SG11202003902XA - Abnormality diagnosis method of fluid supply line - Google Patents

Abnormality diagnosis method of fluid supply line

Info

Publication number
SG11202003902XA
SG11202003902XA SG11202003902XA SG11202003902XA SG11202003902XA SG 11202003902X A SG11202003902X A SG 11202003902XA SG 11202003902X A SG11202003902X A SG 11202003902XA SG 11202003902X A SG11202003902X A SG 11202003902XA SG 11202003902X A SG11202003902X A SG 11202003902XA
Authority
SG
Singapore
Prior art keywords
supply line
fluid supply
diagnosis method
abnormality diagnosis
abnormality
Prior art date
Application number
SG11202003902XA
Inventor
Ryutaro TANNO
Kenji Aikawa
Akihiro Harada
Yuya Suzuki
Takahiro Matsuda
Katsunori Komehana
Masahiko Ochiishi
Tsutomu Shinohara
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11202003902XA publication Critical patent/SG11202003902XA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0033—Electrical or magnetic means using a permanent magnet, e.g. in combination with a reed relays
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45561—Gas plumbing upstream of the reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/124—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston servo actuated
    • F16K31/1245—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston servo actuated with more than one valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/005—Electrical or magnetic means for measuring fluid parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
SG11202003902XA 2017-11-29 2018-10-05 Abnormality diagnosis method of fluid supply line SG11202003902XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017229481 2017-11-29
PCT/JP2018/037416 WO2019106959A1 (en) 2017-11-29 2018-10-05 Abnormality diagnosis method of fluid supply line

Publications (1)

Publication Number Publication Date
SG11202003902XA true SG11202003902XA (en) 2020-05-28

Family

ID=66664822

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202003902XA SG11202003902XA (en) 2017-11-29 2018-10-05 Abnormality diagnosis method of fluid supply line

Country Status (7)

Country Link
US (1) US11340636B2 (en)
JP (1) JP7146284B2 (en)
KR (1) KR102305808B1 (en)
CN (1) CN111213109A (en)
SG (1) SG11202003902XA (en)
TW (1) TWI691703B (en)
WO (1) WO2019106959A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111811623B (en) * 2020-07-23 2022-06-07 三门核电有限公司 Auxiliary judgment method for measuring flow of high-pressure gas supply
KR102632541B1 (en) * 2022-03-21 2024-02-02 주식회사 플로워크연구소 diagnosis method and system for diagnose water valve

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DE2305030C3 (en) 1973-02-02 1983-02-10 Wäschle Maschinenfabrik GmbH, 7980 Ravensburg System for the pneumatic conveying of bulk goods
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DE3730778A1 (en) * 1987-09-12 1989-03-30 Wabco Westinghouse Fahrzeug RELAY VALVE DEVICE
JP3107138B2 (en) * 1995-03-31 2000-11-06 東京瓦斯株式会社 Gas leak detection device
JP3182717B2 (en) * 1996-06-06 2001-07-03 株式会社山武 Control valve abnormality detection method and detection device
US6296711B1 (en) * 1998-04-14 2001-10-02 Cvd Systems, Inc. Film processing system
JP3546153B2 (en) * 1998-08-24 2004-07-21 忠弘 大見 Orifice clogging detection method and detection apparatus for pressure type flow control device
ATE252741T1 (en) 1998-08-24 2003-11-15 Fujikin Kk METHOD FOR DETECTING A CLOGGAGE IN A PRESSURE-MEASUREMENT FLOW REGULATOR AND A SENSOR USED FOR THIS PURPOSE
US6363958B1 (en) * 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
KR100440750B1 (en) * 2002-02-05 2004-07-21 (주)영인테크 Valve opening and shutting monitering system
JP3827597B2 (en) * 2002-03-20 2006-09-27 株式会社佐山製作所 Decompression backflow prevention device
JP3917547B2 (en) 2003-04-18 2007-05-23 株式会社コガネイ Fluid pressure valve unit
JP4006404B2 (en) * 2004-01-22 2007-11-14 アドバンスエレクトリックジャパン株式会社 Mixing valve and mixing device
JP2006319190A (en) * 2005-05-13 2006-11-24 Ckd Corp Gas supply integration unit, gas unit and module unit
US20070029401A1 (en) * 2005-07-22 2007-02-08 Hooshang Kaen LAN-based sprinkler system
JP4866682B2 (en) * 2005-09-01 2012-02-01 株式会社フジキン Abnormality detection method for fluid supply system using flow control device with pressure sensor
JP4820698B2 (en) * 2006-07-03 2011-11-24 株式会社フジキン Method for detecting abnormal operation of the valve on the downstream side of the throttle mechanism of the pressure type flow control device
JP4598044B2 (en) * 2007-10-29 2010-12-15 シーケーディ株式会社 Flow verification failure diagnosis device, flow verification failure diagnosis method, and flow verification failure diagnosis program
WO2012153454A1 (en) * 2011-05-10 2012-11-15 株式会社フジキン Pressure-based flow control device with flow monitor, fluid-supply-system anomaly detection method using same, and method for handling monitor flow anomalies
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JP5833403B2 (en) * 2011-10-06 2015-12-16 株式会社堀場エステック Fluid mechanism and support member constituting the fluid mechanism
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JP6078487B2 (en) * 2014-02-18 2017-02-08 アズビル株式会社 Flow control valve leak diagnosis device
WO2016121075A1 (en) * 2015-01-30 2016-08-04 株式会社 日立ハイテクノロジーズ Vacuum processing device
JP6588237B2 (en) * 2015-05-29 2019-10-09 株式会社フジキン Valve and fluid control device
CN108369425B (en) * 2015-12-25 2021-03-02 株式会社富士金 Flow rate control device and abnormality detection method using the same

Also Published As

Publication number Publication date
CN111213109A (en) 2020-05-29
WO2019106959A1 (en) 2019-06-06
JPWO2019106959A1 (en) 2020-12-03
KR102305808B1 (en) 2021-09-28
TW201925732A (en) 2019-07-01
KR20200047711A (en) 2020-05-07
US20200363826A1 (en) 2020-11-19
TWI691703B (en) 2020-04-21
US11340636B2 (en) 2022-05-24
JP7146284B2 (en) 2022-10-04

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