EP2269425A1 - Dispositif de production d'un plasma a la pression atmospherique - Google Patents

Dispositif de production d'un plasma a la pression atmospherique

Info

Publication number
EP2269425A1
EP2269425A1 EP09731651A EP09731651A EP2269425A1 EP 2269425 A1 EP2269425 A1 EP 2269425A1 EP 09731651 A EP09731651 A EP 09731651A EP 09731651 A EP09731651 A EP 09731651A EP 2269425 A1 EP2269425 A1 EP 2269425A1
Authority
EP
European Patent Office
Prior art keywords
plasma
piezoelectric element
electrode
cathode
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09731651A
Other languages
German (de)
English (en)
Other versions
EP2269425B1 (fr
Inventor
Michael Bisges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maschinenfabrik Reinhausen GmbH
Scheubeck GmbH and Co
Original Assignee
Maschinenfabrik Reinhausen GmbH
Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maschinenfabrik Reinhausen GmbH, Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG filed Critical Maschinenfabrik Reinhausen GmbH
Publication of EP2269425A1 publication Critical patent/EP2269425A1/fr
Application granted granted Critical
Publication of EP2269425B1 publication Critical patent/EP2269425B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H05H1/2481—Generating plasma using acoustic pressure discharges the plasma being activated using piezoelectric actuators

Definitions

  • the invention relates to a device for producing an atmospheric-pressure plasma.
  • a device for producing an atmospheric-pressure plasma is already known from EP 0761415 A1.
  • a collimated jet of a reactive medium is generated by a plasma discharge and a working gas.
  • the electrical discharge takes place in the form of an arc discharge.
  • an arc extends directly between the two electrodes of the device One arranged in a nozzle tube centric pin electrode on the one hand and acting as counter electrode mouth of the Dusenrohrs on the other
  • the object of the invention is to provide a device for generating an atmospheric pressure plasma, which does not have these disadvantages and in particular can also be operated with low voltage
  • the general idea of the invention is to use a piezoelectric element with primary and secondary regions for generating the plasma.
  • the plasma element is driven by low voltage and high frequency.
  • the plasma is ignited by the rim extension on the surface of the piezoelectric element
  • the plasma is transported through the counterelectrode and a gas flow. Due to the gas flow, the plasma leaves the device
  • a piezoelectric element for producing a plasma is already known from the publication Teranishi, Suzuki, A novel generation method of dielectric discharge and ozone production using a piezoelectric transformer, Japanese Journal of Applied Physics, 2004, S 6733-6739
  • piezoelectric transformer Another arrangement, also referred to as a piezoelectric transformer, with such a piezoelectric element having a primary and a secondary region, there designated as an excitation zone and high-voltage zone, is known from DE 10 2005 032 890 A1
  • the piezoelectric element serves to generate a plasma discharge on the surface of the secondary region.
  • a counterelectrode is provided in the invention, so that an arc discharge is produced according to the invention and not, as in the prior art, a planar plasma on the surface of the surface Secondary region of the piezoelectric element
  • the cathode in contrast to the aforementioned EP 0761415 A1, is not designed as a passive element, but actively transforms an applied low voltage into a high voltage
  • the device according to the invention has a number of advantages over the known solutions. First of all, it requires only a low operating voltage in the range of preferably 5 230 V. Furthermore, it is characterized by a low plasma temperature, so sputtering and burning off of the cathode are virtually impossible the device according to the invention inexpensive to produce, since no high-voltage source is required and also has only a small structural size
  • FIG. 2 shows a first device according to the invention
  • Figure 4 shows a third device according to the invention with cascading
  • FIGS. 1 a) and 1 b a rod-shaped piezoelectric element 1 with a contact electrode 2 and a further contact electrode 4 on the rear side of the pumping region and an adjoining secondary region 3 is shown
  • FIGS. 1c) and 1 d) show a tubular piezoelectric element 5 with an inner electrode 6 and an outer electrode 7 in the pump region and a secondary region 8
  • FIG. 2 shows a first device 10 according to the invention.
  • the piezoelectric element acting as a cathode has a contact electrode 1 1 on its side, as described above, and a further contact electrode 12 on the back, on the opposite side, which can not be seen in this illustration Also shown is the secondary region 13 of the piezoelectric element, in which a Flumble ⁇ entladung forms in a known per se. For this, the piezoelectric element via the contact electrodes 11, 12 connected to a low voltage source 22.
  • This low voltage source 22 supplies a high frequency low voltage in the range of preferably 5 200 V by the applied low voltage in P ⁇ mar Berlin of the piezoelectric element is generated in the secondary region 13, a high voltage, as a result, the described surface discharge forms on the surface of the secondary side 13 Furthermore, the resulting plasma discharge 14 is shown between the secondary region 13, as Ele
  • the device has an Aust ⁇ ttsduse 16 with a Aust ⁇ ttso réelle 17, through which the plasma outlet 18 takes place on the opposite side of the plasma outlet 18 is a supply 24 for the working gas, while the gas flow 25 is indicated by the arrow Also shown is the supply line 23 from the low-voltage source 22 to the piezoelectric element
  • the plasma gas which is formed in the plasma discharge 14 in the form of an arc discharge, blown out of Aust ⁇ ttsduse 16 in the form of a jet-shaped plasma exit 18.
  • the plasma-generating device is enclosed by a housing 20 with an insulating housing wall 21
  • FIG. 3 shows a further embodiment of the device according to the invention.
  • a plasma generator 10 having a tubular piezoelectric element 30 is provided as a cathode for generating a plasma discharge 34.
  • the piezoelectric element has a secondary region 32, at the tubular inner surface of which the plasma discharge is produced a counter-electrode 33
  • an arc discharge is formed, which is blown out in the form of a plasma jet 35 with the gas flow
  • FIG. 4 shows a cascading (multiple) arrangement 40 of a plurality of plasma generators 41 with a piezoelectric element as the cathode electrode.
  • the individual plasma generators 41 are supplied with a working gas via a central gas supply 44.
  • a plasma jet 43 exits through the nozzles, the elements being particularly advantageous in this way are arranged so that a uniform plasma distribution 45 results on a substrate 42 to be treated
  • FIG. 5a shows a plan view of such a cascading arrangement of plasma generators 50 with piezo elements.
  • the individual plasma generators which are several devices according to the invention, are arranged side by side and one behind the other in order to allow as full as possible plasma treatment.
  • FIG. 5b shows a side view of a further cascading arrangement of plasma generators with piezo elements 51.
  • the plasma is due to an arc discharge between two electrodes, i. H. a spark gap is formed.
  • the secondary region of the piezoceramic each forms the one electrode; namely, the cathode, the counter electrode is at ground potential.
  • the cathode is not, as known from the prior art, formed as a passive element, such as a rod-shaped, metallic electrode in the center of a tube, but represents an active element in which a (applied to the primary area) low voltage in a high voltage (in the secondary area) is transformed.
  • the device according to the invention has for the first time succeeded in combining the advantages of an arc discharge and, as a consequence of a blown-out plasma jet, with the advantages of a piezo element with primary and secondary regions.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Acoustics & Sound (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un dispositif de production d'un plasma à la pression atmosphérique à l'aide d'une décharge en arc. Contrairement à l'état de la technique connu jusqu'ici, la décharge en arc est produite à l'aide d'un élément piézoélectrique jouant le rôle de cathode, avec un côté primaire et un côté secondaire.
EP09731651.7A 2008-04-15 2009-03-10 Dispositif de production d'un plasma a pression atmospherique Not-in-force EP2269425B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008018827A DE102008018827B4 (de) 2008-04-15 2008-04-15 Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas
PCT/EP2009/001692 WO2009127297A1 (fr) 2008-04-15 2009-03-10 Dispositif de production d'un plasma à la pression atmosphérique

Publications (2)

Publication Number Publication Date
EP2269425A1 true EP2269425A1 (fr) 2011-01-05
EP2269425B1 EP2269425B1 (fr) 2017-05-10

Family

ID=40756323

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09731651.7A Not-in-force EP2269425B1 (fr) 2008-04-15 2009-03-10 Dispositif de production d'un plasma a pression atmospherique

Country Status (4)

Country Link
EP (1) EP2269425B1 (fr)
DE (1) DE102008018827B4 (fr)
ES (1) ES2636846T3 (fr)
WO (1) WO2009127297A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008008980U1 (de) 2008-07-04 2008-09-04 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas
DE102010027795A1 (de) 2010-04-15 2011-10-20 BSH Bosch und Siemens Hausgeräte GmbH Hausgerät mit Plasmagenerator und Verfahren zu seinem Betrieb
DE102011111884B3 (de) 2011-08-31 2012-08-30 Martin Weisgerber Verfahren und Vorrichtung zur Erzeugung von thermodynamisch kaltem Mikrowellenplasma
CN102523674B (zh) * 2011-11-30 2016-04-20 华中科技大学 手持式等离子体电筒
DE102012103938A1 (de) 2012-05-04 2013-11-07 Reinhausen Plasma Gmbh Plasmamodul für eine Plasmaerzeugungsvorrichtung und Plasmaerzeugungsvorrichtung
DE102012104137A1 (de) 2012-05-11 2013-11-14 Maschinenfabrik Reinhausen Gmbh Feldgesteuerter Verbundisolator
DE102013100617B4 (de) 2013-01-22 2016-08-25 Epcos Ag Vorrichtung zur Erzeugung eines Plasmas und Handgerät mit der Vorrichtung
DE102013107448B4 (de) 2013-07-15 2016-11-24 Relyon Plasma Gmbh Anordnung zur Keimreduktion mittels Plasma
CN103491699A (zh) * 2013-09-30 2014-01-01 东南大学 一种并联电容式低温等离子体射流产生装置
DE102013112316A1 (de) 2013-11-08 2015-05-13 Epcos Ag Piezoelektrischer Transformator und Gegenelektrode
DE102015113656A1 (de) * 2015-08-18 2017-02-23 Epcos Ag Plasmagenerator und Verfahren zur Einstellung eines Ionenverhältnisses
DE102015119574A1 (de) * 2015-11-12 2017-05-18 Epcos Ag Ansteuerschaltung und Verfahren zur Ansteuerung eines piezoelektrischen Transformators
DE102016102585A1 (de) * 2016-02-15 2017-08-17 Epcos Ag Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas
DE102016104490B3 (de) 2016-03-11 2017-05-24 Epcos Ag Vorrichtung und Verfahren zur Erzeugung eines nichtthermischen Atmosphärendruck-Plasmas
DE102017118652A1 (de) 2017-08-16 2019-02-21 Hochschule Für Angewandte Wissenschaft Und Kunst Hildesheim/Holzminden/Göttingen Plasmageneratormodul und dessen Verwendung
BR112022021330A2 (pt) * 2020-04-24 2022-12-13 Sekisui Chemical Co Ltd Aparelho de plasma e irradiador

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2830274A (en) * 1954-01-04 1958-04-08 Gen Electric Electromechanical transducer
DE19532412C2 (de) 1995-09-01 1999-09-30 Agrodyn Hochspannungstechnik G Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken
JP3687881B2 (ja) * 1997-07-08 2005-08-24 富士通株式会社 放電管及び放電管の放電方法
WO1999018596A1 (fr) * 1997-10-07 1999-04-15 Koninklijke Philips Electronics N.V. Lampe a decharge a côte secondaire de transformateur piezo-electrique faisant office d'electrode
JP2004237135A (ja) * 2003-02-03 2004-08-26 Nissan Motor Co Ltd 触媒素子及びこれを用いた排気ガス浄化装置
DE102005032890B4 (de) 2005-07-14 2009-01-29 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung von Atmosphärendruck-Plasmen

Non-Patent Citations (1)

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Title
See references of WO2009127297A1 *

Also Published As

Publication number Publication date
ES2636846T3 (es) 2017-10-09
DE102008018827A1 (de) 2009-10-29
EP2269425B1 (fr) 2017-05-10
DE102008018827B4 (de) 2010-05-12
WO2009127297A1 (fr) 2009-10-22

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