EP2228540A3 - Anordnung mit Vakuumpumpe - Google Patents

Anordnung mit Vakuumpumpe Download PDF

Info

Publication number
EP2228540A3
EP2228540A3 EP10002262.3A EP10002262A EP2228540A3 EP 2228540 A3 EP2228540 A3 EP 2228540A3 EP 10002262 A EP10002262 A EP 10002262A EP 2228540 A3 EP2228540 A3 EP 2228540A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
chamber
flange
assembly
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10002262.3A
Other languages
English (en)
French (fr)
Other versions
EP2228540B1 (de
EP2228540A2 (de
Inventor
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2228540A2 publication Critical patent/EP2228540A2/de
Publication of EP2228540A3 publication Critical patent/EP2228540A3/de
Application granted granted Critical
Publication of EP2228540B1 publication Critical patent/EP2228540B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Anordnung mit einer Vakuumpumpe (1; 100)), welche einen Pumpenflansch (10; 110; 70) aufweist, einer Kammer (2), welche einen Kammerflansch (20; 120) aufweist, mit einer Flanschverbindung zur vakuumdichten Verbindung von Kammer und Vakuumpumpe. Um die Montierbarkeit zu erhöhen und gleichzeitig eine einfache Konstruktion vorzustellen, wird vorgeschlagen, dass die Anordnung eine Kraftübertragungsstruktur (65; 165) umfasst, welche eine Kraft von einer Einleitungsstelle (56; 156) an wenigstens einen in der Flanschverbindung liegenden Wirkpunkt (59; 159) überträgt.
EP10002262.3A 2009-03-14 2010-03-05 Anordnung mit Vakuumpumpe Active EP2228540B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910013244 DE102009013244A1 (de) 2009-03-14 2009-03-14 Anordnung mit Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2228540A2 EP2228540A2 (de) 2010-09-15
EP2228540A3 true EP2228540A3 (de) 2014-07-16
EP2228540B1 EP2228540B1 (de) 2016-08-03

Family

ID=42154832

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10002262.3A Active EP2228540B1 (de) 2009-03-14 2010-03-05 Anordnung mit Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP2228540B1 (de)
DE (1) DE102009013244A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2516969B (en) * 2013-08-09 2017-04-19 Edwards Ltd Vacuum system securing devices
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102013222167B4 (de) 2013-10-31 2024-07-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3026303B1 (de) * 2014-11-28 2021-01-06 Pfeiffer Vacuum Gmbh Vakuumpumpe, vakuumzubehör und dichtung zu dessen abdichtung
EP3702622B1 (de) * 2019-02-26 2026-02-25 Pfeiffer Vacuum Gmbh Vakuumsystem
EP3763944B1 (de) * 2020-03-31 2022-09-07 Pfeiffer Vacuum Technology AG Befestigungsschiene mit exzentereinrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1090231A1 (de) * 1998-05-26 2001-04-11 Leybold Vakuum GmbH Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
US20080309071A1 (en) * 2007-06-15 2008-12-18 Varian, Inc. Split joint for vacuum pumps and method for obtaining thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1090231A1 (de) * 1998-05-26 2001-04-11 Leybold Vakuum GmbH Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
US20080309071A1 (en) * 2007-06-15 2008-12-18 Varian, Inc. Split joint for vacuum pumps and method for obtaining thereof

Also Published As

Publication number Publication date
EP2228540B1 (de) 2016-08-03
EP2228540A2 (de) 2010-09-15
DE102009013244A1 (de) 2010-09-16

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