EP1278962A1 - Device for delivering moist gases - Google Patents

Device for delivering moist gases

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Publication number
EP1278962A1
EP1278962A1 EP01949304A EP01949304A EP1278962A1 EP 1278962 A1 EP1278962 A1 EP 1278962A1 EP 01949304 A EP01949304 A EP 01949304A EP 01949304 A EP01949304 A EP 01949304A EP 1278962 A1 EP1278962 A1 EP 1278962A1
Authority
EP
European Patent Office
Prior art keywords
ventilation
valve
channel
conveying
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01949304A
Other languages
German (de)
French (fr)
Other versions
EP1278962B1 (en
Inventor
Erwin Hauser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KNF Neuberger GmbH
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KNF Neuberger GmbH
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Application filed by KNF Neuberger GmbH filed Critical KNF Neuberger GmbH
Publication of EP1278962A1 publication Critical patent/EP1278962A1/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/18Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids
    • F04B37/20Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids for wet gases, e.g. wet air
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms

Definitions

  • the present invention relates to a multi-stage device for conveying moist gases, with a plurality of feed pumps, each of which has a displacer that oscillates in a feed chamber and is connected in series via a connecting channel, and with a ventilation device that has at least one ventilation channel, the ventilation channel in a connecting channel connecting downstream feed pumps opens.
  • a device which has at least one feed pump for conveying moist gases.
  • Each of these feed pumps has a displacer that oscillates in a feed chamber.
  • the pump head of this delivery pump is forced-cooled.
  • At least one feed pump has an aeration device with an aeration channel which opens into the region of the delivery space.
  • a ventilation valve is interposed in this ventilation channel and can be actuated as required and independently of the stroke position of the displacer during the operation of the feed pump.
  • a targeted flow is set up in the feed pump with a sufficiently high flow rate to entrain the liquid droplets which have hitherto remained in the feed chamber.
  • a multi-stage conveying device is already known, the pump stages of which are connected to one another via a connecting channel serving as an intermediate vacuum space.
  • the previously known conveyor device has a ventilation channel which opens into the connecting channel and is provided with a throttle point.
  • the connecting channel is in turn connected to the pumping chamber of the first pump stage, possibly via a further throttle point.
  • this gas balancing device With the help of this gas balancing device, a sufficient amount of gas is to be introduced into the pumping chamber of the first pump stage in order to counteract condensation and subsequent evaporation of the water vapor still contained in the gas to be pumped out.
  • the design effort associated with this gas balancing device of the known conveyor device is comparatively high.
  • the solution to this problem according to the invention consists in particular in that a ventilation valve which can be actuated by a motor is interposed in the ventilation channel and which ventilation valve can be actuated by means of the control device as required and independently of the stroke position of the displacer.
  • the device according to the invention has a ventilation valve which can be actuated by a control device.
  • the ventilation valve is interposed in the ventilation channel, which opens into a connecting channel connecting one another in a subsequent pump stage.
  • the ventilation valve can be actuated by means of the control device as required and independently of the stroke position of the displacer and can thus be opened intermittently, for example once or several times during operation of the conveying device.
  • the conveying device can be vented once or several times during its operation, for example after certain condensation times or at different pressure levels, in a chamber to be evacuated by means of the conveying device.
  • a targeted flow with a sufficiently high flow velocity is built up in the conveying pump of the conveying stage following the ventilation duct in order to entrain the liquid and condensate drops which have previously remained in the conveying chamber, in particular of this conveying pump. Since the outlet valve of the delivery stage upstream of the ventilation duct closes suddenly when the ventilation valve is opened, the ventilation or drying gas can only take one direction, while the vacuum already achieved in the upstream delivery stages and in particular in the chamber to be evacuated is essentially maintained. It is a particular advantage of the delivery device according to the invention that the ventilation channel can also be guided outside the pump heads of the delivery pump and can open into the connecting channel. In such an embodiment according to the invention, the manufacturing and construction outlay is additionally significantly reduced.
  • control device which is in control connection with the ventilation valve has a timing element and / or a pressure sensor for the one-time or repeated intermittent actuation of the ventilation valve depending on the condensation time and / or depending on predetermined conditions Pressure levels in a chamber to be evacuated by the conveyor.
  • the conveying device according to the invention can advantageously be used in all high-condensate applications.
  • the feed pump belonging to the first stage of the feed device according to the invention is connected on the suction side to an autoclave or to a vacuum drying chamber and on the pressure side to the suction side of the second feed pump.
  • the low construction and manufacturing effort is further favored if the feed pumps used in the individual stages of the conveying device are commercially available pumps, in particular diaphragm pumps.
  • a preferred and structurally particularly simple embodiment according to the invention provides that the motor-operated ventilation valve is a solenoid valve.
  • a two-stage conveying device 1 which is intended for conveying moist and in particular condensate gases.
  • the conveying direction 1 has two conveying pumps 2, 3, each of which has a displacer which oscillates in a conveying space 4.
  • the delivery pumps 2, 3 are designed here as membrane pumps and their displacers as shaped membranes 5.
  • the feed pumps 2, 3 are connected in series via a connecting channel 6.
  • the feed pump 2 forming the first feed stage is connected on the suction side to an autoclave, a vacuum drying chamber or similar vacuum chamber and on the pressure side to the suction side of the second feed pump 3.
  • the conveying device 1 has a ventilation device 7 with a ventilation channel 8, which opens into the connecting channel 6 between the first and second pumping stages.
  • a ventilation valve 9 is interposed in the ventilation channel 8.
  • the venting valve 9 can be opened intermittently once or several times during the operation of the conveying device 1.
  • the conveying device 1 can be vented once or several times during its operation, for example after certain condensation times or at different pressure levels, in a chamber to be evacuated by means of the conveying device 1.
  • a targeted flow with a sufficiently high flow rate is achieved in the conveying pump 3 of the conveying stage following the ventilation duct 8 Flow rate built up in order to entrain the liquid and condensate drops remaining in the delivery chamber in particular of this delivery pump 3. Since, when the ventilation valve 9 is opened, the outlet valve 10 of the conveyor stage 2 upstream of the ventilation duct 8 closes at the same time, the ventilation or drying gas can only take one direction, while the vacuum already achieved in the upstream conveyor stage 2 and in particular in the chamber to be evacuated essentially preserved.
  • the connecting channel 6 has a channel section formed from a pipe or a hose line 11 and in each case one channel section 13, 14 located in the pump heads of the feed pumps 2, 3 between the hose line 11 and the outlet or inlet valve 10, 12.
  • the ventilation duct 8 is arranged here in the pump head of the first feed pump 2 and opens there in the duct section 13 arranged downstream of the outlet valve 10. However, it is a particular advantage of the present invention proposal that the ventilation duct 8 is also guided outside the pump heads of the feed pumps 2, 3 and can open into the hose 11.
  • the ventilation device 7 assigned to the delivery pump 3 is sufficient. If the ventilation valve 9 is opened, the outlet valve 10 of the first feed pump 2 automatically closes, so that there is no loss of time or power.
  • moist gases can also be conveyed without having to counteract the formation of condensate by artificially heating the conveying pumps 2, 3.
  • the conveying direction 1 shown here draws even with a high moisture content of the conveying medium from a large conveying capacity, without this conveying device 1 requiring special conveying pumps and a correspondingly high production and construction expenditure.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention relates to a multistage device (1) for delivering moist gases. Said device comprises several delivery pumps (2, 3) each of which having a displacer that oscillates inside a delivery space, and being connected in series via a connection channel (6). The inventive device also comprises a ventilation device (7) which has at least one ventilation channel (8), whereby the ventilation channel (8) opens into a connection channel (6) that interconnects series-connected delivery pumps (2, 3). The inventive device (1) is characterized in that a ventilation valve (9), which can be motor-actuated by a control device, is interconnected inside the ventilation channel (8), and said ventilation valve (9) can be actuated as required by means of the control device and independent of the lift position of the displacers.

Description

Vorrichtung zum Fördern feuchter Gase Device for conveying moist gases
Die vorliegende Erfindung betrifft eine mehrstufige Vorrichtung zum Fördern feuchter Gase, mit mehreren Förderpumpen, die jeweils einen, in einem Förderraum oszillierenden Verdränger aufweisen und über jeweils einen Verbindungskanal einander nachgeschaltet sind, sowie mit einer Belüftungseinrichtung, die wenigstens einen Belüftungskanal hat , wobei der Beflüftungskanal in einem einander nachgeschalteteFörderpumpenmiteinanderverbindendenVerbindungs- kanal mündet .The present invention relates to a multi-stage device for conveying moist gases, with a plurality of feed pumps, each of which has a displacer that oscillates in a feed chamber and is connected in series via a connecting channel, and with a ventilation device that has at least one ventilation channel, the ventilation channel in a connecting channel connecting downstream feed pumps opens.
In der nachveröffentlichten Voranmeldung DE 198 51 680 der Anmelderin ist bereits eine Vorrichtung beschrieben, die zum Fördern feuchter Gase zumindest eine Förderpumpe hat. Jede dieser Förderpumpen weist einen Verdränger auf, der in einem Förderraum oszilliert. Um die im gasförmigen Fördermedium enthaltene Flüssigkeit kondensieren, das Fördervolumen reduzieren und die beispielsweise zum Evakuieren einer Vakuumkammer benötigte Zeit möglichst klein halten zu können, ist der Pumpenkopf dieser Förderpumpe zwangsgekühlt . Zumindest eine Förderpumpe weist eine Belüftungseinrichtung mit einem Belüftungskanal auf, der im Bereich des Förderraums mündet. In diesem Belüftungskanal ist ein Belüftungsventil zwischengeschaltet, das bedarfsweise und unabhängig von der Hubstellung des Verdrängers während des Betriebs der Förderpumpe betätigbar ist.In the previously published prior application DE 198 51 680 by the applicant, a device is already described which has at least one feed pump for conveying moist gases. Each of these feed pumps has a displacer that oscillates in a feed chamber. In order to condense the liquid contained in the gaseous delivery medium, reduce the delivery volume and to keep the time required, for example, to evacuate a vacuum chamber as short as possible, the pump head of this delivery pump is forced-cooled. At least one feed pump has an aeration device with an aeration channel which opens into the region of the delivery space. A ventilation valve is interposed in this ventilation channel and can be actuated as required and independently of the stroke position of the displacer during the operation of the feed pump.
Beim Betätigen des Belüftungsventils wird in der Förderpumpe eine zielgerichtete Strömung mit einer ausreichend hohen Strömungs- geschwindigkeit aufgebaut, um die im Förderraum bislang verbliebenen Flüssigkeitströpfchen mitzureißen.When the ventilation valve is actuated, a targeted flow is set up in the feed pump with a sufficiently high flow rate to entrain the liquid droplets which have hitherto remained in the feed chamber.
Durch die Kondensation der im Fördermedium enthaltenen Feuchtigkeit erfolgt eine drastische Volumenverkleinerung, womit sich schnelle Pumpzeiten und hohe Pumpleistungen erzielen lassen. Mit Hilfe der in den Förderpumpen vorgesehenen Belüftungseinrichtung kann eine schnelle und zielgerichtete Trocknung der gegebenenfalls auch mehrstufigen Fördervorrichtung erreicht werden, wodurch die Verkürzung der Evakuierungszeit noch zusätzlich begünstigt und das erreichbare Endvakuum maßgeblich reduziert werden kann. Nachteilig ist jedoch, daß die Vorrichtung gemäß DE 198 51 680 spezielle Förderpumpen erfordert, in deren Pumpenkopf der im Förderraum mündende Belüftungskanal eingearbeitet ist. Dies kann einen eventuell nicht unerheblichen Mehraufwand mit sich bringen .Due to the condensation of the moisture contained in the medium, there is a drastic reduction in volume, which results in have fast pumping times and high pumping capacities. With the aid of the ventilation device provided in the feed pumps, a quick and targeted drying of the possibly also multi-stage feed device can be achieved, whereby the shortening of the evacuation time is further favored and the achievable final vacuum can be significantly reduced. However, it is disadvantageous that the device according to DE 198 51 680 requires special feed pumps, in the pump head of which the ventilation duct opening into the feed chamber is incorporated. This can entail a not inconsiderable additional effort.
Aus der DE 198 31 123 A1 ist bereits eine mehrstufige Fördervorrichtung bekannt, deren Pumpstufen über einen als Zwischenvakuum- raum dienenden Verbindungskanal miteinander verbunden sind. Die vorbekannte Fördereinrichtung weist einen Belüftungskanal auf, der im Verbindungskanal mündet und mit einer Drosselstelle versehen ist. Der Verbindungskanal ist seinerseits, gegebenenfalls über eine weitere Drosselstelle, mit dem Schöpfraum der ersten Pumpstufe verbunden. Mit Hilfe dieser Gasbaiasteinrichtung soll eine ausreichende Gasmenge in den Schöpfraum der ersten Pumpstufe eingeleitet werden, um einer Kondensation und nachfolgenden Verdampfung des im abzupumpenden Gas noch enthaltenen Wasserdampfes entgegenzuwirken. Der mit dieser Gasbaiasteinrichtung der vorbekannten Fördervorrichtung verbundene konstruktive Aufwand ist jedoch vergleichsweise hoch.From DE 198 31 123 A1 a multi-stage conveying device is already known, the pump stages of which are connected to one another via a connecting channel serving as an intermediate vacuum space. The previously known conveyor device has a ventilation channel which opens into the connecting channel and is provided with a throttle point. The connecting channel is in turn connected to the pumping chamber of the first pump stage, possibly via a further throttle point. With the help of this gas balancing device, a sufficient amount of gas is to be introduced into the pumping chamber of the first pump stage in order to counteract condensation and subsequent evaporation of the water vapor still contained in the gas to be pumped out. However, the design effort associated with this gas balancing device of the known conveyor device is comparatively high.
Es besteht daher insbesondere die Aufgabe, eine Vorrichtung der eingangs erwähnten Art zu schaffen, die sich auch bei einem hohen Feuchtigkeitsanteil des Fördermediums durch eine große Förderlei- stung auszeichnet, wobei die erfindungsgemäße Fördervorrichtung mit einem möglichst geringen Herstellungs- und Konstruktionsaufwand verbunden sein soll . Die erfindungsgemäße Lösung dieser Aufgabe besteht insbesondere darin, daß in den Belüftungskanal ein motorisch über eine Steuereinrichtung betätigbares Belüftungsventil zwischengeschaltet ist, welches Belüftungsventil mittels der Steuereinrichtung bedarfsweise und unabhängig von der Hubstellung der Verdränger betätigbar ist.There is therefore in particular the object of creating a device of the type mentioned at the outset which is distinguished by a high conveying capacity even when the conveying medium has a high moisture content, the conveying device according to the invention being intended to be associated with the lowest possible production and construction expenditure. The solution to this problem according to the invention consists in particular in that a ventilation valve which can be actuated by a motor is interposed in the ventilation channel and which ventilation valve can be actuated by means of the control device as required and independently of the stroke position of the displacer.
Die erfindungsgemäße Vorrichtung weist ein motorisch über eine Steuereinrichtung betätigbares Belüftungsventil auf. Das Belüftungsventil ist in den Belüftungskanal zwischengeschaltet, der in einem nachfolgende Pumpstufen miteinander verbindenden Verbindungskanal mündet. Das Belüftungsventil ist mittels der Steuereinrichtung bedarfsweise und unabhängig von der Hubstellung der Verdränger betätigbar und kann somit während des Betriebs der Fördervorrichtung beispielsweise einmal oder in Zeitintervallen mehrmals stoßweise geöffnet werden.The device according to the invention has a ventilation valve which can be actuated by a control device. The ventilation valve is interposed in the ventilation channel, which opens into a connecting channel connecting one another in a subsequent pump stage. The ventilation valve can be actuated by means of the control device as required and independently of the stroke position of the displacer and can thus be opened intermittently, for example once or several times during operation of the conveying device.
Das Belüften der Fördervorrichtung kann während ihres Betriebes einmal oder mehrmals zeitlich versetzt beispielsweise nach bestimmtenKondensationszeitenoderbeiverschiedenenDruckstufen in einer mittels der Fördervorrichtung zu evakuierenden Kammer erfolgen. Durch das Belüften der Fördervorrichtung wird in der Förderpumpe der dem Belüftungskanal nachfolgenden Förderstufe eine zielgerichtete Strömung mit einer ausreichend hohen Strömungsgeschwindigkeit aufgebaut, um die im Förderraum insbesondere dieser Förderpumpe bislang verbliebenen Flüssigkeitsund Kondensattropfen mitzureißen. Da beim Öffnen des Belüftungsventils gleichzeitig das Auslaßventil der dem Belüftungskanal vorgeschalteten Förderstufe schlagartig schließt, kann das Belüftungs- bzw. Trocknungsgas nur eine Richtung nehmen, während das in den vorgeschalteten Förderstufen und insbesondere in der zu evakuierenden Kammer bereits erreichte Vakuum im wesentlichen erhalten bleibt. Dabei ist es ein besonderer Vorteil der erfindungsgemäßen Fördervorrichtung, daß der Belüftungskanal auch außerhalb der Pumpenköpfe der Förderpumpe geführt werden und im Verbindungskanal münden kann. Bei einer solchen Ausführungsform gemäß der Erfindung wird der Herstellungs- und Konstruktionsaufwand noch zusätzlich wesentlich reduziert.The conveying device can be vented once or several times during its operation, for example after certain condensation times or at different pressure levels, in a chamber to be evacuated by means of the conveying device. By venting the conveying device, a targeted flow with a sufficiently high flow velocity is built up in the conveying pump of the conveying stage following the ventilation duct in order to entrain the liquid and condensate drops which have previously remained in the conveying chamber, in particular of this conveying pump. Since the outlet valve of the delivery stage upstream of the ventilation duct closes suddenly when the ventilation valve is opened, the ventilation or drying gas can only take one direction, while the vacuum already achieved in the upstream delivery stages and in particular in the chamber to be evacuated is essentially maintained. It is a particular advantage of the delivery device according to the invention that the ventilation channel can also be guided outside the pump heads of the delivery pump and can open into the connecting channel. In such an embodiment according to the invention, the manufacturing and construction outlay is additionally significantly reduced.
Eine besonders vorteilhaft und leicht zu handhabende Ausführungsform gemäß der Erfindung sieht vor, daß die in Steuerverbindung mit demBelüftungsventil stehende Steuereinrichtung ein Zeitglied und/oder einen Drucksensor hat, zum einmaligen oder mehrmaligen stoßweisen Betätigen des Belüftungsventils in Abhängigkeit von der Kondensationszeit und/oder in Abhängigkeit vorgegebener Druckstufen in einer mittels der Fördervorrichtung zu evakuieren- den Kammer .A particularly advantageous and easy-to-use embodiment according to the invention provides that the control device which is in control connection with the ventilation valve has a timing element and / or a pressure sensor for the one-time or repeated intermittent actuation of the ventilation valve depending on the condensation time and / or depending on predetermined conditions Pressure levels in a chamber to be evacuated by the conveyor.
Die erfindungsgemäße Fördervorrichtung ist bei allen stark kondensathaltigen Anwendungen vorteilhaft einsetzbar. So ist beispielsweise vorgesehen, die zur ersten Stufe der erfindungs- gemäßen Fördervorrichtung gehörende Förderpumpe saugseitig an einen Autoklaven oder an eine Vakuum-Trockenkammer und druckseitig an die Saugseite der zweiten Förderpumpe anzuschließen.The conveying device according to the invention can advantageously be used in all high-condensate applications. For example, it is provided that the feed pump belonging to the first stage of the feed device according to the invention is connected on the suction side to an autoclave or to a vacuum drying chamber and on the pressure side to the suction side of the second feed pump.
Der geringe Konstruktions- und Herstellungsaufwand wird noch zusätzlich begünstigt, wenn die in den einzelnen Stufen der Fördervorrichtung eingesetzten Förderpumpen handelsübliche Pumpen, insbesondere Membranpumpen, sind.The low construction and manufacturing effort is further favored if the feed pumps used in the individual stages of the conveying device are commercially available pumps, in particular diaphragm pumps.
Eine bevorzugte und konstruktiv besonders einfache Ausführungsform gemäß der Erfindung sieht vor, daß das motorisch betätigbare Belüftungsventil ein Magnetventil ist.A preferred and structurally particularly simple embodiment according to the invention provides that the motor-operated ventilation valve is a solenoid valve.
Weitere Merkmale der Erfindung ergeben sich aus der folgenden Beschreibung eines erfindungsgemäßen Ausführungsbeispieles in Verbindung mit den Ansprüchen sowie der Zeichnung. Die einzelnen Merkmale können je für sich oder zu mehreren bei einer Ausführungsform gemäß der Erfindung verwirklicht sein.Further features of the invention result from the following description of an embodiment according to the invention in Connection with the claims and the drawing. The individual features can be implemented individually or in groups in one embodiment according to the invention.
In der einzigen Figur ist eine hier zweistufig ausgebildete Fördervorrichtung 1 dargestellt, die zum Fördern feuchter und insbesondere kondensathaltiger Gase bestimmt ist. Die Förderrichtung 1 hat zwei Förderpumpen 2,3, die jeweils einen, in einem Förderraum 4 oszillierenden Verdränger aufweisen. Die Förderpum- pen 2,3 sind hier als Membranpumpen und ihre Verdränger als Formmembranen 5 ausgebildet .In the single figure, a two-stage conveying device 1 is shown, which is intended for conveying moist and in particular condensate gases. The conveying direction 1 has two conveying pumps 2, 3, each of which has a displacer which oscillates in a conveying space 4. The delivery pumps 2, 3 are designed here as membrane pumps and their displacers as shaped membranes 5.
Die Förderpumpen 2,3 sind über einen Verbindungskanal 6 einander nachgeschaltet. Dabei ist die die erste Förderstufe bildende Förderpumpe 2 saugseitig an einen Autoklaven, eine Vakuum- Trockenkammer oder dergleichen Vakuumkammer und druckseitig an die Saugseite der zweiten Förderpumpe 3 angeschlossen.The feed pumps 2, 3 are connected in series via a connecting channel 6. The feed pump 2 forming the first feed stage is connected on the suction side to an autoclave, a vacuum drying chamber or similar vacuum chamber and on the pressure side to the suction side of the second feed pump 3.
Die Fördervorrichtung 1 hat eine Belüftungsvorrichtung 7 mit einem Belüftungskanal 8, der im Verbindungskanal 6 zwischen erster und zweiter Pumpstufe mündet. In dem Belüftungskanal 8 ist ein Belüftungsventil 9 zwischengeschaltet. Um die Fördervorrichtung 1 bedarfsweise und unabhängig von der Hubstellung ihrer Förderpumpen 2,3 belüften zu können, kann das Belüftungsventil 9 während des Betriebs der Fördereinrichtung 1 einmal oder in Zeitintervallen mehrmals stoßweise geöffnet werden.The conveying device 1 has a ventilation device 7 with a ventilation channel 8, which opens into the connecting channel 6 between the first and second pumping stages. A ventilation valve 9 is interposed in the ventilation channel 8. In order to be able to ventilate the conveying device 1 as required and independently of the stroke position of its conveying pumps 2, 3, the venting valve 9 can be opened intermittently once or several times during the operation of the conveying device 1.
Das Belüften der Fördervorrichtung 1 kann während ihres Betriebes einmal oder mehrmals zeitlich versetzt beispielsweise nach bestimmtenKondensationsZeitenoderbeiverschiedenenDruckstufen in einer mittels der Fördervorrichtung 1 zu evakuierenden Kammer erfolgen. Durch das Belüften der Fördervorrichtung 1 wird in der Förderpumpe 3 der dem Belüftungskanal 8 nachfolgenden Förderstufe eine zielgerichtete Strömung mit einer ausreichend hohen Strömungsgeschwindigkeit aufgebaut, um die im Förderraum insbesondere dieser Förderpumpe 3 bislang verbliebenen Flüssigkeits- und Kondensattropfen mitzureißen. Da beim Öffnen des Belüftungsventils 9 gleichzeitig das Auslaßventil 10 der dem Belüftungskanal 8 vorgeschalteten Förderstufe 2 schließt, kann das Belüftungs- bzw. Trocknungsgas nur eine Richtung nehmen, während das in der vorgeschalteten Förderstufe 2 und insbesondere in der zu evakuierenden Kammer bereits erreichte Vakuum im wesentlichen erhalten bleibt.The conveying device 1 can be vented once or several times during its operation, for example after certain condensation times or at different pressure levels, in a chamber to be evacuated by means of the conveying device 1. By ventilating the conveying device 1, a targeted flow with a sufficiently high flow rate is achieved in the conveying pump 3 of the conveying stage following the ventilation duct 8 Flow rate built up in order to entrain the liquid and condensate drops remaining in the delivery chamber in particular of this delivery pump 3. Since, when the ventilation valve 9 is opened, the outlet valve 10 of the conveyor stage 2 upstream of the ventilation duct 8 closes at the same time, the ventilation or drying gas can only take one direction, while the vacuum already achieved in the upstream conveyor stage 2 and in particular in the chamber to be evacuated essentially preserved.
Der Verbindungskanal 6 weist einen aus einer Rohr- oder einer Schlauchleitung 11 gebildeten Kanalabschnitt sowie jeweils einen, in den Pumpenköpfen der Förderpumpen 2 , 3 zwischen der Schlauchleitung 11 und dem Auslaß- bzw. dem Einlaßventil 10,12 befindlichen Kanalabschnitt 13,14 auf.The connecting channel 6 has a channel section formed from a pipe or a hose line 11 and in each case one channel section 13, 14 located in the pump heads of the feed pumps 2, 3 between the hose line 11 and the outlet or inlet valve 10, 12.
Der Belüftungskanal 8 ist hier im Pumpenkopf der ersten Förderpumpe 2 angeordnet und mündet dort im abströmseitig hinter dem Auslaßventil 10 angeordneten Kanalabschnitt 13. Es ist jedoch ein besonderer Vorteil des vorliegenden Erfindungsvorschlages, daß der Belüftungskanal 8 auch außerhalb der Pumpenköpfe der Förderpumpen 2, 3 geführt werden und in der Schlauchleitung 11 münden kann.The ventilation duct 8 is arranged here in the pump head of the first feed pump 2 and opens there in the duct section 13 arranged downstream of the outlet valve 10. However, it is a particular advantage of the present invention proposal that the ventilation duct 8 is also guided outside the pump heads of the feed pumps 2, 3 and can open into the hose 11.
Da in der durch die Förderpumpe 3 gebildeten zweiten Förderstufe, die gegen Atmosphärendruck verdichtet, vor allem das Kondensat auftritt, ist die der Förderpumpe 3 zugeordnete Belüftungseinrichtung 7 ausreichend. Wird das Belüftungsventil 9 geöffnet, schließt automatisch das Auslaßventil 10 der ersten Förderpumpe 2, so daß keine Zeit- oder Leistungsverluste auftreten. Mittels der hier dargestellten Fördervorrichtung 1 können auch feuchte Gase gefördert werden, ohne daß durch ein künstliches Aufheizen der Förderpumpen 2, 3 einer Kondensatbildung entgegengewirkt werden müßte. Die hier dargestellte Förderrichtung 1 zeichnet sich auch bei einem hohen Feuchtigkeitsanteil des Fördermediums durch eine große Förderleistung aus, ohne daß diese Fördervorrichtung 1 spezielle Fδrderpumpen und einen entsprechend hohen Herstellungs- und Konstruktionsaufwand erfordert. Since the condensate occurs above all in the second delivery stage formed by the delivery pump 3, which compresses against atmospheric pressure, the ventilation device 7 assigned to the delivery pump 3 is sufficient. If the ventilation valve 9 is opened, the outlet valve 10 of the first feed pump 2 automatically closes, so that there is no loss of time or power. By means of the conveying device 1 shown here, moist gases can also be conveyed without having to counteract the formation of condensate by artificially heating the conveying pumps 2, 3. The conveying direction 1 shown here draws even with a high moisture content of the conveying medium from a large conveying capacity, without this conveying device 1 requiring special conveying pumps and a correspondingly high production and construction expenditure.

Claims

Ansprüche Expectations
1. Mehrstufige Vorrichtung (1) zum Fördern feuchter Gase, mit mehreren Förderpumpen (2, 3) , die jeweils einen, in einem1. Multi-stage device (1) for conveying moist gases, with several feed pumps (2, 3), each one, in one
Förderraum oszillierenden Verdränger aufweisen und über jeweils einen Verbindungskanal (6) einander nachgeschaltet sind sowie mit einer Belüftungseinrichtung (7) , die wenigstens einen Belüftungskanal (8) hat, wobei der Belüftungskanal (8) in einem einander nachgeschaltete Förderpumpen (2, 3) miteinander verbindenden Verbindungskanal (6) mündet, dadurch gekennzeichnet, daß in den Belüftungskanal (8) ein motorisch über eine Steuereinrichtung betätigbares Belüftungsventil (9) zwischengeschaltet ist, welches Belüftungsventil (9) mittels der Steuereinrichtung bedarfsweise und unabhängig von der Hubstellung der Verdränger betätigbar ist.Have oscillating displacement displacers and are connected in series via a connecting channel (6) and with a ventilation device (7) which has at least one ventilation channel (8), the ventilation channel (8) connecting one another in a series-connected feed pumps (2, 3) Connecting channel (6) opens, characterized in that a ventilation valve (9) which can be actuated by motor via a control device is interposed in the ventilation channel (8), which ventilation valve (9) can be operated by means of the control device as required and independently of the stroke position of the displacers.
2. Vorrichtung nach Anspruch 1 , dadurch gekennzeichnet , daß die in Steuerverbindungmit demBelüftungsventil (9) stehende2. Device according to claim 1, characterized in that the are in control connection with the ventilation valve (9)
Steuereinrichtung ein Zeitglied und/oder einen Drucksensor hat, zum einmaligen oder mehrmaligen stoßweisen Betätigen des Belüftungsventils (9) in Abhängigkeit von der Kondensationszeit und/oder in Abhängigkeit vorgegebener Druckstufen in einer mittels der Fördereinrichtung 1) zu evakuierenden Kammer .Control device has a timing element and / or a pressure sensor for single or repeated intermittent actuation of the ventilation valve (9) depending on the condensation time and / or depending on predetermined pressure levels in a chamber to be evacuated by means of the conveying device 1).
3. Vorrichtung nach einem der Ansprüche 1 oder 2 , dadurch gekennzeichnet, daß die zur ersten Stufe gehörende Förderpumpe (2) saugseitig an einen Autoklaven, an eine Vakuum-Trockenkammer oder dergleichen Vakuumkammer und druckseitig an die Saugseite der zweiten Förderpumpe (3) angeschlossen ist. 3. Device according to one of claims 1 or 2, characterized in that the feed pump (2) belonging to the first stage is connected on the suction side to an autoclave, to a vacuum drying chamber or the like vacuum chamber and on the pressure side to the suction side of the second feed pump (3) ,
4. Vorrichtung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die in den einzelnen Stufen der Fδr- dervorrichtung (1) eingesetzten Förderpumpen (2, 3) handelsübliche Pumpen, insbesondere Membranpumpen, sind.4. Device according to one of claims 1 to 3, characterized in that the feed pumps (2, 3) used in the individual stages of the conveying device (1) are commercially available pumps, in particular diaphragm pumps.
5. Vorrichtung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß das motorisch betätigbare Belüftungsventil ein Magnetventil ist.5. Device according to one of claims 1 to 4, characterized in that the motor-operated ventilation valve is a solenoid valve.
6. Vorrichtung nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß das Auslaßventil der ersten Stufe automatisch schließt und so als Rückschlagventil wirkt. 6. Device according to one of claims 1 to 5, characterized in that the outlet valve of the first stage closes automatically and thus acts as a check valve.
EP01949304A 2000-05-03 2001-04-30 Device for delivering moist gases Expired - Lifetime EP1278962B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10021454A DE10021454C2 (en) 2000-05-03 2000-05-03 Device for conveying moist gases
DE10021454 2000-05-03
PCT/EP2001/004884 WO2001083990A1 (en) 2000-05-03 2001-04-30 Device for delivering moist gases

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EP1278962A1 true EP1278962A1 (en) 2003-01-29
EP1278962B1 EP1278962B1 (en) 2006-01-11

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DE (2) DE10021454C2 (en)
WO (1) WO2001083990A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10255792C5 (en) * 2002-11-28 2008-12-18 Vacuubrand Gmbh + Co Kg Method for controlling a vacuum pump and vacuum pump system
ES2305628T3 (en) 2004-07-31 2008-11-01 Hach Lange Gmbh LIQUID SAMPLES FEEDING DEVICE.
DE102009043644B4 (en) 2009-09-29 2011-07-07 KNF Neuberger GmbH, 79112 Multi-stage membrane suction pump
DE202009013127U1 (en) 2009-09-29 2011-02-17 Knf Neuberger Gmbh Multi-stage membrane suction pump
DE202010002145U1 (en) * 2010-02-09 2011-09-07 Vacuubrand Gmbh + Co Kg Diaphragm vacuum pump
DE102013213257A1 (en) * 2013-07-05 2015-01-08 Pfeiffer Vacuum Gmbh Diaphragm vacuum pump
CN105526128B (en) * 2016-02-05 2018-11-23 宁波泰尔斯电子实业有限公司 Minipump and combined micro vacuum pump
WO2018098505A1 (en) * 2016-11-28 2018-05-31 Massachusetts Institute Of Technology Vacuum pumps and methods of manufacturing the same
US11873802B2 (en) * 2020-05-18 2024-01-16 Graco Minnesota Inc. Pump having multi-stage gas compression

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB923072A (en) 1958-07-23 1963-04-10 Leybold Hockvakuum Anlagen Gmb A method of and an apparatus for removing condensable vapour from a container
FR2082631A5 (en) 1970-03-20 1971-12-10 Gen Pneumatic
US4086843A (en) * 1977-02-17 1978-05-02 Caterpillar Tractor Co. Tilt tip circuit with bypass valve
DE3710782A1 (en) 1987-03-31 1988-10-20 Vacuubrand Gmbh & Co Method and device for pumping out vapours and/or vaporous mixtures and/or gas-vapour mixtures or similar media
DE29618911U1 (en) * 1996-10-30 1996-12-19 Dekema Dental-Keramiköfen GmbH, 83395 Freilassing Pump arrangement
JP3346208B2 (en) * 1997-02-17 2002-11-18 マックス株式会社 Load control device for multi-stage compressor
DE19709206A1 (en) * 1997-03-06 1998-09-10 Leybold Vakuum Gmbh Vacuum pump
DE19732808A1 (en) 1997-07-30 1999-02-04 Knf Neuberger Gmbh Method for evacuating the sterilisation chamber of a steam sterilisation unit - with the medium used during evacuation cooled along its flow path in such a way that it is in or is converted into a liquid state in the delivery unit
DE19831123A1 (en) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gas ballast device for multi-stage positive displacement pumps
DE19851680C2 (en) * 1998-11-10 2003-04-10 Knf Neuberger Gmbh Process for conveying moist gases by means of a conveying device and conveying device for carrying out this process
US6248157B1 (en) * 1999-08-20 2001-06-19 Systec Inc. Vacuum degassing
JP2002155879A (en) * 2000-11-22 2002-05-31 Hitachi Ltd Oil-free screw compressor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0183990A1 *

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Publication number Publication date
DE10021454A1 (en) 2001-11-22
EP1278962B1 (en) 2006-01-11
DE50108678D1 (en) 2006-04-06
WO2001083990A1 (en) 2001-11-08
US20030123997A1 (en) 2003-07-03
US6817839B2 (en) 2004-11-16
DE10021454C2 (en) 2002-03-14

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