EP2211124A4 - Cryogenic refrigerator and control method therefor - Google Patents
Cryogenic refrigerator and control method thereforInfo
- Publication number
- EP2211124A4 EP2211124A4 EP08851240.5A EP08851240A EP2211124A4 EP 2211124 A4 EP2211124 A4 EP 2211124A4 EP 08851240 A EP08851240 A EP 08851240A EP 2211124 A4 EP2211124 A4 EP 2211124A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- control method
- method therefor
- cryogenic refrigerator
- cryogenic
- refrigerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/06—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point using expanders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/003—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the kind of cold generation within the liquefaction unit for compensating heat leaks and liquid production
- F25J1/0047—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the kind of cold generation within the liquefaction unit for compensating heat leaks and liquid production using an "external" refrigerant stream in a closed vapor compression cycle
- F25J1/005—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the kind of cold generation within the liquefaction unit for compensating heat leaks and liquid production using an "external" refrigerant stream in a closed vapor compression cycle by expansion of a gaseous refrigerant stream with extraction of work
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/006—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the refrigerant fluid used
- F25J1/0062—Light or noble gases, mixtures thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/006—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures characterised by the refrigerant fluid used
- F25J1/0062—Light or noble gases, mixtures thereof
- F25J1/0065—Helium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
- F25J1/0244—Operation; Control and regulation; Instrumentation
- F25J1/0245—Different modes, i.e. 'runs', of operation; Process control
- F25J1/0248—Stopping of the process, e.g. defrosting or deriming, maintenance; Back-up mode or systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
- F25J1/0257—Construction and layout of liquefaction equipments, e.g. valves, machines
- F25J1/0275—Construction and layout of liquefaction equipments, e.g. valves, machines adapted for special use of the liquefaction unit, e.g. portable or transportable devices
- F25J1/0276—Laboratory or other miniature devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
- F25J1/02—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures requiring the use of refrigeration, e.g. of helium or hydrogen ; Details and kind of the refrigeration system used; Integration with other units or processes; Controlling aspects of the process
- F25J1/0243—Start-up or control of the process; Details of the apparatus used; Details of the refrigerant compression system used
- F25J1/0279—Compression of refrigerant or internal recycle fluid, e.g. kind of compressor, accumulator, suction drum etc.
- F25J1/0285—Combination of different types of drivers mechanically coupled to the same refrigerant compressor, possibly split on multiple compressor casings
- F25J1/0288—Combination of different types of drivers mechanically coupled to the same refrigerant compressor, possibly split on multiple compressor casings using work extraction by mechanical coupling of compression and expansion of the refrigerant, so-called companders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1401—Ericsson or Ericcson cycles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/16—Receivers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2500/00—Problems to be solved
- F25B2500/27—Problems to be solved characterised by the stop of the refrigeration cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/25—Control of valves
- F25B2600/2519—On-off valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B45/00—Arrangements for charging or discharging refrigerant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2245/00—Processes or apparatus involving steps for recycling of process streams
- F25J2245/02—Recycle of a stream in general, e.g. a by-pass stream
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2270/00—Refrigeration techniques used
- F25J2270/14—External refrigeration with work-producing gas expansion loop
- F25J2270/16—External refrigeration with work-producing gas expansion loop with mutliple gas expansion loops of the same refrigerant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2270/00—Refrigeration techniques used
- F25J2270/90—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
- F25J2270/912—Liquefaction cycle of a low-boiling (feed) gas in a cryocooler, i.e. in a closed-loop refrigerator
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Separation By Low-Temperature Treatments (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007298812A JP2009121786A (en) | 2007-11-19 | 2007-11-19 | Cryogenic refrigerator and control method for it |
PCT/JP2008/070108 WO2009066565A1 (en) | 2007-11-19 | 2008-11-05 | Cryogenic refrigerator and control method therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2211124A1 EP2211124A1 (en) | 2010-07-28 |
EP2211124A4 true EP2211124A4 (en) | 2015-07-22 |
Family
ID=40667390
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08851240.5A Withdrawn EP2211124A4 (en) | 2007-11-19 | 2008-11-05 | Cryogenic refrigerator and control method therefor |
Country Status (6)
Country | Link |
---|---|
US (1) | US20100275616A1 (en) |
EP (1) | EP2211124A4 (en) |
JP (1) | JP2009121786A (en) |
KR (1) | KR101161339B1 (en) |
CN (1) | CN101861500B (en) |
WO (1) | WO2009066565A1 (en) |
Families Citing this family (51)
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US10094219B2 (en) | 2010-03-04 | 2018-10-09 | X Development Llc | Adiabatic salt energy storage |
US8786140B2 (en) * | 2010-03-05 | 2014-07-22 | Thomas P. Kay | High efficiency magnetohydrodynamic power generation using ultra-high magnetic fields and novel cooling |
FR2958025A1 (en) * | 2010-03-23 | 2011-09-30 | Air Liquide | METHOD AND INSTALLATION OF REFRIGERATION IN PULSE LOAD |
JP5639818B2 (en) * | 2010-08-24 | 2014-12-10 | 大陽日酸株式会社 | Refrigeration liquefier and operation method of refrigeration liquefier |
US8448461B2 (en) * | 2010-10-08 | 2013-05-28 | Sumitomo (Shi) Cryogenics Of America Inc. | Fast cool down cryogenic refrigerator |
US9546647B2 (en) * | 2011-07-06 | 2017-01-17 | Sumitomo (Shi) Cryogenics Of America Inc. | Gas balanced brayton cycle cold water vapor cryopump |
FR2980564A1 (en) * | 2011-09-23 | 2013-03-29 | Air Liquide | REFRIGERATION METHOD AND INSTALLATION |
GB2496573B (en) * | 2011-09-27 | 2016-08-31 | Oxford Instr Nanotechnology Tools Ltd | Apparatus and method for controlling a cryogenic cooling system |
GB2520863B (en) | 2012-07-26 | 2016-12-21 | Sumitomo (Shi) Cryogenics Of America Inc | Brayton cycle engine |
WO2014052927A1 (en) | 2012-09-27 | 2014-04-03 | Gigawatt Day Storage Systems, Inc. | Systems and methods for energy storage and retrieval |
JP5943865B2 (en) * | 2013-03-12 | 2016-07-05 | 住友重機械工業株式会社 | Cryopump system, operation method of cryopump system, and compressor unit |
EP3153795B1 (en) * | 2013-05-31 | 2018-09-05 | Mayekawa Mfg. Co., Ltd. | Brayton cycle refrigerating apparatus |
DE202013010352U1 (en) * | 2013-11-18 | 2015-02-19 | Oerlikon Leybold Vacuum Gmbh | Cold head for cryogenic refrigerator |
JP2015187525A (en) * | 2014-03-27 | 2015-10-29 | 大陽日酸株式会社 | Brayton cycle refrigerator, and method for cooling heat generating part of turbo-compressor |
EP3040647A1 (en) * | 2014-12-30 | 2016-07-06 | HTS-powercables.nl B.V. | Device for cooling a high temperature superconductor |
US10753655B2 (en) * | 2015-03-30 | 2020-08-25 | William A Kelley | Energy recycling heat pump |
CN107429954B (en) | 2015-05-01 | 2020-05-26 | 株式会社前川制作所 | Refrigerator and method for operating refrigerator |
JP6578371B2 (en) | 2015-06-03 | 2019-09-18 | スミトモ (エスエイチアイ) クライオジェニックス オブ アメリカ インコーポレイテッドSumitomo(SHI)Cryogenics of America,Inc. | Gas pressure balanced engine with buffer |
CA2971469C (en) | 2016-06-13 | 2023-05-02 | Geoff Rowe | System, method and apparatus for the regeneration of nitrogen energy within a closed loop cryogenic system |
EP3339605A1 (en) * | 2016-12-23 | 2018-06-27 | Linde Aktiengesellschaft | Method for compressing a gas mixture comprising neon |
US11053847B2 (en) | 2016-12-28 | 2021-07-06 | Malta Inc. | Baffled thermoclines in thermodynamic cycle systems |
US10233787B2 (en) | 2016-12-28 | 2019-03-19 | Malta Inc. | Storage of excess heat in cold side of heat engine |
US10233833B2 (en) | 2016-12-28 | 2019-03-19 | Malta Inc. | Pump control of closed cycle power generation system |
US10458284B2 (en) * | 2016-12-28 | 2019-10-29 | Malta Inc. | Variable pressure inventory control of closed cycle system with a high pressure tank and an intermediate pressure tank |
US10082045B2 (en) | 2016-12-28 | 2018-09-25 | X Development Llc | Use of regenerator in thermodynamic cycle system |
US10280804B2 (en) | 2016-12-29 | 2019-05-07 | Malta Inc. | Thermocline arrays |
US10221775B2 (en) | 2016-12-29 | 2019-03-05 | Malta Inc. | Use of external air for closed cycle inventory control |
US10082104B2 (en) | 2016-12-30 | 2018-09-25 | X Development Llc | Atmospheric storage and transfer of thermal energy |
US10801404B2 (en) | 2016-12-30 | 2020-10-13 | Malta Inc. | Variable pressure turbine |
US10436109B2 (en) | 2016-12-31 | 2019-10-08 | Malta Inc. | Modular thermal storage |
JP6727723B2 (en) * | 2017-01-16 | 2020-07-22 | 住友重機械工業株式会社 | Cryogenic refrigerator and control device for the cryogenic refrigerator |
FR3072160B1 (en) * | 2017-10-09 | 2019-10-04 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | REFRIGERATION DEVICE AND METHOD |
US11678615B2 (en) | 2018-01-11 | 2023-06-20 | Lancium Llc | Method and system for dynamic power delivery to a flexible growcenter using unutilized energy sources |
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CN116575994A (en) | 2019-11-16 | 2023-08-11 | 马耳他股份有限公司 | Dual power system pumping thermoelectric storage power system |
US11396826B2 (en) | 2020-08-12 | 2022-07-26 | Malta Inc. | Pumped heat energy storage system with electric heating integration |
US11480067B2 (en) | 2020-08-12 | 2022-10-25 | Malta Inc. | Pumped heat energy storage system with generation cycle thermal integration |
US11286804B2 (en) | 2020-08-12 | 2022-03-29 | Malta Inc. | Pumped heat energy storage system with charge cycle thermal integration |
EP4193042A1 (en) | 2020-08-12 | 2023-06-14 | Malta Inc. | Pumped heat energy storage system with thermal plant integration |
US11486305B2 (en) | 2020-08-12 | 2022-11-01 | Malta Inc. | Pumped heat energy storage system with load following |
US11454167B1 (en) | 2020-08-12 | 2022-09-27 | Malta Inc. | Pumped heat energy storage system with hot-side thermal integration |
FR3119667B1 (en) * | 2021-02-10 | 2023-03-24 | Air Liquide | Device and method for liquefying a fluid such as hydrogen and/or helium |
FR3119669B1 (en) * | 2021-02-10 | 2023-03-24 | Air Liquide | Device and method for liquefying a fluid such as hydrogen and/or helium |
CN117222854A (en) * | 2021-04-30 | 2023-12-12 | 住友重机械工业株式会社 | Ultralow temperature refrigerator and operation method thereof |
CN113963886A (en) * | 2021-10-15 | 2022-01-21 | 氢合科技(广州)有限公司 | Superconducting magnet cooling system and regulation and control method |
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JP2005195258A (en) * | 2004-01-07 | 2005-07-21 | Shin Meiwa Ind Co Ltd | Refrigeration system and vacuum deposition device |
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-
2007
- 2007-11-19 JP JP2007298812A patent/JP2009121786A/en active Pending
-
2008
- 2008-11-05 WO PCT/JP2008/070108 patent/WO2009066565A1/en active Application Filing
- 2008-11-05 US US12/743,545 patent/US20100275616A1/en not_active Abandoned
- 2008-11-05 KR KR1020107009342A patent/KR101161339B1/en active IP Right Grant
- 2008-11-05 CN CN200880116901XA patent/CN101861500B/en not_active Expired - Fee Related
- 2008-11-05 EP EP08851240.5A patent/EP2211124A4/en not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH01121660A (en) * | 1987-11-06 | 1989-05-15 | Japan Atom Energy Res Inst | Very low temperature refrigerating plant |
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Non-Patent Citations (2)
Title |
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DEAN ET AL: "Liquid helium refrigerator control", CRYOGENICS, ELSEVIER, KIDLINGTON, GB, vol. 25, no. 2, 1 February 1985 (1985-02-01), pages 87 - 91, XP024049647, ISSN: 0011-2275, [retrieved on 19850201], DOI: 10.1016/0011-2275(85)90110-9 * |
See also references of WO2009066565A1 * |
Also Published As
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US20100275616A1 (en) | 2010-11-04 |
EP2211124A1 (en) | 2010-07-28 |
CN101861500B (en) | 2012-07-18 |
CN101861500A (en) | 2010-10-13 |
JP2009121786A (en) | 2009-06-04 |
KR20100087135A (en) | 2010-08-03 |
WO2009066565A1 (en) | 2009-05-28 |
KR101161339B1 (en) | 2012-06-29 |
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