EP2310684B1 - Vakuumpumpe, insbesondere wälzkolbenpumpe - Google Patents

Vakuumpumpe, insbesondere wälzkolbenpumpe Download PDF

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Publication number
EP2310684B1
EP2310684B1 EP09779711.2A EP09779711A EP2310684B1 EP 2310684 B1 EP2310684 B1 EP 2310684B1 EP 09779711 A EP09779711 A EP 09779711A EP 2310684 B1 EP2310684 B1 EP 2310684B1
Authority
EP
European Patent Office
Prior art keywords
valve
roots
spring
vacuum pump
flap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP09779711.2A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2310684A1 (de
Inventor
Hannes Kamecke
Wolfgang Giebmanns
Dirk Schiller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE200810034073 external-priority patent/DE102008034073A1/de
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP2310684A1 publication Critical patent/EP2310684A1/de
Application granted granted Critical
Publication of EP2310684B1 publication Critical patent/EP2310684B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28Safety arrangements; Monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/10Vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00Control; Monitoring or safety arrangements
    • F04C2270/21Pressure difference

Definitions

  • the invention relates to a Roots or Roots vacuum pump.
  • Vacuum pumps have pumping elements arranged in a pumping chamber, in which Roots pumps are two rolling heads.
  • Roots pumps are two rolling heads.
  • the capacity of Roots pumps is limited in particular by a maximum pressure difference between the suction side and pressure side. This is approximately 50 mbar for Roots pumps with a large-volume suction chamber and approx. 80 mbar for smaller Roots pumps.
  • a thermal overload of the Roots pump, in particular of the drive motor can take place.
  • Roots pumps have a connection channel connecting the pressure side to the suction side, through which the conveyed medium can flow back from the pressure side to the suction side.
  • a valve In the connecting channel a valve, the so-called bypass valve is arranged. Upon reaching a predetermined pressure difference opens the usually weight and / or spring-loaded valve.
  • Roots pump valve arranged in the connecting channel of a Roots pump valve is for example off DE 28 44 019 known. It deals this is a poppet valve which has a plate-shaped valve body for closing a passage opening in the connecting channel.
  • Poppet valves with or without hydraulic or mechanical damping have the disadvantage that large masses must be moved. This leads to poppet valves being sluggish.
  • large-volume Roots pumps correspondingly large poppet valves must be provided so that in a short time a sufficient amount of medium can flow back through the connecting channel.
  • This has the further disadvantage that a large space is required for the poppet valve. This leads to large pump housing dimensions and thus to increased costs.
  • Another disadvantage of spring and weight-loaded poppet valves is that due to the acceleration of gravity, the mounting position must be considered.
  • a special arrangement of the poppet valve in a 45 ° angle to the conveying direction of the Roots pump is off DE 28 44 019 known. This makes it possible, the Roots pump at least in two different Install mounting positions in which the poppet valve is always arranged at a 45 ° angle to the acceleration of gravity.
  • Out GB 11,193 is a spring-loaded by coil springs valve with a valve flap known.
  • the object of the invention is to provide a Roots vacuum pump, can be realized with the shorter process times in modern manufacturing processes.
  • the vacuum pump according to the invention which is a Roots pump, also has a valve arranged in the connecting channel between the pressure side and the suction side.
  • the valve has a spring-loaded valve body, which closes a passage opening of the connecting channel, wherein when a maximum pressure difference between the pressure side and the suction side is exceeded, a particularly automatic opening of the valve takes place.
  • the valve body is designed as a pivotable valve flap. This has the particular advantage that the mass to be moved can be significantly reduced. As a result, not only a faster opening can be realized, but in particular the noise when opening the valve can be significantly reduced. Damage to the pump housing due to the opening of the valve are thus avoided.
  • a further significant advantage of the invention is that a considerable reduction in the size of the trees can be achieved since, when a flap valve is provided, it is not necessary to provide a cylindrical housing extension in which the poppet valve is arranged. Rather, it is possible to arrange the flap valve, for example, in a corner region of the housing, so that the outer dimensions of the pump housing can be significantly reduced.
  • the valve flap does not have to be a round passage opening in the connecting channel, which is closed by a round valve plate. Rather, in a particularly preferred embodiment of the invention, the passage opening in the connecting channel is substantially rectangular and / or elongated. According to the invention, the passage opening extends essentially over the entire width of the connecting channel.
  • the connecting channel is guided along the pump chamber housing and extends substantially over the entire width of the pump housing or the pumping chamber.
  • the minimum cross section of the connecting channel must be defined in order to be able to return a sufficient amount of conveyed medium via the connecting channel to the suction side in the short term when a load occurs.
  • valve flap valve Since when opening the flap valve, a pivoting of the valve flap about an axis of rotation and unlike poppet valves no displacement of the entire valve disk, the moving masses are significantly lower. A separate hydraulic or pneumatic damping is not required, but can be provided in special cases. Furthermore, the valve body during opening is parallel to the flow direction, whereby a striking is avoided.
  • the pivot axis of the valve flap is preferably located on a side facing away from the pump chamber.
  • the pivot axis of the valve flap preferably runs parallel to the axes of rotation of the pump elements designed as rolling elements in a Roots pump. It is thus possible that the pivot axis extends over the entire width of the pump housing.
  • the pivot axis by the arrangement of the pivot axis on the side facing away from the pump chamber side of the connecting channel, it is possible to arrange the pivot axis in a corner or an edge region of the pump housing. As a result, the space required for the arrangement of the flap valve can be significantly reduced, so that the outer dimension of the pump housing are significantly smaller than in the provision of corresponding poppet valves.
  • the pivot axis does not have to be a physical shaft or axis. Rather, it can also be a virtual axis.
  • the pivot axis may also be formed by a film hinge or the like.
  • valve body is formed in two parts, wherein the two parts are preferably formed according to a swinging door and preferably each having an opposing pivot axis.
  • the one or both pivot axes are arranged in the flow channel, so that a fully opened valve flap is arranged in the connecting channel and aligned in the flow direction. This makes it possible, if necessary, to further reduce the space.
  • flap valves have a lower flow resistance, so that smaller cross-sections and thus a smaller space can be realized.
  • the valve flap is spring-loaded according to the invention.
  • the spring connected to the valve flap is therefore connected directly or indirectly to the valve flap itself or to a swivel arm connected to the valve flap. It is preferred in this case to use as spring a torsion spring, which surrounds in particular the pivot axis of the valve flap. As a result, the space required for the flap valve space can be further reduced.
  • valve flap may be connected with a swivel arm.
  • the pivot arm is then connected to the pivot axis.
  • a torsion spring may be provided.
  • springs are used whose characteristic is substantially constant over the entire swing angle of the valve flap.
  • an adjusting element by which the spring force can be adjusted. By adjusting the spring force, it is possible to set the pressure difference at which the valve opens. Furthermore, an adjustment or fine adjustment of the spring force can take place. Furthermore, it is through the Providing a setting possible to compensate for changing spring properties.
  • the adjusting element can be, for example, a rotatable adjusting knob connected to one end of the torsion spring, by means of which the torsion spring can be twisted.
  • Such an adjustment element has, for example, latching elements and is rotatable about the central axis of the torsion spring.
  • the valve body is not round but has a parallel to the pump housing extending width, which is greater than the height of the valve body. It is preferred to provide a valve body with an oval elliptical or in particular rectangular cross section. This makes it possible that the valve body extends in particular parallel to the axis of rotation of the pump elements. It is thus possible to realize a large flow cross-section with a small space. This is advantageous over a plurality of poppet valves arranged side by side, since no mechanical connections of the individual poppet valves, separate bearings, etc., must be provided.
  • the invention provided in a particularly preferred embodiment according to the single valve body thus extends in the longitudinal direction parallel to the pump housing.
  • the valve body extends substantially over the entire width of the housing parallel to the axis of rotation of the pumping element.
  • valves it is possible to arrange a plurality of valves across the width of the pump housing. This has the advantage, for example, that a specific valve can be used with several pump types, with the number of valves being higher for larger pumps than for smaller pumps.
  • the invention described above is particularly advantageous in Roots pumps.
  • the maximum pressure difference between the suction side and pressure side can be limited, so that when a defined maximum pressure is exceeded, a return flow of the conveyed fluid from the outlet side to the suction side he follows.
  • the maximum pressure difference is approx. 50 mbar, for smaller Roots pumps approx. 80 mbar. From this correspondingly defined limit pressure opening of the valve takes place.
  • suction power of 250 to 1300m 3 / h can preferably be achieved in a single-stage design.
  • a Roots pump according to the invention has two Wälzkolben 12 arranged in a pump chamber 10.
  • the Wälzkolben 12 rotate about perpendicular to the plane of rotation axes 14.
  • the Wälzkolben 12 are in a housing 16 is arranged.
  • By the Wälzkolben 12 conveying the medium takes place in the direction of an arrow 18 from a suction side 20 in the direction of a pressure side 30th
  • connection channel 22 arranged laterally next to the pump chamber 10 is provided in the housing 16.
  • the connecting channel 22 preferably extends over the entire width of the pump housing 16 running perpendicular to the plane of the drawing.
  • the connecting channel thus preferably has a rectangular cross section.
  • a valve 24 is arranged in the connecting channel 22.
  • the spring-loaded valve 24 opens automatically, so that part of the fluid delivered flows back from the pressure side in the direction of an arrow 26 to the suction side 20.
  • the valve 14 designed according to the invention as a flap valve has a valve flap 28 (FIG. Fig. 2 ), which closes a rectangular passage opening 32 of the connecting channel 22.
  • the passage opening 32 preferably extends substantially over the entire width of the connection channel 22 and thus approximately the entire housing 16.
  • the valve flap 28 is pivotable about a pivot axis 34 in the direction of an arrow 36.
  • a pivot spring 34 surrounding the torsion spring 40 By means of a pivot spring 34 surrounding the torsion spring 40, a holding or closing force is applied to the valve flap 28. Due to this closing force, the valve 14 opens only from a defined pressure difference between the pressure side 30 and the suction side 20 (FIG. Fig. 1 ) of the scoop 10.
  • the pivot axis 34 is disposed on the side facing away from the pumping chamber 10 side, so that for opening the valve flap 28, a pivoting of the valve flap takes place in a housing corner. Due to the thus required for the flap valve low Installation space relatively small outer dimensions of the pump housing 16 can be realized.
  • valve flap 28 has a rectangular basic shape to a likewise rectangular passage opening 32 (FIG. Fig. 2 ) to close.
  • the valve flap 28 can be connected via pivot arms 42 with the pivot axis 34, wherein either the pivot arms are mounted on the rigid axle 34, or at a fixed connection of the pivot arms with the pivot axis 34, the pivot axis 34 is supported accordingly.
  • the two pivot arms 42 are each connected to a torsion spring which surrounds the pivot axis 34 and is also firmly connected thereto.
  • a tension spring 44 is provided instead of torsion springs. This is firmly connected to the housing 16 and a pivot arm 46.
  • the pivot arm 46 is in the in Fig. 4 illustrated embodiment on the opposite side relative to the axis of rotation 34 of the flap 28.
  • the flap 28 is connected via a connecting element 48 with the axis of rotation 34.
  • the flap is also at the in Fig. 4 illustrated embodiment is substantially rectangular, according to the in Fig. 3 illustrated embodiment formed.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Check Valves (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Reciprocating Pumps (AREA)
EP09779711.2A 2008-07-22 2009-06-10 Vakuumpumpe, insbesondere wälzkolbenpumpe Active EP2310684B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE200810034073 DE102008034073A1 (de) 2008-07-22 2008-07-22 Vakuumpumpe, insbesondere Wälzkolbenpumpe
DE102008047712 2008-09-18
PCT/EP2009/057192 WO2010009939A1 (de) 2008-07-22 2009-06-10 Vakuumpumpe, insbesondere wälzkolbenpumpe

Publications (2)

Publication Number Publication Date
EP2310684A1 EP2310684A1 (de) 2011-04-20
EP2310684B1 true EP2310684B1 (de) 2018-11-07

Family

ID=41259841

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09779711.2A Active EP2310684B1 (de) 2008-07-22 2009-06-10 Vakuumpumpe, insbesondere wälzkolbenpumpe

Country Status (6)

Country Link
US (1) US8740578B2 (zh)
EP (1) EP2310684B1 (zh)
JP (1) JP5771144B2 (zh)
KR (1) KR20110041538A (zh)
CN (2) CN103867436B (zh)
WO (1) WO2010009939A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103104499A (zh) * 2012-11-15 2013-05-15 福建雪人压缩机科技有限公司 一种带有止回阀的制冷螺杆压缩机吸气端座
US9464563B2 (en) * 2012-12-05 2016-10-11 Ford Global Technologies, Llc Turbocharger wastegate and method for operation of a turbocharger wastegate
KR101413694B1 (ko) * 2012-12-28 2014-07-01 계명대학교 산학협력단 판 스프링을 구비한 마이크로 기어펌프
KR20160072962A (ko) * 2014-12-16 2016-06-24 주식회사 우성진공 개선된 구조의 루츠펌프
GB201701000D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
CN108317079A (zh) * 2018-03-30 2018-07-24 川田机械制造(上海)有限公司 一种罗茨风机
GB2606224B (en) * 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump

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FR430357A (fr) * 1911-05-31 1911-10-14 Eugene Vaultier Dispositif applicable aux clapets de retenue de vapeur pour permettre la fermeture de l'obturateur sous deux pressions différentes
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Also Published As

Publication number Publication date
CN103867436B (zh) 2016-03-02
CN102099582B (zh) 2014-05-28
US20110129374A1 (en) 2011-06-02
US8740578B2 (en) 2014-06-03
KR20110041538A (ko) 2011-04-21
JP5771144B2 (ja) 2015-08-26
JP2011528765A (ja) 2011-11-24
CN102099582A (zh) 2011-06-15
CN103867436A (zh) 2014-06-18
WO2010009939A1 (de) 2010-01-28
EP2310684A1 (de) 2011-04-20

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