EP2295813A3 - Turbomolecular pump rotor - Google Patents

Turbomolecular pump rotor Download PDF

Info

Publication number
EP2295813A3
EP2295813A3 EP10007376.6A EP10007376A EP2295813A3 EP 2295813 A3 EP2295813 A3 EP 2295813A3 EP 10007376 A EP10007376 A EP 10007376A EP 2295813 A3 EP2295813 A3 EP 2295813A3
Authority
EP
European Patent Office
Prior art keywords
turbomolecular pump
pump rotor
pumping
pumping structure
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10007376.6A
Other languages
German (de)
French (fr)
Other versions
EP2295813A2 (en
EP2295813B1 (en
Inventor
Helmut Bernhardt
Bernhard Tatzber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2295813A2 publication Critical patent/EP2295813A2/en
Publication of EP2295813A3 publication Critical patent/EP2295813A3/en
Application granted granted Critical
Publication of EP2295813B1 publication Critical patent/EP2295813B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Abstract

Die Erfindung betrifft einen Turbomolekularpumpenrotor mit in einer ersten (119; 219; 319; 419; 519) und zweiten Pumpstruktur (123; 223; 323; 423; 523), wobei jede Pumpstruktur geeignet und vorgesehen ist, mit einer statorseitigen Pumpstruktur (120, 124; 220, 224; 320, 324; 420, 424; 520, 523) eine Pumpstufe zu bilden. Um das Burstverhalten der Turbomolekularpumpe zu verbessern, wird vorgeschlagen, dass ein erstes Rotorteil (101; 201; 301; 401; 501) die erste Pumpstruktur und die zweite Pumpstruktur (123; 223; 323; 423; 523) umfasst und der Turbomekularpumpenrotor eine dritte Pumpstruktur (111, 115; 211, 215; 311, 315; 411, 415; 511, 515, 519) aufweist.

Figure imgaf001
The invention relates to a turbomolecular pump rotor having in a first (119; 219; 319; 419; 519) and second pumping structure (123; 223; 323; 423; 523), each pumping structure being suitable and provided with a stator-side pumping structure (120; 124, 220, 224, 320, 324, 420, 424, 520, 523) to form a pumping stage. In order to improve the burst behavior of the turbomolecular pump, it is proposed that a first rotor part (101, 201, 301, 401, 501) comprise the first pumping structure and the second pumping structure (123, 223, 323, 423, 523) and the turbomotive pump rotor has a third one Pump structure (111, 115, 211, 215, 311, 315, 411, 415, 511, 515, 519).
Figure imgaf001
EP10007376.6A 2009-08-01 2010-07-16 Turbomolecular pump rotor Active EP2295813B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009035812A DE102009035812A1 (en) 2009-08-01 2009-08-01 Turbo molecular pump rotor

Publications (3)

Publication Number Publication Date
EP2295813A2 EP2295813A2 (en) 2011-03-16
EP2295813A3 true EP2295813A3 (en) 2015-08-19
EP2295813B1 EP2295813B1 (en) 2019-09-18

Family

ID=43036975

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10007376.6A Active EP2295813B1 (en) 2009-08-01 2010-07-16 Turbomolecular pump rotor

Country Status (3)

Country Link
EP (1) EP2295813B1 (en)
JP (1) JP2011033027A (en)
DE (1) DE102009035812A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014100622A1 (en) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1950328A1 (en) * 1969-09-30 1971-04-01 Siemens Ag Device, in particular corpuscular beam device, with a pump system
EP1128069A2 (en) * 2000-02-24 2001-08-29 Pfeiffer Vacuum GmbH Drag vacuum pump
JP2002081397A (en) * 2000-09-06 2002-03-22 Ebara Corp Vacuum pump
DE202005019644U1 (en) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbo molecular pump, with a main inflow and at least one intermediate inflow, has a floating rotor supported by active magnet radial and radial-axial bearings
DE602004008089T2 (en) * 2003-09-30 2008-04-17 Edwards Ltd., Crawley VACUUM PUMP
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
EP2088325A2 (en) * 2008-02-05 2009-08-12 Ebara Corporation Turbo vacuum pump
EP2775149A1 (en) * 2008-11-07 2014-09-10 Oerlikon Leybold Vacuum GmbH Vacuum pump rotor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239328C2 (en) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetically mounted turbomolecular pump with vibration damping
JPH0259294U (en) * 1988-10-25 1990-04-27
JP3784250B2 (en) * 2000-11-06 2006-06-07 株式会社荏原製作所 Vacuum pump
JP2002168249A (en) * 2000-11-29 2002-06-14 Shimadzu Corp Rotating machine
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
EP1517042A1 (en) * 2003-09-17 2005-03-23 Mecos Traxler AG Magnetic bearing device and vacuum pump
DE502004003752D1 (en) 2004-01-29 2007-06-21 Pfeiffer Vacuum Gmbh Gas friction pump

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1950328A1 (en) * 1969-09-30 1971-04-01 Siemens Ag Device, in particular corpuscular beam device, with a pump system
EP1128069A2 (en) * 2000-02-24 2001-08-29 Pfeiffer Vacuum GmbH Drag vacuum pump
JP2002081397A (en) * 2000-09-06 2002-03-22 Ebara Corp Vacuum pump
DE602004008089T2 (en) * 2003-09-30 2008-04-17 Edwards Ltd., Crawley VACUUM PUMP
DE202005019644U1 (en) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbo molecular pump, with a main inflow and at least one intermediate inflow, has a floating rotor supported by active magnet radial and radial-axial bearings
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
EP2088325A2 (en) * 2008-02-05 2009-08-12 Ebara Corporation Turbo vacuum pump
EP2775149A1 (en) * 2008-11-07 2014-09-10 Oerlikon Leybold Vacuum GmbH Vacuum pump rotor

Also Published As

Publication number Publication date
DE102009035812A1 (en) 2011-02-03
EP2295813A2 (en) 2011-03-16
EP2295813B1 (en) 2019-09-18
JP2011033027A (en) 2011-02-17

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