EP2359099A1 - Dispositif de mesure avec capteur optique - Google Patents

Dispositif de mesure avec capteur optique

Info

Publication number
EP2359099A1
EP2359099A1 EP09801428A EP09801428A EP2359099A1 EP 2359099 A1 EP2359099 A1 EP 2359099A1 EP 09801428 A EP09801428 A EP 09801428A EP 09801428 A EP09801428 A EP 09801428A EP 2359099 A1 EP2359099 A1 EP 2359099A1
Authority
EP
European Patent Office
Prior art keywords
optical waveguide
measuring device
sensor
measuring
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09801428A
Other languages
German (de)
English (en)
Inventor
Martin Hertel
Rainer Höcker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser Flowtec AG
Original Assignee
Endress and Hauser Flowtec AG
Flowtec AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser Flowtec AG, Flowtec AG filed Critical Endress and Hauser Flowtec AG
Publication of EP2359099A1 publication Critical patent/EP2359099A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
    • G01F1/325—Means for detecting quantities used as proxy variables for swirl
    • G01F1/3259—Means for detecting quantities used as proxy variables for swirl for detecting fluid pressure oscillations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/32—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow using swirl flowmeters
    • G01F1/325—Means for detecting quantities used as proxy variables for swirl
    • G01F1/3259—Means for detecting quantities used as proxy variables for swirl for detecting fluid pressure oscillations
    • G01F1/3266—Means for detecting quantities used as proxy variables for swirl for detecting fluid pressure oscillations by sensing mechanical vibrations

Definitions

  • the invention relates to a measuring device for determining a chemical and / or physical measured variable, in particular a volume and / or mass flow, of a medium flowing through a pipeline.
  • Flow meters today often use the change in electrical capacity, electrical conductivity or voltage to determine volumetric and / or mass flow.
  • a vortex flow meter for example is, among other things, produced from a bluff body downstream of a Karman 'sche vortex street.
  • the pressure fluctuations of the vortex street are detected by a sensor flag.
  • the periodic pressure fluctuations stimulate the sensor flag to a periodic oscillation.
  • the movement of the sensor flag is, for example, read out with the aid of a piezo sensor.
  • the disadvantage of this technology is the limitation of the operating temperature of the flowmeter due to the readout mechanism and the need for on-site electronics for reading the piezo sensor, which require a complex temperature insulation and explosion protection measures on the electronics to operating temperatures of 400 0th To reach C or more.
  • Vortex flow measuring devices are also known which manage without sensor flag and in which the pressure fluctuations are detected directly by a sensor mounted in or on the bluff body.
  • Coriolis flow measuring devices use the phase shift of a vibrating measuring tube caused by the mass of a medium.
  • the Signafabgriff is usually done by immersion spools. This reading must i.a. be compensated for the temperature.
  • the interferometer consists of a pair of opposite optical fiber end surfaces, which is applied to a carrier material.
  • a device is known which receives by means of a Optäkmaschine the oscillations of a Coriolis mass flow meter. For this purpose, the weakening or extent of weakening of an optical signal resulting from the bending of the optical fiber is utilized.
  • a device for measuring the velocity of a fluid which has a transducer, which in turn has a rod-shaped projection.
  • the rod-shaped projection provides for the modulation of an optical signal transmitted via an optical waveguide.
  • a Bragg grating can be realized within an optical fiber by means of UV lithography. In this method, light is radiated broadband into the waveguide. The Bragg grating generates a Bragg reflex at a defined wavelength. This wavelength is equally dependent on temperature and length expansion. Thus, it is not readily possible to distinguish between temperature-related and length change-related effects in this method.
  • fiber-optic sensors which operate at temperatures around 800 0 C and thus exceed the thermal application range of previously known sensors by several hundred degrees Celsius.
  • a Fabry-Perot resonator is microfabricated into an optical fiber by means of a laser.
  • the facets created by making the gap at the ends of the optical waveguide have mirror-like Properties.
  • the temperature independence results from the fact that the core of the optical fiber thus produced expands when the temperature rises and compresses the two resonance surfaces.
  • the cladding of the optical fiber expands and pulls apart the resonance surfaces.
  • the object of the invention is to propose a measuring device for determining a chemical and / or physical measurand of a medium flowing through a pipeline, which works reliably and reliably even at high temperatures.
  • the measuring device comprises a sensor, wherein the sensor has at least one optical waveguide, which is used for generating, recording and / or transmission of Messsignaien, wherein the recording of the measurement signals in the optical waveguide by means of a Fabry-Perot Sensor takes place.
  • a Fabry-Perot sensor usually consists of an interferometer of two particularly plane-parallel mirrors of high reflectivity, which together form an optical resonator and are partially transparent for an electromagnetic wavelength radiated into the resonator.
  • One advantage of the invention is that the measurement signals recorded and transmitted in the optical waveguide are substantially independent of external mechanical and / or thermal influences due to the Fabry-Perot sensor. Consequently, for an evaluation of the measurement signals are mainly the properties of the optical
  • the measurement signals can be recorded at a precisely defined location in the optical waveguide.
  • the sensor according to the invention therefore makes possible a more accurate determination of the measured variable.
  • the measuring device can also be used in adverse environmental conditions, such as. High temperatures or in hazardous areas for generating, recording and / or transmission of a measuring signal.
  • the measurement signals can also be directly through the optical waveguides are generated by the optical waveguide, for example. Introduced into the pipeline and exposed to the flowing medium.
  • the measurement signals are, for example, changes in length due to pressure fluctuations or due to vibrations.
  • the Fabry-Perot sensor at least partially consists of the optical waveguide.
  • a mirror of the Fabry-Perot interferometer may consist of a specular surface of one end of an optical fiber. The sensor can thus be designed to save space.
  • the Fabry-Perot sensor is incorporated in the optical waveguide.
  • the Fabry-Perot interferometer is incorporated, for example, in the course of the optical waveguide by a gap between two end faces of the optical waveguide is made.
  • the Fabry-Perot sensor has an optical resonator which is completely incorporated in the optical waveguide.
  • the optical waveguide can consist in particular of an optical fiber or of a bundle of optical fibers.
  • optical waveguides can be used today, for example in the form of fibers.
  • Signal transmission by means of optical waves through optical fibers offers numerous advantages over electrical signal transmission.
  • optical signals are not subject to electrical interference, are safe against a highly flammable environment and very compact in installation.
  • optical waveguides large distances between the sensor and the measuring wall technology can be realized.
  • the connection is insensitive to electromagnetic interference and can be laid explosion-proof.
  • the combination of Fabry-Perot interferometer and an optical waveguide allows the use of a Fabry-Perot based length measurement to determine a chemical and / or physical measurand of a flowing through a pipeline medium.
  • the low temperature dependence of the length measurement and the high temperature resistance of the optical waveguide as well as the possibility only Having to transport light with low energy into the explosion-proof areas of a process allows the production of products with significant advantages.
  • the optical waveguide can consist of a glass and / or a plastic.
  • the optical waveguide has a core and a cladding
  • the optical resonator consists of at least one gap in the core of the optical waveguide.
  • the gap exists, for example, from an air gap.
  • the gap may also be present in the cladding of the optical waveguide and run diametrically through the optical waveguide, in particular if the optical waveguide consists of a fiber bundle, the cladding may be a region around the core of the waveguide which has a lower refractive index as the core of the optical waveguide.
  • the optical waveguide may be surrounded by a protective insulation.
  • the optical waveguide is a single-mode optical waveguide, in particular a single-mode optical fiber.
  • the ends of optical fibers may have partially reflective surfaces. Through a gap between two ends of an optical glass fiber having reflective surfaces, an optical resonator can be formed. Changing the distance between the ends of the optical fiber (s) changes intensity of intensity due to changing interference conditions in the resonator. In this way, a simple and robust Fabry-Perot sensor can be produced.
  • the measuring device is an eddy-flow measuring device with a baffle body arranged along a diameter of the pipeline and connected to the pipeline at at least one fixing point, which serves to produce Karmän vortices and / or with a sensor flag for receiving from, caused by the vertebrae pressure fluctuations.
  • the bluff body and / or the sensor flag is inserted from the outside through a hole in the measuring tube wall and the bluff body and / or the sensor flag comprises a membrane covering the bore.
  • the optical waveguide with integrated Fabry-Perot interferometer can, for example, be attached to the membrane and thereby dispense with a sensor hump for receiving the measurement signal.
  • the optical waveguide is mechanically coupled to the bluff body and / or the sensor flag and / or the membrane and responds to movements of the bluff body, the sensor flag or the membrane by a change in length.
  • the optical waveguide is connected to the baffle body and / or to the sensor flag such that the Karman vortices produce changes in length of the optical waveguide.
  • the change in length of the optical waveguide in turn causes a change in the resonance conditions in the optical resonator of the Fabry-Perot interferometer.
  • the frequency can be determined with which detach the Kärmän'schen vortex from the bluff body.
  • the intensity of the measurement signal transmitted through the optical waveguide can be determined, for example, by means of a photosensor or photodetector, in particular a photodiode.
  • the volume flow can then be determined from the interference pattern. For this purpose, for example, at least one time interval is determined between two intensity values occurring in the course of time of the intensity of the measurement signal, in particular between substantially the same intensity values.
  • the intensity values are preferably the intensity matte.
  • An intensity maximum occurs whenever the length d of the resonator is substantially a multiple of half the wavelength ⁇ of the electromagnetic wave radiated into the optical waveguide.
  • the relationship between the frequency at which the Karmän vertebrae separate from the bluff body and the determined time span can be established, for example, by calibration.
  • the time interval between two intensity values also changes over the course of time of the intensity.
  • the measuring device is a Coriolis mass flow measuring device with at least one measuring tube vibrating in measuring operation
  • the optical waveguide is mechanically coupled to the measuring tube and the optical waveguide responds to vibrations of the measuring tube by a change in length.
  • the vibrations of the measuring tube can be determined with high precision and also largely independent of the ambient conditions.
  • the optical waveguide with integrated Fabry-Perot interferometer is fixed to the measuring tube so that the measuring tube excited to vibrate produces a change in length of the optical waveguide or the Fabry-Perot resonator integrated therein.
  • the frequency of the vibrations of the measuring tube or, in the case of two measuring tubes, the phase shift between the respective frequencies of the two measuring tubes can be determined from an interference pattern which is derived from the intensity of the measuring signal transmitted through the optical waveguide. For example, a distinction is made between intensity maxima and minima and in this way a resolution of the change in length of the resonator contained in the optical waveguide is achieved up to a quarter of the wavelength of the incident light.
  • At least one photodiode is provided for determining the intensity of the measurement signal and / or the interference pattern, which comprises an electrical, generates the signal corresponding to the measurement signal.
  • the photodiode serves to generate an electrical signal from the light introduced into the optical waveguide.
  • the interference pattern can be converted into an electrical signal and transmitted to an evaluation unit.
  • the invention relates to an optical evaluation method for detecting small changes in length in the sensor of a flow measuring device, generated by the flow of substantially liquid and / or gaseous media, in particular based on the principle of vortex flow and Coriolis measurement.
  • FIG. 2 shows a schematic representation of an arrangement of a measuring transducer of a vortex flow measuring device with an optical signal tap
  • FIG. 3 shows a schematic representation of an optical waveguide fastened to the sensor sleeve with an integrated Fabry-Perot interferometer
  • FIG. 4 shows the schematic structure of a Fabry-Perot interferometer integrated in an optical waveguide
  • FIG. 5 shows a schematic representation of an optical waveguide with integrated Fabry-Perot interferometer attached to the membrane of a vortex flow measuring device
  • FIG. 8 shows a schematic representation of an optical waveguide with integrated Fabry-Perot interferometer attached to the bluff body of a vortex flow measuring device
  • FIG. 9 shows a schematic representation of a first and second optical waveguide connected to the membrane of a sensor flag
  • FIG. 1 shows a cross section through the measuring sensor of a vortex flow measuring device known from the prior art.
  • the vortex formed on the bluff body not shown, generate local pressure fluctuations in the flow, which are tapped by a sensor and converted into electrical signals.
  • the sensor is either integrated in the bluff body 9 or, like the sensor blade 3 shown in FIG. 1, is located immediately behind the bluff body 9
  • Periodically occurring vortex pressure fluctuations exert forces on the paddle-shaped sensor flag 3 behind the bluff body 9.
  • This paddle transmits the movement to a hüisenIndia center electrode, which forms the capacitances C1 and C2 with the divided into two half-shells 10a, 10b outer electrode.
  • a hüisenIndia center electrode which forms the capacitances C1 and C2 with the divided into two half-shells 10a, 10b outer electrode.
  • FIG. 2 shows a cross section through a measuring sensor of a vortex flow measuring device 1 according to the invention, in particular through the paddle-shaped one
  • the deflections of the sensor sleeve 2 are detected by a Fabry-Perot interferometer.
  • the Fabry-Perot interferometer consists of a mirror element 8 and an end of the optical waveguide 7.
  • the mirror element 8 and the end of the optical waveguide form an optical resonator. That's it an optical waveguide 7 is guided in the form of an optical fiber through the housing-forming wall 5 of the sensor.
  • a mirror element 8 is also mounted, which reflects the signal transmitted through the optical waveguide 7 signal.
  • a deflection of the sensor sleeve 2 results in a change in the distance between the mirror element 8 and the optical waveguide 7. As a result, the interference conditions of the resonator change.
  • the optical signal Due to the reflection on the mirror element 8, the optical signal is reflected back into the optical waveguide 7 and thus superimposed on the originally fed signal.
  • the interference signal thus formed can be detected via a photo-diode, not shown, on which the interference signal is projected.
  • the optical signal after having been reflected at the mirror element 8, is returned again through the optical waveguide 7.
  • the optical signa! therefore changes its intensity depending on the resonance conditions. This change can be represented as a function of time.
  • the interference pattern thus obtained does not correspond directly to the movement of the mounted on the sensor sleeve 2 mirror element 8, but the passage of the distance d between the open end of the optical waveguide 7 and the mirror element 8 by distances which lead to constructive or destructive interference.
  • the amplitude of the deflection, for example, of the sensor sleeve 2 shown here can thus be determined.
  • a resolution of up to one quarter of the wavelength ⁇ of the incident light can be achieved.
  • the wavelength of the electromagnetic signal transmitted through the optical waveguide 7 may be beyond the optical wavelength range in both the ultraviolet and infrared wavelengths.
  • a core (core) 42 made of a glass fiber with a cladding 41 and / or a plastic protective coating (coating) can serve as the optical waveguide 7.
  • Figure 2 contains an enlarged view of the optical resonator 48.
  • the resonator 48 consists of the specular surface of the end of the optical waveguide 7 and the mirror element 8.
  • the optical waveguide 7 is fixed to or in the wall 5 of the sensor.
  • a mirror element 8 is applied to the sensor sleeve 2, which reflects the light emerging from the optical waveguide 7 back into the optical waveguide 7.
  • FIG. 3 shows an optical waveguide 7 with an integrated Fabry-Perot interferometer.
  • the optical waveguide 7 is fixed at least to the sensor sleeve 2 and a wall 5 surrounding the vortex flow measuring transducer.
  • the Fabry-Perot resonator 48 is arranged between the fixation on the sensor sleeve 31 and the fixation on the wall.
  • the resonator is formed by two end surfaces which have mirror-like properties due to microfabrication.
  • the optical waveguide is fixed to the sensor sleeve 2, for example by gluing.
  • the resonator 48 of the Fabry-Perot interferometer is integrated into the optical fiber of the waveguide 7.
  • the resonator 48 typically has a length of 10 to 100 ⁇ m.
  • a deflection of the sensor flag 3 causes a corresponding deflection of the Sensorhüise 2 and has an expansion and / or compression of the optical waveguide 7 result.
  • the expansion and the resonance condition of the resonator 48 change, and an interference signal is formed in the optical waveguide 7.
  • the movements of the sensor sleeve are transmitted to the resonator 48.
  • the resonator therefore changes the resonance conditions as a function of the movement of the resonator
  • the length of the resonator 48 may be selected in the range of 10 times to 100 times the wavelength of the light irradiated into the optical waveguide.
  • a change in length of the resonator 48 is in the range of one tenth of the length of the resonator. At a change in length of the resonator of almost a tenth! its length, can therefore occur up to one hundred intensity maxima.
  • FIG. 4 shows an enlarged view of the Fabry-Perot interferometer integrated in the optical waveguide 7.
  • the optical waveguide 7 consists of a
  • Cladding 41 and a core 42 are surrounded by a protective coating (not shown).
  • the core 42 consists, for example, of a glass fiber. This core 42 is surrounded by the sheath 41, for example. Also glass fibers with a lower refractive index.
  • the gap in the core 42 is microfabricated, for example, by means of a laser.
  • a Fabry-Perot resonator 48 is bifurcated by the resulting end faces 44 of the optical fibers.
  • the end faces 44 of the resonator 48 have mirror-like properties.
  • the micro-machined gap by means of the laser does not have to be confined to the core 42 but may also partially exist in the cladding 41 of the optical waveguide 7.
  • FIG. 5 shows a further embodiment of a vortex flow measuring device with an optical waveguide 7 with integrated Fabry-Perot interferometer.
  • the optical waveguide 7 is attached to the membrane 4 of the sensor.
  • One end of the optical waveguide 7 is connected to the wall 5 of the sensor.
  • the Fabry-Perot resonator 48 is located between the wall 5 of the sensor and the sensor flag 3 on the membrane 4.
  • the optical waveguide 7 is in the region of the membrane 4 is substantially flat on the membrane 4.
  • the optical waveguide 7 is guided at the level of the membrane 7 through the wall 5 of the sensor housing of the vortex flowmeter and connected to an evaluation unit, not shown. It is also possible the optical
  • Guide waveguide 7 through the lumen 21 of the measuring device 1 to the outside.
  • the measuring device 1 shown in Figure 5 can be dispensed with a sensor sleeve 2 for receiving the measurement signals.
  • FIG. 6 does not show to scale a deflection or deformation of the sensor flag 3 and of the membrane 4 caused by the pressure changes due to the swirl influencing the sensor flag 3 and of the optical waveguide 7 fastened to the membrane 4.
  • the optical waveguide 7 is mounted on the membrane 4 in FIG Essentially laid flat and fixed, for example, by means of a cut. Due to the deflection of the Sensor flag 3, the membrane 4 is deformed. This results in a corresponding deformation of the optical waveguide 7 and of the Fabry-Perot resonator 48 integrated in the optical waveguide 7. The consequent change in the resonance conditions of the Fabry-Perot resonator 48 results in an interference signal from which the deflection of the sensor flag 3, the frequency of the vortices in the medium and thus the flow volume can be determined.
  • FIG. 7 shows a cross section through a sensor of a vortex flowmeter.
  • the optical waveguide 7 is attached directly to the sensor flag 3.
  • the optical waveguide 7 is centrally inserted into the sensor flag 3.
  • a deflection of the sensor flag 3 shown in FIG. 6, for example, then also results in a change in the resonance conditions in the Fabry-Perot resonator 48 of the optical waveguide 7 and the flow volume of the medium flowing through the measuring tube 6 can be determined on the basis of the interference signal or the interference pattern.
  • FIG. 8 shows a cross section through a bluff body 9 of a vortex flow measuring device.
  • the optical waveguide 7 with integrated Fabry-Perot resonator 48 is integrated directly in the bluff body 9.
  • the peeling vertebrae cause the baffle 9 also
  • FIG. 9 shows a further sensor of a vortex flowmeter.
  • the sensor has two optical waveguides 7, which run inside the sensor.
  • a respective mirror element 8 is mounted, which reflects the signal transmitted by the first and second optical waveguides 7 back into the first and second optical waveguide 7, respectively.
  • the first and the second mirror element 8 are while essentially arranged diametrically opposite each other. The first and the second Spiegefelement are thereby removed by an air gap 43 of a length in the micron range from the ends of the first and second optical waveguide 7.
  • a Fabry-Perot interferometer integrated into the first and / or second optical waveguide 7 or a Fabry-Perot resonator 48 integrated in the optical waveguide may be used.
  • the first and the second optical resonator 48 are arranged substantially diametrically opposite one another at the end and are connected to the first and / or second optical waveguide 7 with the membrane 4 of the vortex flowmeter.
  • FIG. 10 shows the course of the intensity of the interference signal as a function of time.
  • the changes in length of the resonator are in the region of one-tenth of the wavelength of the light irradiated into the waveguide.
  • the intensity curve during the change in length is used to determine the frequency with which to replace the Karman 'rule vortex of the bluff body.
  • the period of time ⁇ t is measured between two intensity maxima. From the period of time, the frequency with which the Kärmän vortex detach from the bluff body can be determined.
  • the signal fed into the optical waveguide can, for example, be taken from a laser source.
  • the intensity of the interference signal can be determined by a photodiode and converted into an electrical signal.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

L'invention porte sur un dispositif de mesure destiné à mesurer une grandeur chimique et/ou physique, en particulier un débit volumique et/ou massique, d'une substance à mesurer, s'écoulant dans une canalisation. Le dispositif de mesure comportant un enregistreur de mesure, l'enregistreur de mesure comporte au moins un guide d'onde optique, qui sert à produire, enregistrer et/ou transmettre des signaux de mesure, l'enregistrement des signaux de mesure étant effectué dans le guide d'onde optique à l'aide d'un capteur Fabry-Perot.
EP09801428A 2008-12-18 2009-12-11 Dispositif de mesure avec capteur optique Withdrawn EP2359099A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008054915A DE102008054915A1 (de) 2008-12-18 2008-12-18 Messeinrichtung mit einem optischen Sensor
PCT/EP2009/066910 WO2010069868A1 (fr) 2008-12-18 2009-12-11 Dispositif de mesure avec capteur optique

Publications (1)

Publication Number Publication Date
EP2359099A1 true EP2359099A1 (fr) 2011-08-24

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP09801428A Withdrawn EP2359099A1 (fr) 2008-12-18 2009-12-11 Dispositif de mesure avec capteur optique

Country Status (4)

Country Link
US (1) US8578786B2 (fr)
EP (1) EP2359099A1 (fr)
DE (1) DE102008054915A1 (fr)
WO (1) WO2010069868A1 (fr)

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DE102015116147A1 (de) 2015-09-24 2017-03-30 Endress + Hauser Flowtec Ag Sensorbaugruppe für einen Sensor, Sensor sowie damit gebildetes Meßsystem
DE102015122553A1 (de) 2015-12-22 2017-06-22 Endress+Hauser Flowtec Ag Wandlervorrichtung sowie mittels einer solchen Wandlervorrichtung gebildetes Meßsystem
DE102016104423A1 (de) 2016-03-10 2017-09-14 Endress+Hauser Flowtec Ag Sensorbaugruppe für einen Sensor, Sensor sowie damit gebildetes Meßsystem
DE102018132311A1 (de) 2018-12-14 2020-06-18 Endress + Hauser Flowtec Ag Meßsystem zum Messen eines Strömungsparameters eines in einer Rohrleitung strömenden Fluids
DE102019117831A1 (de) * 2019-07-02 2021-01-07 Krohne Messtechnik Gmbh Wirbeldurchflussmessgerät und Verfahren zum Betreiben eines Wirbeldurchflussmessgeräts
DE102020134264A1 (de) 2020-12-18 2022-06-23 Endress+Hauser Flowtec Ag Sensor zum Erfassen von Druckschwankungen in einem strömenden Fluid sowie damit gebildetes Meßsystem
DE102021117707A1 (de) 2021-07-08 2023-01-12 Endress+Hauser Flowtec Ag Meßsystem zum Messen eines Strömungsparameters eines in einer Rohrleitung strömenden fluiden Meßstoffs
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DE102022119145A1 (de) 2022-07-29 2024-02-01 Endress+Hauser Flowtec Ag Anschlussschaltung für ein Feldgerät und Feldgerät

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US8578786B2 (en) 2013-11-12
WO2010069868A1 (fr) 2010-06-24
DE102008054915A1 (de) 2010-06-24
US20110247430A1 (en) 2011-10-13

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