EP2087391A1 - Configuration optique, et procédé pour commander et influencer un faisceau lumineux - Google Patents

Configuration optique, et procédé pour commander et influencer un faisceau lumineux

Info

Publication number
EP2087391A1
EP2087391A1 EP07802957A EP07802957A EP2087391A1 EP 2087391 A1 EP2087391 A1 EP 2087391A1 EP 07802957 A EP07802957 A EP 07802957A EP 07802957 A EP07802957 A EP 07802957A EP 2087391 A1 EP2087391 A1 EP 2087391A1
Authority
EP
European Patent Office
Prior art keywords
coupled
optical arrangement
light beam
light beams
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07802957A
Other languages
German (de)
English (en)
Inventor
Holger Birk
Volker Seyfried
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Microsystems CMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Microsystems CMS GmbH filed Critical Leica Microsystems CMS GmbH
Publication of EP2087391A1 publication Critical patent/EP2087391A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G01J3/16—Generating the spectrum; Monochromators using refracting elements, e.g. prisms with autocollimation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/12—Beam splitting or combining systems operating by refraction only
    • G02B27/126—The splitting element being a prism or prismatic array, including systems based on total internal reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1282—Spectrum tailoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1286—Polychromator in general

Definitions

  • the invention relates to an optical arrangement, in particular for use as a main beam splitter and / or Strahlerlick in a microscope, in which one or more light beams can be coupled and from the at least one of the coupled
  • Light beams after passing through the optical arrangement can be coupled out again. Furthermore, the
  • Dichroic filters are narrow-band, high-precision color filters that operate on the principle of interference. In contrast to conventional filters, the non-transmitted spectral components of the incident light beam are not absorbed, but are reflected at the filter. As a result, a section of the spectrum of a light beam can be generated. Dichroic filters have the significant disadvantage that they have fixed spectral properties. If these are to be changed, the filters must be replaced. Therefore, in practice AOBS (Accusto Optical Beam Splitter) are known.
  • An AOBS consists of a crystal, which is acted upon by an acoustic sound wave. As a result, light rays that pass through the crystal are deflected differently depending on their wavelength. This makes it possible to decouple very narrow-band components of the spectrum of the incident light beam. If an AOBS is operated in the reverse direction, then light beams can be combined. By changing the frequency of the sound wave, the position of the separated spectral range can be influenced. As a result, a controllable in tight areas beam splitter is given. The disadvantage of this is that an AOBS is very expensive. In addition, the separated spectral range is very narrow (generally less than 2 nm). Broadband spectral components can not be obtained with an AOBS.
  • the present invention is therefore based on the object, such an optical arrangement of the type mentioned in such a way and further, that a decoupled from the optical arrangement of light beam at the lowest possible cost of the arrangement is relatively freely influenced.
  • the above object is solved by the features of claim 1.
  • the arrangement in question is characterized in that in the coupled light beams a controllable microstructured element is arranged ⁇ , can be switched with the beam paths within the optical arrangement, whereby the / the decoupled / s light beam / s controllable and / or influenced is / are.
  • a controllable microstructured element is arranged according to the invention in the coupled-in light beam or the coupled-in light beams.
  • the microstructured element has an array of segments that can affect a light beam differently depending on an applied control signal.
  • Such a segment may for example consist of a tiltable mirror surface, a controllable micro prism or the like.
  • These segments fall according to the invention, the coupled light beams.
  • the arrangement according to the invention can also be used for influencing the spectrum of a coupled-in light beam.
  • the coupled-in light beam should be present in spectrally spatially fanned-out form. If a coupled-in light beam exists as a multicolor light beam, ie in a non-spectrally spatially fanned-out form, then the coupled-in light beam can travel through a dispersive medium for spatially spectral fanning.
  • suitable arrangement of the microstructured element it is then possible to selectively direct individual spectral components in the optical arrangement. As a result, individual spectral components of a coupled-in light beam can be separated out or influenced in their intensity.
  • the spectrum of a coupled-in light beam can be influenced comparatively arbitrarily by the arrangement according to the invention.
  • a coupled-in light beam, a separated out spectral component or the remaining part of a light beam can be coupled out of the arrangement.
  • the optical arrangement is equally applicable to narrow-band light sources as it is to very broad-band spectra.
  • the beam paths within the optical arrangement could be switched in such a way be configured such that a light beam coupled out of the optical arrangement results from a desired coupled-in light beam.
  • a light beam can be selected and coupled out of the optical arrangement.
  • individual arbitrary spectral components could be coupled out of a coupled light beam from the arrangement. These can be chosen almost arbitrarily by the very flexible structure of the arrangement. For this, only the microstructured element has to be sufficiently flexibly controllable. Connected spectral components or individual bands of different widths can be coupled out of the spectrum of a light beam. But also disturbing or unwanted spectral ranges can be suppressed. For example, imaging artifacts can be removed from the spectrum.
  • the spectral components which are not decoupled from the arrangement in a specific operating state could be capable of being conducted into an absorber. This would prevent unwanted interference from occurring within the optical assembly.
  • An absorber can be configured in various ways known from practice.
  • the device referred to here as absorber only has to have the ability to absorb substantial portions of the incident light rays.
  • the absorber could also be designed as a light trap.
  • the microstructured element comprises a DMD (Digital Micromirror Device).
  • a DMD consists of an array of many small single mirror surfaces.
  • DMDs known from practice have 1024 ⁇ 768 individual mirrors, which for example have a size of 13.68 ⁇ m ⁇ 13, 68 ⁇ m.
  • Each of the individual mirrors can be influenced individually by applying a control voltage in its position. As a result, incident light beams are reflected in different directions depending on the position of the individual mirror.
  • the individual segments of the microstructured element for example, the
  • a group of segments could comprise a column of the microstructured element or a section of such a column.
  • micro-lenses could be assigned to the microstructured element.
  • a microlens could be available for each individual segment of the microstructured element.
  • one lens could be used for multiple segments.
  • a column of the microstructured element could be a cylindrical
  • Lens be provided. This is useful, for example, if a microstructured element in Dependence of the direction has a different fill factor.
  • the microlenses could be arranged as widely as possible in order to focus the incident light as effectively as possible on the individual segments of the microstructured element.
  • the light beams coupled into the device have a plurality of spectral components.
  • a light beam could only have individual spectral lines, but the light beams could also include broad wavelength bands up to white light.
  • the arrangement according to the invention sets here no restrictions.
  • the coupled-in light beams can be formed by a wide variety of light sources.
  • a coupled-in light beam could comprise a laser beam.
  • a coupled light beam could be formed by the light reflected from or emitted from a lighted sample. The latter occurs, for example, upon excitation of a fluorescent sample.
  • many other light sources are conceivable.
  • the dispersive medium preferably comprises a prism or a grid.
  • the dispersive medium can also be designed as a double arrangement. In the case of prisms, this would mean that two prisms are point-symmetrically spaced apart in such a way are arranged so that their side surfaces are substantially parallel.
  • the light beam is spectrally expanded by the first prism and impinges on the second prism, which, for example, generates substantially parallel light beams from the diverging individual light beams.
  • Each coupled-in light beam can be provided with its own dispersive medium.
  • a dispersive medium could also be used by multiple light beams to simplify construction and reduce costs. It is also possible that a dispersive medium is passed through a light beam in one direction, while the same dispersive medium is used by another light beam in the opposite direction.
  • the dispersive media could be arranged such that the direction of the spectral spatial fanning is substantially the same for all the coupled-in light beams.
  • the coupled-in light beams are locally very limited
  • Range of segments falls. Therefore, one or more lenses could be arranged after the spectral fanning, the spectrally fanned out Scatter light beam substantially perpendicular to the spectral fanning. As a result, the microstructured element can be used much more effectively.
  • spectral components can be completely blanked out, but also their intensity can be influenced, in particular in the case of an expanded spectrally fanned-out light beam.
  • the light of a spectral portion will generally not fall on only a single segment of the microstructured element. Rather, a plurality of segments, which are arranged perpendicular to the direction of the spectral fanning, illuminated by a spectral component of a light beam. If now only individual or at least not all segments are tilted in such a way that not all reflected light beams are directed in the direction of a coupling-out point, then the intensity of a spectral component can be influenced in this way.
  • the spectrum of the coupled-out light beam can be influenced and corrected particularly simply.
  • a light source contains an undesirably high proportion of a color
  • this proportion could be masked out or reduced in intensity by suitably switching the segments of the microstructured element.
  • the light coupled out of the optical arrangement could in turn be used for different purposes. It could, for example, illuminate a sample.
  • the decoupled light could be supplied to a detector.
  • the decoupled light beams can be used for many other purposes.
  • the optical arrangement could be changed between several operating states. This could be done once, repeatedly or periodically with different residence times in the individual operating states.
  • the microstructured element In an operating state, the microstructured element could be switched such that a coupled-in light beam is coupled out again to illuminate a sample.
  • the light reflected or emitted by the sample could be supplied to a detector.
  • a fluorescent sample can be excited with one laser beam in one operating state, while in another operating state, the fluorescent light emitted by the sample is fed to a detector.
  • the microstructured element could be used such that several coupled light beams are merged into one light beam. In both cases, the directing of a light beam can also relate only to individual spectral lines or even to individual parts of a spectral line.
  • Fig. 2 shows an arrangement according to FIG. 1 with a coupled-in light beam from a
  • FIG. 3 shows an arrangement according to FIG. 1 with a coupled-in light beam, which is directed into an absorber
  • FIG. 4 shows an arrangement according to FIG. 1 with a light beam emanating from an object which is fed to a detector
  • FIG. 5 shows an inventive arrangement for switching between two coupled light beams, in which a first coupled light beam is directed into an absorber
  • Fig. 6 shows an arrangement according to FIG. 5, in which a second coupled light beam is directed into an absorber and
  • FIG. 7 shows a microstructured element with 16 ⁇ 8 individual segments used in an arrangement according to the invention.
  • Figs. 1 to 4 show an arrangement according to the invention, which is designed as a main beam splitter in a microscope.
  • the optical arrangement 1 has three prism pairs 2, 3, 4.
  • the prisms 2.1, 2.2, 3.1, 3.2, 4.1, 4.2 of the prism pairs 2, 3, 4 are each configured the same and arranged such that the prisms of a pair of prisms come point-symmetrical spaced apart to lie.
  • the individual prism arrangements 2, 3, 4 are staggered relative to one another, as a result of which the light rays which pass through the prisms and are spectrally spatially fanned out can fall onto a common microstructured element 5.
  • the direction of fanning by the prism pairs 2, 3, 4 is substantially the same.
  • the microstructured element 5 has a plurality of individual segments, which are each individually controllable.
  • the microstructured element is a DMD (Digital Micromirror Device), of which, by way of example, two individual mirrors 6 are shown in FIGS. 1 to 6.
  • the DMD has a plurality of individual mirror segments. These are arranged both in the drawing plane and perpendicular to it.
  • FIG. 7 shows by way of example such a DMD in which an array of 16 ⁇ 8 individual mirror surfaces 6 is shown.
  • the optical arrangement 1 comprises an objective 7, an absorber 8 and a detector 9 as well as an associated detection diaphragm 10. Furthermore, an electronic control unit (not shown) is provided which is used to control the individual segments 6 is used. The interaction of the individual components is further clarified below.
  • Fig. 1 shows such an arrangement, which is traversed by an excitation light beam 11.
  • the light beam 11 is generated by a laser light source, not shown, and coupled into the optical arrangement 1.
  • the light beam 11 initially falls on the prism 2.1, through which the light beam is spatially fanned out spectrally.
  • the fanned-out light beam is essentially parallelized.
  • This light beam is incident on the segments 6 of the microstructured element 5, which are in a first position.
  • the light beam is reflected at these segments and falls on another prism 3.2, which, together with a prism 3.1 merges the individual spectral components back into a light beam.
  • This light beam passes through an objective 7 and is used to illuminate a sample not shown here.
  • Fig. 2 shows the same arrangement as Fig.l, but in which the arrangement is traversed in the reverse direction.
  • Light beam 12 results from a sample. He first falls on the lens 7 and is then fanned out spatially spectrally by the prism pair 3. The segments 6 of the microstructured element 5 are still in a first position, so that the light beam via the prism pair 2 are coupled out of the optical arrangement 1 again. There is thus no detection of the light 12 coming from the sample.
  • FIG. 3 again shows the arrangement according to FIG. 1, but in which the segments 6 of the microstructured element 5 are in a second position.
  • a light beam 11 coming from a light source in turn passes through the prism pair 2 for spectral fanning, but is then not reflected at the segments 6 in the direction of the prism pair 3 and thus not in the direction of the objective. Rather, the rays are directed into an absorber 8. As a result, no illumination of the sample takes place in the second position.
  • a light beam 14 emanating from the sample can be directed into the detector 9.
  • a corresponding beam path is shown in FIG. 4.
  • the light beam 14 first passes through the objective 7, is spatially spectrally fanned out by the prism pair 3 and strikes the segments 6 which are located in the second position.
  • the light beams are directed into the prism pair 4, which in turn merges the individual spectral components into a light beam.
  • This passes through the detection aperture 10 and impinges on the detector 9.
  • the spectrally fanned out light beam could also be fed directly to the detector 9.
  • Figures 1 to 4 illustrate only the beam paths that result when all the segments 6 of the microstructured element 5 are in a first or in a second position. However, it is also possible that individual segments 6 are in a first position, while other segments 6 are brought into a second position.
  • an illuminating light beam 11 for example, includes a white light and thus a fluorescent sample to be excited. For example, if it is known that the fluorescent dye emits green light upon excitation, then just these spectral components could be conducted directly into the detector 9. The segments on which the spectral lines to be detected may then be moved to a second position so that the light emitted by the sample is directed into the detector 9. If the segments 6 are in the second position, the spectral components of the excitation light beam 11 are conducted into the absorber 8. With this embodiment according to the invention, it is thus also possible to illuminate a sample simultaneously and to detect the fluorescent light to be detected.
  • FIGS. 5 and 6 show a similar arrangement to FIGS. 1 to 4.
  • the optical arrangement 1 ' has two prism pairs 2, 3, a microstructured element 5, two absorbers 8, 13 and a mirror 14.
  • the arrangement of FIGS. 5 and 6 can be used to direct one of two coupled light beams to an output point.
  • Fig. 5 shows the arrangement in which the segments 6 of the microstructured element 5 are in a first position.
  • a multi-color light beam coupled into the arrangement which is spatially spectrally fanned out by the prism pair 2 is reflected at the segments 6 into the prism pair 3.
  • the prism pair 3 combines the individual spectral components into a single light beam.
  • individual spectral components are already coupled. These can be generated for example by three narrow-band laser light sources.
  • the individual spectral components L 1 , L 2 , L 3 strike the mirror 14 and are reflected by it onto the segments 6 of the microstructured element 5.
  • the further course of the light beam L 2 is not shown.
  • the light beams L 1 , L 2 , L 3 when the segments 6 of the microstructured element 5 are in the first position, fall into the absorber 13.
  • Fig. 6 shows the arrangement 1 'again, wherein the segments 6 of the microstructured element 5 are in a second position.
  • the light beams L 1 , L 2 , L 3 are directed to the prism pair 3 and combined by this into a light beam.
  • the multi-color light beam 15 is reflected in the second layer of the segments 6 such that it falls into the absorber 8.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

L'invention concerne une configuration optique, en particulier pour une utilisation en tant que séparateur de faisceau principal et/ou concentrateur de faisceau dans un microscope, dans laquelle un ou plusieurs faisceaux lumineux (11, 12, 15, L1, L2, L3) peuvent être injectés, et à partir de laquelle au moins un des faisceaux lumineux injectés (11, 12, 15, L1, L2, L3) peut être à nouveau extrait après la mise en marche de la configuration optique (1, 11), laquelle configuration optique, pour pouvoir influencer le faisceau lumineux extrait le plus librement possible, est caractérisée en ce que, dans les faisceaux lumineux injectés (11, 12, 15, L1, L2, L3), un élément microstructuré commandable (5) est agencé, comme par exemple une matrice à micromiroirs (DMD), avec lequel des trajets de faisceaux peuvent être reliés à l'intérieur de la configuration optique (1, 1'), de sorte que le/les faisceau(x) lumineux extrait(s) puisse(nt) être commandé(s) et/ou influencé(s).
EP07802957A 2006-11-03 2007-08-28 Configuration optique, et procédé pour commander et influencer un faisceau lumineux Withdrawn EP2087391A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006052300 2006-11-03
DE102007002583A DE102007002583A1 (de) 2006-11-03 2007-01-10 Optische Anordnung und Verfahren zum Steuern und Beeinflussen eines Lichtstrahls
PCT/EP2007/058940 WO2008052821A1 (fr) 2006-11-03 2007-08-28 Configuration optique, et procédé pour commander et influencer un faisceau lumineux

Publications (1)

Publication Number Publication Date
EP2087391A1 true EP2087391A1 (fr) 2009-08-12

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EP07802957A Withdrawn EP2087391A1 (fr) 2006-11-03 2007-08-28 Configuration optique, et procédé pour commander et influencer un faisceau lumineux

Country Status (4)

Country Link
US (1) US8503084B2 (fr)
EP (1) EP2087391A1 (fr)
DE (1) DE102007002583A1 (fr)
WO (1) WO2008052821A1 (fr)

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US8503084B2 (en) 2013-08-06
WO2008052821A1 (fr) 2008-05-08

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