EP2310684B1 - Vacuum pump in particular roots type pump - Google Patents

Vacuum pump in particular roots type pump Download PDF

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Publication number
EP2310684B1
EP2310684B1 EP09779711.2A EP09779711A EP2310684B1 EP 2310684 B1 EP2310684 B1 EP 2310684B1 EP 09779711 A EP09779711 A EP 09779711A EP 2310684 B1 EP2310684 B1 EP 2310684B1
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EP
European Patent Office
Prior art keywords
valve
roots
spring
vacuum pump
flap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP09779711.2A
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German (de)
French (fr)
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EP2310684A1 (en
Inventor
Hannes Kamecke
Wolfgang Giebmanns
Dirk Schiller
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Leybold GmbH
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Leybold GmbH
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Priority claimed from DE200810034073 external-priority patent/DE102008034073A1/en
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP2310684A1 publication Critical patent/EP2310684A1/en
Application granted granted Critical
Publication of EP2310684B1 publication Critical patent/EP2310684B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/21—Pressure difference

Definitions

  • the invention relates to a Roots or Roots vacuum pump.
  • Vacuum pumps have pumping elements arranged in a pumping chamber, in which Roots pumps are two rolling heads.
  • Roots pumps are two rolling heads.
  • the capacity of Roots pumps is limited in particular by a maximum pressure difference between the suction side and pressure side. This is approximately 50 mbar for Roots pumps with a large-volume suction chamber and approx. 80 mbar for smaller Roots pumps.
  • a thermal overload of the Roots pump, in particular of the drive motor can take place.
  • Roots pumps have a connection channel connecting the pressure side to the suction side, through which the conveyed medium can flow back from the pressure side to the suction side.
  • a valve In the connecting channel a valve, the so-called bypass valve is arranged. Upon reaching a predetermined pressure difference opens the usually weight and / or spring-loaded valve.
  • Roots pump valve arranged in the connecting channel of a Roots pump valve is for example off DE 28 44 019 known. It deals this is a poppet valve which has a plate-shaped valve body for closing a passage opening in the connecting channel.
  • Poppet valves with or without hydraulic or mechanical damping have the disadvantage that large masses must be moved. This leads to poppet valves being sluggish.
  • large-volume Roots pumps correspondingly large poppet valves must be provided so that in a short time a sufficient amount of medium can flow back through the connecting channel.
  • This has the further disadvantage that a large space is required for the poppet valve. This leads to large pump housing dimensions and thus to increased costs.
  • Another disadvantage of spring and weight-loaded poppet valves is that due to the acceleration of gravity, the mounting position must be considered.
  • a special arrangement of the poppet valve in a 45 ° angle to the conveying direction of the Roots pump is off DE 28 44 019 known. This makes it possible, the Roots pump at least in two different Install mounting positions in which the poppet valve is always arranged at a 45 ° angle to the acceleration of gravity.
  • Out GB 11,193 is a spring-loaded by coil springs valve with a valve flap known.
  • the object of the invention is to provide a Roots vacuum pump, can be realized with the shorter process times in modern manufacturing processes.
  • the vacuum pump according to the invention which is a Roots pump, also has a valve arranged in the connecting channel between the pressure side and the suction side.
  • the valve has a spring-loaded valve body, which closes a passage opening of the connecting channel, wherein when a maximum pressure difference between the pressure side and the suction side is exceeded, a particularly automatic opening of the valve takes place.
  • the valve body is designed as a pivotable valve flap. This has the particular advantage that the mass to be moved can be significantly reduced. As a result, not only a faster opening can be realized, but in particular the noise when opening the valve can be significantly reduced. Damage to the pump housing due to the opening of the valve are thus avoided.
  • a further significant advantage of the invention is that a considerable reduction in the size of the trees can be achieved since, when a flap valve is provided, it is not necessary to provide a cylindrical housing extension in which the poppet valve is arranged. Rather, it is possible to arrange the flap valve, for example, in a corner region of the housing, so that the outer dimensions of the pump housing can be significantly reduced.
  • the valve flap does not have to be a round passage opening in the connecting channel, which is closed by a round valve plate. Rather, in a particularly preferred embodiment of the invention, the passage opening in the connecting channel is substantially rectangular and / or elongated. According to the invention, the passage opening extends essentially over the entire width of the connecting channel.
  • the connecting channel is guided along the pump chamber housing and extends substantially over the entire width of the pump housing or the pumping chamber.
  • the minimum cross section of the connecting channel must be defined in order to be able to return a sufficient amount of conveyed medium via the connecting channel to the suction side in the short term when a load occurs.
  • valve flap valve Since when opening the flap valve, a pivoting of the valve flap about an axis of rotation and unlike poppet valves no displacement of the entire valve disk, the moving masses are significantly lower. A separate hydraulic or pneumatic damping is not required, but can be provided in special cases. Furthermore, the valve body during opening is parallel to the flow direction, whereby a striking is avoided.
  • the pivot axis of the valve flap is preferably located on a side facing away from the pump chamber.
  • the pivot axis of the valve flap preferably runs parallel to the axes of rotation of the pump elements designed as rolling elements in a Roots pump. It is thus possible that the pivot axis extends over the entire width of the pump housing.
  • the pivot axis by the arrangement of the pivot axis on the side facing away from the pump chamber side of the connecting channel, it is possible to arrange the pivot axis in a corner or an edge region of the pump housing. As a result, the space required for the arrangement of the flap valve can be significantly reduced, so that the outer dimension of the pump housing are significantly smaller than in the provision of corresponding poppet valves.
  • the pivot axis does not have to be a physical shaft or axis. Rather, it can also be a virtual axis.
  • the pivot axis may also be formed by a film hinge or the like.
  • valve body is formed in two parts, wherein the two parts are preferably formed according to a swinging door and preferably each having an opposing pivot axis.
  • the one or both pivot axes are arranged in the flow channel, so that a fully opened valve flap is arranged in the connecting channel and aligned in the flow direction. This makes it possible, if necessary, to further reduce the space.
  • flap valves have a lower flow resistance, so that smaller cross-sections and thus a smaller space can be realized.
  • the valve flap is spring-loaded according to the invention.
  • the spring connected to the valve flap is therefore connected directly or indirectly to the valve flap itself or to a swivel arm connected to the valve flap. It is preferred in this case to use as spring a torsion spring, which surrounds in particular the pivot axis of the valve flap. As a result, the space required for the flap valve space can be further reduced.
  • valve flap may be connected with a swivel arm.
  • the pivot arm is then connected to the pivot axis.
  • a torsion spring may be provided.
  • springs are used whose characteristic is substantially constant over the entire swing angle of the valve flap.
  • an adjusting element by which the spring force can be adjusted. By adjusting the spring force, it is possible to set the pressure difference at which the valve opens. Furthermore, an adjustment or fine adjustment of the spring force can take place. Furthermore, it is through the Providing a setting possible to compensate for changing spring properties.
  • the adjusting element can be, for example, a rotatable adjusting knob connected to one end of the torsion spring, by means of which the torsion spring can be twisted.
  • Such an adjustment element has, for example, latching elements and is rotatable about the central axis of the torsion spring.
  • the valve body is not round but has a parallel to the pump housing extending width, which is greater than the height of the valve body. It is preferred to provide a valve body with an oval elliptical or in particular rectangular cross section. This makes it possible that the valve body extends in particular parallel to the axis of rotation of the pump elements. It is thus possible to realize a large flow cross-section with a small space. This is advantageous over a plurality of poppet valves arranged side by side, since no mechanical connections of the individual poppet valves, separate bearings, etc., must be provided.
  • the invention provided in a particularly preferred embodiment according to the single valve body thus extends in the longitudinal direction parallel to the pump housing.
  • the valve body extends substantially over the entire width of the housing parallel to the axis of rotation of the pumping element.
  • valves it is possible to arrange a plurality of valves across the width of the pump housing. This has the advantage, for example, that a specific valve can be used with several pump types, with the number of valves being higher for larger pumps than for smaller pumps.
  • the invention described above is particularly advantageous in Roots pumps.
  • the maximum pressure difference between the suction side and pressure side can be limited, so that when a defined maximum pressure is exceeded, a return flow of the conveyed fluid from the outlet side to the suction side he follows.
  • the maximum pressure difference is approx. 50 mbar, for smaller Roots pumps approx. 80 mbar. From this correspondingly defined limit pressure opening of the valve takes place.
  • suction power of 250 to 1300m 3 / h can preferably be achieved in a single-stage design.
  • a Roots pump according to the invention has two Wälzkolben 12 arranged in a pump chamber 10.
  • the Wälzkolben 12 rotate about perpendicular to the plane of rotation axes 14.
  • the Wälzkolben 12 are in a housing 16 is arranged.
  • By the Wälzkolben 12 conveying the medium takes place in the direction of an arrow 18 from a suction side 20 in the direction of a pressure side 30th
  • connection channel 22 arranged laterally next to the pump chamber 10 is provided in the housing 16.
  • the connecting channel 22 preferably extends over the entire width of the pump housing 16 running perpendicular to the plane of the drawing.
  • the connecting channel thus preferably has a rectangular cross section.
  • a valve 24 is arranged in the connecting channel 22.
  • the spring-loaded valve 24 opens automatically, so that part of the fluid delivered flows back from the pressure side in the direction of an arrow 26 to the suction side 20.
  • the valve 14 designed according to the invention as a flap valve has a valve flap 28 (FIG. Fig. 2 ), which closes a rectangular passage opening 32 of the connecting channel 22.
  • the passage opening 32 preferably extends substantially over the entire width of the connection channel 22 and thus approximately the entire housing 16.
  • the valve flap 28 is pivotable about a pivot axis 34 in the direction of an arrow 36.
  • a pivot spring 34 surrounding the torsion spring 40 By means of a pivot spring 34 surrounding the torsion spring 40, a holding or closing force is applied to the valve flap 28. Due to this closing force, the valve 14 opens only from a defined pressure difference between the pressure side 30 and the suction side 20 (FIG. Fig. 1 ) of the scoop 10.
  • the pivot axis 34 is disposed on the side facing away from the pumping chamber 10 side, so that for opening the valve flap 28, a pivoting of the valve flap takes place in a housing corner. Due to the thus required for the flap valve low Installation space relatively small outer dimensions of the pump housing 16 can be realized.
  • valve flap 28 has a rectangular basic shape to a likewise rectangular passage opening 32 (FIG. Fig. 2 ) to close.
  • the valve flap 28 can be connected via pivot arms 42 with the pivot axis 34, wherein either the pivot arms are mounted on the rigid axle 34, or at a fixed connection of the pivot arms with the pivot axis 34, the pivot axis 34 is supported accordingly.
  • the two pivot arms 42 are each connected to a torsion spring which surrounds the pivot axis 34 and is also firmly connected thereto.
  • a tension spring 44 is provided instead of torsion springs. This is firmly connected to the housing 16 and a pivot arm 46.
  • the pivot arm 46 is in the in Fig. 4 illustrated embodiment on the opposite side relative to the axis of rotation 34 of the flap 28.
  • the flap 28 is connected via a connecting element 48 with the axis of rotation 34.
  • the flap is also at the in Fig. 4 illustrated embodiment is substantially rectangular, according to the in Fig. 3 illustrated embodiment formed.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Check Valves (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Details Of Reciprocating Pumps (AREA)
  • Reciprocating Pumps (AREA)

Description

Die Erfindung betrifft eine Wälzkolben- oder Rootsvakuumpumpe.The invention relates to a Roots or Roots vacuum pump.

Vakuumpumpen weisen in einem Schöpfraum angeordnete Pumpelemente auf, bei denen es sich bei Wälzkolbenpumpen um zwei Wälzkoben handelt. Durch die Rotation der Wälzkolben erfolgt ein Fördern des zu pumpenden Mediums von einer Saugseite eines Schöpfraums zu einer Druckseite. Die Förderleistung von Wälzkolbenpumpen ist insbesondere durch eine maximale Druckdifferenz zwischen Saugseite und Druckseite begrenzt. Diese liegt bei Wälzkolbenpumpen mit großvolumigem Schöpfraum bei ca. 50 mbar und bei kleineren Wälzkolbenpumpen bei ca. 80 mbar. Bei Überschreiten der maximalen Druckdifferenz kann eine thermische Überlastung der Wälzkolbenpumpe, insbesondere des Antriebsmotors erfolgen. Um derartige Überlastungen zu vermeiden, weisen einige Wälzkolbenpumpen einen die Druckseite mit der Saugseite verbindenden Verbindungskanal auf, durch den das geförderte Medium von der Druckseite zur Saugseite zurückströmen kann. Im Verbindungskanal ist ein Ventil, das sogenannte Umwegleitungsventil angeordnet. Bei Erreichen einer vorgegebenen Druckdifferenz öffnet das üblicherweise gewichts- und/oder federbelastete Ventil.Vacuum pumps have pumping elements arranged in a pumping chamber, in which Roots pumps are two rolling heads. By the rotation of the Wälzkolben carried a pumping of the medium from a suction side of a pumping chamber to a pressure side. The capacity of Roots pumps is limited in particular by a maximum pressure difference between the suction side and pressure side. This is approximately 50 mbar for Roots pumps with a large-volume suction chamber and approx. 80 mbar for smaller Roots pumps. When the maximum pressure difference is exceeded, a thermal overload of the Roots pump, in particular of the drive motor can take place. In order to avoid such overloads, some Roots pumps have a connection channel connecting the pressure side to the suction side, through which the conveyed medium can flow back from the pressure side to the suction side. In the connecting channel a valve, the so-called bypass valve is arranged. Upon reaching a predetermined pressure difference opens the usually weight and / or spring-loaded valve.

Ein derartiges, in dem Verbindungskanal einer Wälzkolbenpumpe angeordnetes Ventil ist beispielsweise aus DE 28 44 019 bekannt. Es handelt sich hierbei um ein Tellerventil, das zum Verschließen einer Durchlassöffnung in dem Verbindungskanal einen tellerförmigen Ventilkörper aufweist.Such, arranged in the connecting channel of a Roots pump valve is for example off DE 28 44 019 known. It deals this is a poppet valve which has a plate-shaped valve body for closing a passage opening in the connecting channel.

In modernen Fertigungsverfahren, wie beispielsweise VakuumBeschichtungsverfahren müssen sehr kurze Prozesszeiten realisiert werden. Beispielsweise müssen Taktzeiten von unter einer Minute realisiert werden. Dies hat zur Folge, dass die eingesetzten Vakuumpumpen, insbesondere Wälzkolbenpumpen innerhalb einiger Sekunden den gesamten Betriebsbereich der Pumpe durchfahren müssen. Dies führt dazu, dass das Umwegleitungsventil der Wälzkolbenpumpe sehr schnell bzw. schlagartig geöffnet wird. Aufgrund des Anschlagens des Ventiltellers oder von mit dem Ventil verbundenen Bauteilen treten erhöhte Betriebsgeräusche auf. Ferner können hierdurch Beschädigungen am Pumpengehäuse auftreten. Zur Vermeidung von Beschädigungen und der Verringerung der Betriebsgeräusche wurden Spezialventile entwickelt, bei denen der Ventilteller nicht nur federbelastet ist, sondern zusätzlich einen hydraulischen Dämpfer aufweist. Hierdurch wird die schnelle, bzw. schlagartige Bewegung des Ventiltellers gedämpft.In modern manufacturing processes, such as vacuum coating process very short process times must be realized. For example, cycle times of less than a minute must be realized. As a result, the vacuum pumps used, in particular Roots pumps, have to pass through the entire operating range of the pump within a few seconds. This results in that the bypass valve of the Roots pump is opened very quickly or suddenly. Due to the impact of the valve disk or connected to the valve components occur increased operating noise. Furthermore, this can cause damage to the pump housing. To avoid damage and to reduce operating noise, special valves have been developed in which the valve disk is not only spring-loaded, but also has a hydraulic damper. As a result, the rapid, or sudden movement of the valve disk is damped.

Tellerventile mit oder ohne hydraulischer oder mechanischer Dämpfung weisen den Nachteil auf, dass große Massen bewegt werden müssen. Dies führt dazu, dass Tellerventile träge sind. Insbesondere bei großvolumigen Wälzkolbenpumpen müssen entsprechend große Tellerventile vorgesehen sein, so dass in kurzer Zeit eine ausreichende Menge an Medium durch den Verbindungskanal zurückströmen kann. Dies hat ferner den Nachteil, dass für das Tellerventil ein großer Bauraum benötigt wird. Dies führt zu großen Pumpengehäuseabmessungen und somit zu erhöhten Kosten. Ein weiterer Nachteil von feder- und gewichtsbelasteten Tellerventilen besteht darin, dass aufgrund der Erdbeschleunigung die Einbaulage berücksichtigt werden muss. Eine besondere Anordnung des Tellerventils in einem 45° Winkel zur Förderrichtung der Wälzkolbenpumpe ist aus DE 28 44 019 bekannt. Hierdurch ist es möglich, die Wälzkolbenpumpe zumindest in zwei unterschiedlichen Einbaulagen einzubauen, in denen das Tellerventil stets in einem 45° Winkel zur Erdbeschleunigung angeordnet ist.Poppet valves with or without hydraulic or mechanical damping have the disadvantage that large masses must be moved. This leads to poppet valves being sluggish. In particular large-volume Roots pumps correspondingly large poppet valves must be provided so that in a short time a sufficient amount of medium can flow back through the connecting channel. This has the further disadvantage that a large space is required for the poppet valve. This leads to large pump housing dimensions and thus to increased costs. Another disadvantage of spring and weight-loaded poppet valves is that due to the acceleration of gravity, the mounting position must be considered. A special arrangement of the poppet valve in a 45 ° angle to the conveying direction of the Roots pump is off DE 28 44 019 known. This makes it possible, the Roots pump at least in two different Install mounting positions in which the poppet valve is always arranged at a 45 ° angle to the acceleration of gravity.

Aus GB 11,193 ist ein durch Spiralfedern federbelastetes Ventil mit einer Ventilklappe bekannt.Out GB 11,193 is a spring-loaded by coil springs valve with a valve flap known.

Aufgabe der Erfindung ist es eine Wälzkolbenvakuumpumpe zu schaffen, mit der kürzere Prozesszeiten in modernen Fertigungsverfahren realisiert werden können.The object of the invention is to provide a Roots vacuum pump, can be realized with the shorter process times in modern manufacturing processes.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.The object is achieved according to the invention by the features of claim 1.

Die erfindungsgemäße Vakuumpumpe, bei der es sich um eine Wälzkolbenpumpe handelt, weist ebenfalls ein in dem Verbindungskanal zwischen Druckseite und Saugseite angeordnetes Ventil auf. Das Ventil weist einen federbelasteten Ventilkörper auf, der eine Durchlassöffnung des Verbindungskanals verschließt, wobei bei Überschreiten einer maximalen Druckdifferenz zwischen Druckseite und Saugseite ein insbesondere automatisches Öffnen des Ventils erfolgt. Erfindungsgemäß ist der Ventilkörper als schwenkbare Ventilklappe ausgebildet. Dies hat insbesondere den Vorteil, dass die zu bewegende Masse erheblich reduziert werden kann. Hierdurch kann nicht nur ein schnelleres Öffnen realisiert werden, sondern insbesondere die Geräuschentwicklung beim Öffnen des Ventils erheblich reduziert werden. Beschädigungen des Pumpengehäuses aufgrund des Öffnen des Ventils sind somit vermieden. Durch Vorsehen eines Klappenventils anstatt eines Tellerventils ist es erfindungsgemäß möglich, kürzere Prozesszeiten zu realisieren. Ein weiterer wesentlicher Vorteil der Erfindung besteht darin, dass eine erhebliche Baumraumreduzierung erzielt werden kann, da beim Vorsehen eines Klappenventils nicht ein zylindrischer Gehäuseansatz vorgesehen sein muss, in dem das Tellerventil angeordnet ist. Vielmehr ist es möglich, das Klappenventil beispielsweise in einem Eckbereich des Gehäuses anzuordnen, so dass die Außenabmessungen des Pumpengehäuses erheblich verkleinert werden können.The vacuum pump according to the invention, which is a Roots pump, also has a valve arranged in the connecting channel between the pressure side and the suction side. The valve has a spring-loaded valve body, which closes a passage opening of the connecting channel, wherein when a maximum pressure difference between the pressure side and the suction side is exceeded, a particularly automatic opening of the valve takes place. According to the invention, the valve body is designed as a pivotable valve flap. This has the particular advantage that the mass to be moved can be significantly reduced. As a result, not only a faster opening can be realized, but in particular the noise when opening the valve can be significantly reduced. Damage to the pump housing due to the opening of the valve are thus avoided. By providing a flapper valve instead of a poppet valve, it is possible according to the invention to realize shorter process times. A further significant advantage of the invention is that a considerable reduction in the size of the trees can be achieved since, when a flap valve is provided, it is not necessary to provide a cylindrical housing extension in which the poppet valve is arranged. Rather, it is possible to arrange the flap valve, for example, in a corner region of the housing, so that the outer dimensions of the pump housing can be significantly reduced.

Des Weiteren ist es möglich, die geometrische Form der Ventilklappe frei zu wählen. Es muss sich nicht um eine runde Durchgangsöffnung in dem Verbindungskanal handeln, die von einem runden Ventilteller verschlossen wird. Vielmehr ist in einer besonders bevorzugten Ausführungsform der Erfindung die Durchlassöffnung in dem Verbindungskanal im Wesentlichen rechteckig und/oder länglich ausgestaltet. Erfindungsgemäß erstreckt sich die Durchlassöffnung im Wesentlichen über die gesamte Breite des Verbindungskanals. Vorzugsweise ist hierbei der Verbindungskanal am Schöpfraumgehäuse entlang geführt und erstreckt sich im Wesentlichen über die gesamte Breite des Pumpengehäuses bzw. des Schöpfraums. In Abhängigkeit des Schöpfvolumens der Wälzkolbenpumpe muss der Mindest-Querschnitt des Verbindungskanals definiert werden, um bei Auftreten einer Belastung kurzfristig eine ausreichende Menge an geförderten Medium über den Verbindungskanal zur Saugseite zurückführen zu können. Durch das Vorsehen einer insbesondere rechteckigen Ventilklappe kann bei Überschreiten der maximalen Druckdifferenz im Wesentlichen der gesamte Querschnitt des Verbindungskanals geöffnet werden. Dies ist beim Vorsehen von Tellerventilen nicht möglich.Furthermore, it is possible to freely choose the geometric shape of the valve flap. It does not have to be a round passage opening in the connecting channel, which is closed by a round valve plate. Rather, in a particularly preferred embodiment of the invention, the passage opening in the connecting channel is substantially rectangular and / or elongated. According to the invention, the passage opening extends essentially over the entire width of the connecting channel. Preferably, in this case, the connecting channel is guided along the pump chamber housing and extends substantially over the entire width of the pump housing or the pumping chamber. Depending on the scoop volume of the Roots pump, the minimum cross section of the connecting channel must be defined in order to be able to return a sufficient amount of conveyed medium via the connecting channel to the suction side in the short term when a load occurs. By providing a particular rectangular valve flap, when the maximum pressure difference is exceeded, substantially the entire cross section of the connection channel can be opened. This is not possible when providing poppet valves.

Da beim Öffnen des Klappenventils ein Verschwenken der Ventilklappe um eine Drehachse und im Unterschied zu Tellerventilen kein Verschieben des gesamten Ventiltellers erfolgt, sind die bewegten Massen deutlich geringer. Eine gesonderte hydraulische oder pneumatische Dämpfung ist nicht erforderlich, kann aber im speziellen Einsatzfällen vorgesehen werden. Ferner stellt sich der Ventilkörper beim Öffnen parallel zur Strömungsrichtung, wodurch ein Anschlagen vermieden wird.Since when opening the flap valve, a pivoting of the valve flap about an axis of rotation and unlike poppet valves no displacement of the entire valve disk, the moving masses are significantly lower. A separate hydraulic or pneumatic damping is not required, but can be provided in special cases. Furthermore, the valve body during opening is parallel to the flow direction, whereby a striking is avoided.

Da die Masse der bewegten Teile bei einem Klappenventil gering ist und so verteilt ist, dass der Schwerpunkt der Ventilklappe gemäß einer besonders bevorzugten Ausführungsform der Erfindung im Bereich der Schwenkachse liegt, ist das Ansprechverhalten des Klappenventils unabhängig von der Einbaulage der Wälzkolbenpumpe. Dies stellt in der Anlagenkonstruktion einen erheblichen Vorteil dar, da die Wälzkolbenpumpe nicht mehr, wie aus DE 28 44 019 bekannt, nur in zwei unterschiedlichen Einbaulagen eingebaut werden kann. Vielmehr besteht ein besonderer Vorteil der Erfindung darin, dass die Position und Lage des Ventils innerhalb der Pumpe frei wählbar ist. Hierdurch kann der erforderliche Bauraum reduziert werden.Since the mass of the moving parts is low in a flapper valve and distributed so that the center of gravity of the valve flap according to a particularly preferred embodiment of the invention is in the range of the pivot axis, the response of the flap valve is independent of the Installation position of the Roots pump. This represents a significant advantage in the system design, since the Roots pump no longer, as out DE 28 44 019 known, can be installed only in two different mounting positions. Rather, a particular advantage of the invention is that the position and position of the valve within the pump is freely selectable. As a result, the required space can be reduced.

Die Schwenkachse der Ventilklappe befindet sich vorzugsweise auf einer vom Schöpfraum abgewandten Seite. Vorzugsweise verläuft die Schwenkachse der Ventilklappe parallel zu den Drehachsen der als Wälzkolben bei einer Wälzkolbenpumpe ausgebildeten Pumpelemente. Es ist somit möglich, dass sich die Schwenkachse über die gesamte Breite des Pumpengehäuses erstreckt. Insbesondere durch die Anordnung der Schwenkachse auf der vom Schöpfraum abgewandten Seite des Verbindungskanals ist es möglich, die Schwenkachse in einer Ecke bzw. einem Randbereich des Pumpengehäuses anzuordnen. Hierdurch kann der Bauraum, der für die Anordnung des Klappenventils erforderlich ist, erheblich reduziert werden, so dass die Außenabmessung des Pumpengehäuses deutlich kleiner als beim Vorsehen entsprechender Tellerventile sind.The pivot axis of the valve flap is preferably located on a side facing away from the pump chamber. The pivot axis of the valve flap preferably runs parallel to the axes of rotation of the pump elements designed as rolling elements in a Roots pump. It is thus possible that the pivot axis extends over the entire width of the pump housing. In particular, by the arrangement of the pivot axis on the side facing away from the pump chamber side of the connecting channel, it is possible to arrange the pivot axis in a corner or an edge region of the pump housing. As a result, the space required for the arrangement of the flap valve can be significantly reduced, so that the outer dimension of the pump housing are significantly smaller than in the provision of corresponding poppet valves.

Bei der Schwenkachse muss es sich nicht um eine körperliche Welle oder Achse handeln. Vielmehr kann es sich auch um ein virtuelle Achse handeln. Beispielsweise kann die Schwenkachse auch durch ein Filmgelenk oder dergleichen ausgebildet sein. Ebenso ist es möglich, die Ventilklappe zumindest im Bereich der Schwenkachse aus elastischem Material herzustellen, so dass beim Öffnen der Ventilklappe eine elastische Verformung bzw. Biegung der Klappe in diesem Bereich erfolgt.The pivot axis does not have to be a physical shaft or axis. Rather, it can also be a virtual axis. For example, the pivot axis may also be formed by a film hinge or the like. Likewise, it is possible to produce the valve flap made of elastic material at least in the region of the pivot axis, so that elastic deformation or bending of the flap takes place in this area when the valve flap is opened.

Ferner ist es möglich, dass der Ventilkörper zweiteilig ausgebildet ist, wobei die beiden Teile vorzugsweise entsprechend einer Schwingtür ausgebildet sind und vorzugsweise jeweils eine einander gegenüberliegende Schwenkachse aufweisen.Further, it is possible that the valve body is formed in two parts, wherein the two parts are preferably formed according to a swinging door and preferably each having an opposing pivot axis.

Ferner ist es möglich, dass die eine oder die beiden Schwenkachsen im Strömungskanal angeordnet sind, so dass eine vollständig geöffnete Ventilklappe im Verbindungskanal angeordnet und in Strömungsrichtung ausgerichtet ist. Hierdurch ist es ggf. möglich, den Bauraum weiter zu verringern.Further, it is possible that the one or both pivot axes are arranged in the flow channel, so that a fully opened valve flap is arranged in the connecting channel and aligned in the flow direction. This makes it possible, if necessary, to further reduce the space.

Ferner weisen Klappenventile einen geringeren Strömungswiderstand auf, so dass kleinere Querschnitte und somit ein kleinerer Bauraum realisiert werden können.Furthermore, flap valves have a lower flow resistance, so that smaller cross-sections and thus a smaller space can be realized.

Die Ventilklappe ist erfindungsgemäß federbelastet. Die mit der Ventilklappe verbundene Feder ist daher mittelbar oder unmittelbar mit der Ventilklappe selbst oder mit einem mit der Ventilklappe verbundenen Schwenkarm verbunden. Bevorzugt ist es hierbei, als Feder eine Drehfeder zu verwenden, die insbesondere die Schwenkachse der Ventilklappe umgibt. Hierdurch kann der für das Klappenventil erforderliche Bauraum weiter reduziert werden.The valve flap is spring-loaded according to the invention. The spring connected to the valve flap is therefore connected directly or indirectly to the valve flap itself or to a swivel arm connected to the valve flap. It is preferred in this case to use as spring a torsion spring, which surrounds in particular the pivot axis of the valve flap. As a result, the space required for the flap valve space can be further reduced.

Je nach konstruktiver Ausgestaltung der Pumpe und insbesondere des Pumpengehäuses kann es vorteilhaft sein, die Ventilklappe mit einem Schwenkarm zu verbinden. Der Schwenkarm ist sodann mit der Schwenkachse verbunden. Bei einer derartigen Ausführungsform kann eine Drehfeder vorgesehen sein. Es ist jedoch auch möglich und je nach Ausgestaltung des Pumpengehäuses zweckmäßig eine Zug- oder Druckfeder vorzusehen, die mit dem Schwenkarm verbunden ist.Depending on the design of the pump and in particular of the pump housing, it may be advantageous to connect the valve flap with a swivel arm. The pivot arm is then connected to the pivot axis. In such an embodiment, a torsion spring may be provided. However, it is also possible and depending on the design of the pump housing expedient to provide a tension or compression spring which is connected to the pivot arm.

Vorzugsweise werden Federn verwendet, deren Kennlinie über den gesamten Schwenkwinkel der Ventilklappe im Wesentlichen konstant ist. Ferner ist es möglich ein Einstellelement vorzusehen, durch das die Federkraft eingestellt werden kann. Durch das Einstellen der Federkraft ist es möglich, die Druckdifferenz einzustellen, bei der das Ventil öffnet. Ferner kann eine Justage bzw. Feineinstellung der Federkraft erfolgen. Des Weiteren ist es, durch das Vorsehen eines Einstellelements möglich, sich verändernde Federeigenschaften auszugleichen. Bei dem Einstellelement kann es sich beispielsweise um einen mit einem Ende der Drehfeder verbundenen drehbaren Einstellknopf handeln, durch den die Drehfeder verdrillt werden kann. Ein derartiges Einstellelement weist beispielsweise Rastelemente auf und ist um die Mittelachse der Drehfeder drehbar. Beim Verwendung von Zug- oder Druckfedern ist es möglich, die Federkraft dadurch einzustellen, dass die Lage der Halterung eines Endes der Zug- oder Druckfeder verändert werden kann.Preferably, springs are used whose characteristic is substantially constant over the entire swing angle of the valve flap. Further, it is possible to provide an adjusting element by which the spring force can be adjusted. By adjusting the spring force, it is possible to set the pressure difference at which the valve opens. Furthermore, an adjustment or fine adjustment of the spring force can take place. Furthermore, it is through the Providing a setting possible to compensate for changing spring properties. The adjusting element can be, for example, a rotatable adjusting knob connected to one end of the torsion spring, by means of which the torsion spring can be twisted. Such an adjustment element has, for example, latching elements and is rotatable about the central axis of the torsion spring. When using compression or compression springs, it is possible to adjust the spring force, that the position of the holder of one end of the tension or compression spring can be changed.

Bei einer besonders bevorzugten Weiterbildung der Erfindung ist der Ventilkörper nicht rund ausgebildet sondern weist eine sich parallel zum Pumpengehäuse erstreckende Breite auf, die größer ist als die Höhe des Ventilkörpers. Bevorzugt ist es, einen Ventilkörper mit ovalem elliptischem oder insbesondere rechteckigem Querschnitt vorzusehen. Hierdurch ist es möglich, dass sich der Ventilkörper insbesondere parallel zur Drehachse der Pumpelemente erstreckt. Es ist somit möglich, bei kleinem Bauraum einen großen Strömungsquerschnitt zu realisieren. Dies ist gegenüber mehreren nebeneinander angeordneten Tellerventilen vorteilhaft, da keine mechanischen Verbindungen der einzelnen Tellerventile, gesonderte Lagerungen etc. vorgesehen sein müssen. Der in besonders bevorzugter Ausführungsform erfindungsgemäß vorgesehene einzige Ventilkörper erstreckt sich somit in Längsrichtung parallel zum Pumpengehäuse. Vorzugsweise erstreckt sich der Ventilkörper im Wesentlichen über die gesamte Breite des Gehäuses parallel zur Drehachse des Pumpelements.In a particularly preferred embodiment of the invention, the valve body is not round but has a parallel to the pump housing extending width, which is greater than the height of the valve body. It is preferred to provide a valve body with an oval elliptical or in particular rectangular cross section. This makes it possible that the valve body extends in particular parallel to the axis of rotation of the pump elements. It is thus possible to realize a large flow cross-section with a small space. This is advantageous over a plurality of poppet valves arranged side by side, since no mechanical connections of the individual poppet valves, separate bearings, etc., must be provided. The invention provided in a particularly preferred embodiment according to the single valve body thus extends in the longitudinal direction parallel to the pump housing. Preferably, the valve body extends substantially over the entire width of the housing parallel to the axis of rotation of the pumping element.

Ferner ist es bei sämtlichen vorstehend beschriebenen Ausführungsformen möglich, über die Breite des Pumpengehäuses mehrere Ventile anzuordnen. Dies hat beispielsweise den Vorteil, dass ein bestimmtes Ventil bei mehreren Pumpentypen eingesetzt werden kann, wobei die Anzahl der Ventile bei größeren Pumpen höher ist als bei kleineren Pumpen.Further, in all the embodiments described above, it is possible to arrange a plurality of valves across the width of the pump housing. This has the advantage, for example, that a specific valve can be used with several pump types, with the number of valves being higher for larger pumps than for smaller pumps.

Die vorstehend beschriebene Erfindung ist insbesondere bei Wälzkolbenpumpen vorteilhaft. Durch das Vorsehen entsprechender Ventile kann die maximale Druckdifferenz zwischen Saugseite und Druckseite begrenzt werden, so dass bei überschreiten eines definierten Maximaldrucks ein Rückströmen des geförderten Fluids von der Auslassseite zur Saugseite erfolgt. Bei Wälzkolbenpumpen mit großvolumigem Schöpfraum liegt die maximale Druckdifferenz bei ca. 50 mbar, bei kleineren Wälzkolbenpumpen bei ca. 80 mbar. Ab diesem entsprechend definierten Grenzdruck erfolgt ein Öffnen des Ventils. Mit derartigen Wälzkolbenpumpen können vorzugsweise auch in einer einstufiger Ausgestaltung Saugleistungen von 250 bis 1300m3/h erzielt werden.The invention described above is particularly advantageous in Roots pumps. By providing corresponding valves, the maximum pressure difference between the suction side and pressure side can be limited, so that when a defined maximum pressure is exceeded, a return flow of the conveyed fluid from the outlet side to the suction side he follows. For Roots pumps with a large-volume suction chamber, the maximum pressure difference is approx. 50 mbar, for smaller Roots pumps approx. 80 mbar. From this correspondingly defined limit pressure opening of the valve takes place. With such Roots pumps suction power of 250 to 1300m 3 / h can preferably be achieved in a single-stage design.

Nachfolgend wird die Erfindung anhand bevorzugter Ausführungsformen unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail below with reference to preferred embodiments with reference to the accompanying drawings.

Es zeigen:

Fig. 1
eine schematische Schnittansicht einer Wälzkolbenpumpe,
Fig. 2
eine vergrößerte Darstellung des in dem Verbindungskanal der Wälzkolbenpumpe angeordneten Klappenventils,
Fig. 3
eine Prinzipskizze einer weiteren Ausführungsform eines Klappenventils mit Drehfeder in Seitenansicht und Draufsicht und
Fig. 4
eine Prinzipskizze einer weiteren Ausführungsform eines Klappenventils mit Zugfeder in Seitenansicht.
Show it:
Fig. 1
a schematic sectional view of a Roots pump,
Fig. 2
an enlarged view of the arranged in the connecting channel of the Roots pump flapper valve,
Fig. 3
a schematic diagram of another embodiment of a flap valve with torsion spring in side view and top view and
Fig. 4
a schematic diagram of another embodiment of a flap valve with tension spring in side view.

Eine erfindungsgemäße Wälzkolbenpumpe weist zwei in einem Schöpfraum 10 angeordnete Wälzkolben 12 auf. Die Wälzkolben 12 drehen sich um senkrecht zur Zeichenebene verlaufende Drehachsen 14. Die Wälzkolben 12 sind in einem Gehäuse 16 angeordnet. Durch die Wälzkolben 12 erfolgt ein Fördern des Mediums in Richtung eines Pfeils 18 von einer Saugseite 20 in Richtung einer Druckseite 30.A Roots pump according to the invention has two Wälzkolben 12 arranged in a pump chamber 10. The Wälzkolben 12 rotate about perpendicular to the plane of rotation axes 14. The Wälzkolben 12 are in a housing 16 is arranged. By the Wälzkolben 12 conveying the medium takes place in the direction of an arrow 18 from a suction side 20 in the direction of a pressure side 30th

Insbesondere zur Vermeidung von Überhitzungen ist in dem Gehäuse 16 ein seitlich neben dem Schöpfraum 10 angeordneter Verbindungskanal 22 vorgesehen. Der Verbindungskanal 22 erstreckt sich vorzugsweise über die gesamte senkrecht zur Zeichenebene verlaufende Breite des Pumpengehäuses 16. Der Verbindungskanal weist somit vorzugsweise einen rechteckigen Querschnitt auf.In particular, in order to avoid overheating, a connection channel 22 arranged laterally next to the pump chamber 10 is provided in the housing 16. The connecting channel 22 preferably extends over the entire width of the pump housing 16 running perpendicular to the plane of the drawing. The connecting channel thus preferably has a rectangular cross section.

In dem Verbindungskanal 22 ist ein Ventil 24 angeordnet. Bei Überschreiten einer maximalen Druckdifferenz zwischen Druckseite 30 und Saugseite 20 öffnet das federbelastete Ventil 24 automatisch, so dass ein Teil des das geförderten Fluids von der Druckseite in Richtung eines Pfeils 26 zur Saugseite 20 zurückströmt.In the connecting channel 22, a valve 24 is arranged. When a maximum pressure difference between the pressure side 30 and suction side 20 is exceeded, the spring-loaded valve 24 opens automatically, so that part of the fluid delivered flows back from the pressure side in the direction of an arrow 26 to the suction side 20.

Das erfindungsgemäß als Klappenventil ausgebildete Ventil 14 weist eine Ventilklappe 28 (Fig. 2) auf, die eine rechteckige Durchlassöffnung 32 des Verbindungskanals 22 verschließt. Die Durchlassöffnung 32 erstreckt sich vorzugsweise im Wesentlichen über die gesamte Breite des Verbindungskanals 22 und somit annähernd des gesamten Gehäuses 16. Die Ventilklappe 28 ist um eine Schwenkachse 34 in Richtung eines Pfeils 36 schwenkbar. Mittels einer die Schwenkachse 34 umgebenden Drehfeder 40 wird eine Halte- bzw. Schließkraft auf die Ventilklappe 28 aufgebracht. Aufgrund dieser Schließkraft öffnet das Ventil 14 erst ab einer definierten Druckdifferenz zwischen der Druckseite 30 und der Saugseite 20 (Fig. 1) des Schöpfraums 10.The valve 14 designed according to the invention as a flap valve has a valve flap 28 (FIG. Fig. 2 ), which closes a rectangular passage opening 32 of the connecting channel 22. The passage opening 32 preferably extends substantially over the entire width of the connection channel 22 and thus approximately the entire housing 16. The valve flap 28 is pivotable about a pivot axis 34 in the direction of an arrow 36. By means of a pivot spring 34 surrounding the torsion spring 40, a holding or closing force is applied to the valve flap 28. Due to this closing force, the valve 14 opens only from a defined pressure difference between the pressure side 30 and the suction side 20 (FIG. Fig. 1 ) of the scoop 10.

Im dargestellten Ausführungsbeispiel ist die Schwenkachse 34 auf der vom Schöpfraum 10 abgewandten Seite angeordnet, so dass zum Öffnen der Ventilklappe 28 ein Verschwenken der Ventilklappe in eine Gehäuseecke erfolgt. Aufgrund des somit für das Klappenventil erforderlichen geringen Bauraums können relativ kleine Außenabmessungen des Pumpengehäuses 16 realisiert werden.In the illustrated embodiment, the pivot axis 34 is disposed on the side facing away from the pumping chamber 10 side, so that for opening the valve flap 28, a pivoting of the valve flap takes place in a housing corner. Due to the thus required for the flap valve low Installation space relatively small outer dimensions of the pump housing 16 can be realized.

Aus der prinzipiellen Darstellung in Fig. 3 ist ersichtlich, dass die Ventilklappe 28 eine rechteckige Grundform aufweist, um eine ebenfalls rechteckige Durchlassöffnung 32 (Fig. 2) zu verschließen. Die Ventilklappe 28 kann über Schwenkarme 42 mit der Schwenkachse 34 verbunden werden, wobei entweder die Schwenkarme auf der starren Achse 34 gelagert sind, oder bei einer festen Verbindung der Schwenkarme mit der Schwenkachse 34, die Schwenkachse 34 entsprechend gelagert ist. In der in Fig. 3 dargestellten prinzipiellen Ausführungsform eines erfindungsgemäßem Klappenventils sind die beiden Schwenkarme 42 jeweils mit einer Drehfeder verbunden, die die Schwenkachse 34 umgibt und mit dieser ebenfalls fest verbunden ist.From the basic representation in Fig. 3 It can be seen that the valve flap 28 has a rectangular basic shape to a likewise rectangular passage opening 32 (FIG. Fig. 2 ) to close. The valve flap 28 can be connected via pivot arms 42 with the pivot axis 34, wherein either the pivot arms are mounted on the rigid axle 34, or at a fixed connection of the pivot arms with the pivot axis 34, the pivot axis 34 is supported accordingly. In the in Fig. 3 illustrated basic embodiment of an inventive flap valve, the two pivot arms 42 are each connected to a torsion spring which surrounds the pivot axis 34 and is also firmly connected thereto.

Bei einer weiteren Ausführungsform des Klappenventils (Fig. 4) ist anstelle von Drehfedern eine Zugfeder 44 vorgesehen. Diese ist mit dem Gehäuse 16 und einem Schwenkarm 46 fest verbunden. Der Schwenkarm 46 ist in dem in Fig. 4 dargestellten Ausführungsbeispiel auf der bezüglich der Drehachse 34 gegenüberliegenden Seite der Klappe 28 angeordnet. Die Klappe 28 ist über ein Verbindungselement 48 mit der Drehachse 34 verbunden. Die Klappe ist auch bei dem in Fig. 4 dargestellten Ausführungsbeispiel im Wesentlichen rechteckig, entsprechend dem in Fig. 3 dargestellten Ausführungsbeispiel ausgebildet.In a further embodiment of the flap valve ( Fig. 4 ), a tension spring 44 is provided instead of torsion springs. This is firmly connected to the housing 16 and a pivot arm 46. The pivot arm 46 is in the in Fig. 4 illustrated embodiment on the opposite side relative to the axis of rotation 34 of the flap 28. The flap 28 is connected via a connecting element 48 with the axis of rotation 34. The flap is also at the in Fig. 4 illustrated embodiment is substantially rectangular, according to the in Fig. 3 illustrated embodiment formed.

Claims (8)

  1. Roots-type vacuum pump, comprising
    pump elements (12) arranged in a suction chamber (10),
    a connection duct (22) connecting a pressure side (30) to a suction side (20) of the suction chamber (10), and
    a valve (24) arranged in the connection duct (22) and comprising a spring-biased valve body (28) closing a passage opening (32), said valve (24) being operative to open when a maximal pressure difference between the pressure side and the suction side is exceeded,
    characterized in that
    the valve body is designed as a pivotable valve flap (28),
    the valve body (50) has a width (b) extending parallel to the pump housing (16), said width being larger than the height (h) of the valve body (28), and
    the passage opening (32) extends substantially across the entire width of the connection duct (22).
  2. Roots-type vacuum pump according to claim 1, characterized in that a pivoting axis (34) of the valve flap (28) is arranged on a side of the connection duct (22) facing away from the suction chamber (10).
  3. Roots-type vacuum pump according to claim 1 or 2, characterized in that a pivoting axis (34) of the valve flap (28) extends parallel to the rotational axes (14) of the pump elements designed as rolling bodies (12).
  4. Roots-type vacuum pump according to any one of claims 1 to 3, characterized in that the valve flap (28) or a pivoting arm (42, 46) connected to the valve flap is connected to a spring (40, 44).
  5. Roots-type vacuum pump according to claim 4, characterized in that the spring is designed as a torsion spring (40) which preferably surrounds the pivoting axis (34) of the valve flap (28).
  6. Roots-type vacuum pump according to claim 4, characterized in that the spring is designed as a tension or pressure spring (44) which is connected to the pivoting arm (46).
  7. Roots-type vacuum pump according to any one of claims 1 to 6, characterized by a setting element for setting the spring force.
  8. Roots-type vacuum pump according to any one of claims 1 to 7, characterized in that the center of gravity of the valve flap (28) substantially coincides with the pivoting axis (34).
EP09779711.2A 2008-07-22 2009-06-10 Vacuum pump in particular roots type pump Active EP2310684B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE200810034073 DE102008034073A1 (en) 2008-07-22 2008-07-22 Vacuum pump i.e. roots pump, has valve opened during exceeding of maximum pressure difference between pressure side and suction side of suction chamber, and valve unit designed as pivotable valve flap
DE102008047712 2008-09-18
PCT/EP2009/057192 WO2010009939A1 (en) 2008-07-22 2009-06-10 Vacuum pump in particular roots type pump

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EP2310684A1 EP2310684A1 (en) 2011-04-20
EP2310684B1 true EP2310684B1 (en) 2018-11-07

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US (1) US8740578B2 (en)
EP (1) EP2310684B1 (en)
JP (1) JP5771144B2 (en)
KR (1) KR20110041538A (en)
CN (2) CN103867436B (en)
WO (1) WO2010009939A1 (en)

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CN103867436B (en) 2016-03-02
WO2010009939A1 (en) 2010-01-28
KR20110041538A (en) 2011-04-21
JP5771144B2 (en) 2015-08-26
CN102099582A (en) 2011-06-15
CN103867436A (en) 2014-06-18
US20110129374A1 (en) 2011-06-02
EP2310684A1 (en) 2011-04-20
US8740578B2 (en) 2014-06-03
CN102099582B (en) 2014-05-28
JP2011528765A (en) 2011-11-24

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