EP2196669B1 - Assembly with vacuum pump and method for operating same - Google Patents

Assembly with vacuum pump and method for operating same Download PDF

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Publication number
EP2196669B1
EP2196669B1 EP09014532.7A EP09014532A EP2196669B1 EP 2196669 B1 EP2196669 B1 EP 2196669B1 EP 09014532 A EP09014532 A EP 09014532A EP 2196669 B1 EP2196669 B1 EP 2196669B1
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EP
European Patent Office
Prior art keywords
motor
vacuum pump
pump
arrangement
power consumption
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Revoked
Application number
EP09014532.7A
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German (de)
French (fr)
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EP2196669A2 (en
EP2196669A3 (en
Inventor
Stefan Kallenborn
Wolfgang Losch
Ronald Sachs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2196669A2 publication Critical patent/EP2196669A2/en
Publication of EP2196669A3 publication Critical patent/EP2196669A3/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0208—Power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0209—Rotational speed

Definitions

  • the invention relates to an arrangement with a vacuum pump according to the preamble of the first claim and a method for operating a vacuum pump according to the preamble of the seventh claim.
  • Vacuum pumps are today an indispensable part of many industrial processes. Applications range from freeze-drying to leak detection to lamp and tube production, to name but a few. The processes used in these applications today have ever shorter cycle times, which increases the load on the vacuum pump. Added to this is the desire to use dry-compressing vacuum pumps, ie vacuum pumps, whose pumping chamber is largely free of lubricants. However, since often touching seals must be used in these conditions, they are subject to high wear. Measures to reduce wear are known, so suggests the DE-OS 10 2006 012 532 to support the seal with a guide element. However, there is a desire to achieve further improvements in service life. From the EP 1515423 A2 a turbomolecular points with a motor control known.
  • the engine control of this turbomolecular pump detects the engine temperature and shortens the start time of the turbomolecular pump. With turbomolecular pumps very low pressures can be achieved. Disadvantage of such pumps is that they are not able to compress independently against the atmosphere.
  • the US 6244825 B1 discloses a safety device for a pump that detects increased engine loads and reduces engine speed to conserve the engine.
  • the DE 10359270 A1 discloses a controller for a vacuum pump that reduces the rotational speed of the electric motor as the load torque of the vacuum pump increases per unit time.
  • a control device for a vacuum pump known, whereby the speed of the drive is controlled.
  • the aforementioned pumps detect special loads and react with measures that improve the service life of the corresponding drives.
  • a measuring assembly for determining an electrical operating variable of the motor of the vacuum pump makes it possible to operate the motor so that the wear of the pumping stage is greatly reduced.
  • the inventive method according to claim 7 has the advantage that a wear-reducing operation can be initiated at a reduced speed by a simple measurement and a simple criterion.
  • the method is advantageously further developed in that falling below a power threshold value is selected as a criterion for lowering the speed. This simplifies the necessary control module.
  • Another development proposes to provide at least two pumping stages, wherein the motor drives at least two of these pumping stages at the same time.
  • the advantages come into their own, as there is a simple and unambiguous criterion for switching to the low-wear operating state. For example, positioning problems of pressure switches are avoided.
  • multistage vacuum pumps there are many different pressure levels at different parts of the pump and it is unclear which pressure measurement provides the most meaningful value for evaluating the changeover.
  • the reduction in wear is particularly pronounced when the motor is designed as a brushless DC motor, as this produces sufficient torque even at low speeds. This means that particularly low speeds can be achieved without sacrificing pumping efficiency.
  • a further development suggests that at least one pumping stage is designed to be dry running against the atmosphere in a condensing manner.
  • the advantage of the wear reduction is particularly pronounced.
  • At least one pumping stage has a reciprocating piston running in a bushing and a seal between the bushing and the reciprocating piston.
  • the wear reduction comes into its own, because the seal is highly susceptible to wear, but the vacuum pump can be operated at low speed without losing tightness.
  • FIG. 1 shown schematically.
  • the vacuum pump 10 includes a pumping stage 12 and a motor 14. This drives the pumping stage.
  • a drive unit 20 is provided in addition to the vacuum pump. It can be a stand-alone device, or it can be located in a housing part of the vacuum pump.
  • the drive unit includes a lighting device 21, which is connected by a Bestromungs effet 22 with the motor of the vacuum pump.
  • the power supply module generates current and voltage such that the motor is set in motion, preferably in rotation. Current and voltage are supplied via the Bestromungsön the engine.
  • a measuring line 26 is provided and connects the energizing line 22 to a measuring subassembly 24.
  • This measuring subassembly is designed such that it determines an electrical quantity which is transmitted via the current feed line. These electrical quantities may be current or voltage.
  • the power consumption of the motor is preferably determined by the measuring module by measuring an electrical quantity.
  • the measuring module and the power supply module are in contact via a connection 27. This contact changes the current supplied to the motor to signal from the measuring module. These Change takes place depending on the measured current. In particular, the speed of the motor generated by the energization is lowered as soon as the measuring module determines a low power consumption by the motor.
  • the pumping stage designed dry compacting, for example as a diaphragm, piston or reciprocating pump, since here the speed reduction leads to a particularly significant reduction in wear.
  • the Hubkolbenvakuumpumpe 210 has in its housing 240 one of bearings 253, for example bearings, rotatably supported shaft 250.
  • This shaft is rotated by a motor 214 which is formed by stator-side electric coils 251 and shaft-side permanent magnets 252. It is designed as a brushless DC motor.
  • a crank pulley 254 Connected to the shaft is a crank pulley 254 having a crank pin 255.
  • a connecting rod 256 is rotatably mounted.
  • a cylinder 241 gas-tightly connected to the housing has a cylindrical cavity into which the bushing 245 is fitted.
  • the piston 246 connected to and driven by the connecting rod 256 moves back and forth between two reversal points.
  • the piston releases inlet openings which are in gas-conducting connection with the gas inlet 243.
  • the second reversal point it lifts a valve cover 249 from the valve seat, so that gas is expelled from the pump chamber, valve cover and liner limited pumping chamber 248.
  • the Gas then leaves the pumping stage via the gas outlet 244 provided on the cylinder cover 242 and enters the transfer line 280.
  • a seal 247 is attached, which slidably contacts the bushing and seals in this way the space between the bushing and piston. By sliding contact and the absence of lubricants such as oil, this seal is subject to high stress and wears out accordingly.
  • the reciprocating vacuum pump has a drive unit 220 in which a lighting device 221 and a power determination unit 224 are provided.
  • the energizing module is in electrical contact with the electric coils by means of the energizing line 222. It generates currents and voltages in the coils that cause the rotation of the shaft.
  • the power supply assembly is designed so that the speed of the shaft can be adjusted in a wide speed range.
  • the speed range advantageously comprises the range of standstill, over fewer revolutions per second up to sixty revolutions per second.
  • the power determination unit is designed to determine the power consumed by the motor by measuring electrical quantities. The measurement is made via a measuring line 226. Depending on the measured power consumption, the speed is set.
  • the rotational speed is set to a low value.
  • a sinking power consumption of the motor is characteristic of a low compression work to be performed in the pumping stage, in particular for a small quantity of gas to be compressed.
  • a small amount of gas a low speed and thus a small number of strokes of the piston is sufficient to keep a deep vacuum at the gas inlet.
  • a small number of strokes is equal to a significantly reduced wear of the seal, as it rubs less on the liner per second. It is advantageously easy, the Switching the speed from an upper normal condition value falls below a power consumption threshold value to a low speed threshold value.
  • FIG. 3 is the reciprocating vacuum pump in a section along the in FIG. 2 shown line II 'shown. Accordingly, connecting rod 256, bushing 245, piston 246 and cylinder 241 of the first pumping stage can be seen. Also are at FIG. 2 already mentioned seal 247, cylinder cover 242 and valve cover 242 to see.
  • a second cylinder 261 with a second cylinder cover 262 is also connected to the housing 240 of the reciprocating vacuum pump and forms the second pumping stage.
  • a second bushing 265 is provided, in which a second piston 266 reciprocates. It is connected to a second connecting rod 257 and is driven by this.
  • the connecting rod is rotatably mounted on the crank pin 255, which is provided on the crank disk 254. This is rotated by the shaft 250 in rotation.
  • the gas ejected from the first pumping stage passes through the transfer line to the second stage gas inlet 281. After being compressed by the second piston, it lifts the second valve cover 269 and discharges the gas through the pump outlet 282 to the atmosphere.
  • a bushing which contacts the bushing 267 is provided, which is subject to wear according to the same principle as in the case of the seal 247 of the first pumping stage. In the same way, the wear is reduced as soon as the speed is lowered according to the pre-described method.
  • FIG. 4 shows the basic structure of the electrical circuit of the drive unit 220 in a schematic representation.
  • a voltage conditioning 431 is detachably connected to an electrical supply network 430.
  • This Supply network is, for example, the 230 V AC mains or an industrial power grid.
  • the voltage conditioning generates the voltage for a DC link 432 and operating voltages for the electronic components of this circuit. Therefore, it is connected via a supply circuit 440 to the power determination unit 224 and the encoder 433 of the lighting module 221.
  • the power supply module has an output stage 434. In this output stage, an upper power transistor 435 and a lower power transistor 436 are arranged in pairs. They convert the voltage of the intermediate circuit into phase voltage, which are then applied via the motor phases 437 to the coils of the motor 214.
  • the wiring of the power transistors 435, 436 is done by the encoder. This causes a blocking or opening of the power transistors such that the motor is rotated by energizing the motor phases, wherein the encoder is designed so that it can generate the wiring of the power transistors for a variety of speeds.
  • the power determination unit is connected via a measuring line 226 with the motor phases and measures the currents and voltages occurring in these. There is a connection between the power determination unit and the encoder. If the power determination unit determines that the power consumption by the motor has dropped, the encoder is caused to cause a clocking of the power transistors and thus the energization of the motor phases in such a way that the speed of the motor receives a lower value. It is advantageously simple to switch the rotational speed from an upper normal condition value when falling below a power consumption threshold value to a low slip speed value.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Description

Die Erfindung betrifft eine Anordnung mit Vakuumpumpe nach dem Oberbegriff des ersten Anspruchs und ein Verfahren zum Betrieb einer Vakuumpumpe nach dem Oberbegriff des siebten Anspruchs.The invention relates to an arrangement with a vacuum pump according to the preamble of the first claim and a method for operating a vacuum pump according to the preamble of the seventh claim.

Vakuumpumpen sind heute aus vielen Industrieprozessen nicht mehr wegzudenken. Die Anwendungen erstrecken sich über viele Gebiete, von Gefriertrocknung über Lecksuche bis zu Lampen- und Röhrenproduktion, um nur einige zu nennen. Die in diesen Anwendungen benutzten Prozesse besitzen heute immer kürzere Zykluszeiten, was die Belastung der Vakuumpumpe erhöht. Hinzu kommt der Wunsch, trocken verdichtende Vakuumpumpen einzusetzen, d.h. Vakuumpumpen, deren Schöpfraum weitgehend frei von Schmierstoffen ist. Da jedoch oftmals berührende Dichtungen in diesen Bedingungen eingesetzt werden müssen, unterliegen diese einem hohen Verschleiß. Maßnahmen zur Verschleißsenkung sind bekannt, so schlägt die DE-OS 10 2006 012 532 vor, die Dichtung mit einem Führungselement zu unterstützen. Es besteht jedoch der Wunsch, weitergehende Verbesserungen der Standzeiten zu erzielen.
Aus der EP 1515423 A2 eine Turbomolekularpunkte mit einer Motorsteuerung bekannt. Die Motorsteuerung dieser Turbomolekularpumpe erfasst die Motortemperatur und verkürzt die Startzeit der Turbomolekularpumpe. Mit Turbomolekularpumpen können sehr niedrige Drücke erreicht werden. Nachteil bei solchen Pumpen ist, dass sie nicht in der Lage sind eigenständig gegen Atmosphäre zu verdichten.
Die US 6244825 B1 offenbart eine Sicherheitseinrichtung für eine Pumpe, die erhöte Motorbelastungen erkennt und die Motordrehzahl reduziert, um den Motor zu schonen.Vacuum pumps are today an indispensable part of many industrial processes. Applications range from freeze-drying to leak detection to lamp and tube production, to name but a few. The processes used in these applications today have ever shorter cycle times, which increases the load on the vacuum pump. Added to this is the desire to use dry-compressing vacuum pumps, ie vacuum pumps, whose pumping chamber is largely free of lubricants. However, since often touching seals must be used in these conditions, they are subject to high wear. Measures to reduce wear are known, so suggests the DE-OS 10 2006 012 532 to support the seal with a guide element. However, there is a desire to achieve further improvements in service life.
From the EP 1515423 A2 a turbomolecular points with a motor control known. The engine control of this turbomolecular pump detects the engine temperature and shortens the start time of the turbomolecular pump. With turbomolecular pumps very low pressures can be achieved. Disadvantage of such pumps is that they are not able to compress independently against the atmosphere.
The US 6244825 B1 discloses a safety device for a pump that detects increased engine loads and reduces engine speed to conserve the engine.

Die DE 10359270 A1 offenbart eine Steuerung für eine Vakuumpumpe, die die Drehgeschwindigkeit des Elektromotors verringert, wenn sich das Lastdrehmoment der Vakuumpumpe pro Zeiteinheit erhöht.
Weiter ist auch aus der EP 1486673 A1 eine Kontrolleinrichtung für eine Vakuumpumpe bekannt, womit die Drehzahl des Antriebs geregelt wird.
Die zuvor genannten Pumpen erkennen besondere Belastungen und reagieren mit Maßnahmen, welche die Lebensdauer der entsprechenden Antriebe verbessern.The DE 10359270 A1 discloses a controller for a vacuum pump that reduces the rotational speed of the electric motor as the load torque of the vacuum pump increases per unit time.
Next is also from the EP 1486673 A1 a control device for a vacuum pump known, whereby the speed of the drive is controlled.
The aforementioned pumps detect special loads and react with measures that improve the service life of the corresponding drives.

Es ist daher Aufgabe der Erfindung, eine Vakuumpumpe vorzustellen, die auf baulich einfache Weise eine verlängerte Standzeit besitzt. Es ist weiterhin Aufgabe der Erfindung, ein einfaches Verfahren zum Betrieb einer Vakuumpumpe vorzustellen, welches die Standzeit verlängert.It is therefore an object of the invention to provide a vacuum pump, which has a structurally simple way extended life. It is another object of the invention to provide a simple method for operating a vacuum pump, which extends the service life.

Diese Aufgabe wird gelöst durch eine Vakuumpumpe mit den Merkmalen des ersten Anspruchs und einem Verfahren mit den Merkmalen des siebten Anspruchs. Die abhängigen Ansprüche 2 bis 6 und 8 geben vorteilhafte Weiterbildungen der Erfindung an.This object is achieved by a vacuum pump having the features of the first claim and a method having the features of the seventh claim. The dependent claims 2 to 6 and 8 indicate advantageous developments of the invention.

Eine Messbaugruppe zur Bestimmung einer elektrischen Betriebsgröße des Motors der Vakuumpumpe ermöglicht es, den Motor so zu betreiben, dass der Verschleiß der Pumpstufe stark reduziert wird. Das erfindungsgemäße Verfahren nach Anspruch 7 besitzt den Vorteil, dass durch eine einfache Messung und ein einfaches Kriterium ein verschleißreduzierender Betrieb bei abgesenkter Drehzahl eingeleitet werden kann.A measuring assembly for determining an electrical operating variable of the motor of the vacuum pump makes it possible to operate the motor so that the wear of the pumping stage is greatly reduced. The inventive method according to claim 7 has the advantage that a wear-reducing operation can be initiated at a reduced speed by a simple measurement and a simple criterion.

Das Verfahren wird vorteilhaft dadurch weitergebildet, dass das Unterschreiten eines Leistungsschwellwertes als Kriterium gewählt wird, die Drehzahl abzusenken. Dies vereinfacht die notwendige Steuerungsbaugruppe.The method is advantageously further developed in that falling below a power threshold value is selected as a criterion for lowering the speed. This simplifies the necessary control module.

Die Weiterbildung, zwischen Messbaugruppe und Bestromungsbaugruppe eine Verbindung vorzusehen, vereinfacht die Schaltung und ermöglicht die automatische Umschaltung in den verschleißarmen Betriebszustand.The further development of providing a connection between the measuring module and the power supply module simplifies the circuit and enables automatic switching to the low-wear operating state.

Eine andere Weiterbildung schlägt vor, wenigstens zwei Pumpstufen vorzusehen, wobei der Motor wenigstens zwei dieser Pumpstufe gleichzeitig antreibt. In dieser Anordnung kommen die Vorteile besonders zur Geltung, da ein einfaches und eindeutiges Kriterium zum Umschalten in den verschleißarmen Betriebszustand vorliegt. Beispielsweise werden Positionierungsprobleme von Druckschaltern vermieden. In mehrstufigen Vakuumpumpen treten viele unterschiedliche Druckniveaus an verschiedenen Stellen der Pumpe auf und es ist unklar, welche Druckmessung den sinnvollsten Wert zur Beurteilung der Umschaltung liefert.Another development proposes to provide at least two pumping stages, wherein the motor drives at least two of these pumping stages at the same time. In this arrangement, the advantages come into their own, as there is a simple and unambiguous criterion for switching to the low-wear operating state. For example, positioning problems of pressure switches are avoided. In multistage vacuum pumps, there are many different pressure levels at different parts of the pump and it is unclear which pressure measurement provides the most meaningful value for evaluating the changeover.

Die Verschleißminderung ist besonders ausgeprägt, wenn der Motor als bürstenloser Gleichstrommotor ausgebildet ist, da dieser auch bei geringen Drehzahlen ein hinreichendes Drehmoment erzeugt. So können besonders niedrige Drehzahlen realisiert werden, ohne bei der Pumpwirkung Einbußen zu verzeichnen.
Eine Weiterbildung schlägt vor, dass wenigstens eine Pumpstufe trockenlaufend gegen Atmosphäre verdichtend gestaltet ist. Hier ist der Vorteil der Verschleißminderung besonders ausgeprägt.The reduction in wear is particularly pronounced when the motor is designed as a brushless DC motor, as this produces sufficient torque even at low speeds. This means that particularly low speeds can be achieved without sacrificing pumping efficiency.
A further development suggests that at least one pumping stage is designed to be dry running against the atmosphere in a condensing manner. Here, the advantage of the wear reduction is particularly pronounced.

Eine letzte Weiterbildung schlägt vor, dass wenigstens eine Pumpstufe einen in einer Laufbuchse laufenden Hubkolben und eine Dichtung zwischen Laufbuchse und Hubkolben aufweist. Hier kommt die Verschleißminderung stark zur Geltung, da die Dichtung stark verschleißgefährdet ist, die Vakuumpumpe jedoch mit geringer Drehzahl betrieben werden kann, ohne Dichtheit zu verlieren.A last further development proposes that at least one pumping stage has a reciprocating piston running in a bushing and a seal between the bushing and the reciprocating piston. Here, the wear reduction comes into its own, because the seal is highly susceptible to wear, but the vacuum pump can be operated at low speed without losing tightness.

Die Erfindung soll anhand von Ausführungsbeispielen näher erläutert und ihre Vorteile vertieft werden. Es zeigen:

Fig. 1:
Schematische Darstellung einer erfindungsgemäßen Anordnung mit Vakuumpumpe.
Fig. 2:
Schnitt durch eine zweistufige Hubkolbenvakuumpumpe entlang der Wellenachse.
Fig. 3:
Schnitt durch die zweitstufige Hubkolbenvakuumpumpe entlang der Linie I-I' und senkrecht zur Wellenachse.
Fig. 4:
schematische Darstellung der im Antriebsgerät der Hubkolbenvakuumpumpe vorgesehenen Schaltung.
The invention will be explained in more detail with reference to embodiments and their benefits are deepened. Show it:
Fig. 1:
Schematic representation of an arrangement according to the invention with a vacuum pump.
Fig. 2:
Section through a two-stage reciprocating vacuum pump along the shaft axis.
3:
Section through the second-stage reciprocating vacuum pump along the line II 'and perpendicular to the shaft axis.
4:
schematic representation of the provided in the drive unit of the reciprocating vacuum pump circuit.

Die Erfindung ist zunächst in Figur 1 schematisch dargestellt.The invention is initially in FIG. 1 shown schematically.

Die Vakuumpumpe 10 beinhaltet eine Pumpstufe 12 und einen Motor 14. Dieser treibt die Pumpstufe an. Neben der Vakuumpumpe ist ein Antriebsgerät 20 vorgesehen. Es kann ein eigenständiges Gerät sein, oder sich in einem Gehäuseteil der Vakuumpumpe befinden. Das Antriebsgerät beinhaltet eine Bestromungsbaugruppe 21, welche durch eine Bestromungsleitung 22 mit dem Motor der Vakuumpumpe verbunden ist. Die Bestromungsbaugruppe erzeugt Strom und Spannung derart, dass der Motor in Bewegung, vorzugsweise in Drehung, versetzt wird. Strom und Spannung werden über die Bestromungsleitung dem Motor zugeführt.The vacuum pump 10 includes a pumping stage 12 and a motor 14. This drives the pumping stage. In addition to the vacuum pump, a drive unit 20 is provided. It can be a stand-alone device, or it can be located in a housing part of the vacuum pump. The drive unit includes a lighting device 21, which is connected by a Bestromungsleitung 22 with the motor of the vacuum pump. The power supply module generates current and voltage such that the motor is set in motion, preferably in rotation. Current and voltage are supplied via the Bestromungsleitung the engine.

Eine Messleitung 26 ist vorgesehen und verbindet die Bestromungsleitung 22 mit einer Messbaugruppe 24. Diese Messbaugruppe ist derart gestaltet, dass sie eine elektrische Größe bestimmt, die über die Bestromungsleitung übertragen wird. Diese elektrischen Größen können Strom oder Spannung sein. Vorzugsweise wird von der Messbaugruppe durch Messung einer elektrischen Größe die Leistungsaufnahme des Motors bestimmt. Über eine Verbindung 27 stehen Messbaugruppe und Bestromungsbaugruppe in Kontakt. Durch diesen Kontakt wird auf Signal der Messbaugruppe die Bestromung des Motors geändert. Diese Änderung erfolgt abhängig von der gemessenen Bestromung. Insbesondere wird die durch die Bestromung erzeugte Drehzahl des Motors abgesenkt, sobald die Messbaugruppe eine geringe Leistungsaufnahme durch den Motor bestimmt.A measuring line 26 is provided and connects the energizing line 22 to a measuring subassembly 24. This measuring subassembly is designed such that it determines an electrical quantity which is transmitted via the current feed line. These electrical quantities may be current or voltage. The power consumption of the motor is preferably determined by the measuring module by measuring an electrical quantity. The measuring module and the power supply module are in contact via a connection 27. This contact changes the current supplied to the motor to signal from the measuring module. These Change takes place depending on the measured current. In particular, the speed of the motor generated by the energization is lowered as soon as the measuring module determines a low power consumption by the motor.

Vorteilhaft ist die Pumpstufe trocken verdichtend gestaltet, beispielsweise als Membran-, Kolben- oder Hubkolbenpumpe, da hier die Drehzahlabsenkung zu einer besonders deutlichen Verschleißabsenkung führt.Advantageously, the pumping stage designed dry compacting, for example as a diaphragm, piston or reciprocating pump, since here the speed reduction leads to a particularly significant reduction in wear.

Anhand einer Hubkolbenvakuumpumpe soll unter Bezug auf die Figuren 2 und 3 die Erfindung verdeutlicht werden.With reference to a reciprocating vacuum pump with reference to the Figures 2 and 3 the invention will be clarified.

Die Hubkolbenvakuumpumpe 210 weist in ihrem Gehäuse 240 eine von Lagern 253, beispielsweise Wälzlagern, drehbar unterstützte Welle 250 auf. Diese Welle wird von einem Motor 214 in Drehung versetzt, welcher von statorseitigen elektrischen Spulen 251 und wellenseitigen Permanentmagneten 252 gebildet wird. Er ist als bürstenloser Gleichstrommotor gestaltet. Mit der Welle ist eine Kurbelscheibe 254 verbunden, welche einen Kurbelzapfen 255 besitzt. Auf diesem ist ein Pleuel 256 drehbar gelagert.The Hubkolbenvakuumpumpe 210 has in its housing 240 one of bearings 253, for example bearings, rotatably supported shaft 250. This shaft is rotated by a motor 214 which is formed by stator-side electric coils 251 and shaft-side permanent magnets 252. It is designed as a brushless DC motor. Connected to the shaft is a crank pulley 254 having a crank pin 255. On this a connecting rod 256 is rotatably mounted.

Ein gasdicht mit dem Gehäuse verbundener Zylinder 241 weist einen zylindrischen Hohlraum auf, in den die Laufbuchse 245 eingepasst ist. In dieser Laufbuchse bewegt sich der mit dem Pleuel 256 verbundene und über diesen angetriebene Kolben 246 zwischen zwei Umkehrpunkten hin und her.A cylinder 241 gas-tightly connected to the housing has a cylindrical cavity into which the bushing 245 is fitted. In this bushing, the piston 246 connected to and driven by the connecting rod 256 moves back and forth between two reversal points.

In einem ersten Umkehrpunkt gibt der Kolben Eintrittsöffnungen frei, die mit dem Gaseinlass 243 in gasführender Verbindung stehen. Im zweiten Umkehrpunkt hebt er einen Ventildeckel 249 von dem Ventilsitz ab, so dass Gas aus dem von Kolben, Ventildeckel und Laufbuchse begrenzten Schöpfraum 248 ausgestoßen wird. Das Gas verlässt anschließend über den am Zylinderdeckel 242 vorgesehenen Gasauslass 244 die Pumpstufe und gelangt in die Übergabeleitung 280.In a first reversal point, the piston releases inlet openings which are in gas-conducting connection with the gas inlet 243. In the second reversal point, it lifts a valve cover 249 from the valve seat, so that gas is expelled from the pump chamber, valve cover and liner limited pumping chamber 248. The Gas then leaves the pumping stage via the gas outlet 244 provided on the cylinder cover 242 and enters the transfer line 280.

Am Kolben ist eine Dichtung 247 befestigt, welche die Laufbuchse gleitend berührt und auf diese Weise den Zwischenraum zwischen Laufbuchse und Kolben abdichtet. Durch die gleitende Berühung und der Abwesenheit von Schmiermitteln wie beispielsweise Öl unterliegt diese Dichtung einer hohen Beanspruchung und verschleißt dementsprechend stark.To the piston, a seal 247 is attached, which slidably contacts the bushing and seals in this way the space between the bushing and piston. By sliding contact and the absence of lubricants such as oil, this seal is subject to high stress and wears out accordingly.

Die Hubkolbenvakuumpumpe weist ein Antriebsgerät 220 auf, in welchem eine Bestromungsbaugruppe 221 und eine Leistungsbestimmungseinheit 224 vorgesehen sind. Die Bestromungsbaugruppe steht mittels der Bestromungsleitung 222 mit den elektrischen Spulen in elektrischem Kontakt. Sie erzeugt Ströme und Spannungen in den Spulen, die die Drehung der Welle bewirken. Die Bestromungsbaugruppe ist derart gestaltet, dass die Drehzahl der Welle in einem weiten Drehzahlbereich eingestellt werden kann. Der Drehzahlbereich umfasst vorteilhaft den Bereich Stillstand, über weniger Umdrehungen pro Sekunden bis hin zu sechzig Umdrehungen pro Sekunde. Die Leistungsbestimmungseinheit ist derart gestaltet, dass sie die vom Motor aufgenommene Leistung durch Messung von elektrischen Größen bestimmt. Die Messung erfolgt über eine Messleitung 226. Abhängig von der gemessenen Leistungsaufnahme wird die Drehzahl gestellt. Insbesondere wird, wenn die Leistungsaufnahme sinkt, die Drehzahl auf einen niedrigen Wert eingestellt. Eine sinkende Leistungsaufnahme des Motors ist charakteristisch für eine geringe in der Pumpstufe zu leistende Verdichtungsarbeit, insbesondere für eine geringe zu verdichtende Gasmenge. Bei einer geringen Gasmenge reicht eine geringe Drehzahl und damit eine geringe Anzahl von Hüben des Kolbens aus, um am Gaseinlass ein tiefes Vakuum zu halten. Eine geringe Anzahl von Hüben ist gleich zu setzen mit einem wesentlich verringerten Verschleiß der Dichtung, da diese pro Sekunde weniger an der Laufbuchse reibt. Vorteilhaft einfach ist es, die Drehzahl von einem oberen Normalbedingungswert bei Unterschreiten eines Leistungsaufnahmeschwellwertes auf einen niedrigen Schondrehzahlwert umzuschalten.The reciprocating vacuum pump has a drive unit 220 in which a lighting device 221 and a power determination unit 224 are provided. The energizing module is in electrical contact with the electric coils by means of the energizing line 222. It generates currents and voltages in the coils that cause the rotation of the shaft. The power supply assembly is designed so that the speed of the shaft can be adjusted in a wide speed range. The speed range advantageously comprises the range of standstill, over fewer revolutions per second up to sixty revolutions per second. The power determination unit is designed to determine the power consumed by the motor by measuring electrical quantities. The measurement is made via a measuring line 226. Depending on the measured power consumption, the speed is set. In particular, when the power consumption decreases, the rotational speed is set to a low value. A sinking power consumption of the motor is characteristic of a low compression work to be performed in the pumping stage, in particular for a small quantity of gas to be compressed. With a small amount of gas a low speed and thus a small number of strokes of the piston is sufficient to keep a deep vacuum at the gas inlet. A small number of strokes is equal to a significantly reduced wear of the seal, as it rubs less on the liner per second. It is advantageously easy, the Switching the speed from an upper normal condition value falls below a power consumption threshold value to a low speed threshold value.

In Figur 3 ist die Hubkolbenvakuumpumpe in einem Schnitt entlang der in Figur 2 eingezeichneten Linie I-I' gezeigt. Entsprechend sind Pleuel 256, Laufbuchse 245, Kolben 246 und Zylinder 241 der ersten Pumpstufe zu sehen. Ebenfalls sind bei Figur 2 bereits erwähnte Dichtung 247, Zylinderdeckel 242 und Ventildeckel 242 zu sehen.In FIG. 3 is the reciprocating vacuum pump in a section along the in FIG. 2 shown line II 'shown. Accordingly, connecting rod 256, bushing 245, piston 246 and cylinder 241 of the first pumping stage can be seen. Also are at FIG. 2 already mentioned seal 247, cylinder cover 242 and valve cover 242 to see.

Ein zweiter Zylinder 261 mit einem zweiten Zylinderdeckel 262 ist ebenfalls mit dem Gehäuse 240 der Hubkolbenvakuumpumpe verbunden und bildet deren zweite Pumpstufe. In dem Zylinder ist eine zweite Laufbuchse 265 vorgesehen, in welcher sich ein zweiter Kolben 266 hin und her bewegt. Er ist mit einem zweiten Pleuel 257 verbunden und wird von diesem angetrieben. Hierzu ist der Pleuel an dem Kurbelzapfen 255 drehbar gelagert, welcher an der Kurbelscheibe 254 vorgesehen ist. Diese wird von der Welle 250 in Drehung versetzt. Das aus der ersten Pumpstufe ausgestoßene Gas gelangt durch die Übergabeleitung an den Zweitstufengaseinlass 281. Nach Verdichtung durch den zweiten Kolben hebt dieser den zweiten Ventildeckel 269 ab und stößt das Gas durch den Pumpenauslass 282 gegen Atmosphäre aus. Auch am Kolben der zweiten Pumpstufe ist eine die Laufbuchse berühenden Dichtung 267 vorgesehen, die nach dem gleichen Prinzip wie bei der Dichtung 247 der ersten Pumpstufe Verschleiß unterliegt. In gleicher Weise wird der Verschleiß vermindert, sobald die Drehzahl nach der vorbeschriebenden Verfahren abgesenkt wird.A second cylinder 261 with a second cylinder cover 262 is also connected to the housing 240 of the reciprocating vacuum pump and forms the second pumping stage. In the cylinder, a second bushing 265 is provided, in which a second piston 266 reciprocates. It is connected to a second connecting rod 257 and is driven by this. For this purpose, the connecting rod is rotatably mounted on the crank pin 255, which is provided on the crank disk 254. This is rotated by the shaft 250 in rotation. The gas ejected from the first pumping stage passes through the transfer line to the second stage gas inlet 281. After being compressed by the second piston, it lifts the second valve cover 269 and discharges the gas through the pump outlet 282 to the atmosphere. Also on the piston of the second pumping stage, a bushing which contacts the bushing 267 is provided, which is subject to wear according to the same principle as in the case of the seal 247 of the first pumping stage. In the same way, the wear is reduced as soon as the speed is lowered according to the pre-described method.

Abschließend zeigt Figur 4 den prinzipiellen Aufbau der elektrischen Schaltung des Antriebsgeräts 220 in einer schematischen Darstellung. Eine Spannungsaufbereitung 431 ist lösbar an ein elektrisches Versorgungsnetz 430 angeschlossen. Dieses Versorgungsnetz ist beispielsweise das 230 V Wechselspannungsnetz oder ein Industriespannungsnetz. Die Spannungsaufbereitung erzeugt die Spannung für einen Zwischenkreis 432 und Betriebsspannungen für die Elektronikbaugruppen dieser Schaltung. Daher ist sie über einen Versorgungskreis 440 mit der Leistungsbestimmungseinheit 224 und dem Geber 433 der Bestromungsbaugruppe 221 verbunden. Die Bestromungsbaugruppe weist eine Endstufe 434 auf. In dieser Endstufe sind paarweise ein oberer Leistungstransistor 435 und ein unterer Leistungstransistor 436 angeordnet. Sie formen die Spannung des Zwischenkreises in Phasenspannung um, welche dann über die Motorphasen 437 an die Spulen des Motors 214 angelegt werden. Die Beschaltung der Leistungstransistoren 435, 436 erfolgt durch den Geber. Dieser bewirkt ein Sperren oder Öffnen der Leistungstransistoren derart, dass der Motor durch Bestromung der Motorphasen in Drehung versetzt wird, wobei der Geber so gestaltet ist, dass er die Beschaltung der Leistungstransistoren für eine Vielzahl von Drehzahlen erzeugen kann.Finally shows FIG. 4 the basic structure of the electrical circuit of the drive unit 220 in a schematic representation. A voltage conditioning 431 is detachably connected to an electrical supply network 430. This Supply network is, for example, the 230 V AC mains or an industrial power grid. The voltage conditioning generates the voltage for a DC link 432 and operating voltages for the electronic components of this circuit. Therefore, it is connected via a supply circuit 440 to the power determination unit 224 and the encoder 433 of the lighting module 221. The power supply module has an output stage 434. In this output stage, an upper power transistor 435 and a lower power transistor 436 are arranged in pairs. They convert the voltage of the intermediate circuit into phase voltage, which are then applied via the motor phases 437 to the coils of the motor 214. The wiring of the power transistors 435, 436 is done by the encoder. This causes a blocking or opening of the power transistors such that the motor is rotated by energizing the motor phases, wherein the encoder is designed so that it can generate the wiring of the power transistors for a variety of speeds.

Die Leistungsbestimmungseinheit ist über eine Messleitung 226 mit den Motorphasen verbunden und misst die in diesen auftretenden Ströme und Spannungen. Zwischen Leistungsbestimmungseinheit und Geber besteht eine Verbindung. Bestimmt die Leistungsbestimmungseinheit das Absinken der Leistungsaufnahme durch den Motor, wird der Geber veranlasst, eine Taktung der Leistungstransitoren und damit der Bestromung der Motorphasen derartig zu bewirken, dass die Drehzahl der Motors einen niedrigeren Wert erhält. Vorteilhaft einfach ist es, die Drehzahl von einem oberen Normalbedingungswert bei Unterschreiten eines Leistungsaufnahmeschwellwertes auf einen niedrigen Schondrehzahlwert umzuschalten.The power determination unit is connected via a measuring line 226 with the motor phases and measures the currents and voltages occurring in these. There is a connection between the power determination unit and the encoder. If the power determination unit determines that the power consumption by the motor has dropped, the encoder is caused to cause a clocking of the power transistors and thus the energization of the motor phases in such a way that the speed of the motor receives a lower value. It is advantageously simple to switch the rotational speed from an upper normal condition value when falling below a power consumption threshold value to a low slip speed value.

Claims (8)

  1. An arrangement having a vacuum pump (10; 210) which compresses against atmosphere and which comprises at least one pump stage (12; 212) and a motor (14; 214) driving the pump stage, and having a current feed assembly (21; 221), characterized in that the arrangement has a measurement assembly (24; 224) for determining an electrical operating parameter of the motor; and in that the power consumption of the motor can be determined using the electrical operating parameter of the motor; and in that this power consumption of the motor is suitable for drawing conclusions on the compression work to be performed in the pump.
  2. An arrangement in accordance with claim 1, characterized in that it has a connection (27; 227) between the measurement assembly (24; 224) and the current feed assembly (21; 221).
  3. An arrangement in accordance with one of the preceding claims, characterized in that the vacuum pump (10; 210) comprises at least two pump stages; and in that the motor (214) drives at least two of the pump stages simultaneously.
  4. An arrangement in accordance with any one of the preceding claims, characterized in that the motor is configured as a brushless DC current motor.
  5. An arrangement in accordance with any one of the preceding claims, characterized in that at least one pump stage (12; 212) is configured as running dry while compressing against atmosphere.
  6. An arrangement in accordance with any one of the preceding claims, characterized in that at least one pump stage (12) comprises a reciprocating piston (246; 266) running in a liner (245; 265) and a seal (247; 267) between the liner and the reciprocating piston.
  7. A method of operating a vacuum pump (10; 210) having a motor (14; 214) with which a small speed of rotation is sufficient with a small gas quantity to be compressed, characterized in that a small gas quantity is determined by the power consumption of the motor; and in that the power consumption of the motor is measured and the speed of rotation of the motor is reduced when the power consumption falls.
  8. A method in accordance with claim 7, characterized in that the reduction of the speed of rotation takes place on a falling below of a power consumption threshold.
EP09014532.7A 2008-12-12 2009-11-20 Assembly with vacuum pump and method for operating same Revoked EP2196669B1 (en)

Applications Claiming Priority (1)

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DE102008062054.8A DE102008062054B4 (en) 2008-12-12 2008-12-12 Arrangement with vacuum pump and method for operating a vacuum pump

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EP2196669A2 EP2196669A2 (en) 2010-06-16
EP2196669A3 EP2196669A3 (en) 2012-07-11
EP2196669B1 true EP2196669B1 (en) 2014-07-23

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DE102008062054B4 (en) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Arrangement with vacuum pump and method for operating a vacuum pump
DE102011086572B4 (en) * 2010-11-17 2019-08-14 KSB SE & Co. KGaA Method and control device for variable-speed control of a positive displacement pump assembly and positive displacement pump assembly
DE102011010218B4 (en) * 2011-02-03 2019-09-12 Robert Bosch Gmbh A method of regulating the pressure of a fluid delivered by a variable speed pump

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JPS5713286A (en) * 1980-06-30 1982-01-23 Toshiba Corp Operating method of vacuum pump
DE19630384A1 (en) * 1996-07-29 1998-04-23 Becker Kg Gebr Process for controlling or regulating an aggregate and frequency converter
JP2000110735A (en) * 1998-10-01 2000-04-18 Internatl Business Mach Corp <Ibm> Pump protection system, pump protection method, and pump system
JP4365059B2 (en) * 2001-10-31 2009-11-18 株式会社アルバック Operation method of vacuum exhaust system
JP2003155981A (en) 2001-11-21 2003-05-30 Toyota Industries Corp Operation control method for vacuum pump and operation controller thereof
JP4111728B2 (en) 2002-03-20 2008-07-02 株式会社リコー Vacuum pump control device and vacuum device
JP2004197644A (en) 2002-12-18 2004-07-15 Toyota Industries Corp Controller for vacuum pump
JP2005083316A (en) * 2003-09-10 2005-03-31 Boc Edwards Kk Motor control system and vacuum pump mounting the same
DE102006012532A1 (en) 2006-03-18 2007-09-20 Pfeiffer Vacuum Gmbh Sealing arrangement for a reciprocating vacuum pump
DE102006032765A1 (en) 2006-07-14 2008-01-17 Leybold Vacuum Gmbh vacuum pump
DE102006050943B4 (en) 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vacuum pump and method for operating the same
DE102008062054B4 (en) * 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Arrangement with vacuum pump and method for operating a vacuum pump

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EP2196669A2 (en) 2010-06-16
JP2010138901A (en) 2010-06-24
EP2196669A3 (en) 2012-07-11
DE102008062054A1 (en) 2010-06-17
DE102008062054B4 (en) 2019-05-29

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