EP2246573A3 - Schutzvorrichtung für Hochvakuumpumpen - Google Patents

Schutzvorrichtung für Hochvakuumpumpen Download PDF

Info

Publication number
EP2246573A3
EP2246573A3 EP10161376A EP10161376A EP2246573A3 EP 2246573 A3 EP2246573 A3 EP 2246573A3 EP 10161376 A EP10161376 A EP 10161376A EP 10161376 A EP10161376 A EP 10161376A EP 2246573 A3 EP2246573 A3 EP 2246573A3
Authority
EP
European Patent Office
Prior art keywords
connection flange
opening
pipe section
high vacuum
safety
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10161376A
Other languages
English (en)
French (fr)
Other versions
EP2246573A2 (de
EP2246573B1 (de
Inventor
Marcel Kohler
Herbert Vogt
Urs Frick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HSR AG
Original Assignee
HSR AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HSR AG filed Critical HSR AG
Publication of EP2246573A2 publication Critical patent/EP2246573A2/de
Publication of EP2246573A3 publication Critical patent/EP2246573A3/de
Application granted granted Critical
Publication of EP2246573B1 publication Critical patent/EP2246573B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Eine Schutzvorrichtung für Hochvakuumpumpen, insbesondere für Turbomolekularpumpen, vor schädlichen, insbesondere vor kondensierbaren Gasen umfasst ein Rohrstück (13)mit einem eine erste Öffnung (16) aufweisenden ersten Anschlussflansch (15) und einem eine zweite Öffnung (18) aufweisenden zweiten Anschlussflansch (17). Die Anschlussflansche (15,17) sind durch einen einen Durchgang (21) definierenden Rohrabschnitt miteinander verbunden. Zwischen dem ersten und zweiten Anschlussflansch (17) ist ein eine dritte Öffnung (20) aufweisenden dritter Anschlussflansch (19) vorgesehen. In einem Rohrabschnitt mit erweiterten Querschnittsbereich (33) ist eine Mehrzahl von in Abstand voneinander angeordneten Umlenkblechen (23) angeordnet.
EP20100161376 2009-04-28 2010-04-28 Schutzvorrichtung für Hochvakuumpumpen Not-in-force EP2246573B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH6682009 2009-04-28

Publications (3)

Publication Number Publication Date
EP2246573A2 EP2246573A2 (de) 2010-11-03
EP2246573A3 true EP2246573A3 (de) 2011-12-07
EP2246573B1 EP2246573B1 (de) 2013-02-13

Family

ID=42154735

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20100161376 Not-in-force EP2246573B1 (de) 2009-04-28 2010-04-28 Schutzvorrichtung für Hochvakuumpumpen

Country Status (1)

Country Link
EP (1) EP2246573B1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011100311A1 (de) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
CN104279140B (zh) 2013-07-12 2018-08-24 西港能源有限公司 低温泵法兰

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106186A (ja) * 1981-12-18 1983-06-24 Hitachi Ltd トラツプ装置
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US6309184B1 (en) * 1998-10-19 2001-10-30 Saes Getters S.P.A. Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line
US6368371B1 (en) * 1998-01-22 2002-04-09 Ebara Corporation Trap device and trap system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106186A (ja) * 1981-12-18 1983-06-24 Hitachi Ltd トラツプ装置
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US6368371B1 (en) * 1998-01-22 2002-04-09 Ebara Corporation Trap device and trap system
US6309184B1 (en) * 1998-10-19 2001-10-30 Saes Getters S.P.A. Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line

Also Published As

Publication number Publication date
EP2246573A2 (de) 2010-11-03
EP2246573B1 (de) 2013-02-13

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