EP1893940A1 - Verfahren und vorrichtung zur optischen abtastung einer probe - Google Patents
Verfahren und vorrichtung zur optischen abtastung einer probeInfo
- Publication number
- EP1893940A1 EP1893940A1 EP06724164A EP06724164A EP1893940A1 EP 1893940 A1 EP1893940 A1 EP 1893940A1 EP 06724164 A EP06724164 A EP 06724164A EP 06724164 A EP06724164 A EP 06724164A EP 1893940 A1 EP1893940 A1 EP 1893940A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- sample
- scanning device
- sensor
- adjustment
- adjusting unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/248—Base structure objective (or ocular) turrets
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
Definitions
- the present invention relates to a method for the optical scanning of a sample, comprising an adjusting unit and a scanning device, according to which the
- Probe is moved by means of the acted upon by a control unit adjusting unit relative to the scanning unit, or vice versa, and then by means of a sample sensor, a movement window for the adjustment and / or the
- Scanning is defined within which mechanical collisions between the sample and the scanner are excluded.
- a method of the embodiment described above is presented in DE 102 39 794 A1. This is about a measuring device that is equipped with a protective device, which prevents a moving part colliding with an object.
- the protector includes a protector body and a sensor protruding from the protector body over a predetermined length to sense a distance between the object and the protector body by its elastic deformation upon contact with the object.
- Comparable is the JP 022 47 967 A before.
- an electrode is realized, which closes an electrical circuit in contact with a sample and thus emits an alarm to prevent further movement of the adjustment.
- the respective sample may be a biological sample, a cell section or even a material science sample, such as a material cut.
- the scanning device always captures only a specific section of the sample with the desired resolution and consequently generates a single image.
- the adjustment unit now ensures that the respective individual images taken with the scanning device are combined to form at least one overall image in the control system. This is not mandatory.
- the scanner has mostly an optical unit and a recording unit.
- CCD Charge Coupled Device
- the recording unit or the CCD chip is regularly in the image plane of the associated microscope objective to record the individual image and transfer it to the control system.
- the control system in turn reads the recording unit and stores the respective frame. After all the individual images have been acquired, they are combined to form the one or more overall images.
- the sample is moved with the aid of the adjusting unit relative to the scanning device.
- the sample is regularly held by a sample table, which in turn is moved via adjusting or adjusting devices.
- the adjustment unit usually also provides for an adjustment in the Z direction, that is to say the height direction, which is always required when, for example, focusing is to be effected with the aid of the microscope objective or the optical unit.
- the focusing can be done both automatically and manually.
- the image contrast is examined with the aid of gray value deviations and the picture with the highest contrast is classified as belonging to the focus.
- a manual focus is possible.
- the invention comprises modifications in such a way that it is not the adjusting unit or the sample table that is moved relative to the scanning device, but the scanning device additionally or alternatively with respect to the adjusting unit. Of course, both are possible, as the latter application makes clear.
- the sample table is moved in the X / Y plane, whereas the scanning device undergoes a movement in the Z direction.
- the sample is accidentally damaged. This is particularly painful in the case that the sample is a particularly valuable individual piece or a living cell culture, which can be irreparably destroyed by such an operation. This is where the invention starts.
- the invention is based on the technical problem of further developing a method of the embodiment described at the beginning in such a way that sample preparation Damage can be excluded in any case.
- a correspondingly suitable device should be specified.
- the invention proposes in a generic method for the optical scanning of a sample, that the sample sensor operates without contact, preferably with reference to electromagnetic waves and / or sound waves.
- the sample sensor operates without contact, preferably with reference to electromagnetic waves and / or sound waves.
- both distance measurements (interferometric) and time measurements (transit time of a pulse) are conceivable.
- work is done on sound waves.
- a movement window is usually specified for the adjustment unit and / or the scanning device, usually within the control system, so that the adjustment unit and / or the scanning device can only be moved within this movement window or an alarm message is issued when the movement window is exited.
- the movement window is determined and specified with the aid of the non-contact sample sensor.
- the motion window is set depending on various parameters. These parameters may not be limited to the size of the sample, the initial position and speed of the adjustment and / or scanning device (4, 5) and possibly their design. Depending on this, the movement window is set variably in each case.
- the sample sensor defines - as already mentioned - said movement window.
- the sample sensor preferably reports, once or continuously, distance measurement values between the sample and / or the adjustment unit and the scanning device to the control system.
- the sample sensor may, for example, sample the size of the sample and transfer associated sample dimension values to the control system. If, in addition, the initial position of the adjusting unit and, for example, the design of the sample receiving sample stage are stored in the control system, a free space between the sample and the scanning device can be easily deduced in connection with said sample dimension values. This free space can be equated with the maximum possible motion window.
- the movement window limits movements of the adjustment unit and / or the scanning device in one dimension, usually the Z direction.
- the motion window will usually be much smaller than the previously mentioned free space. Values of 50% to 80% are conceivable here. That is, the motion window occupies 50% to 80% of the free space.
- a displacement sensor is additionally implemented. With the help of this adjustment sensor movements of the adjustment unit can be detected - starting with their previously determined initial position.
- the adjustment sensor serves to record and evaluate movements of the adjustment unit in the Z direction. If the movement window is fixed in the Z direction, it can be determined directly with the aid of the adjustment sensor whether the adjustment unit or the sample moves in the direction of one of the two boundaries of the movement window or not.
- the movement window is in each case variably adapted to the movement of the sample relative to the scanning device.
- an alarm signal for example, is emitted acoustically and / or optically.
- the sample sensor Since the sample sensor operates without contact, it can detect the free space between the sample and the scanning device in a corresponding manner, without the sample being damaged.
- the sample sensor may work with (ultra-) sound waves and / or electromagnetic waves. Conceivable here are continuous processes, for example with the aid of an interferometer, to measure the free space and derive the motion window therefrom. However, it is also possible to work with wave pulses which, for example, are emitted by the scanning device and reflected by the sample. From their runtime or an associated time measurement, the free space can be determined and consequently derive the motion window.
- the sample sensor is usually capable of scanning the sample for its sample dimensions.
- the adjustment sensor is usually associated with one or more adjustment of the adjustment.
- the adjustment sensor is usually assigned to a handwheel or a corresponding Z drive provided at this point.
- the adjustment can be designed as a rotary encoder. In the latter case, it may be a displacement sensor or the like.
- a method which, by defining a motion window for the adjustment unit, ensures that mechanical Collisions between the sample and the scanner can be reliably excluded. This is achieved essentially by the fact that the free space between the sample and the scanning device is determined without contact and serves as the basis for defining a variable movement window.
- the non-contact sample sensor based on preferably electromagnetic waves and / or (ultra-) sound waves ensures that the associated sample is not damaged. Because in contrast to the prior art, for example according to DE 102 39 749 A1, a mechanical contact is omitted in any case. This circumstance is of particular importance against the background that even the tiniest touch can irreparably damage most biological samples. This is excluded in the context of the invention in any case.
- sample sensor according to the invention can not simply work without contact, but it represents an advantageous embodiment, as it were a lateral image of the sample or its shadow.
- the invention is based on the further knowledge that the accuracy of the determination of the Free space and therefore of the movement window.
- the distance between the sample and the scanner during adjustment changes permanently and can be put on an even more reliable basis by this procedure.
- the sample sensor is otherwise placed either in the scanning device and / or the adjustment, so that changes in their distance from each other by the in Direction of the change in distance and not perpendicular to this (as in the shadow) working sample sensor can be determined.
- the invention also provides a device for optically scanning a sample as described in claim 6.
- Advantageous embodiments of this device are treated in claims 7 to 10.
- Fig. 1 shows a device according to the invention schematically
- FIG. 2 and 3 are each an enlarged detail of FIG. 1.
- a device for optical scanning of a sample 1 is shown, which is not limited to a transparent biological tissue section. This is illuminated by means of a white light source W or the like, which is located below an adjustment unit 2, 3.
- the adjusting unit 2, 3 is composed of adjusting devices 2 and a sample table 3.
- the sample table 3 can be moved in the example case in the X / Y direction, so that different areas of the sample 1 can be recorded.
- the sample table 3 can optionally also be adjusted in the Z direction. This is not shown.
- a scanning device 4, 5 in the Z direction is accomplished in the present case, that the scanning device 4, 5 is associated with a further adjusting device 6, in which it is not limiting to a handwheel 6 in conjunction with a Z Actuator acts.
- the scanning device 4, 5 is composed of a plurality of objectives or microscope objectives 4 as an optical unit 4, which can image different sized image sections of the sample 1 to a recording unit 5 selectively.
- the recording unit 5 is a CCD chip with, for example, 1 million pixels.
- the image of the transmitted sample 1 generated on the CCD chip is recorded in a control system 7 as a single image E.
- the control unit 7 combines a plurality of individual images E into an overall image.
- the control system 7 also controls the adjusting device 2 or the adjusting unit 2, 3 and optionally the optical unit 4 by a desired lens 4 is selected. In addition, the control system 7 also controls the adjusting device 6 in the Z direction. In fact, the illustrated device with the aid of the adjusting device 6 enables both automatic focusing of the sample 1 with the aid of the selected objective 4 and manual focusing with the illustrated handwheel 6.
- this distance A is a maximum possible movement window F for the adjusting unit 2, 3, within which mechanical collisions with the scanning device 4, 5 are excluded (see FIG 3).
- the movement window F is usually set smaller than the said (maximum) distance A, for example, the movement window F is 80% of the distance A, so that the following applies:
- the illustrated device has at least one sample sensor 8 which records once or continuously distance measurement values, ie the distance A, between the sample 1 and / or the adjustment unit 2. 3 and the scanning device 4, 5 reports to the control system 7.
- the sample 1 can be scanned with the aid of the sample sensor 8 with regard to its sample dimensions. This is usually the case.
- the sample sensor 8 is arranged on a stationary holding arm for the scanning device 4, 5 or in this. If the selected lens 4 is known and also its dimensions, it can be determined from a projection Ü of the objective 4 with respect to a lower edge of the holding arm according to the distance of the lower edge of the lens 4 from
- H indicates the "height" of the sample 1 above the sample table 3 and has been previously determined, for example.
- the sample sensor 8 may also be attached directly (head-side) to the objective 4 and continuously transmit the distance A to the control system 7.
- the sample sensor 8 scans the sample 1 with respect to its sample dimensions, which also happens without contact.
- the sample sensor 8 can laterally illuminate the sample 1 and close it from the shadow image at its height "H” (see FIG. 3).
- the sample sensor 8 is fixedly attached to the scanner 4, 5, or lens 4, and directly measures the distance A from its mounting location to a head of the sample 1. This head usually coincides with the surface of a cover glass. wherein the sample 1 is placed between said coverslip and a slide, as Fig. 3 makes clear.
- the sample sensor 8 is able to determine the height H of the sample 1 in comparison to the surface of the sample table 3 and also the distance A of the sample 1 to the lower edge of the lens 4 and possibly the distance A 1 .
- the distance A results simply from the distance of the selected objective 4 or its projection U and its distance from the surface of the sample table 3 minus the height H of the sample 1 in accordance with equation (3) given above.
- the control system 7 Based on this determined variable distance A, the control system 7 now predefines the movement window F according to the previously specified rule (1) or (2).
- an adjustment sensor 9 is additionally realized in addition to the sample sensor 8, which detects movements of the adjustment unit 2, 3.
- the adjustment sensor 9 is the handwheel 6 or the Adjusting device 6 assigned to the movement of the scanning device 4, 5 in the Z direction.
- the adjustment sensor 9 is a rotation angle sensor which detects movements of the handwheel 6 or the additionally or alternatively provided adjustment drive 6 '.
- the scanning device 4, 5 - starting in its initial position - moves relative to the sample table 3 and consequently the sample 1 calculates the control system 7 from the associated adjustment - recorded using the Verstellsensors 9 - the remaining distance A between the microscope objective 4 and the sample 1 and its head.
- the distance A needs only once in the initial position of the scanning device 4, 5 are determined relative to the sample 1. All changes in the distance A are then taken into account via the adjustment sensor 9 and the control system 7 via the adjustment. In order to increase safety, however, as a rule the distance A is continuously measured and tested for conformity with the values calculated in the control system 7 via the adjustment path and the displacement sensor 9.
- the handwheel 6 is empty or it is issued a warning signal.
- the hand wheel 6 is not mechanically coupled directly to an actuator or the like, but rather rotational movements of the handwheel 6 with the adjustment sensor 9 are detected and tapped and then converted into adjusting movements of the additionally provided actuating drive 6 'with the aid of the control system 7.
- these adjusting movements of the handwheel 6 and thus adjustment of the Verstellsensors 9 have been evaluated in the control system 7, to the extent that the adjoining adjustment path is possible or not.
- the control system 7 ensures in the example case that the actuator 6 'is only adjusted so far that the minimum distance is complied with.
- the sample sensor 8 is not only able to determine the variable distance A with the aid of the control unit 7 and to specify the movement window F. Rather, the respective position of the scanning device 4, 5 with respect to the sample 1 in the control system 7 can be logged with the help of the sample sensor 8 in addition. If these logged values are simultaneously compared with those of the adjustment sensor 9, statements about the positioning accuracy of the handwheel 6 or of the additionally or alternatively provided positioning drive 6 'can be made.
- the invention is able to dispense with particularly elaborate actuators 6 'or handwheels 6, because ultimately the sample sensor 8 in conjunction with the Verstellsensor 9 and the control system 7 for a corresponding correction and compensation possibly (mechanical) inaccurate - worries.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005029381A DE102005029381B4 (de) | 2005-06-24 | 2005-06-24 | Verfahren und Vorrichtung zur optischen Abtastung einer Probe |
PCT/EP2006/003227 WO2007000199A1 (de) | 2005-06-24 | 2006-04-08 | Verfahren und vorrichtung zur optischen abtastung einer probe |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1893940A1 true EP1893940A1 (de) | 2008-03-05 |
Family
ID=36599095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06724164A Withdrawn EP1893940A1 (de) | 2005-06-24 | 2006-04-08 | Verfahren und vorrichtung zur optischen abtastung einer probe |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090091823A1 (ja) |
EP (1) | EP1893940A1 (ja) |
JP (1) | JP2008547052A (ja) |
DE (1) | DE102005029381B4 (ja) |
WO (1) | WO2007000199A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008063799A1 (de) * | 2008-12-18 | 2010-06-24 | Carl Zeiss Microimaging Gmbh | Verfahren zum Ausgleich beliebiger Abgleichlängen von Objektiven bei der Fokussierung an Stereomikroskopen und Makroskopen |
DE102013006994A1 (de) * | 2013-04-19 | 2014-10-23 | Carl Zeiss Microscopy Gmbh | Digitalmikroskop und Verfahren zur Optimierung des Arbeitsablaufes in einem Digitalmikroskop |
CN104458579B (zh) * | 2014-12-12 | 2017-03-08 | 宁波江丰生物信息技术有限公司 | 一种数字切片扫描仪及其减少扫描焦点数量的方法 |
CN108872240A (zh) * | 2017-05-11 | 2018-11-23 | 京东方科技集团股份有限公司 | 微观缺陷检测装置及检测方法、显微镜 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT197096B (de) * | 1957-03-01 | 1958-04-10 | Reichert Optische Werke Ag | Mikroskopobjektiv mit Schutzvorrichtung |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3514444A1 (de) * | 1985-04-20 | 1986-10-23 | Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf | Pinolenschutz von koordinaten-messmaschinen |
DE3527063C1 (de) * | 1985-07-27 | 1986-01-30 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und Vorrichtung zum Schutz eines beweglichen,langgestreckten Maschinenteils |
JPH02247967A (ja) * | 1989-03-20 | 1990-10-03 | Hitachi Ltd | 走査形電子顕微鏡 |
DE4112010A1 (de) * | 1991-04-12 | 1992-10-15 | Leica Mikroskopie & Syst | Endschaltvorrichtung mit definiertem ueberlauf zum objektschutz bei mikroskopen mit motorischem fokussiertrieb |
JP3831561B2 (ja) * | 1999-11-22 | 2006-10-11 | 株式会社ミツトヨ | 測定機の衝突防止装置 |
US6628459B2 (en) * | 2000-04-19 | 2003-09-30 | Olympus Optical Co., Ltd. | Focus stabilizing apparatus |
DE10103707B4 (de) * | 2001-01-26 | 2005-04-21 | Leica Microsystems Wetzlar Gmbh | Halterung zum Positionieren eines Objektträgers sowie Vorrichtung zum Laserschneiden von Präparaten |
DE10106698A1 (de) * | 2001-02-14 | 2002-08-29 | Leica Microsystems | Verfahren und Vorrichtung zum automatischen Fokussieren eines optischen Gerätes |
US20020176161A1 (en) * | 2001-03-12 | 2002-11-28 | Olympus Optical Co., Ltd. | Microscope system |
JP2003065748A (ja) * | 2001-08-29 | 2003-03-05 | Mitsutoyo Corp | 測定装置 |
JP4362605B2 (ja) * | 2003-07-02 | 2009-11-11 | 大学共同利用機関法人情報・システム研究機構 | 顕微鏡装置 |
-
2005
- 2005-06-24 DE DE102005029381A patent/DE102005029381B4/de not_active Expired - Fee Related
-
2006
- 2006-04-08 WO PCT/EP2006/003227 patent/WO2007000199A1/de active Application Filing
- 2006-04-08 JP JP2008517339A patent/JP2008547052A/ja active Pending
- 2006-04-08 US US11/922,831 patent/US20090091823A1/en not_active Abandoned
- 2006-04-08 EP EP06724164A patent/EP1893940A1/de not_active Withdrawn
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT197096B (de) * | 1957-03-01 | 1958-04-10 | Reichert Optische Werke Ag | Mikroskopobjektiv mit Schutzvorrichtung |
Non-Patent Citations (1)
Title |
---|
See also references of WO2007000199A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE102005029381B4 (de) | 2007-04-26 |
JP2008547052A (ja) | 2008-12-25 |
US20090091823A1 (en) | 2009-04-09 |
WO2007000199A1 (de) | 2007-01-04 |
DE102005029381A1 (de) | 2007-01-04 |
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