EP2404324A2 - Cellules solaires à contacts en faces avant et arrière et leur procédé de fabrication - Google Patents
Cellules solaires à contacts en faces avant et arrière et leur procédé de fabricationInfo
- Publication number
- EP2404324A2 EP2404324A2 EP10706508A EP10706508A EP2404324A2 EP 2404324 A2 EP2404324 A2 EP 2404324A2 EP 10706508 A EP10706508 A EP 10706508A EP 10706508 A EP10706508 A EP 10706508A EP 2404324 A2 EP2404324 A2 EP 2404324A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- laser
- metal
- liquid jet
- seed layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 24
- 239000002184 metal Substances 0.000 claims abstract description 24
- 239000007788 liquid Substances 0.000 claims description 33
- 235000012431 wafers Nutrition 0.000 claims description 27
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 18
- 230000008569 process Effects 0.000 claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 9
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 8
- 238000001465 metallisation Methods 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 5
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 3
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 3
- 239000004327 boric acid Substances 0.000 claims description 3
- 238000004070 electrodeposition Methods 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- 239000000243 solution Substances 0.000 claims description 3
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 claims description 3
- 230000008719 thickening Effects 0.000 claims description 3
- 241001270131 Agaricus moelleri Species 0.000 claims description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 2
- 229910019142 PO4 Inorganic materials 0.000 claims description 2
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 2
- 229910021538 borax Inorganic materials 0.000 claims description 2
- 235000010338 boric acid Nutrition 0.000 claims description 2
- 229910052796 boron Inorganic materials 0.000 claims description 2
- 150000001639 boron compounds Chemical class 0.000 claims description 2
- 150000001642 boronic acid derivatives Chemical class 0.000 claims description 2
- 150000001805 chlorine compounds Chemical class 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 150000002259 gallium compounds Chemical class 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 238000005224 laser annealing Methods 0.000 claims description 2
- 235000021317 phosphate Nutrition 0.000 claims description 2
- 150000003013 phosphoric acid derivatives Chemical class 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 claims description 2
- 239000004328 sodium tetraborate Substances 0.000 claims description 2
- 235000010339 sodium tetraborate Nutrition 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 39
- 239000000126 substance Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 238000002161 passivation Methods 0.000 description 6
- 239000002344 surface layer Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000005360 phosphosilicate glass Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000002679 ablation Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 239000000443 aerosol Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005422 blasting Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003631 wet chemical etching Methods 0.000 description 2
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 1
- 241000080590 Niso Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- -1 argon ion Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical group 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910001453 nickel ion Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- LFAGQMCIGQNPJG-UHFFFAOYSA-N silver cyanide Chemical compound [Ag+].N#[C-] LFAGQMCIGQNPJG-UHFFFAOYSA-N 0.000 description 1
- 229940098221 silver cyanide Drugs 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/355—Texturing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the invention relates to a method for producing double-sided contacted solar cells, which is based on a microstructuring of a wafer provided with a dielectric layer and a doping of the microstructured regions. Subsequently, the deposition of a metal-containing seed layer and a galvanic reinforcement of the
- the invention relates to such producible solar cells.
- the production of solar cells involves a large number of process steps for the precision machining of wafers. These include, inter alia, the emitter diffusion, the application of a dielectric layer and its microstructuring, the doping of the wafer, the contacting, the application of a seed layer and their thickening. With regard to the microstructuring for the front-side contacting, the microstructuring of thin silicon nitride layers (SiN x ) is currently the common application. Such layers are currently the standard antireflective coating in commercial solar cells.
- the state of the art here is the printing of SiN x layers with a glass frit-containing metal paste. This is first dried, the organic solvent is expelled and then fired at high temperatures (about 900 0 C). The glass frit attacks the SiN x layer, dissolves it locally and thus allows the formation of a silicon-metal contact. Disadvantages of this method are the high contact resistance caused by the glass frit (> 10 -3 ⁇ cm 2 ) and the required high process temperatures, which can reduce both the quality of the passivation layers and those of the silicon substrate.
- a prior art gentle possibility the SiN x - to open layer locally is combined with wet-chemical etching process in the application of photolithography.
- a photoresist layer is first applied to the wafer and this patterned via UV exposure and developing.
- This is followed by a wet-chemical etching step in a hydrofluoric acid-containing or phosphoric acid-containing chemical system which contains the SiN x removed at the locations where the photoresist was opened.
- a big disadvantage of this method is the enormous effort and the associated costs.
- this process can not achieve sufficient throughput for solar cell production. For some nitrides, moreover, the method described here can not be used since the etching rates are too low.
- a local doping can also be done by screen printing a self-doping (eg aluminum-containing) metal paste with subsequent drying and firing at temperatures around 900 0 C.
- a self-doping eg aluminum-containing
- the disadvantage of this method is the high mechanical stress of the component, the expensive consumables and the high temperatures to which the entire component is exposed. Furthermore, only structural widths> 100 ⁇ m are possible hereby.
- Another method uses a blanket SiN x layer, this opens locally by means of laser radiation, and then diffuses the doping in the diffusion furnace.
- SiN x -MaS- k ist formed only in the laser-opened regions, a highly doped zone.
- the metallization is formed after the etch back of the resulting phosphosilicate glass (PSG) by electroless deposition in a metal-containing liquid, a disadvantage of this method is the damage introduced by the laser and the etching step required to remove the PSG, and the process consists of several individual steps. which require many handling steps.
- a method for producing double-sided contacted solar cells in which a) a wafer on the front and the back is at least partially coated with at least one dielectric layer, b) a microstructuring of the at least one dielectric layer takes place, c) a doping of the microstructured surface areas by at least one directed to the surface of the solid and at least one dopant-containing liquid jet is guided over regions of the surface to be doped, the surface being locally or simultaneously heated by a laser beam, d) a metal-containing seed layer being deposited at least in regions on the back side of the wafer, and e) an electrodeposition at least in regions a metallization on the front and the back of the wafer to the two-sided contacting takes place.
- the microstructuring be accomplished by treating the surface with a dry laser or a water jet guided laser or an etchant containing liquid jet guided laser.
- a liquid jet-guided laser containing an etchant is carried out in such a way that a liquid jet directed onto the surface of the wafer and containing at least one etchant for the wafer is guided over areas of the surface to be structured, the surface being passed through beforehand or simultaneously a laser beam is heated locally.
- an agent which has a more corrosive effect on the at least one dielectric layer than on the substrate is preferably selected as etchant.
- the etchants are particularly preferably selected from the group consisting of H 3 PO 4 , H 3 PO 3 , PCl 3 , PCl 5 , POCl 3 , KOH, HF / HNO 3 , HCl, chlorine compounds, sulfuric acid and mixtures thereof.
- the liquid jet may particularly preferably be formed from pure or highly concentrated phosphoric acid or else dilute phosphoric acid.
- the phosphoric acid may e.g. diluted in water or other suitable solvent and used in different concentrations.
- additives for changing pH e.g., acids or alkalis
- wetting behavior e.g., surfactants
- viscosity e.g., alcohols
- Particularly good results are achieved when using a liquid containing phosphoric acid in a proportion of 50 to 85 wt .-%. In particular, rapid processing of the surface layer can be achieved without damaging the substrate and surrounding areas.
- the microstructuring according to the invention achieves two things with very little effort.
- the surface layer in the said areas can be completely removed without damaging the substrate, because the liquid has a less (preferably no) corrosive effect on the latter.
- the liquid has a less (preferably no) corrosive effect on the latter.
- local heating of the surface layer in the regions to be removed which Finally, these areas are heated, a well-localized, limited to these areas ablation of the surface layer allows. This results from the fact that the corrosive action of the liquid typically increases with increasing temperature, so that damage to the surface layer in adjacent, unheated areas is largely avoided by possibly reaching there parts of the etching liquid.
- the dielectric layer deposited on the wafer serves for passivation and / or as an antireflection layer.
- the dielectric layer is preferably selected from the group consisting of SiN x , SiO 2 , SiO x , MgF 2 , TiO 2 , SiC x and Al 2 O 3 .
- the doping in step c) is preferably carried out with a liquid jet containing H 3 PO 4 , H 3 PO 3 and / or POCl 3 , into which a laser beam is coupled.
- the dopant is preferably selected from the group consisting of phosphorus, boron, aluminum, indium, gallium and mixtures thereof, in particular phosphoric acid, phosphorous acid, solutions of phosphates and hydrogen phosphates, borax, boric acid, borates and perborates, boron compounds, gallium compounds and their blends.
- a further preferred variant provides that the microstructuring and the doping are carried out simultaneously with a liquid-jet-guided laser.
- a further variant according to the invention comprises that during the precision machining following the microstructuring a doping of the microstructured silicon wafer takes place and the processing reagent contains a dopant.
- a liquid containing at least one compound which etches the solid material is particularly preferred, since in the same device first the microstructuring and subsequently the doping can be carried out by the exchange of the liquids.
- the microstructuring can also be carried out by means of an aerosol jet, wherein laser radiation is not necessarily required in this variant, since comparable results can be achieved by preheating the aerosol or its components.
- the inventive method uses, preferably for microstructuring and doping, a technical system in which a liquid jet, which can be equipped with different chemical systems, serves as a liquid light guide for a laser beam.
- the laser beam is coupled via a special coupling device in the liquid jet and guided by total internal reflection. In this way, a time and place same supply of chemicals and laser beam to the process stove is guaranteed.
- the laser light performs various tasks: On the one hand, it is able to locally heat it up at the point of impact on the substrate surface, optionally melting it, and melting it into the surface Extreme case to vaporize.
- the simultaneous application of chemicals to the heated substrate surface can activate chemical processes that do not occur under standard conditions because they are kinetically inhibited or thermodynamically unfavorable.
- photochemical activation is also possible, to the extent that the laser light at the surface of the substrate generates electron hole pairs, for example, which can promote or even facilitate the course of redox reactions in this area.
- the liquid jet In addition to the focusing of the laser beam and the supply of chemicals, the liquid jet also ensures cooling of the marginal areas of the process hearth and rapid removal of the reaction products.
- the latter aspect is an important prerequisite for promoting and accelerating rapid chemical (equilibrium) processes.
- the cooling of the marginal areas, which are not involved in the reaction and especially the material removal are not subject, can be protected by the cooling effect of the beam from thermal stresses and resulting crystalline damage, which allows a low-damage or damage-free structuring of the solar cells.
- the liquid jet due to its high flow speed, the liquid jet imparts a considerable mechanical impulse to the substances supplied, which is particularly effective when the jet strikes a molten substrate surface.
- the laser beam and the liquid jet together form a new process tool that, in principle, combines the individual systems that make it up, is superior.
- the metal-containing seed layer is preferably deposited by vapor deposition, sputtering or by reduction from aqueous solution. This is preferably done simultaneously on the front and the back of the wafer.
- the metal-containing seed layer preferably contains a metal from the group aluminum, nickel, titanium, chromium, tungsten, silver and their alloys.
- the seed layer After application of the seed layer, it is preferably thermally treated, e.g. by laser annealing.
- a layer for increasing the adhesion is preferably deposited at least in regions on the front side of the wafer.
- This adhesion enhancing layer preferably contains or consists of these metals a metal selected from the group consisting of nickel, titanium, copper, tungsten and alloys thereof.
- metal-containing seed layer After application of the metal-containing seed layer is preferably carried out at least partially thickening of the seed layer by electrodeposition of a metallization, in particular of silver or copper, whereby a contacting of the front and the back of the wafer takes place.
- a metallization in particular of silver or copper
- a laminar liquid jet is used as possible for carrying out the method.
- the laser beam can then be guided in a particularly effective manner by total reflection in the liquid jet, so that the latter function fulfilled a light guide.
- the coupling of the laser beam can be done for example by a perpendicular to a beam direction of the liquid jet window in a nozzle unit.
- the window can also be designed as a lens for focusing the laser beam.
- a lens independent of the window can also be used to focus or shape the laser beam.
- the nozzle unit can be designed so that the liquid is supplied from one side or from several sides in the radial direction to the jet direction.
- Preferred laser types are:
- solid-state lasers in particular the commercially commonly used Nd-YAG lasers of wavelength 1064 nm, 532 nm, 355 nm, 266 nm and 213 nm, diode lasers with wavelengths ⁇ 1000 nm, argon ion lasers of wavelength 514 to 458 nm and excimer lasers (wavelengths: 157 to 351 nm).
- the quality of the microstructuring tends to increase with decreasing wavelength because increasingly the energy induced by the laser in the surface layer is increasingly concentrated on the surface, which tends to reduce the heat-affected zone and thus to reduce the crystalline damage in the surface Material, especially in phosphorous doped silicon below the passivation layer leads.
- blue lasers and lasers in the near UV range (eg 355 nm) with pulse lengths in the femtosecond range prove to be particularly effective Nanosecond range.
- the use of shortwave laser light offers the option of a direct generation of electron / hole pairs in silicon, which can be used for the electrochemical process in nickel deposition (photochemical activation).
- free electrons generated in the silicon by laser light can directly contribute to the reduction of nickel on the surface.
- This electron / hole generation can be permanently maintained by permanent illumination of the sample with defined wavelengths (in particular in the near UV with ⁇ ⁇ 355 nm) during the structuring process and sustainably promote the metal nucleation process.
- the solar cell property can be exploited in order to separate the superconducting charge carriers via the p-n junction and thus negatively charge the n-conducting surface.
- a further preferred variant of the method according to the invention provides that the laser beam is actively set in temporal and / or spatial pulse shape. These include the flattop shape, an M-profile or a rectangular pulse.
- a solar cell is also provided which can be produced by the method described above.
- FIG. 1 shows an embodiment of the solar cell according to the invention.
- the solar cell 1 according to the invention in FIG. 1 has an Si-based wafer 2, which is coated on the rear side with a flat, all-surface emitter 3. On the emitter layer, a passivation layer 4 is arranged. In defined areas here is an electric field on the back 5
- a flat, all-surface emitter 7 and a passivation layer 8 is arranged on the front side of the wafer 2.
- a highly doped emitter (n + ) 9 and front-side contacts 10 are arranged at defined locations.
- a sawn p-type wafer is initially subjected to a damage etch to remove the Drahtsäge antibiotics, said loss ratios in 40% KOH is carried out at 80 C for 20 minutes 0th It follows a one-sided texturing of the wafer in 1% KOH at 98 0 C (duration about 35 minutes).
- a light emitter diffusion takes place in the tube furnace with phosphoryl chloride (POCl 3 ) as a phosphorus source.
- the sheet resistance of the emitter is in a range of 100 to 400 ohms / sq.
- a thin thermal oxide layer in the tube furnace is produced by overflowing with steam.
- the thickness of the oxide layer is in a range of 6 to 15 nm.
- a PECVD deposition of silicon nitride (refractive index n 2.0 to 2.1, thickness of the layer: about 60 nm) on the front side and a silicon dioxide layer (thickness: about 200 nm) on the back side.
- the wafer treated in this way is subsequently structured with the liquid jet.
- a cutting and simultaneous doping of the trench walls takes place with the aid of a laser, which is coupled into a liquid jet (so-called laser chemical processing, LCP).
- the blasting medium is 85% phosphoric acid.
- the line width of the structures is about 30 ⁇ m and the distance between 2 lines is 1 to 2 mm.
- the driving speed is 400 mm / s.
- the thus structured and doped wafer is then subjected to an electroless deposition of nickel by means of the LCP process.
- Laser parameters and driving speed are identical to the previous method step. This is followed by the formation of a local back-surface field (BSF) using LCP, for which boric acid is used
- the line width is about 30 microns and the distance between the lines 200 microns to 2 mm.
- laser parameters and speed are identical to the previous two steps.
- vapor deposition of aluminum on the back is followed by vapor deposition of aluminum on the back (thickness: about 50 nm) and subsequent vapor deposition of the contact metal on the back (eg titanium, thickness: about 30 nm).
- the front and rear contacts are sintered at temperatures of 300 to 500 ° C. in a forming gas atmosphere (N 2 H 2 ).
- N 2 H 2 forming gas atmosphere
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Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE102009011306A DE102009011306A1 (de) | 2009-03-02 | 2009-03-02 | Beidseitig kontaktierte Solarzellen sowie Verfahren zu deren Herstellung |
PCT/EP2010/000921 WO2010099863A2 (fr) | 2009-03-02 | 2010-02-15 | Cellules solaires à contacts en faces avant et arrière et leur procédé de fabrication |
Publications (1)
Publication Number | Publication Date |
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EP2404324A2 true EP2404324A2 (fr) | 2012-01-11 |
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EP10706508A Withdrawn EP2404324A2 (fr) | 2009-03-02 | 2010-02-15 | Cellules solaires à contacts en faces avant et arrière et leur procédé de fabrication |
Country Status (6)
Country | Link |
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US (1) | US20120055541A1 (fr) |
EP (1) | EP2404324A2 (fr) |
KR (1) | KR20110122214A (fr) |
CN (1) | CN102379043A (fr) |
DE (1) | DE102009011306A1 (fr) |
WO (1) | WO2010099863A2 (fr) |
Families Citing this family (26)
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US8637340B2 (en) | 2004-11-30 | 2014-01-28 | Solexel, Inc. | Patterning of silicon oxide layers using pulsed laser ablation |
US9508886B2 (en) | 2007-10-06 | 2016-11-29 | Solexel, Inc. | Method for making a crystalline silicon solar cell substrate utilizing flat top laser beam |
US8399331B2 (en) | 2007-10-06 | 2013-03-19 | Solexel | Laser processing for high-efficiency thin crystalline silicon solar cell fabrication |
US9455362B2 (en) | 2007-10-06 | 2016-09-27 | Solexel, Inc. | Laser irradiation aluminum doping for monocrystalline silicon substrates |
KR20110086098A (ko) | 2008-10-23 | 2011-07-27 | 알타 디바이씨즈, 인크. | 광전지 장치 |
US9691921B2 (en) | 2009-10-14 | 2017-06-27 | Alta Devices, Inc. | Textured metallic back reflector |
US9502594B2 (en) | 2012-01-19 | 2016-11-22 | Alta Devices, Inc. | Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from template layer and etching |
US20170141256A1 (en) | 2009-10-23 | 2017-05-18 | Alta Devices, Inc. | Multi-junction optoelectronic device with group iv semiconductor as a bottom junction |
US20150380576A1 (en) * | 2010-10-13 | 2015-12-31 | Alta Devices, Inc. | Optoelectronic device with dielectric layer and method of manufacture |
US11271128B2 (en) | 2009-10-23 | 2022-03-08 | Utica Leaseco, Llc | Multi-junction optoelectronic device |
DE102010026331A1 (de) * | 2010-07-07 | 2012-02-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Materialabtrag an Festkörpern |
DE202011100178U1 (de) | 2011-04-29 | 2012-07-31 | 3D-Micromac Ag | Vorrichtung zur direkten Energieeinkopplung in organisches Halbleitermaterial für Solarzellen |
KR20120140026A (ko) * | 2011-06-20 | 2012-12-28 | 엘지전자 주식회사 | 태양전지 |
DE102011052256B4 (de) * | 2011-07-28 | 2015-04-16 | Hanwha Q.CELLS GmbH | Verfahren zur Herstellung einer Solarzelle |
KR101838278B1 (ko) * | 2011-12-23 | 2018-03-13 | 엘지전자 주식회사 | 태양 전지 |
AU2012362505B2 (en) * | 2011-12-26 | 2015-08-20 | Solexel, Inc. | Systems and methods for enhanced light trapping in solar cells |
US11038080B2 (en) | 2012-01-19 | 2021-06-15 | Utica Leaseco, Llc | Thin-film semiconductor optoelectronic device with textured front and/or back surface prepared from etching |
KR101940074B1 (ko) * | 2012-04-30 | 2019-04-10 | 주성엔지니어링(주) | 태양 전지 및 그 제조 방법 |
DE102012211161A1 (de) | 2012-06-28 | 2014-02-06 | Robert Bosch Gmbh | Verfahren zum Ausbilden einer elektrisch leitenden Struktur an einem Trägerelement, Schichtanordnung sowie Verwendung eines Verfahrens oder einer Schichtanordnung |
TWI474488B (zh) * | 2012-09-21 | 2015-02-21 | Ind Tech Res Inst | 太陽能電池 |
DE102013106272B4 (de) * | 2013-06-17 | 2018-09-20 | Hanwha Q Cells Gmbh | Wafersolarzelle und Solarzellenherstellungsverfahren |
US9653638B2 (en) | 2013-12-20 | 2017-05-16 | Sunpower Corporation | Contacts for solar cells formed by directing a laser beam with a particular shape on a metal foil over a dielectric region |
EP2993699B1 (fr) * | 2014-09-04 | 2018-03-21 | IMEC vzw | Procédé de fabrication de cellules photovoltaïques cristallines |
DE102018105438A1 (de) * | 2018-03-09 | 2019-09-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung einer photovoltaischen Solarzelle und photovoltaische Solarzelle |
DE102019114498A1 (de) * | 2019-05-29 | 2020-12-03 | Hanwha Q Cells Gmbh | Wafer-Solarzelle, Solarmodul und Verfahren zur Herstellung der Wafer-Solarzelle |
CN111916347B (zh) * | 2020-08-13 | 2023-03-21 | 中国电子科技集团公司第四十四研究所 | 一种用于soi片的磷扩散掺杂方法 |
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US6524880B2 (en) * | 2001-04-23 | 2003-02-25 | Samsung Sdi Co., Ltd. | Solar cell and method for fabricating the same |
DE102006003604A1 (de) * | 2005-03-16 | 2006-11-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Mikrostrukturierung von Festkörperoberflächen |
EP2135704A1 (fr) * | 2006-01-25 | 2009-12-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Procédé et dispositif d'usinage de précision de substrats au moyen d'un laser introduit dans un jet de liquide et application dudit procédé |
DE102007010872A1 (de) * | 2007-03-06 | 2008-09-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Präzisionsbearbeitung von Substraten und dessen Verwendung |
-
2009
- 2009-03-02 DE DE102009011306A patent/DE102009011306A1/de not_active Withdrawn
-
2010
- 2010-02-15 CN CN2010800153312A patent/CN102379043A/zh active Pending
- 2010-02-15 WO PCT/EP2010/000921 patent/WO2010099863A2/fr active Application Filing
- 2010-02-15 EP EP10706508A patent/EP2404324A2/fr not_active Withdrawn
- 2010-02-15 KR KR1020117022811A patent/KR20110122214A/ko not_active Application Discontinuation
-
2011
- 2011-08-30 US US13/221,106 patent/US20120055541A1/en not_active Abandoned
Non-Patent Citations (1)
Title |
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See references of WO2010099863A2 * |
Also Published As
Publication number | Publication date |
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WO2010099863A3 (fr) | 2010-12-29 |
US20120055541A1 (en) | 2012-03-08 |
CN102379043A (zh) | 2012-03-14 |
WO2010099863A2 (fr) | 2010-09-10 |
KR20110122214A (ko) | 2011-11-09 |
DE102009011306A1 (de) | 2010-09-16 |
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