EP2037345A1 - Method of detecting malfunction of restriction mechanism downstream side valve of pressure flow control device - Google Patents

Method of detecting malfunction of restriction mechanism downstream side valve of pressure flow control device Download PDF

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Publication number
EP2037345A1
EP2037345A1 EP07766937A EP07766937A EP2037345A1 EP 2037345 A1 EP2037345 A1 EP 2037345A1 EP 07766937 A EP07766937 A EP 07766937A EP 07766937 A EP07766937 A EP 07766937A EP 2037345 A1 EP2037345 A1 EP 2037345A1
Authority
EP
European Patent Office
Prior art keywords
flow rate
throttle mechanism
valve
control apparatus
downstream side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07766937A
Other languages
German (de)
English (en)
French (fr)
Inventor
Masaaki Nagase
Ryousuke Dohi
Nobukazu Ikeda
Kouji Nishino
Kaoru Hirata
Katsuyuki Sugita
Atsushi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
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Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of EP2037345A1 publication Critical patent/EP2037345A1/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/022—Compensating or correcting for variations in pressure, density or temperature using electrical means

Definitions

  • the present invention relates to a method for detecting the malfunction of a valve installed on the downstream side of a throttle mechanism of a pressure type flow control apparatus by means of monitoring a flow output signal, and it is mainly directed at the use for fluid supply facilities with a pressure type flow control apparatus to be used with semiconductor manufacturing, food processing, chemical products-related facilities, and the like.
  • a pressure type flow control apparatus has been increasingly used in gas supply facilities used with semiconductor manufacturing, chemical products-related facilities, and the like, replacing a thermal type flow control apparatus.
  • the simple structure of a pressure type flow control apparatus makes it possible to reduce production costs and downsize the facilities.
  • a pressure type flow control apparatus rivals, or exceeds, a thermal type flow control apparatus both in accuracy and responsiveness.
  • valves V 1 , V 2 , V 3 are operating normally or not (i.e., being open or closed). checks are conducted by following the steps shown in Figure 10 .
  • Step S 1 the malfunction check starts with Step So.
  • Step S 2 valve V 1 is closed, valve V 2 is switched from “open” to “closed”, and valve V 3 is closed.
  • a pipe passage 1 b on the downstream side of the FCS is filled with N 2 .
  • Step S 2 the displayed pressure P 1 of the FCS is checked to see if the increase/decrease ⁇ P 1 of the pressure P 1 is zero or not. In the case that ⁇ P 1 is not zero and P 1 goes up, it is determined that there is an abnormal condition with either valve V 1 or valve V 2 , or both valves V 1 and V 2 (i.e., either sheet leaks or operational irregularity is present). And, in the case that P 1 goes down, it is determined that V 3 is abnormal (i.e., sheet leaks or operational irregularity are present) (Step S 3 ).
  • Step S 4 a process gas (i.e., a use gas) Gp is flowed into the FCS by making valve V 1 open and valve V 2 close, and the displayed pressure P 1 of the FCS is checked at Step S 5 .
  • a process gas i.e., a use gas
  • Step S 7 it is determined that V 1 is functioning normally
  • Step S 6 it is determined that valve V 1 is malfunctioning
  • Step S 9 the displayed pressure P 1 of the FCS is checked.
  • Step S 10 In the case when there is no rise of P 1 , it is determined that valve V 2 is malfunctioning (Step S 10 ), thus the operational conditions of valve V 2 are confirmed. On the other hand, when a rise of P 1 is observed, it is determined that valve V 2 is functioning normally (Step S 11 ).
  • Step S 12 it is determined whether or not the malfunction of valves found at the Step S 2 is applicable to the operational malfunction of a valve V 3 . Specifically, if the result of Step S 2 is "NO" (that is, one of valves V 1 , V 2 , V 3 is malfunctioning), and valves V 1 and V 2 are functioning normally, it is determined that a valve V 3 is malfunctioning (Step S 13 ). If the result of Step S 2 is "YES", then, it is determined that all the valves V 1 , V 2 , V 3 are functioning normally (Step S 14 ).
  • the system is constituted so that, with a pressure type flow control apparatus FCS, a flow rate of a gas passing through a throttle mechanism is computed on the basis of the gas pressure P 1 and gas temperature T 1 on the upstream side of a throttle mechanism 8 such as an orifice, a sonic nozzle, or the like, (Japanese Unexamined Patent Application Publication No. 8-38546 and others).
  • a gas flow rate Qf is computed by a flow rate computation apparatus 20 of a flow rate computation circuit 13 if gas pressure P 1 is applied to pipe passage 3, thus what is computed is outputted as a flow rate output signal Qo.
  • a flow rate output signal Go is outputted to the outside.
  • the present invention is used in a gas supply facility wherein the pressure type flow control apparatus is so made that the fluid pressure P 1 is adjusted to make the flow rate control signal Qy to be zero by computing the flow rate Qf of fluid passing through the throttle mechanism by using the fluid pressure P 1 on the upstream side of the throttle mechanism, and a control valve 2 on the upstream side of the throttle mechanism is operated to open or close by making a difference between the flow rate computation value Qf of the fluid and a flow rate setting value Qe to be a flow rate control signal Qy.
  • the flow rate computation value Qf of the fluid is outputted as a flow rate output signal Qo.
  • a valve on the downstream side of a throttle mechanism of the pressure type flow control apparatus is released and a flow rate setting value Qe to be inputted to a pressure type flow control apparatus is changed in order to detect the magnitude of changes ⁇ V of the aforementioned flow rate output signal Qo while the flow rate setting signal Qe changes.
  • the present invention as claimed in Claim 2 according to Claim 1 is so made that, when changing a flow rate setting value Qe to be inputted to a pressure type flow control apparatus, a flow rate setting value Qe' larger than a steady-state flow rate setting value Qe" or a flow rate setting value Qe' smaller than a steady-state flow rate setting value Qe" is inputted as a flow rate setting value Qe.
  • the present invention as claimed in Claim 3 is used in a gas supply facility wherein a pressure type flow control apparatus is so made that fluid pressure P 1 is adjusted to make a flow rate control signal Qy to be zero by means that a flow rate Qf of fluid passing through a throttle mechanism is computed by using the fluid pressure P 1 on the upstream side of the throttle mechanism and a control valve 2 on the upstream side of the throttle mechanism is opened/closed by making the difference between the flow rate computation value Qf and flow rate setting value Qe to be a flow rate control signal Qy, thus the aforementioned flow rate computation value Qf of fluid is outputted as a flow rate output signal Qo, a valve on the downstream side of a throttle mechanism of the pressure type flow control apparatus is closed and a flow rate setting value Qe to be inputted to the pressure type flow control apparatus is set to zero, to detect the magnitude ⁇ V of changes of the aforementioned flow rate output signal Qo while it is changing after the flow rate setting value Qe having been set to zero.
  • the present invention as claimed in Claim 4 according to Claim 3 is so made that the flow rate setting value Qe to be inputted to the pressure type flow control apparatus concurrently with the closure of the valve on the downstream side of the throttle mechanism or with the delay of a given time ⁇ t is set to zero.
  • the present invention is used in a gas supply facility for which a pressure type flow control apparatus is so made that fluid pressure P 1 is adjusted to make a flow rate control signal Qy to be zero by computing the flow rate Qf of fluid passing through a throttle mechanism by using the fluid pressure P 1 on the upstream side of the throttle mechanism, and a control valve 2 on the upstream side of the throttle mechanism is operated to open or close by making a difference between the flow rate computation value Qf of the fluid and a flow rate setting value Qe to be the flow rate control signal Qy.
  • the flow rate computation value Qf of the fluid is outputted as a flow rate output signal Qo, a valve on the downstream side of the throttle mechanism of the pressure type flow control apparatus is released and a flow rate setting signal Qe is inputted to the pressure type flow control apparatus, in order to detect the magnitude ⁇ V of changes of the flow rate output signal Qo after the valve on the downstream side of the throttle mechanism has been released.
  • the releasing operations of the valve on the downstream side of the throttle mechanism are determined to be functioning normally in the case that the magnitude ⁇ V of changes of the flow rate output signal Qo is found to be above the predetermined value; on the other hand, the releasing operations are determined to be malfunctioning in the case that the magnitude ⁇ V of changes is found to be below the predetermined value.
  • the present invention as claimed in Claim 6 according to Claim 5 is so made that the magnitude of the drop rate of the flow rate output signal Qo is detected by means that the flow rate setting signal Qe is inputted to the pressure type flow control apparatus with a delay of the predetermined time ⁇ t after the command to release the valve on the downstream side of the throttle mechanism has been transmitted.
  • the present invention as claimed in Claim 7 according to either one of Claim 1 to Claim 6 is so made that an orifice or a sonic nozzle is used for the throttle mechanism.
  • the present invention is so constituted that changes are made by means that a flow rate setting value Qe of a pressure type flow control apparatus is switched to "ON” or “OFF” either concurrently with opening or closing operations of a valve on the downstream side of a throttle mechanism of a pressure type flow control apparatus, or with a delay of a given time ⁇ t after opening/closing operations of the valve on the downstream side having been made, thus determining whether the valve on the downstream side of the throttle mechanism is functioning normally or not by observing the changes of a flow rate output signal Qo between opening or closing operations of the valve on the downstream side of the throttle mechanism and also between "ON” or “OFF” of the flow rate setting value Qe.
  • Figure 1 shows the components of a pressure type flow control apparatus used with the present invention.
  • Figure 2 is an illustration of a method for detecting malfunction of a valve on the downstream side of a throttle mechanism in accordance with Embodiment 1 of the present invention.
  • a pressure type flow rate control apparatus FCS comprises a gas supply 1, a control valve 2, a valve actuating part 4, a pressure detector 6, a throttle mechanism 8, a gas outlet 9, a flow rate output circuit 12, a flow rate computation circuit 13, a flow rate setting circuit 14, a computation control circuit 16 and others.
  • 3 designates a pipe passage on the upstream side of a throttle mechanism
  • 5 designates a pipe passage on the downstream side of a throttle mechanism
  • 7 designates a temperature detector
  • 15 designates a flow rate conversion circuit
  • 10, 11, and 22 designate amplifiers
  • 17 and 18 designate A/D converters
  • 19 designates a temperature compensation circuit
  • 20 designates a flow rate computation device
  • 21 designates a comparison circuit
  • Qc designates a computation flow rate signal
  • Qf designates a switching computation flow rate signal
  • Qe designates a flow rate setting signal
  • Qo designates a flow rate output signal
  • Qy designates a flow rate control signal
  • P 1 designates gas pressure on the upstream side of a throttle mechanism
  • k designates a flow rate conversion rate.
  • the aforementioned pressure type flow control apparatus FCS shown in Figure 1 is mainly used in the case wherein the ratio P 2 /P 1 of the gas pressure P 1 on the upstream side of the throttle mechanism and the gas pressure P 2 on the downstream side of the throttle mechanism is equal to or lower than the critical value of a fluid (that is, at the time when the gas flow is in the critical state).
  • a pressure type flow control apparatus is used to control the flow rate of a gas, which can exhibit both critical and non-critical states of flow.
  • K is a proportionality constant
  • m and n constants the gas pressure on the downstream side of a throttle mechanism
  • the setting value of the control flow rate is given by a voltage value as the flow rate setting signal Qe.
  • Qe 5V (a full scale value) is the flow rate Qc under the pressure P 1 of 3 (kgf/cm 2 abs).
  • FIG. 2 is an explanatory drawing of a test unit used for executing a method for detecting the malfunction of a valve on the downstream side of a throttle mechanism in accordance with Embodiment 1 of the present invention.
  • the test unit is so constituted that a gas supply valve V 1 and a valve V 2 on the downstream side of the throttle mechanism are connected to the upstream side and downstream side of a pressure type flow control apparatus FCS respectively, thereon a programmable controller PLC and a data logger DL are set, and following the prescribed program from the programmable controller PLC, a flow rate setting signal Qe is supplied to valves V 1 , V 2 and a flow rate setting circuit 14 of a pressure type flow control apparatus FCS, and a valve releasing signal IV 2 to a valve V 2 , a flow rate setting signal Qe to the FCS and a flow rate output signal Qo from the FCS are recorded on the data logger respectively.
  • S designates a gas source
  • C designates a
  • test system as shown in Figure 2 has been formed in order to detect the malfunction of valve V 2 on the downstream side of the throttle mechanism of the pressure type flow control apparatus FCS (operations from closure to opening not being able to be performed), and as shown in Figure 3 , first a flow rate value Qe' which differs from a steady-state flow rate value Qe" is sent as a flow rate setting signal Qe to the FCS, and then the flow rate setting signal Qe equal to the steady-state flow rate value Qe" is inputted.
  • Figure 3(a) shows the case wherein the flow rate setting value Qe', which differs from the steady-state flow rate value Qe", is made to be larger than a steady-state flow rate value Qe"
  • Figure 3(b) shows the case wherein the flow rate setting value Qe', which differs from a steady-state flow rate value Qe", is made to be smaller than the steady-state flow rate value Qe".
  • a deviation ⁇ V in a flow rate output occurs between a flow rate output Qo' in the case that the valve V 2 on the downstream side of the throttle mechanism is not released and a flow rate output Qo" in the case that the valve V 2 is released normally, thus making it possible to determine whether the valve V 2 on the downstream side of the throttle mechanism has been normally released or not, by means of monitoring the flow rate output signal Qo from the pressure type flow control apparatus FCS.
  • the flow rate setting signal Qe and the valve releasing current IV 2 are supplied to a pressure type flow control apparatus FCS and to a valve V 2 on the downstream side of a throttle mechanism, respectively, through the mediation of the programmable controller PLC, and then the state of changes of the flow rate output signal Qo from the FCS is observed, thus determining whether valve V 2 on the downstream side of the throttle mechanism has been released normally, if the deviation ⁇ V is found to be above the set value, or whether valve V 2 has not been released properly or malfunctioning in the releasing operation, if the aforementioned deviation ⁇ V is found to be below the prescribed value.
  • Embodiment 2 is made so that an operational malfunction of a valve V 2 on the downstream side of a throttle mechanism is detected at the time of the completion of a process treatment.
  • Figure 4 is an explanatory drawing of a test system used with Embodiment 2.
  • EV designates an operational electro-magnetic valve
  • V 1 designates a valve on the FCS upstream side
  • Pe designates a vacuum pump
  • Pb designates a Baratron
  • VR designates a flow rate valve
  • N 2 designates an operational gas
  • PG designates a process gas.
  • the detection of the operational malfunction of the valve V 2 on the downstream side of the throttle mechanism has been performed in a manner such that changes of a FCS flow rate output signal Qo are monitored after a flow rate setting signal Qe to the FCS is set to zero (the FCS shutdown) at the time when a treatment process is terminated, for two distinct cases.
  • the shutdown of a flow rate setting signal Qe of the pressure type flow control apparatus FCS and the closure of the valve V 2 on the downstream side of the throttle mechanism are conducted concurrently (hereinafter called a normal step), and in the other case, as shown in Figure 5(b) , some delay of time ⁇ t is made between the closure of the valve V 2 on the downstream side of the throttle mechanism and the shutdown of a flow rate setting signal of the FCS (hereinafter called a multi-step).
  • Figure 6 shows the relationship of the difference ⁇ tV between the closing operation signal input for the valve V 2 on the downstream side of the throttle mechanism and an actual operating time and also the flow rate output Qo of the FCS (the pressure P 1 on the upstream side of a throttle mechanism) and the pressure P 2 on the downstream side of a throttle mechanism.
  • the amount of change of a flow rate output Qo of the FCS (the pressure P 1 n the upstream side of a throttle mechanism) becomes small, thus making it difficult to determine whether a valve V 2 is malfunctioning by monitoring the drop rate of the flow rate output signal Qo.
  • ⁇ tV differs largely with valve V 2 , electro-magnetic valve EV, the internal capacity of a pressure supply line U for operating a valve, and the like, and further that changes of the pressure P 2 on the downstream side of the throttle mechanism varies largely according to the conditions, such as the flow rate range in use of a pressure type flow control apparatus, the pressure on the camber side, and the like.
  • Embodiment 3 the malfunction of a valve V 2 on the downstream side of a throttle mechanism (releasing not functioning) is detected by monitoring a FCS flow rate output signal at the time of a startup of a pressure type flow control apparatus FCS. This is mainly used to detect any operational malfunction of valve V 2 on the downstream side of the throttle mechanism during the preparatory stage of starting up a process system.
  • a test device used with Embodiment 3 is same as that shown in Figure 4 .
  • the FCS flow rate output signal Qo drops during the delay time ⁇ t in the case that valve V 2 on the downstream side of a throttle mechanism is functioning normally for a releasing operation, and conversely there would be no changes in the FCS flow rate output signal Qo during a delay time ⁇ t when valve V 2 on the downstream side of the throttle mechanism is not functioning normally for the releasing operation.
  • a degree (a drop rate) of change of the aforementioned FCS flow rate output signal varies largely depending on the delay time in releasing valve V 2 on the downstream side of the throttle mechanism. Accordingly, it is found that the drop rate during the delay time ⁇ t of the FCS flow rate output signal Qo is largely affected by the length of pressure supply line U for operating valve V 2 on the downstream side of the throttle mechanism, the type of an electro-magnetic valve EV, the flow rate setting range for the pressure type flow control apparatus FCS, and the like.
  • Figure 8 shows the results of monitoring the state of the drop of the flow rate output signal Qo when a flow rate setting signal Qe of a pressure type flow control apparatus FCS and the number of valves V 2 on the downstream side of a throttle mechanism are changed.
  • a standard type with a rated flow rate of 1 SLM is employed for the pressure type flow control apparatus FCS.
  • a valve having a Cv value of 0.1 and a valve having a Cv value of 0.2 are used for valves V 1 and V 2 respectively.
  • pressure supply line U for operating valves V 1 and V 2 has an internal diameter of 2.5mm ⁇ and the length of 1 m.
  • a pressure drop rate is obtained by computing the value as (B-A) / A x 100%, where B is a flow rate output signal Qo of the FCS after completing the process, and A is a value of a flow rate output signal Qo' after 0.2 sec at the time of a multi-step (see Figure 8(a) ).
  • the present invention can be applied to any gas supply facility as long as a pressure type flow control apparatus FCS is being used. Releasing operations of a valve on the downstream side of a throttle mechanism of a pressure type flow control apparatus FCS can be accurately detected with the conditions of changes of a flow rate output signal Qo when a flow rate setting input Qe of a pressure type flow control apparatus FCS is changed.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
EP07766937A 2006-07-03 2007-06-13 Method of detecting malfunction of restriction mechanism downstream side valve of pressure flow control device Withdrawn EP2037345A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006183061A JP4820698B2 (ja) 2006-07-03 2006-07-03 圧力式流量制御装置の絞り機構下流側バルブの作動異常検出方法
PCT/JP2007/000630 WO2008004334A1 (fr) 2006-07-03 2007-06-13 Procédé de détection de dysfonctionnement de valve côté aval à mécanisme de restriction de dispositif de régulation de débit de pression

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EP2037345A1 true EP2037345A1 (en) 2009-03-18

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EP07766937A Withdrawn EP2037345A1 (en) 2006-07-03 2007-06-13 Method of detecting malfunction of restriction mechanism downstream side valve of pressure flow control device

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Country Link
US (1) US8606412B2 (ja)
EP (1) EP2037345A1 (ja)
JP (1) JP4820698B2 (ja)
KR (1) KR100969210B1 (ja)
CN (1) CN101484859B (ja)
IL (1) IL195300A0 (ja)
TW (1) TWI391589B (ja)
WO (1) WO2008004334A1 (ja)

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CN101484859B (zh) 2011-03-23
TW200806910A (en) 2008-02-01
JP4820698B2 (ja) 2011-11-24
JP2008015581A (ja) 2008-01-24
KR20090006840A (ko) 2009-01-15
CN101484859A (zh) 2009-07-15
IL195300A0 (en) 2009-08-03
US8606412B2 (en) 2013-12-10
TWI391589B (zh) 2013-04-01
WO2008004334A1 (fr) 2008-01-10
KR100969210B1 (ko) 2010-07-09
US20090292399A1 (en) 2009-11-26

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