EP2279422A1 - Capteur d'acceleration micromecanique - Google Patents

Capteur d'acceleration micromecanique

Info

Publication number
EP2279422A1
EP2279422A1 EP09745830A EP09745830A EP2279422A1 EP 2279422 A1 EP2279422 A1 EP 2279422A1 EP 09745830 A EP09745830 A EP 09745830A EP 09745830 A EP09745830 A EP 09745830A EP 2279422 A1 EP2279422 A1 EP 2279422A1
Authority
EP
European Patent Office
Prior art keywords
acceleration sensor
seismic mass
mass
deflection
seismic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP09745830A
Other languages
German (de)
English (en)
Inventor
Bernhard Schmid
Roland Hilser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Continental Teves AG and Co OHG
Original Assignee
Continental Teves AG and Co OHG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Continental Teves AG and Co OHG filed Critical Continental Teves AG and Co OHG
Publication of EP2279422A1 publication Critical patent/EP2279422A1/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Definitions

  • the invention relates to a micromechanical acceleration sensor, a method for measuring an acceleration and the use of the acceleration sensor in motor vehicles.
  • the object of the invention has been found to propose a micromechanical acceleration sensor and a method for measuring accelerations, with which accelerations can be detected relatively precisely.
  • micromechanical acceleration sensor according to claim 1 and the method according to claim 8.
  • a resetting device is preferably understood to be a capacitive device, in particular acting according to the electrostatic principle, by means of which the deflection of the seismic mass can be influenced and the deflection of the seismic mass is particularly preferably always or constantly regulated back to a defined deflection value, wherein this defined deflection value very particularly preferably corresponds to a rest position of the seismic mass.
  • the at least one restoring device comprises at least one, in particular substantially flat, electrode and is substantially configured and arranged relative to the first seismic mass that between deflection of the first seismic mass and / or the force acting thereon due to an electrical voltage applied to the reset means and this electrical voltage is a substantially quadratic relationship.
  • the at least one restoring device comprises one or more plate capacitors and very particularly preferably no meander-shaped capacitor structure which has a substantially linear relationship between the deflection of the first seismic mass due to an electrical voltage applied to the restoring device and this electrical voltage.
  • the acceleration sensor is in particular preferably designed such that the restoring tension-acceleration characteristic essentially has the shape or the shape of a root function, at least with regard to the first seismic mass and its at least one restoring device assigned to it.
  • the electrode of the at least one restoring device is preferably arranged in an encapsulation module of the acceleration sensor, this encapsulation module is designed in particular as a lid.
  • the electrode of the at least one restoring device expediently has an angle of less than 20 ° with a base surface or substrate plane of the acceleration sensor and is arranged in particular substantially parallel to the base surface.
  • the acceleration sensor comprise at least two or a multiple of two read-out means symmetrically arranged and / or formed to a geometric or mass center and / or a geometric or mass center axis of the first seismic mass or acceleration sensor.
  • the acceleration sensor preferably has at least two or a multiple of two restoring devices, which are symmetrically arranged and / or formed to a geometric or mass-related center and / or a geometric or mass-related central axis of the first seismic mass or of the acceleration sensor.
  • the at least one restoring device and the at least one read-out device preferably have one or more capacities with the seismic mass assigned to them.
  • This capacitance is designed in particular as at least one plate capacitor, particularly preferably as comb structures with a plurality of plate capacitors. - A -
  • the two or more restoring devices and / or read-out devices of the acceleration sensor are designed such that upon deflection of at least the first seismic mass in a first direction, the at least two restoring devices and / or read-out devices undergo opposite changes in capacitance, ie mutually inverse plate spacing changes.
  • the comb structures of opposite restoring and / or read-out devices engage each other in a staggered manner.
  • These opposing capacity training particularly preferably also have the otherwise symmetrical reset and / or readout devices described above.
  • the first seismic mass is preferably suspended eccentrically with respect to its center of gravity, in particular on at least one torsion spring.
  • the center of gravity of at least the first seismic mass is particularly preferably in a direction with respect to their suspension or. Torsionsachse outsourced pronounced, while the center of gravity is very particularly preferred below or above the suspension or torsion, outsourced or pronounced on a perpendicular to this axis.
  • the center of gravity of at least the first seismic mass is particularly preferably outsourced in two directions with respect to its suspension or torsion axis, with the center of mass being very particular preferably below or above and laterally offset from the suspension or torsion axis outsourced or pronounced.
  • the acceleration sensor is designed as a triaxial sensor and has four seismic masses, which are each attached to at least one torsion spring, wherein the center of gravity of the seismic mass is respectively outsourced to the suspension axis and two seismic masses are suspended so that the Suspension axes are formed at substantially 90 ° relative to the suspension axes of the two other seismic masses.
  • the acceleration sensor comprises an electronic evaluation circuit or is connected to such an evaluation circuit which can detect the accelerations in three directions from the deflections and / or restoring voltages of the four seismic masses.
  • the suspension axes are particularly preferably arranged substantially parallel to an xy-substrate plane, wherein the suspension axes of the four seismic masses are aligned in pairs in the x-direction and y-direction, most preferably the suspension axes or torsion springs are relative to the one mass in front or on the left side and relative to the other mass behind or on the right side in each case the center of mass of the respective seismic mass arranged or formed.
  • the seismic masses are each associated with two readout electrodes, these readout electrodes are assigned or arranged on both sides of the suspension axis or the corresponding torsion spring.
  • At least the first seismic mass are assigned at least two readout devices, which are associated with a suspension axis of the first seismic mass on both sides of this suspension axis and / or on both sides relative to this suspension axis and / or which are arranged in a central region of the associated with the first seismic mass and are arranged correspondingly, and wherein the at least one restoring device of the first seismic mass relative to the suspension axis and / or the central region is assigned to the outside as the readout devices and is arranged accordingly.
  • a resetting device is arranged further outwards than the readout device, particularly preferably on both sides of the readout device.
  • the arrangement of the at least one restoring device in the outer region of the seismic mass causes the required restoring tension due to the relatively large lever, relative to the suspension axis, can remain relatively low, so only relatively low electrical reset voltages are required.
  • the acceleration sensor preferably comprises a control circuit which can adjust the deflection of the seismic mass to a defined deflection value, in particular the deflection value corresponding to a rest position of the seismic mass, by means of at least the restoring device.
  • the least one reading device detects the deflection of the seismic mass preferably according to the capacitive principle.
  • the acceleration sensor has at least two readout devices, which are assigned to the seismic mass in common, whereby a differential detection of the deflection of the seismic mass can be performed and thus in particular an offset capacity need not be considered.
  • the at least one read-out device above and / or below or the seismic mass, based on the substrate plane, since no additional chip area is required for readout or reset structures, and thus the sensor can be made smaller.
  • the acceleration sensor preferably has in each case, in particular in pairs, in front of and behind or above and below at least the first seismic mass at least one restoring device or at least one return electrode, thereby increasing the total capacity of the restoring devices, is doubled in particular, and so lower restoring stresses, so applied to the respective restoring device electrical voltage required.
  • acceleration sensor with reset device is its small design compared to sensors with several seismic masses which are suspended on springs for different measuring ranges or with respect to several sensors. Another advantage is that existing sensor designs can be used, which only need to be extended by the at least one reset device.
  • the measuring range of a low-g sensor can preferably be extended (typically 1-5 g) to an additional, higher measuring range (50-10 0 g).
  • a hitherto partially customary or hitherto necessary, separate high-g acceleration sensor can be dispensed with.
  • At least one restoring device comprising at least one parallel plate capacitor permits the nonlinear provision of the seismic mass or of the acceleration signal. This makes it much easier to realize the conflicting requirements for the highest possible resolution in the low-g range and the largest possible measuring range with the lowest possible reset voltages in the high-g range.
  • the reduction in resolution usually associated with an increase in the measuring range only occurs at high levels in the case of this solution Accelerations on.
  • the non-linear course of the transfer characteristic ensures that a relatively high resolution can be achieved for measurements in the low-g measuring range (1-5 g).
  • the method is preferably developed by the regulation is constantly performed.
  • the acceleration detected by the acceleration sensor is calculated at least from the value of an electrical voltage which is applied to the restoring device for regulating the deflection of the seismic mass to the defined deflection value in the context of the control.
  • the invention also relates to the use of the micromechanical acceleration sensor in motor vehicles, in particular for the combined detection of relatively low accelerations, for example for ESP applications, and relatively large accelerations, for example for occupant protection and airbag applications.
  • FIG. 1 shows an exemplary control system of an acceleration sensor in the form of a block diagram, wherein the acceleration sensor comprises a provisioning control and has a relatively wide measuring range.
  • FIG. 3 shows an exemplary embodiment with a first seismic mass, which has a center of gravity that is outsourced with respect to its suspension axis,
  • FIG. 5 shows the cross section of an exemplary acceleration sensor with two seismic masses 2b, 2c, which are deflected in phase in the z direction by an acceleration
  • Fig. 6 shows the cross section of an exemplary acceleration sensor with top and bottom electrodes and reset means.
  • Reset signal and a linearized signal as a function of acceleration shows the exemplary representation of the resolution of a reset acceleration sensor as a function of the reset voltage at the reset electrodes.
  • Circuit block 3 comprises an A / D converter which converts the analog signal into a digital signal.
  • a / D converter allows direct conversion into a digital bit signal with a given conversion width.
  • Further alternative embodiments are embodied, for example, as sigma-delta converters in which the analog signal is first converted into a pulse-width-modulated signal and then into a parallel digital signal via at least one subsequent decimation stage.
  • Circuit block 4 consists of a regulator structure which controls the output nal to adjust the input signal to 0. This regulator causes the voltage signal fed back to the reset electrodes C3, C4 via the D / A converter 7 and the high-voltage converter 8 to be adjusted such that the force of the acceleration signal acting on the seismic mass is compensated by the electrostatic force acting in C3 and C4 becomes.
  • a sigma-delta converter can also be used here.
  • a combination of the A / D converter with the D / A converter to a so-called "closed-loop signal" delta converter is possible.
  • the correlation for the parallel plate capacitor results in the nonlinear dependence of the restoring voltage on the applied acceleration shown in FIG.
  • the signal is squared by a multiplication and thus restored a linear relationship to the acceleration.
  • the adjustment of the offset and the sensitivity which is advantageous for sensors in this class of accuracy, also takes place.
  • An additional test input makes it possible to deflect the seismic mass via the electrostatic excitation for test purposes. This can be used to detect any loose particles or etching residues.
  • FIG. 2 shows an exemplary embodiment of a micromechanical acceleration sensor which has a seismic mass suspended by springs Ia and Ib on a frame.
  • the acceleration sensor has restoring devices 5aa-5bb with counterelectrodes 5a / bL and 5a / b-R, respectively, designed as capacitive comb structures, with which forces can be provided or generated which counteract the movement of the seismic mass 2.
  • an acting force in particular a caused by a detected acceleration force can be compensated.
  • the four restoring devices 5aa to 5bb are arranged symmetrically to the center of seismic mass 2.
  • the signal readout takes place, for example, twice differentially by means of the two readout devices 3a and 3b, which are symmetrical to the central axis of seismic mass 2 in the x direction and arranged, however, the comb structures offset or counter-interlocking, whereby upon deflection of seismic mass 2 in negative x Direction, exemplified by the arrow, the comb structures of the readout means 3a, 4a undergo a positive capacitance change and the comb structures of the readout means 3b, 4b a negative.
  • FIG. 2b shows an exemplary embodiment with four readout devices 3a-3d, 4a-4d, which are arranged symmetrically in the center of seismic mass 2, but in each case in pairs have opposing or offset intermeshing comb structures, whereby an additional differential measurement is made possible ,
  • the capacity Changes in the dimensions c- and c + of these comb structures upon deflection of the seismic mass 2 in the direction indicated by the arrow are also illustrated.
  • four schematically indicated restoring devices 5aa to 5bb are arranged.
  • FIG. 3 shows the cross-section of an exemplary micromechanical acceleration sensor, comprising a seismic mass 2 with a center of gravity pending to the springs 1, a frame 6, read-out devices 4a, 4b and additional reset devices 5-L, 5-R formed as electrodes.
  • the acceleration sensor is closed by means of a cover or encapsulation module 7, which has electrical feedthroughs 8 with which the electrodes can be connected.
  • an exemplary three-axis acceleration sensor with four seismic masses 2a-d, with respect to the center of gravity of the masses 9a-d outsourced spring suspensions or torsion springs la-d is illustrated.
  • the acceleration sensor comprises an electronic evaluation circuit (not shown) or is connected to such an evaluation circuit which can detect the accelerations in three directions from the deflections and / or restoring voltages of the four seismic masses 2a to 2d.
  • the suspension axes are particularly preferably substantially parallel to an xy Arranged substrate plane, wherein the suspension axes of the four seismic masses in pairs in the x-direction Ia, Id and y-direction Ib, Ic are aligned and with respect to the one mass before Id or left side Ib and based on the other mass behind Ia or on the right-hand side Ic in each case of the center of gravity 9a-9d of the respective seismic mass are arranged or formed.
  • the seismic masses each have two readout electrodes, not shown, associated with these readout electrodes are associated on both sides of the suspension axis or the corresponding torsion spring.
  • Fig. 5 an embodiment is shown in which the seismic masses 2b and 2c, each eccentrically suspended with respect to their center of gravity 9 by means of torsion springs are assigned two readout devices 4a and 4b, the both sides of the suspension axis above the seismic mass 2b, 2c in a central region of these masses are arranged. Further out is each Resetting device 5 associated with the seismic masses and arranged.
  • the arrangement of the restoring devices 5 in the outer region of the seismic masses 2b, 2c causes the required restoring tension due to the relatively large lever, relative to the suspension axis, can remain relatively low, so only relatively low electrical reset voltages are required.
  • FIG. 6 shows an exemplary cross-section of an acceleration sensor with a seismic mass 2 which is eccentric with respect to its center of mass of the torsion spring
  • Seismic mass 2 are each on both sides of the suspension axis or torsion spring 1 readout above 4aa, 4ab and below 4ba, 4bb assigned, relative to the z-direction, perpendicular to the x-y substrate plane. With regard to the readout devices, seismic masses are also above and below both sides

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

L’invention concerne un capteur d’accélération micromécanique comprenant au moins une première masse sismique (2) qui est suspendue de manière déviable, au moins un dispositif de lecture (3a, 4a; 3b, 4b) pour détecter la déviation d’une première masse sismique et au moins un dispositif de rappel (5).
EP09745830A 2008-05-15 2009-05-15 Capteur d'acceleration micromecanique Ceased EP2279422A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008023664 2008-05-15
PCT/EP2009/055942 WO2009138498A1 (fr) 2008-05-15 2009-05-15 Capteur d’accélération micromécanique

Publications (1)

Publication Number Publication Date
EP2279422A1 true EP2279422A1 (fr) 2011-02-02

Family

ID=40921995

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09745830A Ceased EP2279422A1 (fr) 2008-05-15 2009-05-15 Capteur d'acceleration micromecanique

Country Status (4)

Country Link
US (1) US20110113880A1 (fr)
EP (1) EP2279422A1 (fr)
DE (1) DE102009021567A1 (fr)
WO (1) WO2009138498A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4738521B2 (ja) * 2009-09-24 2011-08-03 株式会社東芝 電子機器及びデータ送受信システム
DE102010039236B4 (de) * 2010-08-12 2023-06-29 Robert Bosch Gmbh Sensoranordnung und Verfahren zum Abgleich einer Sensoranordnung
US9229026B2 (en) 2011-04-13 2016-01-05 Northrop Grumman Guaidance and Electronics Company, Inc. Accelerometer systems and methods
DE102013217478A1 (de) 2013-09-03 2015-03-05 Bert Grundmann Beschleunigungssensor, Anordnung und Verfahren zum Detektieren eines Haftungsverlusts eines Fahrzeugrades
DE102015000158A1 (de) * 2015-01-05 2016-07-07 Northrop Grumman Litef Gmbh Beschleunigungssensor mit reduziertem Bias und Herstellungsverfahren eines Beschleunigungssensors
JP6309113B2 (ja) * 2015-05-27 2018-04-11 株式会社日立製作所 加速度センサシステム
GB2555804B (en) 2016-11-09 2022-02-02 Atlantic Inertial Systems Ltd Accelerometer control
DE102019200839A1 (de) * 2019-01-24 2020-07-30 Robert Bosch Gmbh Mikromechanischer Inertialsensor
JP6870761B2 (ja) * 2019-05-15 2021-05-12 株式会社村田製作所 ロバストなｚ軸加速度センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003104823A1 (fr) * 2002-06-11 2003-12-18 Conti Temic Microelectronic Gmbh Capteur d'acceleration monolithique a plusieurs axes
US20060156818A1 (en) * 2001-03-08 2006-07-20 Konrad Kapser Micromechanical capacitive acceleration sensor

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992003740A1 (fr) * 1990-08-17 1992-03-05 Analog Devices, Inc. Accelerometre monolithique
JP2938989B2 (ja) * 1991-01-29 1999-08-25 キヤノン株式会社 角加速度センサ
US5565625A (en) * 1994-12-01 1996-10-15 Analog Devices, Inc. Sensor with separate actuator and sense fingers
US5587518A (en) * 1994-12-23 1996-12-24 Ford Motor Company Accelerometer with a combined self-test and ground electrode
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
US6107691A (en) * 1995-11-14 2000-08-22 Grow International Corp. Methods for utilizing the electrical and non electrical outputs of fuel cell powered vehicles
US5767584A (en) * 1995-11-14 1998-06-16 Grow International Corp. Method for generating electrical power from fuel cell powered cars parked in a conventional parking lot
US5880369A (en) * 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
DE19639946B4 (de) * 1996-09-27 2006-09-21 Robert Bosch Gmbh Mikromechanisches Bauelement
US6196067B1 (en) * 1998-05-05 2001-03-06 California Institute Of Technology Silicon micromachined accelerometer/seismometer and method of making the same
US6543286B2 (en) * 2001-01-26 2003-04-08 Movaz Networks, Inc. High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array
US6829937B2 (en) * 2002-06-17 2004-12-14 Vti Holding Oy Monolithic silicon acceleration sensor
WO2004027435A1 (fr) * 2002-09-18 2004-04-01 Carnegie Mellon University Mems a autotest incorpore
US6871992B2 (en) * 2002-09-23 2005-03-29 Seong Woong Kim Brake light system
FI119528B (fi) * 2003-02-11 2008-12-15 Vti Technologies Oy Kapasitiivinen kiihtyvyysanturirakenne
US6841992B2 (en) * 2003-02-18 2005-01-11 Honeywell International, Inc. MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement
EP1603830B1 (fr) * 2003-02-28 2016-10-05 Atlantic Inertial Systems Limited Accelerometre
US6935175B2 (en) * 2003-11-20 2005-08-30 Honeywell International, Inc. Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
WO2006121761A2 (fr) * 2005-05-05 2006-11-16 Afs Trinity Power Corporation Vehicule hybride enfichable a stockage d'energie rapide
US7337671B2 (en) * 2005-06-03 2008-03-04 Georgia Tech Research Corp. Capacitive microaccelerometers and fabrication methods
FI119299B (fi) * 2005-06-17 2008-09-30 Vti Technologies Oy Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi
US7740092B2 (en) * 2005-09-23 2010-06-22 Afs Trinity Power Corporation Method and apparatus for power electronics and control of plug-in hybrid propulsion with fast energy storage
JP5117716B2 (ja) * 2006-02-14 2013-01-16 セイコーインスツル株式会社 力学量センサ
FR2898683B1 (fr) * 2006-03-14 2008-05-23 Commissariat Energie Atomique Accelerometre triaxial a membrane
US7578189B1 (en) * 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
US20070282495A1 (en) * 2006-05-11 2007-12-06 University Of Delaware System and method for assessing vehicle to grid (v2g) integration
US7552637B2 (en) * 2006-09-19 2009-06-30 Honeywell International Inc. Torque driving circuit
US7610809B2 (en) * 2007-01-18 2009-11-03 Freescale Semiconductor, Inc. Differential capacitive sensor and method of making same
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
US8116915B2 (en) * 2008-03-03 2012-02-14 University Of Delaware Methods and apparatus using hierarchical priority and control algorithms for grid-integrated vehicles
DE102008017156A1 (de) * 2008-04-03 2009-10-08 Continental Teves Ag & Co. Ohg Mikromechanischer Beschleunigungssensor
DE102008040855B4 (de) * 2008-07-30 2022-05-25 Robert Bosch Gmbh Dreiachsiger Beschleunigungssensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060156818A1 (en) * 2001-03-08 2006-07-20 Konrad Kapser Micromechanical capacitive acceleration sensor
WO2003104823A1 (fr) * 2002-06-11 2003-12-18 Conti Temic Microelectronic Gmbh Capteur d'acceleration monolithique a plusieurs axes

Also Published As

Publication number Publication date
US20110113880A1 (en) 2011-05-19
WO2009138498A1 (fr) 2009-11-19
DE102009021567A1 (de) 2009-12-31
WO2009138498A9 (fr) 2010-01-21

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