EP1278962B1 - Device for delivering moist gases - Google Patents
Device for delivering moist gases Download PDFInfo
- Publication number
- EP1278962B1 EP1278962B1 EP01949304A EP01949304A EP1278962B1 EP 1278962 B1 EP1278962 B1 EP 1278962B1 EP 01949304 A EP01949304 A EP 01949304A EP 01949304 A EP01949304 A EP 01949304A EP 1278962 B1 EP1278962 B1 EP 1278962B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- ventilation
- delivery
- valve
- pumps
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/18—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids
- F04B37/20—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids for wet gases, e.g. wet air
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
Definitions
- the present invention relates to a multi-stage apparatus for conveying moist gases, with a plurality of feed pumps, each having a, oscillating in a delivery chamber displacer and are connected downstream via a respective connecting channel, and with a ventilation device having at least one ventilation duct, wherein the ventilation duct in a connection downstream of each other connected feed pump connecting channel opens.
- a device which has at least one feed pump for conveying moist gases.
- Each of these feed pumps has a displacer which oscillates in a delivery chamber.
- the pump head of this pump is forcibly cooled.
- At least one delivery pump has a ventilation device with a ventilation channel, which opens in the region of the delivery chamber. In this ventilation duct, a ventilation valve is interposed, which, if necessary, and independently of the stroke position of the displacer during operation of the feed pump can be actuated.
- a targeted flow having a sufficiently high flow velocity is built up in the feed pump in order to entrain the liquid droplets previously left in the feed space.
- a multi-stage conveying device is already known, the pumping stages of which are connected to one another via a connecting channel serving as an intermediate vacuum space.
- the previously known conveyor has a ventilation channel, which opens into the connecting channel and is provided with a throttle point.
- the connecting channel is in turn, optionally via a further throttle point, connected to the pump chamber of the first pumping stage.
- a multi-stage device for conveying moist gases which has a plurality of feed pump. From these feed pumps two downstream feed pumps are designed as positive displacement pumps, which have a, in a pumping chamber oscillating displacer and are connected downstream of each other via a connecting channel. To reduce or to avoid condensation can be admitted at various points of the prior art device by appropriately arranged gas ballast valves gas in such a way that is not exceeded in the compression of the dew point of the vapors to be pumped.
- the known device has for this purpose a ventilation device with a gas ballast valve, which opens gas ballast valve in a, downstream of each other feed pumps interconnecting connecting channel.
- the conveyor device according to the invention should be associated with the least possible manufacturing and design effort.
- the achievement of this object is, in particular, that in the ventilation duct, a motor actuated via a control device vent valve is interposed, which vent valve is required and independent of the stroke position of the displacer operable and that the outlet of the connecting channel upstream conveyor stage is configured simultaneously as a check valve, which suddenly closes when opening the vent valve.
- the device according to the invention has a ventilation valve that can be actuated by a motor via a control device.
- the venting valve is interposed in the ventilation duct, which opens into a subsequent connecting pump channel interconnecting connecting channel.
- the ventilation valve can be actuated by the control device as required and independently of the stroke position of the displacer and can thus be repeatedly opened intermittently during operation of the conveyor, for example, once or at intervals of time.
- the venting of the conveying device can take place during its operation once or several times offset in time, for example, after certain condensation times or at different pressure levels in a chamber to be evacuated by the conveyor.
- the conveying stage following the conveyor stage is a targeted in the feed pump Flow with a sufficiently high flow rate constructed to entrain the so far in the pumping chamber, in particular this pump remaining liquid and condensate drops. Since at the same time the exhaust valve of the delivery channel upstream conveyor stage closes when opening the ventilation valve, the ventilation or drying gas can take only one direction, while the already achieved in the upstream stages and in particular in the chamber to be evacuated vacuum is substantially maintained.
- the ventilation duct can also be performed outside the pump heads of the feed pump and can open in the connecting channel. In such an embodiment according to the invention, the manufacturing and design effort is additionally significantly reduced.
- a particularly advantageous and easy-to-use embodiment according to the invention provides that in control connection with the venting valve control device has a timer and / or a pressure sensor for single or multiple intermittent actuation of the ventilation valve in dependence on the condensation time and / or in dependence of predetermined Pressure levels in a means of the conveyor to be evacuated chamber.
- the conveying device according to the invention can be used advantageously in all applications with a high concentration of condensate.
- the feed pump belonging to the first stage of the conveying device according to the invention is connected on the suction side to an autoclave or to a vacuum drying chamber and on the pressure side to the suction side of the second feed pump.
- feed pumps used in the individual stages of the conveyor are commercially available pumps, in particular diaphragm pumps.
- a preferred and structurally particularly simple embodiment according to the invention provides that the motor-operated vent valve is a solenoid valve.
- a two-stage conveyor device 1 which is intended for conveying moist and especially condensate-containing gases.
- the conveying direction 1 has two feed pumps 2, 3, each having one, in a delivery chamber 4 oscillating displacer.
- the feed pumps 2, 3 are designed here as diaphragm pumps and their displacers as shaped diaphragms 5.
- the feed pumps 2, 3 are connected downstream via a connecting channel 6.
- the feed pump 2 forming the first conveyor stage is connected on the suction side to an autoclave, a vacuum drying chamber or the like vacuum chamber and on the pressure side to the suction side of the second feed pump 3.
- the conveying device 1 has a ventilation device 7 with a ventilation channel 8, which opens in the connecting channel 6 between the first and second pumping stage.
- a ventilation valve 9 is interposed in the ventilation channel 8.
- the venting valve 9 can be opened once or intermittently during the operation of the conveyor 1 once or in time intervals.
- the conveying channel 8 of the subsequent conveying stage is a targeted flow with a sufficiently high in the feed pump 3 Flow rate constructed to entrain in the delivery room, in particular this feed pump 3 so far remaining liquid and condensate drops. Since when opening the vent valve 9 at the same time the outlet valve 10 of the ventilation channel 8 upstream conveyor stage 2 closes, the ventilation or drying gas can take only one direction, while the already achieved in the upstream conveyor stage 2 and in particular in the evacuated chamber vacuum substantially preserved.
- the connecting channel 6 has a channel section formed from a pipe or a hose 11 and in each case one, in the pump heads of the feed pumps 2.3 between the hose 11 and the outlet and the inlet valve 10, 12 located channel section 13,14.
- the ventilation channel 8 is arranged here in the pump head of the first feed pump 2 and flows there in the outflow downstream of the outlet valve 10 arranged channel section 13.
- the ventilation channel 8 are also outside the pump heads of the feed pumps 2, 3 out and may open into the tubing 11.
- the aeration device 7 associated with the feed pump 3 is sufficient. If the vent valve 9 is opened, automatically closes the exhaust valve 10 of the first feed pump 2, so that no time or power losses occur.
- the conveying device 1 shown here also moist gases can be promoted without having to be counteracted by an artificial heating of the feed pumps 2, 3 of condensate formation.
- the conveying direction 1 shown here draws even with a high moisture content of the pumped medium by a large capacity, without this conveyor 1 requires special feed pumps and a correspondingly high manufacturing and design effort.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Reciprocating Pumps (AREA)
Description
Die vorliegende Erfindung betrifft eine mehrstufige Vorrichtung zum Fördern feuchter Gase, mit mehreren Förderpumpen, die jeweils einen, in einem Förderraum oszillierenden Verdränger aufweisen und über jeweils einen Verbindungskanal einander nachgeschaltet sind, sowie mit einer Belüftungseinrichtung, die wenigstens einen Belüftungskanal hat, wobei der Beflüftungskanal in einem einander nachgeschaltete Förderpumpen miteinander verbindenden Verbindungskanal mündet.The present invention relates to a multi-stage apparatus for conveying moist gases, with a plurality of feed pumps, each having a, oscillating in a delivery chamber displacer and are connected downstream via a respective connecting channel, and with a ventilation device having at least one ventilation duct, wherein the ventilation duct in a connection downstream of each other connected feed pump connecting channel opens.
In der nachveröffentlichten Voranmeldung DE 198 51 680 der Anmelderin ist bereits eine Vorrichtung beschrieben, die zum Fördern feuchter Gase zumindest eine Förderpumpe hat. Jede dieser Förderpumpen weist einen Verdränger auf, der in einem Förderraum oszilliert. Um die im gasförmigen Fördermedium enthaltene Flüssigkeit kondensieren, das Fördervolumen reduzieren und die beispielsweise zum Evakuieren einer Vakuumkammer benötigte Zeit möglichst klein halten zu können, ist der Pumpenkopf dieser Förderpumpe zwangsgekühlt. Zumindest eine Förderpumpe weist eine Belüftungseinrichtung mit einem Belüftungskanal auf, der im Bereich des Förderraums mündet. In diesem Belüftungskanal ist ein Belüftungsventil zwischengeschaltet, das bedarfsweise und unabhängig von der Hubstellung des Verdrängers während des Betriebs der Förderpumpe betätigbar ist.In the post-published prior application DE 198 51 680 of the applicant, a device is already described which has at least one feed pump for conveying moist gases. Each of these feed pumps has a displacer which oscillates in a delivery chamber. In order to condense the liquid contained in the gaseous medium, reduce the delivery volume and to keep the time required, for example, for evacuating a vacuum chamber as small as possible, the pump head of this pump is forcibly cooled. At least one delivery pump has a ventilation device with a ventilation channel, which opens in the region of the delivery chamber. In this ventilation duct, a ventilation valve is interposed, which, if necessary, and independently of the stroke position of the displacer during operation of the feed pump can be actuated.
Beim Betätigen des Belüftungsventils wird in der Förderpumpe eine zielgerichtete Strömung mit einer ausreichend hohen Strömungsgeschwindigkeit aufgebaut, um die im Förderraum bislang verbliebenen Flüssigkeitströpfchen mitzureißen.When the ventilation valve is actuated, a targeted flow having a sufficiently high flow velocity is built up in the feed pump in order to entrain the liquid droplets previously left in the feed space.
Durch die Kondensation der im Fördermedium enthaltenen Feuchtigkeit erfolgt eine drastische Volumenverkleinerung, womit sich schnelle Pumpzeiten und hohe Pumpleistungen erzielen lassen. Mit Hilfe der in den Förderpumpen vorgesehenen Belüftungseinrichtung kann eine schnelle und zielgerichtete Trocknung der gegebenenfalls auch mehrstufigen Fördervorrichtung erreicht werden, wodurch die Verkürzung der Evakuierungszeit noch zusätzlich begünstigt und das erreichbare Endvakuum maßgeblich reduziert werden kann. Nachteilig ist jedoch, daß die Vorrichtung gemäß DE 198 51 680 spezielle Förderpumpen erfordert, in deren Pumpenkopf der im Förderraum mündende Belüftungskanal eingearbeitet ist. Dies kann einen eventuell nicht unerheblichen Mehraufwand mit sich bringen.Due to the condensation of the moisture contained in the fluid to be drastic volume reduction, which can be achieved with fast pumping times and high pumping power. With the help of the provided in the feed pumps ventilation rapid and targeted drying of the optionally multi-stage conveyor can be achieved, whereby the shortening of the evacuation time favors even more and the achievable final vacuum can be significantly reduced. The disadvantage, however, is that the device according to DE 198 51 680 requires special feed pumps, in whose pump head the opening into the pumping chamber ventilation channel is incorporated. This can bring with it a not inconsiderable additional expenditure.
Aus der DE 198 31 123 A1 ist bereits eine mehrstufige Fördervorrichtung bekannt, deren Pumpstufen über einen als Zwischenvakuumraum dienenden Verbindungskanal miteinander verbunden sind. Die vorbekannte Fördereinrichtung weist einen Belüftungskanal auf, der im Verbindungskanal mündet und mit einer Drosselstelle versehen ist. Der Verbindungskanal ist seinerseits, gegebenenfalls über eine weitere Drosselstelle, mit dem Schöpfraum der ersten Pumpstufe verbunden. Mit Hilfe dieser Gasbalasteinrichtung soll eine ausreichende Gasmenge in den Schöpfraum der ersten Pumpstufe eingeleitet werden, um einer Kondensation und nachfolgenden Verdampfung des im abzupumpenden Gas noch enthaltenen Wasserdampfes entgegenzuwirken. Der mit dieser Gasbalasteinrichtung der vorbekannten Fördervorrichtung verbundene konstruktive Aufwand ist jedoch vergleichsweise hoch.From DE 198 31 123 A1, a multi-stage conveying device is already known, the pumping stages of which are connected to one another via a connecting channel serving as an intermediate vacuum space. The previously known conveyor has a ventilation channel, which opens into the connecting channel and is provided with a throttle point. The connecting channel is in turn, optionally via a further throttle point, connected to the pump chamber of the first pumping stage. With the help of this Gasbalasteinrichtung a sufficient amount of gas to be introduced into the pump chamber of the first pumping stage to counteract condensation and subsequent evaporation of the gas still contained in the steam to be pumped. The previously known with this Gasbalasteinrichtung Conveyor connected constructive effort, however, is relatively high.
Aus der DE 37 10 782 A1 ist eine mehrstufige Vorrichtung zum Fördern feuchter Gase bekannt, die mehrere Förderpumpe aufweist. Von diesen Förderpumpen sind zwei einander nachgeschaltete Förderpumpen als Verdrängerpumpen ausgebildet, die einen, in einem Förderraum oszillierenden Verdränger aufweisen und über einen Verbindungskanal einander nachgeschaltet sind. Zur Reduktion oder zur Vermeidung von Kondensationen kann an verschiedenen Stellen der vorbekannten Vorrichtung durch entsprechend angeordnete Gasballastventile Gas in der Weise eingelassen werden, daß bei der Kompression der Taupunkt der abzupumpenden Dämpfe nicht überschritten wird. Die vorbekannte Vorrichtung weist dazu eine Belüftungseinrichtung mit einem Gasballastventil auf, welches Gasballastventil in einem, einander nachgeschaltete Förderpumpen miteinander verbindenden Verbindungskanal mündet. Mit Hilfe der Belüftungseinrichtung und ihres Gasballastventils wird ein stetiger Gasballast in den Verbindungskanal eingebracht. Über diese Belüftungs- oder Gasballasteinrichtung der vorbekannten Fördervorrichtung erfolgt eine ständige Luftzumischung in den Schöpfraum der zuströmseitigen Pumpstufe, wobei der Druck in dieser zuströmseitigen Pumpstufe über Drosselstellen so eingestellt ist, daß kein Kondensat entsteht.From DE 37 10 782 A1 a multi-stage device for conveying moist gases is known which has a plurality of feed pump. From these feed pumps two downstream feed pumps are designed as positive displacement pumps, which have a, in a pumping chamber oscillating displacer and are connected downstream of each other via a connecting channel. To reduce or to avoid condensation can be admitted at various points of the prior art device by appropriately arranged gas ballast valves gas in such a way that is not exceeded in the compression of the dew point of the vapors to be pumped. The known device has for this purpose a ventilation device with a gas ballast valve, which opens gas ballast valve in a, downstream of each other feed pumps interconnecting connecting channel. With the help of the ventilation device and its gas ballast valve, a steady gas ballast is introduced into the connecting channel. About this ventilation or Gasballasteinrichtung the prior art conveyor is a constant Luftzumischung in the pump chamber of the inflow pump stage, the pressure in this inflow pump stage is set via throttle bodies so that no condensate is formed.
Aus der DE 296 18 911 U1 ist eine Fördervorrichtung mit einem Dekompressionskanal bekannt, der im Schöpfraum der Förderpumpe mündet und nur zur Dekompression während der Anlaufphase dient.From DE 296 18 911 U1 a conveyor device with a decompression channel is known, which opens into the pump chamber of the feed pump and serves only for decompression during the start-up phase.
Es besteht daher insbesondere die Aufgabe, eine Vorrichtung der eingangs erwähnten Art zu schaffen, die sich auch bei einem hohen Feuchtigkeitsanteil des Fördermediums durch eine große Förderleistung auszeichnet, wobei die erfindungsgemäße Fördervorrichtung mit einem möglichst geringen Herstellungs- und Konstruktionsaufwand verbunden sein soll.There is therefore a particular object to provide a device of the type mentioned above, which is also at a high moisture content of the pumped medium characterized by a large flow rate, the conveyor device according to the invention should be associated with the least possible manufacturing and design effort.
Die erfindungsgemäße Lösung dieser Aufgabe besteht insbesondere darin, daß in den Belüftungskanal ein motorisch über eine Steuereinrichtung betätigbares Belüftungsventil zwischengeschaltet ist, welches Belüftungsventil bedarfsweise und unabhängig von der Hubstellung der Verdränger betätigbar ist und daß das Auslassventil der dem Verbindungskanal vorgeschalteten Förderstufe gleichzeitig als Rückschlagventil ausgestaltet ist, welches beim Öffnen des Belüftungsventils schlagartig schließt.The achievement of this object is, in particular, that in the ventilation duct, a motor actuated via a control device vent valve is interposed, which vent valve is required and independent of the stroke position of the displacer operable and that the outlet of the connecting channel upstream conveyor stage is configured simultaneously as a check valve, which suddenly closes when opening the vent valve.
Die erfindungsgemäße Vorrichtung weist ein motorisch über eine Steuereinrichtung betätigbares Belüftungsventil auf. Das Belüftungsventil ist in den Belüftungskanal zwischengeschaltet, der in einem nachfolgende Pumpstufen miteinander verbindenden Verbindungskanal mündet. Das Belüftungsventil ist mittels der Steuereinrichtung bedarfsweise und unabhängig von der Hubstellung der Verdränger betätigbar und kann somit während des Betriebs der Fördervorrichtung beispielsweise einmal oder in Zeitintervallen mehrmals stoßweise geöffnet werden.The device according to the invention has a ventilation valve that can be actuated by a motor via a control device. The venting valve is interposed in the ventilation duct, which opens into a subsequent connecting pump channel interconnecting connecting channel. The ventilation valve can be actuated by the control device as required and independently of the stroke position of the displacer and can thus be repeatedly opened intermittently during operation of the conveyor, for example, once or at intervals of time.
Das Belüften der Fördervorrichtung kann während ihres Betriebes einmal oder mehrmals zeitlich versetzt beispielsweise nach bestimmten Kondensationszeiten oder bei verschiedenen Druckstufen in einer mittels der Fördervorrichtung zu evakuierenden Kammer erfolgen. Durch das Belüften der Fördervorrichtung wird in der Förderpumpe der dem Belüftungskanal nachfolgenden Förderstufe eine zielgerichtete Strömung mit einer ausreichend hohen Strömungsgeschwindigkeit aufgebaut, um die im Förderraum insbesondere dieser Förderpumpe bislang verbliebenen Flüssigkeits- und Kondensattropfen mitzureißen. Da beim Öffnen des Belüftungsventils gleichzeitig das Auslaßventil der dem Belüftungskanal vorgeschalteten Förderstufe schlagartig schließt, kann das Belüftungs- bzw. Trocknungsgas nur eine Richtung nehmen, während das in den vorgeschalteten Förderstufen und insbesondere in der zu evakuierenden Kammer bereits erreichte Vakuum im wesentlichen erhalten bleibt.The venting of the conveying device can take place during its operation once or several times offset in time, for example, after certain condensation times or at different pressure levels in a chamber to be evacuated by the conveyor. By ventilating the conveyor device, the conveying stage following the conveyor stage is a targeted in the feed pump Flow with a sufficiently high flow rate constructed to entrain the so far in the pumping chamber, in particular this pump remaining liquid and condensate drops. Since at the same time the exhaust valve of the delivery channel upstream conveyor stage closes when opening the ventilation valve, the ventilation or drying gas can take only one direction, while the already achieved in the upstream stages and in particular in the chamber to be evacuated vacuum is substantially maintained.
Dabei ist es ein besonderer Vorteil der erfindungsgemäßen Fördervorrichtung, daß der Belüftungskanal auch außerhalb der Pumpenköpfe der Förderpumpe geführt werden und im Verbindungskanal münden kann. Bei einer solchen Ausführungsform gemäß der Erfindung wird der Herstellungs- und Konstruktionsaufwand noch zusätzlich wesentlich reduziert.It is a particular advantage of the conveyor device according to the invention that the ventilation duct can also be performed outside the pump heads of the feed pump and can open in the connecting channel. In such an embodiment according to the invention, the manufacturing and design effort is additionally significantly reduced.
Eine besonders vorteilhaft und leicht zu handhabende Ausführungsform gemäß der Erfindung sieht vor, daß die in Steuerverbindung mit dem Belüftungsventilstehende Steuereinrichtung ein Zeitglied und/oder einen Drucksensor hat, zum einmaligen oder mehrmaligen stoßweisen Betätigen des Belüftungsventils in Abhängigkeit von der Kondensationszeit und/oder in Abhängigkeit vorgegebener Druckstufen in einer mittels der Fördervorrichtung zu evakuierenden Kammer.A particularly advantageous and easy-to-use embodiment according to the invention provides that in control connection with the venting valve control device has a timer and / or a pressure sensor for single or multiple intermittent actuation of the ventilation valve in dependence on the condensation time and / or in dependence of predetermined Pressure levels in a means of the conveyor to be evacuated chamber.
Die erfindungsgemäße Fördervorrichtung ist bei allen stark kondensathaltigen Anwendungen vorteilhaft einsetzbar. So ist beispielsweise vorgesehen, die zur ersten Stufe der erfindungsgemäßen Fördervorrichtung gehörende Förderpumpe saugseitig an einen Autoklaven oder an eine Vakuum-Trockenkammer und druckseitig an die Saugseite der zweiten Förderpumpe anzuschließen.The conveying device according to the invention can be used advantageously in all applications with a high concentration of condensate. Thus, for example, it is provided that the feed pump belonging to the first stage of the conveying device according to the invention is connected on the suction side to an autoclave or to a vacuum drying chamber and on the pressure side to the suction side of the second feed pump.
Der geringe Konstruktions- und Herstellungsaufwand wird noch zusätzlich begünstigt, wenn die in den einzelnen Stufen der Fördervorrichtung eingesetzten Förderpumpen handelsübliche Pumpen, insbesondere Membranpumpen, sind.The low design and manufacturing costs are further enhanced if the feed pumps used in the individual stages of the conveyor are commercially available pumps, in particular diaphragm pumps.
Eine bevorzugte und konstruktiv besonders einfache Ausführungsform gemäß der Erfindung sieht vor, daß das motorisch betätigbare Belüftungsventil ein Magnetventil ist.A preferred and structurally particularly simple embodiment according to the invention provides that the motor-operated vent valve is a solenoid valve.
Weitere Merkmale der Erfindung ergeben sich aus der folgenden Beschreibung eines erfindungsgemäßen Ausführungsbeispieles in Verbindung mit den Ansprüchen sowie der Zeichnung. Die einzelnen Merkmale können je für sich oder zu mehreren bei einer Ausführungsform gemäß der Erfindung verwirklicht sein.Further features of the invention will become apparent from the following description of an embodiment of the invention in Connection with the claims and the drawing. The individual features may be implemented individually or in combination in an embodiment according to the invention.
In der einzigen Figur ist eine hier zweistufig ausgebildete Fördervorrichtung 1 dargestellt, die zum Fördern feuchter und insbesondere kondensathaltiger Gase bestimmt ist. Die Förderrichtung 1 hat zwei Förderpumpen 2,3, die jeweils einen, in einem Förderraum 4 oszillierenden Verdränger aufweisen. Die Förderpumpen 2,3 sind hier als Membranpumpen und ihre Verdränger als Formmembranen 5 ausgebildet.In the single figure, here a two-stage conveyor device 1 is shown, which is intended for conveying moist and especially condensate-containing gases. The conveying direction 1 has two
Die Förderpumpen 2,3 sind über einen Verbindungskanal 6 einander nachgeschaltet. Dabei ist die die erste Förderstufe bildende Förderpumpe 2 saugseitig an einen Autoklaven, eine Vakuum-Trockenkammer oder dergleichen Vakuumkammer und druckseitig an die Saugseite der zweiten Förderpumpe 3 angeschlossen.The
Die Fördervorrichtung 1 hat eine Belüftungsvorrichtung 7 mit einem Belüftungskanal 8, der im Verbindungskanal 6 zwischen erster und zweiter Pumpstufe mündet. In dem Belüftungskanal 8 ist ein Belüftungsventil 9 zwischengeschaltet. Um die Fördervorrichtung 1 bedarfsweise und unabhängig von der Hubstellung ihrer Förderpumpen 2,3 belüften zu können, kann das Belüftungsventil 9 während des Betriebs der Fördereinrichtung 1 einmal oder in Zeitintervallen mehrmals stoßweise geöffnet werden.The conveying device 1 has a
Das Belüften der Fördervorrichtung 1 kann während ihres Betriebes einmal oder mehrmals zeitlich versetzt beispielsweise nach bestimmten Kondensationszeiten oder bei verschiedenen Druckstufen in einer mittels der Fördervorrichtung 1 zu evakuierenden Kammer erfolgen. Durch das Belüften der Fördervorrichtung 1 wird in der Förderpumpe 3 der dem Belüftungskanal 8 nachfolgenden Förderstufe eine zielgerichtete Strömung mit einer ausreichend hohen Strömungsgeschwindigkeit aufgebaut, um die im Förderraum insbesondere dieser Förderpumpe 3 bislang verbliebenen Flüssigkeits- und Kondensattropfen mitzureißen. Da beim Öffnen des Belüftungsventils 9 gleichzeitig das Auslaßventil 10 der dem Belüftungskanal 8 vorgeschalteten Förderstufe 2 schließt, kann das Belüftungs- bzw. Trocknungsgas nur eine Richtung nehmen, während das in der vorgeschalteten Förderstufe 2 und insbesondere in der zu evakuierenden Kammer bereits erreichte Vakuum im wesentlichen erhalten bleibt.The venting of the conveyor device 1 during its operation once or several times offset in time, for example, after certain condensation times or at different pressure levels in a means of the conveyor device 1 to be evacuated chamber. By aerating the conveying device 1, the conveying channel 8 of the subsequent conveying stage is a targeted flow with a sufficiently high in the
Der Verbindungskanal 6 weist einen aus einer Rohr- oder einer Schlauchleitung 11 gebildeten Kanalabschnitt sowie jeweils einen, in den Pumpenköpfen der Förderpumpen 2,3 zwischen der Schlauchleitung 11 und dem Auslaß- bzw. dem Einlaßventil 10, 12 befindlichen Kanalabschnitt 13,14 auf.The connecting channel 6 has a channel section formed from a pipe or a
Der Belüftungskanal 8 ist hier im Pumpenkopf der ersten Förderpumpe 2 angeordnet und mündet dort im abströmseitig hinter dem Auslaßventil 10 angeordneten Kanalabschnitt 13. Es ist jedoch ein besonderer Vorteil des vorliegenden Erfindungsvorschlages, daß der Belüftungskanal 8 auch außerhalb der Pumpenköpfe der Förderpumpen 2, 3 geführt werden und in der Schlauchleitung 11 münden kann.The ventilation channel 8 is arranged here in the pump head of the
Da in der durch die Förderpumpe 3 gebildeten zweiten Förderstufe, die gegen Atmosphärendruck verdichtet, vor allem das Kondensat auftritt, ist die der Förderpumpe 3 zugeordnete Belüftungseinrichtung 7 ausreichend. Wird das Belüftungsventil 9 geöffnet, schließt automatisch das Auslaßventil 10 der ersten Förderpumpe 2, so daß keine Zeit- oder Leistungsverluste auftreten. Mittels der hier dargestellten Fördervorrichtung 1 können auch feuchte Gase gefördert werden, ohne daß durch ein künstliches Aufheizen der Förderpumpen 2, 3 einer Kondensatbildung entgegengewirkt werden müßte. Die hier dargestellte Förderrichtung 1 zeichnet sich auch bei einem hohen Feuchtigkeitsanteil des Fördermediums durch eine große Förderleistung aus, ohne daß diese Fördervorrichtung 1 spezielle Förderpumpen und einen entsprechend hohen Herstellungs- und Konstruktionsaufwand erfordert.Since in the second delivery stage formed by the
Claims (5)
- Multistage device (1) for delivering moist gases, having a plurality of delivery pumps (2, 3), each of which has a displacer that oscillates in a delivery space and which are connected in series via a connection channel (6), and having a ventilation device (7) which has at least one ventilation channel (8), whereby the ventilation channel (8) opens into a connection channel (6) that interconnects series-connected delivery pumps (2, 3), characterised in that a ventilation valve (9) which can be motor-actuated by a control device is interposed in the ventilation channel (8) and said ventilation valve (9) can be actuated as required by means of the control device and independent of the lift position of the displacer, and in that the outlet valve (10) of the delivery stage (2) upstream of the connection channel (6) is simultaneously constructed as a non-return valve which shuts abruptly as the ventilation valve (9) is opened.
- Device according to claim 1, characterised in that the control device connected for control to the ventilation valve (9) has a timer and/or a pressure sensor, for abruptly actuating the ventilation valve (9) once or several times as a function of the condensation time and/or as a function of predetermined pressure stages in a chamber which is to be evacuated by means of the delivery device (1).
- Device according to one of claims 1 and 2, characterised in that the delivery pump (2) belonging to the first stage is connected at the intake end to an autoclave, to a vacuum drying chamber or similar vacuum chamber and at the compression end to the intake end of the second delivery pump (3).
- Device according to one of claims 1 to 3, characterised in that the delivery pumps (2, 3) installed in the individual stages of the delivery device (1) are standard commercial pumps, particularly diaphragm pumps.
- Device according to one of claims 1 to 4, characterised in that the motor-actuated ventilation valve is a solenoid valve.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10021454A DE10021454C2 (en) | 2000-05-03 | 2000-05-03 | Device for conveying moist gases |
DE10021454 | 2000-05-03 | ||
PCT/EP2001/004884 WO2001083990A1 (en) | 2000-05-03 | 2001-04-30 | Device for delivering moist gases |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1278962A1 EP1278962A1 (en) | 2003-01-29 |
EP1278962B1 true EP1278962B1 (en) | 2006-01-11 |
Family
ID=7640594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01949304A Expired - Lifetime EP1278962B1 (en) | 2000-05-03 | 2001-04-30 | Device for delivering moist gases |
Country Status (4)
Country | Link |
---|---|
US (1) | US6817839B2 (en) |
EP (1) | EP1278962B1 (en) |
DE (2) | DE10021454C2 (en) |
WO (1) | WO2001083990A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10255792C5 (en) * | 2002-11-28 | 2008-12-18 | Vacuubrand Gmbh + Co Kg | Method for controlling a vacuum pump and vacuum pump system |
DE502004007004D1 (en) | 2004-07-31 | 2008-06-12 | Hach Lange Gmbh | Fluid sample transport device |
DE102009043644B4 (en) * | 2009-09-29 | 2011-07-07 | KNF Neuberger GmbH, 79112 | Multi-stage membrane suction pump |
DE202009013127U1 (en) | 2009-09-29 | 2011-02-17 | Knf Neuberger Gmbh | Multi-stage membrane suction pump |
DE202010002145U1 (en) * | 2010-02-09 | 2011-09-07 | Vacuubrand Gmbh + Co Kg | Diaphragm vacuum pump |
DE102013213257A1 (en) * | 2013-07-05 | 2015-01-08 | Pfeiffer Vacuum Gmbh | Diaphragm vacuum pump |
CN105526128B (en) * | 2016-02-05 | 2018-11-23 | 宁波泰尔斯电子实业有限公司 | Minipump and combined micro vacuum pump |
US11009020B2 (en) | 2016-11-28 | 2021-05-18 | Massachusetts Institute Of Technology | Vacuum pumps and methods of manufacturing the same |
US11873802B2 (en) * | 2020-05-18 | 2024-01-16 | Graco Minnesota Inc. | Pump having multi-stage gas compression |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB923072A (en) * | 1958-07-23 | 1963-04-10 | Leybold Hockvakuum Anlagen Gmb | A method of and an apparatus for removing condensable vapour from a container |
FR2082631A5 (en) * | 1970-03-20 | 1971-12-10 | Gen Pneumatic | |
US4086843A (en) * | 1977-02-17 | 1978-05-02 | Caterpillar Tractor Co. | Tilt tip circuit with bypass valve |
DE3710782A1 (en) * | 1987-03-31 | 1988-10-20 | Vacuubrand Gmbh & Co | Method and device for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media |
DE29618911U1 (en) * | 1996-10-30 | 1996-12-19 | Dekema Dental-Keramiköfen GmbH, 83395 Freilassing | Pump arrangement |
JP3346208B2 (en) * | 1997-02-17 | 2002-11-18 | マックス株式会社 | Load control device for multi-stage compressor |
DE19709206A1 (en) * | 1997-03-06 | 1998-09-10 | Leybold Vakuum Gmbh | Vacuum pump |
DE19732808A1 (en) | 1997-07-30 | 1999-02-04 | Knf Neuberger Gmbh | Method for evacuating the sterilisation chamber of a steam sterilisation unit - with the medium used during evacuation cooled along its flow path in such a way that it is in or is converted into a liquid state in the delivery unit |
DE19831123A1 (en) * | 1998-07-11 | 2000-01-13 | Pfeiffer Vacuum Gmbh | Gas ballast device for multi-stage positive displacement pumps |
DE19851680C2 (en) * | 1998-11-10 | 2003-04-10 | Knf Neuberger Gmbh | Process for conveying moist gases by means of a conveying device and conveying device for carrying out this process |
US6248157B1 (en) * | 1999-08-20 | 2001-06-19 | Systec Inc. | Vacuum degassing |
JP2002155879A (en) * | 2000-11-22 | 2002-05-31 | Hitachi Ltd | Oil-free screw compressor |
-
2000
- 2000-05-03 DE DE10021454A patent/DE10021454C2/en not_active Expired - Lifetime
-
2001
- 2001-04-30 DE DE50108678T patent/DE50108678D1/en not_active Expired - Lifetime
- 2001-04-30 US US10/275,241 patent/US6817839B2/en not_active Expired - Lifetime
- 2001-04-30 EP EP01949304A patent/EP1278962B1/en not_active Expired - Lifetime
- 2001-04-30 WO PCT/EP2001/004884 patent/WO2001083990A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1278962A1 (en) | 2003-01-29 |
DE10021454C2 (en) | 2002-03-14 |
DE10021454A1 (en) | 2001-11-22 |
US20030123997A1 (en) | 2003-07-03 |
WO2001083990A1 (en) | 2001-11-08 |
DE50108678D1 (en) | 2006-04-06 |
US6817839B2 (en) | 2004-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0723080B1 (en) | Vacuum pumping system | |
DE1628144C3 (en) | Suction throttle control device | |
DE102006000099B4 (en) | diaphragm pump | |
EP1278962B1 (en) | Device for delivering moist gases | |
DE60034854T2 (en) | Vacuum induction system | |
EP1441128B1 (en) | Vacuum pump system | |
WO2009068180A1 (en) | Multi-level membrane suction pump | |
DE2020317A1 (en) | Pumping device | |
DE102013108090A1 (en) | pump assembly | |
DE19851680C2 (en) | Process for conveying moist gases by means of a conveying device and conveying device for carrying out this process | |
EP0972938B1 (en) | Gas ballast device for a multistage positive displacement pump | |
DE10255792C5 (en) | Method for controlling a vacuum pump and vacuum pump system | |
EP2483559B1 (en) | Multi-stage diaphragm suction pump | |
WO2000058629A1 (en) | Side channel compressor | |
EP0373229B1 (en) | Mechanical vacuum pump with a spring loaded return valve | |
WO2003083307A1 (en) | Pump device, method for operating a pump device and the use thereof in a steam turbine installation | |
DE2503873B2 (en) | Liquid ring pump unit | |
DE4129897A1 (en) | Control for interlinking of multistage vacuum pumps - has connection channel between pump stages with stroke valve, coupled to discharge valve | |
DE29618911U1 (en) | Pump arrangement | |
DE202009013127U1 (en) | Multi-stage membrane suction pump | |
EP1164294B1 (en) | Gas friction pump | |
DE29514009U1 (en) | Vacuum pump | |
DE10158723B4 (en) | Vacuum pump with membrane protection | |
EP3636879A1 (en) | Vacuum pump | |
DE1024668B (en) | Multi-stage high vacuum pump |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20020330 |
|
AK | Designated contracting states |
Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB |
|
17Q | First examination report despatched |
Effective date: 20040920 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): DE FR GB |
|
REF | Corresponds to: |
Ref document number: 50108678 Country of ref document: DE Date of ref document: 20060406 Kind code of ref document: P |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 20060410 |
|
ET | Fr: translation filed | ||
PLBI | Opposition filed |
Free format text: ORIGINAL CODE: 0009260 |
|
PLAX | Notice of opposition and request to file observation + time limit sent |
Free format text: ORIGINAL CODE: EPIDOSNOBS2 |
|
26 | Opposition filed |
Opponent name: OERLIKON LEYBOLD VACUUM GMBH Effective date: 20061009 |
|
PLBB | Reply of patent proprietor to notice(s) of opposition received |
Free format text: ORIGINAL CODE: EPIDOSNOBS3 |
|
PLAY | Examination report in opposition despatched + time limit |
Free format text: ORIGINAL CODE: EPIDOSNORE2 |
|
PLBC | Reply to examination report in opposition received |
Free format text: ORIGINAL CODE: EPIDOSNORE3 |
|
PLCK | Communication despatched that opposition was rejected |
Free format text: ORIGINAL CODE: EPIDOSNREJ1 |
|
PLBN | Opposition rejected |
Free format text: ORIGINAL CODE: 0009273 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: OPPOSITION REJECTED |
|
27O | Opposition rejected |
Effective date: 20091118 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: PLFP Year of fee payment: 16 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: PLFP Year of fee payment: 17 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: PLFP Year of fee payment: 18 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20200602 Year of fee payment: 20 Ref country code: FR Payment date: 20200421 Year of fee payment: 20 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20200423 Year of fee payment: 20 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R071 Ref document number: 50108678 Country of ref document: DE |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: PE20 Expiry date: 20210429 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GB Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION Effective date: 20210429 |