EP2246573A3 - Safety system for high vacuum system - Google Patents

Safety system for high vacuum system Download PDF

Info

Publication number
EP2246573A3
EP2246573A3 EP10161376A EP10161376A EP2246573A3 EP 2246573 A3 EP2246573 A3 EP 2246573A3 EP 10161376 A EP10161376 A EP 10161376A EP 10161376 A EP10161376 A EP 10161376A EP 2246573 A3 EP2246573 A3 EP 2246573A3
Authority
EP
European Patent Office
Prior art keywords
connection flange
opening
pipe section
high vacuum
safety
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10161376A
Other languages
German (de)
French (fr)
Other versions
EP2246573A2 (en
EP2246573B1 (en
Inventor
Marcel Kohler
Herbert Vogt
Urs Frick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HSR AG
Original Assignee
HSR AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HSR AG filed Critical HSR AG
Publication of EP2246573A2 publication Critical patent/EP2246573A2/en
Publication of EP2246573A3 publication Critical patent/EP2246573A3/en
Application granted granted Critical
Publication of EP2246573B1 publication Critical patent/EP2246573B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Eine Schutzvorrichtung für Hochvakuumpumpen, insbesondere für Turbomolekularpumpen, vor schädlichen, insbesondere vor kondensierbaren Gasen umfasst ein Rohrstück (13)mit einem eine erste Öffnung (16) aufweisenden ersten Anschlussflansch (15) und einem eine zweite Öffnung (18) aufweisenden zweiten Anschlussflansch (17). Die Anschlussflansche (15,17) sind durch einen einen Durchgang (21) definierenden Rohrabschnitt miteinander verbunden. Zwischen dem ersten und zweiten Anschlussflansch (17) ist ein eine dritte Öffnung (20) aufweisenden dritter Anschlussflansch (19) vorgesehen. In einem Rohrabschnitt mit erweiterten Querschnittsbereich (33) ist eine Mehrzahl von in Abstand voneinander angeordneten Umlenkblechen (23) angeordnet.

Figure imgaf001
A protective device for high-vacuum pumps, in particular for turbomolecular pumps, against damaging, in particular against condensable gases comprising a pipe section (13) having a first opening (16) having a first connection flange (15) and a second opening (18) having a second connection flange (17) , The connecting flanges (15, 17) are connected to one another by a pipe section defining a passage (21). Between the first and second connection flange (17) there is provided a third connection flange (19) having a third opening (20). In a pipe section with extended cross-sectional area (33) a plurality of spaced-apart baffles (23) is arranged.
Figure imgaf001
EP20100161376 2009-04-28 2010-04-28 Safety system for high vacuum system Not-in-force EP2246573B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH6682009 2009-04-28

Publications (3)

Publication Number Publication Date
EP2246573A2 EP2246573A2 (en) 2010-11-03
EP2246573A3 true EP2246573A3 (en) 2011-12-07
EP2246573B1 EP2246573B1 (en) 2013-02-13

Family

ID=42154735

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20100161376 Not-in-force EP2246573B1 (en) 2009-04-28 2010-04-28 Safety system for high vacuum system

Country Status (1)

Country Link
EP (1) EP2246573B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011100311A1 (en) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Device with a guide structure
CN104279140B (en) * 2013-07-12 2018-08-24 西港能源有限公司 Cryogenic pump flange

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106186A (en) * 1981-12-18 1983-06-24 Hitachi Ltd Trap device
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US6309184B1 (en) * 1998-10-19 2001-10-30 Saes Getters S.P.A. Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line
US6368371B1 (en) * 1998-01-22 2002-04-09 Ebara Corporation Trap device and trap system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106186A (en) * 1981-12-18 1983-06-24 Hitachi Ltd Trap device
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US6368371B1 (en) * 1998-01-22 2002-04-09 Ebara Corporation Trap device and trap system
US6309184B1 (en) * 1998-10-19 2001-10-30 Saes Getters S.P.A. Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line

Also Published As

Publication number Publication date
EP2246573A2 (en) 2010-11-03
EP2246573B1 (en) 2013-02-13

Similar Documents

Publication Publication Date Title
EP1732062A3 (en) Silencer
EP2372209A3 (en) Exhaust gas pipe for a motor vehicle and exhaust gas unit
EP2485007A3 (en) Heat exchanger with finned tubes
EP2787171A3 (en) Blade grid with side wall contours and turbomachine
EP2631488A3 (en) Vacuum pump
EP2395235A3 (en) Wind turbine with a drop shaped housing
EP1906013A3 (en) Metering pump, spraying device for spraying agents and method for operating such a spraying device
EP2199722A3 (en) Exhaust gas cooler
EP2772650A3 (en) Vacuum pump
EP3225781A3 (en) Blade channel, blade row and turbomachine
EP2431569A3 (en) Steam turbine
EP2161429A3 (en) Suction module for a combustion engine
EP2246573A3 (en) Safety system for high vacuum system
EP4095387A3 (en) Scroll vacuum pump with integrated pressure sensor
EP2159492A3 (en) Locking device for a planar element of a vapour extractor hood
EP2660174A3 (en) Device and method for creating and/or for transporting a layer transport flow of flat, flexible objects
CH701997A8 (en) Turbomachine with a shaped honeycomb seal.
DE102010028732A1 (en) Labyrinth seal for a turbomachine
EP2444656A3 (en) Securing element and transport frame for elements of a wind power assembly
EP3421691A3 (en) Modular locking cylinder
DE102010053078A1 (en) Exhaust gas supercharger, has connecting element formed between exhaust gas guide section and bearing portion, and bearing section and exhaust system portion comprising connector that is formed in region of connection joint
EP2221472A3 (en) Device for the production of energy from a fluid flow
EP2884026A3 (en) Connection profile of a structure as offshore or onshore structure and flange connection on such a structure and method for erecting a structure using the connection profile
EP2166243A3 (en) Coupling membrane and coupling comprising such membrane
EP1953441A3 (en) Tube with an attachment piece

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA ME RS

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA ME RS

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 27/02 20060101ALI20111028BHEP

Ipc: F04B 37/08 20060101ALI20111028BHEP

Ipc: F04D 29/42 20060101ALI20111028BHEP

Ipc: F04D 19/04 20060101AFI20111028BHEP

17P Request for examination filed

Effective date: 20120606

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 27/02 20060101ALI20120910BHEP

Ipc: F04B 37/08 20060101ALI20120910BHEP

Ipc: F04D 19/04 20060101AFI20120910BHEP

Ipc: F04D 29/42 20060101ALI20120910BHEP

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 596645

Country of ref document: AT

Kind code of ref document: T

Effective date: 20130215

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502010002292

Country of ref document: DE

Effective date: 20130411

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: RIEDERER HASLER AND PARTNER PATENTANWAELTE AG, LI

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20130213

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130613

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130513

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130513

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130524

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130613

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130514

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

BERE Be: lapsed

Owner name: HSR AG

Effective date: 20130430

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

26N No opposition filed

Effective date: 20131114

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130430

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502010002292

Country of ref document: DE

Effective date: 20131114

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130428

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20130213

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130428

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20100428

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 7

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 596645

Country of ref document: AT

Kind code of ref document: T

Effective date: 20150428

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150428

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 8

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20210420

Year of fee payment: 12

Ref country code: FR

Payment date: 20210423

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20210421

Year of fee payment: 12

Ref country code: CH

Payment date: 20210421

Year of fee payment: 12

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502010002292

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20220428

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220430

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220428

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220430

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20221103

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220430