EP2191140A1 - Pompe à vide - Google Patents

Pompe à vide

Info

Publication number
EP2191140A1
EP2191140A1 EP08804262A EP08804262A EP2191140A1 EP 2191140 A1 EP2191140 A1 EP 2191140A1 EP 08804262 A EP08804262 A EP 08804262A EP 08804262 A EP08804262 A EP 08804262A EP 2191140 A1 EP2191140 A1 EP 2191140A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
brake
relay
module
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08804262A
Other languages
German (de)
English (en)
Inventor
Ulrich Jung
Christian Harig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2191140A1 publication Critical patent/EP2191140A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Definitions

  • the invention relates to a high-speed magnetic bearing vacuum pump with backup bearings.
  • Vacuum pumps are operated at rated speeds of several 10,000 to 100,000 rev / min.
  • frictionless magnetic bearings for supporting the pump rotor are suitable for such vacuum pumps.
  • the Pump rotor supported by one or more associated mechanical Fanglagem, which may be formed as a rolling or sliding bearing. A complete discharge of a previously run at rated speed vacuum pump may take several hours. If this occurs in case of failure of the magnetic bearing, the fishing camps are claimed considerably, so that they tolerate only a few so-called full outlets.
  • the object of the invention is in contrast to provide a vacuum pump, in which the backup bearings are reliably protected in case of failure of the magnetic bearing.
  • the vacuum pump according to the invention has a brake relay with several changers, each changer having a base contact, a brake contact and an operating contact.
  • the alternating connection is established between the base contact on the one hand and the brake contact or the operating contact on the other hand.
  • the brake contacts are directly connected to each other and thus form a common short-circuit point.
  • the stator coils of the drive motor are connected to the base contacts of the changer.
  • the stator coils are electrically connected directly to each other via the short-circuit point in the brake position of the changer.
  • the stator coils are individually connected to an inverter module via the operating contacts. In the inverter module, the required for the operation of the drive motor electrical energization pattern is generated.
  • stator coils are connected to the inverter module via the operating contacts of the changer, which generates the appropriate energization pattern for the respective stator coil.
  • a respective changer is provided in each case.
  • the brake relay is switched to its braking position, so that the stator coils are no longer connected to the inverter module, but only directly to each other. Due to the simple design of the brake relay as a changer and the simple switchover in case of failure or failure of the operating position in the braking position is provided in a very simple manner a reliable switching for the case of an error.
  • the drive motor After switching the brake relay to the braking position, the drive motor operates as a generator.
  • the electrical energy generated by the generator in the drive motor stator coils is dissipated or buffered in the form of heat via the housing of the vacuum pump.
  • the entire brake assembly which consists essentially of the brake relay and the stator coils is extremely simple and robust, and thus reliable. In the event of a fault, a quick and efficient speed reduction is realized by the immediate changeover of the changer into the braking position and the immediate onset of the braking effect.
  • the immediate separation of the inverter module from the stator coils prevents, in particular in the event that the inverter module itself is faulty and cause of destruction, after detection of such a fault, the inverter module can still be damaging.
  • the motor stator which is essentially formed by the stator coils and a stator lamination, is preferably connected to a heat absorption body in an air gap-free manner.
  • the motor stator can be pressed into a suitably designed heat-absorbing body for this purpose so that the interfaces touch each other over a large area and have good heat conduction.
  • the heat absorption body with the rotor stator with aids such as thermal grease, shallleitfolien etc., good be thermally conductively connected.
  • a mean thermal resistance of less than 0.1 K / W can be found. As a result, a reliable dissipation of the brake heat is ensured even at high braking performance and relatively small interfaces between the motor stator and the heat-absorbing body, and prevents overheating of the stator coils.
  • a temperature sensor is associated with the motor stator and / or the heat-absorbing body, wherein a power switch influences the electrical braking power as a function of the temperature measured by the temperature sensor.
  • the heat receiving body is formed by the pump housing.
  • the motor stator is thus directly or indirectly, at least good thermal conductivity, connected to the pump housing.
  • the pump housing is preferably made of aluminum, since aluminum has good thermal conductivity and heat capacity properties.
  • the heat-absorbing body can also be formed by a separate heat-absorbing element, which consists of a different material than the pump housing and the motor stator or the stator.
  • the heat absorbing member may be made of a material that has a phase transition between 30 ° C and 80 ° C having. Since a phase transition is always associated with a high consumption of heat energy, a heat absorbing element designed in this way can absorb a great deal of energy without considerably heating up.
  • a material for example, a low-temperature metal, wax, water, etc. is suitable.
  • the brake contact is a normally closed contact and the operating contact is a normally open contact of the brake relay.
  • the brake contact can also be designed as a normally open contact and the normally closed contact as an operating contact.
  • such an arrangement would ensure in case of failure of the power supply for the operation of the brake relay that the brake relay could not be brought into the braking state or in the braking position. It is therefore advantageous to use for the connection of the motor coils with each other, the normally closed contacts of the brake relay.
  • the backup bearing is designed as a sliding bearing.
  • the brake relay is a mechanical relay. Only a mechanical relay offers, in contrast to an electronic relay, the possibility of a true electrical isolation of the stator coils of the drive motor from the rest of the control and regulation of the vacuum pump. The mechanical relay falls automatically in complete failure of the power supply to its rest position, which is preferably the fault position or the braking position, so that there is a high level of security with respect to a burnout and an undesirable short circuit of the changeover contacts.
  • a relay control is provided for controlling the brake relay having an error message input connected to an electrical module, the relay controller switching the brake relay to a fault condition when an error message is sent to an error message input Signal is present at least one electrical module.
  • An electrical module in this sense may be the inverter module, a computer module, a watchdog module monitoring the operation of the computer module, a power supply module and / or a magnetic bearing control module.
  • Each of the mentioned modules is preferably connected with its own signal line to a separate error message input of the relay control.
  • the relay control is a separate module that controls the brake relay.
  • the relay controller has a plurality of error message inputs, each connected to an electrical module of the vacuum pump, which are directly or indirectly involved in the operation of the pump rotor, and in particular, dealing with the operation of the magnetic bearing and the drive motor. If only one of the modules connected in this way to an error message input of the relay control reports an error message to the relay control, the brake relay is switched to the error state.
  • the immediate removal of the inverter module from the motor coils prevents, in particular in the event that the inverter module itself is faulty and the cause of destruction, after detection of such a fault, the inverter module can no longer be harmful.
  • the brake relay is in its operating state or in its operating position in which the motor coils are connected to the inverter module, if
  • the watchdog module which in turn monitors the correct operation of the computer module, detects no error
  • the backup bearings are designed as plain bearings.
  • Sliding bearings are generally cheaper than rolling bearings. Due to the reliable braking of the pump rotor in case of failure or braking, the wear of the plain bearing is significantly reduced. As a result, even for high rated speeds and high pump rotor masses, a relatively inexpensive slide bearing can be used as a backup bearing.
  • the vacuum pump is a turbomolecular vacuum pump.
  • Turbomolecular vacuum pumps are usually operated at very high speeds of several 10,000 rpm and are therefore predestined for the use of a magnetic bearing, each of which is assigned a corresponding fishing camp.
  • Figure 1 schematically shows a vacuum pump with a brake relay
  • Figure 2 is a vacuum pump, as in Figure 1, with the difference that the heat-absorbing body of a separate
  • Heat absorbing element is formed.
  • FIGS. 1 and 2 show a turbomolecular vacuum pump 10, which consists of a pump unit 12 and a control unit 14, which are connected to one another by electrical connection lines 40.
  • the vacuum pump 10 has in its pump unit 12 a pump rotor 16 which is driven by an electric drive motor 18 at a rated speed of up to 100,000 rpm.
  • the rotor shaft is magnetically mounted in two magnetic bearings 20,21, which are each multi-axis and together form a five-axis magnetic bearing.
  • the magnetic bearings 20,21 catch bearings 22,23 are assigned, which are designed as a mechanical sliding bearing or as a rolling bearing.
  • the drive motor 18 is a three-phase DC brushless motor and has three stator coils 19 ! , 19 2 , 1Q 3 on. However, the drive motor can also be designed as an asynchronous machine or as a reluctance motor.
  • the pump unit 12 further includes a brake relay 42 having three changers.
  • the changer has three base contacts 62,63,64, three designed as working contacts operating contacts 47,48,49 and three formed as normally closed contacts brake contacts 44,45,46.
  • the three stator coils 19i, 19 2 , 19 3 are each connected to a base contact 62, 63, 64.
  • the brake contacts 44,45,46 are each directly connected to each other via a circuit breaker 54. The connection of the three brake contacts 44,45,46 behind the power switch 54 forms a short-circuit point 60th
  • the power switch 54 is coupled to a temperature sensor 58, which is attached to the motor stator 72 thermally conductive. In the event of impending overheating of the stator coils 19i, 19 2 , 19 3 in the event of braking, the circuit breaker 54 is opened, and is not closed again until the temperature of the motor stator 72 determined by the temperature sensor 58 has dropped again to an admissible temperature.
  • the power switch 54 may also be designed to regulate the braking power continuously.
  • the vacuum pump 10 of Figure 1 is thermally conductively connected with its motor stator 72 directly to the pump housing 70, which consists of aluminum. Between the motor stator 72 and the pump housing 70, a heat conducting layer 68 is provided, in the form of a thermal paste or a heat conducting foil. The heat-conducting layer 68 establishes a good heat-conducting connection between the motor stator 72 and the housing 70, so that a low thermal resistance is produced in this area.
  • the stator coils 19i, 19 2 , 19 3 are also connected to the stator stator of the motor stator with good thermal conductivity, for example, by encapsulation in a highly heat-conductive potting compound and / or use of a positive-locking coil carrier.
  • the housing 70 forms a heat receiving body 70 in the embodiment of FIG.
  • the heat-absorbing body is formed by a separate heat-absorbing element 66, which surrounds the motor stator 72 and is connected to it with good heat-conducting properties.
  • the heat absorbing member is made of a material which changes its state of aggregation in a range between 30 ° C and 80 ° C, for example, wax.
  • a heat receiving element material for example, a low-temperature metal, such as lead or similar materials may be used. Water can also be used as the heat receiving element material, but its phase transition from liquid to gaseous would be irreversible.
  • the control unit 14 has a power supply module 30 for supplying power to all other modules and components, an inverter module 32 for energizing the motor coils 19i, 19 2 , 19 3 , a magnetic bearing control module 34 for controlling the magnetic bearings 20,21, a computer Module 36 for controlling and monitoring in particular the magnetic bearing control module 34 and the inverter module 32, a watchdog module 38 for monitoring the functionality of the computer module 36 and a relay control 28 for controlling the brake relay 42.
  • a power supply module 30 for supplying power to all other modules and components
  • an inverter module 32 for energizing the motor coils 19i, 19 2 , 19 3
  • a magnetic bearing control module 34 for controlling the magnetic bearings 20,21
  • a computer Module 36 for controlling and monitoring in particular the magnetic bearing control module 34 and the inverter module 32
  • a watchdog module 38 for monitoring the functionality of the computer module 36
  • a relay control 28 for controlling the brake relay 42.
  • the relay controller 28 has a plurality of error message inputs, which are connected via corresponding electrical signal lines to the inverter module 32, the computer module 36 and the watchdog module 38. If only one of the three aforementioned modules 32,36,38 sends an error signal to the relevant error message input of the relay controller 28, the relay controller 28 switches the brake relay 42 in the error or braking state shown in the figures 10 is shown.
  • the brake relay 42 is a purely mechanical relay. Also, the magnetic bearing control module 34 and the power supply module 30 may optionally be connected via a corresponding signal line to an error message input of the relay controller 28.
  • the pump rotor 16 can also be actively magnetically supported only one, two, three or four axes, while the other axes are mounted passively or mechanically.
  • the watchdog module 38 is notified by the computer module 36 at regular intervals, typically a few microseconds to milliseconds. If the agreed notification signal remains off, the watchdog module 38 outputs an error signal to the relay controller 28.
  • the inverter module 32 and / or the computer module 36 directly output a fault signal to the relay controller 28 when the aforementioned modules 32,36 detect internal or external irregularities, the immediate braking of the vacuum pump or the Justify pump rotor 16.
  • the computer module 36 also monitors the function of the magnetic bearing control module 34 and the power supply module 30 accordingly.
  • the brake relay 42 In the event of an interruption of the electrical connection lines 40 between the pump unit 12 and the control unit 14, the brake relay 42 automatically falls into the braking state or in the braking position, so that the motor coils 19i, 19 2 , 19 3 are short-circuited to each other for this case.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe à vide (10) comprenant un rotor de pompe (16), un palier magnétique actif (20, 21), un palier d'arrêt (22, 23) associé au palier magnétique (20, 21), un moteur électrique d'entraînement (18) présentant un stator avec plusieurs bobines de stator (191, 192, 193), pour l'entraînement du rotor de pompe (16), un relais de freinage (42) à plusieurs inverseurs ayant chacun un contact de base (62, 63, 64), un contact de freinage (44, 45, 46) et un contact de fonctionnement (47, 48, 49), et un point de court-circuit (60) par l'intermédiaire duquel tous les contacts de freinage (44, 45, 46) du relais de freinage sont directement connectés entre eux. Toutes les bobines de stator (191, 192, 193) sont connectées aux contacts de base (62, 63, 64) de l'inverseur, et peuvent être connectées directement entre elles, via les contacts de freinage (44, 45, 46) du relais de freinage (42) et via le point de court-circuit (60), et peuvent être connectées, via les contacts de fonctionnement (47, 48, 49), avec un module convertisseur (32).
EP08804262A 2007-09-19 2008-09-16 Pompe à vide Withdrawn EP2191140A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007044690A DE102007044690A1 (de) 2007-09-19 2007-09-19 Vakuumpumpe
PCT/EP2008/062304 WO2009037255A1 (fr) 2007-09-19 2008-09-16 Pompe à vide

Publications (1)

Publication Number Publication Date
EP2191140A1 true EP2191140A1 (fr) 2010-06-02

Family

ID=40219434

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08804262A Withdrawn EP2191140A1 (fr) 2007-09-19 2008-09-16 Pompe à vide

Country Status (9)

Country Link
US (1) US20100196180A1 (fr)
EP (1) EP2191140A1 (fr)
JP (1) JP2010539387A (fr)
KR (1) KR20100083790A (fr)
CN (1) CN101802414A (fr)
CA (1) CA2698485A1 (fr)
DE (1) DE102007044690A1 (fr)
TW (1) TW200925430A (fr)
WO (1) WO2009037255A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6079090B2 (ja) * 2011-12-08 2017-02-15 株式会社島津製作所 磁気浮上式真空ポンプおよび磁気浮上装置
US9917544B2 (en) * 2016-02-13 2018-03-13 Ge Aviation Systems, Llc Method and power converter unit for operating a generator
EP3444478A1 (fr) * 2017-08-18 2019-02-20 Pfeiffer Vacuum Gmbh Pompe à vide

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535052A (en) * 1967-08-18 1970-10-20 Pfeiffer Vakuumtechnik Electrically driven vacuum pump
US4143309A (en) * 1977-04-11 1979-03-06 Patterson Williams G Turbomolecular pump drive method and apparatus
DE3302839A1 (de) * 1983-01-28 1984-08-02 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Turbomolekularpumpe mit induktivitaetsarmem gleichstrommotor, bremseinrichtung und verfahren zum betrieb derselben
JPS60190697A (ja) * 1984-03-09 1985-09-28 Seiko Seiki Co Ltd タ−ボ分子ポンプにおける磁気軸受の制御方式
FR2659396B1 (fr) * 1990-03-07 1992-05-15 Cit Alcatel Pompe a vide pour vide moleculaire propre.
IT1250893B (it) * 1991-12-24 1995-04-21 Varian Spa Dispositivo elettronico di frenaggio per motori asincroni.
FR2747431B1 (fr) * 1996-04-15 1998-07-03 Soc D Mecanique Magnetique Pompe turbomoleculaire a paliers magnetiques actifs
JP3057486B2 (ja) * 1997-01-22 2000-06-26 セイコー精機株式会社 ターボ分子ポンプ
FR2804476B1 (fr) * 2000-01-31 2002-04-12 Cit Alcatel Systeme amortisseur et centreur de roulement pour pompe a vide sur palier magnetique
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
US7404698B2 (en) * 2005-08-16 2008-07-29 Edwards Vacuum, Inc. Turbomolecular pump with static charge control
DE102006041183A1 (de) * 2006-09-01 2008-03-06 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009037255A1 *

Also Published As

Publication number Publication date
DE102007044690A1 (de) 2009-04-02
TW200925430A (en) 2009-06-16
US20100196180A1 (en) 2010-08-05
KR20100083790A (ko) 2010-07-22
JP2010539387A (ja) 2010-12-16
CN101802414A (zh) 2010-08-11
WO2009037255A1 (fr) 2009-03-26
CA2698485A1 (fr) 2009-03-26

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