EP1936684B1 - Electronic device with a base plate - Google Patents

Electronic device with a base plate Download PDF

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Publication number
EP1936684B1
EP1936684B1 EP20070121276 EP07121276A EP1936684B1 EP 1936684 B1 EP1936684 B1 EP 1936684B1 EP 20070121276 EP20070121276 EP 20070121276 EP 07121276 A EP07121276 A EP 07121276A EP 1936684 B1 EP1936684 B1 EP 1936684B1
Authority
EP
European Patent Office
Prior art keywords
electronic device
pins
plate
cooling plate
rectangular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP20070121276
Other languages
German (de)
French (fr)
Other versions
EP1936684A1 (en
Inventor
Makan Chen
Daniel Schneider
Raymond Zehringer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABB Technology AG
Original Assignee
ABB Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP06026658A external-priority patent/EP1936683A1/en
Application filed by ABB Technology AG filed Critical ABB Technology AG
Priority to EP20070121276 priority Critical patent/EP1936684B1/en
Publication of EP1936684A1 publication Critical patent/EP1936684A1/en
Application granted granted Critical
Publication of EP1936684B1 publication Critical patent/EP1936684B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0058—Laminating printed circuit boards onto other substrates, e.g. metallic substrates
    • H05K3/0061—Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a metallic substrate, e.g. a heat sink
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4871—Bases, plates or heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
    • H05K2201/2036—Permanent spacer or stand-off in a printed circuit or printed circuit assembly
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components

Definitions

  • the invention relates to the field of power electronics and more particularly to an electronic device with a base plate for a heat sink according to the preamble of claim 1.
  • WO 2004/065050 describes a method to solder a capacitor to a printed circuit board (PCB).
  • the solder paste contains a solder material and a spacer material, which has a melting point higher than the melting point of the solder material.
  • the spacer material is in form of spheres.
  • the solder paste is heated to a temperature that is higher than the melting point of the solder material, but lower than the melting point of the spacer material.
  • the spacer material stays as a solid in the paste, so that the capacitor and the PCB are spaced at a predetermined thickness from each other after the heating process.
  • the distance between the capacitor and PCB can be varied by varying the dimensions of the spacer material in the solder paste.
  • US 5 784 256 refers to a notebook with a printed circuit board (PCB) including a heat generating IC chip.
  • the chip on the PCB is cooled by clamp contacting the PCB between a cover and a cooling plate having four bosses with holes for inserting screws.
  • the cover and cooling plate with the PCB in between are clamped together by inserting screws from the cover to the holes in the cooling plate.
  • an electrically and thermally conductive layer is arranged between the chip and the cooling plate, which is made of a metal with high electrical and thermal conductivity.
  • an object of the invention to provide an electronic device with a base plate for a heat sink, which allows metallurgical bonding of the base plate to a power electronic component without the danger of tilting of the base plate against the power electronic component and which base plate is easy to manufacture.
  • an electronic device comprising at least one power electronic component, an electrically insulating plate and a base plate according to claim 1.
  • the inventive electronic device comprises a base plate with a cooling plate and spacer elements, which are arranged on the surface of the cooling plate.
  • the spacer elements and the cooling plates are made as one piece with the material at least in the surface region of the cooling plate and the spacer elements being the same.
  • the inventive electronic device with a base plate has the advantage that the base plate allows to achieve a predetermined distance to a power electronic component, which is metallurgical bonded to the base plate.
  • a tilting of the power electronic component against the base plate is minimised by the introduction of spacer elements on the cooling plate, which tilting would lead to different thermal extension of the areas of the bonding layer with different bonding layer, e.g. solder layer thicknesses.
  • heat distribution would be worse in the areas of greater solder thickness, because the solder material has typically a worse heat conductivity than the base plate itself or the electronic element.
  • any solder material suitable for achieving the desired connection between the base plate and the power electronic component in terms of temperature during the soldering and thermal properties of the solder layer can be used. Furthermore, with such an inventive electronic device with a base plate heat can be distributed in a uniform way between the heat producing parts of a power electronic component and the base plate, if the spacer elements are arranged in areas of the base plate, which are not directly below the heat producing part of the power electronic component.
  • FIG. 1 a base plate 1 for a heat sink according to the invention is shown.
  • the base plate 1 comprises a cooling plate 2 and spacer elements 3, which are arranged on the surface of the cooling plate 2.
  • the spacer elements 3 and the cooling plate 2 are made as one piece and the material at least in the surface region of the cooling plate 2 and of the spacer elements is the same.
  • the cooling plate can also be completely made of said material.
  • the cooling plate 2 is made of a metal matrix composite, e.g. a Silicon-Carbide (SiC) preform infiltrated with molten Aluminum.
  • SiC Silicon-Carbide
  • the SiC preform is placed in a mold, which has the negative form of the desired final base plate 1 and then the preform is infiltrated with the Aluminum.
  • the mold comprises recesses, by which in the final base plate 1 spacer elements 3 are formed.
  • the spacer elements 3, as shown in FIG. 1 are made in the form of small pins 31.
  • the pins 31 have a diameter of less than 2 mm x 2 mm, in particular 1 mm x 1 mm in order to have only a small influence to heat distribution and homogeneous thermal expansion coefficient of the solder layer.
  • the spacer elements 3 and the cooling plate 2 are made as one piece and the material in the surface region of the cooling plate 2 and of the spacer elements 3 is the same.
  • the pins 31 are preferably made of Aluminum in the same step as the infiltration with Aluminum.
  • the pins 31 extend the surface of the cooling plate 2 to a height 32 between 50 to 200 ⁇ m.
  • the minimum height of the pins 31 is given by the maximum unevenness of the surfaces of the power electronic component and the cooling plate 2, whereas the maximum height of the pins 31 is defined by thermal resistance of the solder joint.
  • the pins 31 may have any appropriate cross section like a quadrangular cross section, in particular a square or a rectangular cross section or a round cross section, in particular a circular or an oval cross section.
  • the cross section can be chosen for reasons of easy manufacturing or for geometrical reasons in the final electronic device.
  • FIG. 2 a detail, in particular a pin 31', of another preferred embodiment of the base plate 1 is shown.
  • the cross section of the pin 31' diminishes with the distance from the surface of the cooling plate 2 at least in the top area of the pins 31'.
  • the diminution of the cross section can be limited to the top area of the pins 31' in a length region 33 between 90 % and 100 % of the height 32 of each pin 31', leaving the pin 31' in a length region 34 between the surface of the cooling plate 2 and 90 % of the height 32 of the pin 31' with a constant cross section.
  • the diminution in the cross section of the pins 31' is limited to the top area of the pins 31' in the length region 33 of 75 % to 100 % of the height 32 of each pin 31', in particular in a length region 33 of 50 % to 100 % of the height 32 of each pin 31', and in particular over the whole height 32 of each pin 31', as shown for a pin 31" in FIG. 3 .
  • the cross section diminishes continuously.
  • the advantage of such pins 31' or 31" with a decreasing cross section with the distance from the surface of the cooling plate 2 is that thermal stress due to different thermal extension in the transition area between insulating plate 8, the pin 31', 31" and the solder layer is avoided or at least reduced.
  • FIG. 4 a top view on a base plate 1 is shown.
  • the cooling plate 2 is in form of a first rectangular 21 and the pins 31 are arranged in the four corners of the cooling plate 2.
  • the pins 31 are arranged within an area corresponding to a second rectangular 6 with a side length 61, 61' corresponding to a quarter of the parallel lying side length 22, 22' of the cooling plate 2.
  • the side length 61 of the second rectangular lies parallel to the side length 22 of the first rectangular, and the side length 61' parallel to the side length 61'.
  • the second rectangular 6 extends on the surface of the cooling plate 2 from a corner of the cooling plate 2.
  • the area in which the pins 31 are arranged should be chosen in such a way that no heat producing part of the electronic component is arranged directly above the pins 31', thereby avoiding a reduction of heat transfer capability in the region of the pins 31.
  • Another preferred embodiment of the inventive base plate 1 is also shown in FIG. 4 .
  • a pin 31 is arranged around the centre in the middle part of the cooling plate 2, in particular within an area around the centre of the cooling plate 2, the area corresponding to a third rectangular 7 with a side length 71, 71' corresponding to a quarter of the parallel lying side length 22, 22' of the cooling plate 2.
  • the pin 31 is arranged in the centre 23 of the first rectangular 21.
  • the cooling plate 2 can have other forms than a first rectangular 21, and in a preferred embodiment, not shown in a figure, pins 31 are arranged in the corners of the cooling plate 2 or outer areas, which border on the edge of the cooling plate 2.
  • an inventive electronic device in form of a semiconductor module which comprises at least one power electronic component in form of a semiconductor chip 4 and an inventive base plate 1.
  • the semiconductor chips 4 can be insulated gate bipolar transistors (IGBT).
  • the at least one semiconductor chip 4 is bonded by a metallurgical process, preferably by soldering or metal bonding, on an electrically insulating plate 8, which is typically a ceramic substrate.
  • the insulating plate 8 is plate is bonded by a metallurgical process, in particular by soldering, on the side, which lies opposite the side, on which the at least one semiconductor chip 4 is arranged, on the base plate 1.
  • low temperature bonding can be used as a metallurgical bonding for one or both bondings.
  • Such low temperature bondings are typically made under high pressure and temperatures typically below 300 °C.
  • Metals like silver and indium or tin and gold are used for making the joint. The metals are applied on the surfaces to be jointed together as thin sheets and/or as a powder.
  • Such low-tempereature bonding methods are for example described in PCT/CH2006/00610 .
  • These metallurgical bondings are non-detachable connections, i.e. the connections are destroyed if trying to separate the two elements bonded together under normal conditions.
  • a plurality of such insulating plates 8 in this case: six, each with at least one semiconductor chip 4 arranged on one side, are arranged together on one base plate 1.
  • At least four pins 31 are arranged on the base plate 1 for a contact with each insulating plate 8.
  • the insulating plate(s) 8 is rectangular and these pins 31 are arranged on the base plate 1 such that they can make contact to the four corners of each insulating plate 8. More generally, the pins 31 are arranged outside the projected area, in which the at least one semiconductor chip 4 is arranged. A further pin 31 may be arranged in the middle part, in particular in the centre of each insulating plate 8. Any other number of insulating plates, i.e. one or more, are arrangeable on the base plate 1, each with pins 31 arranged in such a way that the pins 31 can make contact to the corners of each insulating plate 8 in the described manner.
  • the inventive base plate 1 is thermally and electrically conductive connected to the at least one semiconductor chip 4.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

    Technical Field
  • The invention relates to the field of power electronics and more particularly to an electronic device with a base plate for a heat sink according to the preamble of claim 1.
    • Background Art
  • State of the art is known from the paper by K. Hayashi et al. "Improvement of fatigue life of solder joints by thickness control of solder with wire bump technique" 2002 Proceedings 52nd. Electronic Components and Technology Conference. ECTC 2002, San Diego, CA, May 28-31, 2002, Proceedings of the Electronic Components and Technology Conference, New York, NY: IEEE, US vol. CONF. 52, 28 May 2002, pages 1469-1474 ISBN: 0-7803-740-4.
  • WO 2004/065050 describes a method to solder a capacitor to a printed circuit board (PCB). In order to achieve a defined thickness of the solder layer between the capacitor and the PCB, the solder paste contains a solder material and a spacer material, which has a melting point higher than the melting point of the solder material. Typically, the spacer material is in form of spheres. During heating of the solder paste, the solder paste is heated to a temperature that is higher than the melting point of the solder material, but lower than the melting point of the spacer material. The spacer material stays as a solid in the paste, so that the capacitor and the PCB are spaced at a predetermined thickness from each other after the heating process. The distance between the capacitor and PCB can be varied by varying the dimensions of the spacer material in the solder paste.
  • US 5 784 256 refers to a notebook with a printed circuit board (PCB) including a heat generating IC chip. The chip on the PCB is cooled by clamp contacting the PCB between a cover and a cooling plate having four bosses with holes for inserting screws. The cover and cooling plate with the PCB in between are clamped together by inserting screws from the cover to the holes in the cooling plate. Between the chip and the cooling plate, which is made of a metal with high electrical and thermal conductivity, an electrically and thermally conductive layer is arranged.
    • Disclosure of Invention
  • It is an object of the invention to provide an electronic device with a base plate for a heat sink, which allows metallurgical bonding of the base plate to a power electronic component without the danger of tilting of the base plate against the power electronic component and which base plate is easy to manufacture.
    This object is achieved by an electronic device comprising at least one power electronic component, an electrically insulating plate and a base plate according to claim 1.
    The inventive electronic device comprises a base plate with a cooling plate and spacer elements, which are arranged on the surface of the cooling plate. The spacer elements and the cooling plates are made as one piece with the material at least in the surface region of the cooling plate and the spacer elements being the same.
    The inventive electronic device with a base plate has the advantage that the base plate allows to achieve a predetermined distance to a power electronic component, which is metallurgical bonded to the base plate. A tilting of the power electronic component against the base plate is minimised by the introduction of spacer elements on the cooling plate, which tilting would lead to different thermal extension of the areas of the bonding layer with different bonding layer, e.g. solder layer thicknesses. In that case heat distribution would be worse in the areas of greater solder thickness, because the solder material has typically a worse heat conductivity than the base plate itself or the electronic element. Additionally, there would be a danger of a delamination of the power electronic component from the base plate in case of extended thermal cycling.
    With the inventive electronic device with a base plate, any solder material, suitable for achieving the desired connection between the base plate and the power electronic component in terms of temperature during the soldering and thermal properties of the solder layer can be used.
    Furthermore, with such an inventive electronic device with a base plate heat can be distributed in a uniform way between the heat producing parts of a power electronic component and the base plate, if the spacer elements are arranged in areas of the base plate, which are not directly below the heat producing part of the power electronic component.
    • Brief Description of Drawings
  • The subject matter of the invention will be explained in more detail in the following text with reference to the attached drawings, in which:
    • FIG 1
    shows a perspective view on a first embodiment of the base plate for a heat sink according to the invention;
    FIG 2
    shows a cross sectional view on a detail of another embodiment of the base plate for a heat sink according to the invention;
    FIG 3
    shows a cross sectional view on a detail of another embodiment of the base plate for a heat sink according to the invention;
    FIG 4
    shows a top view on another embodiment of the base plate for a heat sink according to the invention;
    FIG 5
    shows a top view on another embodiment of the base plate for a heat sink according to the invention; and
    FIG 6
    shows a cross sectional view on an inventive semiconductor module.
  • The reference symbols used in the figures and their meaning are summarized in the list of reference symbols. Generally, alike or alike-functioning parts are given the same reference symbols. The described embodiments are meant as examples and shall not confine the invention.
    • Modes for Carrying out the Invention
  • In FIG. 1 a base plate 1 for a heat sink according to the invention is shown. The base plate 1 comprises a cooling plate 2 and spacer elements 3, which are arranged on the surface of the cooling plate 2. The spacer elements 3 and the cooling plate 2 are made as one piece and the material at least in the surface region of the cooling plate 2 and of the spacer elements is the same. Of course, the cooling plate can also be completely made of said material.
    Typically the cooling plate 2 is made of a metal matrix composite, e.g. a Silicon-Carbide (SiC) preform infiltrated with molten Aluminum. For the manufacturing of such a metal matrix composite the SiC preform is placed in a mold, which has the negative form of the desired final base plate 1 and then the preform is infiltrated with the Aluminum. For an inventive base plate the mold comprises recesses, by which in the final base plate 1 spacer elements 3 are formed.
    The spacer elements 3, as shown in FIG. 1, are made in the form of small pins 31. In a preferred embodiment the pins 31 have a diameter of less than 2 mm x 2 mm, in particular 1 mm x 1 mm in order to have only a small influence to heat distribution and homogeneous thermal expansion coefficient of the solder layer.
    The spacer elements 3 and the cooling plate 2 are made as one piece and the material in the surface region of the cooling plate 2 and of the spacer elements 3 is the same. For a metal matrix composite that means that the pins 31 are preferably made of Aluminum in the same step as the infiltration with Aluminum.
    In another preferred embodiment the pins 31 extend the surface of the cooling plate 2 to a height 32 between 50 to 200 µm. The minimum height of the pins 31 is given by the maximum unevenness of the surfaces of the power electronic component and the cooling plate 2, whereas the maximum height of the pins 31 is defined by thermal resistance of the solder joint. The pins 31 may have any appropriate cross section like a quadrangular cross section, in particular a square or a rectangular cross section or a round cross section, in particular a circular or an oval cross section. The cross section can be chosen for reasons of easy manufacturing or for geometrical reasons in the final electronic device.
    In FIG. 2 a detail, in particular a pin 31', of another preferred embodiment of the base plate 1 is shown. The cross section of the pin 31' diminishes with the distance from the surface of the cooling plate 2 at least in the top area of the pins 31'. The diminution of the cross section can be limited to the top area of the pins 31' in a length region 33 between 90 % and 100 % of the height 32 of each pin 31', leaving the pin 31' in a length region 34 between the surface of the cooling plate 2 and 90 % of the height 32 of the pin 31' with a constant cross section. In another preferred embodiment, the diminution in the cross section of the pins 31' is limited to the top area of the pins 31' in the length region 33 of 75 % to 100 % of the height 32 of each pin 31', in particular in a length region 33 of 50 % to 100 % of the height 32 of each pin 31', and in particular over the whole height 32 of each pin 31', as shown for a pin 31" in FIG. 3. In another embodiment, the cross section diminishes continuously. The advantage of such pins 31' or 31" with a decreasing cross section with the distance from the surface of the cooling plate 2 is that thermal stress due to different thermal extension in the transition area between insulating plate 8, the pin 31', 31" and the solder layer is avoided or at least reduced.
    In FIG. 4 a top view on a base plate 1 is shown. The cooling plate 2 is in form of a first rectangular 21 and the pins 31 are arranged in the four corners of the cooling plate 2. In particular, the pins 31 are arranged within an area corresponding to a second rectangular 6 with a side length 61, 61' corresponding to a quarter of the parallel lying side length 22, 22' of the cooling plate 2. The side length 61 of the second rectangular lies parallel to the side length 22 of the first rectangular, and the side length 61' parallel to the side length 61'. The second rectangular 6 extends on the surface of the cooling plate 2 from a corner of the cooling plate 2. The area in which the pins 31 are arranged should be chosen in such a way that no heat producing part of the electronic component is arranged directly above the pins 31', thereby avoiding a reduction of heat transfer capability in the region of the pins 31.
    Another preferred embodiment of the inventive base plate 1 is also shown in FIG. 4. A pin 31 is arranged around the centre in the middle part of the cooling plate 2, in particular within an area around the centre of the cooling plate 2, the area corresponding to a third rectangular 7 with a side length 71, 71' corresponding to a quarter of the parallel lying side length 22, 22' of the cooling plate 2. In another preferred embodiment, the pin 31 is arranged in the centre 23 of the first rectangular 21. Of course, the cooling plate 2 can have other forms than a first rectangular 21, and in a preferred embodiment, not shown in a figure, pins 31 are arranged in the corners of the cooling plate 2 or outer areas, which border on the edge of the cooling plate 2.
  • In FIG. 6 an inventive electronic device in form of a semiconductor module is shown, which comprises at least one power electronic component in form of a semiconductor chip 4 and an inventive base plate 1. The semiconductor chips 4 can be insulated gate bipolar transistors (IGBT).
    The at least one semiconductor chip 4 is bonded by a metallurgical process, preferably by soldering or metal bonding, on an electrically insulating plate 8, which is typically a ceramic substrate. The insulating plate 8 is plate is bonded by a metallurgical process, in particular by soldering, on the side, which lies opposite the side, on which the at least one semiconductor chip 4 is arranged, on the base plate 1. Also low temperature bonding can be used as a metallurgical bonding for one or both bondings. Such low temperature bondings are typically made under high pressure and temperatures typically below 300 °C. Metals like silver and indium or tin and gold are used for making the joint. The metals are applied on the surfaces to be jointed together as thin sheets and/or as a powder. Such low-tempereature bonding methods are for example described in PCT/CH2006/00610 .
    These metallurgical bondings are non-detachable connections, i.e. the connections are destroyed if trying to separate the two elements bonded together under normal conditions.
    In another preferred embodiment, shown in Fig. 5, a plurality of such insulating plates 8 (in this case: six), each with at least one semiconductor chip 4 arranged on one side, are arranged together on one base plate 1. At least four pins 31 are arranged on the base plate 1 for a contact with each insulating plate 8. In a preferred embodiment, the insulating plate(s) 8 is rectangular and these pins 31 are arranged on the base plate 1 such that they can make contact to the four corners of each insulating plate 8. More generally, the pins 31 are arranged outside the projected area, in which the at least one semiconductor chip 4 is arranged. A further pin 31 may be arranged in the middle part, in particular in the centre of each insulating plate 8. Any other number of insulating plates, i.e. one or more, are arrangeable on the base plate 1, each with pins 31 arranged in such a way that the pins 31 can make contact to the corners of each insulating plate 8 in the described manner.
    In another preferred embodiment, not shown in a figure, the inventive base plate 1 is thermally and electrically conductive connected to the at least one semiconductor chip 4.
    • Reference List
    • 1
    Base plate
    2
    Cooling plate
    21
    First rectangular
    22, 22'
    Side length
    23
    Centre
    3
    Spacer element
    31, 31', 31
    " Pins
    32
    Height
    33
    Length region
    34
    Length region
    4
    Semiconductor chip
    5
    Solder layer
    6
    Second rectangular
    61, 61'
    Side length
    7
    Third rectangular
    71, 71'
    Side length
    8
    insulating plate

Claims (15)

  1. Electronic device comprising at least one power electronic component, in particular at least one semiconductor chip (4), an electrically insulating plate (8) and a base plate (1), wherin the base plate comprises a cooling plate (2), wherein the at least one power electronic component is metallurgically bonded, in particular by soldering, metal or low-temperature bonding, on the electrically insulating plate (8), in particular on a ceramic substrate, which electrically insulating plate (8) is metallurgically bonded, in particular by soldering or low-temperature bonding, on the base plate (1), and wherein spacer elements (3) are arranged between the insulating plate (8) and the cooling plate (2), characterized in that the base plate (1) comprises the spacer elements (3), which are arranged on the surface of the cooling plate (2), the spacer elements (3) and the cooling plate (2) being made as one piece and the material in the surface region of the cooling plate (2) and of the spacer elements being the same.
  2. Electronic device according to claim 1, characterized in that the spacer elements (3) are pins (31, 31', 31 ").
  3. Electronic device according to claim 2, characterized in that the pins (31, 31', 31 ") have a cross section of less than 2 mm x 2 mm, in particular 1 mm x 1 mm.
  4. Electronic device according to claim 2 or 3, characterized in that the pins (31, 31', 31 ") extend the surface of the cooling plate (2) to a height (32) between 50 to 200 µm.
  5. Electronic device according to claim 2 or 3, characterized in that the pins (31, 31', 31 ") have a round cross section, in particular a circular or an oval cross section.
  6. Electronic device according to claim 2 or 3, characterized in that the pins (31, 31', 31 ") have a quadrangular cross section, in particular a square or a rectangular cross section.
  7. Electronic device according to claim 2 to 6, characterized in that the cross section of the pins (31, 31', 31 ") diminishes with the distance from the surface of the cooling plate (2) at least in the top area of the pins (31, 31', 31"), in particular in a length region (33) between 90 and 100 % of the height (32) of each pin (31, 31', 31 "), in particular in a length region (33) of 75 to 100 % of the height (32) of each pin (31, 31', 31 "), in particular in a length region (33) of 50 to 100 % of the height (32) of each pin (31, 31', 31"), and in particular over the whole height (32) of each pin (31, 31', 31 ").
  8. Electronic device according to claim 2 to 7, characterized in that the cooling plate (2) is a first rectangular (21) and the pins (31, 31', 31") are arranged in the four corners of the cooling plate (2), each in particular within an area corresponding to a second rectangular (6), which second rectangular (6) extends on the surface of the cooling plate (2) from a corner of the cooling plate (2) with a side length (61, 61') corresponding to a quarter of the side length (22, 22') of the cooling plate (2), which side of the cooling plate (2) lies parallel to the side of the second rectangular (6).
  9. Electronic device according to claim 8, characterized in that a pin (31, 31', 31 ") is arranged in the middle part of the first rectangular (21), in particular within an area around the centre corresponding to a third rectangular (7) with a side length (71, 71') corresponding to a quarter of the side length (22, 22') of the cooling plate (2), which side of the cooling plate (2) lies parallel to the side of the third rectangular (7), and in particular in the centre (23) of the first rectangular (21).
  10. Electronic device according to claim 2 to 7, characterized in that the base plate (1) is metallurgically bonded to at least one insulating plate (8), each with at least one power electronic component arranged on a side opposite the base plate (1), and in that at least four pins (31, 31', 31 ") are provided for a contact with each insulating plate (8).
  11. Electronic device according to claim 10, characterized in that the at least four pins (31, 31', 31 ") for the contact with each insulating plate (8) are arranged such that the at least four pins (31, 31', 31 ") are arranged outside the area, in which the at least one power electronic component is arranged, in particular the at least one insulating plate (8) is rectangular and the at least four pins (31) are arranged in the corners of each insulating plate (8).
  12. Electronic device according to claim 11, characterized in that a further pin (31, 31', 31 ") is arranged in the middle point of each insulating plate (8).
  13. Electronic device according to claim 2, characterized in that the pins (31, 31', 31 ") are arranged in a geometrical periodical structure.
  14. Electronic device according to any of the preceding claims, in which the electronic device is a semiconductor module and the at least one power electronic component is at least one insulated gate bipolar transistor.
  15. Electronic device according to claim 14, characterized in that at least two insulating plates (8) are metallurgical bonded on the base plate (1).
EP20070121276 2006-12-22 2007-11-22 Electronic device with a base plate Active EP1936684B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP20070121276 EP1936684B1 (en) 2006-12-22 2007-11-22 Electronic device with a base plate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06026658A EP1936683A1 (en) 2006-12-22 2006-12-22 Base plate for a heat sink and electronic device with a base plate
EP20070121276 EP1936684B1 (en) 2006-12-22 2007-11-22 Electronic device with a base plate

Publications (2)

Publication Number Publication Date
EP1936684A1 EP1936684A1 (en) 2008-06-25
EP1936684B1 true EP1936684B1 (en) 2011-07-20

Family

ID=39420689

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20070121276 Active EP1936684B1 (en) 2006-12-22 2007-11-22 Electronic device with a base plate

Country Status (1)

Country Link
EP (1) EP1936684B1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5784256A (en) 1994-09-14 1998-07-21 Kabushiki Kaisha Toshiba Portable computer having a circuit board including a heat-generating IC chip and a metal frame supporting the circuit board
US20040134976A1 (en) 2003-01-14 2004-07-15 Frank Keyser Method and system for solder connecting electrical devices

Also Published As

Publication number Publication date
EP1936684A1 (en) 2008-06-25

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