EP1994807A1 - Apparatus for producing a plasma jet - Google Patents

Apparatus for producing a plasma jet

Info

Publication number
EP1994807A1
EP1994807A1 EP07711569A EP07711569A EP1994807A1 EP 1994807 A1 EP1994807 A1 EP 1994807A1 EP 07711569 A EP07711569 A EP 07711569A EP 07711569 A EP07711569 A EP 07711569A EP 1994807 A1 EP1994807 A1 EP 1994807A1
Authority
EP
European Patent Office
Prior art keywords
electrode
discharge tube
discharge
gas
plasma jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07711569A
Other languages
German (de)
French (fr)
Other versions
EP1994807B1 (en
Inventor
Andrej Ignatkov
Jens Raacke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maschinenfabrik Reinhausen GmbH
Scheubeck GmbH and Co
Original Assignee
Maschinenfabrik Reinhausen GmbH
Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maschinenfabrik Reinhausen GmbH, Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG filed Critical Maschinenfabrik Reinhausen GmbH
Publication of EP1994807A1 publication Critical patent/EP1994807A1/en
Application granted granted Critical
Publication of EP1994807B1 publication Critical patent/EP1994807B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/245—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/246—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using external electrodes

Definitions

  • the invention relates to a device for generating a plasma jet with at least one discharge tube, through which a process gas flows.
  • Such a device with a discharge tube is from the publication by Jungo Toshifuji et al: "Cold arc plasma jet under atmospheric pressure for surface modification", Surface and Coatings Technology 2003, page 302ff and the further publication “Workshop plasma treatment and plasma CVD Coating at atmospheric pressure ", Dresden, November 16, 2004 known.
  • the known device has a discharge tube made of dielectric material, wherein a first electrode is solid and arranged to extend centrally in the interior of the discharge tube in the longitudinal direction, and wherein a second electrode comprises the discharge tube.
  • the second electrode is formed concentrically, so that the first electrode in the interior, discharge tube and second electrode form a coaxial and concentric cross-sectional structure with an open end face on which the plasma jet is generated.
  • the inner, rod-shaped electrode is placed on high voltage, while the outer electrode is grounded. Due to the conditions of the electric field, ignition of the plasma at the tip of the inner, rod-shaped electrode therefore preferably occurs.
  • the plasma then spreads in the direction of the process gas flow.
  • a diffused plasma jet forms between the tip of the inner electrode and a substrate that can be processed by the plasma jet. It is a "cold" plasma where the temperature of the gas is relatively low, ranging from room temperature to a few hundred degrees C.
  • a direct plasma connection ie a flashover
  • the plasma is then no longer diffuse and cold, but occurs contracted in thin channels, which have a much higher gas temperature. This can lead to damage to the device and / or the substrate. Furthermore, thermal damage to the gas tube supplying the process gas can occur.
  • the object of the invention is therefore to provide a device for generating a plasma jet of the type mentioned, are suppressed in the parasitic discharges in a suitable manner and no flashovers between the first and second electrode can occur. Furthermore, it is an object of the invention to reduce the overall thermal loads of the individual components of the device and the substrate, by achieving that only "cold" plasma is generated.
  • the invention is based on the general knowledge that the interior of metallic, standing under an electrical voltage hollow bodies is field-free.
  • a hollow cylinder which would be obvious to a person skilled in the art, this would have the disadvantage that at the edges of the hollow cylinder the electric field in its interior would be sufficient, so that under certain circumstances a field sufficient for ignition of the plasma would be present at one undesired one - Location would be present in the gas hose.
  • the metallic holder for the gas hose designed in such a way that it conically widened at a certain angle or otherwise, such as step-shaped, so that the axial electric field at the edge of the holder is substantially smaller than in a conventional hollow cylinder constant diameter.
  • all edges of the holder are rounded to avoid high electric fields.
  • the second, outer, grounded electrode is no longer, as known in the prior art, arranged directly on the discharge tube, but has a certain radial distance.
  • an end cap made of a dielectric is attached to the end of the discharge tube. This makes it possible to produce a more intense plasma jet, especially when using noble gases.
  • a filter is provided between the gas hose and the discharge pipe.
  • a noise due to turbulence is suppressed. This noise occurs in the known from the prior art devices on that the process gas flows directly from the gas supply via a hose o. ⁇ . In the discharge chamber and by the flow around the holder of the inner electrode it comes to a turbulence with associated noise.
  • Figure 1 shows a first embodiment of a device according to the invention with a
  • Figure 2 shows a second embodiment of such a device
  • Figure 3 shows a third embodiment of such a device with an additional
  • End cap Figure 4 shows a fourth embodiment of such a device with a modified
  • End cap Figure 5 shows a first embodiment of a device according to the invention with several
  • Figure 6 shows a second embodiment of such a device
  • Figure 7 shows another commercial embodiment of a device according to the invention with a discharge tube.
  • the first device according to the invention shown schematically in Figure 1 has a discharge tube 1 made of dielectric material, in the interior of which an inner, rod-shaped, solid electrode 2 is arranged.
  • a second electrode 3 comprises the discharge tube 1. This can be done directly or at a radial distance.
  • This electrode 3 is particularly advantageously formed concentrically, so that the electrode 2 in the interior, the dielectric discharge tube 1 and the outer electrode 3 form a coaxial and concentric cross-sectional structure with an open end face on which the plasma jet is generated.
  • the inner electrode 1 is set to high voltage while the outer electrode 3 is grounded.
  • a metallic discharge protection 4 is provided at the end of the discharge tube 1.
  • the discharge protection 4 is here at the same time the holder for a gas hose 5, through which the process gas is supplied. The flow direction of the process gas is symbolized by an arrow.
  • the discharge protection 4 is also a holder and is used to make contact for a high voltage cable 6.
  • a filter 7 is still made of sintered material here. This filter 7 will be explained in more detail below.
  • the inner electrode 2, the z. B. consists of tungsten is held by this filter 7 and fixed in its central position in the interior of the discharge tube 1.
  • the discharge protection 4 is designed so that the metallic support for the gas tube 5 widens conically at an angle a, so that the axial electric field at the edge of the holder is substantially smaller than would be the case with a constant diameter hollow cylinder of the prior art.
  • the angle a depends on the maximum operating voltage and the ratio of the diameter of the gas hose 5 on the one hand and the diameter of the discharge tube 1 on the other hand. It is particularly advantageous to round off all edges of the discharge protection 4, in particular in the region of the holder, in order to avoid high electric fields.
  • the filter 7 can, as also shown in the figure 1, in a particular embodiment, for. Example, if it is made of sintered bronze, are used simultaneously as a holder of the inner electrode 2. Furthermore, in the rear region of the filter 7, counter to the flow direction of the process gas, a back pressure, which likewise has an effect on the desired suppression of parasitic discharges, arises because the ignition field strength of the process gas is a function of the prevailing pressure. If you are on the right branch of the so-called Paschen curve, the ignition voltage of a gas increases with increasing pressure.
  • FIG. 2 shows a second embodiment of a device according to the invention, in which the discharge protection 4 is designed differently.
  • a bore with a diameter d and a depth t is provided in the discharge protection 4.
  • a substantially smaller axial electric field is thereby realized at the edge of the holder.
  • other embodiments of the discharge protection 4 are conceivable, for example, a stepped expansion instead of an angle a.
  • FIG. 3 shows a further embodiment of a device according to the invention. Notwithstanding the prior art here is the outer, grounded electrode 3 is no longer located directly on the discharge tube 1, but at a certain radial distance to this. Furthermore, in this embodiment, a dielectric end cap 8 is attached to the open end of the discharge tube 1. The end cap 8 is z. Example of Teflon or other plastic with appropriate thermal and mechanical stability, but alternatively also ceramic. In a particularly simple manner, the end cap 8 may be secured by screwing to the outer electrode 3.
  • FIG. 4 shows a further embodiment of the device according to the invention with a modified, two-part end cap 8.
  • the outer part further consists of a dielectric, while additionally an inner metal insert 9 is provided, which is conductively connected to the outer electrode 3.
  • This version is particularly suitable for working with molecular gases as a process gas; the inner metallic insert 9 leads to an increase of the electric field in the interior of the discharge tube 1 and thus also to a more intensive plasma jet.
  • the outer electrode 3 can also be partially enclosed by a dielectric in some other way or completely enclosed in a dielectric.
  • FIG. 5 shows a schematic illustration of an embodiment of the invention with a plurality of discharge tubes 1, a so-called multi-jet arrangement.
  • a plurality of parallel discharge tubes 1 which are supplied by a supply channel 10 for the process gas and a gas distribution system 11 each with this process gas.
  • the process gas preferably flows through a plurality of discharge tubes and has the lowest flow resistance or is located closest to the feed channel 10.
  • Such unevenness of the process gas leakage in the prior art has a negative effect on the uniformity of the surface treatment of a substrate.
  • each discharge tube 1 in each discharge tube 1, a filter 7, as already explained above, arranged, whose flow resistance is substantially greater than the flow resistance of the discharge tube 1 itself, so that a uniform supply of each discharge tube 1 with process gas results; this leads to a homogenization of the individual parallel plasma jets.
  • FIG. 6 shows a further modified embodiment of such an arrangement, in which, instead of individual filters, a larger, common filter plate 12 is arranged in front of the individual discharge tubes 1.
  • FIG. 1 a complete assembly drawing of a commercial device according to the invention is shown in FIG.
  • an annular plastic insulator 13 is shown here, which encloses the discharge tube 1.
  • a protective tube 14 is disposed of ceramic.
  • a protective insulation 15 made of plastic.
  • the outer end forms a round metallic housing 16.
  • a special electrode holder 17 made of metal as an independent component.
  • the device also has a cap 18 made of plastic, to which an end piece 19 made of metal connects.
  • a screw 20 is screwed through which both the gas hose 5 and the high voltage cable 6 are guided.
  • open end of the device plastic screws 21 are still shown, by means of which the end cap 8 is fixed, here at the outer annular electrode. 3

Abstract

The invention relates to an apparatus for producing a plasma jet, having at least one discharge tube through which a process gas flows. According to the invention, electrically conductive discharge protection is provided on at least one discharge tube. The advantages of the invention are, in particular, that parasitic discharges are suppressed, and the thermal loads on the individual components of the apparatus and of the substrate are reduced.

Description

Vorrichtung zur Erzeugung eines Plasma-Jets Apparatus for generating a plasma jet
Die Erfindung betrifft eine Vorrichtung zur Erzeugung eines Plasma-Jets mit mindestens einem Entladungsrohr, durch das ein Prozessgas hindurchströmt.The invention relates to a device for generating a plasma jet with at least one discharge tube, through which a process gas flows.
Eine solche Vorrichtung mit einem Entladungsrohr ist aus der Veröffentlichung von Jungo Toshifuji et al: „Cold arc-plasma jet under atmospheric pressure for surface modification", Surface and Coatings Technology 2003, Seite 302ff sowie der weiteren Veröffentlichung „Workshop Plasmabehandlung und Plasma-CVD-Beschichtung bei Atmosphärendruck", Dresden, 16. November 2004 bekannt. Die bekannte Vorrichtung weist ein Entladungsrohr aus dielektrischem Material auf, wobei eine erste Elektrode massiv ausgebildet und zentrisch im Inneren des Entladungsrohres in Längsrichtung sich erstreckend angeordnet ist, und wobei eine zweite Elektrode das Entladungsrohr umfasst. Die zweite Elektrode ist dabei konzentrisch ausgebildet, so dass erste Elektrode im Inneren, Entladungsrohr und zweite Elektrode einen koaxialen und im Querschnitt konzentrischen Aufbau mit einer offenen Stirnseite bilden, an der der Plasma-Jet erzeugt wird. Die innere, stabförmige Elektrode wird dazu auf Hochspannung gelegt, während die äußere Elektrode geerdet ist. Damit kommt es auf Grund der Verhältnisse des elektrischen Feldes bevorzugt zu einer Zündung des Plasmas an der Spitze der inneren, stabförmigen Elektrode. Das Plasma breitet sich dann in Richtung des Prozessgasflusses aus. Bei einem Betrieb mit Helium, Stickstoff oder Luft als Prozessgasen bildet sich ein diffuser Plasma-Jet zwischen der Spitze der inneren Elektrode und einem Substrat, das mit dem Plasma-Jet bearbeitet werden kann, aus. Es handelt sich dabei um ein „kaltes" Plasma, bei dem die Gastemperatur relativ gering ist; sie bewegt sich im Bereich der Zimmertemperatur bis max. einigen 100 Grad C.Such a device with a discharge tube is from the publication by Jungo Toshifuji et al: "Cold arc plasma jet under atmospheric pressure for surface modification", Surface and Coatings Technology 2003, page 302ff and the further publication "Workshop plasma treatment and plasma CVD Coating at atmospheric pressure ", Dresden, November 16, 2004 known. The known device has a discharge tube made of dielectric material, wherein a first electrode is solid and arranged to extend centrally in the interior of the discharge tube in the longitudinal direction, and wherein a second electrode comprises the discharge tube. The second electrode is formed concentrically, so that the first electrode in the interior, discharge tube and second electrode form a coaxial and concentric cross-sectional structure with an open end face on which the plasma jet is generated. The inner, rod-shaped electrode is placed on high voltage, while the outer electrode is grounded. Due to the conditions of the electric field, ignition of the plasma at the tip of the inner, rod-shaped electrode therefore preferably occurs. The plasma then spreads in the direction of the process gas flow. When operating with helium, nitrogen or air as process gases, a diffused plasma jet forms between the tip of the inner electrode and a substrate that can be processed by the plasma jet. It is a "cold" plasma where the temperature of the gas is relatively low, ranging from room temperature to a few hundred degrees C.
Erhöht man jedoch nach Zündung des Plasma-Jets bei der bekannten Vorrichtung die anliegende Spannung, um mehr Leistung einzukoppeln, um z. B. einen längeren oder intensiveren Plasma-Jet zu erhalten, so beobachtet man, dass sich auch auf der Rückseite der inneren Elektrode bzw. an der auf gleichem Potential liegenden Befestigung der inneren Elektrode bei der bekannten Vorrichtung ein Plasma ausbildet - und zwar entgegengesetzt zur Prozessgasströmung. Diese zusätzliche sogenannte parasitäre Entladung ist unerwünscht, da sie nicht zum Jet beiträgt.Increased, however, after ignition of the plasma jet in the known device, the applied voltage to couple more power to z. B. to obtain a longer or more intense plasma jet, it is observed that also forms on the back of the inner electrode or at the same potential attachment of the inner electrode in the known device, a plasma - and opposite to the process gas flow , This additional so-called parasitic discharge is undesirable because it does not contribute to the jet.
Ferner kann es bei der bekannten Vorrichtung bei hoher Betriebsspannung und damit großer eingekoppelter Leistung zu einer direkten Plasma-Verbindung, d. h. einem Überschlag, zwischen der inneren Elektrode und der äußeren Elektrode kommen. Das Plasma ist dann nicht mehr diffus und kalt, sondern tritt kontrahiert in dünnen Kanälen auf, die eine wesentlich höhere Gastemperatur aufweisen. Dies kann zu einer Beschädigung der Vorrichtung und/oder des Substrates führen. Weiterhin kann es zu einer thermischen Beschädigung des das Prozessgas zuführenden Gasschlauches kommen.Furthermore, in the case of the known device, at high operating voltage and thus large coupled power, a direct plasma connection, ie a flashover, can occur between the inner electrode and the outer electrode. The plasma is then no longer diffuse and cold, but occurs contracted in thin channels, which have a much higher gas temperature. This can lead to damage to the device and / or the substrate. Furthermore, thermal damage to the gas tube supplying the process gas can occur.
Aufgabe der Erfindung ist es demnach, eine Vorrichtung zur Erzeugung eines Plasma-Jets der eingangs genannten Art anzugeben, bei der parasitäre Entladungen auf geeignete Weise unterdrückt werden und keine Überschläge zwischen erster und zweiter Elektrode auftreten können. Weiterhin ist es eine Aufgabe der Erfindung, insgesamt die thermischen Belastungen der einzelnen Bauteile der Vorrichtung und des Substrates zu reduzieren, indem erreicht wird, dass nur „kaltes" Plasma erzeugt wird.The object of the invention is therefore to provide a device for generating a plasma jet of the type mentioned, are suppressed in the parasitic discharges in a suitable manner and no flashovers between the first and second electrode can occur. Furthermore, it is an object of the invention to reduce the overall thermal loads of the individual components of the device and the substrate, by achieving that only "cold" plasma is generated.
Diese Aufgabe wird durch eine Vorrichtung zur Erzeugung eines Plasma-Jets mit den Merkmalen des ersten Patentanspruches gelöst. Die Unteransprüche betreffen besonders vorteilhafte Weiterbildungen der Erfindung.This object is achieved by a device for generating a plasma jet with the features of the first claim. The subclaims relate to particularly advantageous developments of the invention.
Die Erfindung geht von der allgemeinen Erkenntnis aus, dass das Innere von metallischen, unter einer elektrischen Spannung stehenden Hohlkörpern feldfrei ist. Würde man jedoch, was für den Fachmann naheliegend wäre, einen Hohlzylinder wählen, hätte dieser den Nachteil, dass an den Rändern des Hohlzylinders das elektrische Feld in dessen Inneres hinreichen würde, so dass unter Umständen ein zur Zündung des Plasmas ausreichendes Feld an einem - unerwünschten - Ort im Gasschlauch vorhanden wäre. Daher ist erfindungsgemäß die metallische Halterung für den Gasschlauch derart ausgeführt, das diese sich konisch unter einem bestimmten Winkel oder auch auf andere Weise, etwa treppenförmig, aufweitet, so dass das axial elektrische Feld am Rande der Halterung wesentlich kleiner ist als bei einem üblichen Hohlzylinder mit konstantem Durchmesser. In vorteilhafter Weiterbildung der Erfindung sind alle Kanten der Halterung abgerundet, um hohe elektrische Felder zu vermeiden.The invention is based on the general knowledge that the interior of metallic, standing under an electrical voltage hollow bodies is field-free. However, if one were to choose a hollow cylinder, which would be obvious to a person skilled in the art, this would have the disadvantage that at the edges of the hollow cylinder the electric field in its interior would be sufficient, so that under certain circumstances a field sufficient for ignition of the plasma would be present at one undesired one - Location would be present in the gas hose. Therefore, according to the invention, the metallic holder for the gas hose designed in such a way that it conically widened at a certain angle or otherwise, such as step-shaped, so that the axial electric field at the edge of the holder is substantially smaller than in a conventional hollow cylinder constant diameter. In an advantageous embodiment of the invention, all edges of the holder are rounded to avoid high electric fields.
Nach einer besonders vorteilhaften Weiterbildung der Erfindung, ist die zweite, äußere, geerdete Elektrode nicht mehr, wie nach dem Stand der Technik bekannt, unmittelbar auf dem Entladungsrohr angeordnet, sondern weist einen gewissen radialen Abstand auf.According to a particularly advantageous embodiment of the invention, the second, outer, grounded electrode is no longer, as known in the prior art, arranged directly on the discharge tube, but has a certain radial distance.
Nach einer besonders vorteilhaften anderen Weiterbildung der Erfindung ist auf dem Ende des Entladungsrohres eine Abschlusskappe aus einem Dielektrikum angebracht. Damit lässt sich ein intensiverer Plasma-Jet insbesondere bei der Verwendung von Edelgasen erzeugen.According to a particularly advantageous further development of the invention, an end cap made of a dielectric is attached to the end of the discharge tube. This makes it possible to produce a more intense plasma jet, especially when using noble gases.
Nach einer vorteilhaften, nochmals modifizierten Weiterentwicklung der Erfindung ist zwischen dem Gasschlauch und dem Entladungsrohr ein Filter vorgesehen. Damit wird zusätzlich zu den bereits beschriebenen Vorteilen der Erfindung auch eine Geräuschbildung durch Verwirbelung unterdrückt. Diese Geräuschbildung tritt bei den aus dem Stand der Technik bekannten Vorrichtungen dadurch auf, dass das Prozessgas unmittelbar aus der Gaszuführung über einen Schlauch o. ä. in die Entladungskammer strömt und durch die Umströmung der Halterung der inneren Elektrode es zu einer Verwirbelung mit damit verbundener Geräuschentwicklung kommt.According to an advantageous, again modified further development of the invention, a filter is provided between the gas hose and the discharge pipe. Thus, in addition to the already described advantages of the invention, a noise due to turbulence is suppressed. This noise occurs in the known from the prior art devices on that the process gas flows directly from the gas supply via a hose o. Ä. In the discharge chamber and by the flow around the holder of the inner electrode it comes to a turbulence with associated noise.
Die Erfindung soll nachfolgend an Hand von Zeichnungen beispielhaft noch näher erläutert werden. Es zeigen:The invention will be explained in more detail by way of example with reference to drawings. Show it:
Figur 1 eine erste Ausführungsform einer erfindungsgemäßen Vorrichtung mit einemFigure 1 shows a first embodiment of a device according to the invention with a
Entladungsrohrdischarge tube
Figur 2 eine zweite Ausführungsform einer solchen VorrichtungFigure 2 shows a second embodiment of such a device
Figur 3 eine dritte Ausführungsform einer solchen Vorrichtung mit einer zusätzlichenFigure 3 shows a third embodiment of such a device with an additional
Abschlusskappe Figur 4 eine vierte Ausführungsform einer solchen Vorrichtung mit einer modifiziertenEnd cap Figure 4 shows a fourth embodiment of such a device with a modified
Abschlusskappe Figur 5 eine erste Ausführungsform einer erfindungsgemäßen Vorrichtung mit mehrerenEnd cap Figure 5 shows a first embodiment of a device according to the invention with several
Entladungsrohrendischarge pipes
Figur 6 eine zweite Ausführungsform einer solchen VorrichtungFigure 6 shows a second embodiment of such a device
Figur 7 eine weitere, kommerzielle Ausführungsform einer erfindungsgemäßen Vorrichtung mit einem Entladungsrohr.Figure 7 shows another commercial embodiment of a device according to the invention with a discharge tube.
Zunächst soll die in Figur 1 schematisch dargestellte erste erfindungsgemäße Vorrichtung näher erläutert werden. Sie weist ein Entladungsrohr 1 aus dielektrischem Material auf, in dessen Innerem eine innere, stabförmige, massive Elektrode 2 angeordnet ist. Eine zweite Elektrode 3 umfasst das Entladungsrohr 1. Dies kann direkt oder mit radialem Abstand geschehen. Diese Elektrode 3 ist dabei besonders vorteilhaft konzentrisch ausgebildet, so dass die Elektrode 2 im Inneren, das dielektrische Entladungsrohr 1 und die äußere Elektrode 3 einen koaxialen und im Querschnitt konzentrischen Aufbau mit einer offenen Stirnseite bilden, an der der Plasma-Jet erzeugt wird. Die innere Elektrode 1 wird dazu auf Hochspannung gelegt, während die äußere Elektrode 3 geerdet ist. Erfindungsgemäß ist am Ende des Entladungsrohres 1 ein metallischer Entladungsschutz 4 vorgesehen. Der Entladungsschutz 4 ist hier gleichzeitig die Halterung für einen Gasschlauch 5, durch den das Prozessgas zugeführt wird. Die Strömungsrichtung des Prozessgases ist durch einen Pfeil symbolisiert. Der Entladungsschutz 4 ist weiterhin auch Halterung und dient zur Kontaktierung für ein Hochspannungskabel 6. Nach einer vorteilhaften Weiterbildung der Erfindung ist hier noch ein Filter 7 aus Sintermaterial vorgesehen. Dieses Filter 7 wird weiter unten noch näher erläutert. Die innere Elektrode 2, die z. B. aus Wolfram besteht, wird durch dieses Filter 7 gehalten und in ihrer zentrischen Lage im Inneren des Entladungsrohres 1 fixiert. Bei dieser Ausführungsform der Erfindung ist der Entladungsschutz 4 so ausgeführt, dass sich die metallische Halterung für den Gasschlauch 5 konisch unter einem Winkel a aufweitet, so dass das axiale elektrische Feld am Rande der Halterung wesentlich kleiner ist, als dies bei einem Hohlzylinder mit konstantem Durchmesser nach dem Stand der Technik der Fall wäre. Der Winkel a hängt von der maximalen Betriebsspannung sowie dem Verhältnis der Durchmesser des Gasschlauches 5 einerseits und des Durchmessers des Entladungsrohres 1 andererseits ab. Besonders vorteilhaft ist es, alle Kanten des Entladungsschutzes 4, insbesondere im Bereich der Halterung, abzurunden, um hohe elektrische Felder zu vermeiden.First, the first device according to the invention shown schematically in Figure 1 will be explained in more detail. It has a discharge tube 1 made of dielectric material, in the interior of which an inner, rod-shaped, solid electrode 2 is arranged. A second electrode 3 comprises the discharge tube 1. This can be done directly or at a radial distance. This electrode 3 is particularly advantageously formed concentrically, so that the electrode 2 in the interior, the dielectric discharge tube 1 and the outer electrode 3 form a coaxial and concentric cross-sectional structure with an open end face on which the plasma jet is generated. The inner electrode 1 is set to high voltage while the outer electrode 3 is grounded. According to the invention, a metallic discharge protection 4 is provided at the end of the discharge tube 1. The discharge protection 4 is here at the same time the holder for a gas hose 5, through which the process gas is supplied. The flow direction of the process gas is symbolized by an arrow. The discharge protection 4 is also a holder and is used to make contact for a high voltage cable 6. According to an advantageous embodiment of the invention, a filter 7 is still made of sintered material here. This filter 7 will be explained in more detail below. The inner electrode 2, the z. B. consists of tungsten is held by this filter 7 and fixed in its central position in the interior of the discharge tube 1. In this embodiment of the invention, the discharge protection 4 is designed so that the metallic support for the gas tube 5 widens conically at an angle a, so that the axial electric field at the edge of the holder is substantially smaller than would be the case with a constant diameter hollow cylinder of the prior art. The angle a depends on the maximum operating voltage and the ratio of the diameter of the gas hose 5 on the one hand and the diameter of the discharge tube 1 on the other hand. It is particularly advantageous to round off all edges of the discharge protection 4, in particular in the region of the holder, in order to avoid high electric fields.
Durch die Verwendung des Filters 7, wie in der Figur 1 gezeigt, zwischen dem Gasschlauch 5 und dem Entladungsrohr 1 wird eine mögliche Geräuschbildung durch Verwirbelung unterdrückt. Nach dem Durchtritt durch das Filter 7 ist die Gasströmung im Wesentlichen laminar und stabil. Das Filter 7 kann, wie ebenfalls in der Figur 1 gezeigt, in einer besonderen Ausführungsform, z. B., wenn es aus Sinterbronze besteht, gleichzeitig als Halterung der inneren Elektrode 2 verwendet werden. Weiterhin entsteht im rückwärtigen Bereich des Filters 7, entgegen der Strömungsrichtung des Prozessgases, ein Staudruck, der sich ebenfalls auf die erwünschte Unterdrückung parasitärer Entladungen auswirkt, da die Zündfeldstärke des Prozessgases eine Funktion des herrschenden Druckes ist. Befindet man sich auf dem rechten Ast der sogenannten Paschenkurve, so steigt die Zündspannung eines Gases mit steigendem Druck. Diese Zusammenhänge sind dem Fachmann geläufig.As a result of the use of the filter 7, as shown in FIG. 1, between the gas hose 5 and the discharge pipe 1, possible noise formation due to turbulence is suppressed. After passing through the filter 7, the gas flow is substantially laminar and stable. The filter 7 can, as also shown in the figure 1, in a particular embodiment, for. Example, if it is made of sintered bronze, are used simultaneously as a holder of the inner electrode 2. Furthermore, in the rear region of the filter 7, counter to the flow direction of the process gas, a back pressure, which likewise has an effect on the desired suppression of parasitic discharges, arises because the ignition field strength of the process gas is a function of the prevailing pressure. If you are on the right branch of the so-called Paschen curve, the ignition voltage of a gas increases with increasing pressure. These relationships are familiar to the person skilled in the art.
In Figur 2 ist eine zweite Ausführungsform einer erfindungsgemäßen Vorrichtung gezeigt, bei der der Entladungsschutz 4 anders gestaltet ist. Bei dieser Ausführungsform ist im Entladungsschutz 4 eine Bohrung mit einem Durchmesser d und einer Tiefe t vorgesehen. Auch bei dieser Ausführungsform wird dadurch ein wesentlich kleineres axiales elektrisches Feld am Rand der Halterung realisiert. Im Rahmen der Erfindung sind auch weitere Ausführungsformen des Entladungsschutzes 4 denkbar, beispielsweise eine treppenförmige Ausweitung statt eines Winkels a.FIG. 2 shows a second embodiment of a device according to the invention, in which the discharge protection 4 is designed differently. In this embodiment, a bore with a diameter d and a depth t is provided in the discharge protection 4. In this embodiment, a substantially smaller axial electric field is thereby realized at the edge of the holder. In the context of the invention, other embodiments of the discharge protection 4 are conceivable, for example, a stepped expansion instead of an angle a.
In Figur 3 ist eine weitere Ausführungsform einer erfindungsgemäßen Vorrichtung gezeigt. Abweichend vom Stand der Technik ist hier die äußere, geerdete Elektrode 3 nicht mehr unmittelbar auf dem Entladungsrohr 1 , sondern in einem gewissen radialem Abstand zu diesem angeordnet. Weiterhin ist bei dieser Ausführungsform auf dem offenen Ende des Entladungsrohres 1 eine dielektrische Abschlusskappe 8 angebracht. Die Abschlusskappe 8 besteht z. B. aus Teflon oder einem anderen Kunststoff mit entsprechender thermischer und mechanischer Stabilität, alternativ aber auch Keramik. Auf besonders einfache Weise kann die Abschlusskappe 8 durch Verschrauben mit der äußeren Elektrode 3 befestigt sein.FIG. 3 shows a further embodiment of a device according to the invention. Notwithstanding the prior art here is the outer, grounded electrode 3 is no longer located directly on the discharge tube 1, but at a certain radial distance to this. Furthermore, in this embodiment, a dielectric end cap 8 is attached to the open end of the discharge tube 1. The end cap 8 is z. Example of Teflon or other plastic with appropriate thermal and mechanical stability, but alternatively also ceramic. In a particularly simple manner, the end cap 8 may be secured by screwing to the outer electrode 3.
Die Abschlusskappe 8 aus dielektrischem Material dient der Erzeugung eines Plasma-Jets besonders für Edelgase als Prozessgase bei relativ geringer Leistungseinkopplung von typischer Weise einigen Watt. Gleichzeitig verhindert die erfindungsgemäße Abschlusskappe 8 einen Überschlag bzw. eine Bogenentladung zwischen der inneren Elektrode 2 und der geerdeten äußeren Elektrode 3, da der Abstand zwischen diesen beiden Elektroden nun elektrisch wesentlich größer ist. In Figur 4 ist eine weitere Ausführungsform der erfindungsgemäßen Vorrichtung mit einer modifizierten, zweiteilig ausgebildeten Abschlusskappe 8 gezeigt. Der äußere Teil besteht weiterhin aus einem Dielektrikum, während zusätzlich ein innerer metallischer Einsatz 9 vorgesehen ist, der mit der äußeren Elektrode 3 leitend verbunden ist. Diese Ausführung ist besonders für ein Arbeiten mit molekularen Gasen als Prozessgas geeignet; der innere metallische Einsatz 9 führt zu einer Erhöhung des elektrischen Feldes im Inneren des Entladungsrohres 1 und damit auch zu einem intensiveren Plasma-Jet.The end cap 8 of dielectric material is used to generate a plasma jet, especially for noble gases as process gases with relatively low power input, typically a few watts. At the same time, the end cap 8 according to the invention prevents a flashover or an arc discharge between the inner electrode 2 and the grounded outer electrode 3, since the distance between these two electrodes is now substantially larger electrically. FIG. 4 shows a further embodiment of the device according to the invention with a modified, two-part end cap 8. The outer part further consists of a dielectric, while additionally an inner metal insert 9 is provided, which is conductively connected to the outer electrode 3. This version is particularly suitable for working with molecular gases as a process gas; the inner metallic insert 9 leads to an increase of the electric field in the interior of the discharge tube 1 and thus also to a more intensive plasma jet.
Im Rahmen der Erfindung kann die äußere Elektrode 3 auch auf andere Weise teilweise von einem Dielektrikum umschlossen bzw. vollständig in einem Dielektrikum eingeschlossen sein.In the context of the invention, the outer electrode 3 can also be partially enclosed by a dielectric in some other way or completely enclosed in a dielectric.
In Figur 5 ist in schematischer Darstellung eine Ausführungsform der Erfindung mit mehreren Entladungsrohren 1 , eine sogenannte Multijet-Anordnung, gezeigt. Es sind mehrere parallele Entladungsrohre 1 dargestellt, die von einem Zufuhrkanal 10 für das Prozessgas und einem Gasverteilungssystem 11 jeweils mit diesem Prozessgas versorgt werden. Eine solche Anordnung ist prinzipiell ebenfalls bereits aus dem Stand der Technik bekannt. Bei der bekannten Anordnung würde unter einer Vielzahl von Entladungsrohren dasjenige bevorzugt vom Prozessgas durchströmt werden, das den geringsten Strömungswiderstand aufweist bzw. am dichtesten sich am Zufuhrkanal 10 befindet. Eine solche Ungleichmäßigkeit des Prozessgasaustrittes beim Stand der Technik wirkt sich negativ auf die Gleichmäßigkeit der Oberflächenbehandlung eines Substrates aus. Bei der in Figur 5 gezeigten Ausführungsform ist nach einer vorteilhaften Weiterbildung der Erfindung in jedem Entladungsrohr 1 ein Filter 7, so wie es weiter oben bereits erläutert wurde, angeordnet, dessen Strömungswiderstand wesentlich größer ist als der Strömungswiderstand des Entladungsrohres 1 selbst, so dass sich eine gleichmäßige Versorgung jedes Entladungsrohres 1 mit Prozessgas ergibt; dies führt zu einer Vergleichmäßigung der einzelnen parallelen Plasma-Jets.FIG. 5 shows a schematic illustration of an embodiment of the invention with a plurality of discharge tubes 1, a so-called multi-jet arrangement. There are shown a plurality of parallel discharge tubes 1, which are supplied by a supply channel 10 for the process gas and a gas distribution system 11 each with this process gas. Such an arrangement is also known in principle from the prior art. In the case of the known arrangement, the process gas preferably flows through a plurality of discharge tubes and has the lowest flow resistance or is located closest to the feed channel 10. Such unevenness of the process gas leakage in the prior art has a negative effect on the uniformity of the surface treatment of a substrate. In the embodiment shown in Figure 5, according to an advantageous embodiment of the invention in each discharge tube 1, a filter 7, as already explained above, arranged, whose flow resistance is substantially greater than the flow resistance of the discharge tube 1 itself, so that a uniform supply of each discharge tube 1 with process gas results; this leads to a homogenization of the individual parallel plasma jets.
In Figur 6 ist eine nochmals modifizierte Ausführungsform einer solchen Anordnung gezeigt, bei der statt einzelner Filter eine größere, gemeinsame Filterplatte 12 vor den einzelnen Entladungsrohren 1 angeordnet ist.FIG. 6 shows a further modified embodiment of such an arrangement, in which, instead of individual filters, a larger, common filter plate 12 is arranged in front of the individual discharge tubes 1.
Schließlich ist, nachdem die erläuterten Figuren 1 bis 6 schematische Darstellungen mit den wichtigsten, erfindungswesentlichen Teilen darstellen, in Figur 7 eine komplette Zusammenstellungszeichnung einer kommerziellen, erfindungsgemäßen Vorrichtung gezeigt. Neben den bereits erläuterten Bauteilen ist hier noch ein ringförmiger Isolator 13 aus Kunststoff gezeigt, der das Entladungsrohr 1 umschließt. Um diesen Isolator 13 herum ist ein Schutzrohr 14 aus Keramik angeordnet. Um die äußere Elektrode 3 herum befindet sich eine Schutzisolierung 15 aus Kunststoff. Den äußeren Abschluss bildet ein rundes metallisches Gehäuse 16. Bei der hier dargestellten Ausführungsform befindet sich am Filter 7 ein spezieller Elektrodenhalter 17 aus Metall als eigenständiges Bauteil. Am hinteren Ende weist die Vorrichtung noch eine Abdeckkappe 18 aus Kunststoff auf, an die sich ein Endstück 19 aus Metall anschließt. In das Endstück 19 ist ein Schraubanschluss 20 eingeschraubt, durch den sowohl der Gasschlauch 5 als auch das Hochspannungskabel 6 geführt werden. Am vorderen, offenen Ende der Vorrichtung sind noch Kunststoffschrauben 21 gezeigt, mittels der die Abschlusskappe 8 befestigt ist, hier an der äußeren ringförmigen Elektrode 3. Finally, after the illustrated Figures 1 to 6 are schematic representations with the most important parts essential to the invention, a complete assembly drawing of a commercial device according to the invention is shown in FIG. In addition to the components already described, an annular plastic insulator 13 is shown here, which encloses the discharge tube 1. Around this insulator 13 around a protective tube 14 is disposed of ceramic. Around the outer electrode 3 is a protective insulation 15 made of plastic. The outer end forms a round metallic housing 16. In the illustrated here Embodiment is located on the filter 7, a special electrode holder 17 made of metal as an independent component. At the rear end, the device also has a cap 18 made of plastic, to which an end piece 19 made of metal connects. In the end piece 19, a screw 20 is screwed through which both the gas hose 5 and the high voltage cable 6 are guided. At the front, open end of the device plastic screws 21 are still shown, by means of which the end cap 8 is fixed, here at the outer annular electrode. 3

Claims

Patentansprüche claims
1 Vorrichtung zur Erzeugung eines Plasma-Jets mit mindestens einem Entladungsrohr (1 ), durch das ein durch einen Gasschlauch (5) zugefuhrtes Prozessgas hindurchstromt, wobei die Wandung des Entladungsrohres (1 ) aus dielektrischem Material besteht, wobei eine erste Elektrode (2), massiv ausgebildet und zentrisch im Inneren des Entladungsrohres (1 ) in dessen Längsrichtung sich erstreckend angeordnet ist, wobei eine zweite Elektrode (3) in axialer Richtung die Wandung des Entladungsrohres (1 ) konzentrisch umschließend angeordnet ist, derart, dass erste Elektrode (2), Entladungsrohr (1 ) und zweite Elektrode (3) einen koaxialen und im Querschnitt konzentrischen Aufbau mit einer offenenA device for producing a plasma jet with at least one discharge tube (1), through which a process gas fed through a gas tube (5) flows, wherein the wall of the discharge tube (1) consists of dielectric material, wherein a first electrode (2), is formed solidly and centrally in the interior of the discharge tube (1) in the longitudinal direction is arranged to extend, wherein a second electrode (3) in the axial direction, the wall of the discharge tube (1) concentrically surrounding, such that the first electrode (2), Discharge tube (1) and second electrode (3) has a coaxial and concentric cross-sectional structure with an open
Stirnseite bilden, an der der Plasma-Jet erzeugbar ist, dadurch gekennzeichnet, dass am Entladungsrohr (1 ) ein Entladungsschutz (4) aus elektrisch leitendem Material angeordnet ist, der mit der ersten Elektrode (2) verbunden ist, dass der Entladungsschutz (4) das freie Ende des Gasschlauches (5) aufnimmt und dass sich die dem freien Ende des Gasschlauches (5) zugewandte Seite des EntladungsschutzesForm the end face on which the plasma jet can be generated, characterized in that a discharge protection (4) of electrically conductive material is arranged on the discharge tube (1), which is connected to the first electrode (2) such that the discharge protection (4) the free end of the gas hose (5) receives and that the free end of the gas hose (5) facing side of the discharge protection
(4) aufweitet, derart, dass er mit einem Zwischenraum den Gasschlauch (5) umschließt(4) widens, so that it encloses the gas hose (5) with a gap
2 Vorrichtung nach Patentanspruch 1 , dadurch gekennzeichnet, dass die dem freien Ende des Gasschlauches (5) zugewandte Seite des Entladungsschutzes (4) konisch unter einem Winkel a aufgeweitet ist2 Device according to claim 1, characterized in that the free end of the gas hose (5) facing side of the discharge protection (4) is flared at an angle a
3 Vorrichtung nach Patentanspruch 1 , dadurch gekennzeichnet, dass die dem freien Ende des Gasschlauches (5) zugewandte Seite des Entladungsschutzes (4) durch eine zentrische Bohrung aufgeweitet ist3 Device according to claim 1, characterized in that the free end of the gas hose (5) facing side of the discharge protection (4) is widened by a central bore
4 Vorrichtung nach einem der Patentansprüche 1 bis 3, dadurch gekennzeichnet, dass die zweite Elektrode (3) in einem radialen Abstand zum Entladungsrohr (1 ) um dieses herum angeordnet ist4 Device according to one of the claims 1 to 3, characterized in that the second electrode (3) is arranged at a radial distance to the discharge tube (1) around this
5. Vorrichtung nach einem der Patentansprüche 1 bis 4, dadurch gekennzeichnet, dass an der Stirnseite der Vorrichtung, an der der Plasma-Jet erzeugbar ist, eine dielektrische, konzentrische Abschlusskappe (8) angeordnet ist, die die zweite Elektrode (3) umgreift 5. Device according to one of the claims 1 to 4, characterized in that on the end face of the device on which the plasma jet can be generated, a dielectric, concentric end cap (8) is arranged, which surrounds the second electrode (3)
6. Vorrichtung nach Patentanspruch 5, dadurch gekennzeichnet, dass die Abschlusskappe (8) aus Teflon, einem anderen Kunststoff mit entsprechender thermischer und mechanischer Stabilität oder Keramik besteht.6. Device according to claim 5, characterized in that the end cap (8) made of Teflon, another plastic with appropriate thermal and mechanical stability or ceramic.
7. Vorrichtung nach einem der Patentansprüche 5 oder 6, dadurch gekennzeichnet, dass die Abschlusskappe (8) zweiteilig ausgebildet ist, derart, dass ein zusätzlicher, innerer metallischer Einsatz (9) vorgesehen ist, der mit der zweiten Elektrode (3) leitend verbunden ist.7. Device according to one of the claims 5 or 6, characterized in that the end cap (8) is formed in two parts, such that an additional inner metal insert (9) is provided which is conductively connected to the second electrode (3) ,
8. Vorrichtung nach einem der Patenansprüche 1 bis 4, dadurch gekennzeichnet, dass die zweite Elektrode (3) vollständig oder teilweise von einem Dielektrikum umschlossen ist.8. Device according to one of the claims 1 to 4, characterized in that the second electrode (3) is completely or partially enclosed by a dielectric.
9. Vorrichtung nach einem der Patentansprüche 1 bis 8, dadurch gekennzeichnet, dass an der Stirnseite des Entladungsrohres (1 ), an der das Prozessgas zuführbar ist, ein vom Prozessgas durchströmbares Filter (7) vorgesehen ist.9. Device according to one of the claims 1 to 8, characterized in that on the end face of the discharge tube (1) to which the process gas can be supplied, a filter (7) through which the process gas can flow is provided.
10. Vorrichtung nach Patentanspruch 9 dadurch gekennzeichnet, dass das Filter (7) aus Sintermaterial, insbesondere Sinterbronze, besteht.10. The device according to claim 9, characterized in that the filter (7) made of sintered material, in particular sintered bronze, consists.
11. Vorrichtung nach einem der Patentansprüche 9 oder 10, dadurch gekennzeichnet, dass bei mehreren vorgesehenen Entladungsrohren (1 ) jedes davon ein Filter (7) aufweist.11. Device according to one of the claims 9 or 10, characterized in that at several provided discharge tubes (1) each of which has a filter (7).
12. Vorrichtung nach einem der Patentansprüche 9 oder 10, dadurch gekennzeichnet, dass bei mehreren vorgesehenen Entladungsrohren (1) alle diese gemeinsam eine einzige Filterplatte (12) aufweisen. 12. Device according to one of the claims 9 or 10, characterized in that at several provided discharge tubes (1) all these together have a single filter plate (12).
EP07711569A 2006-03-16 2007-02-17 Apparatus for producing a plasma jet Not-in-force EP1994807B1 (en)

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