EP1854163A1 - Nanostructured electrode for a micro-battery - Google Patents

Nanostructured electrode for a micro-battery

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Publication number
EP1854163A1
EP1854163A1 EP05850639A EP05850639A EP1854163A1 EP 1854163 A1 EP1854163 A1 EP 1854163A1 EP 05850639 A EP05850639 A EP 05850639A EP 05850639 A EP05850639 A EP 05850639A EP 1854163 A1 EP1854163 A1 EP 1854163A1
Authority
EP
European Patent Office
Prior art keywords
electrode
electrolyte
battery
anode
lithium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05850639A
Other languages
German (de)
French (fr)
Inventor
Raphaël Salot
Frédéric GAILLARD
Emmanuelle Rouviere
Steve Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
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Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP1854163A1 publication Critical patent/EP1854163A1/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0428—Chemical vapour deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562—Solid materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/133—Electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/134—Electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1393—Processes of manufacture of electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/58—Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
    • H01M4/583—Carbonaceous material, e.g. graphite-intercalation compounds or CFx
    • H01M4/587—Carbonaceous material, e.g. graphite-intercalation compounds or CFx for inserting or intercalating light metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00—Primary cells; Manufacture thereof
    • H01M6/40—Printed batteries, e.g. thin film batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00—Electrolytes
    • H01M2300/0017—Non-aqueous electrolytes
    • H01M2300/0065—Solid electrolytes
    • H01M2300/0068—Solid electrolytes inorganic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00—Electrolytes
    • H01M2300/0088—Composites
    • H01M2300/0094—Composites in the form of layered products, e.g. coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention relates to the field of energy storage devices, and mainly micro-batteries manufactured in thin films by vacuum deposition techniques.
  • the invention relates to an electrode for a battery, in particular lithium, the structure of which is defined so as to optimize the reliability of the energy storage.
  • all the components of the micro-battery that is to say the current collectors, the positive and negative electrodes, the electrolyte, and even the encapsulation, are thin layers, obtained by deposition, mainly by physical vapor deposition (PVD) or chemical vapor deposition (CVD).
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • the operating principle of such a battery is based on the insertion and removal, also called “uninsertion", of an alkali metal ion or a proton in and from the positive electrode, and the deposition. or the extraction of this ion on and of the negative electrode.
  • the operating voltage of this type of battery is between 1 and 4 V, and the surface capacitances are of the order of some 10 ⁇ Ah / cm 2 to several hundreds of ⁇ Ah / cm 2 .
  • Charging a micro-battery that is to say the transfer of ions from the anode to the cathode, is usually complete after a few minutes of charging.
  • the main systems use Li + as ion transport current species: the Li + ion extracted from the cathode during discharge of the battery is deposited on the anode, and conversely, it is removed from the anode to intercalate in the cathode during charging.
  • a metal lithium anode the melting point of lithium, at 181 ° C., limits the potential use of the battery for high temperatures; in particular, it is impossible to reflow ("solder reflow process”) different layers of material.
  • the high reactivity of lithium metal with respect to the ambient atmosphere is penalizing, even for encapsulation.
  • metallic lithium is impossible to spray, which leads to the need for thermal evaporation.
  • Li + ion battery Li + ion insertion material
  • a cathode whose material contains lithium.
  • Li + ion Li + ion insertion material
  • Si Li + ion insertion material
  • the stresses generated by such a difference in volume strongly solicit the superimposed layers, and in particular can lead to damage or cracks, the juxtaposed electrolyte, which can create short circuits putting the battery out of service.
  • Li + cathode is performed directly on a substrate, said blocking.
  • the protuberances generated by the deposit are also the source of strong deformations and potential rupture of the electrolyte.
  • the object of the invention is to overcome the problems of the state of the art as regards the stability of the storage and the supply of energy. More particularly, the invention recommends the use of a new family of electrodes whose architecture and design make it possible to eliminate the stresses on the electrolyte during charging and discharging of the micro-battery.
  • the invention relates to a micro-battery of which an electrode is constituted by independent electrode elements, which thus define spaces without an electrode between them, or voids.
  • the void ratio is greater than 50%, for example of the order of 80%.
  • the electrode concerned is mainly the anode, the cathode and the solid electrolyte then being in the form of layers of material deposited more or less uniformly.
  • the anode is preferably composed of protuberances extending outwards from a current collector substrate.
  • the anode is composed of carbon nanotubes or silicon nanowires.
  • the energy storage device according to the invention can be encapsulated in order to isolate the ion exchange elements from the outside.
  • the invention relates to a nanowire or nanotube structure on a conductive substrate that can be used for the manufacture of lithium batteries as an electrode.
  • FIG. 1 schematically represents an energy storage device according to the invention.
  • Figures 2A and 2B show a device according to the invention respectively in the state of charge and in discharged state.
  • an energy storage device comprises, in the usual way, a substrate 12, cathode collectors 14a and anode 14b (the latter may be an integral part of the substrate 12), a cathode 16, an electrolyte 18, and an anode 20.
  • the micro-battery 10 can be protected by an encapsulation layer 22: the electrodes 16, 20, especially when they are lithium, are indeed very reactive to the air, and it may be advantageous to encapsulate also the other elements 14, 18.
  • the total thickness of the stack 14, 16, 18, 20 is usually between 10 and 50 microns, advantageously of the order of 15 microns.
  • Such a micro-battery 10, with the exception of the anode 20 which will be described later, can be made by any known technique, and in particular with different materials: -
  • the current collectors 14 are metallic and can be for example deposits based on Pt, Cr, Au, Ti.
  • the positive electrode 16 may be in particular made of LiCoO 2, LiNiO 2, LiMn 2 O 4, CuS, CuS 2, WOyS 2 TiOyS 2, V 2 O 5, deposited by conventional technique, with possible thermal annealing to increase crystallization and insertion capabilities (especially for lithiated oxides).
  • Electrolyte 18, which is a good ionic conductor and an electronic insulator, is generally made of a vitreous material based on oxide boron, lithium salts or oxides, in particular lithium oxynitride.
  • the electrolyte is phosphate based, such as LiPON, or LiSiPON.
  • the anode 20 is instead made according to an architecture that makes it possible to eliminate any expansion in the direction perpendicular to the surface of the collector substrate 14b, and at the adjacent surface of electrolyte 18.
  • the proportion of void 26 initially present compensates for the volume increase related to the insertion of lithium into the elements 24.
  • This optimization is specific to each insertion material, but the void ratio is usually greater than 50%, preferably 80%.
  • Figure 2A shows the charged state of the battery 10, wherein the anode 20 does not include Li + ions. During charging, the lithium ions are inserted into the anode elements 24, causing them to swell, so that the residual vacuum 26 decreases.
  • FIG. 2B shows the overall volume of the anode layer 20 has not changed, only the vacuum level 26 has decreased, so that neither the electrolyte 18, or the collecting layer 14b, have not been stressed.
  • the materials used to make the protuberances 24 are materials that can insert lithium (in parentheses is indicated a preferred vacuum ratio): germanium (80%), silicon-germanium (80%), silver, tin (70%) ,. .. and especially silicon (80%) or carbon (50%).
  • nanometric structures that is to say of dimensions in section of less than a few tens of nanometers, in particular nanotubes and nanowires, is recommended in obtaining optimal results for expansion problems.
  • electrode elements 24 in the form of nanotubes an additional advantage lies in the fact that the growth of these nanotubes makes it possible to dispense with the lithographic photo-etching step, which is very difficult because of the accuracy required.
  • Any technology that makes it possible to obtain structures of this type (very small diameter dimension) can be used, as the full-layer deposit and then the definition of small patterns by lithography photo.
  • deposition of nanotubes or nanofibers techniques are described for example in the documents of Sharma S et al.
  • the electrode elements 24 can be positioned randomly, forming a sponge type network.
  • the electrode elements are in the form of protruding projections 24 from the collector substrate surface 14b, in particular in the form of a regular grating, for example a square or hexagonal grating.
  • the diameter of the protuberances 24 and the pitch of the network can be optimized to obtain the desired vacuum ratio.
  • a growth of nanowires or nanotubes is preferred, and the grating obtained may be regular, with in particular protuberances 24 all protruding from the base surface 14b, at an angle advantageously as close as possible to 90 °.
  • the protuberances 24 may thus consist of a network of son 5 to 50 nm in diameter spaced from 50 to 100 nm with heights of between 200 nm and 5 microns.
  • a micro-battery 10 comprises an array of nanowires 24 of Si with a diameter of the order of 10 nm, with a vacuum level of 26. 80%, deposited on an insulating substrate 12 on which was deposited the current collector 14b, for example Pt.
  • the height of the nanotubes 24, or thickness of the anode 20, is 1 micron.
  • a 1 ⁇ m layer of LiPON electrolyte 18 is deposited by radiofrequency cathodic sputtering; the cathode 16 is then made of a layer of LiCoO 2 over 3 microns, deposited for example by sputtering or magnetron or radiofrequency.
  • the electrode structure according to the invention generally makes it possible to increase the conduction properties necessary for the proper functioning of a battery electrode material. Furthermore, it is preferable that the device 10 according to the invention is encapsulated in fine; this encapsulation can take place for an isolated device, or for a set of micro-batteries.
  • the encapsulation 22, which is intended to protect the active stack 14, 16, 18, 20 from the external environment and specifically moisture, can be manufactured from ceramic, polymer (such as hexamethyldisiloxane or parylene) or metal, as well as by a superposition of layers of these different materials.
  • the encapsulation whose layer, like that of the electrolyte, is sensitive to the problems of stress and deformation, is facilitated: - there is no change volume of the device 10; the non-use of metallic lithium makes it possible to generate a less chemically sensitive electrode material and a surface on which the encapsulation layers 22 are deposited, which is more smooth.
  • the electrode structure according to the invention can also be used for the cathode, or for both electrodes.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Composite Materials (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Abstract

The invention relates to a configuration for a new anode (20) for a lithium micro-battery (10). The anode (20) is preferably embodied with nanotubes or nanothreads (24) such that the space (26) remaining between the different elements (24) permits a compensation of the swelling inherent in the discharge of the micro-battery (10). The lack of constraints on the electrolyte (18) permit an improvement in the life of the battery (10).

Description

ELECTRODE NANOSTRUCTtJREE POtJR MICROBATTERIE NANOSTRUCTURED ELECTRODE POtJR MICROBATTERY
DESCRIPTIONDESCRIPTION
DOMAINE TECHNIQtJETECHNICAL FIELD
L'invention se rapporte au domaine des dispositifs de stockage d'énergie, et principalement des micro-batteries fabriquées en films minces par des techniques de dépôts sous vide.The invention relates to the field of energy storage devices, and mainly micro-batteries manufactured in thin films by vacuum deposition techniques.
Plus particulièrement, l'invention concerne une électrode pour une batterie, notamment au lithium, dont la structure est définie de façon à optimiser la fiabilité du stockage d'énergie.More particularly, the invention relates to an electrode for a battery, in particular lithium, the structure of which is defined so as to optimize the reliability of the energy storage.
ÉTAT DE LA TECHNIQtJE ANTERIEURESTATE OF THE PRIOR ART
Parmi les dispositifs de stockage d'énergie, des micro-batteries particulièrement utilisées, dites « tout solide », sont sous la forme de films : tous les composants de la micro-batterie, c'est-à-dire les collecteurs de courant, les électrodes positive et négative, l' électrolyte, et même 1' encapsulation, sont des couches minces, obtenues par dépôt, principalement par dépôt physique en phase vapeur (PVD) ou dépôt chimique en phase vapeur (CVD) . Les techniques utilisées permettent la réalisation d'objets de formes quelconques.Among the energy storage devices, especially used micro-batteries, called "all solid", are in the form of films: all the components of the micro-battery, that is to say the current collectors, the positive and negative electrodes, the electrolyte, and even the encapsulation, are thin layers, obtained by deposition, mainly by physical vapor deposition (PVD) or chemical vapor deposition (CVD). The techniques used allow the realization of objects of any shape.
Comme usuel, le principe de fonctionnement d'une telle batterie repose sur l'insertion et le retrait, aussi appelé « désinsertion », d'un ion de métal alcalin ou d'un proton dans et depuis l'électrode positive, et le dépôt ou l'extraction de cet ion sur et de l'électrode négative. Selon les matériaux utilisés, la tension de fonctionnement de ce type de batterie est comprise entre 1 et 4 V, et les capacités surfaciques sont de l'ordre de quelques 10 μAh/cm2 à quelques centaines de μAh/cm2. La recharge d'une micro-batterie, c'est-à-dire le transfert des ions de l'anode vers la cathode, est en général complète après quelques minutes de chargement .As usual, the operating principle of such a battery is based on the insertion and removal, also called "uninsertion", of an alkali metal ion or a proton in and from the positive electrode, and the deposition. or the extraction of this ion on and of the negative electrode. Depending on the materials used, the operating voltage of this type of battery is between 1 and 4 V, and the surface capacitances are of the order of some 10 μAh / cm 2 to several hundreds of μAh / cm 2 . Charging a micro-battery, that is to say the transfer of ions from the anode to the cathode, is usually complete after a few minutes of charging.
Les principaux systèmes utilisent Li+ comme espèce ionique de transport de courant : l'ion Li+ extrait de la cathode lors de la décharge de la batterie vient se déposer sur l'anode, et inversement, il s'extrait de l'anode pour s'intercaler dans la cathode lors de la charge. Aussi une des options est- elle de choisir une anode en lithium métallique. Cependant, le point de fusion du lithium, à 1810C, limite l'utilisation potentielle de la batterie pour des hautes températures ; en particulier, il est impossible d'effectuer une refusion (« solder reflow process ») des différentes couches de matériau. Par ailleurs, la forte réactivité du lithium métallique vis-à-vis de l'atmosphère ambiante est pénalisante, même pour l' encapsulation. Enfin, le lithium métallique est impossible à pulvériser, ce qui entraîne la nécessité de faire de l' évaporation thermique.The main systems use Li + as ion transport current species: the Li + ion extracted from the cathode during discharge of the battery is deposited on the anode, and conversely, it is removed from the anode to intercalate in the cathode during charging. So one of the options is to choose a metal lithium anode. However, the melting point of lithium, at 181 ° C., limits the potential use of the battery for high temperatures; in particular, it is impossible to reflow ("solder reflow process") different layers of material. Moreover, the high reactivity of lithium metal with respect to the ambient atmosphere is penalizing, even for encapsulation. Finally, metallic lithium is impossible to spray, which leads to the need for thermal evaporation.
Une autre option est de choisir une anode fabriquée à partir d'un matériau d'insertion de l'ion Li+ (batterie « Li-ion ») , qui provient d'une cathode dont le matériau contient du lithium. Or l'insertion de l'ion Li+ entraîne un gonflement du matériau qui le reçoit : même les matériaux les plus performants utilisés comme anodes d'insertion, tel Si, conduisent à des expansions volumiques importantes (jusqu'à 400 %) . Les contraintes engendrées par une telle différence de volume sollicitent fortement les couches superposées, et en particulier peuvent amener des détériorations, voire des fissures, de l' électrolyte juxtaposé, ce qui peut créer des courts-circuits mettant la batterie hors service.Another option is to choose an anode made from a Li + ion insertion material ("Li-ion" battery), which comes from a cathode whose material contains lithium. But the insertion of the Li + ion causes swelling of the material that receives it: even the most efficient materials used as insertion anodes, such as Si, lead to large volume expansions (up to 400%). The stresses generated by such a difference in volume strongly solicit the superimposed layers, and in particular can lead to damage or cracks, the juxtaposed electrolyte, which can create short circuits putting the battery out of service.
Une autre alternative est la batterie sans anode (aussi connue sous le terme de « Li-free ») : le dépôt du Li+ de la cathode s'effectue directement sur un substrat, dit bloquant. Les protubérances générées par le dépôt sont cependant également la source de fortes déformations et de rupture potentielle de 1' électrolyte.Another alternative is the battery without anode (also known as the "Li-free"): the deposition of the Li + cathode is performed directly on a substrate, said blocking. However, the protuberances generated by the deposit are also the source of strong deformations and potential rupture of the electrolyte.
Les problèmes de contraintes dans les micro-batteries « Li-ion » ou « Li-free » conduisent à des taux de courts-circuits de l'ordre de 90 % après 1000 cycles de charge / décharge (contre 5 % pour les anodes de lithium métallique) .The stress problems in the "Li-ion" or "Li-free" micro-batteries lead to short-circuit rates of the order of 90% after 1000 charge / discharge cycles (versus 5% for metallic lithium).
Ces problèmes ne se posent naturellement pas dans les batteries à électrolyte liquide ou sous forme de gel, qui peut être dispersé entre les électrodes, et dont des exemples sont donnés dans le document WO 99/65821.These problems naturally do not arise in liquid electrolyte or gel batteries, which can be dispersed between the electrodes, and examples of which are given in WO 99/65821.
Pour les batteries « tout solide », il a certes été proposé de modifier l' électrolyte pour le réaliser en plusieurs parties, en insérant en son sein de fines couches d'un autre matériau également conducteur ionique de lithium, pour limiter la diffusion éventuelle de fissures de part en part de la couche d' électrolyte (voir par exemple US-B-6 770 176) .For the "all solid" batteries, it has certainly been proposed to modify the electrolyte to make it into several parts, by inserting in it thin layers of another material also lithium ion conductor, to limit the possible diffusion of cracks from one side of the electrolyte layer (see for example US-B-6,770,176).
Une telle solution a cependant pour conséquence de multiplier le nombre de couches à déposer (avec au moins deux cibles différentes pour l' électrolyte) , ce qui augmente le coût du procédé de fabrication, et ne peut que dégrader la conductivité ionique de 1' électrolyte.However, such a solution has the consequence of multiplying the number of layers to be deposited (with at least two different targets for the electrolyte), which increases the cost of the manufacturing process, and can only degrade the ionic conductivity of the electrolyte. .
EXPOSÉ DE I/ INVENTIONSTATEMENT OF I / INVENTION
L'invention a pour but de pallier les problèmes de l'état de la technique quant à la stabilité du stockage et de la fourniture d'énergie. Plus particulièrement, l'invention préconise l'utilisation d'une nouvelle famille d'électrodes dont l'architecture et la conception permettent de supprimer les contraintes sur l' électrolyte lors de la charge et de la décharge de la micro-batterie.The object of the invention is to overcome the problems of the state of the art as regards the stability of the storage and the supply of energy. More particularly, the invention recommends the use of a new family of electrodes whose architecture and design make it possible to eliminate the stresses on the electrolyte during charging and discharging of the micro-battery.
En particulier, l'expansion de l'anode dans la direction perpendiculaire au substrat et à la couche d' électrolyte est supprimée. Sous un aspect, l'invention concerne une micro-batterie dont une électrode est constituée par des éléments d'électrodes indépendants, qui définissent ainsi des espaces sans électrode entre eux, ou des vides. De préférence, le taux de vide est supérieur à 50 %, par exemple de l'ordre de 80 %.In particular, the expansion of the anode in the direction perpendicular to the substrate and the electrolyte layer is suppressed. In one aspect, the invention relates to a micro-battery of which an electrode is constituted by independent electrode elements, which thus define spaces without an electrode between them, or voids. Preferably, the void ratio is greater than 50%, for example of the order of 80%.
L'électrode concernée est principalement l'anode, la cathode et l' électrolyte solide étant alors sous forme de couches de matériau, déposées plus ou moins uniformément. L'anode est de préférence composée de protubérances s' étendant en faisant saillie à partir d'un substrat collecteur de courant. En particulier pour une micro-batterie au lithium, l'anode est composée de nanotubes en carbone ou de nanofils en silicium. Ainsi, l' électrolyte solide repose sur l'extrémité libre des éléments d'anode ou, plus généralement, la couche d' électrolyte est maintenue au- dessus de cavités présentes entre les éléments de l'électrode concernée.The electrode concerned is mainly the anode, the cathode and the solid electrolyte then being in the form of layers of material deposited more or less uniformly. The anode is preferably composed of protuberances extending outwards from a current collector substrate. In particular for a lithium micro-battery, the anode is composed of carbon nanotubes or silicon nanowires. Thus, the solid electrolyte rests on the free end of the anode elements or, more generally, the electrolyte layer is maintained above cavities present between the elements of the electrode concerned.
Le dispositif de stockage d'énergie selon l'invention peut être encapsulé afin d'isoler les éléments échangeurs d'ion de l'extérieur.The energy storage device according to the invention can be encapsulated in order to isolate the ion exchange elements from the outside.
Selon un autre aspect, l'invention concerne une structure en nanofils ou en nanotubes sur un substrat conducteur qui peut être utilisée pour la fabrication de batteries au lithium, en tant qu' électrode.In another aspect, the invention relates to a nanowire or nanotube structure on a conductive substrate that can be used for the manufacture of lithium batteries as an electrode.
BRÈVE DESCRIPTION DES DESSINSBRIEF DESCRIPTION OF THE DRAWINGS
Les caractéristiques et avantages de l'invention seront mieux compris à la lecture de la description qui va suivre et en référence aux dessins annexés, donnés à titre illustratif et nullement limitatifs .The features and advantages of the invention will be better understood on reading the description which follows and with reference to the accompanying drawings, given by way of illustration and in no way limitative.
La figure 1 représente schématiquement un dispositif de stockage d'énergie selon l'invention. Les figures 2A et 2B montrent un dispositif selon l'invention respectivement en état de charge et en état déchargé. EXPOSE DETAILLE DE MODES DE REALISATION PARTICULIERSFIG. 1 schematically represents an energy storage device according to the invention. Figures 2A and 2B show a device according to the invention respectively in the state of charge and in discharged state. DETAILED DESCRIPTION OF PARTICULAR EMBODIMENTS
Tel que schématisé sur la figure 1, un dispositif de stockage d'énergie comprend, de façon habituelle, un substrat 12, des collecteurs cathode 14a et anode 14b (ce dernier pouvant être partie intégrante du substrat 12), une cathode 16, un électrolyte 18, et une anode 20. Par ailleurs, la micro-batterie 10 peut être protégée par une couche d' encapsulation 22 : les électrodes 16, 20, notamment lorsqu'elles sont au lithium, sont en effet très réactives à l'air, et il peut être avantageux d'encapsuler également les autres éléments 14, 18.As schematized in FIG. 1, an energy storage device comprises, in the usual way, a substrate 12, cathode collectors 14a and anode 14b (the latter may be an integral part of the substrate 12), a cathode 16, an electrolyte 18, and an anode 20. Moreover, the micro-battery 10 can be protected by an encapsulation layer 22: the electrodes 16, 20, especially when they are lithium, are indeed very reactive to the air, and it may be advantageous to encapsulate also the other elements 14, 18.
L'épaisseur totale de l'empilement 14, 16, 18, 20 est habituellement comprise entre 10 et 50 μm, avantageusement de l'ordre de 15 μm. Une telle micro-batterie 10, à l'exception de l'anode 20 qui sera décrite plus loin, peut être réalisée par toute technique connue, et en particulier avec différents matériaux : - Les collecteurs de courant 14 sont métalliques et peuvent être par exemple des dépôts à base de Pt, Cr, Au, Ti.The total thickness of the stack 14, 16, 18, 20 is usually between 10 and 50 microns, advantageously of the order of 15 microns. Such a micro-battery 10, with the exception of the anode 20 which will be described later, can be made by any known technique, and in particular with different materials: - The current collectors 14 are metallic and can be for example deposits based on Pt, Cr, Au, Ti.
- L'électrode positive 16 peut être notamment constituée de LiCoO2, LiNiO2, LiMn2O4, CuS, CuS2, WOyS2, TiOyS2, V2O5, déposés par technique classique, avec un éventuel recuit thermique pour augmenter la cristallisation et les capacités d'insertion (notamment pour les oxydes lithiés) .- The positive electrode 16 may be in particular made of LiCoO 2, LiNiO 2, LiMn 2 O 4, CuS, CuS 2, WOyS 2 TiOyS 2, V 2 O 5, deposited by conventional technique, with possible thermal annealing to increase crystallization and insertion capabilities (especially for lithiated oxides).
- L' électrolyte 18, qui est un bon conducteur ionique et un isolant électronique, est en général constitué d'un matériau vitreux à base d'oxyde de bore, de sels ou d'oxydes de lithium, en particulier un oxynitrure de lithium. De préférence, l' électrolyte est à base de phosphate, comme du LiPON, ou du LiSiPON. Dans un dispositif 10 selon l'invention, et tel qu'illustré sur la figure 1, l'anode 20 est par contre fabriquée selon une architecture qui permet d'éliminer toute expansion dans la direction perpendiculaire à la surface du substrat collecteur 14b, et à la surface adjacente d' électrolyte 18. Cet avantage est obtenu grâce à une électrode 20 comprenant des éléments d'électrode 24 espacés les uns des autres, et donc une anode 20 comprenant des « vides » 26 : lors de la décharge de la cathode 16, les ions lithium viennent gonfler les éléments d'anode 24, mais l'expansion est réalisée dans le vide résiduel 26. De ce fait, l' électrolyte 18, maintenu par les extrémités libres des éléments d'anode 24, ne subit plus de stress induit lors de la charge et de la décharge. De plus, ce vide permet aussi d'accueillir les ions Li+ non insérés dans l'anode et qui se déposent sous forme de lithium métal. Contrairement à la géométrie proche décrite dans le document WO 99/65821, l' électrolyte 18, sous forme de couche, n'est pas du tout sollicité par l'expansion car, à l'inverse du liquide ou d'un gel, l' électrolyte 18 ne s'imbrique pas dans le vide résiduel 26.Electrolyte 18, which is a good ionic conductor and an electronic insulator, is generally made of a vitreous material based on oxide boron, lithium salts or oxides, in particular lithium oxynitride. Preferably, the electrolyte is phosphate based, such as LiPON, or LiSiPON. In a device 10 according to the invention, and as shown in FIG. 1, the anode 20 is instead made according to an architecture that makes it possible to eliminate any expansion in the direction perpendicular to the surface of the collector substrate 14b, and at the adjacent surface of electrolyte 18. This advantage is obtained thanks to an electrode 20 comprising electrode elements 24 spaced from each other, and therefore an anode 20 comprising "voids" 26: during the discharge of the cathode 16, the lithium ions swell the anode elements 24, but the expansion is carried out in the residual vacuum 26. As a result, the electrolyte 18, held by the free ends of the anode elements 24, no longer undergoes stress induced during charging and discharging. In addition, this vacuum also accommodates Li + ions not inserted into the anode and which deposit in the form of lithium metal. Unlike the close geometry described in WO 99/65821, the electrolyte 18, in the form of a layer, is not at all stressed by the expansion because, unlike the liquid or a gel, the electrolyte 18 does not interfere with the residual vacuum 26.
Avantageusement, la proportion de vide 26 initialement présent compense l'augmentation volumique liée à l'insertion de lithium dans les éléments 24. Cette optimisation est propre à chaque matériau d'insertion, mais le taux de vide est habituellement supérieur à 50 %, de préférence à 80 %. Un exemple est schématisé sur les figures 2 : la figure 2A représente l'état chargé de la batterie 10, dans lequel l'anode 20 ne comprend pas d'ions Li+. Au cours de la charge, les ions lithium viennent s'insérer dans les éléments d'anode 24, les faisant gonfler, de sorte que le vide résiduel 26 diminue. Cependant, même dans l'état totalement déchargé de la batterie, schématisé en figure 2B, le volume global de la couche d'anode 20 n'a pas varié, seul le taux de vide 26 ayant diminué, de sorte que ni 1' électrolyte 18, ni la couche collectrice 14b, n'ont subi de contrainte.Advantageously, the proportion of void 26 initially present compensates for the volume increase related to the insertion of lithium into the elements 24. This optimization is specific to each insertion material, but the void ratio is usually greater than 50%, preferably 80%. An example is shown schematically in Figures 2: Figure 2A shows the charged state of the battery 10, wherein the anode 20 does not include Li + ions. During charging, the lithium ions are inserted into the anode elements 24, causing them to swell, so that the residual vacuum 26 decreases. However, even in the fully discharged state of the battery, shown schematically in FIG. 2B, the overall volume of the anode layer 20 has not changed, only the vacuum level 26 has decreased, so that neither the electrolyte 18, or the collecting layer 14b, have not been stressed.
Les matériaux utilisés pour réaliser les protubérances 24 sont des matériaux pouvant insérer le lithium (entre parenthèses est indiqué un taux de vide préféré) : germanium (80 %) , silicium-germanium (80 %) , argent, étain (70 %),... et surtout silicium (80 %) ou carbone (50 %) .The materials used to make the protuberances 24 are materials that can insert lithium (in parentheses is indicated a preferred vacuum ratio): germanium (80%), silicon-germanium (80%), silver, tin (70%) ,. .. and especially silicon (80%) or carbon (50%).
L'utilisation de structures nanométriques, c'est-à-dire de dimensions en coupe inférieures à quelques dizaines de nanomètres, en particulier les nanotubes et les nanofils, est préconisée dans l'obtention de résultats optimaux pour les problèmes d'expansion. En particulier, dans le cas d'éléments d'électrode 24 sous forme de nanotubes, un avantage supplémentaire réside dans le fait que la croissance de ces nanotubes permet de s'affranchir de l'étape de photo lithogravure, très difficile à cause de la précision requise. Toute technologie permettant d'obtenir des structures de ce type (diamètre de très faible dimension) peut être utilisée, comme le dépôt pleine couche puis la définition de petits motifs par photo lithogravure. En ce qui concerne le dépôt de nanotubes ou nanofibres, des techniques sont décrites par exemple dans les documents de Sharma S et coll. : « Diameter control of Ti-catalyzed silicon nanowires », J Crystal Growth 2004 ; 267 : 613-618, ou de Tang H et coll. : « High dispersion and electrocatalytic properties of platinum on well-aligned carbon nanotube arrays », Carbon 2004 ; 42 : 191-197.The use of nanometric structures, that is to say of dimensions in section of less than a few tens of nanometers, in particular nanotubes and nanowires, is recommended in obtaining optimal results for expansion problems. In particular, in the case of electrode elements 24 in the form of nanotubes, an additional advantage lies in the fact that the growth of these nanotubes makes it possible to dispense with the lithographic photo-etching step, which is very difficult because of the accuracy required. Any technology that makes it possible to obtain structures of this type (very small diameter dimension) can be used, as the full-layer deposit and then the definition of small patterns by lithography photo. As regards the deposition of nanotubes or nanofibers, techniques are described for example in the documents of Sharma S et al. : "Diameter control of Ti-catalyzed silicon nanowires", J Crystal Growth 2004; 267: 613-618, or Tang H et al. : "High dispersion and electrocatalytic properties of platinum on well-aligned carbon nanotube arrays", Carbon 2004; 42: 191-197.
Les éléments d'électrode 24 peuvent être positionnés de façon aléatoire, formant un réseau de type éponge. De préférence, les éléments d'électrodes sont sous la forme de protubérances saillantes 24 depuis la surface de substrat collecteur 14b, en particulier sous forme de réseau régulier, par exemple un réseau carré ou hexagonal. Le diamètre des protubérances 24 et le pas du réseau peuvent être optimisés pour obtenir le taux de vide recherché. En particulier, une croissance de nanofils ou de nanotubes est préférée, et le réseau obtenu peut être régulier, avec notamment des protubérances 24 faisant toutes saillie à partir de la surface de base 14b, selon un angle avantageusement le plus proche possible de 90°. Les protubérances 24 peuvent ainsi consister en un réseau de fils de 5 à 50 nm de diamètre espacés de 50 à 100 nm avec des hauteurs comprises entre 200 nm et 5 μm.The electrode elements 24 can be positioned randomly, forming a sponge type network. Preferably, the electrode elements are in the form of protruding projections 24 from the collector substrate surface 14b, in particular in the form of a regular grating, for example a square or hexagonal grating. The diameter of the protuberances 24 and the pitch of the network can be optimized to obtain the desired vacuum ratio. In particular, a growth of nanowires or nanotubes is preferred, and the grating obtained may be regular, with in particular protuberances 24 all protruding from the base surface 14b, at an angle advantageously as close as possible to 90 °. The protuberances 24 may thus consist of a network of son 5 to 50 nm in diameter spaced from 50 to 100 nm with heights of between 200 nm and 5 microns.
Par exemple, une micro-batterie 10 selon l'invention comprend un réseau de nanofils 24 de Si de diamètre de l'ordre de 10 nm, avec un taux de vide 26 de 80 %, déposé sur un substrat 12 isolant sur lequel a été déposé le collecteur de courant 14b, par exemple en Pt. La hauteur des nanotubes 24, ou épaisseur de l'anode 20, est de 1 μm. Ensuite est déposée une couche de 1 μm d' électrolyte 18 en LiPON par pulvérisation cathodique radiofréquence ; la cathode 16 est alors constituée d'une couche de LiCoO2 sur 3 μm, déposée par exemple par pulvérisation cathodique ou magnétron ou radiofréquence. Outre l'avantage d'éviter tout gonflement de l'anode 20, la structure d'électrode selon l'invention permet généralement d'augmenter les propriétés de conduction nécessaires au bon fonctionnement d'un matériau d'électrode de batterie. Par ailleurs, il est préférable que le dispositif 10 selon l'invention soit encapsulé in fine ; cette encapsulation peut avoir lieu pour un dispositif isolé, ou pour un ensemble de micro-batteries. L' encapsulation 22, qui a pour objet de protéger l'empilement actif 14, 16, 18, 20 de l'environnement extérieur et spécifiquement de l'humidité, peut être fabriquée à partir de céramique, de polymère (comme l'hexaméthyldisiloxane ou le parylène) ou de métal, ainsi que par une superposition de couches de ces différents matériaux.For example, a micro-battery 10 according to the invention comprises an array of nanowires 24 of Si with a diameter of the order of 10 nm, with a vacuum level of 26. 80%, deposited on an insulating substrate 12 on which was deposited the current collector 14b, for example Pt. The height of the nanotubes 24, or thickness of the anode 20, is 1 micron. Then a 1 μm layer of LiPON electrolyte 18 is deposited by radiofrequency cathodic sputtering; the cathode 16 is then made of a layer of LiCoO 2 over 3 microns, deposited for example by sputtering or magnetron or radiofrequency. In addition to the advantage of avoiding any swelling of the anode 20, the electrode structure according to the invention generally makes it possible to increase the conduction properties necessary for the proper functioning of a battery electrode material. Furthermore, it is preferable that the device 10 according to the invention is encapsulated in fine; this encapsulation can take place for an isolated device, or for a set of micro-batteries. The encapsulation 22, which is intended to protect the active stack 14, 16, 18, 20 from the external environment and specifically moisture, can be manufactured from ceramic, polymer (such as hexamethyldisiloxane or parylene) or metal, as well as by a superposition of layers of these different materials.
Il est à noter en outre que, grâce à l'invention, l' encapsulation, dont la couche, comme celle de l' électrolyte, est sensible aux problèmes de contraintes et de déformation, est facilitée : - il ne se produit pas de changement de volume du dispositif 10 ; - la non utilisation de lithium métallique permet de générer un matériau d'électrode moins sensible chimiquement et une surface, sur laquelle sont déposées les couches d' encapsulation 22, plus lisse. Bien que décrit pour l'anode, il est clair que la structure d'électrode selon l'invention peut également être utilisée pour la cathode, voire pour les deux électrodes.It should also be noted that, thanks to the invention, the encapsulation, whose layer, like that of the electrolyte, is sensitive to the problems of stress and deformation, is facilitated: - there is no change volume of the device 10; the non-use of metallic lithium makes it possible to generate a less chemically sensitive electrode material and a surface on which the encapsulation layers 22 are deposited, which is more smooth. Although described for the anode, it is clear that the electrode structure according to the invention can also be used for the cathode, or for both electrodes.
Parmi les applications visées, outre les cartes à puces et les étiquettes « intelligentes », qui permettent par exemple la mesure récurrente de paramètres par des implants miniaturisés, figurent l'alimentation de microsystèmes. Ces applications imposent que toutes les couches nécessaires au fonctionnement de la batterie soient fabriquées avec des techniques compatibles avec les procédés industriels de la microélectronique, ce qui est le cas du dispositif selon l'invention. Among the targeted applications, in addition to smart cards and "smart" tags, which allow, for example, the recurrent measurement of parameters by miniaturized implants, include the supply of microsystems. These applications require that all layers necessary for the operation of the battery be manufactured with techniques compatible with the industrial processes of microelectronics, which is the case of the device according to the invention.

Claims

REVENDICATIONS
1. Dispositif de stockage d'énergie (10) comprenant au moins une première électrode (20), composée d'une pluralité d'éléments d'électrode (24) définissant entre eux des espaces (26), une deuxième électrode (16) et un électrolyte (18) localisé entre les deux électrodes (16, 20), caractérisé en ce que 1' électrolyte (18) est solide.An energy storage device (10) comprising at least a first electrode (20), composed of a plurality of electrode elements (24) defining between them spaces (26), a second electrode (16) and an electrolyte (18) located between the two electrodes (16, 20), characterized in that the electrolyte (18) is solid.
2. Dispositif selon la revendication 1 dans lequel le volume occupé par les éléments d'électrode (24) est inférieur à 50 %, de préférence de l'ordre de 20 %, du volume défini par la première électrode (20) .2. Device according to claim 1 wherein the volume occupied by the electrode elements (24) is less than 50%, preferably of the order of 20%, of the volume defined by the first electrode (20).
3. Dispositif selon l'une des revendications 1 à 2 dans lequel la première électrode (20) est positionnée sur une surface d'un substrat collecteur (14b) .3. Device according to one of claims 1 to 2 wherein the first electrode (20) is positioned on a surface of a collector substrate (14b).
4. Dispositif selon la revendication 3 dans lequel les éléments d'électrode (24) forment un réseau de protubérances faisant saillie de la surface du substrat collecteur (14b) .4. Device according to claim 3 wherein the electrode elements (24) form an array of protuberances protruding from the surface of the collector substrate (14b).
5. Dispositif selon la revendication 4 dans lequel les protubérances (24) ont une surface incluse dans un cercle de diamètre compris entre 5 et 50 nm et sont espacées de 50 à 100 nm entre elles. 5. Device according to claim 4 wherein the protuberances (24) have a surface included in a circle of diameter between 5 and 50 nm and are spaced from 50 to 100 nm between them.
6. Dispositif selon la revendication 4 ou 5 dans lequel les protubérances (24) s'étendent sur 200 nm à 5 μm perpendiculairement à la surface du substrat collecteur (14b) .6. Device according to claim 4 or 5 wherein the protuberances (24) extend over 200 nm to 5 microns perpendicularly to the surface of the collector substrate (14b).
7. Dispositif selon l'une des revendications 1 à 6 dans lequel la première électrode est l'anode (20) .7. Device according to one of claims 1 to 6 wherein the first electrode is the anode (20).
8. Dispositif selon la revendication 7 dans lequel les éléments d'électrode (24) sont des nanotubes ou des nanofils en carbone ou en silicium.8. Device according to claim 7 wherein the electrode elements (24) are nanotubes or nanowires of carbon or silicon.
9. Dispositif selon l'une des revendications 1 à 8 dans lequel la deuxième électrode9. Device according to one of claims 1 to 8 wherein the second electrode
(16) et l' électrolyte (18) sont composés chacun d'une couche de matériau.(16) and the electrolyte (18) are each composed of a layer of material.
10. Dispositif selon l'une des revendications précédentes qui est une micro-batterie au lithium.10. Device according to one of the preceding claims which is a lithium micro-battery.
11. Dispositif selon la revendication 10 dans lequel l' électrolyte (18) est un oxynitrure de lithium.11. Device according to claim 10 wherein the electrolyte (18) is a lithium oxynitride.
12. Dispositif selon l'une des revendications précédentes comprenant en outre une couche d' encapsulation (22) qui isole les électrodes (16, 20) et l' électrolyte (18) de l'environnement extérieur. 12. Device according to one of the preceding claims further comprising an encapsulation layer (22) which isolates the electrodes (16, 20) and the electrolyte (18) from the external environment.
13. Utilisation d'un composant (20) constitué de nanofils ou de nanotubes (24) sur un substrat (14b) conducteur d'électricité dans la fabrication d'une électrode de batterie au lithium dont 1' électrolyte (18) est solide. 13. Use of a component (20) consisting of nanowires or nanotubes (24) on an electrically conductive substrate (14b) in the manufacture of a lithium battery electrode of which the electrolyte (18) is solid.
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