EP1811176A4 - Vakuumabführvorrichtung - Google Patents
VakuumabführvorrichtungInfo
- Publication number
- EP1811176A4 EP1811176A4 EP05745938A EP05745938A EP1811176A4 EP 1811176 A4 EP1811176 A4 EP 1811176A4 EP 05745938 A EP05745938 A EP 05745938A EP 05745938 A EP05745938 A EP 05745938A EP 1811176 A4 EP1811176 A4 EP 1811176A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- exhaust device
- vacuum exhaust
- vacuum
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Gasket Seals (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004165221A JP2005344610A (ja) | 2004-06-03 | 2004-06-03 | 真空排気装置 |
PCT/JP2005/010044 WO2005119060A1 (ja) | 2004-06-03 | 2005-06-01 | 真空排気装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1811176A1 EP1811176A1 (de) | 2007-07-25 |
EP1811176A4 true EP1811176A4 (de) | 2008-11-19 |
Family
ID=35462974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP05745938A Withdrawn EP1811176A4 (de) | 2004-06-03 | 2005-06-01 | Vakuumabführvorrichtung |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1811176A4 (de) |
JP (1) | JP2005344610A (de) |
WO (1) | WO2005119060A1 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008121787A (ja) * | 2006-11-13 | 2008-05-29 | Jtekt Corp | 転がり軸受及び転がり軸受装置 |
US8403566B2 (en) | 2006-11-13 | 2013-03-26 | Jtekt Corporation | Rolling bearing and rolling bearing apparatus |
DE102007010068A1 (de) * | 2007-02-28 | 2008-09-04 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
DE102013214662A1 (de) * | 2013-07-26 | 2015-01-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
WO2017013922A1 (ja) * | 2015-07-17 | 2017-01-26 | 株式会社荏原製作所 | 非接触環状シール及びこれを備える回転機械 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3032967A1 (de) * | 1980-09-02 | 1982-04-15 | Leybold-Heraeus GmbH, 5000 Köln | Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem |
DE3716221A1 (de) * | 1986-05-16 | 1987-11-26 | Japan Atomic Energy Res Inst | Turbomolekularpumpe |
EP0280984A1 (de) * | 1987-02-25 | 1988-09-07 | Alcatel Cit | Rotationsvakuumpumpe |
EP1043505A2 (de) * | 1999-04-09 | 2000-10-11 | Pfeiffer Vacuum GmbH | Vakuumpumpe mit Gaslagerung |
EP1231383A1 (de) * | 2001-02-01 | 2002-08-14 | Seiko Instruments Inc. | Vakuumpumpe |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04107809A (ja) * | 1990-08-27 | 1992-04-09 | Fujitsu Ltd | 半導体製造装置 |
JP2973141B2 (ja) * | 1991-05-28 | 1999-11-08 | 東京エレクトロン株式会社 | 真空装置及びその制御方法 |
JP2002150957A (ja) * | 2000-11-07 | 2002-05-24 | Japan Atom Energy Res Inst | 負イオン源電源供給機構 |
JP2002295581A (ja) * | 2001-03-28 | 2002-10-09 | Boc Edwards Technologies Ltd | ダンパ、及び真空ポンプ |
-
2004
- 2004-06-03 JP JP2004165221A patent/JP2005344610A/ja not_active Withdrawn
-
2005
- 2005-06-01 WO PCT/JP2005/010044 patent/WO2005119060A1/ja active Application Filing
- 2005-06-01 EP EP05745938A patent/EP1811176A4/de not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3032967A1 (de) * | 1980-09-02 | 1982-04-15 | Leybold-Heraeus GmbH, 5000 Köln | Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem |
DE3716221A1 (de) * | 1986-05-16 | 1987-11-26 | Japan Atomic Energy Res Inst | Turbomolekularpumpe |
EP0280984A1 (de) * | 1987-02-25 | 1988-09-07 | Alcatel Cit | Rotationsvakuumpumpe |
EP1043505A2 (de) * | 1999-04-09 | 2000-10-11 | Pfeiffer Vacuum GmbH | Vakuumpumpe mit Gaslagerung |
EP1231383A1 (de) * | 2001-02-01 | 2002-08-14 | Seiko Instruments Inc. | Vakuumpumpe |
Non-Patent Citations (1)
Title |
---|
See also references of WO2005119060A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP2005344610A (ja) | 2005-12-15 |
WO2005119060A1 (ja) | 2005-12-15 |
EP1811176A1 (de) | 2007-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20070507 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU MC NL PL PT RO SE SI SK TR |
|
DAX | Request for extension of the european patent (deleted) | ||
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: EDWARDS JAPAN LIMITED |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20081016 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: F04D 29/16 20060101ALI20081010BHEP Ipc: F04B 37/16 20060101AFI20051216BHEP Ipc: F04D 19/04 20060101ALI20081010BHEP |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: EDWARDS JAPAN LIMITED |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Effective date: 20090603 |