EP2474044A4 - METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A VIA GROUP ENVIRONMENT - Google Patents
METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A VIA GROUP ENVIRONMENTInfo
- Publication number
- EP2474044A4 EP2474044A4 EP10814527.7A EP10814527A EP2474044A4 EP 2474044 A4 EP2474044 A4 EP 2474044A4 EP 10814527 A EP10814527 A EP 10814527A EP 2474044 A4 EP2474044 A4 EP 2474044A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- methods
- devices
- processing
- precursor layer
- group via
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002243 precursor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02425—Conductive materials, e.g. metallic silicides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02568—Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02614—Transformation of metal, e.g. oxidation, nitridation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02628—Liquid deposition using solutions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
Landscapes
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Photovoltaic Devices (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US23941609P | 2009-09-02 | 2009-09-02 | |
US24101509P | 2009-09-09 | 2009-09-09 | |
PCT/US2010/047748 WO2011028957A2 (en) | 2009-09-02 | 2010-09-02 | Methods and devices for processing a precursor layer in a group via environment |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2474044A2 EP2474044A2 (en) | 2012-07-11 |
EP2474044A4 true EP2474044A4 (en) | 2014-01-15 |
Family
ID=43649971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10814527.7A Withdrawn EP2474044A4 (en) | 2009-09-02 | 2010-09-02 | METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A VIA GROUP ENVIRONMENT |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2474044A4 (ja) |
JP (1) | JP2013504215A (ja) |
WO (1) | WO2011028957A2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2469580A1 (en) * | 2010-12-27 | 2012-06-27 | Nexcis | Improved interface between a I-III-VI2 material layer and a molybdenum substrate |
US9087954B2 (en) | 2011-03-10 | 2015-07-21 | Saint-Gobain Glass France | Method for producing the pentanary compound semiconductor CZTSSe, and thin-film solar cell |
JP5658112B2 (ja) * | 2011-09-15 | 2015-01-21 | 本田技研工業株式会社 | カルコパイライト型太陽電池の製造方法 |
WO2014002796A1 (ja) * | 2012-06-25 | 2014-01-03 | 京セラ株式会社 | 光電変換装置および光電変換装置の製造方法 |
KR101768788B1 (ko) * | 2012-12-20 | 2017-08-16 | 쌩-고벵 글래스 프랑스 | 화합물 반도체의 제조 방법 및 박막 태양 전지 |
TWI449193B (zh) * | 2012-12-21 | 2014-08-11 | Ind Tech Res Inst | 太陽電池吸收層之製備方法及其熱處理設備 |
FR3005371B1 (fr) * | 2013-05-03 | 2015-05-29 | Nexcis | Formation d'une couche semi-conductrice i-iii-vi2 par traitement thermique et chalcogenisation d'un precurseur metallique i-iii |
NL2010809C2 (nl) * | 2013-05-16 | 2014-11-24 | Smit Ovens Bv | Inrichting en werkwijze voor het aanbrengen van een materiaal op een substraat. |
ES2869193T3 (es) * | 2013-08-01 | 2021-10-25 | Lg Chemical Ltd | Método de fabricación de un precursor aglomerado para fabricar una capa de absorción de luz |
CN107604340B (zh) * | 2017-08-31 | 2023-09-01 | 安徽光智科技有限公司 | 化学气相沉积炉 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090183675A1 (en) * | 2006-10-13 | 2009-07-23 | Mustafa Pinarbasi | Reactor to form solar cell absorbers |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090050208A1 (en) * | 2006-10-19 | 2009-02-26 | Basol Bulent M | Method and structures for controlling the group iiia material profile through a group ibiiiavia compound layer |
KR20100052429A (ko) * | 2007-09-11 | 2010-05-19 | 센트로테에름 포토볼타익스 아게 | 칼코겐을 제공하기 위한 방법 및 장치 |
US8771419B2 (en) * | 2007-10-05 | 2014-07-08 | Solopower Systems, Inc. | Roll to roll evaporation tool for solar absorber precursor formation |
-
2010
- 2010-09-02 WO PCT/US2010/047748 patent/WO2011028957A2/en active Application Filing
- 2010-09-02 EP EP10814527.7A patent/EP2474044A4/en not_active Withdrawn
- 2010-09-02 JP JP2012528070A patent/JP2013504215A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090183675A1 (en) * | 2006-10-13 | 2009-07-23 | Mustafa Pinarbasi | Reactor to form solar cell absorbers |
Also Published As
Publication number | Publication date |
---|---|
WO2011028957A2 (en) | 2011-03-10 |
WO2011028957A3 (en) | 2011-07-14 |
EP2474044A2 (en) | 2012-07-11 |
JP2013504215A (ja) | 2013-02-04 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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17P | Request for examination filed |
Effective date: 20120329 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR |
|
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20131218 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 31/042 20060101AFI20131212BHEP Ipc: H01L 31/18 20060101ALI20131212BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20140722 |