EP1811176A4 - VAKUUMABFÜHRVORRICHTUNG - Google Patents

VAKUUMABFÜHRVORRICHTUNG

Info

Publication number
EP1811176A4
EP1811176A4 EP05745938A EP05745938A EP1811176A4 EP 1811176 A4 EP1811176 A4 EP 1811176A4 EP 05745938 A EP05745938 A EP 05745938A EP 05745938 A EP05745938 A EP 05745938A EP 1811176 A4 EP1811176 A4 EP 1811176A4
Authority
EP
European Patent Office
Prior art keywords
exhaust device
vacuum exhaust
vacuum
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05745938A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1811176A1 (en
Inventor
Manabu Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of EP1811176A1 publication Critical patent/EP1811176A1/en
Publication of EP1811176A4 publication Critical patent/EP1811176A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Gasket Seals (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
EP05745938A 2004-06-03 2005-06-01 VAKUUMABFÜHRVORRICHTUNG Withdrawn EP1811176A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004165221A JP2005344610A (ja) 2004-06-03 2004-06-03 真空排気装置
PCT/JP2005/010044 WO2005119060A1 (ja) 2004-06-03 2005-06-01 真空排気装置

Publications (2)

Publication Number Publication Date
EP1811176A1 EP1811176A1 (en) 2007-07-25
EP1811176A4 true EP1811176A4 (en) 2008-11-19

Family

ID=35462974

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05745938A Withdrawn EP1811176A4 (en) 2004-06-03 2005-06-01 VAKUUMABFÜHRVORRICHTUNG

Country Status (3)

Country Link
EP (1) EP1811176A4 (https=)
JP (1) JP2005344610A (https=)
WO (1) WO2005119060A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008121787A (ja) * 2006-11-13 2008-05-29 Jtekt Corp 転がり軸受及び転がり軸受装置
WO2008059805A1 (en) 2006-11-13 2008-05-22 Jtekt Corporation Rolling bearing and rolling bearing device
DE102007010068B4 (de) * 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
WO2017013922A1 (ja) * 2015-07-17 2017-01-26 株式会社荏原製作所 非接触環状シール及びこれを備える回転機械

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
DE3716221A1 (de) * 1986-05-16 1987-11-26 Japan Atomic Energy Res Inst Turbomolekularpumpe
EP0280984A1 (fr) * 1987-02-25 1988-09-07 Alcatel Cit Pompe à vide, rotative
EP1043505A2 (de) * 1999-04-09 2000-10-11 Pfeiffer Vacuum GmbH Vakuumpumpe mit Gaslagerung
EP1231383A1 (en) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04107809A (ja) * 1990-08-27 1992-04-09 Fujitsu Ltd 半導体製造装置
JP2973141B2 (ja) * 1991-05-28 1999-11-08 東京エレクトロン株式会社 真空装置及びその制御方法
JP2002150957A (ja) * 2000-11-07 2002-05-24 Japan Atom Energy Res Inst 負イオン源電源供給機構
JP2002295581A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ダンパ、及び真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem
DE3716221A1 (de) * 1986-05-16 1987-11-26 Japan Atomic Energy Res Inst Turbomolekularpumpe
EP0280984A1 (fr) * 1987-02-25 1988-09-07 Alcatel Cit Pompe à vide, rotative
EP1043505A2 (de) * 1999-04-09 2000-10-11 Pfeiffer Vacuum GmbH Vakuumpumpe mit Gaslagerung
EP1231383A1 (en) * 2001-02-01 2002-08-14 Seiko Instruments Inc. Vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2005119060A1 *

Also Published As

Publication number Publication date
JP2005344610A (ja) 2005-12-15
EP1811176A1 (en) 2007-07-25
WO2005119060A1 (ja) 2005-12-15

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20070507

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DAX Request for extension of the european patent (deleted)
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Owner name: EDWARDS JAPAN LIMITED

A4 Supplementary search report drawn up and despatched

Effective date: 20081016

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/16 20060101ALI20081010BHEP

Ipc: F04B 37/16 20060101AFI20051216BHEP

Ipc: F04D 19/04 20060101ALI20081010BHEP

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