EP2283170B1 - Pd and pd-ni electrolyte baths - Google Patents
Pd and pd-ni electrolyte baths Download PDFInfo
- Publication number
- EP2283170B1 EP2283170B1 EP08758401A EP08758401A EP2283170B1 EP 2283170 B1 EP2283170 B1 EP 2283170B1 EP 08758401 A EP08758401 A EP 08758401A EP 08758401 A EP08758401 A EP 08758401A EP 2283170 B1 EP2283170 B1 EP 2283170B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrolyte
- palladium
- deposition
- electrolyte according
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000003792 electrolyte Substances 0.000 title claims abstract description 84
- 229910052763 palladium Inorganic materials 0.000 title claims abstract description 39
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical group [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 84
- 238000000034 method Methods 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 229910001252 Pd alloy Inorganic materials 0.000 claims abstract description 11
- 238000004070 electrodeposition Methods 0.000 claims abstract description 8
- 150000002940 palladium Chemical class 0.000 claims abstract description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 23
- 150000003839 salts Chemical class 0.000 claims description 23
- 230000008021 deposition Effects 0.000 claims description 22
- -1 palladium cation Chemical class 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 15
- 229910052759 nickel Inorganic materials 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 claims description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 10
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 8
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 7
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 7
- 239000002253 acid Chemical group 0.000 claims description 7
- 239000003446 ligand Substances 0.000 claims description 7
- 229910021645 metal ion Inorganic materials 0.000 claims description 7
- 150000001412 amines Chemical class 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims description 6
- RJPRZHQPROLZRW-UHFFFAOYSA-N 2-hydroxy-3-pyridin-1-ium-1-ylpropane-1-sulfonate Chemical compound [O-]S(=O)(=O)CC(O)C[N+]1=CC=CC=C1 RJPRZHQPROLZRW-UHFFFAOYSA-N 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- DNHDSWZXBHTLDP-UHFFFAOYSA-N 3-(2-ethenylpyridin-1-ium-1-yl)propane-1-sulfonate Chemical compound [O-]S(=O)(=O)CCC[N+]1=CC=CC=C1C=C DNHDSWZXBHTLDP-UHFFFAOYSA-N 0.000 claims description 4
- REEBJQTUIJTGAL-UHFFFAOYSA-N 3-pyridin-1-ium-1-ylpropane-1-sulfonate Chemical compound [O-]S(=O)(=O)CCC[N+]1=CC=CC=C1 REEBJQTUIJTGAL-UHFFFAOYSA-N 0.000 claims description 4
- 125000001453 quaternary ammonium group Chemical group 0.000 claims description 4
- 229910002651 NO3 Inorganic materials 0.000 claims description 3
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 3
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 150000001449 anionic compounds Chemical class 0.000 claims description 2
- 150000004985 diamines Chemical class 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 229910001412 inorganic anion Inorganic materials 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 239000011135 tin Substances 0.000 claims description 2
- AGGKEGLBGGJEBZ-UHFFFAOYSA-N tetramethylenedisulfotetramine Chemical class C1N(S2(=O)=O)CN3S(=O)(=O)N1CN2C3 AGGKEGLBGGJEBZ-UHFFFAOYSA-N 0.000 claims 1
- 238000009713 electroplating Methods 0.000 abstract 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 34
- 229940012017 ethylenediamine Drugs 0.000 description 27
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 20
- KWIUHFFTVRNATP-UHFFFAOYSA-N glycine betaine Chemical compound C[N+](C)(C)CC([O-])=O KWIUHFFTVRNATP-UHFFFAOYSA-N 0.000 description 16
- 238000000576 coating method Methods 0.000 description 15
- 229910021529 ammonia Inorganic materials 0.000 description 9
- 229960003237 betaine Drugs 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 238000005868 electrolysis reaction Methods 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000008139 complexing agent Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 239000000080 wetting agent Substances 0.000 description 5
- 229910019142 PO4 Inorganic materials 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- DLDJFQGPPSQZKI-UHFFFAOYSA-N but-2-yne-1,4-diol Chemical compound OCC#CCO DLDJFQGPPSQZKI-UHFFFAOYSA-N 0.000 description 4
- VHRGRCVQAFMJIZ-UHFFFAOYSA-N cadaverine Chemical compound NCCCCCN VHRGRCVQAFMJIZ-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 4
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 4
- 235000021317 phosphate Nutrition 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- KIDHWZJUCRJVML-UHFFFAOYSA-N putrescine Chemical compound NCCCCN KIDHWZJUCRJVML-UHFFFAOYSA-N 0.000 description 4
- BDHFUVZGWQCTTF-UHFFFAOYSA-N sulfonic acid Chemical compound OS(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-N 0.000 description 4
- XFNJVJPLKCPIBV-UHFFFAOYSA-N trimethylenediamine Chemical compound NCCCN XFNJVJPLKCPIBV-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 150000001450 anions Chemical class 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- QYYPTZGPXKUKRM-UHFFFAOYSA-L azane;hydrogen carbonate;palladium(2+) Chemical compound N.N.N.N.[Pd+2].OC([O-])=O.OC([O-])=O QYYPTZGPXKUKRM-UHFFFAOYSA-L 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 229910021641 deionized water Inorganic materials 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 3
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 3
- MUJIDPITZJWBSW-UHFFFAOYSA-N palladium(2+) Chemical compound [Pd+2] MUJIDPITZJWBSW-UHFFFAOYSA-N 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- FFRBMBIXVSCUFS-UHFFFAOYSA-N 2,4-dinitro-1-naphthol Chemical compound C1=CC=C2C(O)=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 FFRBMBIXVSCUFS-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical class OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical class C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000004312 hexamethylene tetramine Substances 0.000 description 2
- 235000010299 hexamethylene tetramine Nutrition 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 2
- 239000010452 phosphate Substances 0.000 description 2
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- AOHJOMMDDJHIJH-UHFFFAOYSA-N propylenediamine Chemical compound CC(N)CN AOHJOMMDDJHIJH-UHFFFAOYSA-N 0.000 description 2
- 150000003856 quaternary ammonium compounds Chemical class 0.000 description 2
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical compound O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- PQHYOGIRXOKOEJ-UHFFFAOYSA-N 2-(1,2-dicarboxyethylamino)butanedioic acid Chemical compound OC(=O)CC(C(O)=O)NC(C(O)=O)CC(O)=O PQHYOGIRXOKOEJ-UHFFFAOYSA-N 0.000 description 1
- SHHKMWMIKILKQW-UHFFFAOYSA-N 2-formylbenzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1C=O SHHKMWMIKILKQW-UHFFFAOYSA-N 0.000 description 1
- RSEBUVRVKCANEP-UHFFFAOYSA-N 2-pyrroline Chemical compound C1CC=CN1 RSEBUVRVKCANEP-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- LZZYPRNAOMGNLH-UHFFFAOYSA-M Cetrimonium bromide Chemical compound [Br-].CCCCCCCCCCCCCCCC[N+](C)(C)C LZZYPRNAOMGNLH-UHFFFAOYSA-M 0.000 description 1
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- 108091034117 Oligonucleotide Proteins 0.000 description 1
- 229910002669 PdNi Inorganic materials 0.000 description 1
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- 239000002202 Polyethylene glycol Substances 0.000 description 1
- KYQCOXFCLRTKLS-UHFFFAOYSA-N Pyrazine Chemical compound C1=CN=CC=N1 KYQCOXFCLRTKLS-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- WINXNKPZLFISPD-UHFFFAOYSA-M Saccharin sodium Chemical compound [Na+].C1=CC=C2C(=O)[N-]S(=O)(=O)C2=C1 WINXNKPZLFISPD-UHFFFAOYSA-M 0.000 description 1
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- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 1
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- CZPWVGJYEJSRLH-UHFFFAOYSA-O hydron;pyrimidine Chemical compound C1=CN=C[NH+]=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-O 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- MTNDZQHUAFNZQY-UHFFFAOYSA-N imidazoline Chemical compound C1CN=CN1 MTNDZQHUAFNZQY-UHFFFAOYSA-N 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- LPAGFVYQRIESJQ-UHFFFAOYSA-N indoline Chemical compound C1=CC=C2NCCC2=C1 LPAGFVYQRIESJQ-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- JZJXKEWVUBVOEH-UHFFFAOYSA-N n,n-diethylprop-2-yn-1-amine Chemical compound CCN(CC)CC#C JZJXKEWVUBVOEH-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 150000002941 palladium compounds Chemical class 0.000 description 1
- NXJCBFBQEVOTOW-UHFFFAOYSA-L palladium(2+);dihydroxide Chemical class O[Pd]O NXJCBFBQEVOTOW-UHFFFAOYSA-L 0.000 description 1
- KDLHZDBZIXYQEI-VENIDDJXSA-N palladium-100 Chemical compound [100Pd] KDLHZDBZIXYQEI-VENIDDJXSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000008363 phosphate buffer Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- UIIIBRHUICCMAI-UHFFFAOYSA-N prop-2-ene-1-sulfonic acid Chemical compound OS(=O)(=O)CC=C UIIIBRHUICCMAI-UHFFFAOYSA-N 0.000 description 1
- UOCCVDMCNJYVIW-UHFFFAOYSA-N prop-2-yne-1-sulfonic acid Chemical compound OS(=O)(=O)CC#C UOCCVDMCNJYVIW-UHFFFAOYSA-N 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- JUJWROOIHBZHMG-UHFFFAOYSA-O pyridinium Chemical compound C1=CC=[NH+]C=C1 JUJWROOIHBZHMG-UHFFFAOYSA-O 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 210000002345 respiratory system Anatomy 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- 239000000901 saccharin and its Na,K and Ca salt Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000035943 smell Effects 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229960002317 succinimide Drugs 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-M sulfamate Chemical compound NS([O-])(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-M 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical class NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 229910021653 sulphate ion Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- NLVXSWCKKBEXTG-UHFFFAOYSA-N vinylsulfonic acid Chemical compound OS(=O)(=O)C=C NLVXSWCKKBEXTG-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/50—Electroplating: Baths therefor from solutions of platinum group metals
- C25D3/52—Electroplating: Baths therefor from solutions of platinum group metals characterised by the organic bath constituents used
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
- C25D3/567—Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of platinum group metals
Definitions
- the present invention relates to an electrolyte for the electrodeposition of palladium or palladium alloys on metallic or conductive substrates.
- this is a Pd electrolyte containing optionally further metals and an organic oligoamine as a complexing agent, with the alloy coatings with e.g. 80% Pd for technical and decorative applications can be deposited.
- the invention is directed to a corresponding galvanotechnisches method using this electrolyte and special, advantageously usable for this process palladium salts.
- the electrodeposition of palladium or palladium alloys on metallic substrates has a variety of decorative and technical applications.
- Galvanically deposited pure palladium and palladium-nickel layers, possibly with gold flash each, are recognized materials eg for low-current contacts or plug-in contacts (eg on circuit boards) and can be considered as a substitute for hard gold [ Galvanotechnik 5 (2002), 1210ff, Simon u. Yasumura: "Galvanic palladium coatings for technical applications in electronics "Palladium deposits with very small layer thickness on so-called lead frames in semiconductor production can also replace the silver used in the bond area [ Galvanotechnik 6 (2002), 1473ff, Simon u. Yasumura: "Galvanic palladium coatings for technical applications in electronics "].
- pyridines mentioned by name are 1- (3-sulfopropylpyridinium betaine and 1- (2-hydroxy-3-sulfopropylpyridinium betaine). The latter two substances have, according to the authors, a negative effect on the gloss of the resulting coatings.
- a method according to the US6743346 also uses ethylenediamine as a complexing agent and brings the palladium in the form of the solid compound of palladium sulfate and ethylenediamine.
- the salt contains 31 to 41% palladium (mole ratios [SO 4 ]: [Pd] between 0.9 and 1.15 and [ethylenediamine]: [Pd] between 0.8 and 1.2). It is not soluble in water, but dissolves in the electrolyte with excess ethylenediamine ( Plating & Surface Finishing, (2007) 4, pp. 26-35, St.
- Palladium hydroxide complexes are disclosed for their application in electrolytic coating baths.
- these compounds may comprise oligoamines.
- brightener systems based on internal salts can be used.
- the US 5178745 refers to acid palladium electrolytes, which has as a complexing agent a compound selected from the group of organic diamines. It is required that the electrolyte should contain an adequate amount of chloride ions.
- An electrolytic coating solution which contains palladium in the form of its soluble complexes with, inter alia, organic polyamines.
- the bath may have internal salts, but usually works at an acidic pH.
- the US 20030047460 refers to new complex salts of palladium sulfate and ethylenediamine.
- the three components should be present in a certain ratio to each other in the bathroom. This electrolytic bath also works at an acidic pH.
- Object of the present invention was in the context of the cited prior art, the indication of a further electrolyte and working with this electrolyte process, which help overcome the disadvantages mentioned.
- the specified electrolyte composition or the corresponding method should help to produce glossy surfaces even at high current densities and fast electrolysis processes, which would be particularly advantageous from an economic and ecological point of view.
- aqueous electrolyte for the electrodeposition of palladium or a palladium alloy on a metallic or conductive substrate, which to be deposited, complexed with organic oligoamines metal ions in the form of their salts with oxide hydroxide, hydroxide, bicarbonate and / or carbonate as Having counterions and a brightener based on an inner salt of a quaternary ammonium and a sulfonic acid group, one arrives in a surprisingly simple manner and successfully to solve the problem.
- the electrolyte according to the invention or by using the method according to the invention it is now possible to produce the desired shiny surfaces with qualitatively excellent results both at low and at high current densities.
- the electrolyte composition according to the invention is in no way suggested by the prior art.
- the electrolyte according to the invention makes it possible to deposit the palladium alone or in the form of an alloy associated with other metals.
- Other metals that can be used in the art for this purpose in question. These may be e.g. Nickel, cobalt, iron, indium, gold, silver or tin or mixtures thereof.
- the metal ions to be deposited are selected from the group consisting of nickel, cobalt, iron and mixtures thereof.
- the electrolyte contains these metals in the form of their soluble salts.
- Suitable salts are preferably those selected from the group of phosphates, carbonates, bicarbonates, hydroxides, oxides, sulfates, sulfamates, alkanesulfonates, pyrophosphates, phosphonates, nitrates, carboxylic acid salts and mixtures thereof.
- the person skilled in the art selects the concentrations of the metals to be used in the electrolyte on the basis of his general technical knowledge. It has been found that advantageous results can be achieved if palladium is used in concentrations of 1-100 g / L, preferably 2-70 g / L, and more preferably 4-50 g / L and most preferably 5-25 g / L is present based on the electrolyte.
- the further metal ions to be deposited can be found in concentrations of ⁇ 50 g / L based on the electrolyte.
- concentration of these ions in the electrolyte is preferably ⁇ 40 g / L, more preferably ⁇ 30 g / L, based on the electrolyte.
- a uniform deposition of the metal ions under the conditions according to the invention is advantageous, inter alia, if they are complexed.
- Suitable oligonucleotides for these complexes have proven to be organic oligoamines.
- Advantageous is the use of polydentate, in particular ligands based on di-, tri- or tetraamines. Particularly preferred are those having 2 to 11 carbon atoms.
- ligands selected from the group consisting of ethylenediamine, trimethylenediamine, tetramethylenediamine, pentamethylenediamine, hexamethylenediamine, 1,2-propylenediamine, trimethylenetetramine, hexamethylenetetramine.
- EDA ethylene diamine
- oligoamines used in the estimation of the amount. In the estimation of the amount, he will orientate himself by the fact that a sufficient amount must be present in order to obtain as even as possible a deposition of the palladium or of the palladium alloy. On the other hand, at least economic considerations limit the use of large quantities of oligoamines.
- An amount of 0.1-5 mol / L of oligoamines in the electrolyte is advantageous. More preferably, the concentration is in the range between 0.3-3 mol / L. Most preferably, the concentration of oligoamines at 0.5 - 2 mol / L electrolyte.
- the pH of the electrolyte according to the invention can be adjusted according to the skilled person for the particular application in the acidic to neutral range.
- a further preferred range is from pH 3.5 to pH 6.5, more preferably from pH 4 to pH 6, and most preferably around pH 5 to pH 5 ; 5.
- the electrolyte according to the invention has brighteners based on an internal salt of a quaternary ammonium and an acid group.
- a quaternary ammonium compound is preferably one in which the positively charged nitrogen atom is part of an aromatic ring system.
- molecular components those skilled in the art are especially those which concern a or polynuclear aromatic systems, such as pyridinium, pyrimidinium, pyrazinium, pyrrolinium, imidazolinium, thiazolinium, indolinium, carbazolinium derivatives or such substituted systems in consideration. Very particular preference is given to pyridinium- or alkyl- or alkenyl-substituted pyridinium derivatives used. Most preferred is the selection of a brightener having as a molecular constituent a quaternary ammonium compound based on a pyridinium derivative.
- the brightener contains an acid group, so that in the present case the brightener is an internal salt or a betaine.
- the term "acid group” refers to a group which, under the given conditions, is present predominantly in the deprotonated form in the electrolyte.
- the acid group may be derived from those selected from the group consisting of phosphoric acid, phosphonic acid, sulfuric acid, sulfonic acid, carboxylic acid. Particularly preferred is the sulfonic acid as part of the brightener.
- the acid group and the quaternary ammonium moiety of the brightener may be linked by (C 1 -C 8 ) -alkylene, (C 1 -C 8 ) -alkenylene, (C 6 -C 18 ) -arylene, which may optionally be substituted be.
- (C 1 -C 8 ) -alkylene (C 1 -C 8 ) -alkenylene, (C 6 -C 18 ) -arylene, which may optionally be substituted be.
- those selected from the group consisting of 1- (3-sulfopropyl) -2-vinylpyridinium betaine), 1- (3-sulfopropylpyridinium betaine and 1- (2-hydroxy-3-sulfopropylpyridinium betaine) have been found.
- the brightener can be used in quantities which are obvious to a person skilled in the art.
- An upper limit is the amount of brightener, in which the cost of its use is no longer justified by the effect achieved.
- the use of the brightener is thus advantageous in amounts of from 1 to 10000 mg / L of electrolyte.
- the brightener is used in a concentration of 5 to 5000 mg / L of electrolyte, most preferably in an amount of 10 to 1000 mg / L of electrolyte.
- the electrolyte according to the invention may contain further constituents which have a positive influence with regard to the bath stability, the deposition behavior of the metals, the quality of the deposited material and the electrolysis conditions.
- those skilled in the art in particular means for reducing the internal stresses of the coating, wetting agents, conductive salts, other brighteners and / or buffer substances, etc. into consideration.
- wetting agents may be selected from the following groups consisting of anionic wetting agents such as sodium lauryl sulfate, dodecylbenzenesulfonate sodium salt, sodium dioctylsulfosuccinate, nonionic wetting agents such as polyethylene glycol fatty acid esters and / or cationic wetting agents such as cetyltrimethylammonium bromide can be used.
- anionic wetting agents such as sodium lauryl sulfate, dodecylbenzenesulfonate sodium salt, sodium dioctylsulfosuccinate
- nonionic wetting agents such as polyethylene glycol fatty acid esters and / or cationic wetting agents such as cetyltrimethylammonium bromide can be used.
- Conducting salts selected from the group consisting of potassium sulfate or sodium sulfate, phosphate, nitrate, alkanesulfonate, sulfamate and mixtures thereof can advantageously be used to improve the conductivity and throwing power of the electrolyte.
- buffer substances are those selected from the group consisting of boric acid or phosphates or a carboxylic acid and / or salts thereof, such as e.g. Acetic acid, citric acid, tartaric acid, oxalic acid, succinic acid, malic acid, lactic acid, phthalic acid.
- brightener additives may advantageously those selected from the group consisting of N, N-diethyl-2-propyne-1-amine, 1,1-dimethyl-2-propynyl-1-amine, 2-butyne-1,4-diol, 2-butyne-1,4-diol ethoxylate, 2-butyne-1,4-diol propoxylate, 3-hexyne-2,5-diol and sulfopropylated 2-butyne-1,4-diol or one of their salts.
- Further base gloss agents may be allylsulfonic acid and / or vinylsulfonic acid and / or propargylsulfonic acid or their alkali metal salts in quantities of from 0.01 to 10 g / l of electrolyte.
- those selected from the group consisting of iminodisuccinic acid and / or sulfamic acid and / or sodium saccharinate may be advantageously used.
- the present invention also provides a process for the electrodeposition of palladium or a palladium alloy on a metallic or conductive substrate, wherein an electrolyte according to the invention is used.
- the palladium or palladium alloy may be electrodeposited on substrates well known to those skilled in the art for this purpose.
- the metallic or electrically conductive substrates are selected from the group consisting of nickel, nickel alloys, gold, silver, copper and copper alloys, iron, iron alloys.
- nickel or copper or copper alloy is coated with the palladium- or palladium-containing layer according to the invention. But even conductive plastics can be coated according to the invention with this method.
- the temperature in the electrolytic deposition can be chosen arbitrarily by the expert.
- the temperature is set at which a corresponding desired deposition can take place. This is the case at temperatures of 20 ° C to 80 ° C.
- a temperature of 30 ° C to 70 ° C and most preferably from 40 ° C to 60 ° C is set.
- the current density to be set can be selected by the person skilled in the art according to the underlying electrolysis arrangement during the electrolysis according to the invention.
- the current densities are preferably between 0.1 and 150 A / dm 2 . Particularly preferred are 0.1-10.0 A / dm 2 for drum and rack applications and 5.0-100 A / dm 2 for high speed applications. Most preferably, 5.0-70 A / dm 2 is set for high-speed applications, and 0.2-5 A / dm 2 is most preferred in drum and rack applications.
- the inventive method is advantageously carried out so that the deposition is carried out using non-soluble anodes.
- non-soluble anodes particularly preferred is the use of insoluble anodes of platinized titanium or mixed oxide anodes. These are most preferably non-soluble anodes of platinized titanium or iridium / ruthenium / tantalum oxide coated titanium or niobium or tantalum.
- Anodes made of graphite or of durable stainless steel are also possible.
- the subject matter of the present invention is likewise a special palladium salt which can advantageously be used and adapted for the process according to the invention.
- These are a palladium complex compounds consisting of a divalent palladium cation, one or more di-, tri- or tetradentate organic amine ligands and carbonate or two bicarbonate or hydroxide anions or a mixture thereof.
- the advantage here is the use of multidentate ligands based on di-, tri or tetraamines. Particularly preferred are those having 2 to 11 carbon atoms.
- ligands selected from the group consisting of ethylenediamine, trimethylenediamine, tetramethylenediamine, pentamethylenediamine, hexamethylenediamine, 1,2-propylenediamine, trimethylenetetramine, hexamethylenetetramine.
- EDA ethylene diamine
- the reaction temperature is preferably between 20 and 95 ° C, more preferably between 40 and 90 ° C, most preferably between 60 and 80 ° C.
- an electrolyte of the invention described herein with, for example, 20 g / l of palladium as bis (ethylenediamino) -palladium (II) hydrogen carbonate, 16 g / l of nickel as nickel (II) sulfate and 50 g / l of ethylenediamine enable the brighteners 1- (3 Sulfopropylpyridinium betaine or 1- (2-hydroxy-3-sulfopropylpyridinium betaine in amounts of 50 to 500 mg / l, especially in the low current density range, the deposition of high-gloss coatings.
- 2-hydroxy-3-sulfopropylpyridinium betaine in higher concentrations up to 2 g / L electrolyte extends the applicable current density range, so it is possible to apply current densities of up to 100 A / dm 2 in the described electrolyte for high-speed deposition.
- Ammonia and chloride are also avoided with the new palladium-nickel electrolyte based on ethylenediamine, which significantly reduces the risk potential and the unpleasant odor for humans and plant corrosion.
- the disadvantages of the previous, ammonium and chloride-free ethylene-diamine based processes are avoided.
- the use of carbonate or bicarbonate as counter ions to palladium and nickel allows an extension of the service life.
- the anions used are not stable in the applied pH range between, for example, 3 and 5.5 and decompose immediately upon addition of the metal salt to carbon dioxide and hydroxide. The volatile CO 2 escapes from the electrolyte and thus does not contribute to increasing the bath density.
- the pH in the electrolyte drops slightly, which compensates for the alkaline effect of hydroxide ions formed on decomposition of carbonic acid.
- the pH during operation remains surprisingly automatically constant by adding further palladium salts according to the invention.
- the bath density gradually increased until finally the salinity reached a maximum value and the electrolyte is no longer stable.
- the indicated constituents of the electrolyte are dissolved in 4 L of deionized water. Subsequently, the palladium or the palladium alloy is deposited on a brass sheet under the given electrolysis conditions.
- An electrolyte for depositing PdNi layers with 80% by weight of palladium may be e.g. have the following composition:
- the raised coatings (2 ⁇ m) are homogeneously bright, ductile, crack-free in the mentioned current density range and have a relatively constant Pd content of 80 to 83%.
- the resulting coatings (2 microns) are homogeneously high gloss in the current density range mentioned, brilliant-bright, very ductile, crack-free and have a relatively constant Pd content of 80 to 83%.
- Mass [g] Amount of substance [mol] Molecular weight [g / mol] Density [g / cm 3 ] Volume [ml] palladium 100 * 0.940 106.4 - - Ethylenediamine (EDA) 117 1,947 60.1 0,898 130 * 277 g of tetraamminepalladium (II) bicarbonate TAPHC (36% Pd)
- Tetraamminepalladium (II) bicarbonate (product # 45082) from Alfa Aesar Ethylene diamine 99% for synthesis (e.g., Merck # 800947)
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Abstract
Description
Die vorliegende Erfindung bezieht sich auf einen Elektrolyten zur galvanischen Abscheidung von Palladium oder Palladium-Legierungen auf metallischen bzw. leitfähigen Substraten. Insbesondere handelt es sich hier um einen Pd-Elektrolyten enthaltend ggf. weitere Metalle und ein organisches Oligoamin als Komplexbildner, mit dem Legierungsüberzüge mit z.B. 80% Pd für technische und dekorative Anwendungen abgeschieden werden können. Gleichfalls richtet sich die Erfindung auf ein entsprechendes galvanotechnisches Verfahren unter Einsatz dieses Elektrolyten und spezielle, vorteilhaft für dieses Verfahren einsetzbare Palladiumsalze.The present invention relates to an electrolyte for the electrodeposition of palladium or palladium alloys on metallic or conductive substrates. In particular, this is a Pd electrolyte containing optionally further metals and an organic oligoamine as a complexing agent, with the alloy coatings with e.g. 80% Pd for technical and decorative applications can be deposited. Likewise, the invention is directed to a corresponding galvanotechnisches method using this electrolyte and special, advantageously usable for this process palladium salts.
Die galvanotechnische Abscheidung von Palladium oder Palladium-Legierungen auf metallischen Substraten hat vielfältige dekorative und technische Anwendungsbereiche. Galvanisch abgeschiedenes Reinpalladium sowie Palladium-Nickelschichten, ggf. jeweils mit Goldflash, sind anerkannte Werkstoffe z.B. für Schwachstromkontakte oder Steckkontakte (z.B. auf Leiterplatten) und können als Ersatz für Hartgold angesehen werden [
Herkömmliche Palladium-Nickel-Elektrolyte enthalten Ammoniak und Chlorid und stellen daher eine potentielle Gefährdung für die Gesundheit des Bedienpersonals dar und sind im Hinblick auf die Korrosion des Anlagenmaterials schädlich. Ammoniak neigt dazu, bei Umgebungstemperatur zu verdampfen. Viele vermarktete Elektrolyten arbeiten bei 40°C bis 60°C und verursachen daher starke, Emissionen die nicht nur reizend für die Atemwege sind, sondern auch für eine Abnahme des pH-Wertes durch das verdampfende Ammoniak führen. Der Elektrolyt muss daher durch ständige Ammoniakzugabe pH-konstant gehalten werden.Conventional palladium-nickel electrolytes contain ammonia and chloride and therefore present a potential hazard to the health of operating personnel and are detrimental to the corrosion of equipment. Ammonia tends to evaporate at ambient temperature. Many marketed electrolytes operate at 40 ° C to 60 ° C and therefore cause strong, emissions that are not only irritating to the respiratory tract, but also lead to a decrease in the pH of the evaporating ammonia. The electrolyte must therefore be kept constant in pH by constant ammonia addition.
Bisher sind einige ammonium- und/oder chloridfreien Verfahren bekannt. Beispielsweise enthält ein Typ organische Amine, die jedoch bei den vorgegebenen alkalischen Arbeitsbedingungen (bis zu 65°C, pH 9 bis 12) sehr schnell Carbonate bilden und zu Ausfällungen führen. Des Weiteren muss die bei solchen Elektrolyten auftretende mangelnde Haftung auf vernickelten Substraten durch Vorpalladiumprozesse ausgeglichen werden, wodurch Mehrkosten erzeugt werden (
In einem kürzlich erschienenen Artikel wird ein chloridfreier Palladium-Nickel-Elektrolyt auf Sulfatbasis beschrieben (
Ein anderes Verfahren mit organischen Aminen ist aus der
Im Patent
Bereits 1986 wurde die galvanische Abscheidung von Palladium-Nickel-Überzügen aus einem Elektrolyten auf Basis von Ethylendiamin von Raub und Walz beschrieben (
Ein Verfahren gemäß der
In der
Die
Aus der
Die
Aufgabe der vorliegenden Erfindung war vor dem Hintergrund des zitierten Standes der Technik die Angabe eines weiteren Elektrolyten und ein mit diesem Elektrolyten arbeitenden Verfahren, welche die genannten Nachteile überwinden helfen. Insbesondere solite die angegebene Elektrolytzusammensetzung bzw. das entsprechende Verfahren helfen, auch bei hohen Stromdichten und schnell verlaufenden Elektrolyseprozessen glänzende Oberflächen zu erzeugen, was vom ökonomischen und ökologischen Standpunkt aus betrachtet besonders vorteilhaft wäre.Object of the present invention was in the context of the cited prior art, the indication of a further electrolyte and working with this electrolyte process, which help overcome the disadvantages mentioned. In particular, the specified electrolyte composition or the corresponding method should help to produce glossy surfaces even at high current densities and fast electrolysis processes, which would be particularly advantageous from an economic and ecological point of view.
Diese und weitere hier nicht genannte, sich aus dem Stand der Technik jedoch in naheliegender Welse ergebende Aufgaben werden durch die Anwendung eines Elektrolyten gemäß den Merkmalen des gegenständlichen Anspruchs 1 gelöst. Bevorzugte Ausgestaltungen des erfindungsgemäßen Elektrolyten sind in den von Anspruch 1 abhängigen Unteransprüchen 2-11 dargelegt. Anspruch 12 und die von i Anspruch 11 abhängigen Unteransprüche 12-15 beziehen sich auf ein erfindungsgemäßes Verfahren mit seinen bevorzugten Ausgestaltungsmögllchkeiten. Anspruch 16 richtet sich auf einen erfindungsgemäß vorteilhaft einsetzbaren Bestandteil des erfindungsgemäßen Elektrolyten.These and other objects not mentioned here but resulting from the state of the art in nearby catfish are solved by the use of an electrolyte according to the features of claim 1. Preferred embodiments of the electrolyte according to the invention are set forth in the depending from claim 1 dependent claims 2-11. Claim 12 and dependent from i claim 11 dependent claims 12-15 relate to a method according to the invention with its preferred Ausgestaltungsmokeit. Claim 16 is directed to an advantageously usable according to the invention component of the electrolyte according to the invention.
Dadurch, dass man einen wässrigen Elektrolyt zur galvanischen Abscheidung von Palladium oder einer Palladium-Legierung auf einem metallischen bzw. leitfähigen Substrat einsetzt, welcher die abzuscheidenden, mit organischen Oligoaminen komplexierten Metallionen in Form ihrer Salze mit Oxidhydroxid, Hydroxid, Hydrogencarbonat und/oder Carbonat als Gegenionen und einem Glanzbildner auf Basis eines inneren Salzes aus einer quaternären Ammonium- und einer Sulfonsäuregruppe aufweist, gelangt man in überraschend einfacher Art und Weise und mit Erfolg zur Lösung der gestellten Aufgabe. Mit dem erfindungsgemäßen Elektrolyten oder durch Anwendung des erfindungsgemäßen Verfahrens ist es jetzt möglich, sowohl bei niedrigen als auch bei hohen Stromdichten die gewünschten glänzenden Oberflächen mit qualitativ hervorragendem Ergebnis erzeugen zu können. Die erfindungsgemäße Elektrolytzusammensetzung wird durch den Stand der Technik dabei in keiner Weise nahegelegt.Characterized in that one uses an aqueous electrolyte for the electrodeposition of palladium or a palladium alloy on a metallic or conductive substrate, which to be deposited, complexed with organic oligoamines metal ions in the form of their salts with oxide hydroxide, hydroxide, bicarbonate and / or carbonate as Having counterions and a brightener based on an inner salt of a quaternary ammonium and a sulfonic acid group, one arrives in a surprisingly simple manner and successfully to solve the problem. With the electrolyte according to the invention or by using the method according to the invention, it is now possible to produce the desired shiny surfaces with qualitatively excellent results both at low and at high current densities. The electrolyte composition according to the invention is in no way suggested by the prior art.
Der erfindungsgemäße Elektrolyt ermöglicht es, das Palladium alleine oder in Form einer Legierung mit anderen Metallen vergesellschaftet abzuscheiden. Als weitere Metalle können die dem Fachmann für diesen Zweck in Frage kommenden eingesetzt werden. Bei diesen kann es sich um z.B. Nickel, Kobalt, Eisen, Indium, Gold, Silber oder Zinn oder Gemische davon handeln. Vorzugsweise werden die abzuscheidenden Metallionen ausgewählt aus der Gruppe bestehend aus Nickel, Kobalt, Eisen und Gemische davon. Der Elektrolyt enthält diese Metalle in Form ihrer löslichen Salze. Als Salze kommen bevorzugt solche ausgewählt aus der Gruppe der Phosphate, Carbonate, Hydrogencarbonate, Hydroxide, Oxide, Sulfate, Sulfamate, Alkansulfonate, Pyrophosphate, Phosphonate, Nitrate, Carbonsäuresalze und Gemische davon in Frage.The electrolyte according to the invention makes it possible to deposit the palladium alone or in the form of an alloy associated with other metals. Other metals that can be used in the art for this purpose in question. These may be e.g. Nickel, cobalt, iron, indium, gold, silver or tin or mixtures thereof. Preferably, the metal ions to be deposited are selected from the group consisting of nickel, cobalt, iron and mixtures thereof. The electrolyte contains these metals in the form of their soluble salts. Suitable salts are preferably those selected from the group of phosphates, carbonates, bicarbonates, hydroxides, oxides, sulfates, sulfamates, alkanesulfonates, pyrophosphates, phosphonates, nitrates, carboxylic acid salts and mixtures thereof.
Der Fachmann wählt die Konzentrationen der einzusetzenden Metalle im Elektrolyten anhand seines allgemeinen Fachverständnisses. Es hat sich gezeigt, dass vorteilhafte Ergebnisse erzielt werden können, wenn Palladium in Konzentrationen von 1-100 g/L, vorzugsweise 2-70 g/L, und äußerst bevorzugt 4-50 g/L und ganz besonders bevorzugt 5-25 g/L bezogen auf den Elektrolyten vorhanden ist.The person skilled in the art selects the concentrations of the metals to be used in the electrolyte on the basis of his general technical knowledge. It has been found that advantageous results can be achieved if palladium is used in concentrations of 1-100 g / L, preferably 2-70 g / L, and more preferably 4-50 g / L and most preferably 5-25 g / L is present based on the electrolyte.
Die weiteren abzuscheidenden Metallionen können in Konzentrationen von ≤50 g/L bezogen auf den Elektrolyten vortiegen. Vorzugsweise beträgt die Konzentration dieser Ionen im Elektrolyten ≤40 g/L, weiter bevorzugt ≤30 g/L bezogen auf den Elektrolyten. Wie eingangs schon angedeutet erfolgt eine gleichmäßige Abscheidung der Metallionen bei den erfindungsgemäßen Bedingungen unter anderem dann vorteilhaft, wenn diese komplexiert vorliegen. Als geeignete Liganden für diese Komplexe haben sich organische Oligoamine erwiesen. Vorteilhaft ist dabei der Einsatz von mehrzähnigen, insbesondere Liganden auf Basis von Di-, Tri- oder Tetraaminen. Besonders bevorzugt sind dabei solche, die 2 bis 11 C-Atome aufweisen. Ganz besonders bevorzugt ist der Einsatz von Liganden ausgewählt aus der Gruppe bestehend aus Ethylendiamin, Trimethylendiamin, Tetramethylendiamin, Pentamethylendiamin, Hexamethylendiamin, 1,2-Propylendiamin, Trimethylentetramin, Hexamethylentetramin. Äußerst bevorzugt ist Ethylendiamin (EDA) in diesem Zusammenhang.The further metal ions to be deposited can be found in concentrations of ≦ 50 g / L based on the electrolyte. The concentration of these ions in the electrolyte is preferably ≦ 40 g / L, more preferably ≦ 30 g / L, based on the electrolyte. As already indicated, a uniform deposition of the metal ions under the conditions according to the invention is advantageous, inter alia, if they are complexed. Suitable oligonucleotides for these complexes have proven to be organic oligoamines. Advantageous is the use of polydentate, in particular ligands based on di-, tri- or tetraamines. Particularly preferred are those having 2 to 11 carbon atoms. Very particular preference is given to the use of ligands selected from the group consisting of ethylenediamine, trimethylenediamine, tetramethylenediamine, pentamethylenediamine, hexamethylenediamine, 1,2-propylenediamine, trimethylenetetramine, hexamethylenetetramine. Most preferred is ethylene diamine (EDA) in this context.
Der Fachmann ist frei in der Menge der eingesetzten Oligoamine. Er wird sich bei der Abschätzung der Menge an der Tatsache orientieren, dass eine ausreichende Menge vorhanden sein muss, um die möglichst gleichmäßige Abscheidung des Palladiums bzw. der Palladium-Legierung zu erhalten. Auf der anderen Seite begrenzen zumindest ökonomische Erwägungen den Einsatz großer Mengen an Oligoaminen. Vorteilhaft ist eine Menge von 0,1-5 mol/L an Oligoaminen im Elektrolyten. Weiter bevorzugt liegt die Konzentration im Bereich zwischen 0,3 - 3 mol/L. Ganz besonders bevorzugt liegt die Konzentration an Oligoaminen bei 0,5 - 2 mol/L Elektrolyt.The skilled person is free in the amount of oligoamines used. In the estimation of the amount, he will orientate himself by the fact that a sufficient amount must be present in order to obtain as even as possible a deposition of the palladium or of the palladium alloy. On the other hand, at least economic considerations limit the use of large quantities of oligoamines. An amount of 0.1-5 mol / L of oligoamines in the electrolyte is advantageous. More preferably, the concentration is in the range between 0.3-3 mol / L. Most preferably, the concentration of oligoamines at 0.5 - 2 mol / L electrolyte.
Auch der pH-Wert des erfindungsgemäßen Elektrolyten kann nach dem Fachmann für den jeweiligen Anwendungszweck im sauren bis neutralen Bereich eingestellt werden. Vorteilhaft erscheint eine Einstellung auf einen Bereich zwischen pH 3 und pH 7. Weiter bevorzugt ist ein Bereich von pH 3,5 bis pH 6,5, besonders bevorzugt von pH 4 bis pH 6 und ganz besonders bevorzugt um ca. pH 5 bis pH 5,5.Also, the pH of the electrolyte according to the invention can be adjusted according to the skilled person for the particular application in the acidic to neutral range. An adjustment to a range between pH 3 and pH 7 appears to be advantageous. A further preferred range is from pH 3.5 to pH 6.5, more preferably from pH 4 to pH 6, and most preferably around pH 5 to pH 5 ; 5.
Der erfindungsgemäße Elektrolyt weist Glanzbildner auf Basis eines inneren Salzes aus einer quaternären Ammonium- und einer Säuregruppe auf. Als quaternäre Ammoniumverbindung kommt vorzugsweise eine solche in Frage, bei der das positiv geladene Stickstoffatom Teil eines aromatischen Ringsystems ist. Als derartige Molekülbestandteile kommen dem Fachmann besonders solche in Betracht, die ein oder mehrkernige aromatische Systeme betreffen, wie z.B. Pyridinium-, Pyrimidinium-, Pyrazinium-, Pyrrolinium-, Imidazolinium-, Thiazolinium-, Indolinium-, Carbazolinium-Derivate oder derartige substituierte Systeme in Betracht. Ganz besonders bevorzugt werden Pyridinium- bzw. Alkyl- oder Alkenyl-substituierte Pyridinium-Derivate eingesetzt. Äußerst bevorzugt ist die Auswahl eines Glanzbildners, der als Molekülbestandteil eine quaternäre Ammoniumverbindung auf Basis eines Pyridinium-Derivats aufweist.The electrolyte according to the invention has brighteners based on an internal salt of a quaternary ammonium and an acid group. As a quaternary ammonium compound is preferably one in which the positively charged nitrogen atom is part of an aromatic ring system. As such molecular components, those skilled in the art are especially those which concern a or polynuclear aromatic systems, such as pyridinium, pyrimidinium, pyrazinium, pyrrolinium, imidazolinium, thiazolinium, indolinium, carbazolinium derivatives or such substituted systems in consideration. Very particular preference is given to pyridinium- or alkyl- or alkenyl-substituted pyridinium derivatives used. Most preferred is the selection of a brightener having as a molecular constituent a quaternary ammonium compound based on a pyridinium derivative.
Als weiteren Molekülbestandteil enthält der Glanzbildner eine Säuregruppe, so dass es sich vorliegend bei dem Glanzbildner um ein inneres Salz bzw. ein Betain handelt. Unter Säuregruppe wird vorliegend eine Gruppe verstanden, die unter den gegebenen Bedingungen im Elektrolyten überwiegend in deprotonierter Form vorliegt. Die Säuregruppe kann sich von solchen ausgewählt aus der Gruppe bestehend aus Phosphorsäure, Phosphonsäure, Schwefelsäure, Sulfonsäure, Carbonsäure ableiten. Besonders bevorzugt ist die Sulfonsäure als Bestandteil des Glanzbildners.As a further constituent of the molecule, the brightener contains an acid group, so that in the present case the brightener is an internal salt or a betaine. In the present case, the term "acid group" refers to a group which, under the given conditions, is present predominantly in the deprotonated form in the electrolyte. The acid group may be derived from those selected from the group consisting of phosphoric acid, phosphonic acid, sulfuric acid, sulfonic acid, carboxylic acid. Particularly preferred is the sulfonic acid as part of the brightener.
Die Säuregruppe und der quaternäre Ammoniumteil des Glanzbildners können durch (C1-C8)-Alkylen-, (C1-C8)-Alkenylen-, (C6-C18)-Arylen, welche ggf. substituiert vorliegen können, verbunden sein. Als äußerst bevorzugte Verbindungen in diesem Zusammenhang haben sich solche ausgewählt aus der Gruppe bestehend aus 1-(3-Sulfopropyl)-2-vinylpyridiniumbetain), 1-(3-Sulfopropylpyridiniumbetain und 1-(2-Hydroxy-3-sulfopropylpyridiniumbetain erwiesen.The acid group and the quaternary ammonium moiety of the brightener may be linked by (C 1 -C 8 ) -alkylene, (C 1 -C 8 ) -alkenylene, (C 6 -C 18 ) -arylene, which may optionally be substituted be. As extremely preferred compounds in this connection, those selected from the group consisting of 1- (3-sulfopropyl) -2-vinylpyridinium betaine), 1- (3-sulfopropylpyridinium betaine and 1- (2-hydroxy-3-sulfopropylpyridinium betaine) have been found.
Der Glanzbildner kann in für den Fachmann ersichtlichen Mengen im Elektrolyten eingesetzt werden. Eine obere Grenze bildet die Menge an Glanzbildner, bei der der Kostenaufwand durch dessen Einsatz nicht mehr durch den erzielten Effekt gerechtfertigt wird. Vorteilhaft ist der Einsatz des Glanzbildners damit in Mengen von 1 bis 10000 mg/L Elektrolyt. Besonders vorteilhaft wird der Glanzbildner in einer Konzentration von 5 - 5000 mg/L Elektrolyt, äußerst bevorzugt in einer Menge von 10 -1000 mg/L Elektrolyt eingesetzt.The brightener can be used in quantities which are obvious to a person skilled in the art. An upper limit is the amount of brightener, in which the cost of its use is no longer justified by the effect achieved. The use of the brightener is thus advantageous in amounts of from 1 to 10000 mg / L of electrolyte. Particularly advantageously, the brightener is used in a concentration of 5 to 5000 mg / L of electrolyte, most preferably in an amount of 10 to 1000 mg / L of electrolyte.
Der erfindungsgemäße Elektrolyt kann weitere Bestandteile enthalten, welche im Hinblick auf die Badstabilität, das Abscheidungsverhalten der Metalle, die Qualität des abgeschiedenen Materials und die Elektrolysebedingungen positiven Einfluss haben. Als solche kommen für den Fachmann insbesondere Mittel zur Verringerung der inneren Spannungen des Überzuges, Netzmittel, Leitsalze, weitere Glanzzusätze und/oder Puffersubstanzen etc. in Betracht.The electrolyte according to the invention may contain further constituents which have a positive influence with regard to the bath stability, the deposition behavior of the metals, the quality of the deposited material and the electrolysis conditions. As such, those skilled in the art in particular means for reducing the internal stresses of the coating, wetting agents, conductive salts, other brighteners and / or buffer substances, etc. into consideration.
Als Zusätze zur Verringerung der Oberflächenspannung des Elektrolyten können Netzmittel ausgewählt aus den folgenden Gruppen bestehend aus anionischen Netzmitteln wie z.B. Natriumlaurylsulfat, Dodecylbenzolsulfonat-Natriumsalz, Natriumdioctylsulfosuccinat, nichtionischen Netzmitteln wie z.B. Polyethylenglykol-Fettsäureester und/oder kationischen Netzmittel wie z.B. Cetyltrimethylammoniumbromid eingesetzt werden.As additives for reducing the surface tension of the electrolyte, wetting agents may be selected from the following groups consisting of anionic wetting agents such as sodium lauryl sulfate, dodecylbenzenesulfonate sodium salt, sodium dioctylsulfosuccinate, nonionic wetting agents such as polyethylene glycol fatty acid esters and / or cationic wetting agents such as cetyltrimethylammonium bromide can be used.
Zur Verbesserung der Leitfähigkeit und Streufähigkeit des Elektrolyten können vorteilhaft Leitsalze ausgewählt aus der Gruppe bestehend aus Kalium- bzw. Natriumsulfat, -phosphat, -nitrat, -alkansulfonat, -sulfamat und deren Mischungen verwendet werden.Conducting salts selected from the group consisting of potassium sulfate or sodium sulfate, phosphate, nitrate, alkanesulfonate, sulfamate and mixtures thereof can advantageously be used to improve the conductivity and throwing power of the electrolyte.
Als Puffersubstanzen können vorteilhaft solche ausgewählt aus der Gruppe bestehend aus Borsäure oder Phosphaten oder eine Carbonsäure und/oder deren Salze wie z.B. Essigsäure, Citronensäure, Weinsäure, Oxalsäure, Bernsteinsäure, Äpfelsäure, Milchsäure, Phthalsäure, verwendet werden.Advantageously used as buffer substances are those selected from the group consisting of boric acid or phosphates or a carboxylic acid and / or salts thereof, such as e.g. Acetic acid, citric acid, tartaric acid, oxalic acid, succinic acid, malic acid, lactic acid, phthalic acid.
Als weitere Glanzzusätze können vorteilhaft solche ausgewählt aus der Gruppe bestehend aus N,N-Diethyl-2-propin-1-amin, 1,1-Dimethyl-2-propinyl-1-amin, 2-Butin-1,4-diol, 2-Butin-1,4-diolethoxylat, 2-Butin-1,4-diolpropoxylat, 3-Hexin-2,5-diol und sulfopropyliertes 2-Butin-1,4-diol oder eines ihrer Salze verwendet werden. Weitere Grundglanzbildner können Allylsulfonsäure und/oder Vinylsulfonsäure und/oder Propargylsulfonsäure bzw. deren Alkalisalze in Mengen von 0,01 bis 10 g/L Elektrolyt sein.As further brightener additives may advantageously those selected from the group consisting of N, N-diethyl-2-propyne-1-amine, 1,1-dimethyl-2-propynyl-1-amine, 2-butyne-1,4-diol, 2-butyne-1,4-diol ethoxylate, 2-butyne-1,4-diol propoxylate, 3-hexyne-2,5-diol and sulfopropylated 2-butyne-1,4-diol or one of their salts. Further base gloss agents may be allylsulfonic acid and / or vinylsulfonic acid and / or propargylsulfonic acid or their alkali metal salts in quantities of from 0.01 to 10 g / l of electrolyte.
Als Mittel zur Verringerung der inneren Spannung des Überzugs können vorteilhaft solche ausgewählt aus der Gruppe bestehend aus Iminodisuccinsäure und/oder Sulfaminsäure und/oder Natriumsaccharinat verwendet werden.As the means for reducing the internal stress of the coating, those selected from the group consisting of iminodisuccinic acid and / or sulfamic acid and / or sodium saccharinate may be advantageously used.
Vorteilhaft ist jedenfalls, wenn dem Elektrolyten keine weiteren Abscheidungsmetallsalze mit anorganischen Anionen außer Sulfat- bzw. Nitrat-, Hydrogencarbonat- bzw Carbonationen oder Oxid, Hydroxid oder Gemische derselben zugesetzt werden. Dies hilft, eine übermäßige Anreicherung von verschiedenen Anionen im System zu verhindern, da die Abscheidungsmetallsalze im Laufe des Elektrolyseprozesses durch Zugabe ergänzt werden müssen. Eine solche vorgehensweise wiederum wirkt sich positiv auf die Standzeit des Elektrolyten aus. Besonders vorteilhaft ist die Ausführungsform, bei der nur solche Abscheidungsmetallsalze eingesetzt werden, deren Anionen aus Hydrogencarbonat- bzw Carbonationen oder Oxid, Hydroxid oder Gemische derselben bestehen.In any case, it is advantageous if no further metal salts with inorganic anions except sulfate or nitrate, bicarbonate or carbonate ions or oxide, hydroxide or mixtures thereof are added to the electrolyte. This helps to prevent excessive accumulation of various anions in the system, since the deposition metal salts must be supplemented by addition in the course of the electrolysis process. Such an approach in turn has a positive effect on the service life of the electrolyte. Particularly advantageous is the embodiment in which only those deposition metal salts are used whose anions consist of bicarbonate or carbonate ions or oxide, hydroxide or mixtures thereof.
Gegenstand der vorliegenden Erfindung ist auch ein Verfahren zur galvanischen Abscheidung von Palladium oder einer Palladium-Legierung auf einem metallischen bzw. leitfähigen Substrat, wobei man einen erfindungsgemäßen Elektrolyten verwender.The present invention also provides a process for the electrodeposition of palladium or a palladium alloy on a metallic or conductive substrate, wherein an electrolyte according to the invention is used.
Das Palladium oder die Palladium-Legierung kann auf dem Fachmann für diesen Zweck geläufige Substrate elektrolytisch abgeschieden werden. Vorteilhafterweise sind die metallischen bzw. elektrisch leitfähigen Substrate ausgewählt aus der Gruppe bestehend aus Nickel, Nickellegierungen, Gold, Silber, Kupfer und Kupferlegierungen, Eisen, Eisenlegierungen. Besonders bevorzugt wird Nickel oder Kupfer bzw. Kupferlegierung mit der Palladium- oder palladiumhaltigen Schicht erfindungsgemäß überzogen. Aber auch leitfähige Kunststoffe können mit diesem Verfahren erfindungsgemäß überzogen werden.The palladium or palladium alloy may be electrodeposited on substrates well known to those skilled in the art for this purpose. Advantageously, the metallic or electrically conductive substrates are selected from the group consisting of nickel, nickel alloys, gold, silver, copper and copper alloys, iron, iron alloys. Particularly preferably, nickel or copper or copper alloy is coated with the palladium- or palladium-containing layer according to the invention. But even conductive plastics can be coated according to the invention with this method.
Die Temperatur bei der elektrolytischen Abscheidung kann vom Fachmann beliebig gewählt werden. Vorteilhaft wird die Temperatur eingestellt bei der eine entsprechend gewünschte Abscheidung erfolgen kann. Dies ist bei Temperaturen von 20°C bis 80°C der Fall. Bevorzugt wird eine Temperatur von 30°C bis 70°C und äußerst bevorzugt von 40°C bis 60°C eingestellt.The temperature in the electrolytic deposition can be chosen arbitrarily by the expert. Advantageously, the temperature is set at which a corresponding desired deposition can take place. This is the case at temperatures of 20 ° C to 80 ° C. Preferably, a temperature of 30 ° C to 70 ° C and most preferably from 40 ° C to 60 ° C is set.
Ebenso kann die einzustellende Stromdichte während der erfindungsgemäßen Elektrolyse vom Fachmann entsprechend der zugrundeliegenden Elektrolyseanordnung gewählt werden. Die Stromdichten betragen vorzugsweise zwischen 0,1 und 150 A/dm2. Besonders bevorzugt sind 0,1-10,0 A/dm2 für Trommel- und Gestellanwendungen und 5,0 - 100 A/dm2 für Highspeedanwendungen. Äußerst bevorzugt werden für Highspeed-Anwendungen 5,0 - 70 A/dm2 eingestellt, in Trommel- und Gestellanwendungen dagegen äußerst bevorzugt 0,2 - 5 A/dm2.Likewise, the current density to be set can be selected by the person skilled in the art according to the underlying electrolysis arrangement during the electrolysis according to the invention. The current densities are preferably between 0.1 and 150 A / dm 2 . Particularly preferred are 0.1-10.0 A / dm 2 for drum and rack applications and 5.0-100 A / dm 2 for high speed applications. Most preferably, 5.0-70 A / dm 2 is set for high-speed applications, and 0.2-5 A / dm 2 is most preferred in drum and rack applications.
Das erfindungsgemäße Verfahren wird in vorteilhafter Weise so durchgeführt, dass die Abscheidung unter Verwendung nicht löslicher Anoden erfolgt. Besonders bevorzugt ist der Einsatz von unlöslichen Anoden aus platiniertem Titan oder Mischoxidanoden. Bei diesen handelt es sich ganz besonders bevorzugt um nicht lösliche Anoden aus platiniertem Titan oder aus mit Iridium/Ruthenium/Tantalmischoxid überzogenem Titan oder Niob oder Tantal. Möglich sind auch Anoden aus Graphit oder aus beständigem Edelstahl.The inventive method is advantageously carried out so that the deposition is carried out using non-soluble anodes. Particularly preferred is the use of insoluble anodes of platinized titanium or mixed oxide anodes. These are most preferably non-soluble anodes of platinized titanium or iridium / ruthenium / tantalum oxide coated titanium or niobium or tantalum. Anodes made of graphite or of durable stainless steel are also possible.
Gegenstand der vorliegenden Erfindung ist ebenfalls ein spezielles, vorteilhaft für das erfindungsgemäße Verfahren einsetzbares und angepasstes Palladiumsalz. Dabei handelt es sich um eine Palladiumkomplexverbindungen bestehend aus einem zweiwertigen Palladiumkation, einem oder mehreren zwei-, drei- oder vierzähnigen organischen Aminliganden und Carbonat- oder zwei Hydrogencarbonat- oder Hydroxidanionen oder eine Mischung davon. Vorteilhaft ist dabei der Einsatz von mehrzähnigen Liganden auf Basis von Di-, Tri oder Tetraaminen. Besonders bevorzugt sind dabei solche, die 2 bis 11 C-Atome aufweisen. Ganz besonders bevorzugt ist der Einsatz von Liganden ausgewählt aus der Gruppe bestehend aus Ethylendiamin, Trimethylendiamin, Tetramethylendiamin, Pentamethylendiamin, Hexamethylendiamin, 1,2-Propylendiamin, Trimethylentetramin, Hexamethylentetramin. Äußerst bevorzugt ist Ethylendiamin (EDA) in diesem Zusammenhang.The subject matter of the present invention is likewise a special palladium salt which can advantageously be used and adapted for the process according to the invention. These are a palladium complex compounds consisting of a divalent palladium cation, one or more di-, tri- or tetradentate organic amine ligands and carbonate or two bicarbonate or hydroxide anions or a mixture thereof. The advantage here is the use of multidentate ligands based on di-, tri or tetraamines. Particularly preferred are those having 2 to 11 carbon atoms. Very particular preference is given to the use of ligands selected from the group consisting of ethylenediamine, trimethylenediamine, tetramethylenediamine, pentamethylenediamine, hexamethylenediamine, 1,2-propylenediamine, trimethylenetetramine, hexamethylenetetramine. Most preferred is ethylene diamine (EDA) in this context.
Die Herstellung der neuen Palladium-Ethylendiamin-Verbindung kann durch Umsetzung von Tetraammin-palladium(II)hydrogencarbonat [Alfa Aesar Kat.-Nr. 45082] mit Ethylendiamin im Molverhältnis [Pd]:[Ethylendiamin] = 1:1,0 bis 3,0 , vorzugsweise 1:1,5 bis 2,5, besonders bevorzugt 1:2,0 bis 2,1 gemäß folgender Gleichung erfolgen. Die Umsetzungstemperatur liegt vorzugsweise zwischen 20 und 95°C, besonders bevorzugt zwischen 40 und 90°C, ganz besonders bevorzugt zwischen 60 und 80°C.
Es findet dabei ein Ligandenaustausch von Ammoniak gegen Ethylendiamin statt. Der freigesetzte Ammoniak entweicht teilweise direkt aus der Lösung bzw. wird anschließend durch Einblasung von Luft oder Inertgas wie z.B. Stickstoff ausgetrieben. Zur Beschleunigung des Vorgangs kann zusätzlich Vakuum angelegt werden. Die anderen erfindungsgemäßen Komplexe können ebenso hergestellt werden.There is a ligand exchange of ammonia instead of ethylenediamine. The liberated ammonia escapes partly directly from the solution or is subsequently by blowing in air or inert gas such. Nitrogen expelled. To accelerate the process, additional vacuum can be applied. The other complexes of the invention can also be prepared.
In einem Elektrolyt der hier beschriebenen Erfindung mit beispielsweise 20 g/l Palladium als Bis(ethylendiamino)-palladium(II)hydrogencarbonat, 16 g/I Nickel als Nickel(II)sulfat und 50 g/l Ethylendiamin ermöglichen die Glanzmittel 1-(3-Sulfopropylpyridiniumbetain bzw. 1-(2-Hydroxy-3-sulfopropylpyridiniumbetain in Mengen von 50 bis 500 mg/l vor allem im niederen Stromdichtebereich die Abscheidung hochglänzender Überzüge. Außerdem wird durch den Einsatz von 1-(3-Sulfopropylpyridiniumbetain bzw. 1-(2-Hydroxy-3-sulfopropylpyridiniumbetain in höheren Konzentrationen bis zu 2 g/L Elektrolyt der anwendbare Stromdichtebereich erweitert. So ist es möglich im beschriebenen Elektrolyten für die Hochgeschwindigkeitsabscheidung Stromdichten von bis zu 100 A/dm2 anzuwenden.In an electrolyte of the invention described herein with, for example, 20 g / l of palladium as bis (ethylenediamino) -palladium (II) hydrogen carbonate, 16 g / l of nickel as nickel (II) sulfate and 50 g / l of ethylenediamine enable the brighteners 1- (3 Sulfopropylpyridinium betaine or 1- (2-hydroxy-3-sulfopropylpyridinium betaine in amounts of 50 to 500 mg / l, especially in the low current density range, the deposition of high-gloss coatings. 2-hydroxy-3-sulfopropylpyridinium betaine in higher concentrations up to 2 g / L electrolyte extends the applicable current density range, so it is possible to apply current densities of up to 100 A / dm 2 in the described electrolyte for high-speed deposition.
Ein weiterer Hinweis für die vorteilhafte Wirkung beispielsweise des Bis(ethylendiamino)palladium(II)hydrogencarbonat in dem beschriebenen Elektrolyten zeigt sich beim Zusatz von 1-(3-Sulfopropyl)-2-vinylpyridiniumbetain in geringsten Mengen. Bereits 10 ppm ermöglichen die Abscheidung spiegelglänzender, spannungsarmer und damit hochduktiler Überzüge - allerdings auch ohne den zusätzlichen Einsatz einer Sulfonsäure, wie dies in
Des Weiteren ist durch den Einsatz von ca. 100 -200 ppm 1-(3-Sulfopropyl)-2-vinylpyridiniumbetain die Abscheidung von sehr dicken Palladium oder Palladiumlegierungsüberzügen möglich. Die bis zu 30 µm dicken Schichten sind hochglänzend, rissfrei und sehr duktil.Furthermore, the use of about 100-200 ppm of 1- (3-sulfopropyl) -2-vinylpyridinium betaine enables the deposition of very thick palladium or palladium alloy coatings. The layers, which are up to 30 μm thick, are high-gloss, crack-free and very ductile.
Mit dem neuen Palladium-Nickel-Elektrolyten auf Ethylendiamin-Basis werden ebenfalls Ammoniak und Chlorid vermieden, wodurch das Gefährdungspotential und die Geruchsbelästigung für den Mensch und die Anlagenkorrosion deutlich herabgesetzt werden. Die Nachteile der bisherigen, ammonium- und chloridfreien Verfahren auf Ethylendiaminbasis werden vermieden. Insbesondere ermöglicht der Einsatz von Carbonat oder Hydrogencarbonat als Gegenionen zu Palladium und Nickel eine Verlängerung der Standzeit. Die eingesetzten Anionen sind in dem angewandten pH-Bereich zwischen beispielsweise 3 und 5,5 nicht stabil und zerfallen bei Zugabe des Metallsalzes sofort zu Kohlendioxid und Hydroxid. Das leicht flüchtige CO2 entweicht aus dem Elektrolyten und trägt so nicht zur Erhöhung der Baddichte bei. Während der Elektrolyse fällt der pH-Wert im Elektrolyten leicht ab, wodurch die alkalische Wirkung des beim Zerfall der Kohlensäure entstehenden Hydroxidions kompensiert wird. Der pH-Wert während des Betriebs bleibt so in überraschender Weise durch Zugabe weiterer erfindungsgemäßer Palladiumsalze automatisch konstant. Im Gegensatz hierzu wird insbesondere im Falle des Sulfats bei der Ergänzung der Metallgehalte im laufenden Badbetrieb die Baddichte nach und nach erhöht, bis schließlich die Aufsalzung einen Maximalwert erreicht und der Elektrolyt nicht mehr stabil ist.Ammonia and chloride are also avoided with the new palladium-nickel electrolyte based on ethylenediamine, which significantly reduces the risk potential and the unpleasant odor for humans and plant corrosion. The disadvantages of the previous, ammonium and chloride-free ethylene-diamine based processes are avoided. In particular, the use of carbonate or bicarbonate as counter ions to palladium and nickel allows an extension of the service life. The anions used are not stable in the applied pH range between, for example, 3 and 5.5 and decompose immediately upon addition of the metal salt to carbon dioxide and hydroxide. The volatile CO 2 escapes from the electrolyte and thus does not contribute to increasing the bath density. During the electrolysis, the pH in the electrolyte drops slightly, which compensates for the alkaline effect of hydroxide ions formed on decomposition of carbonic acid. The pH during operation remains surprisingly automatically constant by adding further palladium salts according to the invention. In contrast, especially in the case of sulfate in the addition of metal contents in the current bath operation, the bath density gradually increased until finally the salinity reached a maximum value and the electrolyte is no longer stable.
Dies war vor dem Hintergrund des zitierten Standes der Technik nicht nahegelegt.This was not suggested in light of the cited prior art.
In einem 5 L Becherglas werden in 4 L entionisiertem Wasser die angegebenen Bestandteile des Elektrolyten gelöst. Anschließend wird auf einem Messingblech unter den angegebenen Elektrolysebedingungen das Palladium oder die Palladiumlegierung abgeschieden.In a 5 L beaker, the indicated constituents of the electrolyte are dissolved in 4 L of deionized water. Subsequently, the palladium or the palladium alloy is deposited on a brass sheet under the given electrolysis conditions.
Ein Elektrolyt zur Abscheidung von PdNi-Schichten mit 80 Gew.-% Palladium kann z.B. folgende Zusammensetzung haben:An electrolyte for depositing PdNi layers with 80% by weight of palladium may be e.g. have the following composition:
Die erhabenen Überzüge (2 µm) sind im genannten Stromdichtebereich homogen glänzend, hell, duktil, rissfrei und weisen einen relativ konstanten Pd-Anteil von 80 bis 83 % auf.The raised coatings (2 μm) are homogeneously bright, ductile, crack-free in the mentioned current density range and have a relatively constant Pd content of 80 to 83%.
Die erhaltenen Überzüge (2 µm) sind im genannten Stromdichtebereich homogen hochglänzend, brillant-hell, sehr duktil, rissfrei und weisen einen relativ konstanten Pd-Anteil von 80 bis 83 % auf.The resulting coatings (2 microns) are homogeneously high gloss in the current density range mentioned, brilliant-bright, very ductile, crack-free and have a relatively constant Pd content of 80 to 83%.
Dreihalskoben, Rührer, Heizer, Thermometer, Rückflusskühler, pH-Elektrode,Three-necked flasks, stirrer, stirrer, thermometer, reflux condenser, pH electrode,
Molverhältnis Pd:EDA = 1:2,07Molar ratio Pd: EDA = 1: 2.07
Tetraamminpalladium-(II)Hydrogencarbonat (Produkt-Nr. 45082) von Alfa Aesar Ethylendiamin 99% zur Synthese (z.B. Merck Nr. 800947)Tetraamminepalladium (II) bicarbonate (product # 45082) from Alfa Aesar Ethylene diamine 99% for synthesis (e.g., Merck # 800947)
Ansatz für 1 Liter Endvolumen enthaltend 100 g Pd:
- 1. Vorlegen von 500 ml entionisiertes Wasser.
- 2. Ethylendiamin in Wasser zugeben (pH 11,5 bis 12).
- 3. Tetraamminpalladium(II)hydrogencarbonat portionsweise zugeben, Temperatur steigt auf über 50°C. Es bildet sich eine goldgelbe Lösung. Nach Zugabe der vollen Menge des Palladiumsalzes liegt der pH bei ca. 10 ,5.
- 4. Auf 80°C erhitzen und 1 h reagieren lassen. Beim Aufheizen schlägt die Farbe der Lösung von goldgelb nach grüngelb um. Es tritt eine leichte Trübung durch schwarze Partikel auf.
- 5. Die Mischung auf 50°C abkühlen lassen.
- 6. Filtration über Glasfaserfilter 6: wenig schwarzer Rückstand im Filter, hellgelbe Lösung, die stark nach Ammoniak riecht.
- 7. Einleiten von Druckluft zur Abreicherung von Ammoniak.
- 8. Mit entionisiertem Wasser auf Endvolumen einstellen.
- 1. Prepare 500 ml of deionized water.
- 2. Add ethylenediamine in water (pH 11.5 to 12).
- 3. Add tetraamminepalladium (II) hydrogen carbonate in portions, the temperature rises above 50 ° C. It forms a golden yellow solution. After addition of the full amount of the palladium salt, the pH is about 10.5.
- 4. Heat to 80 ° C and allow to react for 1 h. When heated, the color of the solution turns from golden yellow to green-yellow. There is a slight clouding by black particles.
- 5. Allow the mixture to cool to 50 ° C.
- 6. Filtration via glass fiber filter 6: little black residue in the filter, pale yellow solution, which smells strongly of ammonia.
- 7. Introducing compressed air to deplete ammonia.
- 8. Adjust to final volume with deionized water.
Claims (16)
- Aqueous electrolyte for the electrochemical deposition of palladium or a palladium alloy on a metallic or conductive substrate, which electrolyte comprises organic oligoamine complexes of the metal ions to be deposited in the form of their salts with hydrogencarbonate and/or carbonate as counter ions and a brightener based on an internal salt of a quaternary ammonium group and an acid group.
- Electrolyte according to Claim 1,
characterized in that
it contains palladium in a concentration of 1-100 g/l. - Electrolyte according to one or more of the preceding claims,
characterized in that
it contains further metal ions to be deposited from the group consisting of nickel, cobalt, iron, indium, gold, silver and tin and mixtures thereof in the form of their soluble salts. - Electrolyte according to one or more of the preceding claims,
characterized in that
it contains further metal ions to be deposited in concentrations of ≤ 50 g/l, based on the electrolyte. - Electrolyte according to one or more of the preceding claims,
characterized in that
the organic oligoamine is a diamine, triamine or tetramine derivative having from 2 to 11 carbon atoms. - Electrolyte according to one or more of the preceding claims,
characterized in that
the amount of organic oligoamines in the electrolyte is in the range 0.1-5 mol/l of electrolyte. - Electrolyte according to one or more of the preceding claims,
characterized in that
the pH of the electrolyte is in the range from 3 to 7. - Electrolyte according to Claim 1,
characterized in that
one or more compounds selected from the group consisting of 1-(3-sulfopropyl)-2-vinylpyridinium betaine, 1-(3-sulfopropyl)pyridinium betaine, 1-(2-hydroxy-3-sulfopropyl)pyridinium betaine are used as brightener. - Electrolyte according to one or more of the preceding claims,
characterized in that
the brighteners are present in amounts of from 1 to 10 000 mg/l of electrolyte. - Electrolyte according to one or more of the preceding claims,
characterized in that
no further deposition metal salts having inorganic anions apart from sulfate or nitrate, hydrogencarbonate or carbonate ions or oxide, hydroxide or mixtures thereof are added to the electrolyte. - Process for the electrochemical deposition of palladium or a palladium alloy on a metallic or conductive substrate,
characterized in that
an electrolyte according to one or more of Claims 1 to 10 is used. - Process according to Claim 11,
characterized in that
the metallic substrate is selected from the group consisting of nickel, nickel alloys, gold, silver, copper and copper alloys, iron, iron alloys. - Process according to one or more of Claims 11 and 12,
characterized in that
the process is carried out at a temperature of from 20°C to 80°C. - Process according to one or more of Claims 11 to 13,
characterized in that
current densities in the range from 0.1 to 150 A/dm2 are set for the deposition. - Process according to one or more of claims 11 to 14,
characterized in that
the deposition is carried out using insoluble anodes. - Palladium complexes comprising a divalent palladium cation, one or more bidentate, tridentate or tetradentate amine ligands and a carbonate anion or two hydrogencarbonate anions or a mixture thereof.
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US10263467B2 (en) * | 2012-12-12 | 2019-04-16 | Ls Cable & System Ltd. | Antenna for wireless power, and dual mode antenna comprising same |
CN106661735B (en) * | 2014-09-04 | 2019-12-10 | 日本高纯度化学株式会社 | Palladium plating solution and palladium coating film obtained using the same |
JP6189878B2 (en) * | 2015-01-14 | 2017-08-30 | 松田産業株式会社 | Cyan resistance imparting agent for palladium or palladium alloy plating, plating solution, method for imparting cyan resistance to plating solution |
AT516876B1 (en) * | 2015-03-09 | 2016-11-15 | Ing W Garhöfer Ges M B H | Deposition of decorative palladium-iron alloy coatings on metallic substances |
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JP6663335B2 (en) * | 2016-10-07 | 2020-03-11 | 松田産業株式会社 | Palladium-nickel alloy coating and method for producing the same |
KR101867733B1 (en) * | 2016-12-22 | 2018-06-14 | 주식회사 포스코 | Fe-Ni ALLOY ELECTROLYTES, Fe-Ni ALLOY FOIL HAVING EXCELLENT SURFACE ROUGHNESS AND METHOD FOR THE SAME |
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EP3456870A1 (en) * | 2017-09-13 | 2019-03-20 | ATOTECH Deutschland GmbH | A bath and method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy |
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CN110144729B (en) * | 2019-06-14 | 2020-07-07 | 中国科学院长春应用化学研究所 | Conductive gold-coated polyimide fiber and preparation method thereof |
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