EP1954946A4 - Systen and method for position control of a mechanical piston in a pump - Google Patents

Systen and method for position control of a mechanical piston in a pump

Info

Publication number
EP1954946A4
EP1954946A4 EP06838071A EP06838071A EP1954946A4 EP 1954946 A4 EP1954946 A4 EP 1954946A4 EP 06838071 A EP06838071 A EP 06838071A EP 06838071 A EP06838071 A EP 06838071A EP 1954946 A4 EP1954946 A4 EP 1954946A4
Authority
EP
European Patent Office
Prior art keywords
systen
pump
position control
mechanical piston
piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06838071A
Other languages
German (de)
French (fr)
Other versions
EP1954946A2 (en
EP1954946B1 (en
Inventor
George Gonnella
James Cedrone
Iraj Gashgaee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2005/042127 external-priority patent/WO2006057957A2/en
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of EP1954946A2 publication Critical patent/EP1954946A2/en
Publication of EP1954946A4 publication Critical patent/EP1954946A4/en
Application granted granted Critical
Publication of EP1954946B1 publication Critical patent/EP1954946B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/12—Parameters of driving or driven means
    • F04B2201/1208—Angular position of the shaft

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
EP06838071.6A 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump Active EP1954946B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
PCT/US2005/042127 WO2006057957A2 (en) 2004-11-23 2005-11-21 System and method for a variable home position dispense system
US74166005P 2005-12-02 2005-12-02
US84172506P 2006-09-01 2006-09-01
PCT/US2006/044907 WO2007061957A2 (en) 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump

Publications (3)

Publication Number Publication Date
EP1954946A2 EP1954946A2 (en) 2008-08-13
EP1954946A4 true EP1954946A4 (en) 2010-05-26
EP1954946B1 EP1954946B1 (en) 2014-11-05

Family

ID=39592976

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06838071.6A Active EP1954946B1 (en) 2005-11-21 2006-11-20 System and method for position control of a mechanical piston in a pump

Country Status (6)

Country Link
EP (1) EP1954946B1 (en)
JP (2) JP5339915B2 (en)
KR (2) KR101279747B1 (en)
CN (1) CN103016324B (en)
TW (2) TWI493107B (en)
WO (1) WO2007061957A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9753443B2 (en) * 2014-04-21 2017-09-05 Synerject Llc Solenoid systems and methods for detecting length of travel
DE102015201884B4 (en) * 2015-02-04 2023-07-27 Schaeffler Technologies AG & Co. KG Fluidic actuator assembly
FR3050513B1 (en) * 2016-04-26 2018-11-16 Erca DEVICE FOR DISPENSING LIQUID OR PASTY PRODUCT
DE102017112975B3 (en) * 2017-06-13 2018-10-25 KNF Micro AG diaphragm pump
JP6920923B2 (en) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス Pump equipment and substrate processing equipment
DE102019117731A1 (en) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Method for determining the position of the diaphragm of an electric motor-driven diaphragm pump

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5018A (en) * 1847-03-13 Improvement in machinery for combing wool
JPS63255575A (en) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk Pump device
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
US5312233A (en) 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US5336884A (en) * 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
US5947702A (en) * 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
JPH11356081A (en) * 1998-06-09 1999-12-24 Matsushita Electric Ind Co Ltd Inverter device
US6390780B1 (en) * 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
CN1590761A (en) * 1998-11-23 2005-03-09 米利波尔公司 Pump controller for precision pumping apparatus
US6203288B1 (en) 1999-01-05 2001-03-20 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
US6575264B2 (en) * 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
EP1129290B1 (en) * 1999-09-03 2011-10-19 Fenwal, Inc. Systems and methods for control of pumps
US6348124B1 (en) * 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
JP2001342989A (en) * 2000-05-30 2001-12-14 Matsushita Electric Ind Co Ltd Method of driving and controlling dc pump
JP2002106467A (en) * 2000-09-28 2002-04-10 Techno Excel Co Ltd Traverse mechanism driving type fluid pump
US6520520B2 (en) * 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
JP4576739B2 (en) * 2001-04-02 2010-11-10 パナソニック電工株式会社 Motor drive control device for pump
JP4684478B2 (en) * 2001-07-04 2011-05-18 株式会社荏原製作所 Control method of water supply device
GB0130602D0 (en) * 2001-12-21 2002-02-06 Johnson Electric Sa Brushless D.C. motor
US6914543B2 (en) * 2002-06-03 2005-07-05 Visteon Global Technologies, Inc. Method for initializing position with an encoder
JP4191437B2 (en) * 2002-06-26 2008-12-03 並木精密宝石株式会社 Board-integrated brushless motor
JP2004225672A (en) * 2003-01-27 2004-08-12 Ebara Densan Ltd Operation controlling device of rotary machine
US20050173463A1 (en) * 2004-02-09 2005-08-11 Wesner John A. Dispensing pump having linear and rotary actuators
DE602004007247T2 (en) * 2004-06-04 2008-02-28 Société Industrielle de Sonceboz S.A., Sonceboz pump drive

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
JP2009529847A (en) 2009-08-20
WO2007061957A3 (en) 2007-10-04
KR101279747B1 (en) 2013-06-27
KR101283259B1 (en) 2013-07-11
TW201350680A (en) 2013-12-16
CN103016324B (en) 2016-08-10
TW200726914A (en) 2007-07-16
EP1954946A2 (en) 2008-08-13
CN103016324A (en) 2013-04-03
TWI493107B (en) 2015-07-21
KR20130036380A (en) 2013-04-11
KR20080068918A (en) 2008-07-24
JP5674853B2 (en) 2015-02-25
JP2013150549A (en) 2013-08-01
JP5339915B2 (en) 2013-11-13
WO2007061957B1 (en) 2007-12-06
EP1954946B1 (en) 2014-11-05
TWI405905B (en) 2013-08-21
WO2007061957A8 (en) 2007-08-16
WO2007061957A2 (en) 2007-05-31

Similar Documents

Publication Publication Date Title
EP1952022A4 (en) System and method for a pump with reduced form factor
EP1960670A4 (en) System and method for operation of a pump
TWI372209B (en) Method of operating a pumping system
EP2092196A4 (en) System and method for operation of a pump
ZA200709008B (en) Control system for a pump
EP1730697A4 (en) Adjusted stroke rendering
EP1834091A4 (en) Actuator pump system
GB0913677D0 (en) Piston pump and driver therefor
EP2002128A4 (en) A method and an arrangement for controlling pump displacement in a work vehicle
GB0508872D0 (en) Method of operating a pumping system
PL1924773T3 (en) Control apparatus and control method for a piston/cylinder arrangement
HK1130958A1 (en) Charge pump controller and method therefor
GB2437028B (en) Hydraulic piston pump
EP1954946A4 (en) Systen and method for position control of a mechanical piston in a pump
EP2102487A4 (en) Fuel pump and a method for controlling a fuel pump
EP2016706A4 (en) Method and arrangement for a virtual meeting
GB0509059D0 (en) A method for controlling a free piston engine
GB0520470D0 (en) Method of operating a pumping system
EP1984944A4 (en) Method for making a neo-layer comprising embedded discrete components
EP2076673A4 (en) Electronic camshaft motor control for piston pump
PL2173517T3 (en) Method for machining and assembling a piston
GB0624892D0 (en) Plunger pump
GB2456733B (en) Tension-force coupled high-pressure pumping
GB0415730D0 (en) Valve control method for reciprocating compressor
GB0410901D0 (en) Ragwort control method

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20080605

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): DE FR GB IT NL

DAX Request for extension of the european patent (deleted)
RBV Designated contracting states (corrected)

Designated state(s): DE FR GB IT NL

A4 Supplementary search report drawn up and despatched

Effective date: 20100428

RIC1 Information provided on ipc code assigned before grant

Ipc: F04B 49/06 20060101AFI20070724BHEP

Ipc: F04B 17/03 20060101ALI20100422BHEP

Ipc: F04B 13/00 20060101ALI20100422BHEP

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ENTEGRIS, INC.

17Q First examination report despatched

Effective date: 20110318

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20140603

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE FR GB IT NL

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 602006043598

Country of ref document: DE

Effective date: 20141218

REG Reference to a national code

Ref country code: NL

Ref legal event code: T3

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 602006043598

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 10

26N No opposition filed

Effective date: 20150806

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 11

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 12

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 13

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230526

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20231020

Year of fee payment: 18

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20231019

Year of fee payment: 18

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20231019

Year of fee payment: 18

Ref country code: FR

Payment date: 20231019

Year of fee payment: 18

Ref country code: DE

Payment date: 20231019

Year of fee payment: 18