das Ausblasen des aufgetretenen Kondensats mit Atmosphärendruck dar (vgl. DE 198 51 680 C2 und DE 100 21 454 A1 ) . Ein Nachteil dieser Methode liegt allerdings in der Unterbrechung des Evakuierungsvorganges während des Ausblasens. One method of achieving the maximum final vacuum despite condensate formation is the blowing out of the condensate which has occurred at atmospheric pressure (see DE 198 51 680 C2 and DE 100 21 454 A1). A disadvantage of this method, however, lies in the interruption of the evacuation process during the blow-out.
Im parallelen Betrieb der eingangs erwähnten mehrstufigen Membran-Saugpumpen ist der maximale Enddruck regelmäßig höher als der Verdampfungsdruck des Kondensats. Das Kondensat hat deshalb noch keinen Einfluss auf den Evakuierungsvorgang. Im Serienbetrieb solcher Membra -Saugpumpen unterschreitet der Enddruck der Pumpe allerdings oft den Verdampfungspunkt des Kondensats, so dass aufgrund der Rückexpansion des Kondensats der Enddruck nicht erreicht werden kann. Deshalb muss das Kondensat kontinuierlich ausgeblasen werden. In parallel operation of the above-mentioned multi-stage diaphragm suction pumps, the maximum discharge pressure is regularly higher than the evaporation pressure of the condensate. The condensate therefore has no influence on the evacuation process. In series operation of such Membra suction pumps falls below the End pressure of the pump, however, often the evaporation point of the condensate, so that due to the re-expansion of the condensate, the final pressure can not be achieved. Therefore, the condensate must be continuously blown out.
Zweckmäßig ist es, wenn zumindest eine Verbindungsleitung insbesondere zwischen nachfolgenden Pumpräumen einen fallenden Leitungsverlauf hat und wenn dazu der zuströmseitige Leitungsabschnitt im Vergleich zum abströmseitigen Leitungsabschnitt dieser zumindest einen Verbindungsleitung höher angeordnet ist. Mit dieser fallenden Anordnung der zumindest einen, insbesondere zwischen nachfolgenden Pumpräumen vorgesehenen Verbindungsleitung wird ein Ausblasen des in den nachfolgenden Pumpräumen eventuell auftretenden Kondensats erleichtert und die Pumpencharakteristik der erfindungsgemäßen Membran- Saugpumpe im Hinblick auf ihr Saugvermögen noch zusätzlich begünstigt. Dabei tritt das Kondensat regelmäßig in der Nähe des Atmosphärendruckes und somit meist in den letzten drei Stufen der in Serie geschalteten Pumpräume der mehrstufigen Membran- Saugpumpe auf. Eine gemäß diesem Erfindungsvorschlag ausgestaltete Membranpumpe zeichnet sich durch einen kontinuierlichen Evakuierungsprozess aus, obwohl ständig etwaiges Kondensat durch das Arbeitsgas selbst ausgeblasen wird. Bei zwei- oder mehrköpfigen Pumpen bietet sich die Boxerform als raumsparende Bauform an. Eine bevorzugte Ausführungsform gemäß der Erfindung sieht daher vor, dass die Pumpstufen der mehrstufigen Membranpumpe paarweise in einer Boxerform angeordnet sind. It is expedient if at least one connecting line has a falling line course, in particular between subsequent pumping chambers, and if, for this purpose, the inflow-side line section is arranged higher in comparison with the downstream line section of this at least one connecting line. With this falling arrangement of the at least one, in particular between subsequent pump chambers provided connecting line blowing out the condensate possibly occurring in the subsequent pump chambers is facilitated and the pump characteristics of the membrane suction pump according to the invention in terms of their pumping speed even favors. The condensate occurs regularly in the vicinity of the atmospheric pressure and thus usually in the last three stages of the series-connected pump chambers of the multi-stage diaphragm suction pump. A designed according to this proposal invention membrane pump is characterized by a continuous evacuation process, although any condensate is constantly blown out by the working gas itself. In the case of pumps with two or more heads, the Boxer form offers a space-saving design. A preferred embodiment according to the invention therefore provides that the pump stages of the multi-stage diaphragm pump are arranged in pairs in a boxer form.
Bei einer in liegender Lage befindlichen Boxerform können beidseitig die zur Achse parallel liegenden Köpfe leicht horizontal verschaltet werden. Strebt man allerdings gemäß dem eingangs erwähnten Erfindungsvorschlag eine Optimierung der Saugkurve durch eine Veränderung der Umschaltdrücke mittels einer versetzten Anordnung der im Pumpraum vorgesehenen Öffnungen der Verbindungsleitungen an, müssen die in den auf beiden Seiten des Pumpgehäuses angebrachten Köpfen befindlichen saugseitigen Öffnungen der Verbindungsleitungen in Richtung der Pleuelschwingebene und auf der Seite des Kopfes, bei der das Pleuel bei Aufwärtshub durch die Kippbewegung in Drehrichtung ausgelenkt wird, angeordnet sein. Dadurch kommt in der zweiten Pumpstufe die saugseitige Öffnung über der Achse zu liegen, während die druckseitige Öffnung in der dritten Pumpstufe unter die Achse gelegt werden kann, so dass bei liegender Lage einer solchen Boxerpumpe eine fallende Verbindungsleitung geschaffen wird. In a lying in a lying position Boxer form both sides parallel to the axis heads can be easily interconnected horizontally. If, however, according to the invention proposal mentioned above, an optimization of the suction curve by changing the switching pressures by means of a staggered arrangement of the openings provided in the pumping space of the connecting lines, located in the mounted on both sides of the pump housing heads suction side openings of the connecting lines in the direction of Pleuelschwingebene and on the side of the head, in which the connecting rod is deflected in the upward direction by the tilting movement in the direction of rotation, be arranged. Characterized comes in the second pumping stage, the suction-side opening to lie over the axis, while the pressure-side opening in the third pumping stage can be placed under the axis, so that when lying position of such a boxer pump, a falling connection line is created.
Wird die oben beschriebene Boxerpumpe demgegenüber in stehender Lage betrieben, ist die Verbindungsleitung zwischen der zweiten und der dritten Pumpstufe horizontal angeordnet, während die Verbindungsleitung zwischen der dritten und der vierten Pumpstufe fallend angeordnet ist. By contrast, if the boxer pump described above is operated in a standing position, the connecting line between the second and the third pumping stage is arranged horizontally, while the connecting line between the third and the fourth pumping stage is arranged falling.
Eine bevorzugte Ausführungsform gemäß der Erfindung sieht daher vor, dass die saugseitige Öffnung der in der zweiten Pumpstufe vorgesehenen Verbindungsleitung oberhalb der Kurbelachse und/oder die druckseitige Öffnung der in der dritten Pumpstufe vorgesehenen Verbindungsleitung unterhalb der Kurbelachse angeordnet ist. Um das Kondensat kontinuierlich ausblasen zu können, sollte der Querschnitt der Verbindungsleitungen zwischen den vergleichsweise klein ausgestalteten Rückschlagventilen so ausgelegt werden, dass die darin auftretende Gasgeschwindigkeit zum Ausblasen des Kondensats ausreicht. Bei fallender oder horizontaler Anordnung der Verbindungsleitungen kann dies zur niedrigsten wirksamen Gasgeschwindigkeit führen. Eine bevorzugte Weiterbildung gemäß der Erfindung sieht daher vor, dass die Verbindungsleitungen einen Leitungsdurchmesser haben, der gleich oder kleiner der Hälfte des lichten Leitungsquerschnitts der zu den Druck- oder Saugventilen führenden Druck- oder Saugleitungen ist. Eine bevorzugte Ausführungsform gemäß der Erfindung sieht vor, dass die Membran-Saugpumpe vier Pumpräume hat und/oder vierstufig ausgestaltet ist. A preferred embodiment according to the invention therefore provides that the suction-side opening of the connecting line provided in the second pumping stage is arranged above the crank axle and / or the pressure-side opening of the connecting line provided in the third pumping stage is below the crank axle. In order to be able to blow out the condensate continuously, the cross-section of the connecting lines between the comparatively small-dimensioned check valves should be designed so that the gas velocity occurring therein is limited to Blow out the condensate is sufficient. In case of falling or horizontal arrangement of the connecting lines, this may lead to the lowest effective gas velocity. A preferred development according to the invention therefore provides that the connecting lines have a line diameter which is equal to or less than half the clear line cross section of the pressure or suction lines leading to the pressure or suction valves. A preferred embodiment according to the invention provides that the membrane suction pump has four pumping chambers and / or is designed in four stages.
Weiterbildungen gemäß der Erfindung ergeben sich aus den An- Sprüchen sowie der Zeichnung. Nachstehend wird die Erfindung anhand bevorzugter Ausführungsbeispiele noch näher beschrieben. Further developments according to the invention will become apparent from the claims and the drawings. The invention will be described in more detail below with reference to preferred embodiments.
Es zeigt: Fig.1a eine mehrstufige Membran-Saugpumpe in einer schematischen Draufsicht, wobei die Pumpstufen dieser Saug pumpe über Verbindungsleitungen miteinander verbunden sind, die zu den Pumpräumen führende saug- und druckseitige Öffnungen haben, 1a shows a multi-stage diaphragm suction pump in a schematic plan view, wherein the pump stages of this suction pump are connected to one another via connecting lines which have suction and pressure-side openings leading to the pump chambers,
Fig.1b Membran-Saugpumpe aus Fig.1a in einer Schema tischen Darstellung ihrer Pumpräume, wobei in den Pumpräumen die Anordnung der Druck- und Saugventile sowie der druck- und saugseitigen Öffnungen derFig.1b membrane suction pump from Fig.1a in a schematic tables representation of their pumping rooms, wherein in the pump chambers, the arrangement of the pressure and suction valves and the pressure and suction ports of the
Verbindungsleitungen dargestellt sind, Connection lines are shown,
Fig.1 c die Membran-Saugpumpe aus Fig.1a und 1b in einer schematischen Seitenansicht mit Blick auf den An- triebsmotor , 1 c shows the membrane suction pump of FIGS. 1 a and 1 b in a schematic side view with a view of the drive motor,
Fig. a eine mit Fig.1a bis 1c vergleichbare Membran-Saugpumpe in einer schematischen Draufsicht, 1 a to 1 c comparable membrane suction pump in a schematic plan view,
Fig.2b die mehrstufige Membran-Saugpumpe aus Fig.2a in einer schematischen Darstellung ihrer Pumpräume, wobei die druckseitigen Öffnungen der Verbindungsleitungen in den Pumpräumen im Vergleich zu der in Fig.1b gezeig- ten Anordnung derart versetzt angeordnet sind, dass ein hohes Saugvermögen begünstigt wird, 2a shows the multi-stage diaphragm suction pump from FIG. 2a in a schematic representation of their pumping chambers, wherein the pressure-side openings of the connecting lines in the pump chambers are staggered compared to the arrangement shown in FIG. 1b in such a way that promotes high pumping speed becomes,
Fig.2c die Membran-Saugpumpe aus Fig.2a und 2b in einer schematischen Seitenansicht mit Blick auf den An- triebsmotor, 2 c shows the diaphragm suction pump from FIGS. 2 a and 2 b in a schematic side view with a view of the drive motor,
Fig.3a eine gemäß dem Stand der Technik ausgestaltete mehrstufige Membran-Saugpumpe in einer schematischen Draufsicht , 3a shows a configured according to the prior art multi-stage diaphragm suction pump in a schematic plan view,
Fig.3b die Membran-Saugpumpe aus Fig.3a in einer schematischen Darstellung ihrer Pumpräume, wobei in den Pumpräumen die Anordnung der Druck- und Saugventile sowie der druck- und saugseitigen Öffnungen der Verbindungsleitungen dargestellt sind und wobei die saug- und druckseitigen Öffnungen der zwischen den Pumpstufen vorgesehenen Verbindungsleitungen praktisch auf einer zwischen dem Saug- und dem Druckventil liegenden Linie angeordnet sind, 3a shows the diaphragm suction pump of Figure 3a in a schematic representation of their pumping rooms, wherein in the pump chambers, the arrangement of the pressure and suction valves and the pressure and suction side openings of the connecting lines are shown and wherein the suction and pressure side openings of between the connecting stages provided on the pump stages are arranged practically on a line lying between the suction and the pressure valve,
Fig.3c die Membran-Saugpumpe aus Fig.3a und 3b in einer schematischen Seitenansicht mit Blick auf den Antriebsmotor , den Kurvenverlauf von Ansaugdruck und Saugvermögen bei den in Fig.1a bis 1c, 2a bis 2c und 3a bis 3c dargestellten Membranpumpen, eine mehrstufige Membran-Saugpumpe in einer schematischen Draufsicht, eine Membran- Saugpumpe in einer schematischen Darstellung ihrer Pumpräume mit einer mit Fig.3b vergleichbaren Anordnung der Saug- und Druckventile sowie der saug- und druckseitigen Öffnungen der Verbindungsleitungen, eine Membran- Saugpumpe in einer schematischen Darstellung ihrer Pumpräume, wobei die Anordnung der Saug- und der Druckventile sowie der saug- und druckseitigen Öffnungen der Verbindungsleitungen der in Fig.1b gezeigten Anordnung entspricht, eine Membran- Saugpumpe in einer schematischen Darstellung ihrer Pumpräume, wobei die Anordnung der Saug- und Druckventile sowie der saug- und druckseitigen Öffnungen der Verbindungsleitungen der in Fig.2b gezeigten Anordnung entspricht, eine mehrstufige Membran- Saugpumpe in einer Seitenansicht mit Blick auf den Antriebsmotor, eine zum Ausblasen des in den nachfolgenden Pumpräumen eventuell auftretenden Kondensats besonders vorteilhafte Anordnung der zwischen den Pumpstufen vorgesehenen Verbindungsleitungen einer in stehender Boxerform ausgebildeten Membra -Saugpumpe in einer schematischen Draufsicht (Fig.6a) sowie in einer schematischen Darstellung ihrer Pumpräume (Fig.6b), wobei die Anordnung der Druck- und Saugventile sowie der saug- und druckseitigen Öffnungen der Verbindungsleitungen der in den Figuren 3b und 5b gezeigten Anordnung entspricht, eine zum Ausblasen des in den nachfolgenden Pumpräumen eventuell auftretenden Kondensats besonders vorteilhafte Anordnung der zwischen den Pumpstufen vorgesehenen Verbindungsleitungen einer in stehender Boxerform ausgebildeten Membran-Saugpumpe in einer schematischen Draufsicht sowie in einer schematischen Darstellung ihrer Pumpräume, wobei die Anordnung der Saug- und Druckventile sowie der saug- und druckseitigen Öffnungen der Verbindungsleitungen der in den Figuren 1b und 5c gezeigten Anordnung im wesentlichen entspricht, eine zum Ausblasen des in den nachfolgenden Pumpräumen eventuell auftretenden Kondensats besonders vorteilhafte Anordnung der zwischen den Pumpstufen vorgesehenen Verbindungsleitungen einer in stehender Boxerform ausgebildeten Membran-Saugpumpe in einer schematischen Draufsicht (Fig.8a) und in einer schematischen Darstellung ihrer Pumpräume (Fig.5b), wobei die Anordnung der Saug- und Druckventile und der saug- und druckseitigen Öffnungen der Verbindungsleitungen der in den Figuren 2b und 5d gezeigten Anordnung entspricht, 3 c shows a schematic side view of the drive motor, the curve of suction pressure and pumping speed in the diaphragm pumps shown in Fig.1a to 1c, 2a to 2c and 3a to 3c, a multi-stage diaphragm suction pump in a schematic plan view, a diaphragm suction pump in a schematic representation of their pumping chambers with a with FIG. 3b comparable arrangement of the suction and pressure valves and the suction and pressure side openings of the connecting lines, a diaphragm suction pump in a schematic representation of their pumping chambers, the arrangement of the suction and the pressure valves and the suction and pressure side openings of the connecting lines of FIG 1b corresponds to a membrane suction pump in a schematic representation of their pump chambers, the arrangement of the suction and pressure valves and the suction and pressure side openings of the connecting lines of the arrangement shown in Fig.2b corresponds, a multi-stage diaphragm suction pump in one Side view overlooking the drive motor, a e for blowing out the condensate possibly occurring in the subsequent pumping rooms particularly advantageous arrangement of provided between the pumping stages connecting lines in a standing Boxerform trained Membra suction pump in a schematic plan view (Figure 6a) and in a schematic representation of their pumping chambers (Figure 6b), the arrangement of the pressure and suction valves and the suction and pressure side openings of the connecting lines of the in Figures 3b and 5b corresponds to an arrangement for blowing out the condensate possibly occurring in the following pumping chambers particularly advantageous arrangement of provided between the pumping stages connecting lines of a standing boxer form diaphragm suction pump in a schematic plan view and in a schematic representation of their pumping rooms, the arrangement of the suction - And pressure valves and the suction and pressure side openings of the connecting lines of the arrangement shown in Figures 1b and 5c substantially corresponds to, for blowing out the condensate possibly occurring in the subsequent pumping space particularly advantageous arrangement of between Fig. 5A) and in a schematic representation of their pumping chambers (Fig.5b), wherein the arrangement of the suction and pressure valves and the suction and pressure side openings of the pumping stages provided connecting lines of a formed in standing boxer form diaphragm suction pump Connecting lines corresponds to the arrangement shown in Figures 2b and 5d,
Fig.9 eine zum Ausblasen des in den nachfolgenden Pumpräumen eventuell auftretenden Kondensats besonders vorteilhafte Anordnung der zwischen den Pumpstufen vorgesehenen Verbindungsleitungen einer in liegender Boxerform ausgebildeten Membran- Saugpumpe in einer schematischen Seitenansicht (Fig.9a) sowie in einer um 90° gedrehten schematischen Seitenansicht (Fig.9b) , Fig.9 a for blowing out in the following Pump chambers possibly occurring condensate particularly advantageous arrangement of provided between the pumping stages connecting lines of a lying in a lying Boxer form diaphragm suction pump in a schematic side view (Figure 9a) and in a rotated by 90 ° schematic side view (Figure 9b),
Fig.10 eine mit Fig.9a und 9b vergleichbare Membran-Saug- pumpe in einer schematischen Seitenansicht (Fig.10a) und in einer um 90° gedrehten Seitenansicht (Fig.10b), wobei die Pumpstufen dieser Membran-Saugpumpe über abweichend angeordnete Verbindungs- leitungen miteinander verbunden sind, und 10 shows a diaphragm suction pump comparable to FIGS. 9a and 9b in a schematic side view (FIG. 10a) and in a side view rotated by 90 ° (FIG. 10b), wherein the pump stages of this diaphragm suction pump have differently arranged connections - lines are connected to each other, and
Fig.11 einen schematischen Vergleich des lichten Querschnitts der zwischen den Pumpstufen vorgesehenen Verbindungsleitungen einerseits und der zum Saugventil oder zum Druckventil führenden Ein- bzw. Auslasskanäle andererseits. 11 shows a schematic comparison of the clear cross section of the connection lines provided between the pumping stages, on the one hand, and the inlet or outlet ducts leading to the suction valve or to the pressure valve, on the other hand.
In den Figuren 1 bis 3 und 5 bis 10 sind verschiedene Ausführungen einer mehrstufigen Membran-Saugpumpe 10,100 dargestellt. Die hier dargestellten Pumpenausführungen 10,100 weisen jeweils vier Pumpräume 1,2,3 und 4 auf, die paarweise in einer Boxerform angeordnet sind. Jeder Pumpraum 1,2,3,4 dieser Pumpenausführungen weist jeweils einen, ein Einlassventil aufweisenden Fluideinlass 6 und einen, ein Auslassventil aufweisenden Fluidauslass 7 auf. Dabei sind die Fluideinlässe 6 der Pumpräume 1,2,3,4 über eine gemeinsame Saugleitung verbunden. FIGS. 1 to 3 and 5 to 10 show various embodiments of a multi-stage membrane suction pump 10, 100. The pump embodiments 10, 100 shown here each have four pump chambers 1, 2, 3 and 4, which are arranged in pairs in a boxer form. Each pump chamber 1, 2, 3, 4, 4 of these pump designs has a respective fluid inlet 6, which has an inlet valve, and a fluid outlet 7, which has an outlet valve. In this case, the fluid inlets 6 of the pump chambers 1, 2, 3, 4 are connected via a common suction line.
Darüber hinaus sind die stufenweise einander nachfolgenden Pumpräume 2,3,4 jeweils über eine Verbindungsleitung 8,9,11 derart miteinander verbunden, dass die hier dargestellten Pumpenausführungen 10,100 bei Erreichen oder Überschreiten eines Differenzdruckes in der Saugleitung von einem parallel arbeitenden Betrieb ihrer Pumpräume 1,2,3,4 in einen zumindest auch seriell arbeitenden Betrieb dieser Pumpräume 1,2,3,4 übergeht. Dabei sind im Einström- und im Ausströmbereich der Verbindungsleitungen 8,9,11 jeweils wenigstens ein zur nachfolgenden Pumpstufe öffnendes Rückschlagventil zwischengeschaltet. Die Rückschlagventile und die in jedem Pumpraum vorgesehenen Druck- und Saugventile werden von den Druckdifferenzen des zu fördernden Mediums gesteuert. In addition, the stepwise successive pumping chambers 2, 3, 4 are each via a connecting line 8, 9, 11 connected to one another in such a way that the pump designs 10, 100 shown here, upon reaching or exceeding a differential pressure in the suction line, pass from a parallel operation of their pumping chambers 1, 2, 3, 4 into at least serial operation of these pumping chambers 1, 2, 3, 4 , In this case, at least one check valve opening to the subsequent pump stage is interposed in the inflow and outflow regions of the connecting lines 8, 9, 11, respectively. The check valves and provided in each pump chamber pressure and suction valves are controlled by the pressure differences of the medium to be delivered.
Wie in Fig.11 angedeutet ist, sind die im Einström- und im Ausströmbereich der Verbindungsleitungen 8,9,11 vorgesehenen Rückschlagventile im Vergleich zu den Einlass- und Auslassventilen der Pumpräume 1,2,3,4 kleiner ausgebildet, wobei diesen Rückschlagventilen jeweils ein zum benachbarten Pumpraum hin offener Leitungsabschnitt der Verbindungsleitung mit einem im Vergleich zu den Einlass- und Auslassventilen kleineren lichten Leitungsquerschnitt zugeordnet ist. Die hier dargestellten Membranpumpen weisen in ihren, die Pumpräume 1,2,3,4 miteinander verbindenden Verbindungsleitungen 8,9,11 sowohl einström- als auch ausstromseitig Rückschlagventile auf, die im Vergleich zu den Einlass- und Auslassventilen dieser Pumpräume 1,2,3,4 wesentlich kleiner dimensioniert sind. Da der bewegliche Ventilkörper dieser Rückschlagventile somit auch geringere bewegliche Massen aufweisen und dementsprechend schneller reagieren kann, wird eine Annäherung an den optimalen Umschaltpunkt zwischen paralleler und serieller Betriebsweise wesentlich begünstigt. Da die Verbindungsleitungen 8,9,11 erst im Bereich des optimalen Umschaltpunktes wirksam werden, und da die Verbindungsleitungen 8,9,11 in dieser Pumpphase nur vergleichsweise geringe Fördermengen zu bewältigen haben, kann der lichte Querschnitt der Verbindungsleitungen 8,9,11 im Vergleich zur Saug- und zur Druckleitung vergleichsweise klein ausgeführt werden. Das gestattet auch, die in der zumindest einen Verbindungsleitung 8,9,11 vorgesehenen Rückschlagventile mit einem im Vergleich zu den Saug- und Druckventilen sehr geringen Durchflussquerschnitt und entsprechend geringem Durchmesser auszuführen. Somit können die Rückschlagventile aufgrund der geringen Masse ihres beweglichen Ventil- oder Sperrkörpers beim Schließen der Saug- und Druckventile schnell reagieren und verhindern dadurch, dass die hier dargestellten Pumpenausführungen in einem Übergangsbereich der Druckdifferenzen nicht oder nur ungenügend fördern. Da den Rückschlagventilen jeweils ein zum benachbarten Pumpraum führender Leitungsabschnitt zugeordnet ist, der im Vergleich zu den Einlass- und Auslassventilen einen wesentlich kleineren lichten Leitungsquerschnitt hat, kann der zwischen einem Rückschlagventil einerseits und dem benachbarten Pumpraum andererseits verbleibende schädliche Raum derart gering gehalten werden, dass auch die Erzeugung eines sehr niedrigen Endvakuums möglich ist. Die hier dargestellten Pumpenausführungen erlauben daher mit vergleichsweise einfachen technischen Mitteln die Erzeugung eines möglichst geringen Endvakuums in möglichst kurzer Zeit. As indicated in FIG. 11, the check valves provided in the inflow and outflow regions of the connecting lines 8, 9, 11 are smaller in comparison with the inlet and outlet valves of the pump chambers 1, 2, 3, 4, wherein these check valves are each one assigned to the adjacent pumping space open line section of the connecting line with a smaller compared to the inlet and outlet valves clear line cross-section. The diaphragm pumps shown here have in their, the pump chambers 1,2,3,4 interconnecting connecting lines 8,9,11 both inflow and outflow check valves on, compared to the inlet and outlet valves of these pump chambers 1,2,3 , 4 are much smaller dimensions. Since the movable valve body of these check valves thus also have lower masses and can react faster, an approximation to the optimal switching point between parallel and serial operation is substantially favored. Since the connecting lines 8,9,11 become effective only in the region of the optimum switching point, and since the connecting lines 8,9,11 have to cope with only comparatively low flow rates in this pumping phase the clear cross-section of the connecting lines 8,9,11 compared to the suction and the pressure line are made relatively small. This also makes it possible to carry out the non-return valves provided in the at least one connecting line 8, 9, 11 with a very small flow cross-section and correspondingly small diameter compared with the suction and pressure valves. Thus, the check valves due to the low mass of their movable valve or locking body when closing the suction and pressure valves react quickly and thereby prevent the pumps shown here in a transition region of the pressure differences do not or only insufficiently. Since the check valves each associated with the adjacent pumping space line section is assigned, which has a much smaller clear line cross-section compared to the inlet and outlet valves, the remaining between a check valve on the one hand and the adjacent pump room remaining harmful space can be kept so low that the generation of a very low final vacuum is possible. The pump designs shown here therefore allow with comparatively simple technical means to generate the lowest possible final vacuum in the shortest possible time.
In den Figuren 3a bis 3c und in Fig.5b sind Pumpenausführungen dargestellt, die hinsichtlich der Anordnung der zu den Verbindungsleitungen führenden Öffnungen im Pumpraum im Wesentlichen dem bisher bekannten Stand der Technik entsprechen. Wie aus den Figuren 3b und 5b deutlich wird, sind im bisher bekannten Stand der Technik die druck- und die saugseitigen Öffnungen der Verbindungsleitungen etwa mittig zwischen den Druck- und den Saugventilen der Pumpräume in einer achsparallel zur Pleueldrehachse angeordneten Linie vorgesehen. Da in jedem Pumpraum 1,2,3,4 die an der Pumpraumwand abwälzende Arbeitsmembrane die Öffnungen 12,13 der Verbindungsleitungen 8,9,11 erst etwa in deren Totpunkt erreicht, können über diese Öffnungen 12,13 der Verbindungsleitungen Verlustströme entweichen, welche die Leistungsfähigkeit dieser Pumpenaus- führungen ungünstig beeinflussen. In FIGS. 3a to 3c and in FIG. 5b pump embodiments are shown, which essentially correspond to the hitherto known state of the art with regard to the arrangement of the openings in the pump space leading to the connecting lines. As is apparent from Figures 3b and 5b, the pressure and the suction side openings of the connecting lines are provided approximately centrally between the pressure and the suction valves of the pump chambers in an axially parallel to Pleueldrehachse arranged line in the prior art. Since in each pump chamber 1,2,3,4 the rolling off at the pump room wall Working diaphragm reaches the openings 12,13 of the connecting lines 8,9,11 until about the dead center, leakage currents can escape through these openings 12,13 of the connecting lines, which adversely affect the performance of these Pumpenaus- leadership.
Wie aus dem in Fig.4 mit „0°" gekennzeichneten Kurvenverlauf des Ansaugdrucks und des Saugvermögens deutlich wird, weisen die in den Figuren 3a bis 3c und 5b gezeigten Pumpenausfüh- rungen einen vergleichsweise niedrigen Ansaugdruck und gleichzeitig auch ein vergleichsweise geringes Saugvermögen auf. As is clear from the curve of the suction pressure and the pumping speed marked "0 °" in FIG. 4, the pump designs shown in FIGS. 3 a to 3 c and 5 b have a comparatively low suction pressure and at the same time a comparatively low suction capacity.
In Fig. 3c ist angedeutet, dass die druck- und saugseitigen Öffnungen der zumindest einen Verbindungsleitung auf einer quer zur Pleuelschwenkebene orientierten Mittellinie L angeordnet sind. Vergleicht man die Fig.1c mit der Fig.3c, so wird deutlich, dass die Anordnung der saugseitigen Öffnung der zumindest einen Verbindungsleitung zur Verbesserung des Ansaugdruckes aus der im oberen Totpunkt quer zur Pleuelschwenkebene orientierten Mittellinie L heraus beispielsweise um etwa -45° in Richtung zu dem Bereich des Pumpraumes gedreht werden kann, in dem die diesem Pumpraum zugeordnete Membran während eines Pumpzyklus zuerst abwälzt. Dieser Bereich ist in Fig.3c mit „B" und „C" gekennzeichnet. Demgegenüber wird aus einem Vergleich der Figuren 2c und 3c deutlich, dass zur Verbesserung des Saugvermögens die Anordnung der druckseitigen Öffnung der zumindest einen Verbindungsleitung aus der im oberen Totpunkt quer zur Pleuelschwenkebene orientierten Mittellinie L heraus vorzugsweise um etwa +45° in Richtung zu dem Bereich des Pumpraumes verdreht werden kann, in dem die diesem Pumpraum zugeordneten Membrane während eines Pumpzyklus zuerst abwälzt. Dabei lassen sich die angestrebten Vorteile bereits erreichen, wenn wenigstens im Pumpraum der in Förderrichtung zweiten Pumpstufe zur Verbesserung des Ansaugdruckes die saugseitige Öffnung der zumindest einen Verbindungsleitung verdreht wird beziehungsweise wenn zur Verbesserung des Saugvermögens wenigstens im Pumpraum der in Förderrichtung ersten Pumpstufe die druckseitige Öffnung verdreht wird. In Fig. 3c is indicated that the pressure and suction side openings of the at least one connecting line are arranged on a transverse to the connecting rod pivot plane center line L. Comparing FIG. 1 c with FIG. 3 c, it becomes clear that the arrangement of the suction-side opening of the at least one connecting line to improve the suction pressure out of the center line L oriented at top dead center transversely to the connecting rod pivot plane, for example, by about -45 ° in the direction can be rotated to the region of the pumping space in which the membrane associated with this pumping space first rolls during a pumping cycle. This area is marked in Figure 3c with "B" and "C". By contrast, it is clear from a comparison of FIGS. 2c and 3c that the arrangement of the pressure-side opening of the at least one connecting line out of the center line L oriented at top dead center transversely to the connecting rod pivot plane preferably out by approximately + 45 ° in the direction of the region of Pumping space can be rotated, in which the associated pump chamber first rolls during a pumping cycle. In this case, the desired benefits can already be achieved if at least in the pump room the second in the conveying direction Pumping step to improve the suction pressure, the suction-side opening of the at least one connecting line is rotated or if the pressure-side opening is rotated at least in the pump chamber of the first pumping stage in the conveying direction to improve the pumping speed.
Demgegenüber zeichnen sich die in den Figuren 1 , 2 , 5c , 5d, 7 , 8 , 9 und 10 dargestellten Pumpenausführungen 10 durch hinsichtlich ihres Ansaugdruckes oder ihres Saugvermögens optimierte Pum- pencharakteristika aus. In contrast, the pump embodiments 10 illustrated in FIGS. 1, 2, 5c, 5d, 7, 8, 9 and 10 are characterized by pump characteristics optimized with regard to their suction pressure or their pumping speed.
So ist zur Verbesserung des Ansaugdrucks bei den in den Figuren 1,5c, 7, 9 und 10 gezeigten Pumpenausführungen die saugseitige Öffnung 12 der zumindest einen Verbindungsleitung 8,9,11 in dem Bereich des Pumpraumes angeordnet oder diesem Bereich angenähert, an dem die diesem Pumpraum zugeordnete Membrane während eines Pumpzyklus zuerst abwälzt. Die saugseitige Öffnung 12 ist also aus der Pumpenlängsmittelebene heraus vorzugsweise etwa um 45° in Richtung zu dem Bereich des Pumpen- raumes 2,3,4 versetzt und somit in der Hemisphere des Pumpraumes 2,3,4 angeordnet, in den die diesen Pumpraum zugewandte Membrane während eines Pumpzyklusses zuerst abwälzt. Thus, in order to improve the suction pressure in the pump embodiments shown in FIGS. 1, 5, 7, 9 and 10, the suction-side opening 12 of the at least one connecting line 8, 9, 11 is arranged in the region of the pump chamber or approximates this region at which the latter Pumping assigned diaphragm pumping during a pumping cycle first. The suction-side opening 12 is thus offset from the pump longitudinal center plane, preferably by approximately 45 ° in the direction of the region of the pump chamber 2, 3, 4, and thus arranged in the hemisphere of the pumping space 2, 3, 4 into which the pump chamber faces The diaphragm is rolled over first during a pumping cycle.
Die Umschaltung vom parallelen zum seriellen Pumpbetrieb der hier dargestellten mehrstufigen Membran-Pumpen kommt nämlich zustande, wenn der Ansaugdruck in der folgenden Stufe niedriger ist als der Ausschiebedruck in der vorherigen Stufe. Damit dieser Effekt auftreten kann, müssen die Kurbelwinkel des dem Pleuel zugeordneten Kurbeltriebes von Kopf zu Kopf vorzugsweise um 180° versetzt angeordnet sein. Je näher nun die kleine saugseitige Öffnung 12 einer Verbindungsleitung 8,9 oder 11 in der Pleuelschwingebene liegt, und zwar auf der Seite des Dichtungsraumes, auf der das Pleuel beim Aufwärtshub durch die Kippbewegung des Pleuels in Drehrichtung ausgelenkt wird und durch die Nähe zur Pleuelschwingebene, um so niedriger ergibt sich der Ansaugdruck. Der niedrigste Ansaugdruck in der nächsten Stufe ergibt sich, wenn die kleine saugseitige Öffnung 12 zumindest einer Verbindungsleitung 8,9,11 genau in der Pleuelschwingebene liegt. Jede Lage zwischen dem Nullpunkt und der Pleuelschwingebene ergibt ihren eigenen Ansaugdruck. Auf diese Weise kann man den Übergang der Saugkurve der parallel geschalteten Pumpe zur Saugkurve der in Serie geschalteten Pumpe beeinflussen. Dabei ist eine Beeinflussung schon möglich, wenn auch nur in einer der Pumpstufen 2,3,4 die Anordnung der saugseitigen Öffnung 12 in die erwähnte Richtung verändert wird. Der Prozess beginnt bei der ersten Pumpstufe 1 und setzt, sich nach und nach über die weiteren Köpfe und Pumpstufen 2,3,4 fort. Durch gegebenenfalls auch unterschiedliche Schwenkwinkel in der Anordnung der saugseitigen Öffnung 12 der die Pumpstufen 2,3,4 miteinander verbindenden Verbindungsleitungen 8,9,11 in Richtung der Pleuelschwingebene kann der Übergangsbereich im Kurvenverlauf von Ansaugdruck und Saugvermögen beeinflusst werden. Namely, the switching from the parallel to the serial pumping operation of the multi-stage diaphragm pumps shown here comes about when the suction pressure in the following stage is lower than the discharge pressure in the previous stage. In order for this effect to occur, the crank angle of the crank mechanism assigned to the connecting rod must preferably be arranged offset from head to head by 180 °. The closer the small suction-side opening 12 of a connecting line 8, 9 or 11 now lies in the connecting-rod swing plane, specifically on the side of the sealing space on which the connecting rod moves upwards through the Tilting movement of the connecting rod is deflected in the direction of rotation and by the proximity to the Pleuelschwingebene, the lower the suction pressure results. The lowest suction pressure in the next stage results when the small suction-side opening 12 of at least one connecting line 8, 9, 11 lies exactly in the connecting-rod swing plane. Each position between the zero point and the connecting rod plane results in its own intake pressure. In this way, one can influence the transition of the suction curve of the pump connected in parallel to the suction curve of the pump connected in series. In this case, an influence is already possible if only in one of the pump stages 2, 3, 4 the arrangement of the suction-side opening 12 in the mentioned direction is changed. The process begins at the first pumping stage 1 and continues, gradually over the other heads and pumping stages 2,3,4. By optionally also different pivoting angles in the arrangement of the suction-side opening 12 of the connecting sections 8, 9, 11 connecting the pumping stages 2, 3, 11 in the direction of the connecting-rod swinging plane, the transitional region in the course of the curve can be influenced by suction pressure and pumping speed.
Bei den in den Figuren 2 , 5d und 8 gezeigten Pumpenausführungen soll stattdessen das Saugvermögen verbessert werden. Dazu ist in wenigstens einer Pumpstufe 1,2,3,4 die druckseitige Öffnung 10 der zumindest einen Verbindungsleitung 8,9,11 in dem Bereich des Pumpraumes 1,2,3,4 angeordnet oder diesem Bereich angenähert, an der die diesem Pumpraum 1,2,3,4 zugeordneten Membrane während eines Pumpzyklusses zuerst abwälzt. Die druckseitige Öffnung 13 ist also aus der Pumpenlängsmittelebene heraus vorzugsweise etwa um 45° in Richtung zu dem Bereich des Pumpraumes versetzt und somit in der Hemisphere des Pumpraumes angeordnet, in dem die diesen Pumpraum zugeordnete Membrane während eines Pumpzyklusses zuerst abwälzt. In Fig.4 ist auch der Kurvenverlauf von Ansaugdruck und Saugvermögen bei den in den Figuren 1,5c, 7, 9 und 10 gezeigten Pumpenausführungen einerseits und bei den in den Figuren 2 , 5d und 8 dargestellten Pumpenausführungen andererseits abgebildet. Während sich der mit ,,-45°/+45°" gekennzeichnete Kurvenverlauf der in den Figuren 1,5c, 7, 9 und 10 gezeigten Pumpenausführungen durch einen verbesserten, nämlich zusätzlich reduzierten Ansaugdruck auszeichnet, weist der mit „+45°/-45°" markierte Kurvenverlauf der in den Figuren 2 , 5d und 8 gezeigten Pumpenausführungen ein verbessertes Saugvermögen auf. In the pump embodiments shown in FIGS. 2, 5d and 8, the pumping speed should instead be improved. For this purpose, in at least one pump stage 1, 2, 3, 4, the pressure-side opening 10 of the at least one connecting line 8, 9, 11 is arranged in the area of the pump space 1, 2, 3, 4 or approximates this area, at which the pump space 1 thereof , 2,3,4 associated membrane during a pumping cycle first rolls. The pressure-side opening 13 is therefore offset from the pump longitudinal center plane preferably approximately at 45 ° in the direction of the region of the pumping space and thus arranged in the hemisphere of the pumping space, in which the diaphragm associated with this pumping space first rolls during a pumping cycle. FIG. 4 also shows the curve profile of suction pressure and pumping speed in the case of the pump designs shown in FIGS. 1,5c, 7, 9 and 10 on the one hand and in the pump designs illustrated in FIGS. 2, 5d and 8 on the other hand. While the curve progression indicated by "-45 ° / + 45 °" of the pump designs shown in FIGS. 1, 5, 7, 9 and 10 is characterized by an improved, namely additionally reduced, suction pressure, the curve "+ 45 ° / -. 45 ° "marked curve of the pump designs shown in Figures 2, 5d and 8 on an improved pumping speed.
Wie aus einem Vergleich der Figuren 1 , 2 , 3 , 5c , 5d, 7 , 8 , 9 und 10 deutlich wird, sind die druck- bzw. die saugseitigen Öffnungen 12,13 der zumindest einen Verbindungsleitung 8, 9,11 und das im Fluideinlass 6 vorgesehene Saugventil etwa auf einer quer zur Pleuelschwingebene verlaufenden Linie angeordnet. As is clear from a comparison of Figures 1, 2, 3, 5c, 5d, 7, 8, 9 and 10, the pressure and the suction-side openings 12,13 of the at least one connecting line 8, 9,11 and in the Fluid inlet 6 provided suction valve arranged approximately on a line extending transversely to Pleuelschwingebene line.
Die hier dargestellten Membran-Saugpumpen 10,100 können als Va- kuum-Pumpen häufig auch zum Abpumpen feuchter Dämpfe eingesetzt werden. Bei ungünstigen Druck- und Temperaturverhältnissen kann es jedoch dabei zu einer Kondensatbildung in der letzten und in den vorangegangenen Stufen 2,3,4 kommen. Im parallelen Betrieb der Membran-Saugpumpen 10,100 ist der maximale Enddruck regel- mäßig höher als der Verdampfungsdruck des Kondensats. Das Kondensat hat deshalb noch keinen Einfluss auf den Evakuierungsvorgang. Im Serienbetrieb solcher Membran- Saugpumpen unterschreitet der Enddruck der Pumpe allerdings oft den Verdampfungspunkt des Kondensats, so dass aufgrund der Rückexpan- sion des Kondensats der Enddruck nicht erreicht werden kann. The diaphragm suction pumps 10, 100 shown here can often also be used as vacuum pumps for pumping off moist vapors. However, under unfavorable pressure and temperature conditions, condensation may occur in the last and preceding stages 2, 3, 4. In parallel operation of the membrane suction pumps 10, 100, the maximum discharge pressure is regularly higher than the evaporation pressure of the condensate. The condensate therefore has no influence on the evacuation process. In series operation of such membrane suction pumps, however, the final pressure of the pump often falls below the evaporation point of the condensate, so that the final pressure can not be achieved due to the back expansion of the condensate.
Bei den in den Figuren 6 bis 10 gezeigten Pumpenausführungen ist zumindest eine Verbindungsleitung 8, 9,10 insbesondere zwischen nachfolgenden Pumpräumen 2,3,4 mit einem fallenden Leitungsverlauf ausgestaltet, wozu der zuströmseitige Leitungsabschnitt im Vergleich zum abströmseitigen Leitungsabschnitt der Verbindungsleitungen 8,9,11 höher angeordnet ist. Mit dieser fallenden Anordnung der zumindest einen, insbesondere zwischen nachfolgenden Pumpräumen 2,3,4 vorgesehenen Verbindungsleitung 8,9,11 wird ein Ausblasen des in den nachfolgenden Pumpräumen eventuell auftretenden Kondensats erleichtert und die Pumpencharakteristik der hier dargestellten Membran-Saugpumpen im Hinblick auf ihr Saugvermögen noch zusätzlich begünstigt. Dabei tritt das Kondensat regelmäßig in der Nähe des Atmosphärendruckes und somit meist in den letzten drei Stufen der in Serie geschalteten Pumpräume der mehrstufigen Membran-Saugpumpen auf. Die hier dargestellten Membran- Saugpumpen zeichnen sich durch einen kontinuierlichen Evakuierungsprozess aus, obwohl ständig etwaiges Kondensat durch das Arbeitsgas selbst ausgeblasen wird. Wie aus einem Vergleich der Figuren 9 und 10 deutlich wird, müssen die in den auf beiden Seiten des Pumpgehäuses angebrachten Köpfen befindlichen saugseitigen Öffnungen 12 der Verbindungsleitungen 8, 9, 11 in Richtung der Pleuelschwingebene und auf der Seite des Kopfes, bei der das Pleuel bei Aufwärtshub durch die Kippbewegung in Drehrichtung ausgelenkt wird, angeordnet sein, wenn man eine Optimierung der Saugkurve hinsichtlich des Ansaugdruckes durch eine Veränderung der Umschaltdrücke mittels einer versetzten Anordnung der im Pumpraum 1,2,3,4 vorgesehenen Öffnungen der Verbindungsleitungen 8, 9, 11 anstrebt. Dadurch kommt in der zweiten Pumpstufe 2 die saugseitige Öffnung 12 über der Achse zu liegen, während die druckseitige Öffnung in der dritten Pumpstufe 3 unter die Achse gelegt werden kann, so dass bei liegender Lage einer solchen Boxerpumpe eine fallende Verbindungsleitung geschaffen wird. Wird die oben beschriebene Boxerpumpe demgegenüber - wie in den Figuren 6 bis 8 gezeigt - in stehender Lage betrieben, ist die Verbindungsleitung 8 zwischen der zweiten und der dritten Pumpstufe 2 , 3 horizontal angeordnet, während die Verbindungs- leitung 9 zwischen der dritten und der vierten Pumpstufe 3 , 4 fallend angeordnet ist. Dabei wird eine Ausführungsform bevorzugt, bei der die saugseitige Öffnung 1 2 der in der zweiten Pumpstufe 2 vorgesehenen Verbindungsleitung oberhalb der Kurbelachse und/oder die druckseitige Öffnung der in der dritten Pumpstufe 3 vorgesehene Verbindungsleitung unterhalb der Kurbelachse (Fig. 7b , 8b ) angeordnet ist. In the pump embodiments shown in FIGS. 6 to 10, at least one connecting line 8, 9, 10 is in particular configured between subsequent pump chambers 2,3,4 with a falling line, for which the inflow-side line section 8,9,11 is higher compared to the downstream line section of the connecting lines. With this falling arrangement of the at least one, in particular between subsequent pump chambers 2,3,4 provided connecting line 8,9,11 blowing out the condensate possibly occurring in the subsequent pump chambers is facilitated and the pump characteristics of the diaphragm suction pumps shown here in terms of their pumping speed additionally favored. In this case, the condensate occurs regularly in the vicinity of the atmospheric pressure and thus usually in the last three stages of the series-connected pump chambers of the multi-stage diaphragm suction pumps. The membrane suction pumps shown here are characterized by a continuous evacuation process, although any condensate is constantly blown out by the working gas itself. As is clear from a comparison of Figures 9 and 10, located in the mounted on both sides of the pump housing heads suction openings 12 of the connecting lines 8, 9, 11 in the direction of Pleuelschwingebene and on the side of the head, in which the connecting rod at Upward stroke is deflected by the tilting movement in the direction of rotation, be arranged if one seeks to optimize the suction curve in terms of suction pressure by changing the switching pressures by means of a staggered arrangement of provided in the pump chamber 1,2,3,4 openings of the connecting lines 8, 9, 11 , Characterized comes in the second pumping stage 2, the suction-side opening 12 to lie over the axis, while the pressure-side opening in the third pumping stage 3 can be placed under the axis, so that when lying position of such a boxer pump, a falling connection line is created. In contrast, when the boxer pump described above is operated in a standing position as shown in FIGS. 6 to 8, the connecting line 8 is arranged horizontally between the second and third pumping stages 2, 3, while the connecting line 9 is arranged between the third and the fourth Pumping stage 3, 4 is arranged falling. An embodiment is preferred in which the suction-side opening 1 2 of the connecting line provided in the second pumping stage 2 is arranged above the crank axle and / or the pressure-side opening of the connecting line provided in the third pumping stage 3 below the crank axle (FIGS. 7b, 8b) ,
In Figur 1 1 ist schematisch veranschaulicht, dass der Querschnitt d der Verbindungsleitungen 8 , 9 , 1 1 zwischen den ver- gleichsweise klein ausgestalteten Rückschlagventilen so ausgelegt werden sollte, dass die darin auftretende Gasgeschwindigkeit zum Ausblasen des Kondensats ausreicht. Die Verbindungsleitungen der hier dargestellten Pumpenausführungen weisen daher einen Leitungsdurchmesser d auf, der gleich oder kleiner der Hälfte des lichten Leitungsquerschnitts D der zu den Druckoder Saugventilen führenden Druck- oder Saugleitungen ist. Damit wird bei fallender oder horizontaler Anordnung der Verbindungsleitungen 8 , 9 , 1 1 die niedrigste wirksame Gasgeschwindigkeit erreicht. FIG. 11 schematically illustrates that the cross section d of the connecting lines 8, 9, 11 between the relatively small non-return valves should be designed so that the gas velocity occurring therein is sufficient to blow out the condensate. The connecting lines of the pump embodiments shown here therefore have a line diameter d, which is equal to or less than half of the clear line cross-section D of the leading to the pressure or suction valves pressure or suction lines. Thus, the lowest effective gas velocity is achieved with falling or horizontal arrangement of the connecting lines 8, 9, 1 1.
Ansprüche claims

Claims

Ansprüche  claims
Mehrstufige Membran- Saugpumpe (10) mit mindestens zwei Pumpräumen (1,2,3,4), die jeweils einen, wenigstens ein Einlassventil aufweisenden Fluideinlass (6) und einen, zumindest ein Auslassventil aufweisenden Fluidauslass (7) haben, sowie mit einer die Fluideinlässe (6) der Pumpräume (1,2,3,4) verbindenden Saugleitung, wobei einander nachfolgende Pumpräume (1,2,3,4) jeweils über mindestens eine Verbindungsleitung (8,9,11) derart miteinander verbunden sind, dass die Membranpumpe (10) bei Erreichen/ Überschreiten eines Differenzdruckes in der Saugleitung von einem parallel arbeitenden Betrieb ihrer Pumpräume (1,2,3,4) in einen zumindest auch seriell arbeitenden Betrieb dieser Pumpräume übergeht, und wobei im Einström- und im Ausströmbereich der mindestens einen Verbindungsleitung (8,9,11) jeweils wenigstens ein zur nachfolgenden Pumpstufe öffnendes Rückschlagventil zwischengeschaltet ist, dadurch gekennzeichnet, dass wenigstens in einem Pumpraum (1,2,3,4) entweder zur Verbesserung des Ansaugdruckes die saugseitige Öffnung (12) der zumindest einen Verbindungsleitung (8,9,11) oder zur Verbesserung des Saugvermögens die druckseitige Öffnung (13) der zumindest einen Verbindungsleitung (8,9,11) in dem Bereich (B,C) des Pumpraumes (1,2,3,4) angeordnet oder diesem Bereich (B,C) angenähert ist, an dem die diesem Pumpraum zugeordnete Membrane während eines Pumpzyklus zuerst abwälzt. Multi-stage diaphragm suction pump (10) having at least two pump chambers (1, 2, 3, 4), each having a fluid inlet (6) having at least one inlet valve and a fluid outlet (7) having at least one outlet valve, and having one Fluid inlets (6) of the pump chambers (1,2,3,4) connecting suction line, wherein each subsequent pumping chambers (1,2,3,4) in each case via at least one connecting line (8,9,11) are interconnected such that the Membrane pump (10) on reaching / exceeding a differential pressure in the suction line of a parallel operating operation of their pumping chambers (1,2,3,4) merges into an at least also serially operating operation of these pumping rooms, and wherein in the inflow and outflow of the at least a connecting line (8,9,11) is interposed in each case at least one check valve opening to the subsequent pumping stage, characterized in that at least in a pumping space (1,2,3,4) either for improvement the suction-side opening (12) of the at least one connecting line (8, 9, 11) or for improving the pumping speed the pressure-side opening (13) of the at least one connecting line (8, 9, 11) in the area (B, C) the pump chamber (1,2,3,4) is arranged or approximates this region (B, C), at which the diaphragm associated with this pumping chamber first circulates during a pumping cycle.
Membran-Saugpumpe nach Anspruch 1, dadurch gekennzeichnet, dass jedem Pumpraum (1,2,3,4) der Membran-Pumpe (10) ein in einer Pleuelschwingebene verschwenkbarer Pleuel zugeordnet ist und dass zumindest in einem Pumpraum (1,2,3,4) die saugseitige oder die druckseitige Öffnung (12,13) zumindest einer Verbindungsleitung (8,9,11) in der Pleuelschwingebene vorgesehen ist. Membrane suction pump according to claim 1, characterized in that each pump chamber (1, 2, 3, 4) of the diaphragm pump (10) is associated with a pivotable connecting rod in a connecting rod and that at least in one pump chamber (1, 2, 3, 4) the suction side or the pressure side opening (12,13) is provided at least one connecting line (8,9,11) in the Pleuelschwingebene.
Membran-Saugpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die saugseitige oder die druckseitige Öffnung (12,13) der zumindest einen Verbindungsleitung (8,9,11) in dem an die Einspannzone der Membrane angrenzenden Randbereich des Pumpraumes (1,2,3,4) angeordnet ist . Membrane suction pump according to claim 1 or 2, characterized in that the suction-side or the pressure-side opening (12,13) of the at least one connecting line (8,9,11) in the adjacent to the clamping zone of the membrane edge region of the pump chamber (1,2 , 3,4) is arranged.
Membran-Saugpumpe nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass zumindest in einem Pumpraum (1,2,3,4) die saugseitige oder die druckseitige Öffnung (12,13) der zumindest einen Verbindungsleitung (8,9,11) und das Saugventil etwa auf einer quer zur Pleuelschwingebene verlaufenden Linie angeordnet sind. Membrane suction pump according to one of claims 1 to 3, characterized in that at least in a pump chamber (1,2,3,4), the suction-side or the pressure-side opening (12,13) of the at least one connecting line (8,9,11) and the suction valve are arranged approximately on a line extending transversely to the Pleuelschwingebene line.
Membran-Saugpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass wenigstens im Pumpraum (2) der in Förderrichtung zweiten Pumpstufe zur Verbesserung des Ansaugdruckes die saugseitige Öffnung (12) der zumindest einen Verbindungsleitung in dem Bereich des Pumpraumes (2) angeordnet oder diesem Bereich angenähert ist, an dem die diesem Pumpraum zugeordnete Membrane während eines Pumpzyklus zuerst abwälzt. Membrane suction pump according to one of claims 1 to 4, characterized in that arranged at least in the pump chamber (2) in the conveying direction second pumping stage to improve the suction pressure, the suction side opening (12) of the at least one connecting line in the region of the pump chamber (2) or approximates this range, at which the membrane associated with this pumping room first rolls during a pumping cycle.
Membran- Saugpumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass wenigstens im Pumpraum (1) der in Förderrichtung ersten Pumpstufe zur Verbesserung des Saugvermögens die druckseitige Öffnung (13) der zumindest einen Verbindungsleitung im Bereich des Pumpraumes (1) angeordnet oder diesem Bereich angenähert ist, an dem die diesem Pumpraum zugeordnete Membrane während eines Pump- zyklus zuerst abwälzt. Membrane suction pump according to one of claims 1 to 4, characterized in that arranged at least in the pump chamber (1) in the conveying direction of the first pumping stage to improve the pumping speed, the pressure-side opening (13) of the at least one connecting line in the region of the pump chamber (1) or this Is approached, at which the membrane associated with this pumping space during a pumping cycle first.
Membran-Saugpumpe nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass zumindest eine Verbindungsleitung (8,9,11) insbesondere zwischen nachfolgenden Pumpräumen (1,2,3,4) einen fallenden Leitungsverlauf hat und dass dazu der zuströmseitige Leitungsabschnitt im Vergleich zum abströmseitigen Leitungsabschnitt dieser zumindest einen Verbindungsleitung (8,9,11) höher angeordnet ist . Membrane suction pump according to one of claims 1 to 6, characterized in that at least one connecting line (8,9,11) in particular between subsequent pump chambers (1,2,3,4) has a falling line profile and that to the inflow-side line section in comparison to the outflow line section of this at least one connecting line (8,9,11) is arranged higher.
Membran-Saugpumpe nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass die Pumpstufen (1,2,3,4) der mehrstufigen Membran-Pumpe (10,100) paarweise in einer Boxerform angeordnet sind. Membrane suction pump according to one of claims 1 to 7, characterized in that the pumping stages (1,2,3,4) of the multi-stage diaphragm pump (10,100) are arranged in pairs in a boxer form.
Membran-Saugpumpe nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass die saugseitige Öffnung (12) der in der zweiten Pumpstufe (2) vorgesehenen Verbindungsleitung (9) oberhalb der Kurbelachse und/oder die druckseitige Öffnung (13) der in der dritten Pumpstufe (3) vorgesehenen Verbindungsleitung unterhalb der Kurbelachse angeordnet ist. Membrane suction pump according to one of claims 1 to 8, characterized in that the suction-side opening (12) provided in the second pump stage (2) connecting line (9) above the crank axis and / or the pressure-side opening (13) in the third Pump stage (3) provided connecting line is arranged below the crank axle.
Membran-Saugpumpe nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Verbindungsleitungen (8,9,11) einen Leitungsdurchmesser haben, der gleich oder kleiner der Hälfte des lichten Leitungsquerschnitts der zu den Druck- oder Saugventilen führenden Druck- oder Saugleitungen ist. Membrane suction pump according to one of claims 1 to 9, characterized in that the connecting lines (8,9,11) have a line diameter which is equal to or less than half of the clear line cross-section of leading to the pressure or suction valves pressure or suction lines ,
Membran-Saugpumpe nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass die Membran-Saugpumpe (10,100) vier Pumpräume (1,2,3,4) hat. Membrane suction pump according to one of claims 1 to 10, characterized in that the membrane suction pump (10,100) has four pump rooms (1,2,3,4).
12. Membran-Saugpumpe nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass im ersten und im letzten Pumpraum (1,4) der einander nachfolgenden Pumpräume (1,2,3,4) zumindest eine saug- oder druckseitige Öffnung einer Verbindungsleitung und in den dazwischen angeordneten Pumpräumen (2,3) wenigstens eine saug- und mindestens eine druckseitige Öffnung der Verbindungsleitungen vorgesehen sind. 12. membrane suction pump according to one of claims 1 to 11, characterized in that in the first and in the last pump chamber (1,4) of the successive pump chambers (1,2,3,4) at least one suction or pressure side opening of a connecting line and in the interposed pump chambers (2,3) at least one suction and at least one pressure-side opening of the connecting lines are provided.
EP20100745570 2009-09-29 2010-08-18 Multi-stage diaphragm suction pump Active EP2483559B1 (en)

Applications Claiming Priority (2)

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DE102009043644A DE102009043644B4 (en) 2009-09-29 2009-09-29 Multi-stage membrane suction pump
PCT/EP2010/005061 WO2011038807A2 (en) 2009-09-29 2010-08-18 Multi-stage diaphragm suction pump

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EP2483559A2 true EP2483559A2 (en) 2012-08-08
EP2483559B1 EP2483559B1 (en) 2013-06-05

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JP (1) JP5511966B2 (en)
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US11009020B2 (en) * 2016-11-28 2021-05-18 Massachusetts Institute Of Technology Vacuum pumps and methods of manufacturing the same
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WO2011038807A2 (en) 2011-04-07
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ES2425545T3 (en) 2013-10-16
US9004877B2 (en) 2015-04-14
KR20120083880A (en) 2012-07-26
JP5511966B2 (en) 2014-06-04
WO2011038807A8 (en) 2011-09-09
US20120189468A1 (en) 2012-07-26
EP2483559B1 (en) 2013-06-05
KR101793750B1 (en) 2017-11-03
DE102009043644A1 (en) 2011-04-21
DE102009043644B4 (en) 2011-07-07
CN102667151B (en) 2015-04-08
WO2011038807A3 (en) 2011-07-07

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