EP2392947A3 - Procédés et appareil pour le balayage au faisceau d'électrons - Google Patents

Procédés et appareil pour le balayage au faisceau d'électrons Download PDF

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Publication number
EP2392947A3
EP2392947A3 EP11172895.2A EP11172895A EP2392947A3 EP 2392947 A3 EP2392947 A3 EP 2392947A3 EP 11172895 A EP11172895 A EP 11172895A EP 2392947 A3 EP2392947 A3 EP 2392947A3
Authority
EP
European Patent Office
Prior art keywords
target
detector array
scanning device
methods
rays emitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11172895.2A
Other languages
German (de)
English (en)
Other versions
EP2392947A2 (fr
Inventor
Richard Franklin Eilbert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
L3 Security and Detection Systems Inc
Original Assignee
L3 Communications Security and Detection Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by L3 Communications Security and Detection Systems Inc filed Critical L3 Communications Security and Detection Systems Inc
Publication of EP2392947A2 publication Critical patent/EP2392947A2/fr
Publication of EP2392947A3 publication Critical patent/EP2392947A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • G01V5/20Detecting prohibited goods, e.g. weapons, explosives, hazardous substances, contraband or smuggled objects
    • G01V5/22Active interrogation, i.e. by irradiating objects or goods using external radiation sources, e.g. using gamma rays or cosmic rays
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/14Arrangements for concentrating, focusing, or directing the cathode ray
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05GX-RAY TECHNIQUE
    • H05G1/00X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08Electrical details
    • H05G1/26Measuring, controlling or protecting
    • H05G1/30Controlling
    • H05G1/52Target size or shape; Direction of electron beam, e.g. in tubes with one anode and more than one cathode
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05GX-RAY TECHNIQUE
    • H05G1/00X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08Electrical details
    • H05G1/70Circuit arrangements for X-ray tubes with more than one anode; Circuit arrangements for apparatus comprising more than one X ray tube or more than one cathode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00X-ray tubes
    • H01J2235/06Cathode assembly
    • H01J2235/068Multi-cathode assembly

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Toxicology (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • X-Ray Techniques (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
EP11172895.2A 2005-07-05 2006-07-05 Procédés et appareil pour le balayage au faisceau d'électrons Withdrawn EP2392947A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69666905P 2005-07-05 2005-07-05
EP06800017.3A EP1899750B1 (fr) 2005-07-05 2006-07-05 Procedes et dispositif de balayage par faisceau d'electrons

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP06800017.3 Division 2006-07-05
EP06800017.3A Division EP1899750B1 (fr) 2005-07-05 2006-07-05 Procedes et dispositif de balayage par faisceau d'electrons

Publications (2)

Publication Number Publication Date
EP2392947A2 EP2392947A2 (fr) 2011-12-07
EP2392947A3 true EP2392947A3 (fr) 2014-02-12

Family

ID=37492073

Family Applications (2)

Application Number Title Priority Date Filing Date
EP11172895.2A Withdrawn EP2392947A3 (fr) 2005-07-05 2006-07-05 Procédés et appareil pour le balayage au faisceau d'électrons
EP06800017.3A Not-in-force EP1899750B1 (fr) 2005-07-05 2006-07-05 Procedes et dispositif de balayage par faisceau d'electrons

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP06800017.3A Not-in-force EP1899750B1 (fr) 2005-07-05 2006-07-05 Procedes et dispositif de balayage par faisceau d'electrons

Country Status (3)

Country Link
US (3) US7428297B2 (fr)
EP (2) EP2392947A3 (fr)
WO (1) WO2007006042A2 (fr)

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EP2392947A3 (fr) * 2005-07-05 2014-02-12 L-3 Communications Security and Detection Systems, Inc. Procédés et appareil pour le balayage au faisceau d'électrons
DE102006006840A1 (de) * 2006-02-14 2007-08-23 Siemens Ag Röntgen-Computertomograph mit Lichtstrahl-gesteuerter Röntgenquelle
WO2008133765A2 (fr) * 2007-02-13 2008-11-06 Sentinel Scanning Corporation Tomodensitométrie et detection de contrebande
DE102007008349B4 (de) * 2007-02-20 2009-10-15 Forschungszentrum Dresden - Rossendorf E.V. Anordnung zur Röntgen-Computertomographie
US7899156B2 (en) * 2008-07-16 2011-03-01 L-3 Communications Security And Detection Systems, Inc. Irradiation system including an electron-beam scanner
JP5559471B2 (ja) * 2008-11-11 2014-07-23 浜松ホトニクス株式会社 放射線検出装置、放射線画像取得システム、放射線検査システム、及び放射線検出方法
CN103262220A (zh) * 2010-12-16 2013-08-21 日立造船株式会社 利用电子束技术产生臭氧和等离子体
US8644549B2 (en) 2011-02-01 2014-02-04 L-3 Communications Security And Detection Systems, Inc. Reconstruction method using direct and iterative techniques
EP2765408B1 (fr) * 2011-10-04 2018-07-25 Nikon Corporation Dispositif de rayons x, procédé d'irradiation de rayons x et procédé de fabrication pour structure
US9069092B2 (en) 2012-02-22 2015-06-30 L-3 Communication Security and Detection Systems Corp. X-ray imager with sparse detector array
DE102012005767A1 (de) * 2012-03-25 2013-09-26 DüRR DENTAL AG Phasenkontrast-Röntgen-Tomographiegerät
US9460823B2 (en) 2012-09-10 2016-10-04 Telesecurity Sciences, Inc. Dynamic beam aperture control to reduce radiation dose using collimator
DE102013206252A1 (de) * 2013-04-09 2014-10-09 Helmholtz-Zentrum Dresden - Rossendorf E.V. Anordnung zur schnellen Elektronenstrahl-Röntgencomputertomographie
CA2910561C (fr) 2013-05-03 2021-07-27 Sunnybrook Health Sciences Centre Systemes et procedes d'imagerie ultrasonore a super-resolution
US9801594B2 (en) * 2013-05-24 2017-10-31 Imatrex Inc. Ebeam tomosynthesis for radiation therapy tumor tracking
US10660588B2 (en) * 2013-05-24 2020-05-26 Imatrex Inc. Tumor tracing device with multiple scan tubes
US10436721B2 (en) * 2015-07-22 2019-10-08 UHV Technologies, Inc. X-ray imaging and chemical analysis of plant roots
US11282668B2 (en) * 2016-03-31 2022-03-22 Nano-X Imaging Ltd. X-ray tube and a controller thereof
CN109362169A (zh) * 2018-12-24 2019-02-19 中广核达胜加速器技术有限公司 一种电子加速器x射线转换靶的支承转换装置
EP3933881A1 (fr) 2020-06-30 2022-01-05 VEC Imaging GmbH & Co. KG Source de rayons x à plusieurs réseaux
CN114167507B (zh) * 2020-09-11 2023-07-11 同方威视技术股份有限公司 多通道静态ct装置
CN112378476B (zh) * 2020-11-17 2022-10-04 哈尔滨工业大学 大长径比卧式罐容积多站三维激光扫描内测装置及方法
EP4024436A1 (fr) * 2020-12-31 2022-07-06 VEC Imaging GmbH & Co. KG Source de rayons x multi-source hybride et système d'imagerie

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JPH0428154A (ja) * 1990-05-22 1992-01-30 Shimadzu Corp 高速走査型x線発生装置
US5218624A (en) * 1975-02-21 1993-06-08 Emi Limited Radiography
US5490193A (en) * 1990-07-23 1996-02-06 Hitachi, Ltd. X-ray computed tomography system

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US4352021A (en) * 1980-01-07 1982-09-28 The Regents Of The University Of California X-Ray transmission scanning system and method and electron beam X-ray scan tube for use therewith
US4685118A (en) * 1983-11-10 1987-08-04 Picker International, Inc. X-ray tube electron beam switching and biasing method and apparatus
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DE4433133C1 (de) * 1994-09-16 1995-12-07 Siemens Ag Röntgenstrahler mit einer Elektronenquelle zum Senden eines Bündels von Elektronen entlang einer langgestreckten Anode
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US6088423A (en) * 1998-06-05 2000-07-11 Vivid Technologies, Inc. Multiview x-ray based system for detecting contraband such as in baggage
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US6735271B1 (en) * 2000-11-28 2004-05-11 Ge Medical Systems Global Technology Company Llc Electron beam computed tomographic scanner system with helical or tilted target, collimator, and detector components to eliminate cone beam error and to scan continuously moving objects
DE10062214B4 (de) * 2000-12-13 2013-01-24 Smiths Heimann Gmbh Vorrichtungen zur Durchleuchtung von Objekten
DE10149254B4 (de) * 2001-10-05 2006-04-20 Smiths Heimann Gmbh Verfahren und Vorrichtung zur Detektion eines bestimmten Materials in einem Objekt mittels elektromagnetischer Strahlen
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US6895072B2 (en) * 2003-03-26 2005-05-17 Heimann Systems Corp. Apparatus and method for non-destructive inspection of material in containers
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US7023950B1 (en) * 2004-02-11 2006-04-04 Martin Annis Method and apparatus for determining the position of an x-ray cone beam produced by a scanning electron beam
US6993111B1 (en) * 2004-02-17 2006-01-31 Martin Annis Method and apparatus for improving the spatial resolution of a laminography system that employs an x-ray source with a scanning beam
WO2005098400A2 (fr) * 2004-04-09 2005-10-20 American Science And Engineering, Inc. Portail d'inspection de retrodiffusion
US7203269B2 (en) * 2004-05-28 2007-04-10 General Electric Company System for forming x-rays and method for using same
US7233644B1 (en) * 2004-11-30 2007-06-19 Ge Homeland Protection, Inc. Computed tomographic scanner using rastered x-ray tubes
EP2392947A3 (fr) * 2005-07-05 2014-02-12 L-3 Communications Security and Detection Systems, Inc. Procédés et appareil pour le balayage au faisceau d'électrons
DE102006006840A1 (de) * 2006-02-14 2007-08-23 Siemens Ag Röntgen-Computertomograph mit Lichtstrahl-gesteuerter Röntgenquelle

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5218624A (en) * 1975-02-21 1993-06-08 Emi Limited Radiography
JPH0428154A (ja) * 1990-05-22 1992-01-30 Shimadzu Corp 高速走査型x線発生装置
US5490193A (en) * 1990-07-23 1996-02-06 Hitachi, Ltd. X-ray computed tomography system

Also Published As

Publication number Publication date
WO2007006042A9 (fr) 2007-04-05
EP1899750B1 (fr) 2013-10-02
US8155272B2 (en) 2012-04-10
US20120170714A1 (en) 2012-07-05
US7428297B2 (en) 2008-09-23
WO2007006042A2 (fr) 2007-01-11
WO2007006042A3 (fr) 2007-06-07
US20070081623A1 (en) 2007-04-12
EP2392947A2 (fr) 2011-12-07
US20100316188A1 (en) 2010-12-16
EP1899750A2 (fr) 2008-03-19

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